JP2020530105A5 - - Google Patents

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Publication number
JP2020530105A5
JP2020530105A5 JP2020502661A JP2020502661A JP2020530105A5 JP 2020530105 A5 JP2020530105 A5 JP 2020530105A5 JP 2020502661 A JP2020502661 A JP 2020502661A JP 2020502661 A JP2020502661 A JP 2020502661A JP 2020530105 A5 JP2020530105 A5 JP 2020530105A5
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JP
Japan
Prior art keywords
bullseye
interferogram
detector
interference
reflective surface
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JP2020502661A
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English (en)
Japanese (ja)
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JP7182306B2 (ja
JP2020530105A (ja
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Priority claimed from US16/055,125 external-priority patent/US10473451B2/en
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JP2020502661A 2017-08-07 2018-08-06 空間におけるオブジェクトの位置測定 Active JP7182306B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762541906P 2017-08-07 2017-08-07
US62/541,906 2017-08-07
US16/055,125 2018-08-05
US16/055,125 US10473451B2 (en) 2017-08-07 2018-08-05 Measuring the position of objects in space
PCT/US2018/045327 WO2019032430A1 (en) 2017-08-07 2018-08-06 MEASURING THE POSITION OF OBJECTS IN SPACE

Publications (3)

Publication Number Publication Date
JP2020530105A JP2020530105A (ja) 2020-10-15
JP2020530105A5 true JP2020530105A5 (enExample) 2021-06-10
JP7182306B2 JP7182306B2 (ja) 2022-12-02

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ID=65229191

Family Applications (1)

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JP2020502661A Active JP7182306B2 (ja) 2017-08-07 2018-08-06 空間におけるオブジェクトの位置測定

Country Status (5)

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US (1) US10473451B2 (enExample)
JP (1) JP7182306B2 (enExample)
DE (1) DE112018004038B4 (enExample)
GB (1) GB2587826B (enExample)
WO (1) WO2019032430A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10794684B2 (en) 2017-12-11 2020-10-06 Quality Vision International Inc. Interferometric touch probe
CN109976380A (zh) * 2019-03-29 2019-07-05 北京理工大学 基于卡尔曼滤波估计的隔离度辨识校正方法及系统
JP7350296B2 (ja) * 2019-08-27 2023-09-26 アプレ インストゥルメンツ， インコーポレイテッド スペクトル制御干渉法に基づく光学アライメント

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
DE19947374B4 (de) 1999-10-01 2005-11-03 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Ermittlung geometrischer Abweichungen von Koordinatenmeßgeräten oder Werkzeugmaschinen
DE10118392A1 (de) * 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
US20030038933A1 (en) * 2001-04-19 2003-02-27 Dimensional Photonics Inc. Calibration apparatus, system and method
DE10339194B4 (de) 2003-08-22 2006-06-29 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Ermittlung systematischer geometrischer Abweichungen in technischen Mehrkörpersystemen
US7440113B2 (en) * 2005-12-23 2008-10-21 Agilent Technologies, Inc. Littrow interferometer
JP5441302B2 (ja) 2006-11-28 2014-03-12 キヤノン株式会社 形状測定装置
WO2010046478A1 (en) * 2008-10-24 2010-04-29 Ontex Hygieneartikel Deutschland Gmbh A tampon applicator
DE102010019656B4 (de) 2010-05-03 2016-09-01 Etalon Ag Messgerät
EP2385339A1 (en) * 2010-05-05 2011-11-09 Leica Geosystems AG Surface sensing device with optical monitoring system
CN201900513U (zh) 2010-11-19 2011-07-20 二重集团（德阳）重型装备股份有限公司 齿轮测量系统及专用手持活动式光学逆反射器
GB201205563D0 (en) * 2012-03-29 2012-05-09 Sec Dep For Business Innovation & Skills The Coordinate measurement system and method
JP2014145684A (ja) 2013-01-29 2014-08-14 Canon Inc 測定装置
JP5898134B2 (ja) * 2013-06-27 2016-04-06 トヨタ自動車株式会社 リハビリテーション装置、制御方法及び制御プログラム
CN106030237A (zh) 2013-12-06 2016-10-12 沃思测量技术股份有限公司 用于测量工件的装置和方法
CN104374317B (zh) 2014-11-06 2017-03-01 北京工业大学 基于激光跟踪仪多点测量技术的机床误差标定方法

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