JP2021130864A5 - - Google Patents

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Publication number
JP2021130864A5
JP2021130864A5 JP2020028222A JP2020028222A JP2021130864A5 JP 2021130864 A5 JP2021130864 A5 JP 2021130864A5 JP 2020028222 A JP2020028222 A JP 2020028222A JP 2020028222 A JP2020028222 A JP 2020028222A JP 2021130864 A5 JP2021130864 A5 JP 2021130864A5
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JP
Japan
Prior art keywords
frequency power
plasma
unit
temperature
physical quantity
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JP2020028222A
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English (en)
Japanese (ja)
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JP2021130864A (ja
JP7437965B2 (ja
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Priority claimed from JP2020028222A external-priority patent/JP7437965B2/ja
Priority to JP2020028222A priority Critical patent/JP7437965B2/ja
Priority to CN202110172174.6A priority patent/CN113299530B/zh
Priority to TW110104685A priority patent/TWI889755B/zh
Priority to KR1020210020440A priority patent/KR20210106910A/ko
Priority to US17/177,900 priority patent/US12400844B2/en
Publication of JP2021130864A publication Critical patent/JP2021130864A/ja
Publication of JP2021130864A5 publication Critical patent/JP2021130864A5/ja
Publication of JP7437965B2 publication Critical patent/JP7437965B2/ja
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JP2020028222A 2020-02-21 2020-02-21 プラズマ処理装置及び部材温度判定方法 Active JP7437965B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020028222A JP7437965B2 (ja) 2020-02-21 2020-02-21 プラズマ処理装置及び部材温度判定方法
CN202110172174.6A CN113299530B (zh) 2020-02-21 2021-02-08 等离子体处理装置和构件温度判定方法
TW110104685A TWI889755B (zh) 2020-02-21 2021-02-08 電漿處理裝置及構件溫度判定方法
KR1020210020440A KR20210106910A (ko) 2020-02-21 2021-02-16 플라스마 처리 장치 및 부재 온도 판정 방법
US17/177,900 US12400844B2 (en) 2020-02-21 2021-02-17 Plasma processing apparatus and method of measuring temperature of members

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020028222A JP7437965B2 (ja) 2020-02-21 2020-02-21 プラズマ処理装置及び部材温度判定方法

Publications (3)

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JP2021130864A JP2021130864A (ja) 2021-09-09
JP2021130864A5 true JP2021130864A5 (enExample) 2022-11-28
JP7437965B2 JP7437965B2 (ja) 2024-02-26

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JP2020028222A Active JP7437965B2 (ja) 2020-02-21 2020-02-21 プラズマ処理装置及び部材温度判定方法

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US (1) US12400844B2 (enExample)
JP (1) JP7437965B2 (enExample)
KR (1) KR20210106910A (enExample)
CN (1) CN113299530B (enExample)
TW (1) TWI889755B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025523344A (ja) * 2022-06-07 2025-07-23 ラム リサーチ コーポレーション 温度推定に基づく高周波システム保護
WO2025004430A1 (ja) * 2023-06-27 2025-01-02 東京エレクトロン株式会社 プラズマ処理装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1131599A (ja) * 1997-07-08 1999-02-02 Sumitomo Metal Ind Ltd プラズマ処理装置における予熱方法及びプラズマ処理装置
JP4294775B2 (ja) 1998-12-01 2009-07-15 東京エレクトロン株式会社 マイクロ波プラズマ処理装置
JP3534660B2 (ja) 1999-09-13 2004-06-07 株式会社日立製作所 プラズマ処理装置
JP4024053B2 (ja) * 2002-02-08 2007-12-19 キヤノンアネルバ株式会社 高周波プラズマ処理方法及び高周波プラズマ処理装置
US7794615B2 (en) * 2005-03-31 2010-09-14 Tokyo Electron Limited Plasma processing method and apparatus, and autorunning program for variable matching unit
WO2010080587A1 (en) * 2008-12-18 2010-07-15 Robertson Transformer Co. Variable load line gas curve intercept method to optimize system efficiency
JP5203986B2 (ja) 2009-01-19 2013-06-05 東京エレクトロン株式会社 フォーカスリングの加熱方法、プラズマエッチング方法、プラズマエッチング装置及びコンピュータ記憶媒体
JP5657262B2 (ja) * 2009-03-27 2015-01-21 東京エレクトロン株式会社 プラズマ処理装置
US10325759B2 (en) * 2012-02-22 2019-06-18 Lam Research Corporation Multiple control modes
JP6488150B2 (ja) * 2015-02-27 2019-03-20 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ処理方法
JP6793019B2 (ja) * 2016-11-28 2020-12-02 東京エレクトロン株式会社 プラズマ処理装置

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