SG10202010109VA - Chuck table for cutting apparatus - Google Patents

Chuck table for cutting apparatus

Info

Publication number
SG10202010109VA
SG10202010109VA SG10202010109VA SG10202010109VA SG10202010109VA SG 10202010109V A SG10202010109V A SG 10202010109VA SG 10202010109V A SG10202010109V A SG 10202010109VA SG 10202010109V A SG10202010109V A SG 10202010109VA SG 10202010109V A SG10202010109V A SG 10202010109VA
Authority
SG
Singapore
Prior art keywords
cutting apparatus
chuck table
chuck
cutting
Prior art date
Application number
SG10202010109VA
Inventor
Kaneko Tomohiro
Arifuku Norihisa
Saito Hiroshi
FUSHIDA Masayasu
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10202010109VA publication Critical patent/SG10202010109VA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
SG10202010109VA 2019-10-24 2020-10-12 Chuck table for cutting apparatus SG10202010109VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019193653A JP7390855B2 (en) 2019-10-24 2019-10-24 Chuck table of cutting equipment

Publications (1)

Publication Number Publication Date
SG10202010109VA true SG10202010109VA (en) 2021-05-28

Family

ID=75637566

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202010109VA SG10202010109VA (en) 2019-10-24 2020-10-12 Chuck table for cutting apparatus

Country Status (5)

Country Link
JP (1) JP7390855B2 (en)
KR (1) KR20210048983A (en)
PH (1) PH12020050367A1 (en)
SG (1) SG10202010109VA (en)
TW (1) TW202116482A (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6004725B2 (en) * 2012-04-24 2016-10-12 株式会社ディスコ Chuck table mechanism of processing equipment
JP6173173B2 (en) 2013-11-11 2017-08-02 株式会社ディスコ Cutting equipment
JP6301147B2 (en) * 2014-02-13 2018-03-28 株式会社ディスコ Holding jig
JP6382039B2 (en) * 2014-09-04 2018-08-29 Ｔｏｗａ株式会社 Cutting apparatus, adsorption mechanism and apparatus using the same

Also Published As

Publication number Publication date
TW202116482A (en) 2021-05-01
JP7390855B2 (en) 2023-12-04
KR20210048983A (en) 2021-05-04
JP2021068824A (en) 2021-04-30
PH12020050367A1 (en) 2021-05-10

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