CN115354281A - Crucible nozzle, crucible and evaporation source - Google Patents

Abstract

The utility model provides a crucible nozzle, crucible and coating by vaporization source belongs to and shows technical field, and it can solve current crucible nozzle flexibility relatively poor, causes the problem of jam easily. The crucible nozzle of the present disclosure includes: a nozzle body, a stationary annular structure, a drive annular structure, and a plurality of vanes; the fixed annular structure is fixed at the opening of the nozzle main body; the driving annular structure and the fixed annular structure are arranged oppositely and are provided with a plurality of guide holes; a plurality of blades are positioned between the fixed annular structure and the driving annular structure; each blade is fixedly connected with the fixed annular structure through the fixed shaft and movably connected with the guide hole of the driving annular structure through the guide shaft, and the blades are configured to rotate around the fixed shaft under the driving of the driving annular structure so as to adjust the opening and closing degree of the opening of the nozzle body.

Description

Crucible nozzle, crucible and evaporation source

Technical Field

The disclosure belongs to the technical field of display, and particularly relates to a crucible nozzle, a crucible and an evaporation source.

Background

In a manufacturing process of an Organic Light-Emitting Diode (OLED) display panel, a plurality of functional layers are required to be formed by vacuum thermal evaporation, specifically, a material is placed in a crucible, then the crucible is heated in a vacuum environment, the material in the crucible is gasified and ejected from the crucible, and the ejected gaseous material meets a glass plate with a lower temperature through a certain free path, so that a film layer can be formed on the glass plate.

At present, in order to realize that the evaporation material has enough free path (namely, enough far spraying), the crucible opening is not completely opened normally, and a crucible nozzle is generally arranged to control the pressure inside the crucible. However, the structural design of the current crucible nozzle is fixed, resulting in less material being deposited on the glass plate and greater material waste although the range of the vaporized material to be sprayed is larger. Meanwhile, the injection amount of the evaporation material is fixed and cannot be adjusted every time, so that the flexibility of evaporation is poor. Furthermore, evaporation materials are likely to remain in the crucible nozzle after a long period of evaporation, which causes the crucible nozzle to be clogged, and affects the evaporation efficiency.

Disclosure of Invention

The embodiment of the disclosure aims to at least solve one technical problem in the prior art, and provides a crucible nozzle, a crucible and an evaporation source.

In a first aspect, embodiments of the present disclosure provide a crucible nozzle, comprising: a nozzle body, a fixed annular structure, a driving annular structure, and a plurality of vanes;

the fixed annular structure is fixed at the opening of the nozzle main body;

the driving annular structure is opposite to the fixed annular structure and is provided with a plurality of guide holes;

the plurality of vanes are located between the stationary ring structure and the drive ring structure;

each blade is fixedly connected with the fixed annular structure through a fixed shaft, is movably connected with the guide hole of the driving annular structure through a guide shaft, and is configured to rotate around the fixed shaft under the driving of the driving annular structure so as to adjust the opening and closing degree of the opening of the nozzle body.

Optionally, the fixed ring structure comprises: the heating wire comprises a first sub-annular structure, a second sub-annular structure and a heating wire, wherein the first sub-annular structure and the second sub-annular structure are oppositely arranged, and the heating wire is positioned between the first sub-annular structure and the second sub-annular structure; the crucible nozzle further comprises: a direct current power supply;

the direct current power supply is electrically connected with the heating wire through a contact electrode.

Optionally, a driven gear is arranged on the side of the driving annular structure; the crucible nozzle further comprises: the servo motor, the coupler and the driving gear;

one end of the coupler is connected with the servo motor, and the other end of the coupler is connected with the driving gear;

the driving gear is meshed with the driven gear.

Optionally, the crucible nozzle further comprises: the device comprises a baffle plate, an origin sensor and a limit sensor;

the baffle plate is connected with the coupler and rotates in an area defined by the origin sensor and the limit sensor.

Optionally, a central angle of the origin sensor corresponding to an area defined by the limit sensor is 30 degrees to 45 degrees.

Optionally, the material of the plurality of blades comprises: pyrolyzing boron nitride.

Optionally, the nozzle body is hourglass shaped.

In a second aspect, embodiments of the present disclosure provide a crucible comprising a crucible nozzle as provided above.

Optionally, the crucible further comprises: a crucible body and a crucible cover;

the crucible cover is positioned on the crucible main body and connected with the nozzle main body.

In a third aspect, embodiments of the present disclosure provide an evaporation source comprising a crucible as provided above.

Drawings

Fig. 1 is a schematic structural diagram of a just-after nozzle according to an embodiment of the present disclosure.

FIG. 2 is a schematic view showing the structure of each component of the crucible nozzle shown in FIG. 1.

Fig. 3a is a schematic view illustrating an operating principle of a crucible nozzle according to an embodiment of the present disclosure.

Fig. 3b is a schematic view of the operation principle of another crucible nozzle provided in the embodiment of the present disclosure.

Detailed Description

For a better understanding of the technical aspects of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.

Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, means that the element or item preceding the word comprises the element or item listed after the word and its equivalent, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.

Fig. 1 is a schematic structural view of a just-after nozzle provided by an embodiment of the present disclosure, and fig. 2 is a schematic structural view of each component of the crucible nozzle shown in fig. 1, and as shown in fig. 1 and 2, the crucible nozzle includes: a nozzle body 101, a fixed ring structure 102, a driving ring structure 103, and a plurality of vanes 104; the fixed ring structure 102 is fixed at the opening of the nozzle body 101; the driving annular structure 103 is arranged opposite to the fixed annular structure 102 and is provided with a plurality of guide holes v; a plurality of vanes 104 are located between the stationary ring structure 102 and the driving ring structure 103; each vane 104 is fixedly connected to the fixed ring structure 102 by a fixed shaft a, and movably connected to the guide hole v of the driving ring structure 103 by a guide shaft b, and is configured to rotate around the fixed shaft a under the driving of the driving ring structure 103 to adjust the opening and closing degree of the opening of the nozzle body 101.

The nozzle body 101 can eject the evaporation material from a crucible (not shown in the figure) with a fixed opening size. The stationary ring structure 102 may be fixedly attached to the nozzle body 101 and generally has a size larger than the opening of the crucible body 101. The plurality of vanes 104 may be fixedly coupled to the fixed ring structure 102 by a fixed axis a and enclose an opening of the nozzle body 101, which may rotate along the fixed axis a. Meanwhile, the plurality of blades 104 may be movably connected with the guide hole b of the driving ring structure 103 through the guide shaft b. Specifically, the number of the blades 104 may be 5, and the number of the corresponding fixed shaft a, the corresponding guide shaft b, and the corresponding guide hole v is also 5. Of course, the number of the active carbon atoms can be other values, and the active carbon atoms are not listed.

When the driving ring structure 103 rotates, the plurality of blades 104 can be driven to rotate along the fixed shaft and rotate according to the direction of the guiding hole v, so that the plurality of blades 104 can be enclosed together or dispersed. As shown in fig. 3a, when the driving ring structure 103 rotates in the counterclockwise direction, the plurality of vanes 104 may approach each other and surround each other, and the opening formed therebetween may gradually decrease, and when the driving ring structure 103 rotates in the clockwise direction, the plurality of vanes 104 may move away from each other, and the opening formed therebetween may gradually increase, so as to adjust the opening and closing degree of the opening of the nozzle body 101.

The crucible nozzle provided by the embodiment of the disclosure can drive the plurality of blades 104 to rotate along the fixed shaft a by driving the ring structure 103 to rotate, so as to adjust the opening and closing degree of the opening of the nozzle body 102, and control the pressure inside a crucible (not shown in the figure) by adjusting the opening and closing degree of the opening of the nozzle body 102, thereby reducing the waste of evaporation materials in the crucible and improving the utilization rate of the evaporation materials. Meanwhile, since the plurality of blades 104 can rotate, the sprayed evaporation material can be opened and closed by pressing between the plurality of blades 104 to fall off, or the top ends of the plurality of blades 104 are pressed, so that the excessive evaporation material can be prevented from blocking the opening of the nozzle body 101, and the preparation efficiency can be improved. In addition, the opening and closing degree of the plurality of blades 104 can be adjusted, so that the flexibility of the crucible nozzle is increased, different materials can be evaporated in different areas by using the same crucible nozzle and crucible (as shown in fig. 3 b), and therefore, the flexibility of an evaporation process can be improved, the preparation efficiency is improved, and the preparation cost is saved.

In some embodiments, as shown in fig. 2, the stationary ring structure 102 comprises: a first sub-annular structure 1021 and a second sub-annular structure 1022 which are oppositely arranged, and a heating wire 1023 which is positioned between the first sub-annular structure 1021 and the second sub-annular structure 1022; the crucible nozzle further comprises: a direct-current power supply 105; the direct current power supply 105 is electrically connected to the heating wire 1023 through the contact electrode 106.

The first and second sub-loop structures 1021 and 1022 may fix the heating wire 1023, and the direct current power source 105 may be electrically connected with the heating wire 1023 through the contact electrode 106 and input current to the heating wire 1023, so that heat generated by the heating wire is generated. The heating wire 1023 may heat the plurality of blades 104 so that the evaporation material remaining on the plurality of blades 104 is evaporated again, avoiding the remaining evaporation material from clogging the opening of the nozzle main body 101.

In some embodiments, as shown in fig. 1, the side of the driving ring structure 103 is provided with a driven gear 107; the crucible nozzle further comprises: a servo motor 108, a coupling 109, and a drive gear 110; one end of the coupler 106 is connected with the servo motor 108, and the other end is connected with the driving gear 110; the drive gear 110 is in meshing engagement with the driven gear 107.

The servo motor 108 can rotate the driving gear 110 via the coupling 109 to rotate the driven gear 107. The servo motor 108 has high precision, and can improve the rotation precision of the driving annular structure 103, thereby improving the opening and closing precision of the plurality of blades 104, improving the spraying precision of the evaporation material, and further improving the uniformity of a film layer formed by evaporation.

In some embodiments, as shown in fig. 1, the crucible nozzle further comprises: a stopper 111, an origin sensor 112, and a limit sensor 113; the flap 111 is connected to the coupling 109 and rotates within an area defined by the origin sensor 112 and the limit sensor 113.

Since the pressure in the crucible and the injection range of the material are strictly defined according to the requirements of the evaporation process conditions, and when the aperture ratio is determined to be the optimum condition, the position is not changed in the evaporation process, the opening and closing positions of the plurality of blades 104 need to be fixed, and an accurate quantification standard is provided. The specific operation is as follows: the position of the flap 111 is detected by the origin sensor 112, and this position is a mechanical origin, and the position of the servo motor 108 is recorded as 0 on a Controller (PLC). On the basis, the servo motor 108 rotates, when the blocking piece 111 moves to the position of the limit sensor 113, the limit sensor 113 is triggered to work, the PLC commands the servo motor 108 to stop, the action cannot be continued, and the mechanical limit which can be reached by driving the annular structure 103 is reached. Through the control of two sensors, the range of motion of servo motor 108 can be restricted to certain range, and in this range, every position that servo motor 108 was located can both be accurately recorded into a value, under the condition of confirming the best aperture ratio, records this value as effective technological parameter, uses to set up with this parameter every time, can guarantee that aperture ratio is the best aperture ratio every time.

In some embodiments, the central angle of the area defined by the origin sensor 112 and the limit sensor 113 is 30 to 45 degrees.

The central angle of the area defined by the origin sensor 112 and the limit sensor 113 is 30 degrees to 45 degrees, which can ensure that the blade 104 rotates in the range of 30 degrees to 45 degrees, for example, when the number of blades is 5, the maximum rotation angle of the blade 104 is 30 degrees. In practical applications, the angle of the central angle corresponding to the area defined by the origin sensor 112 and the limit sensor 113 may be determined according to the number of the blades 104, so as to ensure the optimal aperture ratio.

In some embodiments, the material of the plurality of blades 104 includes: pyrolyzing boron nitride.

The plurality of blades 104 may be made of pyrolytic boron nitride, which prevents the blades 104 from thermal expansion and cooling and chemical reaction at a high temperature, so as to ensure the stability of the evaporation process.

In some embodiments, the nozzle body 101 is hourglass shaped.

The nozzle body 101 has an hourglass shape, and the bottom thereof has a larger diameter so as to fit the crucible, thereby ensuring the injection amount of the evaporation material. The smaller diameter of the middle part can ensure that the inside of the crucible has larger pressure, so that the evaporation material can be sprayed with larger free path. The diameter of the top portion is substantially equal to the diameter of the bottom portion, thereby ensuring a stable connection with the stationary ring structure 102.

In a second aspect, embodiments of the present disclosure provide a crucible including a crucible nozzle as provided in any of the above embodiments. The crucible further comprises: a crucible body and a crucible cover; the crucible cover is positioned on the crucible main body and is connected with the nozzle main body.

In the crucible provided by the embodiment of the present disclosure, the crucible cover can cover the crucible main body and is connected to the nozzle main body, the plurality of blades 104 can be driven to rotate along the fixed shaft a by the rotation of the driving ring structure 103, so as to adjust the opening and closing degree of the opening of the nozzle main body 102, and the pressure inside the crucible (not shown in the figure) can be controlled by adjusting the opening and closing degree of the opening of the nozzle main body 102, thereby reducing the waste of the evaporation material in the crucible and improving the utilization rate of the evaporation material. Meanwhile, since the plurality of blades 104 can rotate, the sprayed evaporation material can be opened and closed by pressing between the plurality of blades 104 to fall off, or the top ends of the plurality of blades 104 are pressed, so that the excessive evaporation material can be prevented from blocking the opening of the nozzle body 101, and the preparation efficiency can be improved. In addition, the opening and closing degree of the plurality of blades 104 can be adjusted, so that the flexibility of the crucible nozzle is increased, different materials can be evaporated in different areas by using the same crucible nozzle and crucible (as shown in fig. 3 b), and therefore, the flexibility of an evaporation process can be improved, the preparation efficiency is improved, and the preparation cost is saved.

In a third aspect, embodiments of the present disclosure provide an evaporation source including a crucible as provided in any of the above embodiments. The realization principle and the beneficial effect thereof are the same as those of the crucible nozzle and the crucible, and are not repeated herein.

It will be understood that the above embodiments are merely exemplary embodiments employed to illustrate the principles of the present disclosure, and the present disclosure is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the disclosure, and these changes and modifications are to be considered within the scope of the disclosure.

Claims (10)

1. A crucible nozzle, characterized in that the crucible nozzle comprises: a nozzle body, a fixed annular structure, a driving annular structure, and a plurality of vanes;

the fixed annular structure is fixed at the opening of the nozzle main body;

the driving annular structure is opposite to the fixed annular structure and is provided with a plurality of guide holes;

the plurality of vanes are located between the stationary ring structure and the drive ring structure;

each blade is fixedly connected with the fixed annular structure through a fixed shaft, movably connected with the guide hole of the driving annular structure through a guide shaft, and driven by the driving annular structure to rotate around the fixed shaft so as to adjust the opening and closing degree of the opening of the nozzle body.

2. The crucible nozzle of claim 1, wherein the fixed ring structure comprises: the heating wire comprises a first sub-annular structure, a second sub-annular structure and a heating wire, wherein the first sub-annular structure and the second sub-annular structure are oppositely arranged, and the heating wire is positioned between the first sub-annular structure and the second sub-annular structure; the crucible nozzle further comprises: a direct current power supply;

the direct current power supply is electrically connected with the heating wire through a contact electrode.

3. The crucible nozzle of claim 1, wherein the side of the driving ring structure is provided with a driven gear; the crucible nozzle further comprises: the servo motor, the coupler and the driving gear;

one end of the coupler is connected with the servo motor, and the other end of the coupler is connected with the driving gear;

the driving gear is meshed with the driven gear.

4. The crucible nozzle of claim 3, further comprising: the device comprises a baffle plate, an origin sensor and a limit sensor;

the baffle plate is connected with the coupler and rotates in an area defined by the origin sensor and the limit sensor.

5. The crucible nozzle of claim 4, wherein the central angle of the origin sensor corresponding to the area defined by the limit sensor is 30 to 45 degrees.

6. The crucible nozzle of claim 1, wherein the material of the plurality of vanes comprises: pyrolyzing boron nitride.

7. The crucible nozzle of claim 1, wherein the nozzle body is hourglass shaped.

8. Crucible, characterized in that it comprises a crucible nozzle according to any of claims 1 to 7.

9. The crucible of claim 8, further comprising: a crucible body and a crucible cover;

the crucible cover is positioned on the crucible main body and connected with the nozzle main body.

10. An evaporation source comprising the crucible according to any one of claims 8 to 9.

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