GB2587826B - Measuring the position of objects in space - Google Patents

Measuring the position of objects in space Download PDF

Info

Publication number
GB2587826B
GB2587826B GB2004039.0A GB202004039A GB2587826B GB 2587826 B GB2587826 B GB 2587826B GB 202004039 A GB202004039 A GB 202004039A GB 2587826 B GB2587826 B GB 2587826B
Authority
GB
United Kingdom
Prior art keywords
objects
measuring
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB2004039.0A
Other languages
English (en)
Other versions
GB202004039D0 (en
GB2587826A (en
Inventor
Olszak Artur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Apre Instr Inc
Original Assignee
Apre Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Apre Instr Inc filed Critical Apre Instr Inc
Publication of GB202004039D0 publication Critical patent/GB202004039D0/en
Publication of GB2587826A publication Critical patent/GB2587826A/en
Application granted granted Critical
Publication of GB2587826B publication Critical patent/GB2587826B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66—Tracking systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
GB2004039.0A 2017-08-07 2018-08-06 Measuring the position of objects in space Expired - Fee Related GB2587826B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762541906P 2017-08-07 2017-08-07
US16/055,125 US10473451B2 (en) 2017-08-07 2018-08-05 Measuring the position of objects in space
PCT/US2018/045327 WO2019032430A1 (en) 2017-08-07 2018-08-06 MEASURING THE POSITION OF OBJECTS IN SPACE

Publications (3)

Publication Number Publication Date
GB202004039D0 GB202004039D0 (en) 2020-05-06
GB2587826A GB2587826A (en) 2021-04-14
GB2587826B true GB2587826B (en) 2021-12-29

Family

ID=65229191

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2004039.0A Expired - Fee Related GB2587826B (en) 2017-08-07 2018-08-06 Measuring the position of objects in space

Country Status (5)

Country Link
US (1) US10473451B2 (enExample)
JP (1) JP7182306B2 (enExample)
DE (1) DE112018004038B4 (enExample)
GB (1) GB2587826B (enExample)
WO (1) WO2019032430A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10794684B2 (en) 2017-12-11 2020-10-06 Quality Vision International Inc. Interferometric touch probe
CN109976380A (zh) * 2019-03-29 2019-07-05 北京理工大学 基于卡尔曼滤波估计的隔离度辨识校正方法及系统
JP7350296B2 (ja) * 2019-08-27 2023-09-26 アプレ インストゥルメンツ， インコーポレイテッド スペクトル制御干渉法に基づく光学アライメント

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030038933A1 (en) * 2001-04-19 2003-02-27 Dimensional Photonics Inc. Calibration apparatus, system and method
US20070146722A1 (en) * 2005-12-23 2007-06-28 Trutna William R Jr Littrow interferometer
US20110201992A1 (en) * 2008-10-24 2011-08-18 Ontex Hygieneartikel Deutschland Gmbh Tampon applicator
US20130050701A1 (en) * 2010-05-05 2013-02-28 Leica Geosystems Ag Surface sensing device with optical monitoring system
US20150005138A1 (en) * 2013-06-27 2015-01-01 Toyota Jidosha Kabushiki Kaisha Rehabilitation device, control method, and recording medium

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304464A (en) * 1977-08-19 1981-12-08 The University Of Arizona Foundation Background compensating interferometer
DE19947374B4 (de) 1999-10-01 2005-11-03 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Ermittlung geometrischer Abweichungen von Koordinatenmeßgeräten oder Werkzeugmaschinen
DE10118392A1 (de) * 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
DE10339194B4 (de) 2003-08-22 2006-06-29 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zur Ermittlung systematischer geometrischer Abweichungen in technischen Mehrkörpersystemen
JP5441302B2 (ja) 2006-11-28 2014-03-12 キヤノン株式会社 形状測定装置
DE102010019656B4 (de) 2010-05-03 2016-09-01 Etalon Ag Messgerät
CN201900513U (zh) 2010-11-19 2011-07-20 二重集团（德阳）重型装备股份有限公司 齿轮测量系统及专用手持活动式光学逆反射器
GB201205563D0 (en) * 2012-03-29 2012-05-09 Sec Dep For Business Innovation & Skills The Coordinate measurement system and method
JP2014145684A (ja) 2013-01-29 2014-08-14 Canon Inc 測定装置
CN106030237A (zh) 2013-12-06 2016-10-12 沃思测量技术股份有限公司 用于测量工件的装置和方法
CN104374317B (zh) 2014-11-06 2017-03-01 北京工业大学 基于激光跟踪仪多点测量技术的机床误差标定方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030038933A1 (en) * 2001-04-19 2003-02-27 Dimensional Photonics Inc. Calibration apparatus, system and method
US20070146722A1 (en) * 2005-12-23 2007-06-28 Trutna William R Jr Littrow interferometer
US20110201992A1 (en) * 2008-10-24 2011-08-18 Ontex Hygieneartikel Deutschland Gmbh Tampon applicator
US20130050701A1 (en) * 2010-05-05 2013-02-28 Leica Geosystems Ag Surface sensing device with optical monitoring system
US20150005138A1 (en) * 2013-06-27 2015-01-01 Toyota Jidosha Kabushiki Kaisha Rehabilitation device, control method, and recording medium

Also Published As

Publication number Publication date
JP7182306B2 (ja) 2022-12-02
JP2020530105A (ja) 2020-10-15
US20190041186A1 (en) 2019-02-07
DE112018004038T5 (de) 2020-08-13
WO2019032430A1 (en) 2019-02-14
GB202004039D0 (en) 2020-05-06
US10473451B2 (en) 2019-11-12
GB2587826A (en) 2021-04-14
DE112018004038B4 (de) 2021-11-04

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20230806