JP2021135403A - ペリクル膜、ペリクル、膜、グラフェンシート及びその製造方法 - Google Patents
ペリクル膜、ペリクル、膜、グラフェンシート及びその製造方法 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 105
- 229910021389 graphene Inorganic materials 0.000 title claims description 86
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000002834 transmittance Methods 0.000 claims abstract description 18
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- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 14
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 239000011733 molybdenum Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052735 hafnium Inorganic materials 0.000 claims description 7
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 239000010955 niobium Substances 0.000 claims description 6
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 6
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 239000011248 coating agent Substances 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- 238000013461 design Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1
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- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
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Abstract
Description
を含むグラフェンシートの製造方法が提供される。
図1において、ペリクル1が取り付けられたフォトマスク2は、EUVリソグラフィ用の反射型フォトマスクである。ペリクル1は、他のフォトマスクに取り付けてもよい。
フレーム11は、図示しない接着剤を介して、フォトマスク2に取り付けられている。フレーム11は、ペリクル膜12をフォトマスク2から離間させるスペーサとしての役割を果たす。フレーム11は、例えば、アルミニウムからなる。
図4に示す構造は、基材31と金属層32とマスク層33とを含んでいる。
図6は、グラフェンシートの製造方法の他の例における一工程を概略的に示す断面図である。図7は、図6の工程の次工程を概略的に示す断面図である。
例えば、連続膜としてのグラフェンシートを作製し、これにパンチング加工又はレーザビーム照射により開口部を形成する。レーザビーム照射には、例えば、ピコ秒レーザやナノ秒レーザなどの極短パルスレーザを使用する。このようにしてグラフェンシートを作製すること以外は、上記と同様の方法により、各層120がグラフェンシートからなるペリクル膜12を得る。
I/I0=e−μx
上記等式において、I0は入射光の強度であり、Iは透過光の強度であり、eは自然対数の底(ネイピア数)であり、xは光路長である。
図8は、図1のペリクルに使用可能なペリクル膜の他の例を概略的に示す断面図である。図8に示すペリクル膜12は、開口部120Hの幅又は径がより小さいこと以外は、図1乃至図3等を参照しながら説明したペリクル膜12と同様である。
層120の1以上と層120の他の1以上とで、開口部120Hは、形状及び寸法が互いに等しくてもよく、形状及び寸法の少なくとも一方が異なっていてもよい。
層120は、開口部120Hを1つのみ有していてもよい。例えば、層120は、渦巻線のように一筆書きで描けるパターンを形成している開口部120Hを1つのみ有していてもよい。
Claims (26)
- 互いに積層された複数の層を備え、前記複数の層の1以上に、幅又は径が10乃至500nmの範囲内にある1以上の開口部が設けられているペリクル膜。
- 互いに積層された複数の層を備え、前記複数の層の2以上に1以上の開口部が設けられているペリクル膜。
- 前記複数の層は、グラフェン、カーボンナノチューブ、ポリシリコン及び窒化珪素からなる群より選択される材料からなる請求項1又は2に記載のペリクル膜。
- 前記複数の層は、ジルコニウム、ニオブ、モリブデン、タンタル、ハフニウム、スカンジウム、チタン、バナジウム、及びクロムからなる群より選択される1以上の金属元素を含んだ材料からなる請求項1又は2に記載のペリクル膜。
- 互いに積層された複数の層を備え、前記複数の層は、グラフェン及びカーボンナノチューブからなる群より選択される材料からなり、前記複数の層の1以上に1以上の開口部が設けられているペリクル膜。
- 前記1以上の開口部は、幅又は径が500nm以下である請求項1乃至5の何れか1項に記載のペリクル膜。
- 前記複数の層の前記1以上の少なくとも1つは、前記開口部が複数設けられ、それら開口部が規則的に配置された請求項1乃至6の何れか1項に記載のペリクル膜。
- 前記複数の層の前記1以上の少なくとも1つは、前記開口部が複数設けられ、それら開口部は形状が等しい請求項1乃至7の何れか1項に記載のペリクル膜。
- 前記複数の層の2以上に前記1以上の開口部が設けられ、前記1以上の開口部が設けられた前記2以上の層のうち互いに隣接したものは、前記1以上の開口部の位置が異なっている請求項1乃至8の何れか1項に記載のペリクル膜。
- 前記複数の層の1以上には開口部が設けられていない請求項1乃至9の何れか1項に記載のペリクル膜。
- 前記開口部が設けられていない前記1以上の層は、前記ペリクル膜の最表面層の少なくとも一方を含んだ請求項10に記載のペリクル膜。
- 互いに積層された複数のグラフェンシートを備えた請求項1乃至11の何れか1項に記載のペリクル膜。
- 互いに積層された複数のグラフェンシートからなり、見かけ密度が真密度と比較してより小さいペリクル膜。
- 互いに積層された複数のグラフェンシートからなる膜であって、前記膜と同じ厚さを有し、連続膜としてのグラフェンシートからなる積層体と比較して透過率がより高いペリクル膜。
- 厚さが200nm以下である請求項1乃至14の何れか1項に記載のペリクル膜。
- 請求項1乃至15の何れか1項に記載のペリクル膜と、
前記ペリクル膜を支持したフレームと
を備えたペリクル。 - 互いに積層された複数のグラフェンシートを備え、前記複数のグラフェンシートの1以上に1以上の開口部が設けられている膜。
- 前記1以上の開口部は、幅又は径が500nm以下である請求項17に記載の膜。
- 前記複数のグラフェンシートの2以上に前記1以上の開口部が設けられ、前記1以上の開口部が設けられた前記2以上のグラフェンシートのうち互いに隣接したものは、前記1以上の開口部の位置が異なっている請求項17又は18に記載の膜。
- 前記複数のグラフェンシートの1以上には開口部が設けられていない請求項17乃至19の何れか1項に記載の膜。
- 前記開口部が設けられていない前記1以上のグラフェンシートは、前記膜の最表面層の少なくとも一方を含んだ請求項20に記載の膜。
- 互いに積層された複数のグラフェンシートからなり、見かけ密度が真密度と比較してより小さい膜。
- 互いに積層された複数のグラフェンシートからなる膜であって、前記膜と同じ厚さを有し、連続膜としてのグラフェンシートからなる積層体と比較して透過率がより高い膜。
- 1以上の開口部が設けられたグラフェンシート。
- 金属層上にその一部を覆うマスク層を形成することと、
前記金属層のうち前記マスク層で覆われていない部分でグラフェンを生成させることと
を含むグラフェンシートの製造方法。 - 1以上の開口を有する金属層上でグラフェンを生成させることを含むグラフェンシートの製造方法。
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JP2020031985A JP2021135403A (ja) | 2020-02-27 | 2020-02-27 | ペリクル膜、ペリクル、膜、グラフェンシート及びその製造方法 |
EP21760686.2A EP4113208A4 (en) | 2020-02-27 | 2021-02-24 | PELLICLE FILM, PELLICLE; FILM, GRAPHENE SURFACE AND METHOD FOR PRODUCING THE SAME |
CN202180013586.3A CN115087926A (zh) | 2020-02-27 | 2021-02-24 | 防护膜、防护膜组件、膜、石墨烯片及其制造方法 |
PCT/JP2021/006852 WO2021172354A1 (ja) | 2020-02-27 | 2021-02-24 | ペリクル膜、ペリクル、膜、グラフェンシート及びその製造方法 |
KR1020227030607A KR20220146493A (ko) | 2020-02-27 | 2021-02-24 | 펠리클막, 펠리클, 막, 그래핀 시트 및 그 제조 방법 |
TW110106898A TW202201121A (zh) | 2020-02-27 | 2021-02-26 | 薄皮膜、光罩護膜、膜、石墨烯片及其製造方法 |
US17/894,329 US20220413379A1 (en) | 2020-02-27 | 2022-08-24 | Pellicle membrane, pellicle, membrane, graphene sheet, and method for producing the graphene sheet |
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