JP2021125631A - Processing device, ring frame and block - Google Patents

Abstract

To provide a down-sized processing device.SOLUTION: By stacking work sets 107 through a recessed part 111 provided on a ring frame 105 and a column 115, a stacked work set 109 can be formed and the stacked work set 109 can be placed on a stage 16. Thus, a cassette for storing the work sets 107 can be eliminated and hence a processing device can be down-sized.SELECTED DRAWING: Figure 2

Description

The present invention relates to processing equipment, ring frames and blocks.

There are wafers having a plurality of devices and a street provided between adjacent devices on the surface (see, for example, Patent Document 1). In the processing apparatus for processing this wafer, for example, a wafer held by a chuck table is divided and processed along a street by using a processing means to form a chip.

In such a processing apparatus, it is preferable that the chips obtained by the division are collectively separated from the chuck table. For this purpose, the wafer is held on the chuck table in the state of a work set supported by the ring frame via the dicing tape and processed by the processing means.

In this case, in addition to the chuck table and processing means described above, the processing apparatus temporarily places a cassette for accommodating the work set, a cassette stage for placing the cassette, and a work set taken out from the cassette. The means and the transport means for transporting the work set from the temporary storage means to the chuck table are provided. The cassette has multiple shelves arranged vertically to accommodate the work set.

Japanese Unexamined Patent Publication No. 2018-181951

The processing apparatus described above requires a cassette for accommodating the work set and a temporary storage means for temporarily placing the work set. Therefore, it is difficult to miniaturize the processing apparatus.
Therefore, an object of the present invention is to reduce the size of the processing apparatus.

The processing apparatus (first processing apparatus) according to the first aspect of the present invention is formed by sticking a tape and integrating a ring frame having an opening and a work piece arranged in the opening. A processing device including a holding means for holding a work set by a holding surface and a processing means for processing an workpiece held by the holding means, wherein the work set is attached to the ring frame on the upper surface. A recess formed and a pillar formed on the lower surface and having a convex portion at the tip thereof that can be inserted into the recess are provided, and the convex portion of the ring frame of another work set is inserted into the concave portion of the ring frame. By doing so, it is possible to form a stacked work set in which a plurality of the work sets are stacked through a gap, and the work set is placed on a stage on which the stacked work set can be placed and a holding means. The transport means further includes a transport means for carrying in or carrying out the work set held by the holding means from the holding means, and the transport means holds the work set in one of the stacked work sets as the holding means. The processing means processes the workpiece of the work set held by the holding means.

Further, the processing apparatus (second processing apparatus) according to the second aspect of the present invention is formed by sticking a tape and integrating a ring frame having an opening and a work piece arranged in the opening. A processing device including a holding means for holding the work set being held by a holding surface and a processing means for processing the workpiece held by the holding means, wherein the work set is outside the ring frame. By stacking via a pair of blocks supporting the peripheral edge, it is possible to form a stacked work set in which a plurality of the workpieces are stacked through a gap, and the blocks are the outer peripheral edges of the ring frame. A fitting portion to be fitted to the fitting portion, a concave portion formed on the upper surface, a convex portion formed on the lower surface and insertable into the concave portion, and a claw formed on the opposite side of the fitting portion. The transport means further includes a stage on which the work set can be placed, and a transport means for loading the work set into the holding means or carrying out the work set held by the holding means from the holding means. Holds one of the stacked work sets in the holding means, and the processing means processes the workpiece of the work set held by the holding means.

In the first and second processing apparatus, the transport means may have a first transport means and a second transport means, and the first transport means is a pair of facing facing surfaces that support the lower surface of the work set. A first lower support portion, a first opening / closing mechanism for opening and closing the first lower support portion, and a first vertical movement means for moving the first lower support portion in the vertical direction perpendicular to the holding surface are provided. The second transport means may include a pair of opposing second lower support portions that support the lower surface of the work set, a second opening / closing mechanism that opens and closes the second lower support portion, and the second lower support portion. May be provided with a second vertical moving means for moving the work in the vertical direction perpendicular to the holding surface, and the holding means faces a pair of facing upper support portions that support the upper surface of the work set. A pair of support mechanisms for opening and closing the upper support unit may be provided, and a first transfer control unit that controls the operation of the first transfer means and a second transfer control that controls the operation of the second transfer means. A unit and may be further provided.

In the first and second processing apparatus, the first transfer control unit uses the first lower support portion of the first transfer means to transfer the work set at the bottom of the stacked work set mounted on the stage. To support and carry the stacked work set into the holding means, and to support the lowermost work set of the stacked work set carried into the holding means by the upper support portion of the holding means. , And the first vertical movement means of the first transport means may control the movement of the first lower support portion in the upward direction away from the holding surface, and the second transport control unit may control. It may be controlled that the work set held by the holding means is supported by the second lower support portion of the second transport means and stacked and placed on the stage. The work set at the bottom may be held by the holding means, and the processed work set may be stacked on the stage.

In the first and second processing apparatus, the first transfer control unit uses the first transfer means to place one unprocessed work set on the top of the stage and other pre-processes. It may be controlled that the stacked work set consisting of the work set is supported by the first lower support portion, and the second transfer control unit is placed on the top of the stage by using the second transfer means. It may be possible to control the loading of one unprocessed work set that has been placed into the holding means and the stacking of the processed work set on the stage.

In the first and second processing apparatus, the stage may include a first stage and a second stage, and the transport means includes a pair of opposing lower support portions that support the lower surface of the work set, and the transfer means. An opening / closing mechanism for opening / closing the lower support portion and a vertical movement means for moving the lower support portion in the vertical direction perpendicular to the holding surface may be provided, and the holding means supports the upper surface of the work set. A pair of upper support portions facing each other and a support mechanism for opening and closing the pair of upper support portions facing each other may be provided, or a control means may be further provided, and the control means is provided in the first stage. The mounted work set is carried into the holding means from the first stage using the transport means, and the work set held by the holding means is carried from the holding means by the transport means. It may be controlled to carry it out and stack it on the second stage.

The ring frame of the present invention is a ring frame having an opening and supporting a work piece located in the opening via a tape, and is a recess formed on the upper surface and the recess formed on the lower surface. A pillar having a convex portion at the tip thereof, which can be inserted into the recess, is provided, and the convex portion can be inserted into the concave portion to be stacked.

The block of the present invention can stack a work set including a ring frame having an opening, a work piece positioned in the opening, and a tape attached to the ring frame and the work piece and integrating them. At least a pair of blocks fitted to the outer peripheral edge of the ring frame, the fitting portion fitted to the outer peripheral edge of the ring frame, the recess formed on the upper surface, and the lower surface. It includes a convex portion that is formed and can be inserted into the concave portion, and a claw that is formed on the opposite side of the fitting portion.

In the present invention, it is possible to form a stacked work set by stacking the workpieces. This stacked work set can be mounted, for example, on the stage of a processing apparatus. Therefore, according to the present invention, the processing apparatus can be miniaturized because a cassette for accommodating the work set is not required.

It is a perspective view which shows the work set. It is explanatory drawing which shows the stacked work set. It is a perspective view which shows the structure of the processing apparatus. It is explanatory drawing which shows the state which the whole stacked work set is supported by the 1st lower support part of the 1st transfer means. It is explanatory drawing which shows the state which the stacked work set was lowered on the chuck table. It is explanatory drawing which shows the state which the 1st lower support part is opened in the state which the stacked work set is lowered on the chuck table. It is explanatory drawing which shows the state which the bottom work set of a stacking work set is held by a chuck table. It is explanatory drawing which shows the state which the stacked work set which consists of another work set is moved upward away from the holding surface of a chuck table. It is explanatory drawing which shows the state that the wafer of a work set is cut. It is explanatory drawing which shows the state which the work set on the chuck table is supported by the 2nd lower support part of the 2nd transport means. It is explanatory drawing which shows the state which the work set is placed on the spinner cleaning unit. It is explanatory drawing which shows the state which the work set after processing is placed on the stage. It is explanatory drawing which shows the state which the work set after processing is piled up on a stage. It is a perspective view which shows the structure of the processing apparatus which has two stages. It is a perspective view which shows the work set of another aspect. It is a perspective view which shows the block for stacking the work set shown in FIG. It is sectional drawing which shows the state that the blocks shown in FIG. 16 are laminated. It is explanatory drawing which shows the stacked work set which consists of the work set shown in FIG. 15 and the block shown in FIG. It is a perspective view which shows the work set of still another aspect. It is a perspective view which shows the block for stacking the work set shown in FIG. It is sectional drawing which shows the state that the blocks shown in FIG. 20 are laminated. It is explanatory drawing which shows the grinding mechanism as a processing means.

[Embodiment 1]
As shown in FIG. 1, the wafer 100, which is the workpiece according to the present embodiment, has a substantially circular shape, and a grid-like division schedule line 101 is formed on the surface thereof. Various devices are formed in each region partitioned by the scheduled division line 101.

A tape 103 is attached to the back surface of the wafer 100. A ring frame 105 is attached to the outer circumference of the tape 103. The ring frame 105 has an opening 104. The work set 107 is formed by integrating the ring frame 105 and the wafer 100 arranged in the opening 104 with the tape 103. As described above, the wafer 100 is processed by the processing apparatus 1 shown in FIG. 3 in the state of the work set 107 supported by the ring frame 105 via the tape 103.

Further, as shown in FIG. 1, the ring frame 105 of the work set 107 includes four recesses 111 formed on the upper surface and four pillars 115 formed on the lower surface. Each pillar 115 is formed directly below (back side) each recess 111, and has a convex portion 117 that can be inserted into the recess 111 at the tip thereof. As a result, a plurality of ring frames 105 can be stacked by inserting the convex portion 117 of the pillar 115 of another ring frame 105 into the concave portion 111 of one ring frame 105.

Therefore, as shown in FIG. 2, a plurality of work sets 107 having such a ring frame 105 are formed by inserting the convex portion 117 of the ring frame 105 of another work set 107 into the concave portion 111 of the ring frame 105. It is possible to form a stacked work set 109 in which the work sets 107 of the above are stacked through a gap.

As shown in FIG. 3, the processing apparatus 1 according to the present embodiment includes a support base 10, a rectangular parallelepiped housing 12 erected on the support base 10, and a processing device 1 incorporated in the housing 12. It has a control means 70 for controlling a member.

A stage 16 is provided on one end side of the support base 10. A stacked work set 109 composed of a plurality of work sets 107 shown in FIG. 2 can be mounted on the stage 16.

A transport means 30 is provided on the front surface of the housing 12. The transport means 30 carries the work set 107 into the chuck table 20 or carries out the work set 107 held by the chuck table 20 from the chuck table 20.

As shown in FIG. 3, the transport means 30 includes a first transport means 31 and a second transport means 41.
The first transport means 31 chucks a pair of opposed first lower support portions 33 that support the lower surface of the work set 107, a first opening / closing mechanism 35 that opens and closes the first lower support portion 33, and a first lower support portion 33. A first vertical moving means 37 for moving the first vertical support portion 33 in the vertical direction perpendicular to the holding surface 23 of the 20 and a first horizontal moving mechanism 39 for horizontally moving the first lower support portion 33 in the Y-axis direction are provided. The tip of the first lower support portion 33 is formed in an L shape (hook shape), and the tip of the first lower support portion 33 can support the lower surface of the work set 107.

On the other hand, the second transport means 41 includes a pair of facing second lower support portions 43 that support the lower surface of the work set 107, a second opening / closing mechanism 45 that opens and closes the second lower support portion 43, and a second lower support portion 43. It is provided with a second vertical moving means 47 for moving the chuck table 20 in the vertical direction perpendicular to the holding surface 23, and a second horizontal moving mechanism 49 for horizontally moving the second lower support portion 43 in the Y-axis direction. The tip of the second lower support portion 43 is formed in an L shape (hook shape), and the tip of the second lower support portion 43 can support the lower surface of the work set 107.

The transport means 30 having such a configuration holds one work set 107 of the stacked work sets 109 on the chuck table 20.
The chuck table 20 has a holding surface 23, and is an example of a holding means for holding the work set 107 by the holding surface 23. The chuck table 20 is fixed on the moving plate 21. The moving plate 21 covers the opening in the center of the upper surface of the support base 10 together with the bellows-shaped waterproof cover 19. Below the moving plate 21 and the waterproof cover 19, a processing feed means 60 (see FIG. 9) for moving the moving plate 21 and the chuck table 20 in the X-axis direction is provided.

The chuck table 20 has a holding surface 23 made of a porous material. The negative pressure generated on the holding surface 23 sucks and holds the wafer 100 of the work set 107. The chuck table 20 includes a pair of clamps 22 facing each other around the holding surface 23. The ring frame 105 of the work set 107 is clamped and fixed by each clamp 22.

The chuck table 20 is carried from the support base 10 to the processing space inside the housing 12 by the processing feed means 60 together with the moving plate 21 while holding the wafer 100. In the machining space, the wafer 100 is machined by the cutting mechanism 65 (see FIG. 9).

After the wafer 100 is machined, the chuck table 20 and the moving plate 21 are returned to the support base 10 by the machining feed means 60. Then, the work set 107 is sent from the chuck table 20 to the spinner cleaning unit 50 on the back side of the chuck table 20 by the conveying means 30 to be cleaned.

A touch panel 40 is installed on the side surface of the housing 12. On the touch panel 40, various information such as processing conditions related to the processing apparatus 1 is displayed. The touch panel 40 is also used to set various information such as processing conditions. As described above, the touch panel 40 functions as an input means for inputting information and also as a display means for displaying the input information.

The control means 70 executes various processes and controls each component of the processing apparatus 1 in an integrated manner. For example, detection results from various sensors (not shown) are input to the control means 70. Further, the control means 70 controls the machining feed means 60 and the cutting mechanism 65 to perform cutting on the wafer 100.

Further, the control means 70 controls the transport means 30 to control the transport of the work set 107 and the stacked work set 109. For this purpose, the control means 70 includes a first transport control unit 71 that controls the operation of the first transport means 31, and a second transport control unit 73 that controls the operation of the second transport means 41.

The machining operation of the wafer 100 in the machining apparatus 1 will be described below.
At the start of machining, as shown in FIG. 2, a stacked work set 109 composed of a plurality of work sets 107 before machining is placed on the stage 16.

In this state, the first transport control unit 71 of the control means 70 controls the first transport means 31 to support the lowermost work set 107 of the stacked work set 109 by the first lower support of the first transport means 31. The stacked work set 109 is carried into the chuck table 20 by being supported by the unit 33.

That is, as shown in FIG. 4, the first transport control unit 71 opens and closes the pair of first lower support portions 33 by using the first opening / closing mechanism 35 of the first transport means 31 on the stage 16. The tip of the first lower support portion 33 is inserted into the lower surface of the ring frame 105 in the lowermost work set 107 of the stacked work set 109. As a result, the entire stacked work set 109 is supported by the first lower support portion 33.

After that, the first transfer control unit 71 lifts the first lower support unit 33 supporting the stacked work set 109 upward by the first vertical movement means 37, and then lifts it upward by the first horizontal movement mechanism 39 on the chuck table 20. Transport to. Then, the first transfer control unit 71 again uses the first vertical moving means 37 to lower the stacked work set 109 onto the chuck table 20 as shown in FIG.

Then, as shown in FIG. 6, the first transport control unit 71 uses the first opening / closing mechanism 35 to open the first lower support unit 33 as shown by the arrow 300, and opens the lowermost work set 107. Is placed on the holding surface 23 of the chuck table 20. Further, as shown in FIG. 7, the first transport control unit 71 uses the first vertical movement means 37 to move the first lower support unit 33 upward as shown by the arrow 301. After that, the first transport control unit 71 closes the first lower support unit 33 as shown by the arrow 302 by using the first opening / closing mechanism 35, and is placed on the holding surface 23 on the first lower support unit 33. The work set 107, which is one step above the work set 107, is supported.

After that, as shown in FIG. 8, the first transfer control unit 71 transfers the first lower support unit 33 supporting the stacked work set 109 from the holding surface 23 of the chuck table 20 by the first vertical movement means 37. Move away upwards as shown by arrow 301. Then, the first transfer control unit 71 stands by while the stacked work set 109 is supported by the first lower support unit 33.

Further, as shown in FIGS. 5 to 8, each clamp 22 of the chuck table 20 opens and closes a pair of upper support portions 221 facing each other and a pair of upper support portions 221 facing each other to support the upper surface of the work set 107. A support mechanism 223 and a pair of support bases 225 arranged below the upper support portion 221 and sandwiching the work set 107 together with the upper support portion 221 are provided. Further, the clamp 22 is supported by the elevating means 24 for raising and lowering the clamp 22.

As shown in FIGS. 7 and 8, the first transfer control unit 71 transfers the lowermost work set 107 of the stacked work set 109 carried into the chuck table 20 to the upper support portion 221 of the clamp 22 of the chuck table 20. Supported by.

That is, when the lowermost work set 107 of the stacked work set 109 is placed on the holding surface 23, the first transfer control unit 71 uses the support mechanism 223 to support the upper work set 107 as shown in FIG. Part 221 is left open. Then, the first transfer control unit 71 closes the upper support unit 221 as shown by the arrow 303 in FIG. 7 after the work set 107 is placed on the holding surface 23. As a result, as shown in FIG. 8, the work set 107 is sandwiched between the upper support portion 221 and the support base 225.

After that, the first transfer control unit 71 controls the elevating means 24 to move the clamp 22 downward. As a result, as shown in FIG. 9, the work set 107 is firmly held (fixed) by the chuck table 20.

In this state, the control means 70 uses the machining feed means 60 to carry the chuck table 20 from the support base 10 to the machining space inside the housing 12 (see FIG. 3). Further, the control means 70 cuts the wafer 100 of the work set 107 along the scheduled division line 101 by using the cutting mechanism 65 having the spindle 66 and the cutting blade 67.
The cutting mechanism 65 is an example of a processing means for processing the wafer 100 of the work set 107 held on the chuck table 20.

After cutting, the control means 70 returns the chuck table 20 to the support base 10 by using the machining feed means 60. Then, the second transport control unit 73 shown in FIG. 3 controls the second transport means 41 to support the processed work set 107 held on the chuck table 20 in the second lower support of the second transport means 41. It is supported by the part 43, passes through the spinner cleaning unit 50, and is stacked and placed on the stage 16.

That is, as shown in FIG. 10, the second transport control unit 73 raises the clamp 22 by using the elevating means 24, and opens the upper support unit 221 by using the support mechanism 223 of the clamp 22. As a result, the work set 107 is released from being fixed to the chuck table 20.

After that, the second transport control unit 73 opens and closes the pair of second lower support portions 43 by using the second opening / closing mechanism 45 of the second transport means 41, so that the work set 107 held on the chuck table 20 is held. The tip of the second lower support portion 43 is inserted into the lower surface of the ring frame 105 in the above. As a result, the work set 107 is supported by the second lower support portion 43.

After that, the second transport control unit 73 lifts the second lower support unit 43 supporting the work set 107 upward by the second vertical movement means 47, and the spinner cleaning unit 50 by the second horizontal movement mechanism 49. Transport up. Then, the second transport control unit 73 again uses the second vertical moving means 47 to lower the work set 107 onto the spinner cleaning unit 50 as shown in FIG. After that, the second transport control unit 73 retracts the second lower support unit 43 upward by using the second vertical movement means 47.

The spinner cleaning unit 50 includes a spinner table 52 having a spinner holding surface 51 made of a porous material, a spindle 53 connected to the center of the lower surface of the spinner table 52, and a motor 54 for rotating the spindle 53. The spinner cleaning unit 50 injects cleaning water to clean the work set 107 while rotating the work set 107 sucked and held on the spinner holding surface 51 at high speed as shown by an arrow 304, and then injects dry air. To dry the work set 107.

After that, the second transport control unit 73 opens and closes the pair of second lower support portions 43 by using the second opening / closing mechanism 45 of the second transport means 41, so that the work set is held on the spinner holding surface 51. The tip of the second lower support portion 43 is inserted into the lower surface of the ring frame 105 in 107. As a result, the work set 107 is supported by the second lower support portion 43.

After that, the second transport control unit 73 lifts the second lower support unit 43 supporting the work set 107 upward by the second vertical movement means 47, and raises it onto the stage 16 by the second horizontal movement mechanism 49. Transport. Then, the second transfer control unit 73 lowers the work set 107 onto the stage 16 and places it on the stage 16 again by using the second vertical moving means 47, as shown in FIG.

After that, the first transport control unit 71, which has been waiting while holding the stacked work set 109 on the first lower support unit 33, uses the first vertical moving means 37 to place the stacked work set 109 on the chuck table 20. Lower the work set 107 and place it on the holding surface 23 of the chuck table 20. After that, in the same manner as described above, cutting and cleaning are performed on the mounted work set 107, and the processed work set 107 is conveyed onto the stage 16 by the second transfer control unit 73 and the second transfer means 41. NS.

Then, the second transport control unit 73 uses the second vertical movement means 47 of the second transport means 41 to stage the work set 107 supported by the second lower support portion 43 as shown in FIG. It is placed on the work set 107 mounted on the 16. In this way, the processed work set 107 is stacked on the stage 16 to form a stacked work set composed of the processed work set 107.

As described above, in the processing apparatus 1 according to the present embodiment, the stacked work set 109 can be formed by stacking the work sets 107, and the stacked work set 109 can be placed on the stage 16. Is. Therefore, a cassette for accommodating the work set 107 becomes unnecessary. Therefore, in the present embodiment, the processing apparatus 1 can be miniaturized.

Further, in the present embodiment, the stacked work set 109 is integrally transported to the chuck table 20 by the first transport means 31, and one of the stacked work sets 109, the work set 107, is mounted on the chuck table 20. It is possible to place it. Therefore, a temporary storage means for temporarily placing the work set 107 becomes unnecessary. Therefore, in the present embodiment, the processing apparatus 1 can be further miniaturized.

[Embodiment 2]
In the present embodiment, in the configuration shown in the first embodiment, the first transfer control unit 71 and the second transfer control unit 73 carry out a transfer process of the work set 107 different from the process shown in the first embodiment.

In the present embodiment, first, the first transfer control unit 71 uses the first transfer means 31 to place one work set 107 before machining on the top of the stage 16, and other workpieces before machining. The stacked work set 109 composed of the set 107 is supported by the first lower support portion 33.

Next, the second transfer control unit 73 uses the second transfer means 41 to carry one unprocessed work set 107 mounted on the top of the stage 16 onto the chuck table 20. Further, the second transfer control unit 73 stacks the processed work set 107 on the stage 16.

For example, the first transfer control unit 71 controls the first transfer means 31 in a state where the stacked work set 109 composed of a plurality of work sets 107 before machining is placed on the stage 16 (see FIG. 2). The second work set 107 from the bottom of the stacked work set 109 is supported by the first lower support portion 33, and the first lower support portion 33 is raised by the first vertical moving means 37. As a result, one work set 107 at the bottom is left on the stage 16, and the stacked work set 109 composed of the other work sets 107 before processing is moved by the first lower support portion 33 of the first transport means 31. For example, it is supported above the stage 16.

After that, the second transport control unit 73 uses the second transport means 41 to support one unprocessed work set 107 mounted on the stage 16 by the second lower support portion 43, and the second It is carried in and placed on the chuck table 20 by the vertical moving means 47 and the second horizontal moving mechanism 49. The second transfer control unit 73 fixes the work set 107 to the chuck table 20 by the clamp 22 and the elevating means 24 (see FIG. 9).

Then, after the work set 107 is machined by the cutting mechanism 65, the second transport control unit 73 controls the second transport means 41 to transfer the work set 107 after the work set to the chuck table 20. Is conveyed to the spinner cleaning unit 50, and the work set 107 is cleaned by the spinner cleaning unit 50 (see FIG. 11). After that, the second transfer control unit 73 controls the second transfer means 41 to carry out the processed work set 107 from the spinner cleaning unit 50 and place it on the stage 16 (see FIG. 12).

Next, the first transfer control unit 71 controls the first transfer means 31 to move the lowest work set 107 in the stacked work set 109 supported by the first lower support unit 33 on the stage 16. It is placed on the processed work set 107. Further, the first transfer control unit 71 uses the first lower support unit 33 to support the stacked work set 109 composed of other unprocessed work sets 107 above the stage 16.

After that, the second transfer control unit 73 controls the second transfer means 41 to support the work set 107 before processing placed on the work set 107 after processing in the stage 16 and carry it into the chuck table 20. Then, the workpiece 107 that has been machined and washed is placed on the workpiece 107 that has been machined in the stage 16 (see FIG. 13).

In this way, in the present embodiment, the first transport means 31 places the work sets 107 on the top of the stage 16 one by one from the stacked work set 109 composed of the work sets 107 before processing. Then, the second transport means 41 carries the work set 107 before processing into the chuck table 20 and the spinner cleaning unit 50, and places the work set 107 after processing on the stage 16.

In the present embodiment as well, as in the first embodiment, the cassette for accommodating the work set 107 and the temporary storage means for temporarily placing the work set 107 can be eliminated, so that the processing apparatus 1 can be miniaturized. can do.
The uppermost stage 16 described above means on the stage 16 or on the processed work set 107 stacked on the stage 16.

[Embodiment 3]
As shown in FIG. 14, the processing apparatus 2 according to the present embodiment includes a first stage 17 and a second stage 18 in place of the stage 16 in the configuration of the processing apparatus 1 shown in FIG.

Further, in the processing apparatus 2, the control means 70 does not include the first transfer control unit 71 and the second transfer control unit 73. Further, in the processing device 2, the transporting means 30 includes a lower support portion 83, an opening / closing mechanism 85, a vertical moving means 87, and a horizontal moving mechanism 89 in place of the first transporting means 31 and the second transporting means 41.

The lower support portion 83, the opening / closing mechanism 85, the vertical movement means 87, and the horizontal movement mechanism 89 of the transport means 30 shown in FIG. 14 are the first lower support portion 33 and the first lower support portion 33 of the first transport means 31 shown in FIG. 3, respectively. It has the same configuration and function as the opening / closing mechanism 35, the first vertical moving means 37, and the first horizontal moving mechanism 39.

In the present embodiment, the control means 70 carries the work set 107 mounted on the first stage 17 from the first stage 17 to the chuck table 20 by using the transport means 30. Further, the control means 70 carries out the work set 107 held by the chuck table 20 and stacks the work set 107 on the second stage 18 via the spinner cleaning unit 50.

That is, in the present embodiment, for example, the control means 70 is a transport means in a state in which a stacked work set 109 composed of a plurality of work sets 107 before machining is placed on the first stage 17 (see FIG. 2). 30 is controlled so that the uppermost work set 107 in the stacked work set 109 is supported by the lower support portion 83, and is carried and placed on the chuck table 20 by the vertical moving means 87 and the horizontal moving mechanism 89. The control means 70 fixes the work set 107 to the chuck table 20 by using the clamp 22 and the elevating means 24.

Then, after the work set 107 is cut by the cutting mechanism 65, the control means 70 controls the transport means 30 to remove the cut work set 107 from the chuck table 20 to the spinner cleaning unit 50. The work set 107 is cleaned by the spinner cleaning unit 50. After that, the control means 70 controls the transport means 30 to carry out the processed work set 107 from the spinner cleaning unit 50 and place it on the second stage 18.

In this way, in the present embodiment, the transport means 30 supports one work set 107 from the stacked work set 109 composed of the work set 107 before processing supported on the first stage 17, and chucks the chuck. The work set 107 after being carried into the table 20 and the spinner cleaning unit 50 is placed on the second stage 18.

In this embodiment as well, as in the first and second embodiments, a cassette for accommodating the work set 107 and a temporary storage means for temporarily placing the work set 107 can be eliminated. Further, in the present embodiment, the configuration of the transport means 30 can be simplified as compared with the processing apparatus 1 shown in FIG.

In the above-described first to third embodiments, as shown in FIG. 1, the ring frame 105 of the work set 107 includes the recess 111 and the pillar 115. Instead of this, a work set 207 as shown in FIG. 15 may be used.

The work set 207 is composed of a wafer 100 and a tape 103 similar to those shown in FIG. 1, and a ring frame 205. The ring frame 205 does not include the recess 111 and the pillar 115 in the configuration of the ring frame 105 shown in FIG.

The outer peripheral edge of the ring frame 205 of the work set 207 is supported by a pair of blocks 90. As shown in FIGS. 16 and 17, the block 90 has a fitting portion 91 fitted to the outer peripheral edge of the ring frame 205, a stepped recess 92 formed on the upper surface, and a recess 92 formed on the lower surface. A convex portion 93 that can be inserted into the fitting portion 91 and a claw 94 formed on the opposite side of the fitting portion 91 are provided. As shown in FIG. 17, the blocks 90 can be stacked in the vertical direction by fitting the convex portions 93 of the other blocks 90 into the concave portions 92 of one block 90.

In the work set 207, as shown in FIG. 15, a pair of blocks 90 are fitted to the outer peripheral edge of the ring frame 205 so as to face each other. While thus supported by the blocks 90, the work sets 207 can be stacked via the blocks 90, as shown in FIG.

As a result, a stacked work set 209 in which a plurality of work sets 207 are stacked through the gap is formed. As shown in FIG. 18, the stacked work set 209 can be mounted on the stage 16 of the processing apparatus 1 (see FIG. 3) or the first stage 17 (see FIG. 14) of the processing apparatus 2. be.

Then, in the stacked work set 209, the first lower support portion 33 of the first transport means 31, the second lower support portion 43 of the second transport means 41 (see FIG. 3), and the lower support portion 83 of the transport means 30 (see FIG. 3). By supporting the claw 94 of the block 90 using (see FIG. 14), it is possible to support the stacked work set 209 integrally or the work set 207 individually.

It is also possible to hold the work set 207 by the chuck table 20 by supporting the claw 94 of the block 90 by using the upper support portion 221 and the support base 225 in the clamp 22 of the chuck table 20.

Therefore, even when the stacked work set 209 including the work set 207 and the block 90 is used, the wafer 100 of the work set 207 can be cut by the configuration and process as shown in the first to third embodiments. Is.
Further, in this configuration, a more general ring frame 205 can be used.

The number of blocks 90 fitted in one ring frame 205 is not limited to two, and may be three or more.

Further, instead of the block 90, the block 95 as shown in FIGS. 19 to 21 can be used.

As shown in FIGS. 20 and 21, the block 95 has a fitting portion 96 fitted to the outer peripheral edge of the ring frame 205, two recesses 97 of holes formed on the upper surface, and a recess formed on the lower surface. It includes two rod-shaped convex portions 98 that can be inserted into 97, and a claw 94 formed on the opposite side of the fitting portion 91.

As shown in FIG. 21, the blocks 95 can also be stacked in the vertical direction by fitting the convex portions 98 of the other blocks 95 into the concave portions 97 of one block 95. Therefore, by using such a block 95 and a work set 207, it is possible to form a stacked work set 209 as shown in FIG.

In the first to third embodiments, the cutting mechanism 65 is used as a processing means for processing the wafer 100 held on the chuck table 20 (see FIG. 9). Not limited to this, the processing means may be, for example, the grinding mechanism 120 as shown in FIG. 22.

The grinding mechanism 120 includes, for example, a spindle 121, a mount 122 attached to the tip of the spindle 121, and a plurality of grinding wheels 123 arranged in an annular shape on the lower surface of the mount 122.

In this case, the chuck table 20 includes a spindle 25 and a motor 26, and is configured to be rotated as shown by arrow 310. In the example shown in FIG. 22, the work set 207 supported by the block 90 shown in FIG. 15 is held on the holding surface 23 of the chuck table 20.

When the grinding mechanism 120 is used as the processing means, the grinding wheel 123 of the grinding mechanism 120 is rotated as shown by arrow 311. The grinding wheel 123 grinds the wafer 100 of the work set 207 held on the holding surface 23 of the rotating chuck table 20.

1: Processing equipment, 10: Support stand, 12: Housing, 16: Stage,
2: Processing equipment, 17: 1st stage, 18: 2nd stage 20: Chuck table, 23: Holding surface, 24: Elevating means,
22: Clamp, 221: Upper support part, 223: Support mechanism, 225: Support base,
30: Transport means,
83: Lower support, 85: Opening and closing mechanism, 87: Vertical movement means, 89: Horizontal movement mechanism,
31: 1st transport means, 33: 1st lower support part, 35: 1st opening / closing mechanism,
37: 1st vertical movement means, 39: 1st horizontal movement mechanism,
41: 2nd transport means, 43: 2nd lower support part, 45: 2nd opening / closing mechanism,
47: 2nd vertical movement means, 49: 2nd horizontal movement mechanism,
60: Processing feed means,
65: Cutting mechanism, 66: Spindle, 67: Cutting blade,
120: Grinding mechanism, 121: Spindle, 122: Mount, 123: Grinding wheel,
70: Control means, 71: First transfer control unit, 73: Second transfer control unit,
90: block, 91: fitting part, 92: concave part, 93: convex part, 94: claw,
95: Block, 96: Fitting part, 97: Concave part, 98: Convex part,
100: Wafer, 103: Tape, 104: Aperture, 105: Ring frame,
107: Workset, 109: Stacked Workset,
111: concave, 115: pillar, 117: convex,
205: Ring frame, 207: Workset,
209: Stacked work set,

Claims (8)

A holding means for holding a work set formed by sticking a tape to a ring frame having an opening and a workpiece arranged in the opening and integrating them by a holding surface, and a holding means held by the holding means. It is a processing device provided with a processing means for processing a work piece.
The work set comprises a recess formed on the upper surface of the ring frame and a pillar formed on the lower surface and having a protrusion at the tip that can be inserted into the recess, and another recess in the recess of the ring frame. By inserting the convex portion of the ring frame of the work set, it is possible to form a stacked work set in which a plurality of the work sets are stacked through a gap.
A stage on which the stacked work set can be placed and
A transport means for carrying the work set into the holding means or carrying out the work set held by the holding means from the holding means.
With more
The transport means causes the holding means to hold one of the stacked workpieces.
The processing means processes the workpiece of the work set held by the holding means.
Processing equipment. A holding means for holding a work set formed by sticking a tape to a ring frame having an opening and a workpiece arranged in the opening and integrating them by a holding surface, and a holding means held by the holding means. It is a processing device provided with a processing means for processing a work piece.
By stacking the work sets via a pair of blocks supporting the outer peripheral edge of the ring frame, it is possible to form a stacked work set in which a plurality of the workpieces are stacked through a gap.
The block is formed on the opposite side of the fitting portion fitted to the outer peripheral edge of the ring frame, the concave portion formed on the upper surface, the convex portion formed on the lower surface and inserted into the concave portion, and the fitting portion. With nails formed,
A stage on which the stacked work set can be placed and
A transport means for carrying the work set into the holding means or carrying out the work set held by the holding means from the holding means.
With more
The transport means causes the holding means to hold one of the stacked workpieces.
The processing means processes the workpiece of the work set held by the holding means.
Processing equipment. The transport means includes a first transport means and a second transport means.
The first transport means holds a pair of opposed first lower support portions that support the lower surface of the work set, a first opening / closing mechanism that opens and closes the first lower support portion, and the first lower support portion. It is equipped with a first vertical moving means for moving in the vertical direction perpendicular to the surface.
The second transport means holds a pair of opposing second lower support portions that support the lower surface of the work set, a second opening / closing mechanism that opens and closes the second lower support portion, and the second lower support portion. A second vertical movement means for moving in the vertical direction perpendicular to the surface is provided.
The holding means includes a pair of facing upper support portions that support the upper surface of the work set, and a support mechanism that opens and closes the pair of facing upper support portions.
A first transport control unit that controls the operation of the first transport means,
A second transport control unit that controls the operation of the second transport means is further provided.
The processing apparatus according to claim 1 or 2. The first transfer control unit supports the work set at the bottom of the stacked work set mounted on the stage by the first lower support portion of the first transfer means, and supports the stacked work set. Bringing it into the holding means,
The lowermost work set of the stacked work set carried into the holding means is supported by the upper support portion of the holding means, and
The first vertical movement means of the first transport means controls the movement of the first lower support portion in the upward direction away from the holding surface.
The second transport control unit controls that the work set held by the holding means is supported by the second lower support portion of the second transport means, and is stacked and placed on the stage.
The working set at the bottom of the stacked work set is held by the holding means, and the processed work set is stacked on the stage.
The processing apparatus according to claim 3. The first transfer control unit uses the first transfer means to mount one unprocessed work set on the top of the stage, and the stacked work set composed of the other pre-processed workpieces. Is controlled by the first lower support portion,
The second transport control unit uses the second transport means to carry one unprocessed work set mounted on the top of the stage into the holding means, and on the stage. Control the stacking of the workpieces after machining,
The processing apparatus according to claim 3. The stage comprises a first stage and a second stage.
The transport means includes a pair of opposing lower support portions that support the lower surface of the work set, an opening / closing mechanism that opens and closes the lower support portion, and vertical movement that moves the lower support portion in the vertical direction perpendicular to the holding surface. With means of transportation,
The holding means includes a pair of facing upper support portions that support the upper surface of the work set, and a support mechanism that opens and closes the pair of facing upper support portions.
With more control means
The control means
The work set mounted on the first stage is carried from the first stage to the holding means by using the transport means, and the work set held by the holding means is carried by the transport means. Controls the removal from the holding means and stacking and mounting on the second stage.
The processing apparatus according to claim 1 or 2. A ring frame having an opening and supporting a work piece located in the opening via a tape.
It is provided with a concave portion formed on the upper surface and a pillar formed on the lower surface and having a convex portion at the tip that can be inserted into the concave portion.
A ring frame that can be stacked by inserting the convex portion into the concave portion. The work set including a ring frame having an opening, a work piece positioned in the opening, and a tape attached to the ring frame and the work piece and integrating them is made possible to stack. At least a pair of blocks fitted to the outer periphery of the ring frame
A fitting portion fitted to the outer peripheral edge of the ring frame and
The recess formed on the upper surface and
A convex portion formed on the lower surface and inserted into the concave portion,
A block comprising a claw formed on the opposite side of the fitting portion.

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