JP2021028643A - Inner surface detection system - Google Patents

Abstract

To provide an inner detection system capable of detecting an inner surface of an object in a more convenience manner.SOLUTION: An inner detection system of an embodiment includes: a deflection part that deflects light in a first direction from an inner surface of an object to light in a second direction; a first irradiation part that is located in a direction opposite to the second direction of the deflection part, and irradiates the inner surface with light; a camera that images the inner surface by light which has passed through the deflection part; and a movement mechanism that is provided separately from the deflection part, and moves the first irradiation unit along the second direction with respect to the camera and the deflection part.SELECTED DRAWING: Figure 1

Description

The present invention relates to an internal inspection system.

Conventionally, there is known a technique for inspecting the inner surface of an object based on light irradiating the inner surface of the object vertically.

Japanese Unexamined Patent Publication No. 2015-132588

In the above-mentioned prior art, the image to be captured is an image obtained by capturing specularly reflected light from the inner surface, but in that case, depending on the properties of the inner surface of the object, the type of abnormality that can occur on the inner surface, etc. In some cases, it was difficult to determine the presence or absence.

Therefore, one of the problems of the present invention is to obtain an internal inspection system capable of more conveniently inspecting the inner surface of an object.

The inner surface inspection system of the embodiment is positioned at a deflection portion that deflects light in the first direction from the inner surface of the object to light in the second direction and a direction opposite to the second direction of the deflection portion. A first irradiation unit that irradiates the inner surface with diffused light, a camera that photographs the inner surface by light passing through the deflection unit, and the deflection unit are provided separately from the first irradiation unit. A moving mechanism for moving the camera and the deflection portion along the second direction is provided.

FIG. 1 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal inspection system of the first embodiment. FIG. 2 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal surface inspection system of the first embodiment, showing a state in which the first light source has been moved to a position different from the position of FIG. It is a figure. FIG. 3 is a schematic and exemplary cross-sectional view of a schematic configuration of a portion of the internal inspection system of the second embodiment. FIG. 4 is a schematic and exemplary cross-sectional view of a schematic configuration of a portion of the internal inspection system of the third embodiment. FIG. 5 is a schematic and exemplary cross-sectional view of a schematic configuration of a portion of the internal inspection system of the fourth embodiment. FIG. 6 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal surface inspection system of the fourth embodiment, showing a state in which the first light source has been moved to a position different from the position of FIG. It is a figure. FIG. 7 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal surface inspection system of the fifth embodiment, showing a state in which the first light source is turned on. FIG. 8 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal surface inspection system of the fifth embodiment, showing a state in which the second light source is turned on. FIG. 9 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal surface inspection system of the fifth embodiment, showing a state in which the third light source is turned on. FIG. 10 is a schematic and exemplary view of the assembly used in the internal inspection system of the fifth embodiment, and is a cross-sectional view taken along the line XX of FIG. FIG. 11 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal inspection system of the sixth embodiment. FIG. 12 is a schematic and exemplary diagram of a second light source used in the internal inspection system of the sixth embodiment. FIG. 13 is a schematic and exemplary cross-sectional view of the reflective surface and its surroundings used in the internal inspection system of the seventh embodiment. FIG. 14 is a schematic and exemplary cross-sectional view of the reflective surface and its surroundings used in the internal inspection system of the eighth embodiment. FIG. 15 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal inspection system of the ninth embodiment. FIG. 16 is a schematic and exemplary cross-sectional view of the schematic configuration of the internal inspection system of the tenth embodiment.

Hereinafter, exemplary embodiments of the present invention will be disclosed. The configurations and controls of the embodiments shown below, and the actions and results (effects) brought about by the configurations and controls, are examples. The present invention can be realized by means other than the configurations and controls disclosed in the following embodiments. In addition, the present invention can obtain various effects including derivative effects obtained by the basic configuration and control. It should be noted that the following exemplary embodiments include similar components. Therefore, in the following, similar components are given a common reference numeral, and duplicate description is omitted.

<First Embodiment>
In the inner surface inspection system 100 shown in FIG. 1, the camera 2 photographs the inner surface 1a of the object 1. Based on the image taken by the camera 2, the presence or absence of abnormalities (defects) such as protrusions, recesses, scratches, and stains on the inner surface 1a is examined visually or by image processing. The object 1 is, for example, formed in a cylindrical shape centered on the central axis Ax. The object 1 has a direction along the central axis Ax, that is, an end portion 1b on one side (left side in FIG. 1) in the axial direction and an end portion 1c on the other side (right side in FIG. 1) in the axial direction. ing. Further, the axial direction from the end portion 1c to the end portion 1b is described as the B direction in the drawing. The B direction is along the central axis Ax and parallel to the central axis Ax. The B direction is an example of the second direction. The object 1 may also be referred to as an inspection body or an inspection object. The inner surface 1a may also be referred to as an inspection surface. The inside of the cylinder can also be called a space or an interior. The object 1 is not limited to a cylindrical object.

By moving the object 1 and the inner surface inspection system 100 in the direction along the central axis Ax, that is, in the axial direction by the moving mechanisms 23 and 24, the inspection area Da, which is the first area of the inner surface 1a, is set. It can move in the axial direction. Further, the inspection area Da can be moved in the circumferential direction of the central axis Ax by relatively rotating the object 1 and the inner surface inspection system 100 around the central axis Ax by the moving mechanism 23. Thereby, the inspection can be performed on a wider range of the inner surface 1a, for example, the entire area.

The internal surface inspection system 100 includes a camera 2, a light source 4, a rod-shaped member 10, and a mirror 12. The rod-shaped member 10 supports the mirror 12. At least a part of each of the rod-shaped member 10 and the mirror 12 is housed in the cylinder of the object 1. The light source 4 irradiates the inspection area Da on the inner surface 1a with light. The mirror 12 directs the light from the inspection area Da toward the camera 2. In the inner surface inspection system 100, the diffusely reflected light in the inspection region Da of the light from the light source 4 is photographed by the camera 2 through the mirror 12. The light reflected by the inspection area Da and directed to the camera 2 passes between the pair of lines L in FIG. In other words, the pair of lines L indicate the width of the light reflected by the inspection area Da and directed toward the camera 2. The broken line arrows in each figure schematically and exemplify the direction in which the light travels. The rod-shaped member 10 and the mirror 12 form an optical unit 20 (unit), and the optical unit 20 and the camera 2 form an imaging system. The rod-shaped member 10 is also referred to as a support member or a passage member, the optical unit 20 is also referred to as an optical device, and the imaging system may also be referred to as an imaging device. The light source 4 is an example of the first irradiation unit and the first light source.

The rod-shaped member 10 has a tubular body 10a that extends along the central axis Ax, that is, extends in the B direction. The body 10a has a cylindrical shape as an example. The body 10a has an end portion 10b in a direction along the central axis Ax, that is, one side in the axial direction (left side in FIG. 1) and an end portion 10c on the other side in the axial direction (right side in FIG. 1). There is. The opening of the end 10b is open, and the opening of the end 10c is closed by the wall 10f. Further, the body 10a has an outer surface 10e (outer peripheral surface) extending over the end portion 10b and the end portion 10c. The outer surface 10e is the outer surface of the body 10a and the rod-shaped member 10. The outer surface 10e is formed in a tubular shape extending along the central axis Ax, that is, extending in the B direction. Further, the end portion 10c is provided with an opening portion 10d. The opening 10d is a through hole that penetrates the body 10a (outer surface 10e). In the rod-shaped member 10, the light (diffused light) from the inner surface 1a enters the cylinder of the body 10a (inside the outer surface 10e) through the opening 10d, and the light entering the cylinder is reflected by the mirror 12 and enters the cylinder. Head toward B inside. That is, the light from the mirror 12 in the B direction passes through the inside of the cylinder of the body 10a (inside the outer surface 10e). Here, in the present embodiment, the inspection area Da is an area facing the opening 10d on the inner surface 1a. The rod-shaped member 10 is made of a metal material, a synthetic resin material, or the like, and is opaque. The rod-shaped member 10 also functions as a shielding wall for preventing the light reflected by the mirror 12 from leaking. The body 10a may also be referred to as a tubular body. The rod-shaped member 10 is an example of the first member, and the wall portion 10f is an example of the first light-shielding portion (light-shielding portion).

The mirror 12 is provided in the cylinder of the end portion 10c of the body 10a. The mirror 12 deflects the light in the first direction D1 from the inspection region Da on the inner surface 1a to the light in the B direction by the reflecting surface 12a inclined with respect to the central axis Ax. The reflecting surface 12a is, for example, a flat surface. The first direction D1 is, for example, a direction orthogonal to the axial direction (B direction). The mirror 12 is fixed to the rod-shaped member 10. The reflecting surface 12a is an example of a deflection portion.

The light source 4 is located in the direction opposite to the B direction (right side in FIG. 1) of the reflecting surface 12a (mirror 12), and is supported (fixed) by a support member 5 different from the rod-shaped member 10. The light source 4 is positioned at an axial distance from the wall portion 10f of the body 10a. The light source 4 may be located in the cylinder of the object 1. The light source 4 irradiates the inner surface 1a with light. Specifically, the light source 4 emits diffused light in a predetermined angle range with respect to the central axis Ax, and at least a part of the light is directed toward the inspection region Da. The light source 4 is, for example, an LED (light emitting diode) light source. The support member 5 may have various shapes such as a plate shape and a tubular shape. The support member 5 may also be referred to as a support portion. The support member 5 is an example of the second member.

The camera 2 is located on the B direction side of the body 10a. The camera 2 photographs the inner surface 1a by the light passing through the inside of the mirror 12 and the body 10a, that is, the inside of the outer surface 10e. The camera 2 and the optical unit 20 are supported by the support mechanism 25. The camera 2, the optical unit 20, and the support mechanism 25 constitute an image pickup unit 26. The support mechanism 25 may also be referred to as a support portion.

Next, the moving mechanisms 23 and 24 will be described. As shown in FIGS. 1 and 2, the moving mechanism 23 can move the light source 4 along the central axis Ax. The moving mechanism 23 includes a motor 23a, a rotation transmission mechanism 23b, a motion conversion mechanism 23c, and the like. In the moving mechanism 23, the rotation of the motor 23a is transmitted to the motion conversion mechanism 23c via a rotation transmission mechanism 23b such as a gear set or a belt-pulley. The motion conversion mechanism 23c is a mechanism that converts rotation into linear motion, such as a ball screw or a rack and pinion. The motion conversion mechanism 23c converts the rotation of the rotation transmission mechanism 23b into the linear motion of the connecting member 23d connected to the light source 4 via the support member 5. Therefore, the position of the light source 4 can be changed by changing the rotation angle of the motor 23a by a control unit (not shown). The moving mechanism 24 can also have the same components as the moving mechanism 23, that is, the motor 24a, the rotation transmission mechanism 24b, the motion conversion mechanism 24c, and the connecting member 24d. The connecting member 24d is connected to the support mechanism 25. Therefore, the position of the image pickup unit 26 can be changed by changing the rotation angle of the motor 24a by a control unit (not shown). Therefore, the inspection area Da can be moved along the axial direction of the object 1. The moving mechanism 23 and the moving mechanism 24 can move the light source 4 and the image pickup unit 26 at the same speed along the central axis Ax.

The moving mechanism 23 and the moving mechanism 24 having the above configuration can relatively move the light source 4 and the imaging unit 26 along the B direction. That is, in the present embodiment, the light source 4 and the mirror 12 (reflection surface 12a) are provided so as to be relatively movable along the B direction. Therefore, the distance between the light source 4 and the reflecting surface 12a can be changed. Here, there is an appropriate light irradiation angle (incident angle) for obtaining an image with good contrast according to the surface state of the inner surface 1a. By changing the distance between the light source 4 and the reflecting surface 12a according to the surface condition of the inner surface 1a, the irradiation angle from the light source 4 with respect to the inner surface 1a (inspection area Da) can be appropriately adjusted. Further, in the case of a structure in which the diameter of the inner surface 1a (inner diameter of the object 1) changes at a position along the B direction, the distance between the light source 4 and the reflecting surface 12a is changed according to the diameter of the inner surface 1a. Thereby, the irradiation angle from the light source 4 with respect to the inner surface 1a (inspection area Da) can be adjusted.

Further, the support mechanism 25 includes a support portion 25a (moving portion) that supports the optical unit 20, a support portion 25b (moving portion) that supports the camera 2, and a base portion 25c that movably supports the support portions 25a and 25b. And have. The support mechanism 25 can move the support portion 25a and the support portion 25b independently of each other along the central axis Ax with respect to the base portion 25c. That is, the support mechanism 25 can move the optical unit 20 and the camera 2 independently of each other along the central axis Ax. Therefore, the support mechanism 25 can independently change the position of the optical unit 20 and the position of the camera 2. The support mechanism 25 can adjust the focus of the camera 2 by changing the relative position between the optical unit 20 and the camera 2. Further, the support mechanism 25 has a rotation mechanism that rotates the optical unit 20 around the central axis Ax. By rotating the optical unit 20 around the central axis Ax by the rotation mechanism, the inspection region Da on the inner surface 1a can be moved in the circumferential direction of the central axis Ax. The internal surface inspection system 100 may include a moving mechanism (not shown) that moves the object 1 along the central axis Ax.

Further, the object 1 is supported and fixed to a support mechanism 22 such as a table or a chuck. The support mechanism 22 may also be referred to as a support device or a pedestal.

In the above configuration, the diffused light emitted from the light source 4 irradiates the inspection region Da on the inner surface 1a of the object 1 on the side opposite to the B direction of the inspection region Da and at an angle. The diffused light reflected in the inspection area Da is incident on the camera 2 through the reflecting surface 12a of the mirror 12. That is, the camera 2 captures an image of the inner surface 1a including the diffused light applied to the inspection area Da. Then, an image processing unit (control unit) (not shown) detects an abnormality such as the presence or absence of unevenness on the inner surface 1a based on the image captured by the camera 2. The image captured by the camera 2 and the detection result of the abnormality are displayed by a display device (not shown). At this time, the wall portion 10f of the rod-shaped member 10 located between the light source 4 and the reflecting surface 12a (mirror 12) shields the light from the light source 4 toward the outside of the inspection area Da. Specifically, the wall portion 10f shields at least the light directly directed from the light source 4 to the mirror 12.

As described above, the inner surface inspection system 100 of the present embodiment has a reflecting surface 12a (deflecting portion) that deflects light in the first direction D1 from the inner surface 1a of the object 1 to light in the B direction, and reflection. A light source 4 (first irradiation unit) that is located in the direction opposite to the B direction of the surface 12a and irradiates the inner surface 1a with light, and a camera 2 that photographs the inner surface 1a by the light passing through the reflecting surface 12a are provided. ing. Therefore, the light (diffused light) from the light source 4 is obliquely applied to the inner surface 1a of the object 1, and the light reflected by the inner surface 1a is photographed by the camera 2. Therefore, the presence or absence of an abnormality on the inner surface 1a of the object 1 can be detected based on the light (diffused light) obliquely incident on the inner surface 1a of the object 1.

Here, depending on the abnormality of the inner surface 1a, it may be difficult to detect when the inner surface 1a is imaged based on the specularly reflected light perpendicular to the inner surface 1a. Such anomalies can be easily detected by irradiating the inner surface 1a of the object 1 with light (diffused light) from the light source 4 at an angle. Further, for example, when the inner surface 1a of the object 1 is imaged based on the specularly reflected light perpendicular to the inner surface 1a, when the object 1 is made of metal, the specularly reflected light is too strong and halation occurs, and the abnormality detection accuracy May decrease. On the other hand, in the present embodiment, as described above, the presence or absence of abnormality on the inner surface 1a of the object 1 can be detected based on the light (diffused light) obliquely incident on the inner surface 1a, so that the inner surface 1a can be detected. It is possible to determine the presence or absence of an abnormality that cannot be obtained depending on the image obtained by capturing the specularly reflected light. Further, for example, when the inner surface 1a is a machined surface, light is obliquely incident on the inner surface 1a to prevent the shooting of streak-like processing marks formed on the inner surface 1a due to the cutting process. The defect can be photographed.

Further, in the present embodiment, the reflecting surface 12a (mirror 12) and the light source 4 are provided so as to be relatively movable along the B direction. Therefore, the irradiation angle (incident angle) from the light source 4 with respect to the inner surface 1a (inspection region Da) is adjusted by relatively moving the reflection surface 12a (mirror 12) and the light source 4 along the B direction. Can be done. Therefore, the irradiation angle from the light source 4 with respect to the inner surface 1a (inspection area Da) can be appropriately adjusted according to the state of the inner surface 1a and the diameter of the inner surface 1a.

Further, in the present embodiment, the light source 4 is supported by a support member 5 (second member) different from the rod-shaped member 10 (first member). Therefore, for example, the rod-shaped member 10 and the mirror 12 can be inserted from one side in the axial direction of the tubular object 1, and the support member 5 and the light source 4 can be inserted from the other side in the axial direction of the object 1.

Further, in the present embodiment, the first irradiation unit is the light source 4 (first light source). Therefore, since it is not necessary to provide the first irradiation unit separately from the light source 4, it is easy to simplify the configuration of the internal surface inspection system 100.

Further, in the present embodiment, the wall portion 10f (light-shielding portion) is located between the light source 4 and the reflecting surface 12a, and shields the light from the light source 4 toward the outside of the inspection area Da. Therefore, for example, it is possible to suppress light from entering the camera 2 without passing through the inspection area Da. For example, in a configuration in which the wall portion 10f is not provided, when the portion of the mirror 12 facing the light source 4 (the portion between the reflecting surface 12a and the light source 4) is irradiated with light from the light source 4, the mirror The portion of No. 12 facing the light source 4 functions as a light-shielding portion instead of the wall portion 10f.

<Second embodiment>
The present embodiment shown in FIG. 3 is mainly different from the first embodiment in that a light-shielding member 27 is provided. The light-shielding member 27 is located between the light source 4 and the inner surface 1a. That is, the light-shielding member 27 covers the inner surface 1a side of the light source 4. The light-shielding member 27 may have a plate-like shape, for example. The light-shielding member 27 is made of a metal material, a synthetic resin material, or the like, and is opaque. The light-shielding member 27 shields the light from the light source 4 toward the outside of the inspection area Da. Specifically, the light-shielding member 27 shields light directed to a region on the inner surface 1a opposite to the inspection region Da in the B direction (light source 4 side). An example of the virtual path of light is schematically shown by line L1 in FIG. The light-shielding member 27 is an example of a second light-shielding portion (light-shielding portion).

In the present embodiment, the light-shielding member 27 can suppress, for example, light from entering the camera 2 without passing through the inspection area Da. As an example, it is possible to suppress the light from the light source 4 from passing through the inner surface 1a toward the edge of the opening 10d of the rod-shaped member 10. Here, since the light is diffusely reflected at the edge of the opening 10d, the accuracy of abnormality detection tends to decrease when the diffusely reflected light enters the camera 2. On the other hand, in the present embodiment, as described above, it is easy to suppress the movement toward the edge of the opening 10d of the rod-shaped member 10 via the inner surface 1a, so that the accuracy of abnormality detection is suppressed from being lowered. be able to.

<Third embodiment>
The present embodiment shown in FIG. 4 is mainly different from the first embodiment in that a light guide member 28 for irradiating the light from the light source 4 toward the inner surface 1a is provided.

The light guide member 28 is located between the light source 4 and the mirror 12. That is, the light guide member 28 is located in the direction opposite to the B direction of the reflecting surface 12a. For example, at least a part of the light guide member 28 may be located in the cylinder of the object 1. The light guide member 28 is formed in a columnar shape extending in the axial direction, for example. The light guide member 28 is made of a synthetic resin material (transparent material) such as acrylic resin and is transparent.

The light guide member 28 is provided between the incident surface 28a provided at one end on the light source 4 side, the exit surface 28b provided at the end opposite to the one end, and the incident surface 28a and the exit surface 28b. It has a reflective surface 28c and the like.

The incident surface 28a is an end surface of the light guide member 28 on one side (light source 4 side) in the axial direction, and has a circular shape. The exit surface 28b is an end surface on the other side of the light guide member 28 in the axial direction, and is formed in a circular shape. The reflecting surface 28c is a peripheral surface (outer peripheral surface) provided on the outer peripheral portion of the light guide member 28, and is formed in a cylindrical shape. The reflecting surface 28c surrounds the entrance surface 28a and the exit surface 28b. In the light guide member 28, the light from the light source 3 is incident on the incident surface 28a, the reflecting surface 28c reflects the light incident from the incident surface 28a, and the emitting surface 28b is the light incident from the incident surface 28a and the incident surface. Light incident from 28a and reflected by the reflecting surface 28c is emitted. The light emitted from the exit surface 28b reaches the inner surface 1a (inspection region Da). That is, the exit surface 28b irradiates the inner surface 1a (inspection region Da) with the light from the light source 4. At this time, in the present embodiment, the light emitted from the light source 4 incident on the incident surface 28a and the light emitted from the exit surface 28b are diffused light. Further, the light on the exit surface 28b is planar, and the uniformity on the exit surface 28b is relatively high. Further, on the reflecting surface 28c, light is substantially totally reflected. The incident surface 28a is an example of the first incident surface, the exit surface 28b is an example of the first exit surface and the first irradiation unit, and the reflection surface 28c is an example of the first reflection surface. The light guide member 28 is an example of the first light guide member. The light guide member 28 may also be referred to as a light guide body or a light guide component.

Further, the light guide member 28 is supported (fixed) to the support member 5 together with the light source 4. Therefore, the light guide member 28 is supported by the moving mechanism 23 so as to be movable in the axial direction. The light guide member 28 and the light source 4 are integrally moved in the axial direction by the moving mechanism 23. The light guide member 28, the light source 4, and the support member 5 form a unit.

In the present embodiment, for example, even when the light source 4 is a relatively small light source such as an LED, the light light from various angles is mixed in the light guide member 28, so that the uniformity on the exit surface 28b becomes relatively high.

Further, in the present embodiment, the light guide member 28 can be positioned inside the cylinder of the object 1 and the light source 4 can be positioned outside the cylinder of the object 1 for inspection.

<Fourth Embodiment>
In the present embodiment shown in FIGS. 5 and 6, the support mode of the light source 4 is different from that of the first embodiment. In the present embodiment, the light source 4 is supported by the rod-shaped member 10 so as to be movable in the axial direction. Specifically, the rod-shaped member 10 has a support portion of 10 g. The support portion 10g is coupled (fixed) to the body 10a. The support member 5 is inserted between the support portion 10g and the body 10a. The support member 5 is slidably supported in the axial direction by the support portion 10g and the body 10a. With the above configuration, the light source 4 can move integrally with the mirror 12 and can move relative to the mirror 12 in the axial direction.

In the present embodiment, since the light source 4 is supported by the rod-shaped member 10, for example, even if one end of the object 1 is closed, the mirror 12 and the light source 4 can be moved from the other end of the object 1 to the object 1. It can be inserted inside 1.

<Fifth Embodiment>
The present embodiment shown in FIGS. 7 to 10 is mainly different from the first embodiment in that the light source 3, the light guide member 11, the light source 40, and the half mirror 41 are provided. The light source 3 is an example of a second light source, the light guide member 11 is an example of a second light source member, the light source 40 is an example of a third light source, and the half mirror 41 is an optical component. This is an example.

As shown in FIG. 7, the light source 3 and the light guide member 11 are supported by the rod-shaped member 10. At least a part of the light guide member 11 is housed in the cylinder of the object 1. The light guide member 11 directs the light from the light source 3 toward the inspection region Da on the inner surface 1a. In the present embodiment, the light source 3 and the light guide member 11 together with the rod-shaped member 10 and the mirror 12 constitute an optical unit 20 (optical device).

The light source 3 is located outside the cylinder of the end portion 10b of the body 10a, that is, outside the outer surface 10e. The light source 3 is supported (fixed) to the rod-shaped member 10 via a bracket (not shown) or the like. The light source 3 emits light in the direction opposite to the B direction, and the emitted light is incident on the light guide member 11. The light source 3 is, for example, an LED (light emitting diode) light source. The light from the light source 3 may be incident on the light guide member 11 via an optical fiber or the like.

As shown in FIGS. 7 and 10, the light guide member 11 is provided outside the cylinder of the body 10a, that is, outside the outer surface 10e. The light guide member 11 is located on the B direction side of the opening 10d of the rod-shaped member 10. The light guide member 11 is formed in a tubular shape extending along the central axis Ax, that is, extending in the B direction. The light guide member 11 has a cylindrical shape as an example. The light guide member 11 covers the body 10a from the outside. In other words, the body 10a is inserted into the cylinder of the light guide member 11. The light guide member 11 is fixed to the rod-shaped member 10. The light guide member 11 is made of a synthetic resin material (transparent material) such as acrylic resin and is transparent. The light guide member 11 is supported by the body 10a so as to be movable (slable) in the axial direction, for example. The position of the light guide member 11 is held by, for example, a frictional force with the body 10a, and the light guide member 11 slides with respect to the body 10a by an external force that opposes the frictional force. That is, the light guide member 11 is provided so as to be relatively movable in the B direction with respect to the mirror 12 (reflection surface 12a). Note that in FIG. 10, the mirror 12 is not shown.

The light guide member 11 has an end portion 11a in a direction along the central axis Ax, that is, one side in the axial direction (left side in FIG. 7) and an end portion 11b on the other side in the axial direction (right side in FIG. 7). .. Further, the light guide member 11 is provided between one incident surface 11c provided on the end portion 11a, one exit surface 11d provided on the end portion 11b, and between the incident surface 11c and the exit surface 11d. It has two (plural) reflecting surfaces 11e.

The incident surface 11c is an end surface on one side of the light guide member 11 in the axial direction, and is formed in an annular shape. The exit surface 11d is an end surface on the other side of the light guide member 11 in the axial direction, and is formed in an annular shape. One of the two reflecting surfaces 11e is a peripheral surface (outer peripheral surface) provided on the outer peripheral portion of the light guide member 11, and is formed in a cylindrical shape. The other of the two reflecting surfaces 11e is a peripheral surface (inner peripheral surface) provided in the light guide member 11, and is formed in a cylindrical shape. That is, the two reflecting surfaces 11e are arranged so as to be spaced apart from each other in the radial direction of the central axis Ax. These reflecting surfaces 11e surround the entrance surface 11c and the exit surface 11d.

As shown in FIG. 8, in the light guide member 11, the light from the light source 3 is incident on the incident surface 11c, the reflecting surface 11e reflects the light incident from the incident surface 11c, and the emitting surface 11d is the incident surface. The light incident from the incident surface 11c and the light incident from the incident surface 11c and reflected by the reflecting surface 11e are emitted. The light emitted from the exit surface 11d reaches the inner surface 1a. That is, the exit surface 11d irradiates the inner surface 1a (inspection region Da) with the light from the light source 3. At this time, the light emitted from the exit surface 11d is irradiated from the B direction side and obliquely of the inspection region Da of the inner surface 1a of the object 1. Further, in the present embodiment, the light emitted from the light source 3 incident on the incident surface 11c and the light emitted from the exit surface 11d are diffused light. Further, the light on the exit surface 11d is planar, and the uniformity on the exit surface 11d is relatively high. Further, the light is substantially totally reflected on the reflecting surface 11e. Then, among the light diffusely reflected by the inspection region Da on the inner surface 1a, the light in the first direction D1 is deflected in the B direction by the reflection surface 12a of the mirror 12 and enters the camera 2.

Further, in the present embodiment, the light guide member 11 and the rod-shaped member 10 are assembled with each other to form an assembly 21. Assembly 21 may be referred to as an optical assembly. The incident surface 11c is an example of a second incident surface, the exit surface 11d is an example of a second exit surface and a second irradiation unit (irradiation unit), and the reflection surface 11e is a second reflection surface. This is an example.

The light source 40 is located on the B direction side of the light guide member 11 and on the side opposite to the B direction of the camera 2.

The half mirror 41 is provided between the mirror 12 and the camera 2. As shown in FIG. 9, the half mirror 41 transmits the light from the mirror 12 toward the camera 2 and reflects the light from the light source 40 toward the mirror 12.

The light from the light source 40 is irradiated to the inspection region Da of the inner surface 1a in the normal direction, that is, in the radial direction through the half mirror 41 and the mirror 12, and the specularly reflected light of this light passes through the mirror 12 and the half mirror 41. It enters the camera 2 through the mirror (FIG. 9).

Further, the light source 3, the light guide member 11, the light source 40, and the half mirror 41 are moved in the axial direction together with the camera 2, the rod-shaped member 10, and the mirror 12 by the moving mechanism 24.

In the above configuration, the light source 3, the light source 4, and the light source 40 can be turned on separately. Further, any two or all of the light source 3, the light source 4, and the light source 40 can be turned on at the same time. When the light source 4 is turned on, the camera 2 uses diffusely reflected light in the inspection area Da of the light radiated to the inspection area Da on the inner surface 1a of the object 1 on the opposite side of the inspection area Da from the B direction and diagonally. An image (dark field image) can be taken (FIG. 7). Further, when the light source 3 is turned on, an image (dark field image) by diffuse reflection light in the inspection area Da of the light irradiated to the inspection area Da on the inner surface 1a of the object 1 from the B direction side and diagonally of the inspection area Da. ) Can be photographed (Fig. 8). Further, when the light source 40 is turned on, the camera 2 can take an image (bright field image) by the specularly reflected light of the light inspection area Da of the light source 40 (FIG. 9). At this time, in the present embodiment, the lighting of the light source 3, the lighting of the light source 4, and the lighting of the light source 40 are switched, and a plurality of images (dark field image) by the light irradiating the inspection area Da from a plurality of different directions. , Bright field image) can be imaged separately.

Further, according to the present embodiment, the inner surface inspection system 100 can obtain an image obtained by capturing the specularly reflected light in the vertical direction on the inner surface 1a of the object 1 by the camera 2. Therefore, it is possible to determine the presence or absence of an abnormality that cannot be obtained depending on the captured image of the diffusely reflected light.

Further, in the present embodiment, the exit surface 11d (light guide member 11) is provided so as to be relatively movable in the B direction with respect to the reflection surface 12a (mirror 12). Therefore, by changing the distance between the exit surface 11d and the reflection surface 12a, the irradiation angle from the exit surface 11d with respect to the inner surface 1a (inspection region Da) can be adjusted.

The positions of the light source 40 and the camera 2 are exchanged, and a half mirror 41 is provided between the mirror 12 and the light source 40. The half mirror 41 transmits the light from the mirror 12 toward the camera 2. The light from the light source 40 may be transmitted toward the mirror 12. That is, the half mirror 41 is provided between the mirror 12 and the camera 2 or between the mirror 12 and the light source 40, and the light from the mirror 12 is transmitted or reflected toward the camera 2 and is transmitted from the light source 40. Light is reflected or transmitted toward the mirror 12.

<Sixth Embodiment>
The present embodiment shown in FIGS. 11 and 12 is mainly different from the fifth embodiment in that the light source 3 and the rod-shaped member 10 are different, and the prism 112 is provided instead of the mirror 12. Further, in the present embodiment, the inspection area Da is set as an annular (cylindrical) area extending in the circumferential direction with a predetermined width.

As shown in FIG. 12, in the present embodiment, a plurality of light sources 3 are arranged at intervals in the circumferential direction of the central axis Ax to form a ring light source 30. As shown in FIG. 11, the plurality of light sources 3 face the incident surface 11c of the light guide member 11. The ring light source 30 incidents an annular light (diffused light) on the incident surface 11c. The ring light source 30 may be referred to as ring illumination.

Further, as shown in FIG. 11, a prism 112 is inserted into the end portion 10c of the body 10a of the rod-shaped member 10 of the present embodiment, and the opening of the end portion 10c is closed by the prism 112 (lens). ing. The prism 112 is made of a transparent material. The prism 112 is included in the optical unit 20.

In the present embodiment, the reflecting surface 12a is provided at the end of the prism 112 on the other side (right side in FIG. 11) in the axial direction. The reflecting surface 12a of the present embodiment is configured in a conical shape whose diameter decreases toward one side in the axial direction (left side in FIG. 11). The reflective surface 12a forms a recess 112a (space) recessed toward one side in the axial direction at the other end of the prism 112 in the axial direction. More specifically, the reflective surface 12a is conical with an apex angle of approximately 90 degrees. The acute angle between the generatrix of the cone and the central axis Ax is approximately 45 degrees. At least a part of the reflective surface 12a is located outside the body 10a. The reflecting surface 12a deflects the light in the first direction D1 from the inner surface 1a incident on the prism 112 to the light in the B direction. An annular light is incident on the reflecting surface 12a from the inspection area Da, and the annular light reflected by the reflecting surface 12a enters the camera 2.

Further, in the present embodiment, a light-shielding member 31 is provided between the prism 112 (reflection surface 12a) and the light source 4. The light-shielding member 31 is fixed to the other end of the prism 112 in the axial direction. The light-shielding member 31 may have a plate shape or the like, for example. The light-shielding member 27 is made of a metal material, a synthetic resin material, or the like, and is opaque. The light-shielding member 31 shields the light from the light source 4 toward the outside of the inspection area Da. Specifically, the light-shielding member 31 shields at least the light directly directed from the light source 4 to the prism 112. The light-shielding member 31 is an example of the first light-shielding portion (light-shielding portion).

With the above configuration, the annular region of the inner surface 1a can be imaged and inspected without rotating the optical unit 20 around the central axis Ax.

Further, in the present embodiment, the light-shielding member 31 (first light-shielding portion) is located between the light source 4 and the reflecting surface 12a, and shields the light from the light source 4 toward the outside of the inspection area Da. Therefore, for example, it is possible to suppress light from entering the camera 2 without passing through the inspection area Da. The first light-shielding portion may be formed of a light-shielding paint applied to a portion of the prism 112 facing the light source 4.

<7th Embodiment>
The present embodiment shown in FIG. 13 is mainly different from the sixth embodiment in that a mirror 212 is provided instead of the prism 112. The mirror 212 is included in the optical unit 20.

The mirror 212 is connected to the end portion 10c of the body 10a by a plurality of support members 50. The plurality of rod-shaped support members 50 are positioned at intervals around the central axis Ax. The support member 50 is made of a transparent material. The support member 50 may be one, and the support member 50 may be tubular.

The mirror 212 has a conical shape, and the mirror 212 is provided with a reflecting surface 12a. The reflecting surface 12a of the present embodiment is configured in a conical shape like the reflecting surface 12a (FIG. 11) of the sixth embodiment. At least a part of the reflective surface 12a is located outside the body 10a. The reflecting surface 12a deflects the light in the first direction D1 from the inner surface 1a to the light in the B direction. An annular light is incident on the reflecting surface 12a from the inspection area Da, and the annular light reflected by the reflecting surface 12a enters the camera 2.

With the above configuration, the annular region of the inner surface 1a can be imaged and inspected without rotating the optical unit 20 around the central axis Ax. The support member 50 may be made of an opaque material. In this case, as an example, by forming the support member 50 in a rod shape (strip shape) and rotating the optical unit 20 around the central axis Ax, the annular region of the inner surface 1a can be imaged and inspected. ..

<8th Embodiment>
The present embodiment shown in FIG. 14 is mainly different from the sixth embodiment in that the metal layer 312a is superposed on the reflecting surface 12a of the prism 112.

The metal layer 312a can be provided on the reflective surface 12a, for example, by vapor deposition of a metal material. The metal layer 312a and the prism 112 form a mirror 312. The mirror 312 is included in the optical unit 20. The mirror 312 is an example of the first optical component.

The reflecting surface 12a deflects the light in the first direction D1 from the inner surface 1a to the light in the B direction. An annular light is incident on the reflecting surface 12a from the inspection area Da, and the annular light reflected by the reflecting surface 12a enters the camera 2.

With the above configuration, the annular region of the inner surface 1a can be imaged and inspected without rotating the optical unit 20 around the central axis Ax.

<9th embodiment>
In the present embodiment shown in FIG. 15, the rod-shaped member 10 is different from the sixth embodiment. The rod-shaped member 10 of the present embodiment is formed of a transparent material in a solid rod-like shape (columnar shape), and a reflective surface 12a is integrally formed on an end portion 10c of the body 10a. The reflective surface 12a has a conical shape similar to the reflective surface 12a (FIG. 11) of the sixth embodiment, and the end portion 10c of the body 10a is provided with a recess 112a.

Further, in the present embodiment, a light-shielding light-shielding portion 42 is interposed between the body 10a and the light guide member 11. The light-shielding portion 42 has a tubular shape that covers the outer surface 10e of the body 10a from the outside. The light-shielding portion 42 can be formed, for example, by applying a light-shielding paint on the outer surface 10e. Further, the light-shielding portion 42 can be formed by depositing a metal material on the outer surface 10e. Further, the light-shielding portion 42 may be manufactured separately from the body 10a and the light guide member 11 and may be arranged between the body 10a and the light guide member 11. The light-shielding portion 42 prevents light passing through the body 10a and the light guide member 11 from leaking from the body 10a and the light guide member 11. The light-shielding portion 42 may be referred to as a light-shielding member or a light-shielding layer.

In the above configuration, the diffused light reflected by the inner surface 1a is incident on the body 10a from the outer surface 10e of the body 10a, is deflected (totally reflected) by the light in the B direction on the reflecting surface 12a, and is incident on the camera 2.

In the present embodiment, the annular region of the inner surface 1a can be imaged and inspected without rotating the optical unit 20 around the central axis Ax, and the reflective surface 21a is integrally formed on the rod-shaped member 10. Therefore, it is easy to simplify the configuration of the internal inspection system 100.

<10th Embodiment>
In the present embodiment shown in FIG. 16, the reflecting surface 12a of the rod-shaped member 10 is mainly different from the ninth embodiment. The reflective surface 12a of the present embodiment is a plane inclined with respect to the central axis Ax, similarly to the reflective surface 12a of the first embodiment. Further, in the present embodiment, a single light source 3 is provided.

In the above configuration, the diffused light reflected by the inner surface 1a is incident on the body 10a from the outer surface 10e of the body 10a, is deflected (totally reflected) by the light in the B direction on the reflecting surface 12a, and is incident on the camera 2.

As described above, in the present embodiment, since the reflective surface 21a is integrally formed on the rod-shaped member 10, it is easy to simplify the configuration of the internal surface inspection system 100.

Although the embodiments of the present invention have been illustrated above, the above-described embodiment is an example and is not intended to limit the scope of the invention. The above-described embodiment can be implemented in various other forms, and various omissions, replacements, combinations, and changes can be made without departing from the gist of the invention. The above-described embodiment is included in the scope and gist of the invention, and is also included in the scope of the invention described in the claims and the equivalent scope thereof. Further, the configurations and shapes of the plurality of embodiments may be partially interchanged. In addition, specifications such as each configuration and shape (structure, type, material, direction, shape, size, length, width, thickness, height, number, arrangement, position, etc.) are changed as appropriate. can do. For example, the optical unit can have more optical components such as a lens, a mirror, a half mirror, and the like.

1 ... Object, 1a ... Inner surface (inspection surface), 2 ... Camera, 3 ... Light source (second light source), 4 ... Light source (first light source, first irradiation part, irradiation part), 5 ... Support member (Second member), 10 ... Rod-shaped member (first member), 10e ... Outer surface, 10f ... Wall part (first light-shielding part, light-shielding part), 11 ... Light guide member (second light guide member) , 11c ... Incident surface (second incident surface), 11d ... Emitting surface (second emitting surface), 11e ... Reflecting surface (second reflecting surface), 12a ... Reflecting surface (deflecting portion), 23 ... Moving mechanism , 27 ... light-shielding member (second light-shielding part, light-shielding part), 28 ... light guide member (first light guide member), 28a ... incident surface (first incident surface), 28b ... exit surface (first Exit surface, first irradiation unit, irradiation unit), 28c ... Reflective surface (first reflection surface), 31 ... Light-shielding member (first light-shielding part, light-shielding unit), 40 ... Light source (third light source), 41 ... Half mirror (optical component), 100 ... Inner surface inspection system, Ax ... Central axis, Da ... Inspection area (first area), D1 ... First direction, B ... Second direction.

Claims (13)

A deflecting part that deflects the light in the first direction from the inner surface of the object to the light in the second direction,
A first irradiation unit, which is located in a direction opposite to the second direction of the deflection unit and irradiates the inner surface with diffused light,
A camera that photographs the inner surface with light that has passed through the deflection portion,
A moving mechanism provided separately from the deflecting portion and moving the first irradiation portion with respect to the camera and the deflecting portion in the second direction.
Internal inspection system equipped with. The deflecting portion is provided, and the first member having a tubular shape extending in the second direction and having an outer surface through which light from the deflecting portion in the second direction passes is provided.
The internal surface inspection system according to claim 1, wherein the camera photographs the inner surface with light passing through the inside of the outer surface. The internal surface inspection system according to claim 2, wherein the first irradiation unit is supported by a second member different from the first member. The internal inspection system according to any one of claims 1 to 3, wherein the first irradiation unit is a first light source. The first light source and
A first incident surface, which is located in a direction opposite to the second direction of the deflection portion and is incident with light from the first light source, and a first surface that reflects light incident from the first incident surface. The first irradiation unit, which is the first irradiation unit, emits light incident from the first incident surface and light incident from the first incident surface and reflected by the first reflecting surface. A first light guide member having an exit surface of the above and through which light directed toward the inner surface passes.
The internal inspection system according to any one of claims 1 to 3, further comprising. Equipped with a light-shielding part
The deflecting portion deflects the light in the first direction from the first region of the inner surface to the light in the second direction.
The inner surface inspection system according to any one of claims 1 to 5, wherein the light-shielding portion shields light from the first irradiation portion toward the outside of the first region. The internal surface inspection system according to claim 6, further comprising the first light-shielding portion located between the first irradiation portion and the deflection portion. The internal surface inspection system according to claim 6 or 7, further comprising the second light-shielding portion located between the first irradiation unit and the inner surface. The internal surface inspection system according to any one of claims 1 to 8, wherein the internal surface inspection system is located in the second direction of the deflection unit and includes a second irradiation unit that irradiates the inner surface with light. The internal surface inspection system according to claim 9, wherein the deflection unit and the second irradiation unit are provided so as to be relatively movable in the second direction. With the second light source
A second incident surface, which is located in the second direction of the deflection portion and is incident with light from the second light source, and a second reflecting surface that reflects light incident from the second incident surface. With the second emitting surface, which is the second irradiation unit, which emits the light incident from the second incident surface and the light incident from the second incident surface and reflected by the second reflecting surface. A second light guide member having, and through which light directed toward the inner surface passes, and
The deflecting portion is provided, and is provided with a first member which is formed in a tubular shape extending in the second direction and has an outer surface through which light from the deflecting portion in the second direction passes.
The second light guide member is supported by the first member and is supported by the first member.
The internal inspection system according to claim 9 or 10, wherein the camera photographs the inner surface with light passing through the inside of the outer surface. With a third light source
It is provided between the deflection unit and the camera or between the deflection unit and the third light source, and the light from the deflection unit is transmitted or reflected toward the camera, and the third Optical components that reflect or transmit light from the light source toward the deflection portion,
The internal inspection system according to any one of claims 1 to 11, further comprising. The moving mechanism moves the first irradiation unit with respect to the camera and the deflection unit along the second direction, so that the irradiation angle of the diffused light from the first irradiation unit with respect to the inner surface. The internal inspection system according to any one of claims 1 to 12, wherein the internal inspection system is adjusted.

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