PH12020050367A1 - Chuck table for cutting apparatus - Google Patents

Chuck table for cutting apparatus

Info

Publication number
PH12020050367A1
PH12020050367A1 PH12020050367A PH12020050367A PH12020050367A1 PH 12020050367 A1 PH12020050367 A1 PH 12020050367A1 PH 12020050367 A PH12020050367 A PH 12020050367A PH 12020050367 A PH12020050367 A PH 12020050367A PH 12020050367 A1 PH12020050367 A1 PH 12020050367A1
Authority
PH
Philippines
Prior art keywords
main body
holding surface
rubber plate
chuck table
cutting apparatus
Prior art date
Application number
PH12020050367A
Inventor
Tomohiro Kaneko
Norihisa Arifuku
Hiroshi Saito
Masayasu Fushida
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of PH12020050367A1 publication Critical patent/PH12020050367A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

A chuck table for use in a cutting apparatus includes a main body having an air-permeable hard plate and a rubber plate fixed to a face side of the hard plate; and a frame fitted over an outer circumference of the main body such that a holding surface of the rubber plate and a reverse side of the hard plate are exposed, the frame securing the main body detachably to a table base. The rubber plate includes the holding surface for holding the workpiece thereon, cutting blade clearance grooves corresponding to projected dicing lines on a workpiece held on the holding surface, and suction holes defined in areas demarcated by the cutting blade clearance grooves.
PH12020050367A 2019-10-24 2020-10-06 Chuck table for cutting apparatus PH12020050367A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019193653A JP7390855B2 (en) 2019-10-24 2019-10-24 Chuck table of cutting equipment

Publications (1)

Publication Number Publication Date
PH12020050367A1 true PH12020050367A1 (en) 2021-05-10

Family

ID=75637566

Family Applications (1)

Application Number Title Priority Date Filing Date
PH12020050367A PH12020050367A1 (en) 2019-10-24 2020-10-06 Chuck table for cutting apparatus

Country Status (5)

Country Link
JP (1) JP7390855B2 (en)
KR (1) KR20210048983A (en)
PH (1) PH12020050367A1 (en)
SG (1) SG10202010109VA (en)
TW (1) TW202116482A (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6004725B2 (en) * 2012-04-24 2016-10-12 株式会社ディスコ Chuck table mechanism of processing equipment
JP6173173B2 (en) 2013-11-11 2017-08-02 株式会社ディスコ Cutting equipment
JP6301147B2 (en) * 2014-02-13 2018-03-28 株式会社ディスコ Holding jig
JP6382039B2 (en) * 2014-09-04 2018-08-29 Ｔｏｗａ株式会社 Cutting apparatus, adsorption mechanism and apparatus using the same

Also Published As

Publication number Publication date
SG10202010109VA (en) 2021-05-28
TW202116482A (en) 2021-05-01
JP7390855B2 (en) 2023-12-04
KR20210048983A (en) 2021-05-04
JP2021068824A (en) 2021-04-30

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