JP2021126717A - Surface-coating cutting tool - Google Patents

Surface-coating cutting tool Download PDF

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JP2021126717A
JP2021126717A JP2020021536A JP2020021536A JP2021126717A JP 2021126717 A JP2021126717 A JP 2021126717A JP 2020021536 A JP2020021536 A JP 2020021536A JP 2020021536 A JP2020021536 A JP 2020021536A JP 2021126717 A JP2021126717 A JP 2021126717A
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JP7375592B2 (en
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英利 淺沼
Hidetoshi Asanuma
英利 淺沼
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Mitsubishi Materials Corp
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Abstract

To provide a cutting tool that exhibits excellent welding peeling resistance in high speed cutting of Ti alloy, Ni alloy, etc., and exhibits cutting performance for a long period of time.SOLUTION: In a surface-coating cutting tool, a hard coating layer has: a hard film with an average thickness of 0.5 to 10.0 μm, a W film with an average thickness of 10 to 500 nm right above a tool base body in an interface area between the tool base body and the hard film, and a composition gradient film on right above the W film and in contact with the hard film; the average composition of the hard film is (Ti(1-x-y)AlxMy)N, 0.40≤x≤0.90, and 0.00≤y≤0.20 (M is a group of one of 4 to 6, and one or more of Si, Ce, La, Hf, Nd); the composition gradient film has an average thickness of 10 nm or more and is equal to or less than 1/3 of the hard coating layer, and its average composition is(Ti(1-p-q)AlpMq)N, 0.10≤p<0.40, and 0.00≤q≤0.20 (M is a group of one of 4 to 6, one or more of Si, Ce, La, Hf, Nd); and p increases toward the hard film from a boundary with the W film.SELECTED DRAWING: Figure 1

Description

本発明は、チタン合金、ニッケル合金等の高速切削加工に用いても、硬質皮膜層が優れた耐溶着性、耐チッピング性を有し、長期の使用にわたって優れた切削性能を発揮する表面被覆切削工具(以下、被覆工具ということがある)に関するものである。 According to the present invention, even when used for high-speed cutting of titanium alloys, nickel alloys, etc., the hard film layer has excellent welding resistance and chipping resistance, and surface coating cutting that exhibits excellent cutting performance over a long period of use. It relates to a tool (hereinafter sometimes referred to as a covering tool).

被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工のためにバイトの先端部に着脱自在に取り付けて用いられるインサート、被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、またインサートを着脱自在に取り付けてソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。 Covering tools are used for inserts that are detachably attached to the tip of a cutting tool for turning and planing of various types of steel and cast iron, and for drilling and cutting of work materials. There are drills and miniature drills, as well as solid type end mills used for surface machining, grooving, shoulder machining, etc. of work materials, and inserts can be attached and detached to perform cutting in the same way as solid type end mills. Insert type end mills and the like are known.

従来から、被覆工具としては、例えば、WC基超硬合金等の工具基体に硬質皮膜層を形成したものが知られており、工具基体と硬質皮膜層との界面に注目して、切削性能の改善を目的として種々の提案がなされている。 Conventionally, as a covering tool, for example, a tool having a hard coating layer formed on a tool substrate such as a WC-based cemented carbide has been known, and attention is paid to the interface between the tool substrate and the hard coating layer to improve the cutting performance. Various proposals have been made for the purpose of improvement.

例えば、特許文献1には、WC基超硬基体の表面にbcc構造を有するW、Cr、Coを含む改質層を有する被覆工具が記載され、この被覆工具は高硬度鋼、ステンレス鋼、鋳鋼の切削に使用できることが記載されている。 For example, Patent Document 1 describes a coating tool having a modified layer containing W, Cr, and Co having a bcc structure on the surface of a WC-based cemented carbide substrate, and the coating tool includes high-hardness steel, stainless steel, and cast steel. It is stated that it can be used for cutting.

さらに、例えば、特許文献2および3には、WCの結晶構造に指数付けされ、WとCrを含有する炭化物からなる1〜10nmの膜厚の中間皮膜を設けた被覆工具が記載され、この被覆工具は、高炭素鋼、プリハードン鋼等の切削加工でも耐久性を有することが記載されている。 Further, for example, Patent Documents 2 and 3 describe a coating tool indexed by the crystal structure of WC and provided with an intermediate film having a thickness of 1 to 10 nm composed of carbides containing W and Cr, and this coating is provided. It is stated that the tool is durable even in cutting of high carbon steel, pre-hardened steel and the like.

特開2014−152345号公報Japanese Unexamined Patent Publication No. 2014-152345 特開2016−64487号公報Japanese Unexamined Patent Publication No. 2016-64487 特許第638233号公報Japanese Patent No. 638233

特許文献1〜3に記載された硬質皮膜層を有する被覆工具は、主に鋼を加工するものであって、チタン合金、ニッケル合金のように熱伝導度が低く、硬く、靭性を有し切削工具との親和性の高い材料の高速切削時には、硬質皮膜層に早期に溶着剥離が発生し、短時間で寿命に至ってしまい満足する切削性能を得ることは困難である。 The coating tools having a hard coating layer described in Patent Documents 1 to 3 mainly process steel, and have low thermal conductivity, hardness, toughness and cutting like titanium alloys and nickel alloys. At the time of high-speed cutting of a material having a high affinity with a tool, welding peeling occurs at an early stage in the hard film layer, and the life is reached in a short time, so that it is difficult to obtain satisfactory cutting performance.

そこで、本発明は、このような状況を鑑みてなされたものであって、チタン合金、ニッケル合金等の熱伝導度が低く、硬く、靱性の高い材料の切削に供しても、硬質皮膜層が優れた耐溶着性、耐チッピング性を示し、特に、通常の切削速度の2倍以上の高速切削であっても長期の使用にわたって優れた切削性能を発揮する切削工具を提供することを目的とする。 Therefore, the present invention has been made in view of such a situation, and even if it is used for cutting a material having low thermal conductivity, hard and high toughness such as titanium alloy and nickel alloy, the hard film layer is formed. It is an object of the present invention to provide a cutting tool that exhibits excellent welding resistance and chipping resistance, and in particular, exhibits excellent cutting performance over a long period of time even at high-speed cutting that is twice or more the normal cutting speed. ..

本発明者は、前記課題を解決すべく、硬質皮膜と工具基体との界面領域の組成・構造について鋭意検討したところ、工具基体と硬質皮膜との界面領域に、工具基体直上にW膜、このW膜の直上に硬質皮膜に接し、硬質皮膜よりもTiを多く含み、かつ、硬質皮膜に向かってTi含有量が減少しAl含有量が増加する組成傾斜膜を設けると、硬質皮膜と工具基体との密着性が向上し、たとえ、硬質被覆層の溶着剥離が生じかけても、この界面領域の膜がチッピングを抑制し、工具基体を構成する粒子(WC粒子)の脱落が防止できるという新規な知見を得た。 In order to solve the above problems, the present inventor has diligently studied the composition and structure of the interface region between the hard film and the tool substrate. If a composition gradient film is provided directly above the W film, which is in contact with the hard film, contains more Ti than the hard film, and has a composition gradient film in which the Ti content decreases and the Al content increases toward the hard film, the hard film and the tool substrate are provided. Even if the hard coating layer is about to be welded and peeled off, the film in this interface region suppresses chipping and prevents the particles (WC particles) that make up the tool substrate from falling off. I got a lot of knowledge.

本発明は、この知見に基づくものであって、次のとおりのものである。
「(1)工具基体と該工具基体上の硬質皮膜層を有する表面被覆切削工具であって、
前記硬質皮膜層は、平均厚さ0.5〜10.0μmの硬質皮膜と、前記工具基体と前記硬質皮膜との界面領域の前記工具基体直上に平均厚さ10〜500nmのW膜と、該W膜の直上に前記硬質皮膜に接する組成傾斜膜を有し、
前記硬質皮膜は、その組成を組成式:(Ti(1−x−y)Al)Nで表したとき、0.40≦x≦0.90、0.00≦y≦0.20(ただし、x、yは原子比、MはIUPACの周期表の4〜6族の原子、Si、Ce、La、Hf、Ndの少なくとも一つ)を満足する平均組成を有し、
前記組成傾斜膜は、その平均厚さが10nm以上、かつ、前記硬質皮膜の平均厚さ1/3以下であって、その組成を組成式:(Ti(1−p−q)Al)Nで表したとき、0.10≦p<0.40、0.00≦q≦0.20(ただし、p、qは原子比、MはIUPACの周期表の4〜6族の原子、Si、Ce、La、Hf、Ndの少なくとも一つ)を満足する組成であって、前記pは前記W膜との境界から前記硬質皮膜に向かって増加していることを特徴とする、
表面被覆切削工具。」
The present invention is based on this finding and is as follows.
"(1) A surface-coated cutting tool having a tool base and a hard film layer on the tool base.
The hard film layer includes a hard film having an average thickness of 0.5 to 10.0 μm, a W film having an average thickness of 10 to 500 nm directly above the tool substrate in the interface region between the tool substrate and the hard film, and the like. A composition gradient film in contact with the hard film is provided directly above the W film.
The hard coating, its composition formula: When expressed in (Ti (1-x-y ) Al x M y) N, 0.40 ≦ x ≦ 0.90,0.00 ≦ y ≦ 0.20 (However, x and y are atomic ratios, M is an atom of groups 4 to 6 of the periodic table of IUPAC, and at least one of Si, Ce, La, Hf, and Nd).
The composition gradient layer has an average thickness of 10nm or more and the average of the hard coating comprising a thickness of 1/3 or less, the composition formula: (Ti (1-p- q) Al p M q ) When represented by N, 0.10 ≦ p <0.40, 0.00 ≦ q ≦ 0.20 (where p and q are atomic ratios, M is an atom of groups 4 to 6 in the periodic table of IUPAC, The composition satisfies at least one of Si, Ce, La, Hf, and Nd), and the p is increased from the boundary with the W film toward the hard film.
Surface coating cutting tool. "

本発明の表面被覆切削工具は、組成傾斜層のTi含有量が多いため、靱性が向上し、チタン合金、ニッケル合金等の高速切削加工に用いても、硬質皮膜層が優れた耐溶着性、耐チッピングを備えることにより、長期の使用にわたって優れた切削性能を発揮する。 The surface-coated cutting tool of the present invention has a high Ti content in the composition gradient layer, so that the toughness is improved, and even when used for high-speed cutting of titanium alloys, nickel alloys, etc., the hard film layer has excellent welding resistance. By providing chipping resistance, it demonstrates excellent cutting performance over a long period of use.

本発明の表面被覆切削工具における硬質皮膜層の縦断面の模式図である。It is a schematic diagram of the vertical cross section of the hard film layer in the surface coating cutting tool of this invention.

以下、本発明の被覆工具について、より詳細に説明する。なお、本明細書、特許請求の範囲の記載において、数値範囲を「A〜B」(A、Bはともに数値)を用いて表現する場合、その範囲は上限(B)および下限(A)の数値を含むものである。また、上限(B)および下限(A)は同じ単位である。 Hereinafter, the covering tool of the present invention will be described in more detail. In the description of the scope of claims in this specification, when the numerical range is expressed using "A to B" (both A and B are numerical values), the range is the upper limit (B) and the lower limit (A). It includes numerical values. Further, the upper limit (B) and the lower limit (A) are the same unit.

図1に、本発明の被覆工具における硬質皮膜層の縦断面の模式図を示す。この図1から明らかなように、工具基体上に硬質皮膜層が形成され、この硬質皮膜層は、工具基体の近傍に界面領域を有している。この界面領域は、工具基体側にW膜、その直上には、硬質皮膜と接する組成傾斜膜を有している。これらについて、以下順に説明する。 FIG. 1 shows a schematic view of a vertical cross section of a hard coating layer in the covering tool of the present invention. As is clear from FIG. 1, a hard film layer is formed on the tool substrate, and this hard film layer has an interface region in the vicinity of the tool substrate. This interface region has a W film on the tool substrate side and a composition gradient film in contact with the hard film immediately above the W film. These will be described in this order below.

硬質皮膜の平均膜厚:
本発明の被覆工具における硬質皮膜層を構成する硬質皮膜の平均膜厚は、0.5〜10.0μmである。この範囲とした理由は、0.5μm未満であると、長期の使用にわたって優れた耐摩耗性を発揮することができず、一方、10.0μmを超えると、硬質皮膜の結晶粒が粗大化しやすくなり、耐チッピング性向上効果が得られなくなるからである。
Average film thickness of hard film:
The average film thickness of the hard film constituting the hard film layer in the coating tool of the present invention is 0.5 to 10.0 μm. The reason for setting this range is that if it is less than 0.5 μm, excellent wear resistance cannot be exhibited over a long period of use, while if it exceeds 10.0 μm, the crystal grains of the hard film tend to be coarsened. This is because the effect of improving the chipping resistance cannot be obtained.

硬質皮膜の組成:
本発明の被覆工具における硬質皮膜層を構成する硬質皮膜は、その組成を組成式:(Ti(1−x−y)Al)Nで表したとき、0.40≦x≦0.90、0.00≦y≦0.20(ただし、x、yは原子比、MはIUPACの周期表の4〜6族の原子、Si、Ce,La、Hf、Ndの少なくとも一つ)を満足する平均組成を有していることが好ましい。
なお、(Ti(1−x−y)Al)とNは、1:1で化合していなくてもよい。
Hard film composition:
Hard film constituting the hard coating layer in the coated tool of the present invention, its composition formula: (Ti (1-x- y) Al x M y) when expressed in N, 0.40 ≦ x ≦ 0. 90, 0.00≤y≤0.20 (where x and y are atomic ratios, M is an atom of groups 4 to 6 of the periodic table of IUPAC, and at least one of Si, Ce, La, Hf, and Nd). It is preferable to have a satisfactory average composition.
Incidentally, (Ti (1-x- y) Al x M y) and N is 1: may not be combined in the 1.

x、y、の範囲を前記のように決定した理由は次のとおりである。
xの値が0.40未満になると、高硬度が得られないばかりか結晶粒が粗大化しやすくなり、一方、0.90を超えると、一部の結晶の結晶構造がNaCl型の面心立方構造から六方晶構造に変化し、硬さが低下する。より好ましい範囲としては0.45≦x≦0.70である。
また、必要に応じて添加するMの平均含有割合yが0.20を超えると、靭性が低下し、チッピング、欠損を発生しやすくなる。
The reason for determining the range of x, y as described above is as follows.
If the value of x is less than 0.40, not only high hardness cannot be obtained, but also the crystal grains tend to be coarsened. On the other hand, if it exceeds 0.90, the crystal structure of some crystals is a NaCl-type face-centered cubic. The structure changes to a hexagonal structure, and the hardness decreases. A more preferable range is 0.45 ≦ x ≦ 0.70.
Further, when the average content ratio y of M added as needed exceeds 0.20, the toughness is lowered and chipping and chipping are likely to occur.

ここで、硬質皮膜の平均組成、平均層厚については、走査型電子顕微鏡(Scanning Electron Microscopy:SEM)、透過型電子顕微鏡(Transmission Electron Microscope:TEM)、エネルギー分散型X線分光法(Energy Dispersive X−ray Spectroscopy:EDS)を用いた断面観察により求めることができる。 Here, regarding the average composition and the average layer thickness of the hard film, the scanning electron microscope (SEM), the transmission electron microscope (TEM), and the energy dispersive X-ray spectroscopy (Engry Dispersive) -It can be obtained by cross-sectional observation using a ray spectrum (EDS).

界面領域のW膜:
界面領域の工具基体直上には、組成傾斜膜に接するW膜を有し、その平均厚さ、すなわち、工具基体から硬質皮膜に向かってWCではなくWが検出されTiが検出されるまでの平均距離が、10〜500nmであることが好ましい。W膜の平均厚さがこの範囲にあるとき、硬質皮膜層が優れた耐溶着性、耐チッピング性を備える。なお、この領域のW膜は後述するようにW原子をスパッタリングすることによって得るものであるから、工具基体から硬質皮膜へ拡散する可能性のあるWによって形成されるものとは明らかに異なるものである。
W film in the interface region:
Immediately above the tool substrate in the interface region, there is a W film in contact with the composition gradient film, and the average thickness thereof, that is, the average until W is detected from the tool substrate toward the hard film and Ti is detected instead of WC. The distance is preferably 10 to 500 nm. When the average thickness of the W film is in this range, the hard film layer has excellent welding resistance and chipping resistance. Since the W film in this region is obtained by sputtering W atoms as described later, it is clearly different from the one formed by W which may diffuse from the tool substrate to the hard film. be.

界面領域の組成傾斜膜:
界面領域のW膜の直上には硬質皮膜と接する組成傾斜膜を有する。組成傾斜膜の組成を組成式:(Ti(1−p−q)Al)Nで表したとき、0.10≦p<0.40、0.00≦q≦0.20(ただし、p、qは原子比、MはIUPACの周期表の4〜6族の原子、Si、Ce、La、Hf、Ndの少なくとも一つ)を満足する組成を有し、AlのTiとAlとMの合量に占める割合であるpは、W膜との境界から硬質皮膜に向かって増加している傾斜組成が好ましい。ここで、増加の態様に制約はないが、線形が好ましい。
この組成傾斜膜は、硬質皮膜を強固に工具基体に密着させる作用を有し、前述の傾斜組成を有するとき、この作用がより確実に発揮される。
なお、(Ti(1−p−q)Al)とNは、1:1で化合していなくてもよい。
Interface region composition gradient film:
Immediately above the W film in the interface region, there is a composition gradient film in contact with the hard film. Composition The composition of the graded composition layer formula: When expressed in (Ti (1-p-q ) Al p M q) N, 0.10 ≦ p <0.40,0.00 ≦ q ≦ 0.20 ( provided that , P, q are atomic ratios, M is an atom of groups 4 to 6 of the periodic table of IUPAC, and at least one of Si, Ce, La, Hf, and Nd). It is preferable that p, which is a ratio of M to the total amount, increases from the boundary with the W film toward the hard film. Here, there is no restriction on the mode of increase, but linearity is preferable.
This composition gradient film has an action of firmly adhering the hard film to the tool substrate, and when it has the above-mentioned gradient composition, this action is more reliably exhibited.
It should be noted that (Ti (1-p−q) Al pM q ) and N do not have to be combined at a ratio of 1: 1.

この組成傾斜膜の平均厚さ、すなわち、工具基体から硬質皮膜に向かってTiが検出されAlのTiとAlとMの合量に占める割合が0.40以上になるまでの距離が、10nm以上、かつ、前記硬質皮膜の平均厚さの1/3以下であることが好ましい。この範囲の平均厚さであるとき、前記作用がより確実に発揮される。 The average thickness of this composition gradient film, that is, the distance from the tool substrate toward the hard film until Ti is detected and the ratio of Al to the total amount of Ti, Al and M becomes 0.40 or more is 10 nm or more. Moreover, it is preferably 1/3 or less of the average thickness of the hard film. When the average thickness is in this range, the above action is more reliably exerted.

工具基体:
工具基体は、この種の工具基体として従来公知のWCを含む基体であれば、本発明の目的を達成することを阻害するものでない限り、いずれのものも使用可能である。
Tool base:
As the tool substrate, any substrate containing WC conventionally known as this type of tool substrate can be used as long as it does not hinder the achievement of the object of the present invention.

製造方法:
本発明の被覆工具の硬質皮膜層は、PVDの一種であるアークイオンプレーティング(Arc Ion Plating:AIP)装置を用いて製造することができ、W膜は、Wターゲットをスパッタして形成する。組成傾斜膜は、所定組成のTi−Al−M合金とTiの2種のターゲットを同時にスパッタすることによって形成することができ、Tiの放電量を徐々に減少(例えば線形に減少)させることがより好ましい。また、硬質皮膜は所定組成のTi−Al−M合金とTiの2種のターゲットを用い、所定組成になるようにTiの放電量を制御する。
Production method:
The hard film layer of the coating tool of the present invention can be produced by using an arc ion plating (AIP) device which is a kind of PVD, and the W film is formed by sputtering a W target. The composition gradient film can be formed by simultaneously sputtering two types of targets, a Ti—Al—M alloy having a predetermined composition and Ti, and the discharge amount of Ti can be gradually reduced (for example, linearly reduced). More preferred. Further, as the hard film, two types of targets, Ti—Al—M alloy and Ti having a predetermined composition, are used, and the discharge amount of Ti is controlled so as to have a predetermined composition.

次に、実施例について説明する。
ここでは、本発明の被覆工具の具体例として、工具基体としてWC基超硬合金を用いたインサート切削工具に適用したものについて述べるが、工具基体は前述のとおりWCが含まれていればよく、また、工具としてドリル、エンドミル等に適用した場合も同様である。
Next, an example will be described.
Here, as a specific example of the coated tool of the present invention, a tool applied to an insert cutting tool using a WC-based cemented carbide as a tool base will be described, but the tool base may contain WC as described above. The same applies when the tool is applied to a drill, an end mill, or the like.

まず、原料粉末として、Co粉末、TiC粉末、VC粉末、TaC粉末、NbC粉末、Cr粉末、WC粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてボールミルで72時間湿式混合し、減圧乾燥した後、100MPaの圧力でプレス成形し、これらの圧粉成形体を焼結し、所定寸法となるように加工して、ISO規格SEEN1203AFTN1のインサート形状をもったWC基超硬合金製の工具基体1〜3を作製した。 First, as raw material powders, Co powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, and WC powder are prepared, and these raw material powders are blended into the blending composition shown in Table 1, and further. Wax is added, wet-mixed in a ball mill for 72 hours, dried under reduced pressure, press-molded at a pressure of 100 MPa, these powder compacts are sintered, processed to a predetermined size, and according to ISO standard SEEN1203AFTN1. Tool bases 1 to 3 made of WC-based cemented carbide having an insert shape were produced.

次に、工具基体1〜3に直流(DC)スパッタリング蒸着源を持つAIP装置を用いて硬質皮膜層を形成すべく、これらをアセトン中で超音波洗浄し、乾燥した状態で、AIP装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着した。また、カソード電極(蒸発源)として、Wターゲット、Tiターゲット、そして、所定組成の硬質皮膜を得るためのTi−Al―M合金ターゲットを配置した。 Next, in order to form a hard film layer on the tool substrates 1 to 3 using an AIP apparatus having a DC (DC) sputtering vapor deposition source, these are ultrasonically cleaned in acetone and dried in the AIP apparatus. It was mounted along the outer peripheral portion at a position on the rotary table at a predetermined distance in the radial direction from the central axis. Further, as a cathode electrode (evaporation source), a W target, a Ti target, and a Ti—Al—M alloy target for obtaining a hard film having a predetermined composition were arranged.

続いて、AIP装置内を排気して10−2Pa以下の真空に保持しながら、ヒーターで装置内を400〜1000℃に加熱した後、0.1〜2.0PaのArガス雰囲気に設定し、前記回転テーブル上で自転しながら回転する工具基体に−200〜−1500Vの直流バイアス電圧を印加し、アルゴンイオンによって、工具基体表面を10〜120分間ボンバード処理した。 Then, while holding the evacuating the AIP apparatus 10 -2 Pa or less of vacuum, after heating the inside of the apparatus to 400 to 1000 ° C. by the heater, set to Ar gas atmosphere 0.1~2.0Pa A DC bias voltage of −200 to -1500 V was applied to the tool substrate rotating while rotating on the rotary table, and the surface of the tool substrate was bombarded with argon ions for 10 to 120 minutes.

AIP装置内に反応ガスとして、表2に示す分圧が0.1〜1.0Paの範囲内のArガスを所定時間導入すると共に、同じく表2に示す炉内温度に維持し、前記回転テーブル上で自転しながら回転する工具基体に、表2に示す−30〜−200Vの範囲内の所定の直流バイアス電圧を印加して、Wターゲットのスパッタリング電力を500〜1000Wで調整し、W膜を成膜した。 As the reaction gas, Ar gas having a partial pressure in the range of 0.1 to 1.0 Pa shown in Table 2 was introduced into the AIP apparatus for a predetermined time, and the temperature inside the furnace also shown in Table 2 was maintained. A predetermined DC bias voltage in the range of -30 to -200 V shown in Table 2 is applied to the tool substrate that rotates while rotating on the above, and the sputtering power of the W target is adjusted to 500 to 1000 W to form a W film. A film was formed.

続いて、表2に示す−30〜−200Vの範囲内の所定の直流バイアス電圧を印加して、Ti含有量が所定量になるように、TiターゲットとTi−Al―M合金ターゲット(Mは、表3を参照)のアーク電流を80〜240Aの範囲内で調整し、Tiターゲットのアーク電流を直線的に減少させる一方で、Ti−Al−M合金ターゲットのアーク電流を一定に保つことで、組成傾斜膜:(Ti(1−p−q)Al)N膜を成膜した。その後、Ti−Al−M合金ターゲットからなるカソード電極(蒸発源)とアノード電極との間に、表2に示す80〜240Aの範囲内の所定の電流を流してアーク放電を発生させ、硬質皮膜を形成し、表3に示す本発明の被覆工具(以下、「本発明工具」という)1〜9を作製した。 Subsequently, a predetermined DC bias voltage in the range of -30 to -200 V shown in Table 2 is applied so that the Ti content becomes a predetermined amount, and the Ti target and the Ti—Al—M alloy target (M is By adjusting the arc current in the range of 80 to 240 A (see Table 3), the arc current of the Ti target is linearly reduced, while the arc current of the Ti—Al—M alloy target is kept constant. composition gradient film: it was formed (Ti (1-p-q ) Al p M q) N film. After that, a predetermined current in the range of 80 to 240A shown in Table 2 is passed between the cathode electrode (evaporation source) made of the Ti—Al—M alloy target and the anode electrode to generate an arc discharge, and a hard film is formed. 1 to 9 of the covering tool of the present invention (hereinafter, referred to as “the tool of the present invention”) shown in Table 3 were produced.

一方、比較のため、前記工具基体1〜3に対して、前記と同じAIP装置を用いて、表2に示す条件で各皮膜を蒸着形成し、表4に示す比較例の皮膜工具(以下、「比較例工具」という)1〜3を作製した。 On the other hand, for comparison, each film was vapor-deposited on the tool bases 1 to 3 using the same AIP device as described above under the conditions shown in Table 2, and the film tools of the comparative examples shown in Table 4 (hereinafter referred to as the film tools). (Refered to "Comparative Example Tool") 1 to 3 were produced.

硬質被覆層を構成する各皮膜の平均層厚、硬質皮膜や組成傾斜膜の組成は、前記で作製した本発明工具1〜9および比較例工具1〜3の工具基体の表面に垂直な硬質皮膜層縦断面(工具基体に垂直な断面)について、工具基体の表面に平行な方向の幅が10μmであり、硬質皮膜層の厚み領域が全て含まれるよう設定された視野について、走査型電子顕微鏡(SEM)、透過型電子顕微鏡(TEM)、エネルギー分散型X線分光法(EDS)を用いた断面観察により求めた。 The average layer thickness of each film constituting the hard coating layer, and the composition of the hard film and the composition gradient film are the hard film perpendicular to the surface of the tool bases of the tools 1 to 9 of the present invention and the tools 1 to 3 of the comparative examples produced above. Regarding the layer longitudinal section (section perpendicular to the tool substrate), the width in the direction parallel to the surface of the tool substrate is 10 μm, and the scanning electron microscope (scanning electron microscope) is set so as to include the entire thickness region of the hard film layer. It was determined by cross-sectional observation using a scanning electron microscope (SEM), a transmission electron microscope (TEM), and an energy dispersive X-ray spectroscopy (EDS).

具体的には、平均層厚は観察断面を5000倍に拡大して、5点の層厚を求めて平均層厚を算出した。硬質皮膜の平均組成、組成傾斜膜の組成、Alの含有量の変化については、層厚方向に100μmの等間隔で5本のEDS線分析を行い、平均値を算出した。また、(Ti、Al、M、N)の硬質皮膜層を構成する原子のみが検出され始め、Al含有量が40原子%未満である工具基体の表面に最も近い点から工具基体表面側へ0.5nmの点を工具基体側の位置とし、さらに、Alの含有割合がこれ以上増加しない点よりも工具基体側へ0.5nmの点を工具表面側の位置とした。なお、これらの点の位置は工具基体の表面から測定した。表3、表4では、この工具基体側の位置および工具表面側の位置におけるAlの含有量を、それぞれ前記5個の分析の平均値として記載している。なお、界面領域の平均層厚は、この工具基体側の位置および工具表面側の位置の距離に1nmを加えたものである。
表3および4にこれらの結果を示す。
Specifically, as for the average layer thickness, the observed cross section was enlarged 5000 times, and the layer thickness at 5 points was obtained to calculate the average layer thickness. The average composition of the hard film, the composition of the composition gradient film, and the change in the Al content were calculated by performing five EDS line analyzes at equal intervals of 100 μm in the layer thickness direction. Further, only the atoms constituting the hard coating layer of (Ti, Al, M, N) start to be detected, and the Al content is 0 from the point closest to the surface of the tool substrate having an Al content of less than 40 atomic% toward the surface side of the tool substrate. The point of .5 nm was set as the position on the tool base side, and the point of 0.5 nm toward the tool base side was set as the position on the tool surface side rather than the point where the Al content ratio did not increase any more. The positions of these points were measured from the surface of the tool substrate. In Tables 3 and 4, the Al contents at the position on the tool base side and the position on the tool surface side are shown as average values of the five analyzes, respectively. The average layer thickness of the interface region is the distance between the position on the tool substrate side and the position on the tool surface side plus 1 nm.
Tables 3 and 4 show these results.

Figure 2021126717
Figure 2021126717

Figure 2021126717
Figure 2021126717

Figure 2021126717
Figure 2021126717

Figure 2021126717
Figure 2021126717

次いで、本発明工具1〜9および比較例工具1〜3について、SE445R0506Eのカッタを用いて、単刃の正面フライス切削加工試験を実施した。以下の切削条件で、ニッケル合金およびチタン合金について高速切削加工試験を実施した。 Next, the tools 1 to 9 of the present invention and the tools 1 to 3 of Comparative Examples were subjected to a single-blade face milling test using a cutter of SE445R0506E. High-speed cutting tests were conducted on nickel alloys and titanium alloys under the following cutting conditions.

切削試験A:
被削材:質量%で、Ni−19%Cr−18.5%Fe−5.2%Cd−5%Ta−3%Mo−0.9%Ti−0.5%Al−0.3%Si−0.2%Mn−0.05%Cu−0.04%Cの組成を有するNi基合金の幅60mm×長さ200mmのブロック材
切削速度: 80 m/min.
切り込み: 1.8 mm
送り: 0.11 mm/tooth.
の条件でのNi基合金の湿式高速高送り切削加工試験(通常の切削速度および送りは、25〜40 m/min.、0.08mm/tooth)を行った。切削長2.0mまで切削し、逃げ面摩耗幅を測定し、刃先の損耗状態を観察した。
切削試験Aの結果を表5に示す。
Cutting test A:
Work Material: Ni-19% Cr-18.5% Fe-5.2% Cd-5% Ta-3% Mo-0.9% Ti-0.5% Al-0.3% by mass% Block material of Ni-based alloy having a composition of Si-0.2% Mn-0.05% Cu-0.04% C, width 60 mm x length 200 mm Cutting speed: 80 m / min.
Notch: 1.8 mm
Feed: 0.11 mm / tooth.
A wet high-speed high-feed cutting process test (normal cutting speed and feed of 25 to 40 m / min., 0.08 mm / tooth) was performed on the Ni-based alloy under the conditions of. The cutting length was cut to 2.0 m, the flank wear width was measured, and the wear state of the cutting edge was observed.
The results of cutting test A are shown in Table 5.

切削試験B:
被削材:質量%で、Ti−6%Al−4%Vの幅60mm×長さ200mmのブロック材
切削速度: 90 m/min.
切り込み: 1.8 mm
送り: 0.12 mm/tooth.
の条件でのTi基合金の湿式高速高送り切削加工試験( 通常の切削速度および送りは、30〜45 m/min.、0.08mm/tooth)を行った。切削長2.0mまで切削し、逃げ面摩耗幅を測定し、刃先の損耗状態を観察した。
切削試験Bの結果を表6に示す。
Cutting test B:
Work material: Block material with a width of 60 mm and a length of 200 mm with a mass% of Ti-6% Al-4% V Cutting speed: 90 m / min.
Notch: 1.8 mm
Feed: 0.12 mm / tooth.
Wet high-speed high-feed cutting processing test of Ti-based alloy under the conditions of (normal cutting speed and feed are 30 to 45 m / min., 0.08 mm / tooth) was performed. The cutting length was cut to 2.0 m, the flank wear width was measured, and the wear state of the cutting edge was observed.
The results of cutting test B are shown in Table 6.

Figure 2021126717
Figure 2021126717

Figure 2021126717
Figure 2021126717

表5および表6の結果によれば、本発明工具1〜9については、切削条件A、Bのいずれでもチッピング、剥離等の異常損傷の発生はなく、耐溶着性、耐チッピング性のいずれにも優れていることがわかる。
これに対して、比較例工具1〜3については、切削条件A、Bのいずれにおいても、チッピングの発生、あるいは、逃げ面摩耗の進行により、短時間で寿命に至ることは明らかである。
According to the results of Tables 5 and 6, the tools 1 to 9 of the present invention did not cause abnormal damage such as chipping and peeling under any of the cutting conditions A and B, and were either weld resistant or chipping resistant. It turns out that is also excellent.
On the other hand, it is clear that the tools 1 to 3 of Comparative Examples reach their end of life in a short time due to the occurrence of chipping or the progress of flank wear under any of the cutting conditions A and B.

本発明の表面被覆切削工具は、各種の鋼などの通常の切削条件での切削加工は勿論のこと、特に高熱発生を伴うとともに、切刃部に対して大きな負荷がかかるチタン合金、ニッケル合金等の高速切削加工において、優れた耐溶着性および耐チッピング性を発揮し、長期にわたってすぐれた切削性能を示すものであるから、切削加工装置の高性能化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 The surface-coated cutting tool of the present invention can be used not only for cutting under normal cutting conditions such as various types of steel, but also for titanium alloys, nickel alloys, etc. In high-speed cutting, it exhibits excellent welding resistance and chipping resistance, and exhibits excellent cutting performance over a long period of time. Furthermore, it is possible to sufficiently satisfy the cost reduction.

Claims (1)

工具基体と該工具基体上の硬質皮膜層を有する表面被覆切削工具であって、
前記硬質皮膜層は、平均厚さ0.5〜10.0μmの硬質皮膜と、前記工具基体と前記硬質皮膜との界面領域の前記工具基体直上に平均厚さ10〜500nmのW膜と、該W膜の直上に前記硬質皮膜に接する組成傾斜膜を有し、
前記硬質皮膜は、その組成を組成式:(Ti(1−x−y)Al)Nで表したとき、0.40≦x≦0.90、0.00≦y≦0.20(ただし、x、yは原子比、MはIUPACの周期表の4〜6族の原子、Si、Ce、La、Hf、Ndの少なくとも一つ)を満足する平均組成を有し、
前記組成傾斜膜は、その平均厚さが10nm以上、かつ、前記硬質皮膜の平均厚さ1/3以下であって、その組成を組成式:(Ti(1−p−q)Al)Nで表したとき、0.10≦p<0.40、0.00≦q≦0.20(ただし、p、qは原子比、MはIUPACの周期表の4〜6族の原子、Si、Ce、La、Hf、Ndの少なくとも一つ)を満足する組成であって、前記pは前記W膜との境界から前記硬質皮膜に向かって増加していることを特徴とする、
表面被覆切削工具。
A surface-coated cutting tool having a tool substrate and a hard film layer on the tool substrate.
The hard film layer includes a hard film having an average thickness of 0.5 to 10.0 μm, a W film having an average thickness of 10 to 500 nm directly above the tool substrate in the interface region between the tool substrate and the hard film, and the like. A composition gradient film in contact with the hard film is provided directly above the W film.
The hard coating, its composition formula: When expressed in (Ti (1-x-y ) Al x M y) N, 0.40 ≦ x ≦ 0.90,0.00 ≦ y ≦ 0.20 (However, x and y are atomic ratios, M is an atom of groups 4 to 6 of the periodic table of IUPAC, and at least one of Si, Ce, La, Hf, and Nd).
The composition gradient layer has an average thickness of 10nm or more and the average of the hard coating comprising a thickness of 1/3 or less, the composition formula: (Ti (1-p- q) Al p M q ) When represented by N, 0.10 ≦ p <0.40, 0.00 ≦ q ≦ 0.20 (where p and q are atomic ratios, M is an atom of groups 4 to 6 in the periodic table of IUPAC, The composition satisfies at least one of Si, Ce, La, Hf, and Nd), and the p is increased from the boundary with the W film toward the hard film.
Surface coating cutting tool.
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