JP2020522021A5 - - Google Patents
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- Publication number
- JP2020522021A5 JP2020522021A5 JP2019566768A JP2019566768A JP2020522021A5 JP 2020522021 A5 JP2020522021 A5 JP 2020522021A5 JP 2019566768 A JP2019566768 A JP 2019566768A JP 2019566768 A JP2019566768 A JP 2019566768A JP 2020522021 A5 JP2020522021 A5 JP 2020522021A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- refractive index
- surface profile
- final
- lattice material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 15
- 239000000463 material Substances 0.000 claims 13
- 238000005304 joining Methods 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 3
- 239000012790 adhesive layer Substances 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 229910010272 inorganic material Inorganic materials 0.000 claims 2
- 239000011147 inorganic material Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 238000000231 atomic layer deposition Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 claims 1
- 238000007641 inkjet printing Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000001127 nanoimprint lithography Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20175507 | 2017-06-02 | ||
| FI20175507A FI127799B (en) | 2017-06-02 | 2017-06-02 | Process for producing a diffraction grating |
| PCT/FI2018/050369 WO2018220264A1 (en) | 2017-06-02 | 2018-05-18 | Method of manufacturing a diffractive grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2020522021A JP2020522021A (ja) | 2020-07-27 |
| JP2020522021A5 true JP2020522021A5 (https=) | 2021-07-26 |
Family
ID=64456399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019566768A Pending JP2020522021A (ja) | 2017-06-02 | 2018-05-18 | 回折格子の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11194081B2 (https=) |
| EP (1) | EP3631534B1 (https=) |
| JP (1) | JP2020522021A (https=) |
| CN (2) | CN111065941A (https=) |
| FI (1) | FI127799B (https=) |
| WO (1) | WO2018220264A1 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3877454B1 (en) * | 2018-11-09 | 2026-04-29 | 3M Innovative Properties Company | Nanostructured optical films and intermediates |
| US12607779B2 (en) * | 2019-05-14 | 2026-04-21 | Nil Technology Aps | Seed structures for structured coatings for optical and other devices |
| FI131825B1 (en) * | 2020-06-17 | 2025-12-18 | Dispelix Oy | Method for producing an optical element, an optical element, and apparatus for producing an optical element |
| WO2022053871A1 (en) * | 2020-09-08 | 2022-03-17 | Sony Group Corporation | Waveguide with diffraction grating, head mounted device comprising diffraction grating and template for imprinting optical gratings |
| WO2022066941A1 (en) * | 2020-09-23 | 2022-03-31 | Applied Materials, Inc. | Fabrication of diffractive optic element having a variable refractive index profile by inkjet printing deposition |
| WO2022130260A1 (en) | 2020-12-18 | 2022-06-23 | 3M Innovative Properties Company | Structured film and optical article including structured film |
| EP4336229B1 (en) * | 2022-08-03 | 2026-03-18 | Himax Technologies Limited | Method for manufacturing optical element |
| US11926113B2 (en) * | 2022-08-03 | 2024-03-12 | Himax Technologies Limited | Optical element and method for manufacturing optical element |
| CN115826117A (zh) * | 2022-11-01 | 2023-03-21 | 福建福特科光电股份有限公司 | 基于纳米压印的二维光栅板的制备方法 |
| CN115421234B (zh) | 2022-11-04 | 2023-04-07 | 北京驭光科技发展有限公司 | 衍射光波导及其光栅结构以及显示设备 |
| CN116609871B (zh) * | 2023-07-19 | 2023-10-03 | 上海鲲游科技有限公司 | 一种不等高直齿光栅的制作方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4850681A (en) | 1986-04-07 | 1989-07-25 | Canon Kabushiki Kaisha | Optical modulation device |
| JPH0250109A (ja) * | 1988-05-09 | 1990-02-20 | Ricoh Co Ltd | 入射カプラ付き光導波路装置 |
| DE4211235C2 (de) * | 1992-04-03 | 2003-04-17 | Gao Ges Automation Org | Verfahren und Vorrichtung zur Herstellung metallischer Flächenelemente auf Substraten und deren Verwendung |
| GB9314991D0 (en) * | 1993-07-20 | 1993-09-01 | Sandoz Ltd | Mechanical device |
| JP3996391B2 (ja) * | 2001-12-28 | 2007-10-24 | 日置電機株式会社 | 微細周期構造体の製造方法 |
| GB0213722D0 (en) | 2002-06-14 | 2002-07-24 | Suisse Electronique Microtech | Micro electrical mechanical systems |
| US7245406B2 (en) * | 2003-09-17 | 2007-07-17 | Dai Nippon Printing Co., Ltd. | Method for forming fine concavo-convex patterns, method for producing optical diffraction structure, and method for copying optical diffraction structure |
| US20060029889A1 (en) * | 2004-08-06 | 2006-02-09 | Wang Tak K | Method to fabricate diffractive optics |
| EP1942364A1 (en) * | 2005-09-14 | 2008-07-09 | Mirage Innovations Ltd. | Diffractive optical relay and method for manufacturing the same |
| WO2007043005A1 (en) * | 2005-10-12 | 2007-04-19 | Koninklijke Philips Electronics N. V. | All polymer optical waveguide sensor |
| JP2007328096A (ja) * | 2006-06-07 | 2007-12-20 | Ricoh Co Ltd | 回折光学素子とその作製方法および光学モジュール |
| KR101166602B1 (ko) * | 2006-06-14 | 2012-07-18 | 히다치 가세고교 가부시끼가이샤 | 수지 조성물, 및 이것을 이용하여 이루어지는 적층형 광학부재 |
| JP4999556B2 (ja) * | 2007-05-31 | 2012-08-15 | リコー光学株式会社 | 表面に微細凹凸形状をもつ光学素子の製造方法 |
| JP4968234B2 (ja) * | 2008-10-21 | 2012-07-04 | セイコーエプソン株式会社 | 光学素子及び表示装置 |
| JP5402317B2 (ja) | 2009-06-29 | 2014-01-29 | セイコーエプソン株式会社 | 偏光素子および偏光素子の製造方法、投写型表示装置、液晶装置、電子機器 |
| CA2824148C (en) * | 2011-01-14 | 2016-01-05 | Jx Nippon Oil & Energy Corporation | Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic el element including the diffraction grating |
| KR101552172B1 (ko) * | 2011-03-28 | 2015-09-10 | 제이엑스 닛코닛세키 에네루기 가부시키가이샤 | 요철 구조를 가지는 기판 제조 방법 및 이것을 사용한 유기 el 소자의 제조 방법 |
| KR20160010866A (ko) * | 2013-05-17 | 2016-01-28 | 다우 코닝 코포레이션 | 용품의 제조 방법 및 그에 의해 제조된 용품 |
| WO2016021533A1 (ja) * | 2014-08-04 | 2016-02-11 | Ｊｘ日鉱日石エネルギー株式会社 | 凹凸パターンを有する部材の製造方法 |
| US10007117B2 (en) * | 2015-09-10 | 2018-06-26 | Vuzix Corporation | Imaging light guide with reflective turning array |
-
2017
- 2017-06-02 FI FI20175507A patent/FI127799B/en active IP Right Grant
-
2018
- 2018-05-18 CN CN201880038472.2A patent/CN111065941A/zh active Pending
- 2018-05-18 WO PCT/FI2018/050369 patent/WO2018220264A1/en not_active Ceased
- 2018-05-18 EP EP18809238.1A patent/EP3631534B1/en active Active
- 2018-05-18 JP JP2019566768A patent/JP2020522021A/ja active Pending
- 2018-05-18 CN CN202510247189.2A patent/CN119986883A/zh active Pending
- 2018-05-18 US US16/618,182 patent/US11194081B2/en active Active
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