JP2020500829A - クライオポンプ及び他の大容量構造用の窒化ホウ素ナノチューブ材料 - Google Patents
クライオポンプ及び他の大容量構造用の窒化ホウ素ナノチューブ材料 Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 161
- 229910052582 BN Inorganic materials 0.000 title abstract description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title abstract description 5
- 239000002071 nanotube Substances 0.000 title abstract description 3
- 238000000034 method Methods 0.000 claims abstract description 77
- 239000002270 dispersing agent Substances 0.000 claims abstract description 40
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 239000011248 coating agent Substances 0.000 claims abstract description 29
- 239000003292 glue Substances 0.000 claims abstract description 29
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 14
- 239000010935 stainless steel Substances 0.000 claims abstract description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N isopropyl alcohol Natural products CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 45
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Natural products CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 39
- OKKJLVBELUTLKV-UHFFFAOYSA-N methanol Natural products OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 33
- 235000019441 ethanol Nutrition 0.000 claims description 32
- 239000012855 volatile organic compound Substances 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 11
- 229910052738 indium Inorganic materials 0.000 claims description 10
- 239000003365 glass fiber Substances 0.000 claims description 9
- 238000005507 spraying Methods 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 239000004033 plastic Substances 0.000 claims description 7
- 229920003023 plastic Polymers 0.000 claims description 7
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- 229910000679 solder Inorganic materials 0.000 claims description 6
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- 229920005594 polymer fiber Polymers 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 4
- 229920000271 Kevlar® Polymers 0.000 claims description 4
- 239000004917 carbon fiber Substances 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims description 2
- 239000004761 kevlar Substances 0.000 claims 1
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- 239000002245 particle Substances 0.000 description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 12
- 229910052796 boron Inorganic materials 0.000 description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 239000011230 binding agent Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 6
- 239000002135 nanosheet Substances 0.000 description 6
- 238000000746 purification Methods 0.000 description 6
- 238000000527 sonication Methods 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 239000002041 carbon nanotube Substances 0.000 description 5
- 229910021393 carbon nanotube Inorganic materials 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000002091 nanocage Substances 0.000 description 5
- 229910000619 316 stainless steel Inorganic materials 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
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- 229910052751 metal Inorganic materials 0.000 description 4
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
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- -1 and BNNT Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
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- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- 239000004604 Blowing Agent Substances 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 101150013568 US16 gene Proteins 0.000 description 1
- 101150071882 US17 gene Proteins 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 239000004964 aerogel Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- 230000001351 cycling effect Effects 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- 238000013101 initial test Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
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- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
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- 239000013014 purified material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B35/00—Boron; Compounds thereof
- C01B35/08—Compounds containing boron and nitrogen, phosphorus, oxygen, sulfur, selenium or tellurium
- C01B35/14—Compounds containing boron and nitrogen, phosphorus, sulfur, selenium or tellurium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
- C01B21/0648—After-treatment, e.g. grinding, purification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D9/00—Crystallisation
- B01D9/0018—Evaporation of components of the mixture to be separated
- B01D9/0022—Evaporation of components of the mixture to be separated by reducing pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
- C01P2004/13—Nanotubes
Abstract
Description
Claims (20)
- 大容量のBNNT構造の形成方法であって、前記方法は、
分散剤にBNNTを分散させることと、
前記分散したBNNTを支持構造に適用して、BNNTをコーティングした支持構造を形成することと、
前記分散剤を取り除くことと、
を含むことを特徴とする、方法。 - 前記分散したBNNTを適用することは、前記分散したBNNTを前記支持構造にスプレーコーティングすることと、前記分散したBNNTを前記支持構造上に層化することと、前記支持構造上の前記分散したBNNTを凍結乾燥することと、前記分散したBNNTを、前記支持構造及び第2の支持構造上に拡散することと、のうち少なくとも1つを含むことを特徴とする、請求項1に記載の方法。
- 前記支持構造は、足場及びバッキ−ペーパー/マットのうち少なくとも1つを含むことを特徴とする、請求項1に記載の方法。
- 前記足場は、BNNT繊維、ステンレス鋼、Kevlar、ポリマー繊維、炭素繊維、及びガラス繊維のうち少なくとも1つを含むことを特徴とする、請求項3に記載の方法。
- 前記BNNT材料は、部分的に精製したBNNT材料、及び精製BNNT材料のうち少なくとも1つを含むことを特徴とする、請求項1に記載の方法。
- 前記BNNTをコーティングした支持構造をベークすることを更に含むことを特徴とする、請求項1に記載の方法。
- 前記ベークすることは、約60〜140℃のベーク温度で実施されることを特徴とする、請求項6に記載の方法。
- 前記分散剤は、アルコール、イソプロピルアルコール、メチルアルコール、エチルアルコール、及び揮発性有機化合物のうち少なくとも1つを含むことを特徴とする、請求項1に記載の方法。
- 前記足場を、熱性プラスチック、インジウム、スズ、スズ合金又は他のはんだ、及び低温溶融性ガラスのうち少なくとも1つでプレコーティングすることを更に含むことを特徴とする、請求項1に記載の方法。
- 前記BNNTをコーティングした支持構造を圧縮することを更に含むことを特徴とする、請求項1に記載の方法。
- 前記BNNTをコーティングした支持構造を真空でベークすること、及び前記BNNTをコーティングした支持構造を空気中でベークすることのうち少なくとも1つを更に含むことを特徴とする、請求項1に記載の方法。
- 前記BNNTをコーティングした支持構造を真空でベークすることは、約200℃のベーク温度で実施され、前記BNNTをコーティングした支持構造を空気中でベークすることは、約450℃のベーク温度で実施されることを特徴とする、請求項11に記載の方法。
- 前記BNNTをコーティングした支持構造はBNNTバッキ−ペーパー/マットを含み、前記BNNTバッキ−ペーパー/マットを足場上で圧縮することを更に含むことを特徴とする、請求項1に記載の方法。
- 前記分散したBNNTを適用することは、前記分散したBNNTを前記支持構造上で凍結させることと、前記分散剤を蒸発させることと、を含むことを特徴とする、請求項1に記載の方法。
- 前記分散剤を蒸発させることは、前記分散BNNT材料を真空に配置することと、前記温度を前記分散剤の凝固点未満まで下げることと、を含むことを特徴とする、請求項14に記載の方法。
- 前記分散剤は、蒸留水と、アルコール、メチルアルコール、エチルアルコール、イソプロピルアルコール、及び揮発性有機化合物のうち少なくとも1つと、を含むことを特徴とする、請求項14に記載の方法。
- 前記支持構造はバッキ−ペーパー/マットを含み、前記バッキ−ペーパー/マットを所望の形状に形状化することと、前記形状化したバッキ−ペーパー/マット及びフィルターに前記分散したBNNTを注入し、BNNTをコーティングしたバッキ−ペーパー/マットを形成することと、前記BNNTをコーティングしたバッキ−ペーパー/マットを乾燥させることと、を更に含むことを特徴とする、請求項1に記載の方法。
- 前記分散剤は、アルコール、メチルアルコール、エチルアルコール、イソプロピルアルコール、及び揮発性有機化合物のうち少なくとも1つを含むことを特徴とする、請求項17に記載の方法。
- 前記分散したBNNTは、分散剤1mL当たり、約0.1〜3mgのBNNT材料を有するBNNT糊を含むことを特徴とする、請求項1に記載の方法。
- 前記BNNT糊を前記支持構造及び第2の支持構造上に拡散させることと、前記支持構造及び前記第2の支持構造を結合することと、前記結合した支持構造及び前記第2の支持構造を圧縮することと、前記結合した支持構造及び第2の支持構造を加熱して分散剤を蒸発させることと、を更に含むことを特徴とする、請求項19に記載の方法。
Applications Claiming Priority (3)
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US201662427583P | 2016-11-29 | 2016-11-29 | |
US62/427,583 | 2016-11-29 | ||
PCT/US2017/063752 WO2018102437A1 (en) | 2016-11-29 | 2017-11-29 | Boron nitride nanotube materials for cryopumps and other large volume configurations |
Publications (3)
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JP2020500829A true JP2020500829A (ja) | 2020-01-16 |
JP2020500829A5 JP2020500829A5 (ja) | 2021-01-14 |
JP7160825B2 JP7160825B2 (ja) | 2022-10-25 |
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JP2019548542A Active JP7160825B2 (ja) | 2016-11-29 | 2017-11-29 | クライオポンプ及び他の大容量構造用の窒化ホウ素ナノチューブ材料の形成方法 |
Country Status (7)
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US (1) | US11866327B2 (ja) |
EP (1) | EP3548435A4 (ja) |
JP (1) | JP7160825B2 (ja) |
KR (1) | KR102524017B1 (ja) |
AU (1) | AU2017368072B2 (ja) |
CA (1) | CA3043510A1 (ja) |
WO (1) | WO2018102437A1 (ja) |
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US20220099151A1 (en) * | 2019-01-07 | 2022-03-31 | Bnnt, Llc | Boron nitride nanotube vibration damping optimization |
KR102393063B1 (ko) | 2019-10-21 | 2022-05-03 | 한국과학기술연구원 | 질화붕소 나노튜브의 정제방법 |
KR102482650B1 (ko) * | 2021-02-25 | 2022-12-29 | (주)에프에스티 | 질화 붕소 나노 구조 층을 포함하는 극자외선 리소그라피용 펠리클 막 및 그 제조방법 |
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WO2016100715A1 (en) * | 2014-12-17 | 2016-06-23 | Bnnt, Llc | Boron nitride nanotube enhanced electrical components |
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EP3049121B1 (en) * | 2013-09-25 | 2021-12-29 | Nanofiber Solutions, LLC | Fiber scaffolds for use creating implantable structures |
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US20200055732A1 (en) | 2020-02-20 |
US11866327B2 (en) | 2024-01-09 |
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CA3043510A1 (en) | 2018-06-07 |
AU2017368072B2 (en) | 2021-10-07 |
KR102524017B1 (ko) | 2023-04-20 |
EP3548435A4 (en) | 2020-07-15 |
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