JP7182306B2 - 空間におけるオブジェクトの位置測定 - Google Patents

空間におけるオブジェクトの位置測定 Download PDF

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Publication number
JP7182306B2
JP7182306B2 JP2020502661A JP2020502661A JP7182306B2 JP 7182306 B2 JP7182306 B2 JP 7182306B2 JP 2020502661 A JP2020502661 A JP 2020502661A JP 2020502661 A JP2020502661 A JP 2020502661A JP 7182306 B2 JP7182306 B2 JP 7182306B2
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Prior art keywords
reflective surface
interferogram
detector
bull
probe
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Japanese (ja)
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JP2020530105A5 (enExample
JP2020530105A (ja
Inventor
アルトゥール オルスザク，
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Apre Instruments inc
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Apre Instruments inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66—Tracking systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2020502661A 2017-08-07 2018-08-06 空間におけるオブジェクトの位置測定 Active JP7182306B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762541906P 2017-08-07 2017-08-07
US62/541,906 2017-08-07
US16/055,125 2018-08-05
US16/055,125 US10473451B2 (en) 2017-08-07 2018-08-05 Measuring the position of objects in space
PCT/US2018/045327 WO2019032430A1 (en) 2017-08-07 2018-08-06 MEASURING THE POSITION OF OBJECTS IN SPACE

Publications (3)

Publication Number Publication Date
JP2020530105A JP2020530105A (ja) 2020-10-15
JP2020530105A5 JP2020530105A5 (enExample) 2021-06-10
JP7182306B2 true JP7182306B2 (ja) 2022-12-02

Family

ID=65229191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020502661A Active JP7182306B2 (ja) 2017-08-07 2018-08-06 空間におけるオブジェクトの位置測定

Country Status (5)

Country Link
US (1) US10473451B2 (enExample)
JP (1) JP7182306B2 (enExample)
DE (1) DE112018004038B4 (enExample)
GB (1) GB2587826B (enExample)
WO (1) WO2019032430A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10794684B2 (en) 2017-12-11 2020-10-06 Quality Vision International Inc. Interferometric touch probe
CN109976380A (zh) * 2019-03-29 2019-07-05 北京理工大学 基于卡尔曼滤波估计的隔离度辨识校正方法及系统
JP7350296B2 (ja) * 2019-08-27 2023-09-26 アプレ インストゥルメンツ， インコーポレイテッド スペクトル制御干渉法に基づく光学アライメント

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008134112A (ja) 2006-11-28 2008-06-12 Canon Inc 形状測定装置
JP2014145684A (ja) 2013-01-29 2014-08-14 Canon Inc 測定装置
JP2015514982A (ja) 2012-03-29 2015-05-21 ザ セクレタリー オブ ステイト フォー ビジネス イノベーション アンド スキルズ 座標測定システムおよび方法
US20160370172A1 (en) 2013-12-06 2016-12-22 Werth Messtechnik Gmbh Device and method for measuring workpieces

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
DE19947374B4 (de) 1999-10-01 2005-11-03 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Ermittlung geometrischer Abweichungen von Koordinatenmeßgeräten oder Werkzeugmaschinen
DE10118392A1 (de) * 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
US20030038933A1 (en) * 2001-04-19 2003-02-27 Dimensional Photonics Inc. Calibration apparatus, system and method
DE10339194B4 (de) 2003-08-22 2006-06-29 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Ermittlung systematischer geometrischer Abweichungen in technischen Mehrkörpersystemen
US7440113B2 (en) * 2005-12-23 2008-10-21 Agilent Technologies, Inc. Littrow interferometer
WO2010046478A1 (en) * 2008-10-24 2010-04-29 Ontex Hygieneartikel Deutschland Gmbh A tampon applicator
DE102010019656B4 (de) 2010-05-03 2016-09-01 Etalon Ag Messgerät
EP2385339A1 (en) * 2010-05-05 2011-11-09 Leica Geosystems AG Surface sensing device with optical monitoring system
CN201900513U (zh) 2010-11-19 2011-07-20 二重集团（德阳）重型装备股份有限公司 齿轮测量系统及专用手持活动式光学逆反射器
JP5898134B2 (ja) * 2013-06-27 2016-04-06 トヨタ自動車株式会社 リハビリテーション装置、制御方法及び制御プログラム
CN104374317B (zh) 2014-11-06 2017-03-01 北京工业大学 基于激光跟踪仪多点测量技术的机床误差标定方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008134112A (ja) 2006-11-28 2008-06-12 Canon Inc 形状測定装置
JP2015514982A (ja) 2012-03-29 2015-05-21 ザ セクレタリー オブ ステイト フォー ビジネス イノベーション アンド スキルズ 座標測定システムおよび方法
JP2014145684A (ja) 2013-01-29 2014-08-14 Canon Inc 測定装置
US20160370172A1 (en) 2013-12-06 2016-12-22 Werth Messtechnik Gmbh Device and method for measuring workpieces

Also Published As

Publication number Publication date
JP2020530105A (ja) 2020-10-15
US20190041186A1 (en) 2019-02-07
DE112018004038T5 (de) 2020-08-13
GB2587826B (en) 2021-12-29
WO2019032430A1 (en) 2019-02-14
GB202004039D0 (en) 2020-05-06
US10473451B2 (en) 2019-11-12
GB2587826A (en) 2021-04-14
DE112018004038B4 (de) 2021-11-04

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