JP2020505718A - 放射加熱プレソーク - Google Patents
放射加熱プレソーク Download PDFInfo
- Publication number
- JP2020505718A JP2020505718A JP2019536846A JP2019536846A JP2020505718A JP 2020505718 A JP2020505718 A JP 2020505718A JP 2019536846 A JP2019536846 A JP 2019536846A JP 2019536846 A JP2019536846 A JP 2019536846A JP 2020505718 A JP2020505718 A JP 2020505718A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- heating chuck
- chuck
- temperature
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 157
- 238000012545 processing Methods 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 36
- 238000012546 transfer Methods 0.000 claims abstract description 27
- 230000005855 radiation Effects 0.000 claims abstract description 20
- 239000012636 effector Substances 0.000 claims abstract description 18
- 238000005468 ion implantation Methods 0.000 claims description 27
- 150000002500 ions Chemical class 0.000 claims description 12
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 239000007943 implant Substances 0.000 description 10
- 230000008646 thermal stress Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000002595 Solanum tuberosum Nutrition 0.000 description 1
- 244000061456 Solanum tuberosum Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000002304 esc Anatomy 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32412—Plasma immersion ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- High Energy & Nuclear Physics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
本願は、「放射加熱プレソーク(RADIENT HEATING PRESOAK)」と題する2017年1月19日に出願された米国仮出願第62/448,324号の利益を主張し、その内容は、その全体が参照により本明細書に組み込まれる。
本開示は、一般的には、ワークピース(被加工物:workpiece)を処理するためのワークピース処理システムおよび方法に関し、より具体的には、加熱チャック(heated chuck)上に配置される前に、ワークピースの温度を制御するシステムおよび方法に関する。
半導体プロセスでは、イオン注入などの多くの操作が、ワークピースまたは半導体ウェハに対して実行され得る。イオン注入処理技術が進歩するにつれて、ワークピースの様々な注入特性を達成するために、ワークピースにおける様々なイオン注入温度が導入され得る。例えば、従来のイオン注入処理では、以下の3つの温度レジームが通常考慮される。(i)ワークピースにおける処理温度が室温より低い温度に維持される低温注入(cold implants)、(ii)ワークピースにおける処理温度が、通常300〜600℃の範囲の高温に維持される高温注入(hot implants)、および(iii)ワークピースにおける処理温度が室温よりわずかに高いが、高温注入で使用される温度より低い温度に維持されるいわゆる準室温注入(quasi-room temperature implants)であって、準室温注入温度は、典型的に50〜100℃の範囲である。
本発明は、高温イオン注入システムの大気環境と真空環境との間で、ワークピース(被加工物:workpiece)を移送するためのシステム、装置、および方法を提供することによって、従来技術の制限を克服すると共に、スループットを最大限にし、システムに係る所有コストを最小限にする。
本開示は、概して、比較的冷えたワークピースを受け入れるように構成された加熱チャックを有するシステムを対象とする。一実施形態では、本開示は、イオン注入システムに関し、より詳細には、高温イオン注入(例えば、300℃〜600℃)のために構成されたイオン注入システムに関する。しかし、本開示は、比較的低温のワークピースが比較的高温の表面上に配置される様々な他のシステムに適用可能であることを理解されたい。
Claims (20)
- ワークピース処理システムであって、
真空チャンバと、
前記真空チャンバに動作可能に連結されている第1チャンバと、
前記真空チャンバ内に配置される加熱チャックと、
ワークピース移送装置と、
コントローラと、を含んでおり、
前記加熱チャックは、当該加熱チャックのクランプ面にワークピースを選択的にクランプし、
前記加熱チャックは、前記クランプ面を選択的に加熱し、
前記ワークピース移送装置は、前記ワークピースを選択的に支持するエンドエフェクタを有しており、
前記ワークピースは、前記エンドエフェクタ上に載置され、
前記ワークピース移送装置は、前記加熱チャックと前記第1チャンバとの間で前記ワークピースを選択的に移送し、
前記コントローラは、前記ワークピース移送装置を制御することによって、前記加熱チャックに対して前記ワークピースを選択的に配置し、
前記コントローラは、前記クランプ面から所定の距離に前記ワークピースを配置し、
前記所定の距離は、前記ワークピースが前記加熱チャックから受ける放射線の量を概ね決定し、
前記コントローラは、前記ワークピース移送装置を制御することによって、前記加熱チャックの表面に、前記ワークピースを選択的に配置する、ワークピース処理システム。 - 前記コントローラは、前記ワークピースが前記所定の距離に配置されるまでの所要時間を制御する、請求項1に記載のワークピース処理システム。
- 前記コントローラは、前記ワークピースの所望の温度プロファイルおよび前記加熱チャックの所定の温度プロファイルのうちの1つ以上に基づいて、前記所定の距離および前記所要時間のうちの1つ以上を選択的に変更するように構成される、請求項2に記載のワークピース処理システム。
- 前記ワークピースへとイオンビームを導くイオン注入システムをさらに含む、請求項1に記載のワークピース処理システム。
- 前記加熱チャックは、前記加熱チャック内に埋め込まれた1つ以上の放射ヒータを含む、請求項1に記載のワークピース処理システム。
- 前記加熱チャックは、前記ワークピースを所定の処理温度まで加熱する、請求項1に記載のワークピース処理システム。
- 前記所定の処理温度は、約100℃〜約1200℃の範囲である、請求項6に記載のワークピース処理システム。
- イオン注入システムにおいてワークピースを予熱するための方法であって、前記方法は、
第1温度の第1位置から、チャンバ内の加熱チャックの表面に近接する所定の位置まで、前記ワークピースを移送する工程と、
前記加熱チャックから熱放射を放出することにより、前記ワークピースが、前記所定の位置で、前記加熱チャックからの熱放射に曝される工程と、
前記ワークピースを、所定の時間に亘り前記所定の位置に維持することにより、前記ワークピースの温度を第2温度まで上昇させる工程と、
前記ワークピースを、前記加熱チャックの表面に配置する工程と、
前記ワークピースにイオンを注入する工程と、を含む、方法。 - 前記ワークピースを、前記加熱チャックの表面に静電的にクランプする工程をさらに含む、請求項8に記載の方法。
- 1つ以上の機械的クランプによって、前記ワークピースを前記加熱チャックの表面に、機械的にクランプする工程をさらに含む、請求項8に記載の方法。
- 前記第1位置から、前記加熱チャックの表面に近接する前記所定の位置まで、前記ワークピースを移送する工程は、前記ワークピースを、第1環境から前記チャンバ内の真空環境まで移送する工程をさらに含む、請求項8に記載の方法。
- 前記所定の位置は、前記加熱チャックの表面から所定の距離に配された位置を含む、請求項8に記載の方法。
- 前記加熱チャックの1つ以上の放射特性に基づいて、前記所定の距離を決定する工程をさらに含む、請求項12に記載の方法。
- 前記加熱チャックは、当該加熱チャックの表面を横切る可変放射プロファイルを有し、
前記所定の距離を決定する工程は、前記ワークピースと前記加熱チャックの表面との間の形態係数を決定する工程を含む、請求項13に記載の方法。 - 前記第1温度は、約100℃未満であり、前記第2温度は、約300℃よりも高い、請求項8に記載の方法。
- 前記第1温度は、約20℃〜100℃の範囲であり、前記第2温度は、約300℃〜600℃の範囲である、請求項8に記載の方法。
- イオン注入システムにおいてワークピースを予熱するための方法であって、前記方法は、
第1温度の第1位置から、チャンバ内の加熱チャックの表面から所定の距離に配された所定の位置まで、前記ワークピースを移送する工程と、
前記加熱チャックから熱放射を放出することにより、前記ワークピースが、前記所定の位置で、前記加熱チャックからの熱放射に曝される工程と、
前記ワークピースを、所定の時間に亘り前記所定の位置に維持することにより、前記ワークピースの温度を第2温度まで上昇させる工程と、
前記ワークピースを、前記加熱チャックの表面に配置する工程と、
前記ワークピースにイオンを注入する工程と、を含む、方法。 - 前記ワークピースの所望の温度プロファイルおよび前記加熱チャックの所定の温度プロファイルのうちの1つ以上に基づいて、前記所定の距離および前記所定の時間のうちの1つ以上を変更する工程をさらに含む、請求項17に記載の方法。
- 前記ワークピースを前記加熱チャックの表面に配置した後に、前記ワークピースを前記加熱チャックの表面に静電的にクランプする工程をさらに含む、請求項17に記載の方法。
- 前記ワークピースを、ロードロックチャンバ内で前記第1温度まで加熱する工程をさらに含む、請求項17に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762448324P | 2017-01-19 | 2017-01-19 | |
US62/448,324 | 2017-01-19 | ||
PCT/US2018/014132 WO2018136577A1 (en) | 2017-01-19 | 2018-01-18 | Radiant heating presoak |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020505718A true JP2020505718A (ja) | 2020-02-20 |
JP7097893B2 JP7097893B2 (ja) | 2022-07-08 |
Family
ID=61764097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019536846A Active JP7097893B2 (ja) | 2017-01-19 | 2018-01-18 | 放射加熱プレソーク |
Country Status (6)
Country | Link |
---|---|
US (1) | US10861731B2 (ja) |
JP (1) | JP7097893B2 (ja) |
KR (1) | KR102470334B1 (ja) |
CN (1) | CN110235218B (ja) |
TW (1) | TWI765955B (ja) |
WO (1) | WO2018136577A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10227693B1 (en) * | 2018-01-31 | 2019-03-12 | Axcelis Technologies, Inc. | Outgassing impact on process chamber reduction via chamber pump and purge |
US11011397B2 (en) * | 2018-12-20 | 2021-05-18 | Axcelis Technologies, Inc. | Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment |
CN117096230B (zh) * | 2023-10-19 | 2024-01-16 | 深圳蓝普视讯科技有限公司 | 一种微发光二极管显示屏巨量转移控制方法及相关设备 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0697269A (ja) * | 1992-02-26 | 1994-04-08 | Tokyo Electron Ltd | 基板処理装置 |
JPH0942854A (ja) * | 1995-07-26 | 1997-02-14 | Hitachi Techno Eng Co Ltd | 加熱炉 |
JPH1064982A (ja) * | 1996-08-14 | 1998-03-06 | Dainippon Screen Mfg Co Ltd | 基板保持機構及び基板処理装置 |
JP2000223425A (ja) * | 1999-02-02 | 2000-08-11 | Nec Corp | 基板処理装置、ガス供給方法、及び、レーザ光供給方法 |
JP2002367921A (ja) * | 2001-06-07 | 2002-12-20 | Hitachi Ltd | イオン注入装置 |
JP2005085993A (ja) * | 2003-09-09 | 2005-03-31 | Dainippon Screen Mfg Co Ltd | 熱処理装置および熱処理方法 |
JP2005538566A (ja) * | 2002-09-10 | 2005-12-15 | アクセリス テクノロジーズ, インコーポレイテッド | 温度固定されたチャックを用いた温度可変プロセスにおける基板の加熱方法 |
KR20080037143A (ko) * | 2006-10-25 | 2008-04-30 | 삼성전자주식회사 | 표시판의 제조 장치 |
JP2015154061A (ja) * | 2014-02-19 | 2015-08-24 | 住友電気工業株式会社 | 半導体装置の製造方法 |
WO2015200005A1 (en) * | 2014-06-27 | 2015-12-30 | Axcelis Technologies, Inc. | High throughput heated ion implantation system and method |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009031450A1 (ja) * | 2007-09-03 | 2009-03-12 | Canon Anelva Corporation | 基板熱処理装置及び基板の熱処理方法 |
US8194384B2 (en) | 2008-07-23 | 2012-06-05 | Tokyo Electron Limited | High temperature electrostatic chuck and method of using |
KR101612502B1 (ko) * | 2008-12-18 | 2016-04-14 | 주성엔지니어링(주) | 반도체 소자의 제조방법 및 제조장치 |
US9640412B2 (en) * | 2009-11-20 | 2017-05-02 | Applied Materials, Inc. | Apparatus and method for enhancing the cool down of radiatively heated substrates |
JP5478280B2 (ja) * | 2010-01-27 | 2014-04-23 | 東京エレクトロン株式会社 | 基板加熱装置および基板加熱方法、ならびに基板処理システム |
US8941968B2 (en) | 2010-06-08 | 2015-01-27 | Axcelis Technologies, Inc. | Heated electrostatic chuck including mechanical clamp capability at high temperature |
US8371567B2 (en) * | 2011-04-13 | 2013-02-12 | Novellus Systems, Inc. | Pedestal covers |
JP6181358B2 (ja) * | 2012-07-25 | 2017-08-16 | 東京エレクトロン株式会社 | ベーク処理システム及び有機el素子の有機機能膜の積層体の製造方法 |
WO2016088882A1 (ja) * | 2014-12-05 | 2016-06-09 | 富士フイルム株式会社 | 金属酸化物膜の製造方法、金属酸化物膜、薄膜トランジスタ、薄膜トランジスタの製造方法、電子デバイス、及び紫外線照射装置 |
-
2018
- 2018-01-16 US US15/872,543 patent/US10861731B2/en active Active
- 2018-01-18 JP JP2019536846A patent/JP7097893B2/ja active Active
- 2018-01-18 KR KR1020197023024A patent/KR102470334B1/ko active IP Right Grant
- 2018-01-18 WO PCT/US2018/014132 patent/WO2018136577A1/en active Application Filing
- 2018-01-18 TW TW107101860A patent/TWI765955B/zh active
- 2018-01-18 CN CN201880005294.3A patent/CN110235218B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0697269A (ja) * | 1992-02-26 | 1994-04-08 | Tokyo Electron Ltd | 基板処理装置 |
JPH0942854A (ja) * | 1995-07-26 | 1997-02-14 | Hitachi Techno Eng Co Ltd | 加熱炉 |
JPH1064982A (ja) * | 1996-08-14 | 1998-03-06 | Dainippon Screen Mfg Co Ltd | 基板保持機構及び基板処理装置 |
JP2000223425A (ja) * | 1999-02-02 | 2000-08-11 | Nec Corp | 基板処理装置、ガス供給方法、及び、レーザ光供給方法 |
JP2002367921A (ja) * | 2001-06-07 | 2002-12-20 | Hitachi Ltd | イオン注入装置 |
JP2005538566A (ja) * | 2002-09-10 | 2005-12-15 | アクセリス テクノロジーズ, インコーポレイテッド | 温度固定されたチャックを用いた温度可変プロセスにおける基板の加熱方法 |
JP2005085993A (ja) * | 2003-09-09 | 2005-03-31 | Dainippon Screen Mfg Co Ltd | 熱処理装置および熱処理方法 |
KR20080037143A (ko) * | 2006-10-25 | 2008-04-30 | 삼성전자주식회사 | 표시판의 제조 장치 |
JP2015154061A (ja) * | 2014-02-19 | 2015-08-24 | 住友電気工業株式会社 | 半導体装置の製造方法 |
WO2015200005A1 (en) * | 2014-06-27 | 2015-12-30 | Axcelis Technologies, Inc. | High throughput heated ion implantation system and method |
JP2017527953A (ja) * | 2014-06-27 | 2017-09-21 | アクセリス テクノロジーズ, インコーポレイテッド | 高処理能力の加熱イオン注入システムおよび方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201841196A (zh) | 2018-11-16 |
TWI765955B (zh) | 2022-06-01 |
CN110235218B (zh) | 2022-02-15 |
JP7097893B2 (ja) | 2022-07-08 |
KR102470334B1 (ko) | 2022-11-23 |
US10861731B2 (en) | 2020-12-08 |
CN110235218A (zh) | 2019-09-13 |
US20180204755A1 (en) | 2018-07-19 |
WO2018136577A1 (en) | 2018-07-26 |
KR20190103319A (ko) | 2019-09-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8450193B2 (en) | Techniques for temperature-controlled ion implantation | |
US7655933B2 (en) | Techniques for temperature-controlled ion implantation | |
KR102442073B1 (ko) | 높은 처리량의 가열 이온 주입 시스템 및 방법 | |
KR102126367B1 (ko) | 진공식 고속 예냉 스테이션 및 후열 스테이션 | |
KR102356531B1 (ko) | 웨이퍼를 가열 또는 냉각하기 위한 장치 및 방법 | |
JP7097893B2 (ja) | 放射加熱プレソーク | |
US10128084B1 (en) | Wafer temperature control with consideration to beam power input | |
KR20210099618A (ko) | 반도체 처리장치를 위한 열전대 내장 엔드 이펙터를 통한 웨이퍼 소크 온도 판독 및 제어 | |
JP7440414B2 (ja) | チャンバポンプおよびパージによるプロセスチャンバの低減に対するガス放出の影響 | |
US11887808B2 (en) | Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity | |
US11114330B2 (en) | Substrate support having customizable and replaceable features for enhanced backside contamination performance | |
TWI805618B (zh) | 具有藉由考慮射束功率輸入的晶圓溫度控制的離子植入系統和方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201224 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220215 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220511 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220614 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220628 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7097893 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |