JP2021068824A - Chuck table for cutting device - Google Patents

Abstract

To provide a chuck table for a cutting device capable of reducing processing cost and shortening a period for delivery.SOLUTION: A chuck table 10 for a cutting device comprises: a main body part 11 including a hard plate 20 having air permeability and a rubber plate 30 which is fixed on a front face side of the hard plate 20; and a frame body part 40 which is fitted to a circumference of the main body part 11 in such a manner that a holding surface 31 of the rubber plate 30 of the main body part 11 and a rear face 21 of the hard plate 20 are exposed, and fixes the main body part 11 to a table base 50 in a freely removable manner. The rubber plate 30 of the main body part 11 includes: the holding surface 31 on which a workpiece is held; a clearance groove 32 for cutting blade corresponding to a predetermined dividing line of the workpiece supported on the holding surface 31; and a suction hole 33 formed in a region defined by the clearance groove 32 for cutting blade. In the chuck table 10, a negative pressure from the table base 50 is transferred through the hard plate 20 to the suction hole 33 of the rubber plate 30.SELECTED DRAWING: Figure 4

Description

The present invention relates to a chuck table of a cutting device.

A cutting device for cutting and dividing a resin package substrate such as CSP (Chip Scale Package) or QFN (Quad Flat Non-leaded package) with a cutting blade is known. In the cutting process of dividing the resin package substrate into each chip, the resin package substrate to be processed is fixed to a chuck table having a relief groove formed according to the planned division line and a suction port for sucking and holding each chip. A jig dicer for cutting is sometimes used (see, for example, Patent Document 1). When such a chuck table is used, there is an advantage that the manufacturing cost can be suppressed because the consumable adhesive tape is not required as compared with the conventional method of processing the workpiece fixed to the annular frame with the adhesive tape. is there.

Japanese Unexamined Patent Publication No. 2015-093335

However, when the above chuck table is used, if a design change such as a change in chip size occurs, it is necessary to create a chuck table according to the changed design. Therefore, the cost of manufacturing the chuck table and the overall manufacturing period. There was a problem of increasing. Further, the chuck table protects a metal plate such as SUS (Steel Use Stainless) in which a relief groove and a suction hole are formed, and a work piece to be attached to the metal plate in the area where the work piece is placed. It consists of a rubber sheet for. However, since metal processing such as SUS is difficult, it is necessary to ask a specialist. This further causes a problem that it becomes difficult to reduce costs and shorten delivery times.

The present invention has been made in view of such problems, and an object of the present invention is to provide a chuck table of a cutting device capable of reducing processing costs and shortening delivery time.

In order to solve the above-mentioned problems and achieve the object, the chuck table of the cutting apparatus of the present invention includes a chuck table that sucks and holds a plate-shaped workpiece on which a plurality of scheduled division lines intersecting each other. A chuck table used in a cutting apparatus including a cutting unit that cuts a workpiece held on the chuck table with a cutting blade and divides the workpiece into a plurality of chips, and a table base on which the chuck table is fixed. A main body having a breathable hard plate and a rubber plate fixed to the front surface side of the hard plate, a holding surface of the rubber plate of the main body, and a back surface of the hard plate are exposed. The rubber plate of the main body is provided with a frame body that is fitted to the outer periphery of the main body and is detachably fixed to the table base, and the rubber plate of the main body is a holding surface for holding an workpiece. The table is provided with a relief groove for a cutting blade corresponding to the planned division line of the work piece supported by the holding surface, and a suction hole formed in a region partitioned by the relief groove for the cutting blade. The negative pressure from the base is transmitted to the suction hole of the rubber plate via the hard plate.

The hard plate may be a breathable hard resin or porous ceramics.

The invention of the present application can reduce the processing cost and shorten the delivery time.

FIG. 1 is a perspective view showing a configuration example of a cutting device according to an embodiment. FIG. 2 is a perspective view showing the appearance of the workpiece to be machined by the cutting apparatus shown in FIG. FIG. 3 is a perspective view showing the appearance of the work piece shown in FIG. 2 as viewed from another direction. FIG. 4 is an exploded perspective view showing a configuration example of a chuck table and a table base of the cutting apparatus shown in FIG. FIG. 5 is a schematic view showing a state of cutting by the cutting apparatus shown in FIG. FIG. 6 is a diagram showing a state in which the main body of the chuck table of the cutting apparatus shown in FIG. 1 is replaced.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment]
The chuck table 10 of the cutting apparatus 1 according to the embodiment of the present invention will be described with reference to the drawings. First, the overall configuration of the cutting apparatus 1 and the configuration of the workpiece 100 to be machined according to the embodiment will be described. FIG. 1 is a perspective view showing a configuration example of the cutting device 1 according to the embodiment. FIG. 2 is a perspective view showing the appearance of the workpiece 100 to be machined by the cutting device 1 shown in FIG. FIG. 3 is a perspective view showing the appearance of the workpiece 100 shown in FIG. 2 as viewed from another direction. In the following description, the X-axis direction is one direction in the horizontal plane. The Y-axis direction is a direction orthogonal to the X-axis direction in the horizontal plane. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction. In the cutting device 1 of the embodiment, the machining feed direction is the X-axis direction, the index feed direction is the Y-axis direction, and the cut feed direction is the Z-axis direction.

The cutting device 1 is a device that cuts the workpiece 100 held on the chuck table 10. As shown in FIG. 2, the workpiece 100 has an insulating insulating plate and a ground line embedded inside the insulating plate and made of a conductive metal, and electrodes and various wirings are provided on the front surface 102 and the back surface 103. Is a package board provided with the wiring board 101 on which the above is formed. The workpiece 100 has a plurality of scheduled division lines 104 formed on the surface 102 of the wiring board 101, and a device 105 formed in each region partitioned by the plurality of scheduled division lines 104 intersecting in a grid pattern. ..

As shown in FIG. 3, the workpiece 100 has a sealing agent 106 formed on the back surface 103 of the wiring board 101 to seal each device 105 and a wire (not shown) formed by wire bonding to each device 105. Will be done. The sealant 106 is a so-called mold resin composed of an epoxy resin, a silicon resin, a urethane resin, an unsaturated polyester resin, an acrylic urethane resin, a polyimide resin, or the like. The workpiece 100 has irregularities due to the sealing agent 106 being formed on the back surface 103 of the wiring board 101. The workpiece 100 is divided along each scheduled division line 104 and divided into a plurality of chips 107 including individual devices 105.

The number of scheduled division lines 104, the distance between the scheduled division lines 104, the number of devices 105, and the like of the workpiece 100 are not limited to the embodiments. That is, the workpieces 100 having different product numbers have different numbers of scheduled division lines 104, intervals between the scheduled division lines 104, the number of devices 105, and the like.

As shown in FIG. 1, the cutting device 1 includes a chuck table 10, a table base 50, a cutting unit 70, a water supply unit 75, an imaging unit 80, an X-axis moving unit 91, and a Y-axis moving unit 92. , Z-axis moving unit 93 and rotary moving unit 94. The cutting device 1 is a so-called facing dual type cutting device provided with two cutting units 70, that is, a two-spindle dier. The cutting device 1 further conveys a cleaning unit that cleans the workpiece 100 after cutting, a cassette that houses the workpiece 100 before and after cutting, and the workpiece 100 between the cassette, the chuck table 10, and the cleaning unit. It may be provided with a transport unit or the like. Each component of the cutting device 1 is controlled by a control unit which is a computer (not shown).

The chuck table 10 sucks and holds the workpiece 100 on the holding surface 31. The chuck table 10 does not suck and hold the work piece 100 through the adhesive tape or the like, but sucks and holds the work piece 100 directly on the holding surface 31, and also the chip 107 individually divided from the work piece 100. It sucks and holds. In the embodiment, the chuck table 10 has a rectangular holding surface 31 that is larger than the outer shape of the workpiece 100. The chuck table 10 is removable from the table base 50. The chuck table 10 is connected to the suction source 60 (see FIG. 5) via the suction source communication hole 53 of the table base 50. The chuck table 10 sucks and holds the workpiece 100 placed on the holding surface 31 by being sucked by the suction source 60. The detailed configuration of the chuck table 10 will be described later.

The chuck table 10 is fixed to the table base 50. The table base 50 is a rectangular dish to which the chuck table 10 is fitted. In the embodiment, the table base 50 is X-axis by the X-axis moving unit 91 over a machining area below the cutting unit 70 and a region where the workpiece 100 is carried in and out away from the bottom of the cutting unit 70. It is installed on the X-axis moving base 4 that is movable in the direction. In the embodiment, the table base 50 is rotatably supported around an axis parallel to the Z-axis direction by a rotational movement unit 94 movably provided in the X-axis direction by the X-axis movement unit 91. The upper surface of the X-axis moving base 4 is formed flat along the horizontal direction. The detailed configuration of the table base 50 will be described later.

The cutting unit 70 is a cutting means to which a cutting blade 71 that cuts a workpiece 100 held on a chuck table 10 and divides it into a plurality of chips 107 is detachably attached. One cutting unit 70 is provided on one pillar portion of the gate-shaped support frame 3 erected from the apparatus main body 2 via the Y-axis moving unit 92 and the Z-axis moving unit 93. The other cutting unit 70 is provided on the other pillar portion of the support frame 3 via the Y-axis moving unit 92 and the Z-axis moving unit 93. The support frame 3 is formed by connecting the upper ends of a pair of pillars with horizontal beams. Each cutting unit 70 is movable in the Y-axis direction by the Y-axis moving unit 92 and is movable in the Z-axis direction by the Z-axis moving unit 93 with respect to the workpiece 100 held on the chuck table 10. is there. The cutting unit 70 can position the cutting blade 71 at an arbitrary position on the holding surface 31 of the chuck table 10 by the Y-axis moving unit 92 and the Z-axis moving unit 93. The cutting unit 70 includes a cutting blade 71, a spindle housing 72, and a spindle 73.

The cutting blade 71 is an ultra-thin cutting grindstone having a substantially ring shape. The cutting blade 71 is a so-called hub blade in the embodiment, and has an annular circular base mounted on the spindle 73 and an annular cutting blade having a predetermined thickness arranged on the outer peripheral edge of the circular base. Be prepared. The circular base is made of a conductive metal. The cutting edge is composed of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bond material (bonding material) such as metal and resin.

The spindle housing 72 is installed on a Z-axis moving base 6 that can be moved in the Z-axis direction by a Z-axis moving unit 93 described later. The spindle housing 72 of one cutting unit 70 is supported on one pillar side of the gate-shaped support frame 3 erected from the apparatus main body 2 via the Y-axis moving unit 92 and the Z-axis moving unit 93. The spindle housing 72 of the other cutting unit 70 is supported on the other pillar side of the support frame 3 via the Y-axis moving unit 92 and the Z-axis moving unit 93. Each spindle housing 72 is movable in the Y-axis direction by the Y-axis moving unit 92 and movable in the Z-axis direction by the Z-axis moving unit 93 with respect to the workpiece 100 held by the chuck table 10. is there.

The spindle 73 is rotatably provided in the spindle housing 72 around the axis. The spindle 73 rotates when driven by a spindle motor or the like (not shown). A cutting blade 71 is attached to the tip of the spindle 73. In the embodiment, the axes of the spindle 73 and the cutting blade 71 of the cutting unit 70 are set in a direction parallel to the Y-axis direction.

The water supply unit 75 supplies working water to the workpiece 100 and the cutting blade 71 during cutting by the cutting unit 70. The water supply unit 75 includes a water supply source (not shown) and a water supply nozzle 76. The water supply source includes, for example, a tank for storing the processed water and a pump for supplying the processed water of the tank to the water supply nozzle 76. The water supply nozzle 76 is fixed to the cutting unit 70 so as to move integrally with the cutting unit 70. The water supply nozzle 76 supplies the processing water supplied from the water supply source to the workpiece 100 and the cutting blade 71.

The image pickup unit 80 is fixed to one cutting unit 70 so as to move integrally with one cutting unit 70. The image pickup unit 80 includes an image pickup element that images a predetermined region of the surface 102 of the workpiece 100 held by the chuck table 10. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor, a CMOS (Complementary MOS) image sensor, or the like. The image pickup unit 80 takes an image of an image such as for performing alignment for aligning the workpiece 100 held on the chuck table 10 with the cutting blade 71, and the acquired image is used as a control unit or the like. Output.

The X-axis moving unit 91 is a unit that relatively moves the chuck table 10 and the cutting unit 70 in the X-axis direction, which is the machining feed direction. In the embodiment, the X-axis moving unit 91 moves the table base 50 to which the chuck table 10 is fixed and the rotational moving unit 94 in the X-axis direction via the X-axis moving base 4. The X-axis moving unit 91 is provided with, for example, a well-known ball screw rotatably provided around the axis parallel to the X-axis direction, a well-known motor for rotating the ball screw around the axis, and a table base 50. A well-known guide rail that movably supports the X-axis moving base 4 to be moved in the X-axis direction is provided. In the embodiment, the guide rail of the X-axis moving unit 91 is installed in the apparatus main body 2 of the cutting apparatus 1.

The Y-axis moving unit 92 is a unit that relatively moves the chuck table 10 and the cutting unit 70 in the Y-axis direction, which is the indexing feed direction. In the embodiment, the Y-axis moving unit 92 moves the cutting unit 70 and the Z-axis moving unit 93 in the Y-axis direction. The Y-axis moving unit 92 includes, for example, a well-known ball screw rotatably provided around the axis parallel to the Y-axis direction, a well-known motor that rotates the ball screw around the axis, and a Y-axis moving base. A well-known guide rail that movably supports 5 in the Y-axis direction is provided. In the embodiment, the guide rail of the Y-axis moving unit 92 is installed on a horizontal beam that connects the upper ends of the pair of pillars of the support frame 3 of the cutting device 1.

The Z-axis moving unit 93 is a unit that relatively moves the chuck table 10 and the cutting unit 70 in the Z-axis direction, which is the cutting feed direction. In the embodiment, two Z-axis moving units 93 are provided corresponding to each cutting unit 70. In the embodiment, each Z-axis moving unit 93 moves each Z-axis moving base 6 that supports each cutting unit 70 in the Z-axis direction. The Z-axis moving unit 93 includes, for example, a well-known ball screw rotatably provided around the axis, a well-known motor that rotates the ball screw around the axis, and a cutting unit 70 that can move in the Z-axis direction. It is equipped with a well-known guide rail to support. In the embodiment, the guide rail of the Z-axis moving unit 93 is installed on the Y-axis moving base 5.

The rotary movement unit 94 is a unit that rotates the chuck table 10 and the cutting unit 70 around an axis parallel to the Z-axis direction. In the embodiment, the rotational movement unit 94 rotates the chuck table 10 around the axis parallel to the Z-axis direction via the table base 50. The rotary movement unit 94 is machined and fed in the X-axis direction together with the X-axis movement base 4 on which the table base 50 is installed.

Next, a detailed configuration of the chuck table 10 and the table base 50 according to the embodiment will be described. FIG. 4 is an exploded perspective view showing a configuration example of the chuck table 10 and the table base 50 of the cutting device 1 shown in FIG. FIG. 5 is a schematic view showing a state of cutting by the cutting apparatus 1 shown in FIG. FIG. 6 is a diagram showing a state in which the main body 11 of the chuck table 10 of the cutting device 1 shown in FIG. 1 is replaced.

As shown in FIG. 4, the chuck table 10 can be disassembled into a main body portion 11 and a frame body portion 40. Further, the chuck table 10 is removable from the table base 50. The main body 11 has a holding surface 31 of a chuck table 10 on which the workpiece 100 is held. The main body 11 has a hard plate 20 and a rubber plate 30.

The hard plate 20 is a rectangular plate larger than the outer shape of the workpiece 100. The hard plate 20 is breathable. The hard plate 20 is, for example, a breathable hard resin or porous ceramics. The breathable hard resin is, for example, a material having continuous bubbles such as urethane foam, polyethylene foam (PE: Polyethylene), polypropylene foam (PP: Polypropylene), etc., which has continuous foaming property and low dust generation property. It is a resin. The hard plate 20 may be a hard resin in which heat shrinkage is suppressed by adding a filler or the like.

The rubber plate 30 is a rectangular plate having substantially the same shape as the hard plate 20. The rubber plate 30 is laminated and fixed to the surface side of the hard plate 20 via an adhesive or the like. The rubber plate 30 is, for example, a resin such as non-breathable urethane rubber. The rubber plate 30 includes a holding surface 31, a relief groove 32 for a cutting blade, and a suction hole 33. The holding surface 31 is a surface on the surface side of the rubber plate 30 that holds the workpiece 100. The relief groove 32 for the cutting blade is a plurality of grooves formed so as to intersect the holding surface 31 of the rubber plate 30 in a grid pattern. The relief groove 32 for the cutting blade corresponds to the planned division line 104 of the workpiece 100 supported by the holding surface 31. The suction hole 33 is a through hole formed in a region defined by the cutting blade relief groove 32.

The frame body portion 40 is a rectangular frame-shaped lid that fits on the outer circumference of the main body portion 11. The frame body portion 40 detachably fixes the main body portion 11 to the table base 50. As shown in FIG. 5, in the main body portion 11 sandwiched and fixed between the frame body portion 40 and the table base 50, the holding surface 31 of the rubber plate 30 and the back surface 21 of the hard plate 20 are framed portions 40. It is exposed from the opening 41 of. As shown in FIG. 4, in the embodiment, the frame body portion 40 has a screw through hole 42 at four corners and a screw 43 screwed into the screw through hole 42. The screw through hole 42 corresponds to the screw hole 54 of the table base 50.

The chuck table 10 is fixed to the table base 50. The table base 50 is a rectangular dish body having a concave portion 51 formed in a concave shape downward from the upper surface. The back surface 21 side of the hard plate 20 is supported on the bottom surface of the recess 51 of the table base 50. The main body 11 of the chuck table 10 is housed in the recess 51 in a state of being placed on the bottom surface of the recess 51. The table base 50 has a negative pressure transmission chamber 52 formed in a concave shape downward from the bottom surface of the recess 51, and a suction source communication hole 53 formed in the bottom surface of the negative pressure transmission chamber 52. The negative pressure transmission chamber 52 is preferably a rectangular chamber formed including a region corresponding to a region where the suction hole 33 of the rubber plate 30 is formed. The negative pressure transmission chamber 52 communicates with the recess 51. In the embodiment, the suction source communication hole 53 is formed in a circular shape in the center of the bottom surface of the negative pressure transmission chamber 52, but the present invention is not limited to this. As shown in FIG. 5, the suction source communication hole 53 is connected to the suction source 60. A switching valve 61 may be provided in the passage connecting the suction source 60 and the suction source communication hole 53. The switching valve 61 communicates the suction source 60 and the suction source communication hole 53 only when the power is on. As shown in FIG. 4, the table base 50 has screw holes 54 at four corners in the embodiment. The screw hole 54 corresponds to the screw through hole 42 of the frame body portion 40.

As shown in FIG. 5, the table base 50 houses the main body portion 11, and the frame body portion 40 is fixed by the screws 43, so that the negative pressure transmission chamber 52 is sealed. In the chuck table 10, the negative pressure of the negative pressure transmission chamber 52 of the table base 50 generated by the suction by the suction source 60 is transmitted to the suction hole 33 of the rubber plate 30 via the breathable hard plate 20. The workpiece 100 is sucked and held. In the embodiment, the chuck table 10 sucks and holds the back surface 103 side of the workpiece 100 containing the sealing agent 106. At this time, by aligning the planned division line 104 of the workpiece 100 with the relief groove 32 for the cutting blade of the rubber plate 30, the cutting blade 71 cuts the workpiece 100 when the cutting unit 70 cuts the workpiece 100. Cutting of the rubber plate 30 can be suppressed.

The main body 11 is manufactured, for example, by attaching a rubber plate 30 to a hard plate 20 with an adhesive or the like, and then forming a cutting blade relief groove 32 and a suction hole 33 in the rubber plate 30. After forming the cutting blade relief groove 32 and the suction hole 33 in the rubber plate 30, the main body 11 attaches the rubber plate 30 in which the cutting blade relief groove 32 and the suction hole 33 are formed to the hard plate 20 with an adhesive or the like. It may be manufactured by pasting.

The number of relief grooves 32 for cutting blades of the rubber plate 30, the distance between the relief grooves 32 for cutting blades, the number of suction holes 33, and the like are the number of planned division lines 104 of the corresponding workpiece 100 and the planned division lines 104. It needs to be formed according to the distance between the devices, the number of devices 105, and the like. The chuck table 10 of the embodiment has the number of relief grooves 32 for cutting blades and cutting according to the number of scheduled division lines 104 of the corresponding workpiece 100, the distance between the scheduled division lines 104, the number of devices 105, and the like. It is possible to select and attach one main body portion 11 among a plurality of main body portions 11 having different distances between the blade relief grooves 32 and the number of suction holes 33 and the like.

The chuck table 10 is removable from the table base 50 and can be disassembled into a main body portion 11 and a frame body portion 40. As a result, as shown in FIG. 6, when the frame body portion 40 is removed from the table base 50, the main body portion 11-1 housed between the frame body portion 40 and the table base 50 is replaced with another main body portion. It can be replaced with 11-2. In the replacement of the main body portion 11, first, the screw 43 that fixes the frame body portion 40 to the table base 50 is removed. Next, the outer periphery of the used main body portion 11-1 is exposed by lifting and removing the frame body portion 40 from the table base 50. Next, the main body 11-1 housed in the table base 50 is lifted from the table base 50 and removed, and then another main body 11-2 is placed on the bottom surface of the recess 51 of the table base 50. Further, the frame body portion 40 is attached to the table base 50 and fixed by the screws 43 to complete the replacement.

As described above, the chuck table 10 of the cutting device 1 according to the embodiment includes a main body portion 11 and a frame body portion 40 for fixing the main body portion 11 to the table base 50. The main body 11 is easy to process because the cutting blade relief groove 32 and the suction hole 33 are formed in the rubber plate 30 made of resin. As a result, the processing cost can be reduced and the delivery time can be shortened. Further, since the frame body portion 40 detachably fixes the main body portion 11 to the table base 50, only the main body portion 11 can be easily replaced. As a result, even when a design change such as a change in the chip size occurs, it is possible to suppress an increase in the cost of manufacturing the chuck table 10 and the entire manufacturing period. The chuck table 10 can be formed inexpensively and the main body 11 can be easily replaced even if the suction force is reduced due to clogging of the hard plate 20 by sucking cutting chips, for example.

Further, in the conventional chuck table, the back surface of a metal plate such as SUS having a holding surface is made to face the negative pressure transmission chamber, and the suction hole of the metal plate is directly applied with negative pressure from the negative pressure transmission chamber. Since the lower part of the cavity is hollow, the holding surface may vibrate during processing. On the other hand, in the chuck table 10 of the embodiment, the rubber plate 30 is fixed to the breathable hard plate 20, and the hard plate 20 is housed in the recess 51 of the table base 50 and placed on the bottom surface of the recess 51. Therefore, the holding surface 31 is stably fixed. As a result, there is also an effect that the deviation or chipping of the outer shape of the chip 107 due to the deviation of the workpiece 100 during the cutting process is suppressed. Further, since the rubber plate 30 forming the holding surface 31 is supported by the hard plate 20 supported on the bottom surface of the recess 51, the holding surface 31 is fixed even if the main body 11 is fixed by tightening the screw 43. It also has the effect of being less distorted.

The present invention is not limited to the above embodiment. That is, it can be modified in various ways without departing from the gist of the present invention.

1 Cutting device 10 Chuck table 11, 11-1, 11-2 Main body 20 Hard plate 21 Back side 30 Rubber plate 31 Holding surface 32 Relief groove for cutting blade 33 Suction hole 40 Frame body 50 Table base 52 Negative pressure transmission chamber 70 Cutting unit 71 Cutting blade 100 Work piece 104 Scheduled division line 107 Chip

Claims (2)

A chuck table that sucks and holds a plate-shaped workpiece on which multiple scheduled division lines intersecting each other, and a cutting that cuts the workpiece held on the chuck table with a cutting blade and divides it into a plurality of chips. A chuck table used in a cutting device including a unit and a table base to which the chuck table is fixed.
A main body having a breathable hard plate and a rubber plate fixed to the surface side of the hard plate.
A frame body portion that fits on the outer periphery of the main body portion so that the holding surface of the rubber plate of the main body portion and the back surface of the hard plate are exposed, and the main body portion is detachably fixed to the table base.
With
The rubber plate of the main body is
The holding surface that holds the work piece,
A relief groove for a cutting blade corresponding to the planned division line of the work piece supported by the holding surface, and
A suction hole formed in the area partitioned by the cutting blade relief groove, and
With
Negative pressure from the table base is transmitted to the suction holes of the rubber plate via the hard plate.
Chuck table for cutting equipment. The hard plate is a breathable hard resin or porous ceramics.
The chuck table of the cutting apparatus according to claim 1.

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