JP2021003739A - Processing device - Google Patents

Abstract

To prevent a telescopic cover from accidentally stretching during wheel replacement work in a grinding device.SOLUTION: A processing device 1 comprises a telescopic cover 4 which is connected onto a case 2 surrounding a table, surrounds a processing tool, and telescopically moves following elevation of processing means. The case 2 comprises an upper plate 25 in which an opening for allowing the processing tool to enter and exit the case, is formed. The telescopic cover 4 comprises: an upper connection part 40 which is connected to the processing means; a lower connection part 41 which can be connected to and separated from the upper plate 25 so as to surround the opening; a cylindrical cornice 42 which connects the upper connection part 40 and the lower connection part 41; and a mechanism 43 which elevates the lower connection part 41, and locks the cylindrical cornice 42 in a contraction state. The lock mechanism 43 comprises: a hook part 430 provided on the upper connection part 40; a claw 431 provided on the lower connection part 41; and a mechanism 46 which is provided on the lower connection part 41, and can move the claw 431 in approaching and separating directions with respect to the hook part 430. This processing device causes the lower connection part 41 to elevate and approach the upper connection part 40, hooks the claw 431 on the hook part 430, and fixes the cylindrical cornice 42 in the contraction state.SELECTED DRAWING: Figure 4

Description

The present invention relates to a processing apparatus for processing an workpiece such as a semiconductor wafer held by a chuck table with a processing tool, and more particularly to a processing apparatus provided with a processing cover surrounding the chuck table and the processing tool.

A grinding device that grinds a work piece held on a chuck table with a grinding wheel accommodates a chuck table that holds the work piece and a grinding wheel that is attached to the tip of a spindle and has a grinding wheel arranged in an annular shape. It has a processing room. The processing chamber is provided with a top plate, a bottom plate, a side plate that connects the top plate and the bottom plate and surrounds the chuck table and the grinding wheel, and the top plate has an opening through which the grinding wheel that moves up and down can enter and exit. It is formed.

The grinding means includes a spindle unit including a housing for supporting the spindle and a motor for rotating the spindle, and supporting means for supporting the spindle unit, and is provided in a direction (vertical direction) approaching or separating from the chuck table by the grinding feeding means. It can be raised and lowered. Here, it is necessary to prevent the grinding water spray generated in the processing chamber from leaking from the opening of the processing chamber when the grinding means is moved up and down by the grinding feed means. It is provided with a tubular bellows cover that covers the periphery and expands and contracts in the elevating direction of the grinding means (see, for example, Patent Document 1). The bellows cover prevents the grinding water spray containing grinding debris from being ejected from the opening during the grinding process.

JP-A-2017-08823

For example, when replacing a grinding wheel, the upper plate of the processing chamber may be opened for work. Then, in the replacement of the grinding wheel, the grinding means is raised by the grinding feed means, the bellows cover attached to the grinding means is pulled upward and contracted, and the work is performed in a state where the opening of the processing chamber is opened. The bellows cover has an upper annular plate arranged on the upper end side of the bellows cover and a lower annular plate arranged on the lower end side so that the bellows cover can be maintained in a contracted state during the above replacement work. Is magnetized with a magnet.

However, when the grinding wheel is being replaced, the worker's arm may come into contact with the bellows cover and the magnetized portion may come off, and the bellows cover may extend downward due to its own weight. As described above, if the bellows cover is stretched during the replacement work, there is a problem that the mount on which the grinding wheel is mounted is hidden by the bellows cover and the operator cannot work.

Therefore, in a grinding device provided with a bellows cover (expandable cover) capable of surrounding the chuck table and the processing tool, there is a problem that the bellows cover is not accidentally stretched when the grinding wheel is replaced. There is.

The present invention for solving the above problems includes a chuck table that holds a work piece on a holding surface, a processing means for processing a work piece held on the holding surface with a processing tool, and a direction perpendicular to the holding surface. A processing device including an elevating means for raising and lowering the processing means, and at least a processing cover surrounding the chuck table and the processing tool. The processing cover includes a case surrounding the chuck table and the processing cover. A telescopic cover which is connected on a case and which surrounds the processing tool in a state where the processing means can be raised and lowered by the raising and lowering means and which can be expanded and contracted according to the raising and lowering of the processing means, is provided. A side plate surrounding the table, an upper plate connected to the side plate, and an opening formed in the upper plate to allow the processing tool to enter and exit the case are provided, and the telescopic cover is used as the processing means. The upper connecting portion to be connected, the lower connecting portion that can be connected to or separated from the upper plate so as to surround the opening, the tubular bellows connecting the upper connecting portion and the lower connecting portion, and the bellows separated from the upper plate. The lower connecting portion is provided with a locking mechanism for raising the lower connecting portion to approach the upper connecting portion and fixing the tubular bellows in a contracted state, and the locking mechanism includes a hooking portion arranged on the upper connecting portion and the hooking portion. It is provided with a hooking claw that is arranged on the lower connecting portion and hooks on the hooking portion, and a moving mechanism that is arranged on the lower connecting portion and can move the hooking claw in a direction of approaching or separating from the hooking portion. With a processing device that raises the lower connecting portion separated from the upper plate, brings it closer to the upper connecting portion, contracts the tubular bellows, hooks the hooking claw on the hooking portion, and fixes the tubular bellows in a contracted state. is there.

The moving mechanism is provided in the lower connecting portion, includes a rotating support portion that rotatably supports the hook claw with a rotating shaft extending in the tangential direction of the outer circumference of the tubular bellows, and is provided from the upper plate. The separated lower connecting portion is raised to approach the upper connecting portion, the tubular bellows is contracted, the hooking claw is rotated in a direction approaching the hooking portion, and the hooking claw is hooked on the hooking portion. It is preferable to fix the tube bellows in a contracted state.

The moving mechanism is provided on the lower connecting portion, includes a slider for moving the hook claw in the horizontal direction, raises the lower connecting portion separated from the upper plate, and brings the lower connecting portion closer to the upper connecting portion to bring the cylinder. It is preferable to shrink the bellows, slide the hook claw in a direction approaching the hook portion, hook the hook claw on the hook portion, and fix the tubular bellows in a contracted state.

The processing apparatus according to the present invention includes an urging portion that urges the hooking claw in a direction away from the hooking portion, and moves the hooking claw in a direction opposite to the direction in which the urging force of the urging portion acts. From the state in which the hook claw is hooked on the hook portion, the lower connecting portion is pushed up and contracted to further contract the tubular bellows in a fixed state, and the hook claw is raised to separate the hook claw from the hook portion. It is preferable that the hooking claw moves in a direction away from the hooking portion by the urging force of the urging portion, the cylinder bellows in the contracted state is released, and the lower connecting portion can be connected to the upper plate.

In the processing apparatus according to the present invention, the processing cover surrounds the case surrounding the chuck table and the processing tool in a state of being connected on the case and allowing the processing means to be raised and lowered by the raising and lowering means, and follows the raising and lowering of the processing means. The case is provided with a telescopic cover that can be expanded and contracted, and the case has a side plate that surrounds the chuck table, an upper plate that is connected to the side plate, and an opening that is formed in the upper plate and allows the processing tool to enter and exit the case. The telescopic cover includes an upper connecting portion that connects to the processing means, a lower connecting portion that can be connected to or separated from the upper plate so as to surround the opening, a tubular bellows that connects the upper connecting portion and the lower connecting portion, and an upper portion. It is provided with a lock mechanism that raises the lower connecting portion separated from the plate, approaches the upper connecting portion and fixes the cylinder bellows in a contracted state, and the lock mechanism is provided with a hook portion arranged on the upper connecting portion and a lower connecting portion. By providing a hooking claw that is arranged on the portion and hooks on the hooking portion and a moving mechanism that is arranged on the lower connecting portion and can move the hooking claw in the direction of approaching or separating from the hooking portion, the hooking claw is separated from the upper plate. It is possible to raise the lower connecting portion and bring it closer to the upper connecting portion to shrink the cylinder bellows, and to hook the hooking claw on the hooking portion to fix the cylinder bellows in a contracted state. Therefore, for example, unless the operator pushes up the telescopic cover in a fixed state, the hook claw will not come off from the hook, and the worker's arm or the like will be attached to the telescopic cover during replacement of the grinding wheel or other maintenance work. Even if they come into contact, the hook claws will not come off, the telescopic cover will not shift laterally, and the telescopic cover will not stretch accidentally. Therefore, the stretched telescopic cover makes it impossible to replace the grinding wheel. It is possible to prevent such a situation from occurring.

The moving mechanism is arranged in the lower connecting portion, and includes a rotating support portion that rotatably supports the hook claw with a rotating shaft extending in the tangential direction of the outer circumference of the tubular bellows, and the lower connecting portion separated from the upper plate. By raising the part and approaching the upper connecting part to shrink the cylinder bellows, rotating the hook claw in the direction approaching the hook part, hooking the hook claw on the hook part, and fixing the cylinder bellows in the contracted state. Even if the worker's arm etc. comes into contact with the telescopic cover during replacement of the grinding wheel or other maintenance work, the hook claws will not come off, the telescopic cover will not shift laterally, and the telescopic cover will not be stretched accidentally. .. Further, the hooking portion of the hooking claw can be easily hooked.

The moving mechanism is arranged in the lower connecting portion and includes a slider for moving the hooking claw in the horizontal direction. The lower connecting portion separated from the upper plate is raised to approach the upper connecting portion, the cylinder bellows is contracted, and the hooking claw is moved. By sliding in the direction approaching the hooking part, hooking the hooking claw on the hooking part, and fixing the cylinder bellows in a contracted state, the worker's arm etc. can be expanded and contracted during replacement of the grinding wheel and other maintenance work. The hooking claw does not come off even if it comes into contact with the cover, the telescopic cover does not shift laterally, and the telescopic cover does not accidentally stretch. Further, the hooking portion of the hooking claw can be easily hooked.

The processing apparatus according to the present invention includes an urging portion that urges the hook claw in a direction away from the hook portion, and moves the hook claw in the direction opposite to the direction in which the urging force of the urging portion acts to move the hook claw to the hook portion. From the state where the hook claw is hooked, the lower connecting part is pushed up and contracted, and the tube bellows in the fixed state is further contracted and the hook claw is raised to catch the hook claw separated from the hook part by the urging force of the urging part. The lower connecting part can be connected to the upper plate by moving away from the part and the contracted cylinder bellows is released, so that the operator can extend the telescopic cover and attach the lower connecting part to the upper plate. The telescopic cover can be easily extended downward when it is desired to connect.

It is a perspective view which shows an example of a processing apparatus. It is a perspective view explaining the processed cover in the state where the telescopic cover is extended. It is a side view explaining the processed cover in the state where the telescopic cover is extended. Raise the lower connecting part separated from the upper plate and bring it closer to the upper connecting part to shrink the cylinder bellows, rotate the hook claw in the direction approaching the hook part, hook the hook claw to the hook part, and shrink the cylinder bellows. It is a side view explaining the case of fixing in a state of being fixed. It is a perspective view explaining the processed cover fixed in the state that the cylinder bellows of the telescopic cover is contracted. It is a side view explaining the processed cover in the state where the telescopic cover is extended. The lower connecting part separated from the upper plate was raised and approached the upper connecting part to shrink the cylinder bellows, the hook claw was slid in the direction approaching the hook part, the hook claw was hooked on the hook part, and the cylinder bellows was shortened. It is a side view explaining the case of fixing in a state.

The processing apparatus 1 according to the present invention shown in FIG. 1 is an apparatus for grinding a workpiece W held on a chuck table 30 by a processing means 15, and is an apparatus forward (−Y direction) on the apparatus base 10 of the processing apparatus 1. The side) is an attachment / detachment region where the workpiece W is attached / detached to / from the chuck table 30, and the rear side (+ Y direction side) on the apparatus base 10 is a cover held on the chuck table 30 by the processing means 15. This is a processing area where the work piece W is ground.
The processing apparatus according to the present invention is not limited to a single-axis grinding apparatus such as the processing apparatus 1, but is a rotating turntable including at least a rough grinding means and a finish grinding means. It may be a biaxial grinding device or the like capable of positioning the workpiece W below each grinding means. Further, the processing device may be a polishing device that polishes the workpiece W by a processing means provided with a polishing pad.

The processing apparatus 1 includes a chuck table 30 that holds the workpiece W on the holding surface 300a, a processing means 15 that processes the workpiece W held on the holding surface 300a with the processing tool 154, and a processing means 15 that is perpendicular to the holding surface 300a. Elevating means 16 for raising and lowering the processing means 15 in the Z-axis direction is provided.

The chuck table 30 that holds the workpiece W has, for example, a circular shape, a suction portion 300 that is made of a porous member or the like and sucks the workpiece W, and a frame body 301 that supports the suction portion 300. Be prepared. The suction unit 300 communicates with a suction source (not shown) and sucks and holds the workpiece W on the holding surface 300a including the exposed surface of the suction unit 300 and the upper surface of the frame body 301.

As shown in FIG. 1, the chuck table 30 is surrounded by a cover 39 and is rotatable about a rotation axis in the Z-axis direction. Further, the chuck table 30 can be reciprocated in the Y-axis direction between the attachment / detachment region and the processing region by the cover 39 and the Y-axis moving means (not shown) arranged below the bellows cover 39a connected to the cover 39. It has become.

A column 11 is erected behind the device base 10 (on the + Y direction side).
An elevating means 16 is arranged on the front surface of the column 11, and the elevating means 16 includes a ball screw 160 having an axial center in the Z-axis direction, a pair of guide rails 161 arranged in parallel with the ball screw 160, and a ball screw. It is provided with a motor 162 connected to the upper end of the 160 to rotate the ball screw 160, and an elevating plate 163 in which the internal nut is screwed into the ball screw 160 and the side portion is in sliding contact with the guide rail 161. The motor 162 provides the ball screw 160. When rotated, the elevating plate 163 is guided by the guide rail 161 and reciprocates in the Z-axis direction, and the processing means 15 fixed to the elevating plate 163 moves on the Z-axis perpendicular to the holding surface 300a of the chuck table 30. It is ground and fed in the direction.

The processing means 15 has a spindle 150 whose axial direction is the Z-axis direction, a housing 151 that rotatably supports the spindle 150, a motor 152 that rotationally drives the spindle 150, and a circular plate shape connected to the tip of the spindle 150. The mount 153, the processing tool 154 mounted on the lower surface of the mount 153, and the holder 155 that supports the housing 151 and has its side surface fixed to the elevating plate 163 of the elevating means 16.
The processing tool 154 shown in FIG. 1 is a grinding wheel in which a plurality of substantially rectangular parallelepiped grinding wheels are arranged in an annular shape on the lower surface of the wheel base.

The processing apparatus 1 includes at least a processing cover 12 that surrounds the chuck table 30 and the processing tool 154. The processing cover 12 surrounds the case 2 surrounding the chuck table 30 and the processing tool 154 in a state where the processing means 15 can be raised and lowered by the raising and lowering means 16 connected on the case 2 and follows the raising and lowering of the processing means 15. It includes a stretchable cover 4 (not shown in FIG. 1, see FIG. 2).

For example, the case 2 having a box-shaped outer shape is arranged at a position in front of the column 11 on the apparatus base 10 shown in FIG. 1 and below the processing means 15. The case 2 includes, for example, a side plate 20, a side plate 21, a side plate 22, and a side plate 23 that are erected on the apparatus base 10 and surround the chuck table 30, and an upper plate 25 that is connected to the upper ends of the side plates 20 to 23. ing.

For example, the side plate 20 located on the −Y direction side and serving as the front surface of the case 2 has a carry-in outlet 200 formed by cutting out the lower side thereof in a substantially rectangular shape, and the chuck table 30 moving in the + Y direction is formed. By passing through the carry-in outlet 200, the chuck table 30 is housed in the case 2. The side plate 20 is provided with a shutter (not shown) that opens and closes the carry-in outlet 200, and the shutter prevents the grinding water spray from scattering from the carry-in outlet 200 to the outside of the case 2.

An opening 26 is formed in a substantially central portion of the upper plate 25 so that the processing tool 154 can enter and exit the case 2. The opening 26 is formed in a circular shape having a diameter slightly larger than that of the processing tool 154 and the mount 153, for example.

For example, the upper plate 25 shown in FIG. 1 is composed of a first upper plate 251 and a second upper plate 252, and the first upper plate 251 covers about the upper half of the case 2. It is cut out in a semicircular shape from the side edge to the middle part. Further, the second upper plate 252 is cut out in a semicircular shape from its side end to the middle part, and in a state where the upper plate 25 is closed as shown in FIG. 1, the semicircle of the first upper plate 251 is formed. The opening 26 is formed directly under the processing means 15 by the notch portion of the shape and the semicircular notch portion of the second upper plate 252.
The first upper plate 251 can be opened by rotating the hinge 253 shown in FIG. 1, for example, substantially half of the first upper plate 251 upward. For example, a handle 254 gripped by an operator is attached to the upper surface of the first upper plate 251.

The telescopic cover 4 shown in FIGS. 2 and 3 is in an extended state. The telescopic cover 4 shown in FIGS. 2 and 3 includes an upper connecting portion 40 connected to the processing means 15, and a lower connecting portion 41 that can be connected to or separated from the upper plate 25 so as to surround the opening 26 shown in FIG. A locking mechanism that fixes the tubular bellows 42 that connects the upper connecting portion 40 and the lower connecting portion 41 and the lower connecting portion 41 that is separated from the upper plate 25 and approaches the upper connecting portion 40 in a contracted state. 43 and.

The upper connecting portion 40 has, for example, a substantially annular plate-like outer shape in a plan view, and is made of a rigid material such as SUS. The ring plate-shaped upper connecting portion 40 is fixed to the outer surface of the housing 151 with bolts or the like (not shown) in a state where the housing 151 of the processing means 15 is inserted into the opening thereof.

As shown in FIG. 3, the outer peripheral portion of the upper connecting portion 40 extends horizontally, for example, laterally outward in the radial direction of the upper connecting portion 40 after extending in the + Z direction from the annular plate portion 400 of the upper connecting portion 40. Two overhanging portions 401 are formed, and a hooking portion 430 of a lock mechanism 43, which will be described later, is arranged on the upper surface of the overhanging portion 401.

The upper end side of the tubular bellows 42 is fixed to the lower surface of the upper connecting portion 40 in a state where the center of the upper connecting portion 40 and the center of the tubular bellows 42 are substantially aligned. The tubular bellows 42 is formed by folding a cylinder made of an elastic member such as resin into a mountain valley shape. For example, a reinforcing ring (not shown) such as a wire may be arranged on each mountain portion of the tubular bellows 42 over the entire circumference.
The diameter of the valley portion of the cylinder bellows 42 is larger than that of the processing tool 154 and the mount 153 so that the processing tool 154 and the mount 153 shown in FIG. 1 can move up and down in the cylinder bellows 42.

The lower connecting portion 41 that can be connected to or separated from the upper plate 25 so as to surround the opening 26 shown in FIG. 3 is, for example, a plan view substantially annular plate having an opening for raising and lowering the processing tool 154 and the mount 153 in the center. It is formed in a shape. The lower connecting portion 41 is made of a rigid material such as SUS, and is connected to the outer peripheral portion of the lower connecting portion 41 after extending in the + Z direction from the annular plate portion 410 of the lower connecting portion 41. An underhanging portion 411 extending horizontally is formed on the outer side in the radial direction of the portion 41. A pillar-shaped magnet 412 is attached to the lower surface of the underhanging portion 411.

The lower end side of the tubular bellows 42 is fixed around the opening on the upper surface of the lower connecting portion 41 in a state where the center of the opening of the lower connecting portion 41 (not shown) and the center of the tubular bellows 42 are substantially aligned. The outer diameter of the lower connecting portion 41 is larger than the diameter of the opening 26, and the lower surface of the annular plate portion 410 of the lower connecting portion 41 is above via the annular packing 414 shown in FIG. It contacts the upper surface of the plate 25. The packing 414 improves the airtightness between the lower surface of the lower connecting portion 41 and the upper surface of the upper plate 25, and the grinding water spray generated in the case 2 is applied to the lower surface of the lower connecting portion 41 and the upper surface of the upper plate 25. Prevent it from leaking out between.

For example, the upper plate 25 is provided with two magnetized plates 255 on which a pillar-shaped magnet 412 fixed to the lower surface of the underhanging portion 411 of the lower connecting portion 41 is magnetized. The state in which the lower connecting portion 41 of the stretchable cover 4 in the extended state is connected to the upper plate 25 is maintained by magnetizing the magnet 412 to the magnetized plate 255, and the operator lifts the lower connecting portion 41. As long as this is not the case, the telescopic cover 4 will not shift laterally or separate from the upper plate 25.

For example, an interlock mechanism 257 that detects that the first upper plate 251 has been opened is arranged in the vicinity of each magnetically plated plate 255 arranged on the upper plate 25. For example, the interlock mechanism 257 includes a magnetic proximity sensor (not shown) capable of detecting magnetic adhesion between the magnet 412 and the magnetic attachment plate 255. In the magnetic proximity sensor, the magnet 412 is magnetized on the magnetic plate 255 and the lower connecting portion 41 of the telescopic cover 4 is connected to the upper plate 25, and the lower connecting portion 41 is separated from the upper plate 25. It can be detected, and when the lower connecting portion 41 separates from the upper plate 25 while the spindle 150 is rotating, the spindle 150 is stopped to ensure the safety of the operator.
The sensor that detects the state in which the lower connecting portion 41 of the telescopic cover 4 is connected to the upper plate 25 is not limited to the magnetic proximity sensor.

(Lock mechanism including the moving mechanism of the first embodiment)
The lock mechanism 43 for raising the lower connecting portion 41 away from the upper plate 25 shown in FIGS. 2 and 3 to approach the upper connecting portion 40 and fixing the tubular bellows 42 in a contracted state is arranged in the upper connecting portion 40. The hooking portion 430, the hooking claw 431 arranged on the lower connecting portion 41 and hooking on the hooking portion 430, and the hooking claw 431 arranged on the lower connecting portion 41 can be moved in a direction approaching or separating from the hooking portion 430. It includes a moving mechanism 46.
The moving mechanism 46 shown in FIGS. 2 and 3 is the moving mechanism of the first embodiment.

The hook portion 430 is erected on the upper surface of the overhanging portion 401 of the upper connecting portion 40, and has, for example, a columnar outer shape. For example, a plurality of hooking portions 430 are arranged at equal intervals in the circumferential direction of the upper connecting portion 40, and two hooking portions 430 are arranged at 180 degrees in the illustrated example.

For example, a plate-shaped handle plate 416 is fixed on the underhanging portion 411 of the lower connecting portion 41, and a hook claw 431 is arranged on the handle plate 416 via a moving mechanism 46. The outer shape of the hook claw 431 is, for example, a hook shape having a substantially L-shape in the side view, and the root portion is connected to the moving mechanism 46 of the first embodiment. As shown in FIG. 3, an insertion hole 431a having a size for inserting, for example, the hook portion 430 is formed on the upper side of the hook claw 431. Further, the tip end side of the hook claw 431 is bent in a dogleg shape so that the operator can easily grip the hook claw 431 when rotating the hook claw 431. The hook claw 431 is lying sideways on the handle plate 416 in a state where it is not hooked by the hook portion 430.

The moving mechanism 46 of the first embodiment is arranged in the lower connecting portion 41, and hooks the claw 431 in the arrow R1 direction with a rotating shaft extending in the tangential direction (X-axis direction in FIG. 3) of the outer circumference of the tubular bellows 42. It is provided with a rotation support portion 460 that rotatably supports the vehicle. The rotation support portion 460 is, for example, a spring hinge and is attached to the upper surface of the inner end of the handle plate 416. The rotation support portion 460 may be a hinge without a spring.

In the processing apparatus 1 of the present embodiment, as shown in FIG. 3, the rotation support portion 460 is an urging portion that urges the hook claw 431 in a direction away from the hook portion 430 (clockwise when viewed from the paper surface). Also works as 460.

The operation of the processing apparatus 1 when grinding the workpiece W held on the chuck table 30 shown in FIG. 1 will be described below. The workpiece W shown in FIG. 1 is, for example, a semiconductor wafer having a circular outer shape, and the back surface Wb facing upward in FIG. 1 is the surface to be ground. A device is formed on the surface Wa of the workpiece W facing downward in FIG. 1, and a protective tape (not shown) is attached to protect the surface Wa.

First, the workpiece W is placed on the holding surface 300a of the chuck table 30 and sucked and held. Next, a Y-axis moving means (not shown) moves the chuck table 30 holding the workpiece W in the + Y direction. Further, a shutter (not shown) of the case 2 is opened, and after the chuck table 30 is carried into the case 2 through the carry-in outlet 200 of the side plate 20, the shutter is closed.

The chuck table 30 holding the workpiece W moves to the bottom of the machining means 15, and the rotation center of the machining tool 154 shifts horizontally by a predetermined distance with respect to the rotation center of the workpiece W, so that the grinding wheel The rotation trajectory is positioned so as to pass through the rotation center of the workpiece W.

As the spindle 150 is rotationally driven by the motor 152 shown in FIG. 1, the processing tool 154 rotates. Further, the processing means 15 is sent in the −Z direction by the elevating means 16 shown in FIG. 1, and the processing means 15 enters the case 2 through the opening 26 of the upper plate 25. Then, the grinding wheel of the rotating processing tool 154 comes into contact with the back surface Wb of the workpiece W to perform the grinding process. Further, as the chuck table 30 rotates, the workpiece W held on the holding surface 300a also rotates, so that the entire back surface Wb of the workpiece W is ground. During the grinding process, grinding water is supplied to the contact portion between the grinding wheel and the workpiece W through, for example, a flow path in the spindle 150 to cool and clean the contact portion.
When the workpiece W is ground to a desired thickness, the machining means 15 is raised, the machining tool 154 is separated from the back surface Wb of the workpiece W, and the grinding process of the workpiece W is completed.

During the grinding process as described above, as shown in FIGS. 2 and 3, the tubular bellows 42 of the telescopic cover 4 extends and the lower connecting portion 41 is connected to the upper plate 25 so as to surround the opening 26. That is, a pillar-shaped magnet 412 fixed to the lower surface of the lower overhanging portion 411 of the lower connecting portion 41 is sealed on the upper plate 25 by a packing 414 between the lower surface of the lower connecting portion 41 and the upper surface of the upper plate 25. The magnetized plate 255 is magnetized. Then, the telescopic cover 4 prevents the grinding water spray generated in the case 2 from being scattered from the opening 26 to the outside of the case 2. Further, the tubular bellows 42 of the telescopic cover 4 attached to the housing 151 can be shrunk following the descent of the processing means 15 shown in FIG.

By grinding the workpiece W with the machining tool 154 shown in FIG. 1 as described above, the machining tool 154 wears. Therefore, for example, after grinding a plurality of workpieces W, the workpiece W is ground. , The worker replaces the processing tool 154 with a new one. Hereinafter, the operation of each configuration of the processing cover 12 in this case will be described.

For example, as shown in FIGS. 4 and 5, when the operator grabs the handle plate 416 and lifts the lower connecting portion 41 upward, the magnetism between the magnet 412 and the magnetized plate 255 is released, and the lower connecting portion is connected. The connection with the upper plate 25 of the portion 41 is released. Then, the lower connecting portion 41 is lifted upward and approaches the upper connecting portion 40, so that the tubular bellows 42 is contracted.

After lifting the lower connecting portion 41 to a predetermined height position, as shown in FIG. 4, the operator resists the reaction force of the urging portion 460 (rotating support portion 460) and puts the hook claw 431 on the paper surface. The hooking claw 431 is hooked on the hooking portion 430 by rotating the hooking portion 430 in the counterclockwise direction approaching the hooking portion 430 when viewed from above and inserting the hooking portion 430 into the insertion hole 431a of the hooking claw 431. The urging portion 460, which is a spring hinge, stores the urging force for rotating the hook claw 431 in the clockwise direction when viewed from the paper surface and returning it.

By hooking the other hook claw 431 to the hook portion 430 as described above, the lower connecting portion 41 can be brought closer to the upper connecting portion 40 by the lock mechanism 43, and the tubular bellows 42 can be fixed in a contracted state. That is, since the urging portion 460, which is the spring hinge shown in FIG. 4, stores the urging force for rotating the hook claw 431 in the clockwise direction and returning it, the operator releases the handle plate 416. Then, the weights of the tubular bellows 42 and the lower connecting portion 41 are applied to the hooking claw 431 so that the hooking claw 431 does not come off from the hooking portion 430 in the state of being inserted into the insertion hole 431a.

As shown in FIGS. 4 and 5, the connection between the lower connecting portion 41 and the upper plate 25 is released, so that the operator grasps the handle 254 shown in FIG. 5 and holds the first upper portion in the closed state. By pulling up the plate 251 upward so that the upper plate 25 of the case 2 is opened, for example, the processing tool 154 located in the case 2 is exposed, so that the operator can use the processing tool 154. You can access it and exchange it for a new one.

As described above, in the processing apparatus 1 according to the present invention, the processing cover 12 is connected to the case 2 surrounding the chuck table 30 and the processing means 15 in a state where the processing means 15 can be raised and lowered by the raising and lowering means 16. A telescopic cover 4 that surrounds the tool 154 and expands and contracts according to the elevating and lowering of the processing means 15 is provided, and the case 2 is connected to the side plates 20 to 23 surrounding the chuck table 30 and the side plates 20 to 23. The telescopic cover 4 includes an upper connecting portion 40 connected to the processing means 15 and an opening 26 having a plate 25 and an opening 26 formed in the upper plate 25 so that the processing tool 154 can enter and exit the case 2. The lower connecting portion 41 that can be connected to or separated from the upper plate 25 so as to surround the upper plate 25, the tubular bellows 42 that connects the upper connecting portion 40 and the lower connecting portion 41, and the lower connecting portion 41 separated from the upper plate 25 are raised and raised. A lock mechanism 43 for approaching the connecting portion 40 and fixing the tubular bellows 42 in a contracted state is provided, and the lock mechanism 43 is arranged on the hooking portion 430 disposed on the upper connecting portion 40 and the lower connecting portion 41. The upper plate is provided with a hooking claw 431 for hooking on the hooking portion 430 and a moving mechanism 46 arranged on the lower connecting portion 41 and capable of moving the hooking claw 431 in a direction of approaching or separating from the hooking portion 430. The lower connecting portion 41 separated from the 25 is raised and brought closer to the upper connecting portion 40 to contract the tubular bellows 42, and the hook claw 431 is hooked on the hooking portion 430 to fix the tubular bellows 42 in a contracted state. Therefore, for example, the hook claw 431 does not come off from the hook portion 430 unless the telescopic cover 4 in the fixed state is pushed up further, and the worker's arm or the like touches the telescopic cover 4 during the replacement work of the processing tool 154. The hook claw 431 does not come off even if it comes into contact with, the telescopic cover 4 does not shift laterally, and the telescopic cover 4 does not accidentally stretch. Therefore, the stretchable cover 4 is used to replace the processing tool 154. It is possible to prevent a situation in which such things cannot be performed.

The moving mechanism 46 of the first embodiment includes a rotating support portion 460 which is arranged in the lower connecting portion 41 and rotatably supports the hook claw 431 by a rotating shaft extending in the tangential direction of the outer circumference of the tubular bellows 42. , The lower connecting portion 41 separated from the upper plate 25 is raised to approach the upper connecting portion 40, the tubular bellows 42 is contracted, the hook claw 431 is rotated in the direction approaching the hook portion 430, and the hook claw is attached to the hook portion 430. By hooking 431 and fixing the cylinder bellows 42 in a contracted state, the hook claw 431 does not come off even if the worker's arm or the like comes into contact with the telescopic cover 4 during the replacement work of the processing tool 154, and the telescopic cover 4 The telescopic cover 4 will not be stretched accidentally without lateral slippage or the like. Further, the operator can easily hook the hook claw 431 to the hook portion 430.

For example, after the operator replaces the processing tool 154 of the processing means 15 shown in FIG. 1 with a new one, the first upper plate 251 shown in FIG. 5 is closed to fix the cylinder bellows 42 in the contracted state. A case of releasing and connecting the lower connecting portion 41 to the upper plate 25 will be described below.

In the telescopic cover 4 in which the tubular bellows 42 shown in FIGS. 4 and 5 is contracted and the hook claw 431 is hooked on the hook portion 430, the urging portion 460 separates the hook claw 431 from the hook portion 430 (in FIG. 4). , It stores the urging force that urges in the clockwise direction when viewed from the paper. Therefore, when the operator grasps the handle plate 416 and pushes up the lower connecting portion 41, the tubular bellows 42 in the contracted and fixed state is further contracted and the hook claw 431 is raised, so that the hook claw 431 is subjected to the urging force. The hooking portion 430 comes out from the insertion hole 431a, and the hooking claw 431 separates from the hooking portion 430.

The hook claw 431 thus separated from the hook portion 430 moves clockwise when viewed from the paper surface away from the hook portion 430 due to the urging force of the urging portion 460 and returns to the original position. Then, the tube bellows 42 in the contracted state is released from being fixed, and the lower connecting portion 41 can be connected to the upper plate 25. That is, the lower connecting portion 41 is lowered while the operator holds the handle plate 416, and the magnet 412 fixed to the lower surface of the lower overhanging portion 411 of the lower connecting portion 41 is attached to the magnetic plate 255 on the upper plate 25. Can be magnetized.

As described above, the processing apparatus 1 according to the present invention includes an urging portion 460 that urges the hooking claw 431 in a direction away from the hooking portion 430, and hooks the hooking portion 460 in the direction opposite to the direction in which the urging force of the urging portion 460 acts. By moving the claw 431, the hook claw 431 is hooked on the hook portion 430. From the state in which the hook claw 431 is hooked on the hook portion 430, the lower connecting portion 41 is pushed up and contracted to further contract the tubular bellows 42 in a fixed state, and the hook claw 431 is raised to raise the hook claw 431, thereby separating the hook claw from the hook portion 430. The 431 is moved away from the hooking portion 430 by the urging force of the urging portion 460, the tube bellows 42 in the contracted state is released from being fixed, and the lower connecting portion 41 can be connected to the upper plate 25. That is, when the operator wants to extend the telescopic cover 4 and connect the lower connecting portion 41 to the upper plate 25, the telescopic cover 4 can be easily extended downward.

(Lock mechanism including the moving mechanism of the second embodiment)
The lock mechanism 43 that raises the lower connecting portion 41 separated from the upper plate 25 to approach the upper connecting portion 40 and fixes the tubular bellows 42 in a contracted state is shown in FIG. 6 instead of the moving mechanism 46 described above. A moving mechanism 47 which is arranged in the lower connecting portion 41 and can move the hook claw 431 in the radial direction of the lower connecting portion 41 which approaches or separates from the hooking portion 430 may be provided. The moving mechanism 47 shown in FIG. 6 is the moving mechanism of the second embodiment.

In the processing cover 12 shown in FIG. 6, the tubular bellows 42 of the telescopic cover 4 is extended and the lower connecting portion 41 is connected to the upper plate 25 of the case 2 in a closed state so as to surround the opening 26. That is, the lower surface of the lower connecting portion 41 and the upper surface of the upper plate 25 are sealed by packing 414, and the magnet 412 fixed to the lower surface of the lower overhanging portion 411 of the lower connecting portion 41 is magnetized on the upper plate 25. It is magnetized on the plate 255. Then, the processing means 15 shown in FIG. 1 can grind the workpiece W held on the chuck table 30 in a state where the expansion / contraction cover 4 prevents the grinding water spray from the opening 26 from scattering to the outside of the case 2. It has become.

The moving mechanism 47 of the second embodiment is arranged in the lower connecting portion 41, and includes a slider 470 that moves the hook claw 431 in the horizontal direction. For example, a handle plate 416 is arranged on the underhanging portion 411 of the lower connecting portion 41, and a guide rail 471 extending in the radial direction of the lower connecting portion 41 is arranged on the handle plate 416. .. The slider 470 is slidable on the guide rail 471.
The hook claw 431 is arranged in a state of being erected on the slider 470 with the insertion hole 431a into which the hook portion 430 is inserted facing upward.

The processing device 1 in the present embodiment includes an urging portion 48 that urges the hooking claw 431 in a direction away from the hooking portion 430 (in FIG. 6, the radial outer side of the lower connecting portion 41, the + Y direction). The urging portion 48 may be, for example, a tension coil spring but may be a stretchable rubber belt or the like.
For example, an urging portion support plate 419 extending in the + Z direction is attached to the outer end of the handle plate 416, and the other end of the urging portion 48 is connected to the inner surface of the urging portion support plate 419. .. Further, one end of the urging portion 48 is connected to the hook claw 431.
For example, as shown in FIG. 6, in the non-operating state of the lock mechanism 43, the urging portion 48, which is a tension coil spring, has a natural length, and the hook claw 431 rises in the radial direction of the lower connecting portion 41. In some cases, it is positioned so as not to collide with the overhanging portion 401 of the upper connecting portion 40.

Below, when the operator replaces the processing tool 154 shown in FIG. 1, for example, the lower connecting portion 41 separated from the upper plate 25 shown in FIG. 6 is raised to approach the upper connecting portion 40, and the tubular bellows 42 is contracted. A case where the hook claw 431 is hooked on the hook portion 430 and the cylinder bellows 42 is fixed in a contracted state will be described.

For example, when the operator grabs the handle plate 416 and lifts the lower connecting portion 41 upward, the magnetism between the magnet 412 and the magnetized plate 255 is released, and the lower connecting portion 41 is connected to the upper plate 25. Is released. Further, as the lower connecting portion 41 is lifted upward and approaches the upper connecting portion 40, the tubular bellows 42 is contracted.

After the operator lifts the lower connecting portion 41 to a position where the insertion hole 431a of the hooking claw 431 shown in FIG. 7 is higher than the upper surface of the hooking portion 430, the slider 470 resists the reaction force of the urging portion 48. The hook claw 431 is slid inward in the radial direction (-Y direction) of the lower connecting portion 41 approaching the hook portion 430, and the insertion hole 431a of the hook claw 431 is positioned above the hook portion 430.

Next, the operator lowers the lower connecting portion 41 and inserts the hook portion 430 into the insertion hole 431a of the hook claw 431 to hook the hook claw 431 to the hook portion 430. The urging portion 48, which is a tension coil spring, stores an urging force for moving the hook claw 431 radially outward (+ Y direction side) and returning it to its original position.

The other hook claw 431 is also hooked on the hook portion 430 as described above, so that the lower connecting portion 41 is brought closer to the upper connecting portion 40 by the lock mechanism 43 and the cylinder bellows 42 is contracted as shown in FIG. Can be fixed with.
After the connection between the lower connecting portion 41 and the upper plate 25 is released, the operator grasps the handle 254 shown in FIG. 1 and pulls up the first upper plate 251 in the closed state to raise the case 2. By opening the processing tool 154, for example, the processing tool 154 in the case 2 is exposed, so that the operator can access the processing tool 154 and replace it with a new one.

As shown in FIG. 7, in the processing apparatus 1 according to the present invention, the hook claw 431 is pulled from the hook portion 430 unless, for example, the operator further pushes up the telescopic cover 4 in a fixed state during replacement of the processing tool 154 or the like. The telescopic cover 4 does not come off, and even if the worker's arm or the like comes into contact with the telescopic cover 4 during the replacement work of the processing tool 154, the hook claw 431 does not come off, the telescopic cover 4 does not shift laterally, and the telescopic cover 4 is accidentally opened. Since it does not stretch, it is possible to prevent a situation in which the stretched telescopic cover 4 makes it impossible to replace the processing tool 154 or the like.

The moving mechanism 47 of the second embodiment shown in FIGS. 6 and 7 is arranged in the lower connecting portion 41, includes a slider 470 for moving the hook claw 431 in the horizontal direction, and provides the lower connecting portion 41 separated from the upper plate 25. Raise and approach the upper connecting portion to shrink the tubular bellows 42, slide the hook claw 431 inward in the radial direction of the lower connecting portion 41 approaching the hook portion 430, hook the hook claw 431 on the hook portion 430, and hook the hook claw 431 to the tubular bellows 42. By fixing the telescopic cover 4 in the contracted state, even if the worker's arm or the like comes into contact with the telescopic cover 4 during the replacement work of the processing tool 154, the hook claw 431 does not come off and the telescopic cover 4 does not shift laterally, which is unexpected. The telescopic cover 4 does not stretch. In addition, the operator can easily hook the hook claw 431 to the hook portion 430.

For example, after the operator replaces the processing tool 154 with a new one, the first upper plate 251 shown in FIGS. 1 and 7 is closed to release the fixation of the tubular bellows 42 shown in FIG. 7 in the contracted state. A case where the lower connecting portion 41 is connected to the upper plate 25 will be described.

In the telescopic cover 4 in which the tubular bellows 42 shown in FIG. 7 is contracted and the hook claw 431 is hooked on the hook portion 430, the urging portion 48 moves the hook claw 431 radially outward and returns it to its original position. We are accumulating the force to try. Therefore, when the operator grasps the handle plate 416 and pushes up the lower connecting portion 41, the tubular bellows 42 in the contracted and fixed state is further contracted and the hook claw 431 is raised, so that the hook claw 431 is inserted through the insertion hole 431a. The hook portion 430 comes off and the hook claw 431 separates from the hook portion 430.

The hook claw 431 thus separated from the hook portion 430 moves radially outward (+ Y direction side shown in FIG. 7) away from the hook portion by the urging force of the urging portion 48 and returns to the original position. Then, the tube bellows 42 in the contracted state is released from being fixed, and the lower connecting portion 41 can be connected to the upper plate 25. That is, the lower connecting portion 41 is lowered while the operator holds the handle plate 416, and the magnet 412 fixed to the lower surface of the lower overhanging portion 411 of the lower connecting portion 41 is attached to the magnetic plate 255 on the upper plate 25. Can be magnetized.

As described above, the processing apparatus 1 according to the present invention includes an urging portion 48 that urges the hook claw 431 in a direction away from the hook portion 430, and hooks the hook claw 431 in the direction opposite to the direction in which the urging force of the urging portion 48 acts. From the state where the hook claw 431 is hooked on the hook portion 430 by moving the claw 431, the lower connecting portion 41 is pushed up and contracted to further contract the tube bellows 42 in a fixed state, and the hook claw 431 is raised to raise the hook portion. The hook claw 431 separated from the 430 moves in the direction away from the hook portion 430 by the urging force of the urging portion 48, and the tube bellows 42 in the contracted state is released from being fixed, and the lower connecting portion 41 is moved to the upper plate 25. By being able to connect, when the operator wants to extend the telescopic cover 4 and connect the lower connecting portion 41 to the upper plate 25, the telescopic cover 4 can be easily extended downward.

It goes without saying that the processing apparatus 1 according to the present invention is not limited to the above-described embodiment, and may be implemented in various different forms within the scope of its technical idea. Further, the shape and the like of each configuration of the processing apparatus 1 shown in the attached drawings are not limited to this, and can be appropriately changed within the range in which the effects of the present invention can be exhibited.

W: Work piece
1: Processing equipment 10: Equipment base 11: Column 16: Elevating means 15: Processing means 150: Spindle 151: Housing 152: Motor 154: Processing tool 30: Chuck table 300a: Holding surface 39: Cover 39a: Bellows cover 12: Processing Cover 2: Case 20: Side plate 200: Carry-in outlet 21-23: Side plate
25: Upper plate 251: First upper plate 252: Second upper plate 253: Hinge 254: Handle 255: Magnetic plate 257: Interlock mechanism 26: Opening 4: Telescopic cover 40: Upper connecting part 401: Upper Overhanging part 41: Lower connecting part 410: Ring plate part 411: Underhanging part 412: Magnet 414: Packing 416: Handle plate 42: Tube bellows 43: Lock mechanism 430: Hooking part 431: Hooking claw 431a: Insert hole 46: Movement mechanism 460: Rotation support part (urging part)
47: Movement mechanism 470: Slider 471: Guide rail 48: Biasing part

Claims (4)

A chuck table that holds the workpiece on the holding surface, a machining means that processes the workpiece held on the holding surface with a processing tool, and an elevating means that raises and lowers the machining means in a direction perpendicular to the holding surface. A processing apparatus including at least a processing cover that surrounds the chuck table and the processing tool.
The processing cover surrounds a case that surrounds the chuck table and a processing tool that is connected on the case so that the processing means can be raised and lowered by the raising and lowering means, and expands and contracts according to the raising and lowering of the processing means. With a possible telescopic cover,
The case includes a side plate surrounding the chuck table, an upper plate connected to the side plate, and an opening formed in the upper plate to allow the processing tool to enter and exit the case.
The telescopic cover is a cylinder that connects an upper connecting portion connected to the processing means, a lower connecting portion that can be connected to or separated from the upper plate so as to surround the opening, and the upper connecting portion and the lower connecting portion. It is provided with a bellows and a lock mechanism that raises the lower connecting portion separated from the upper plate, approaches the upper connecting portion, and fixes the tubular bellows in a contracted state.
The lock mechanism includes a hooking portion disposed on the upper connecting portion, a hooking claw disposed on the lower connecting portion and hooking on the hooking portion, and a hooking claw disposed on the lower connecting portion to hook the hooking claw on the hooking portion. It is equipped with a moving mechanism that can move in the direction of approaching or separating from the object.
A processing device that raises the lower connecting portion separated from the upper plate, brings it closer to the upper connecting portion, contracts the tubular bellows, hooks the hooking claw on the hooking portion, and fixes the tubular bellows in a contracted state. The moving mechanism is provided in the lower connecting portion, and includes a rotating support portion that rotatably supports the hook claw with a rotating shaft extending in a tangential direction on the outer circumference of the tubular bellows.
The lower connecting portion separated from the upper plate is raised to approach the upper connecting portion, the tubular bellows are contracted, the hooking claw is rotated in a direction approaching the hooking portion, and the hooking claw is attached to the hooking portion. The processing apparatus according to claim 1, wherein the cylinder bellows is fixed in a contracted state by hooking. The moving mechanism is provided in the lower connecting portion, includes a slider for moving the hooking claw in the horizontal direction, raises the lower connecting portion separated from the upper plate, and brings the lower connecting portion closer to the upper connecting portion. The processing apparatus according to claim 1, wherein the bellows are contracted, the hooking claw is slid in a direction approaching the hooking portion, the hooking claw is hooked on the hooking portion, and the tubular bellows is fixed in a contracted state. An urging portion for urging the hooking claw in a direction away from the hooking portion is provided.
By moving the hooking claw in the direction opposite to the direction in which the urging force of the urging portion acts, the hooking claw is hooked on the hooking portion, and the lower connecting portion is pushed up and contracted to be fixed. By further contracting the bellows and raising the hooking claw, the hooking claw separated from the hooking portion moves in a direction away from the hooking portion by the urging force of the urging portion, and the cylinder in a contracted state. The processing apparatus according to claim 1, wherein the bellows is released from being fixed and the lower connecting portion can be connected to the upper plate.

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