JP2020522021A5 - - Google Patents
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- JP2020522021A5 JP2020522021A5 JP2019566768A JP2019566768A JP2020522021A5 JP 2020522021 A5 JP2020522021 A5 JP 2020522021A5 JP 2019566768 A JP2019566768 A JP 2019566768A JP 2019566768 A JP2019566768 A JP 2019566768A JP 2020522021 A5 JP2020522021 A5 JP 2020522021A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- refractive index
- surface profile
- final
- lattice material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 15
- 239000000463 material Substances 0.000 claims 13
- 238000005304 joining Methods 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 3
- 239000012790 adhesive layer Substances 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 229910010272 inorganic material Inorganic materials 0.000 claims 2
- 239000011147 inorganic material Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 238000000231 atomic layer deposition Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 claims 1
- 238000007641 inkjet printing Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000001127 nanoimprint lithography Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20175507 | 2017-06-02 | ||
| FI20175507A FI127799B (en) | 2017-06-02 | 2017-06-02 | Process for producing a diffraction grating |
| PCT/FI2018/050369 WO2018220264A1 (en) | 2017-06-02 | 2018-05-18 | Method of manufacturing a diffractive grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2020522021A JP2020522021A (ja) | 2020-07-27 |
| JP2020522021A5 true JP2020522021A5 (https=) | 2021-07-26 |
Family
ID=64456399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019566768A Pending JP2020522021A (ja) | 2017-06-02 | 2018-05-18 | 回折格子の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11194081B2 (https=) |
| EP (1) | EP3631534B1 (https=) |
| JP (1) | JP2020522021A (https=) |
| CN (2) | CN119986883A (https=) |
| FI (1) | FI127799B (https=) |
| WO (1) | WO2018220264A1 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210073604A (ko) * | 2018-11-09 | 2021-06-18 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 나노구조화된 광학 필름 및 중간체 |
| US12607779B2 (en) * | 2019-05-14 | 2026-04-21 | Nil Technology Aps | Seed structures for structured coatings for optical and other devices |
| FI131825B1 (en) * | 2020-06-17 | 2025-12-18 | Dispelix Oy | Method for producing an optical element, an optical element, and apparatus for producing an optical element |
| WO2022053871A1 (en) * | 2020-09-08 | 2022-03-17 | Sony Group Corporation | Waveguide with diffraction grating, head mounted device comprising diffraction grating and template for imprinting optical gratings |
| CN116529642A (zh) * | 2020-09-23 | 2023-08-01 | 应用材料公司 | 通过喷墨印刷沉积制造具有可变折射率轮廓的衍射光学元件 |
| JP2024502733A (ja) | 2020-12-18 | 2024-01-23 | スリーエム イノベイティブ プロパティズ カンパニー | 構造化フィルム及び構造化フィルムを含む光学物品 |
| US11926113B2 (en) * | 2022-08-03 | 2024-03-12 | Himax Technologies Limited | Optical element and method for manufacturing optical element |
| EP4336229B1 (en) * | 2022-08-03 | 2026-03-18 | Himax Technologies Limited | Method for manufacturing optical element |
| CN115826117A (zh) * | 2022-11-01 | 2023-03-21 | 福建福特科光电股份有限公司 | 基于纳米压印的二维光栅板的制备方法 |
| CN115421234B (zh) * | 2022-11-04 | 2023-04-07 | 北京驭光科技发展有限公司 | 衍射光波导及其光栅结构以及显示设备 |
| CN116609871B (zh) * | 2023-07-19 | 2023-10-03 | 上海鲲游科技有限公司 | 一种不等高直齿光栅的制作方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4850681A (en) * | 1986-04-07 | 1989-07-25 | Canon Kabushiki Kaisha | Optical modulation device |
| JPH0250109A (ja) * | 1988-05-09 | 1990-02-20 | Ricoh Co Ltd | 入射カプラ付き光導波路装置 |
| DE4211235C2 (de) * | 1992-04-03 | 2003-04-17 | Gao Ges Automation Org | Verfahren und Vorrichtung zur Herstellung metallischer Flächenelemente auf Substraten und deren Verwendung |
| GB9314991D0 (en) * | 1993-07-20 | 1993-09-01 | Sandoz Ltd | Mechanical device |
| JP3996391B2 (ja) * | 2001-12-28 | 2007-10-24 | 日置電機株式会社 | 微細周期構造体の製造方法 |
| GB0213722D0 (en) * | 2002-06-14 | 2002-07-24 | Suisse Electronique Microtech | Micro electrical mechanical systems |
| US7245406B2 (en) | 2003-09-17 | 2007-07-17 | Dai Nippon Printing Co., Ltd. | Method for forming fine concavo-convex patterns, method for producing optical diffraction structure, and method for copying optical diffraction structure |
| US20060029889A1 (en) * | 2004-08-06 | 2006-02-09 | Wang Tak K | Method to fabricate diffractive optics |
| EP1942364A1 (en) * | 2005-09-14 | 2008-07-09 | Mirage Innovations Ltd. | Diffractive optical relay and method for manufacturing the same |
| WO2007043005A1 (en) * | 2005-10-12 | 2007-04-19 | Koninklijke Philips Electronics N. V. | All polymer optical waveguide sensor |
| JP2007328096A (ja) | 2006-06-07 | 2007-12-20 | Ricoh Co Ltd | 回折光学素子とその作製方法および光学モジュール |
| CN101466749B (zh) * | 2006-06-14 | 2011-06-08 | 日立化成工业株式会社 | 树脂组合物及使用其形成的层叠型光学部件 |
| JP4999556B2 (ja) * | 2007-05-31 | 2012-08-15 | リコー光学株式会社 | 表面に微細凹凸形状をもつ光学素子の製造方法 |
| JP4968234B2 (ja) * | 2008-10-21 | 2012-07-04 | セイコーエプソン株式会社 | 光学素子及び表示装置 |
| JP5402317B2 (ja) | 2009-06-29 | 2014-01-29 | セイコーエプソン株式会社 | 偏光素子および偏光素子の製造方法、投写型表示装置、液晶装置、電子機器 |
| CN103328176B (zh) * | 2011-01-14 | 2015-07-29 | 吉坤日矿日石能源株式会社 | 微细图案转印用模具的制造方法及使用该模具的衍射光栅的制造方法、以及具有该衍射光栅的有机el元件的制造方法 |
| JP5680742B2 (ja) * | 2011-03-28 | 2015-03-04 | Ｊｘ日鉱日石エネルギー株式会社 | 凹凸構造を有する基板の製造方法及びそれを用いた有機ｅｌ素子の製造方法 |
| KR20160010866A (ko) * | 2013-05-17 | 2016-01-28 | 다우 코닝 코포레이션 | 용품의 제조 방법 및 그에 의해 제조된 용품 |
| TW201622205A (zh) * | 2014-08-04 | 2016-06-16 | 吉坤日礦日石能源股份有限公司 | 具有凹凸圖案之構件的製造方法 |
| US10007117B2 (en) * | 2015-09-10 | 2018-06-26 | Vuzix Corporation | Imaging light guide with reflective turning array |
-
2017
- 2017-06-02 FI FI20175507A patent/FI127799B/en active IP Right Grant
-
2018
- 2018-05-18 US US16/618,182 patent/US11194081B2/en active Active
- 2018-05-18 CN CN202510247189.2A patent/CN119986883A/zh active Pending
- 2018-05-18 CN CN201880038472.2A patent/CN111065941A/zh active Pending
- 2018-05-18 WO PCT/FI2018/050369 patent/WO2018220264A1/en not_active Ceased
- 2018-05-18 EP EP18809238.1A patent/EP3631534B1/en active Active
- 2018-05-18 JP JP2019566768A patent/JP2020522021A/ja active Pending
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