JP2021082635A - Cutting device and cutting method - Google Patents

Abstract

To provide a cutting device and a cutting method for cutting a substrate easily and suitably.SOLUTION: A cutting device 1 cuts a substrate 100, which has a predetermined scribe line L on a first surface 101 and has a second surface 102 on the opposite side of the first surface 101 attached to a sheet 110, along the scribe line L. The cutting device 1 includes: a chamber 20 keeping the substrate 100 so that a first space 21 on the first surface 101 side and a second space 22 on the second surface side 102 are formed through the sheet 110; and a pressure adjustment part that individually adjusts the pressures in the first space 21 and the second space 22.SELECTED DRAWING: Figure 1

Description

The present invention relates to a dividing device and a dividing method for dividing a substrate.

Generally, in the production of a semiconductor wafer, first, the outer peripheral surface of the single crystal ingot is ground so that the diameter of the single crystal ingot becomes uniform, and the single crystal ingot is sliced into a disk shape having a thickness of about 1 mm. This is a so-called wafer. Both sides of the wafer are ground to a predetermined thickness (grinding process). Subsequently, both sides of the wafer are polished to perform a mirror finish with high flatness (polishing step). Then, the polished wafer is washed (cleaning step), and the wafer is completed. After that, the circuit pattern is printed on the surface of the wafer, and the wafer is divided into a plurality of dividing elements (chips) along a predetermined line.

The following Patent Document 1 describes a split body manufacturing apparatus in which a grid-like dividing groove is formed on one side of a plate-shaped material serving as an insulating substrate for a power module, and the plate-shaped material is divided along the dividing groove. ing.

In the split body manufacturing apparatus of Patent Document 1, a pair of plate-shaped portions having a plurality of comb-shaped convex portions formed on one surface and having an area capable of covering the entire surface of the plate-shaped material is used. .. The convex portion of the plate-shaped portion is formed so as to rise vertically to the plate-shaped portion with a constant width. As a result, when the ridge portion is arranged on the surface of the plate-shaped material, the ridge portion abuts along the length direction of the dividing groove formed in the plate-shaped material.

In the dividing step, a pair of plate-shaped portions having such convex portions are arranged so as to face each other with the plate-shaped material interposed therebetween. At this time, the convex portion of one of the plate-shaped portions is brought into contact with the dividing groove of the plate-shaped material. As a result, the plate-like material is sandwiched between the pair of ridges. In such a state, the pair of plate-shaped portions are curved, and when the curved shape exceeds a predetermined curvature, all the dividing grooves of the plate-shaped material sandwiched between the pair of plate-shaped portions are substantially at the same timing. Divided at once.

Japanese Unexamined Patent Publication No. 2009-143197

In the configuration of Patent Document 1, if the ridge portion excessively bites into the dividing groove at the time of division, the end face of the divided chip may be chipped or shavings may occur. As a result, the product quality of the chip is deteriorated.

Further, in the apparatus of Patent Document 1, it is necessary to strictly design the spacing between the convex portions of the plate-shaped portion according to the spacing between the dividing grooves of the plate-shaped material. Therefore, it is necessary to prepare a plate-shaped portion each time according to the chip size to be divided, and it takes time and effort to divide the plate-shaped material.

In view of such a problem, an object of the present invention is to provide a dividing device and a dividing method capable of easily and satisfactorily dividing a substrate.

The first aspect of the present invention relates to a dividing device that divides a substrate. In the dividing device according to this aspect, a substrate having a predetermined scribe line formed on a first surface and a second surface opposite to the first surface attached to a sheet is divided along the scribe line. The dividing device includes a chamber that holds the substrate so that a first chamber on the first surface side and a second chamber on the second surface side are formed via the sheet, and the first chamber and the first chamber. It is provided with a pressure adjusting unit for individually adjusting the pressure of each of the two chambers.

According to the dividing device according to this aspect, the pressure of the first chamber and the pressure of the second chamber can be adjusted differently from each other by the pressure adjusting unit. For example, when a pressure higher than that of the first chamber is applied to the second chamber, the seat swells toward the first chamber side. The substrate bends as the sheet swells. As a result, a force is applied to the scribe line formed on the substrate to open it to the outside of the substrate. Therefore, the cracks generated along the scribe line permeate from the first surface to the second surface of the substrate and propagate along the scribe line. As a result, the substrate is divided. In this way, the substrate can be easily divided by adjusting the pressures of the first chamber and the second chamber individually.

Further, as described above, the substrate is curved due to the pressure difference. That is, the substrate can be curved in a state of non-contact with the substrate. For this reason, it is possible to suppress chips and shavings that occur on the end faces of the individual substrates after the division. Therefore, the substrate can be satisfactorily divided.

The dividing device according to this embodiment includes a control unit that controls the pressure adjusting unit, and the control unit divides the substrate along the scribe line by a pressure difference between the first chamber and the second chamber. It may be configured to adjust the pressure in the first chamber and the second chamber so that the sheet and the substrate are curved to the state where they are.

According to the dividing device according to this aspect, the substrate is automatically divided by controlling the pressures in the first chamber and the second chamber by the control unit. Therefore, the substrate can be easily divided.

In the dividing device according to this aspect, the chamber includes a lid portion forming the first chamber and a main body portion forming the second chamber, and the inner wall surface of the lid portion has a concavely curved shape. Can be configured to have.

According to the dividing device according to this embodiment, the inner wall surface of the substrate has a concavely curved shape. Therefore, when the sheet continues to swell toward the first chamber due to the pressure difference between the first chamber and the second chamber, the sheet and the substrate are separated. Contact the inner wall of the lid. In this case, the sheet and the substrate are deformed into the same shape as the inner wall surface of the lid, that is, in a concave shape. Therefore, an opening force can be appropriately applied to the outside of the substrate. As a result, the cracks generated along the scribe line can be appropriately permeated and propagated, and the substrate can be smoothly and well divided along the scribe line.

In this case, the dividing device includes a control unit that controls the pressure adjusting unit, and the controlling unit adjusts the pressures of the first chamber and the second chamber in dividing the substrate, and the lid portion is said to have the same pressure. It may be configured to bring the first surface of the substrate into contact with the inner wall surface.

According to the dividing device according to this aspect, when a pressure higher than that of the first chamber is applied to the second chamber, the first surface of the substrate comes into contact with the inner wall surface of the lid portion. That is, the swelling of the sheet stops when the first surface of the substrate comes into contact with the inner wall surface of the lid portion. As a result, it is possible to reduce the excessive force applied to the outside of the substrate to a portion other than the scribe line on the substrate, and to prevent the substrate from cracking at an unintended portion of the substrate.

Further, the inner wall surface of the lid portion may be formed in a spherical shape.

According to the dividing device according to this aspect, when a pressure higher than that of the first chamber is applied to the second chamber, the sheet and the substrate are deformed into a spherical shape along the shape of the inner wall surface. That is, the sheet and substrate are curved with a constant curvature. As a result, the force to open the outside of the substrate is evenly applied to the scribe line on the substrate. Therefore, the cracks easily permeate uniformly along the scribe line, and the permeated cracks progress smoothly. This makes it easier and better to divide the substrate along the scribe line.

The dividing device according to this aspect may be further provided with a position adjusting portion for mounting the sheet at a predetermined position of the main body portion.

According to the dividing device according to this aspect, since the sheet can be placed in a predetermined position on the main body portion, it is possible to prevent the displacement of the substrate in the chamber. As a result, when a pressure higher than that in the first chamber is applied to the second chamber and the sheet swells, the substrate is satisfactorily curved and the substrate can be divided along the scribe line.

In this case, the peripheral portion of the sheet is fixed to the frame, the frame has a groove portion recessed inward of the sheet, the position adjusting portion is provided in the main body portion, and the groove portion of the frame is provided. It may be configured to include a pin that fits into.

According to the dividing device according to this aspect, first, the sheet to which the substrate is attached is fixed to the frame. When this frame is set in the chamber, the frame is placed in the chamber, that is, the main body, so that the pin fits in the groove of the frame. In this way, the substrate can be positioned at an appropriate position in the chamber with a simple configuration.

Further, in this case, the frame includes two V-shaped grooves, two pins engaging with the grooves, and one pin contacts both sides of the one groove. However, the other pin may be configured to contact both sides of the other groove.

According to the dividing device according to this aspect, one pin is in contact with one groove at two points. Therefore, the frame does not move in the direction connecting the contact point between one pin and one groove. However, with this configuration alone, the frame can rotate around one of the pins. In this configuration, this rotation is regulated by the engagement of the other pin with the other groove. Therefore, the frame can be appropriately placed on the main body and the substrate can be positioned at an appropriate position.

In the dividing device according to this aspect, a guide plate for guiding the lid portion is provided on the upper surface of the main body portion, and the guide plate is attached to the side surface of the main body portion so that the upper portion protrudes from the side surface of the main body portion. It can be configured such that an inclined surface descending toward the main body portion is formed on the surface on the main body portion side in the upper portion.

According to the dividing device according to this aspect, the lid portion can be overlapped with the main body portion from above while the side surface of the lid portion is aligned with the inclined surface formed on the upper portion of the guide plate. As a result, the lid portion does not shift in position with respect to the main body portion, and the lid portion can be appropriately overlapped with the main body portion.

In the dividing device according to this aspect, the main body portion and the lid portion may be configured to be fixed by toggle clamps at two sets of diagonal positions.

According to the dividing device according to this aspect, the main body and the lid can be fixed without creating a gap between the main body and the lid. As a result, when pressure is applied to the first chamber and the second chamber so as to have different pressures from each other, the first chamber and the second chamber can be sealed. Therefore, the first chamber and the second chamber are adjusted to a predetermined pressure. Further, when the first chamber is opened to atmospheric pressure and a positive pressure is applied to the second chamber, only the second chamber can be sealed.

In the dividing device according to this aspect, the lid portion may be configured to have a transparent portion in which the substrate held in the chamber can be visually recognized.

According to the dividing device according to this aspect, the inside of the chamber can be seen through the lid portion. Therefore, it can be confirmed whether or not the substrate is held in the chamber in an appropriate posture. Therefore, the user can appropriately correct the posture of the substrate and can divide the substrate more stably. Further, when the user operates the pressure adjusting unit, the pressure can be adjusted while checking the degree of swelling of the seat.

A second aspect of the present invention relates to a dividing method for dividing a substrate. In the dividing method of this embodiment, a substrate in which a predetermined scribe line is formed on the first surface and the second surface opposite to the first surface is attached to the sheet is formed for each dividing element along the scribe line. A method of dividing the substrate, wherein the substrate is held in a chamber so that a first chamber on the first surface side and a second chamber on the second surface side are formed via the sheet, and the second chamber is formed. The pressure of the first chamber and the second chamber is adjusted so that the pressure of the chamber is higher than that of the first chamber.

According to the division method according to this aspect, the same effect as that of the first aspect is obtained.

In the dividing method according to this aspect, the substrate can be attached to the sheet after tension is applied to the sheet in advance.

According to the dividing method according to this aspect, tension is uniformly applied to the entire area of the sheet. When a substrate is attached to such a sheet and pressure is applied to the first chamber and the second chamber so that the pressure in the second chamber is higher than that in the first chamber, the sheet is more likely to swell toward the lid side. Become. Therefore, the substrate is also easily curved, and the substrate can be more easily and satisfactorily divided along the scribe line.

In this case, when tension is applied to the sheet in the same direction as the formation direction of the scribe line on the substrate, a force that opens to the outside of the substrate is more likely to be applied to the scribe line when the substrate is curved. Thereby, the substrate can be divided more easily and satisfactorily.

As described above, according to the present invention, it is possible to provide a dividing device and a dividing method capable of easily and satisfactorily dividing a substrate.

The effects or significance of the present invention will be further clarified by the description of the embodiments shown below. However, the embodiments shown below are merely examples when the present invention is put into practice, and the present invention is not limited to those described in the following embodiments.

FIG. 1 is a perspective view showing the overall configuration of the dividing device according to the first embodiment. FIG. 2 is a schematic view showing a path through which air flows in the dividing device according to the first embodiment. FIG. 3A is a perspective view showing the configuration of the substrate of the dividing device according to the first embodiment. FIG. 3B is a perspective view showing the configuration of the main body of the dividing device according to the first embodiment. 4 (a) to 4 (c) are perspective views showing the configuration of the lid portion of the dividing device according to the first embodiment, respectively. FIG. 4A is a perspective view showing the configuration of the outer lid. FIG. 4B is a perspective view showing the configuration of the outer lid as viewed from a direction different from that of FIG. 4A. FIG. 4C is a perspective view of a member housed in the outer lid. FIG. 5 is a cross-sectional view of the chamber of the dividing device according to the first embodiment. 6 (a) and 6 (b) are views for explaining the air flow path in the disperser 1 according to the first embodiment, respectively, and are partially enlarged views on the positive side of the X-axis of FIG. 7 (a) to 7 (d) are diagrams for explaining the alignment of the substrates of the dividing device according to the first embodiment, respectively. FIG. 7A is a diagram showing a state in which the pin is fitted in the groove portion of the frame. FIG. 7B is a partially enlarged view of FIG. 7A. FIG. 7C is a diagram schematically showing the rotation operation of the frame. FIG. 7 (d) is a partially enlarged view of FIG. 7 (a). FIG. 8 is a flowchart showing a substrate dividing process using the dividing device according to the first embodiment. 9 (a) to 9 (d) are schematic views showing a substrate dividing operation by the dividing device according to the first embodiment, respectively. FIG. 10 is a diagram schematically showing the configuration of the dividing device according to the second embodiment. FIG. 11 is a block diagram showing a configuration of the dividing device according to the second embodiment. 12 (a) to 12 (d) are schematic views showing a substrate dividing operation by the dividing device according to the second modification, respectively.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, the X-axis, Y-axis, and Z-axis that are orthogonal to each other are added to each figure. The XY plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction. The positive side of the Z-axis is upward, and the negative side of the Z-axis is downward.

<Embodiment>
[Configuration of dividing device]
The dividing device 1 of the present embodiment is used when dividing a ceramic substrate, which is a material of a semiconductor device widely used in electronic devices and the like, into a plurality of pieces. Hereinafter, in the present embodiment, the ceramic substrate 100 is simply referred to as "substrate 100".

FIG. 1 is a perspective view showing the overall configuration of the dividing device 1.

As shown in FIG. 1, the dividing device 1 includes a chamber 20 and a pressure adjusting unit 400.

The chamber 20 holds the substrate 100 (see FIG. 3A). The chamber 20 is composed of a main body portion 200 and a lid portion 300. When the substrate 100 is set at a predetermined position of the main body 200 and the lid 300 is placed on the main body 200, the main body 200 side and the lid 300 side are displayed via the sheet 110 to which the substrate 100 is attached. Spaces are formed in each. Hereinafter, in the present embodiment, the space formed on the lid portion 300 side in the chamber 20 will be referred to as "first chamber 21", and the space formed on the main body portion 200 side will be referred to as "second chamber 22". To.

Since the substrate 100 is held in the chamber 20, the substrate 100 is not shown in FIG. Also, the sheet 110 to which the substrate 100 is attached is not shown in FIG. The configurations of the main body portion 200 and the lid portion 300 will be described in detail with reference to FIGS. 3 (a) to 4 (c).

The pressure adjusting unit 400 includes a first regulator 410, a second regulator 420, a first speed controller 430, a second speed controller 440, a valve 450, and an air pressure source 460. In FIG. 1, the first speed controller 430 and the pneumatic source 460 are not shown. The first speed controller 430 is shown in FIG. 4A, and the pneumatic source 460 is shown in FIG.

In FIG. 1, the valve 450 is provided on the side of the first regulator 410, but is also connected to the second regulator 420 via a pipe (not shown). The air flowing in from the pneumatic source 460 is divided into the first regulator 410 side and the second regulator 420 side via the valve 450.

The first regulator 410 and the first speed controller 430 are connected by a pipe (not shown). Similarly, the second regulator 420 and the second speed controller 440 are connected by a pipe (not shown).

The valve 450 is connected to the pneumatic source 460 via a pipe (not shown). When the switch 451 of the valve 450 is operated to open the valve 450, air from the pneumatic source 460 passes through the valve 450 and flows into the first regulator 410 and the second regulator 420.

The first regulator 410 and the second regulator 420 adjust the pressure of the inflowing air. The first regulator 410 is a regulator with a meter 411, and the user manually operates the knob 412 to adjust the pressure to a predetermined pressure. Like the first regulator 410, the second regulator 420 is also a regulator with a meter 421, and the user manually operates the knob 422 to adjust the pressure to a predetermined pressure.

The first speed controller 430 and the second speed controller 440 adjust the flow rate of the air flowing in from the first regulator 410 and the second regulator 420, respectively. The user adjusts the air flow rate by operating the knob 431 (see FIG. 4A) connected to the needle valve (not shown) in the first speed controller 430. Similarly for the second speed controller 440, the user adjusts the air flow rate by operating the knob 441 (see FIG. 2B) connected to the needle valve (not shown) in the second speed controller 440. To do.

FIG. 2 is a schematic view showing a path through which air flows in the dividing device 1.

As shown in FIG. 2, the air flowing in from the pneumatic source 460 is divided into a first regulator 410 that continues to the first chamber 21 side and a second regulator 420 that continues to the second chamber 22 via a valve 450. The air flowing into the first regulator 410 flows into the first chamber 21 via the first speed controller 430. The air that has flowed into the second regulator 420 flows into the second chamber 22 via the second speed controller 440.

As shown in FIG. 2, a switching valve 470 is provided between the first chamber 21 and the first speed controller 430. The switching valve 470 is a valve that is switched when air or atmospheric pressure from the pneumatic source 460 flows into the first chamber 21.

FIG. 3A is a perspective view of the substrate 100.

As shown in FIG. 3A, a scribe line L is formed on the first surface 101 of the substrate 100. In FIG. 3A, the scribe lines L are formed in a grid pattern. The sheet 110 is attached to the second surface 102, which is the surface opposite to the first surface 101 of the substrate 100. The scribe line L is not formed on the second surface 102.

The material of the sheet 110 is not particularly limited as long as it is a stretchable material. Examples of the material of the sheet 110 include polyimide resin, polyester resin, polyethylene resin, cellophane and the like.

As shown by the broken line in FIG. 3A, the outer peripheral edge of the sheet 110 is attached to the lower surface side of the frame 120. As a result, the frame 120 holds the seat 110.

As shown in FIG. 3A, the frame 120 has a first groove portion 121 and a second groove portion 122 formed on the positive side of the Y-axis and arranged in the X-axis direction. The first groove portion 121 and the second groove portion 122 are formed in a V shape and are recessed inward of the sheet 110. The first groove portion 121 has an acute-angled recess when viewed from the positive side of the Z-axis, and the second groove 122 has an obtuse-angled recess when viewed from the positive side of the Z-axis. Pins 220 and 221, which will be described later, are fitted into the first groove portion 121 and the second groove portion 122, respectively.

In the present embodiment, the description such as "the substrate 100 is mounted on the main body 200" or "the frame 120 is mounted on the main body 200" is described as "the substrate 100 is mounted on the main body 200" unless otherwise specified. The frame 120 that holds the attached sheet 110 is placed on the main body 200. " As described above, in the present embodiment, the substrate 100, the sheet 110, and the frame 120 are configured as an integral body.

FIG. 3B is a perspective view showing the configuration of the main body 200.

As shown in FIG. 3B, the main body 200 includes a case 210, pins 220, 221 and a guide plate 230, a toggle clamp 240, and legs 250. The toggle clamp 240 is shown in FIG. 1 and is omitted in FIG. 3 (b).

The case 210 has a rectangular parallelepiped shape, and the substrate 100 is placed on the upper surface 211. The case 210 has a columnar recess 213 formed from the upper surface 211 to the bottom surface 212. The inner side surface and the bottom surface 212 of the recess 213 form the side surface and the bottom surface of the second chamber 22 described above, respectively.

The case 210 has four side surfaces 214, and the four corners 215 are chamfered in the Z-axis direction. A toggle clamp 240 is attached to each corner 215 (see FIG. 1).

Pins 220 and 221 are provided at predetermined positions on the top surface 211 so that the substrate 100 is located in the center of the top surface 211. In FIG. 3B, the pins 220 and 221 are provided side by side along the X-axis direction on the Y-axis positive side of the upper surface 211 of the case 210. Pins 220 and 221 have the same size.

Four guide plates 230 are provided on the main body 200, and the shape thereof is a combination of a rectangular lower portion 231 and a trapezoidal upper portion 232. The lower portion 231 of each guide plate 230 is attached to each of the side surfaces 214 so that the upper portion 232 of the guide plate 230 protrudes from the side surface 214.

In the upper portion 232 of the guide plate 230, an inclined surface 233 that descends toward the case 210 side is formed on the surface on the case 210 side. Further, a hole 234 is formed in the upper portion 232 of the guide plate 230. A pin cylinder 235, which will be described later, is passed through the hole 234.

Returning to FIG. 1, the toggle clamp 240 is attached to each of the four corners 215 of the case 210. The toggle clamp 240 is a member that fixes the main body portion 200 and the lid portion 300.

As shown in FIG. 3B, the second speed controller 440 is attached to one of the four side surfaces 214. Therefore, a hole 216 for sending the air flowing out from the second speed controller 440 to the second chamber 22, that is, the recess 213 is formed in the side surface 214.

The legs 250 are provided at the four corners of the bottom surface of the case 210, respectively, and support the entire dividing device 1.

4 (a) to 4 (c) are perspective views showing the configuration of the lid portion 300. FIG. 4A is a perspective view showing the configuration of the outer lid 310 of the lid portion 300. FIG. 4B corresponds to FIG. 4A and has a direction different from that of FIG. 4A. It is a perspective view which shows the structure of the outer lid 310 seen from. FIG. 4C is a perspective view showing members constituting the lid portion 300 other than the outer lid 310.

As shown in FIGS. 4A to 4C, the lid portion 300 includes an outer lid 310, an inner lid 320, a seal 330, and a backing plate 340.

The outer lid 310 includes a base 311 and a protrusion 312 and two grips 313. The protrusion 312 and the two grips 313 are installed on the upper surface 311a of the base 311. The table 311 has a hole 311b formed in the central portion. The base 311 has four side surfaces 311c like the case 210 of the main body 200, and the four corners 311d are chamfered in the Z-axis direction. On the upper surface 311a, recesses 311e are formed at each of the four corners.

As shown in FIG. 4B, the first speed controller 430 is attached to one side surface 311c of the four side surfaces 311c of the base 311. Therefore, a hole 311f for sending the air flowing out from the first speed controller 430 to the first chamber 21 is formed on the side surface 311c. Further, each side surface 311c is formed with a hole 311g for inserting the pin cylinder 235 described above.

As shown in FIG. 4B, a ring-shaped seal 314 is provided on the bottom surface 311h of the base 311 in order to improve the adhesion to the main body 200.

As shown in FIG. 4A, the protrusion 312 is formed in a tubular shape. The outer diameter of the protrusion 312 is substantially the same as the diameter of the hole 311b of the base 311. The base 311 and the protrusion 312 are integrally formed.

Examples of the material of the outer lid 310 include resins such as plastic, metals such as aluminum, and alloys such as stainless steel.

As shown in FIGS. 1 and 4 (c), the inner lid 320 fits into the protrusion 312 and constitutes the inner wall of the lid 300. The outer lid 320 has a cylindrical shape, and the upper surface 321 is formed in a horizontal plane parallel to the XY plane. The bottom surface 322 is formed with a hemispherical recess. The diameter of the upper surface 321 is slightly smaller than the outer diameter of the protrusion 312. The shape of the bottom surface 322 of the inner lid 320 is not shown in FIG. 4 (c), but is shown in FIGS. 5, 6 (a) and 6 (b).

Further, examples of the material of the inner lid 320 include glass, transparent acrylic resin, and the like. When the inner lid 320 is made of the above material, the inside of the chamber 20 can be visually recognized.

The seal 330 is a ring-shaped member, and by interposing it between the protrusion 312 of the outer lid 310 and the inner lid 320, the adhesion between the outer lid 310 and the inner lid 320 can be enhanced. The radial width of the seal 330 is equal to the radial width of the bottom surface 312a (the portion shaded in FIG. 3B) of the protrusion 312. The seal 330 is fixed to the bottom surface 312a.

Further, as a material of the seal 330, for example, rubber can be mentioned.

The backing plate 340 is a ring-shaped member, which is provided under the bottom surface 322 of the inner lid 320 to reinforce the inner lid 320. The outer diameter and inner diameter of the backing plate 340 are equal to the outer diameter and inner diameter of the seal 330.

Examples of the material of the backing plate 340 include a resin compound such as plastic, a metal such as aluminum, and an alloy such as stainless steel.

FIG. 5 is a cross-sectional view of the chamber 20 when the state shown in FIG. 1, that is, the state in which the lid portion 300 is placed on the main body portion 200, is viewed from the negative side of the Y-axis. In FIG. 5, the toggle clamp 240 is omitted.

As shown in FIG. 5, in the chamber 20, the first chamber 21 is formed on the lid portion 300 side and the second chamber 22 is formed on the main body portion 200 side via the seat 110.

A slight gap 301 is formed between the outer lid 310 and the inner lid 320. The first speed controller 430 is inserted into the hole 311f of the base 311 of the outer lid 310, and the air flowing in from the first speed controller 430 passes through the hole 311f and flows out to the gap 301 and enters the first chamber 21. Fill up.

6 (a) and 6 (b) are views for explaining the air path, and are partially enlarged views on the positive side of the X-axis of FIG. In addition, in FIGS. 6A and 6B, the portion above the sheet 110, that is, the lid portion 300 side is illustrated. FIG. 6A is a route when air flows into the first chamber 21. FIG. 6B is a route when air is exhausted from the inside of the first chamber 21.

As shown by the alternate long and short dash line in FIG. 6A, the air flowing from the first speed controller 430 passes through the hole 311f and the gap 301 formed between the outer lid 310 and the inner lid 320. Then, it flows through the gap 302 between the backing plate 340 and the sheet 110 to the space between the inner lid 320 and the substrate 100, that is, the first chamber 21.

When the air in the first chamber 21 is exhausted, the air follows the reverse route of FIG. 6A. That is, as shown in FIG. 6B, the air in the first chamber 21 passes through the gap 302 and the gap 301 in order, passes through the hole 311f, and flows into the first speed controller 430. Then, the air is exhausted to the outside through the first speed controller 430 and the first regulator 410.

Next, the alignment of the substrate 100 when held in the chamber 20 will be described with reference to FIGS. 7A and 7B.

FIG. 7A is a top view of the case where the substrate 100 is placed on the upper surface 211 of the case 210 of the main body 200. 7 (b) and 7 (d) are enlarged views of the vicinity of the pin 220 and the pin 221 in FIG. 7 (a), respectively. FIG. 7C is a diagram schematically showing how the frame 120 rotates when only the pin 220 is provided on the upper surface 211 of the case 210. Note that, in FIGS. 7A and 7D, only the frame 120, the pins 220, and 221 are shown.

As shown in FIG. 7A, when the substrate 100 is placed on the main body 200, the pins 220 and 221 are fitted into the first groove 121 and the second groove 122 of the frame 120, respectively. At this time, as shown in FIG. 7B, the pin 220 is in contact with the first groove portion 121 at two points.

If the pin provided in the main body 200 is only the pin 220, and the pin 200 is fitted in the first groove 121 of the frame 120 as in the case of FIG. 7A, the frame 120 is at least It does not move in the X-axis direction. However, as shown by the dashed line in FIG. 7 (c), the frame 120 can rotate about the pin 220 in the XY plane. Therefore, the substrate 100 cannot be positioned at an appropriate position of the main body 200, that is, the substrate 100 cannot be positioned at the central portion of the upper surface 211 of the case 210.

Therefore, as shown in FIG. 7A, pins 221 are provided on the upper surface 211 of the case 210 so as to be aligned with the pins 200 in the X-axis direction. As shown in FIG. 7D, the shape of the second groove portion 122 is formed so that the tip of the second groove portion 122 has an obtuse angle than that of the first groove portion 121. Therefore, when the pin 220 is rotated while being fitted in the first groove portion 121, the pin 221 always comes into contact with the second groove portion 122 at one point. Thereby, the rotation of the frame 120 in the XY plane can be regulated.

Next, the alignment of the lid portion 300 with respect to the main body portion 200 will be described with reference to FIGS. 1 and 3 (a) to 4 (c). In the following description, a case where the user places the lid portion 300 on the main body portion 200 will be described.

When the user places the lid portion 300 on the main body portion 200, the user grips the grip portion 313 of the lid portion 300 shown in FIGS. 1 and 4 (a) to lift the lid portion 300, and the lid is directed toward the main body portion 200. Lower the part 300. At this time, the user uses the lid 300 so that the four corners 215 of the case 210 shown in FIG. 2 and the corners 311d of the base 311 of the outer lid 310 shown in FIG. 4A are aligned in the Z-axis direction. Adjust the orientation.

Further, when the lid portion 300 is placed on the main body portion 200, the user is formed on the inclined surface 233 of the guide plate 230 shown in FIG. 3 and each side surface 311c of the outer lid 310 shown in FIG. 4 (a). While confirming that the 311 g of the holes are aligned in the Z-axis direction, the lid portion 300 is lowered onto the main body portion 200. When the user places the lid 300 on the main body 200 in this way, as shown in FIG. 1, the hole 234 of the guide plate 230 and the hole 311 g of the outer lid 310 face each other, and the pin cylinder 235 becomes the hole 234. It can be inserted into the hole 311 g. In this way, the lid portion 300 is appropriately positioned with respect to the main body portion 200.

If the pin cylinder 235 cannot be inserted into the holes 234 and 311 g, the user knows that the lid 300 is not properly positioned in the body 200. Therefore, in such a case, the user may reposition the lid portion 300 on the main body portion 200.

When the lid 300 is properly positioned on the main body 200, as shown in FIG. 1, each of the four bolts 241 abuts on each of the recesses 311e of the outer lid 310, and the toggle clamp 240 and the main body 200 The lid portion 300 is fixed.

Further, as described above, the inner lid 320 constituting the inner wall of the lid portion 300 is made of a material that allows the inside of the chamber 20 to be visually recognized. Therefore, the user can look into the lid 300 from above and confirm that the substrate 100 is positioned at an appropriate position. Therefore, even if the position of the frame 120 shifts while the user places the lid 300 on the main body 200, the user again properly positions the substrate 100 on the main body 200. , The lid portion 300 may be remounted on the main body portion 200.

The first groove portion 121, the second groove portion 122, the pins 220, 221 and the guide plate 230 of the frame 120 described above align the substrate 100, that is, the frame 120 and the main body portion 200, and the main body portion 200 and the lid portion 300. It is a member used for alignment with. These correspond to the "position adjusting unit" in the claims.

Further, as described with reference to FIG. 3A, the outer peripheral edge of the sheet 110 is attached to the frame 120. As shown in FIG. 5, when the frame 120 is placed on the upper surface 211 of the case 210 of the main body 200, the member that comes into contact with the upper surface 211 is not the frame 120 but the sheet 110. As a result, a frictional force is generated between the sheet 110 and the upper surface 211 of the case 210. Therefore, once the frame 120 is positioned at an appropriate position on the case 210, the frame 120 tends to stop on the upper surface 211 of the case 210.

Therefore, when the user places the lid portion 300 on the main body portion 200, the position of the frame 120 is as long as the lid portion 300 touches the frame 120 slightly, except when the lid portion 300 strongly hits the frame 120. Misalignment is unlikely to occur.

[Division operation]
In the present embodiment, the dividing device 1 divides the substrate 100 by utilizing the pressure difference between the first chamber 21 and the second chamber 22. Specifically, the first chamber 21 is opened to the atmospheric pressure, and the second chamber 22 is subjected to a pressure higher than that of the first chamber 21, that is, a pressure higher than the atmospheric pressure. Further, the operation of the dividing device 1 is performed by the user.

Therefore, in the air path shown in FIG. 2, the user switches the switching valve 470 to the atmospheric pressure opening side.

FIG. 8 is a flowchart showing a process of dividing the substrate 100 by the dividing device 1.

As shown in FIG. 8, the division of the substrate 100 using the dividing device 1 includes a mounting step (S11) in which the substrate 100 is held by the chamber 20, and the first chamber 21 and the second chamber 22 of the chamber 20 by the user. The pressure adjusting step (S12) for dividing the substrate 100 by adjusting the pressures of the above chambers to different pressures, and the user adjusting the pressures of the first chamber 21 and the second chamber 22 of the chamber 20 to form the first chamber. It is performed by a decompression step (S13) for depressurizing 21 and the second chamber 22.

The steps S11 to S13, particularly the steps S12 and S13, will be specifically described with reference to FIGS. 9 (a) to 9 (d).

9 (a) to 9 (d) are cross-sectional views of the chamber 20 schematically showing the states of the substrate 100 and the sheet 110 in steps S11 to S13 shown in the flowchart of FIG. In FIGS. 9A to 9D, the substrate 100 and the sheet 110 are not hatched. Further, the seal 330, the backing plate 340, the first speed controller 430, and the hole 311f of the base 311 of the outer lid 310 shown in FIG. 5 are omitted.

As shown in FIG. 9A, the user appropriately positions the substrate 100 on the upper surface 211 of the case 210. Then, the lid portion 300 is placed on the main body portion 200, and the main body portion 200 and the lid portion 300 are fixed by the toggle clamp 240 (S11). When the substrate 100 is held in the chamber 20 in this way, the main body portion 200 and the lid portion 300 are fixed. FIG. 9A corresponds to the mounting step (S11) of FIG.

In step S11, the user can look into the chamber 20 from the lid 300, confirm that the substrate 100 is properly positioned on the upper surface 211 of the case 210, and realign the substrate 100 as appropriate. ..

In the state of FIG. 9A, when the user operates the switch 451 to open the valve 450, a pressure higher than the atmospheric pressure is applied to the second chamber 22. At this time, the user operates the knob 422 of the second regulator 420 to adjust the scale of the meter 421 to the predetermined pressure in order to adjust the pressure to the predetermined pressure. Further, the knob 441 of the second speed controller 440 is turned to adjust the air flow rate to a predetermined flow rate.

On the other hand, since the first chamber 21 is open to the atmospheric pressure, the atmospheric pressure flows in from the outside of the chamber 20.

When a pressure higher than the atmospheric pressure is applied to the second chamber 22, the sheet 110 swells toward the lid portion 300 as shown in FIG. 9B. The substrate 100 is appropriately positioned in the main body 200. That is, the substrate 100 is positioned at the central portion of the upper surface 211 of the case 210. Therefore, the sheet 110 swells so that the central portion becomes the top, and the substrate 100 also bends with the swelling of the sheet 110.

When a pressure higher than the atmospheric pressure is applied to the second chamber 22 and the seat 110 swells, the air in the first chamber 21 is exhausted to the outside because the first chamber 21 is open to the atmospheric pressure. As a result, the sheet 110 continues to swell, and as shown in FIG. 9C, the substrate 100 comes into contact with the inner wall of the lid portion 300, that is, the bottom surface 322 of the inner lid 320. As a result, the sheet 110 cannot be inflated any more, and the curvature of the substrate 100 stops when the substrate 100 comes into contact with the bottom surface 322.

As shown in FIGS. 9B and 9C, when the sheet 110 swells and the substrate 100 bends, a force is applied to the scribe line L of the substrate 100 to open the substrate 100 to the outside. Therefore, the cracks generated along the scribe line L permeate in the thickness direction of the substrate 100, and the permeation of such cracks progresses along the scribe line L. Then, as shown in FIG. 9D, the substrate 100 is divided along the scribe line L. Since the substrate 100 is in a curved state, when it is divided along the scribe line L, a gap is formed between the adjacent individual pieces 10. The states of FIGS. 9 (b) to 9 (d) correspond to the pressure adjusting step (S12) of FIG.

Here, it is shown that the substrate 100 is divided along the scribe line L after the substrate 100 comes into contact with the bottom surface 322 of the inner lid 320 (FIGS. 9 (c) and 9 (d)). While the substrate 100 transitions from the state of FIG. 9B to the state of FIG. 9C, the substrate 100 may be divided along the scribe line L.

The user can confirm that the substrate 100 has been divided by looking at the lid portion 300 from above. When the substrate 100 is divided, the user operates the second regulator 420 and the second speed controller 440 to reduce the pressure in the second chamber 22 to about atmospheric pressure. As a result, the swollen sheet 110 gradually descends and returns to the original state as shown in FIG. 9A. As the sheet 110 is deformed, the substrate 100 also returns from a curved state to a state parallel to the XY plane. In the curved state of the divided substrate 100, a gap was formed between the adjacent individual pieces 10, but when the substrate 100 returns to the state parallel to the XY plane, a gap is formed between the adjacent individual pieces 10. Instead, the adjacent pieces 10 come into contact with each other. This state corresponds to the decompression step (S13) of FIG. In this way, the division of the substrate 100 by the dividing device 1 is completed.

After the decompression step (S13), the user operates the switch 451 to close the valve 450. Then, the lid portion 300 is opened and the substrate 100 is taken out together with the frame 120. The individual pieces 10 are separated from the taken-out substrate 100 by a predetermined method.

<Effect of embodiment>
According to the embodiment, the following effects are achieved.

As shown in FIGS. 5 and 8 to 9 (d), in the chamber 20 of the dividing device 1, the space on the lid 300 side, that is, the first chamber 21 and the main body 200 side, is located in the chamber 20 of the dividing device 1 via the sheet 110. The second chamber 22, which is a space, is formed respectively. When the pressures of the first chamber 21 and the second chamber 22 are adjusted so that the pressure adjusting portion 400 applies a higher pressure to the second chamber 22 than that of the first chamber 21, the sheet 110 is moved toward the lid portion 300. It swells toward. The substrate 100 is curved as the sheet 110 swells. As a result, a force is applied to the scribe line L formed on the substrate 100 to open it to the outside of the substrate 100. Therefore, the cracks generated along the scribe line L permeate in the thickness direction of the substrate 100 and propagate along the scribe line L. As a result, the substrate 100 is divided into individual pieces 10. In this way, the substrate 100 can be easily divided by individually applying pressure to the first chamber 21 and the second chamber 22.

Further, as described above, the substrate 100 is not curved by any member, but is curved only by the pressure difference. In this way, the substrate 100 is curved in a state of non-contact with the substrate 100. Therefore, it is possible to suppress chipping and shaving that occur on the end face of the individual piece 10 after the division. Therefore, the substrate 100 can be satisfactorily divided.

When the first chamber 21 of the chamber 20 is opened to atmospheric pressure and a pressure higher than atmospheric pressure is applied to the second chamber 22, the sheet 110 swells toward the lid portion 300. As a result, the air in the first chamber 21 is exhausted to the outside of the chamber 20.

Here, when the bottom surface 322 of the inner lid 320 is formed in a horizontal shape instead of the curved shape as shown in FIG. 5, when the substrate 100 comes into contact with the bottom surface 322, the sheet 110 and the substrate 100 are It deforms into a horizontal plane. In such a case, the force to open the outside of the substrate 100 does not sufficiently act on the scribe line L on the substrate 100, the penetration of cracks generated along the scribe line L becomes insufficient, and further, the scribe line Cracks cannot grow well along L. Therefore, it becomes difficult to divide the substrate 100 along the scribe line L.

In this regard, according to the present embodiment, in the dividing device 1, as shown in FIGS. 1, 3 (a) to 5 and 9 (a) to 9 (d), the bottom surface 322 of the inner lid 320 is formed. , Has a concavely curved shape. Therefore, the sheet 110 and the substrate 100 are deformed into a concave shape similar to the shape of the bottom surface 322. Therefore, a force for opening the outside of the substrate 100 is appropriately applied to the scribe line L on the substrate 100, and cracks generated along the scribe line L permeate and propagate. As a result, the substrate 100 can be smoothly and satisfactorily divided along the scribe line L.

As shown in FIGS. 5 and 8 to 9 (d), when the first chamber 21 of the chamber 20 is opened to atmospheric pressure and a pressure higher than atmospheric pressure is applied to the second chamber 22, the sheet 110 is covered. It swells toward the portion 300 and deforms into a spherical shape. That is, the substrate 100 is curved with a constant curvature. As a result, a force that opens the scribe line L on the substrate 100 to the outside of the substrate 100 is evenly applied. Therefore, the cracks easily permeate uniformly along the scribe line L, and the permeated cracks progress smoothly. Thereby, the substrate 100 can be more easily and satisfactorily divided along the scribe line L.

As shown in FIGS. 3 (a) and 7 (a) to 7 (d), a position adjusting portion is provided to position the substrate 100 at an appropriate position in the chamber 20. The position adjusting unit includes a frame 120 for holding the seat 110 and pins 220 and 221 provided on the case 210 of the main body 200.

The pin 220 fits into the first groove 121 formed in the frame 120, and the pin 221 fits into the second groove 122. In this case, since the pin 220 and the first groove portion 121 come into contact with each other at two points, the frame 120 is prevented from moving in the X-axis direction. On the other hand, since the pin 221 and the second groove portion 122 come into contact with each other at one point, the frame 120 is prevented from rotating. As a result, the frame 120 can be positioned at a predetermined position on the main body 200.

As shown in FIGS. 1 and 3 (b) to 4 (b), the dividing device 1 includes a guide plate 230 for appropriately guiding the lid portion 300 to the upper surface 211 of the main body portion 200.

The guide plate 230 is attached so that the upper portion 232 protrudes from the side surface 214 of the case 210. An inclined surface 233 that descends toward the case 210 is formed on the surface of the upper portion 232 on the case 210 side.

With this configuration, when the user places the lid 300 on the main body 200, the lid 300 is placed on the main body 300 from above while the side surface 311c of the outer lid 310 is aligned with the inclined surface 233 formed on the upper portion 232. It can be properly placed on the 200.

As shown in FIG. 1, the main body portion 200 and the lid portion 300 are fixed by a toggle clamp 240. As a result, the main body 200 and the lid 300 are fixed without creating a gap between the main body 200 and the lid 300. As a result, when pressure is applied to the first chamber 21 and the second chamber 22 so as to have different pressures from each other, the first chamber 21 and the second chamber 22 can be sealed. Therefore, the first chamber 21 and the second chamber 22 are adjusted to a predetermined pressure. Further, when the first chamber 21 is opened to the atmospheric pressure and a positive pressure is applied to the second chamber 22, only the second chamber 22 can be sealed.

The chamber 20 may be configured with a hinged case.

Further, as described above, the main body portion 200 and the lid portion 300 are firmly fixed by the toggle clamp 240, but the pin cylinder 235 is used on the assumption that the fixation by the toggle clamp 240 is released. .. If the internal pressure of the chamber 20 becomes excessively high and the fixing by the toggle clamp 240 is released, the lid portion 300 may come off from the main body portion 200. Therefore, the main body portion 200 and the lid portion 300 are also fixed by the pin cylinder 235. As a result, the main body portion 200 and the lid portion 300 are more firmly fixed.

As shown in FIGS. 1 and 4 (a) to 4 (c), in the lid portion 300, the inner lid 320 constituting the inner wall is formed of a member capable of visually recognizing the inside of the chamber 20. Then, the inner lid 320 is fitted into the hole 311b of the outer lid 310. Thereby, the user can see the inside of the chamber 20 from the lid portion 300. Therefore, for example, the user can confirm whether the substrate 100 is held in the chamber 20 at an appropriate position, so that the user can appropriately correct the posture of the substrate 100 and more stably the substrate 100. Can be divided.

As shown in FIG. 3A, in the present embodiment, the scribe lines L are formed in a grid pattern, but they may be formed only in the X-axis direction or only in the Y-axis direction.

<Embodiment 2>
In the first embodiment, in step S11 of FIG. 8, the user holds the substrate 100 in the chamber 20 and fixes the main body portion 200 and the lid portion 300 with the toggle clamp 240. In steps S12 and S13, pressure was applied to the first chamber 21 and the second chamber 22 by the user operating the pressure adjusting unit 400. Further, after the substrate 100 is divided, the user has executed the work of taking out the substrate 100 from the chamber 20. In the second embodiment, these operations are controlled by the control unit 500.

FIG. 10 is a side view schematically showing the dividing device 1 according to the second embodiment. In FIG. 10, the pressure adjusting unit 400 is omitted.

In the first embodiment, the main body portion 200 and the lid portion 300 are fixed by using the toggle clamp 240. In the case of the second embodiment, as shown in FIG. 10, for example, an air cylinder 260 is used instead of the toggle clamp 240. In this case, the air cylinder 260 can be provided in the recess 311e of the base 311 of the outer lid 310. That is, four air cylinders 260 are provided on the lid 300.

When the lid portion 300 is placed on the main body portion 200 and a positive pressure is applied to the air cylinder 260, the lid portion 300 is pressed against the main body portion 200. As a result, the main body portion 200 and the lid portion 300 are fixed.

FIG. 11 is a block diagram showing the configuration of the dividing device 1. As shown in FIG. 11, the dividing device 1 includes a control unit 500, an input unit 510, a detection unit 520, a solenoid valve drive unit 530, a first drive unit 540, a second drive unit 550, and a robot hand. 560 and an air cylinder drive unit 570 are provided.

The input unit 510 accepts the start when the dividing device 1 divides the substrate 100. It also accepts the start and end of applying pressure to the chamber 20. The detection unit 520 detects the position of the substrate 100 in the dividing device 1. For the detection unit 520, for example, a sensor, an image pickup device, or the like can be used.

The solenoid valve drive unit 530 opens and closes the valve 450. In the second embodiment, the valve 450 is a solenoid valve. The first drive unit 540 drives the first regulator 410. Drives the second regulator 420. In the second embodiment, the first regulator 410 and the second regulator 420 are electropneumatic regulators.

When the substrate 100 on which the scribe line L is formed is conveyed to the dividing device 1, the robot hand 560 receives the substrate 100 and appropriately places it on the upper surface 211 of the case 210. Further, in the robot hand 560, the lid portion 300 is placed on the main body portion 200. The air cylinder drive unit 570 drives the air cylinder 260.

The control unit 500 includes an arithmetic processing circuit such as a CPU and a memory such as a ROM, RAM, and a hard disk. The control unit 500 controls each unit according to a program stored in the memory.

Next, the division operation of the substrate 100 by the division device 1 of the second embodiment will be described. This operation is the same as the flowchart of FIG. Further, a cross-sectional view of the chamber 20 schematically showing the states of the substrate 100 and the sheet 110 is shown in FIGS. 9 (a) to 9 (d).

In step S11 of FIG. 8, when the substrate 100 on which the scribe line L is formed is conveyed by a conveying mechanism (not shown) and the input unit 510 receives the start of division by the dividing device 1, the control unit 500 receives the robot. The hand 560 is controlled to receive the substrate 100. At this time, the substrate 100 is in a state of being attached to the sheet 110 held by the frame 120.

The control unit 500 mounts the frame 120 on the upper surface 211 of the case 210 on the robot hand 560 (see FIG. 2). The alignment of the frame 120 with respect to the main body 200 at this time is as described with reference to FIGS. 7 (a) to 7 (d) in the first embodiment.

Subsequently, the control unit 500 causes the robot hand 560 to place the lid portion 300 on the main body portion 200. The control unit 500 controls the air cylinder drive unit 570 to apply a positive pressure to the air cylinder 260 to fix the main body unit 200 and the lid unit 300. The states of the substrate 100 and the sheet 110 at this time are shown in FIG. 9A.

In step S12 of FIG. 8, when the user operates the switch 451 and the input unit 510 receives the start of pressure application, the control unit 500 causes the solenoid valve drive unit 530 to open the valve 450. The control unit 500 drives the second drive unit 550 to adjust the second regulator 420 to apply a pressure higher than the atmospheric pressure to the second chamber 22.

In the first chamber 21, the switching valve 470 is operated in advance by the user to open the atmospheric pressure, as in the first embodiment.

As shown in FIG. 9B, the sheet 110 swells toward the lid 300 and the substrate 100 bends. Then, as shown in FIG. 9C, the substrate 100 comes into contact with the bottom surface 322 of the inner lid 320. As a result, the sheet 110 cannot be expanded any more, and the deformation of the substrate 100 is stopped. As a result, as shown in FIG. 9D, the substrate 100 is divided along the scribe line L of the substrate 100.

At this time, a camera is used as the detection unit 520, and the image captured by this camera is displayed on the display. By looking at this image, the user can confirm that the substrate 100 has been divided.

In step S13 of FIG. 8, when the substrate 100 is divided, the control unit 500 drives the second drive unit 550 to adjust the second regulator 420 and depressurizes the second chamber 22. Then, when the user operates the switch 451 and the input unit 510 receives the end of pressure application, the control unit 500 causes the solenoid valve drive unit 530 to close the valve 450.

Subsequently, the control unit 500 causes the air cylinder drive unit 570 to apply a negative pressure to the air cylinder 260 to release the fixing between the lid unit 300 and the main body unit 200. The control unit 500 controls the robot hand 560 to take out the substrate 100 from the chamber 20, that is, the main body 200. In this way, the division of the substrate 100 is completed by the division device 1 according to the second embodiment.

In the above, the first regulator 410 and the second regulator 420 were driven by the first drive unit 540 and the second drive unit 550, respectively, but the user operates the first regulator 410 and the second regulator 420, respectively. You may.

In this case, the user adjusts the second regulator 420 and the second speed controller 440 in advance so that a predetermined pressure is applied to the second chamber 22.

<Change example 1>
In the first modification, tension is applied to the sheet 110 in advance.

The substrate 100 is generally attached to the sheet 110 and the sheet 110 is held by the frame 120 before the scribe line L is formed for ease of handling. Therefore, in the first modification, when tension is applied to the sheet 110 in advance, tension is applied to the sheet 110 before the scribe line L is formed.

A scribe line L is formed on the substrate 100 attached to the sheet 110 to which tension is applied in advance, and the substrate 100 is conveyed to the dividing device 1. The subsequent steps are as described with reference to FIGS. 8 to 9 (d), and thus the description thereof will be omitted.

In this way, when tension is applied to the sheet 110 in advance, the tension is uniformly applied to the entire area of the sheet 110. When the pressure of the first chamber 21 and the second chamber 22 is adjusted so that the pressure of the second chamber 22 is higher than that of the first chamber 21 by attaching the substrate 100 to such a sheet 110, the sheet The 110 is more likely to swell toward the lid 300 side. Therefore, the substrate 100 is also easily curved, and the substrate 100 can be more easily and satisfactorily divided along the scribe line L.

In this case, when tension is applied to the sheet 110 in the same direction as the formation direction of the scribe line L of the substrate 100, a force that opens to the outside of the substrate 100 with respect to the scribe line L when the substrate 100 is curved is more preferable. It becomes easy to hang on. Thereby, the substrate 100 can be divided more easily and satisfactorily.

<Change example 2>
In the first and second embodiments and the first modification, the shape of the inner wall of the lid 300, that is, the bottom surface 322 of the inner lid 320 was hemispherical. In the second modification, the shape of the bottom surface 322 of the inner lid 320 is formed in a horizontal plane parallel to the XY plane.

12 (a) to 12 (d) are cross-sectional views of the chamber 20 schematically showing the states of the substrate 100 and the sheet 110 when the substrate 100 is divided by the dividing device 1 according to the second modification. In FIGS. 12 (a) to 12 (d), the substrate 100 and the sheet 110 are not hatched. Further, similarly to FIGS. 12 (a) to 12 (d), the seal 330, the backing plate 340, the first speed controller 430, and the hole 311f of the base 311 of the outer lid 310 shown in FIG. 5 are omitted. ..

In the first and second embodiments, the sheet 110 swells when a pressure higher than the atmospheric pressure is applied to the second chamber 22. Since the first chamber 21 is open to atmospheric pressure, the air in the second chamber 22 is exhausted. Therefore, the sheet 110 and the substrate 100 came into contact with the inner wall surface of the lid portion 300, that is, the bottom surface 322 of the inner lid 320.

At this time, since the bottom surface 322 of the inner lid 320 is formed in a hemispherical shape, the sheet 110 and the substrate 100 are curved with a constant curvature like the bottom surface 322. Therefore, the substrate 100 was divided along the scribe line L of the substrate 100.

On the other hand, in the second modification, the shape of the bottom surface 322 of the inner lid 320 is formed in a horizontal plane parallel to the XY plane. When pressure is applied to the second chamber 22 in a state where the first chamber 21 is open to the atmospheric pressure and the sheet 110 and the substrate 100 come into contact with the bottom surface 322 of the inner lid 320 as in the first and second embodiments, the sheet The 110 and the substrate 100 are deformed into a horizontal plane parallel to the XY plane.

If the sheet 110 and the substrate 100 are deformed into such a shape, the sheet 110 may be torn, for example. Further, in the substrate 100, a force that opens to the outside of the substrate 100 acts on a place other than the scribe line L, and as a result, the substrate 100 may be cracked at an unintended place.

Therefore, in the second modification, the degree of swelling of the sheet 110 is controlled so that the substrate 100 and the sheet 110 do not come into contact with the bottom surface 322 of the inner lid 320, that is, the pressures of the first chamber 21 and the second chamber 22 are controlled. There is a need to.

The dividing process by the dividing device 1 according to the second modification will be described. The dividing step by the dividing device 1 according to the second modification is the same as the flowchart of FIG. 8, and is performed by a mounting step (S11), a pressure adjusting step (S12), and a decompression step (S13). Further, in the following description, the user operates the dividing device 1 as in the first embodiment.

As shown in FIG. 12A, the substrate 100 is held in the chamber 20, and the main body portion 200 and the lid portion 300 are fixed (S11 in FIG. 8).

The user applies pressure to each of the first chamber 21 and the second chamber 22. In order to adjust the first chamber 21 to a predetermined pressure, the user operates the knob 412 of the first regulator 410 to adjust the scale of the meter 411 to the predetermined pressure. Further, the knob 431 of the first speed controller 430 is operated to adjust the air flow rate to a predetermined flow rate.

Similarly, in the second chamber 22, the user operates the knob 422 of the second regulator 420 to adjust the scale of the meter 421 to the predetermined pressure in order to adjust the pressure to the predetermined pressure. Further, the knob 441 of the second speed controller 440 is operated to adjust the air flow rate to a predetermined flow rate.

At this time, the pressure is adjusted so that the sheet 110 and the substrate 100 do not come into contact with the bottom surface 322 of the inner lid 320, and the sheet 110 and the substrate 100 are curved. Further, the user may look into the lid portion 300 to check the degree of swelling of the sheet 110 and adjust the pressure as appropriate.

As a result, as shown in FIGS. 12B and 12C, the sheet 110 and the substrate 100 do not come into contact with the bottom surface 322 of the inner lid 320, and the sheet 110 and the substrate 100 are curved. As a result, as shown in FIG. 12 (d), the substrate 100 is divided into individual pieces 10 (S12 in FIG. 8).

When the substrate 100 is divided, the user operates the first regulator 410, the first speed controller 430, the second regulator 420, and the second speed controller 440 to apply the pressure in the first chamber 21 and the second chamber 22. Reduce to atmospheric pressure. As a result, the swollen sheet 110 gradually descends and returns to the original state as shown in FIG. 12 (a) (S13 in FIG. 8). After that, it is the same as the above-mentioned first embodiment. In this way, the division of the substrate 100 is completed by the division device 1 according to the second modification.

In the second modification, the division operation may be performed by the control unit 500 as in the second embodiment. Although the user can adjust the pressure, the control by the control unit 500 can instantly adjust the pressure according to the degree of swelling of the seat 110.

The embodiments of the present invention can be appropriately modified in various ways within the scope of the technical idea shown in the claims.

1 ... Dividing device 10 ... Individual piece 20 ... Chamber 21 ... First chamber 22 ... Second chamber 100 ... Substrate 101 ... First surface 102 ... Second surface 110 ... Sheet 120 ... Frame 121 ... First groove 122 ... Second groove 200 ... Main body 210 ... Case 214 ... Side 220, 221 ... Pin (position adjustment part)
230 ... Guide plate (position adjustment part)
240 ... Toggle clamp 300 ... Lid 310 ... Outer lid 311c ... Side 320 ... Inner lid 322 ... Bottom 400 ... Pressure control 500 ... Control L ... Scrivener line

Claims (13)

A dividing device for dividing a substrate having a predetermined scribe line formed on the first surface and having a second surface opposite to the first surface attached to a sheet along the scribe line.
A chamber that holds the substrate so that a first chamber on the first surface side and a second chamber on the second surface side are formed via the sheet.
A pressure adjusting unit for individually adjusting the pressures of the first chamber and the second chamber is provided.
A dividing device characterized by that. In the dividing device according to claim 1,
A control unit for controlling the pressure adjusting unit is provided.
The control unit bends the sheet and the substrate until the substrate is divided along the scribe line by the pressure difference between the first chamber and the second chamber. Adjusting the pressure in the second chamber,
A dividing device characterized by that. In the dividing device according to claim 1 or 2.
The chamber includes a lid portion forming the first chamber and a main body portion forming the second chamber.
The inner wall surface of the lid portion has a concavely curved shape.
A dividing device characterized by that. In the dividing device according to claim 3,
A control unit for controlling the pressure adjusting unit is provided.
The control unit adjusts the pressures of the first chamber and the second chamber in the division of the substrate to bring the first surface of the substrate into contact with the inner wall surface of the lid portion.
A dividing device characterized by that. In the dividing device according to claim 3 or 4.
The inner wall surface of the lid portion has a spherical shape.
A dividing device characterized by that. In the dividing device according to any one of claims 3 to 5,
A position adjusting unit for placing the sheet at a predetermined position of the main body portion is further provided.
A dividing device characterized by that. In the dividing device according to claim 6,
The peripheral portion of the sheet is fixed to the frame.
The frame has a groove recessed inward of the sheet.
The position adjusting unit
A pin provided in the main body and fitted in the groove of the frame.
A dividing device characterized by that. In the dividing device according to claim 7,
The frame comprises two V-shaped grooves.
It comprises two said pins that engage each of the grooves.
One of the pins contacts both sides of the one of the grooves,
The other pin contacts both sides of the other groove.
A dividing device characterized by that. In the dividing device according to any one of claims 1 to 8.
A guide plate for guiding the lid portion is provided on the upper surface of the main body portion.
The guide plate is attached to the side surface of the main body so that the upper portion protrudes from the side surface of the main body, and an inclined surface descending toward the main body is formed on the surface of the upper part on the main body side. ing,
A dividing device characterized by that. In the dividing device according to any one of claims 1 to 9.
The main body and the lid are fixed by toggle clamps at two sets of diagonal positions.
A dividing device characterized by that. In the dividing device according to any one of claims 1 to 10.
The lid portion has a transparent portion that allows the substrate held in the chamber to be visually recognized.
A dividing device characterized by that. A method of dividing a substrate having a predetermined scribe line formed on the first surface and having a second surface opposite to the first surface attached to a sheet along the scribe line for each dividing element. ,
The substrate is held in the chamber so that the first chamber on the first surface side and the second chamber on the second surface side are formed through the sheet.
The pressures of the first chamber and the second chamber are adjusted so that the pressure of the second chamber is higher than that of the first chamber.
A method of division characterized by that. In the division method according to claim 12,
After applying tension to the sheet in advance, the substrate is attached to the sheet.
A method of division characterized by that.

Images