JP2021102960A5 - - Google Patents

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Publication number
JP2021102960A5
JP2021102960A5 JP2021011798A JP2021011798A JP2021102960A5 JP 2021102960 A5 JP2021102960 A5 JP 2021102960A5 JP 2021011798 A JP2021011798 A JP 2021011798A JP 2021011798 A JP2021011798 A JP 2021011798A JP 2021102960 A5 JP2021102960 A5 JP 2021102960A5
Authority
JP
Japan
Prior art keywords
screw
vacuum pump
rotor
type vacuum
pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021011798A
Other languages
English (en)
Japanese (ja)
Other versions
JP7339973B2 (ja
JP2021102960A (ja
Filing date
Publication date
Priority claimed from EP17207558.2A external-priority patent/EP3499041B1/de
Application filed filed Critical
Publication of JP2021102960A publication Critical patent/JP2021102960A/ja
Publication of JP2021102960A5 publication Critical patent/JP2021102960A5/ja
Application granted granted Critical
Publication of JP7339973B2 publication Critical patent/JP7339973B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021011798A 2017-12-15 2021-01-28 スクリュー式真空ポンプ Active JP7339973B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17207558.2 2017-12-15
EP17207558.2A EP3499041B1 (de) 2017-12-15 2017-12-15 Schraubenvakuumpumpe
JP2018232382A JP2019143620A (ja) 2017-12-15 2018-12-12 スクリュー式真空ポンプ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2018232382A Division JP2019143620A (ja) 2017-12-15 2018-12-12 スクリュー式真空ポンプ

Publications (3)

Publication Number Publication Date
JP2021102960A JP2021102960A (ja) 2021-07-15
JP2021102960A5 true JP2021102960A5 (pt) 2021-08-26
JP7339973B2 JP7339973B2 (ja) 2023-09-06

Family

ID=60781573

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2018232382A Pending JP2019143620A (ja) 2017-12-15 2018-12-12 スクリュー式真空ポンプ
JP2021011798A Active JP7339973B2 (ja) 2017-12-15 2021-01-28 スクリュー式真空ポンプ

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2018232382A Pending JP2019143620A (ja) 2017-12-15 2018-12-12 スクリュー式真空ポンプ

Country Status (2)

Country Link
EP (1) EP3499041B1 (pt)
JP (2) JP2019143620A (pt)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06288369A (ja) * 1993-04-06 1994-10-11 Hitachi Ltd スクリュー圧縮機の吸入ポート
JP3831115B2 (ja) * 1998-04-06 2006-10-11 大晃機械工業株式会社 ドライ真空ポンプ
DE10019637B4 (de) * 2000-04-19 2012-04-26 Leybold Vakuum Gmbh Schraubenvakuumpumpe
US6508639B2 (en) * 2000-05-26 2003-01-21 Industrial Technology Research Institute Combination double screw rotor assembly
JP4853168B2 (ja) * 2006-08-10 2012-01-11 株式会社豊田自動織機 スクリューポンプ
JP4900270B2 (ja) * 2008-02-08 2012-03-21 株式会社豊田自動織機 スクリュポンプ
JP2009243280A (ja) * 2008-03-28 2009-10-22 Hokuetsu Kogyo Co Ltd スクリュ流体機械用ケーシングの表面処理方法及びスクリュ流体機械用ケーシング
JP5353521B2 (ja) * 2009-07-22 2013-11-27 株式会社豊田自動織機 スクリューロータ
DE102011054607A1 (de) * 2010-10-27 2012-06-21 Gebr. Becker Gmbh Vakuumpumpe
DE202016005208U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Trockenverdichtende Vakuumpumpe
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe

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