JP2020169930A - 物理量計測装置 - Google Patents
物理量計測装置 Download PDFInfo
- Publication number
- JP2020169930A JP2020169930A JP2019072245A JP2019072245A JP2020169930A JP 2020169930 A JP2020169930 A JP 2020169930A JP 2019072245 A JP2019072245 A JP 2019072245A JP 2019072245 A JP2019072245 A JP 2019072245A JP 2020169930 A JP2020169930 A JP 2020169930A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- measurement
- housing
- downstream
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 1232
- 238000000926 separation method Methods 0.000 claims description 174
- 239000012530 fluid Substances 0.000 claims description 60
- 239000000853 adhesive Substances 0.000 claims description 43
- 230000001070 adhesive effect Effects 0.000 claims description 43
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229920002050 silicone resin Polymers 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 description 657
- 238000005192 partition Methods 0.000 description 310
- 239000000758 substrate Substances 0.000 description 255
- 230000002093 peripheral effect Effects 0.000 description 180
- 238000001514 detection method Methods 0.000 description 166
- 238000012986 modification Methods 0.000 description 162
- 230000004048 modification Effects 0.000 description 162
- 229920005989 resin Polymers 0.000 description 119
- 239000011347 resin Substances 0.000 description 119
- 239000012528 membrane Substances 0.000 description 84
- 101710115003 50S ribosomal protein L31, chloroplastic Proteins 0.000 description 60
- 238000004519 manufacturing process Methods 0.000 description 60
- 239000010410 layer Substances 0.000 description 54
- 230000007423 decrease Effects 0.000 description 49
- 239000000463 material Substances 0.000 description 48
- 238000012545 processing Methods 0.000 description 47
- 101710087140 50S ribosomal protein L22, chloroplastic Proteins 0.000 description 46
- 238000000465 moulding Methods 0.000 description 46
- 230000004308 accommodation Effects 0.000 description 44
- 238000012360 testing method Methods 0.000 description 35
- 239000000470 constituent Substances 0.000 description 32
- 230000000694 effects Effects 0.000 description 32
- 238000003780 insertion Methods 0.000 description 28
- 230000037431 insertion Effects 0.000 description 28
- 230000010349 pulsation Effects 0.000 description 22
- 230000020169 heat generation Effects 0.000 description 21
- 238000000034 method Methods 0.000 description 21
- 239000003990 capacitor Substances 0.000 description 19
- 230000008859 change Effects 0.000 description 19
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 19
- 238000003825 pressing Methods 0.000 description 18
- 230000009467 reduction Effects 0.000 description 18
- 230000001105 regulatory effect Effects 0.000 description 16
- 230000008961 swelling Effects 0.000 description 16
- 238000004891 communication Methods 0.000 description 15
- 238000001746 injection moulding Methods 0.000 description 15
- 238000002485 combustion reaction Methods 0.000 description 13
- 230000001681 protective effect Effects 0.000 description 13
- 238000007789 sealing Methods 0.000 description 13
- 238000003466 welding Methods 0.000 description 11
- 101710118399 50S ribosomal protein L24, chloroplastic Proteins 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 230000006870 function Effects 0.000 description 9
- 239000007769 metal material Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000011241 protective layer Substances 0.000 description 9
- 239000004734 Polyphenylene sulfide Substances 0.000 description 8
- 229920001707 polybutylene terephthalate Polymers 0.000 description 8
- 229920000069 polyphenylene sulfide Polymers 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 101710142585 50S ribosomal protein 6, chloroplastic Proteins 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 7
- 238000004382 potting Methods 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- 101710156159 50S ribosomal protein L21, chloroplastic Proteins 0.000 description 6
- 238000005452 bending Methods 0.000 description 6
- 230000033228 biological regulation Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 239000003575 carbonaceous material Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 229920006332 epoxy adhesive Polymers 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 5
- 229920005992 thermoplastic resin Polymers 0.000 description 5
- 229910001369 Brass Inorganic materials 0.000 description 4
- 239000003522 acrylic cement Substances 0.000 description 4
- 239000010951 brass Substances 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 235000013372 meat Nutrition 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910021392 nanocarbon Inorganic materials 0.000 description 4
- -1 polybutylene terephthalate Polymers 0.000 description 4
- 239000003566 sealing material Substances 0.000 description 4
- 238000000638 solvent extraction Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 101710082414 50S ribosomal protein L12, chloroplastic Proteins 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 229910021389 graphene Inorganic materials 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000011859 microparticle Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000004441 surface measurement Methods 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000013528 artificial neural network Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010801 machine learning Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M35/00—Combustion-air cleaners, air intakes, intake silencers, or induction systems specially adapted for, or arranged on, internal-combustion engines
- F02M35/10—Air intakes; Induction systems
- F02M35/10373—Sensors for intake systems
- F02M35/10386—Sensors for intake systems for flow rate
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02D—CONTROLLING COMBUSTION ENGINES
- F02D41/00—Electrical control of supply of combustible mixture or its constituents
- F02D41/02—Circuit arrangements for generating control signals
- F02D41/18—Circuit arrangements for generating control signals by measuring intake air flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/18—Supports or connecting means for meters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02D—CONTROLLING COMBUSTION ENGINES
- F02D41/00—Electrical control of supply of combustible mixture or its constituents
- F02D41/02—Circuit arrangements for generating control signals
- F02D41/18—Circuit arrangements for generating control signals by measuring intake air flow
- F02D41/187—Circuit arrangements for generating control signals by measuring intake air flow using a hot wire flow sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/06—Indicating or recording devices
- G01F15/061—Indicating or recording devices for remote indication
- G01F15/063—Indicating or recording devices for remote indication using electrical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019072245A JP2020169930A (ja) | 2019-04-04 | 2019-04-04 | 物理量計測装置 |
| PCT/JP2020/006709 WO2020202872A1 (ja) | 2019-04-04 | 2020-02-20 | 物理量計測装置 |
| DE112020001703.6T DE112020001703T5 (de) | 2019-04-04 | 2020-02-20 | Messvorrichtung für physikalische grössen |
| US17/449,684 US11703368B2 (en) | 2019-04-04 | 2021-10-01 | Physical quantity measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019072245A JP2020169930A (ja) | 2019-04-04 | 2019-04-04 | 物理量計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2020169930A true JP2020169930A (ja) | 2020-10-15 |
| JP2020169930A5 JP2020169930A5 (enExample) | 2021-06-10 |
Family
ID=72668237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019072245A Pending JP2020169930A (ja) | 2019-04-04 | 2019-04-04 | 物理量計測装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11703368B2 (enExample) |
| JP (1) | JP2020169930A (enExample) |
| DE (1) | DE112020001703T5 (enExample) |
| WO (1) | WO2020202872A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3781431B1 (en) | 2018-04-20 | 2023-09-06 | CPS Technology Holdings LLC | System and method for battery selection |
| USD987685S1 (en) * | 2020-09-21 | 2023-05-30 | Econtrols, Llc | Manifold sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011252796A (ja) * | 2010-06-02 | 2011-12-15 | Denso Corp | 空気流量測定装置 |
| JP2015072239A (ja) * | 2013-10-04 | 2015-04-16 | 株式会社デンソー | 空気流量測定装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3709373B2 (ja) * | 2001-12-19 | 2005-10-26 | 株式会社日立製作所 | 流量計測装置 |
| JP5929721B2 (ja) | 2012-11-14 | 2016-06-08 | 株式会社デンソー | 流量センサ |
| JP6756297B2 (ja) * | 2017-04-13 | 2020-09-16 | 株式会社デンソー | 物理量計測装置 |
| JP6756296B2 (ja) * | 2017-04-13 | 2020-09-16 | 株式会社デンソー | 物理量計測装置 |
| JP6658660B2 (ja) * | 2017-04-13 | 2020-03-04 | 株式会社デンソー | 物理量計測装置 |
| JP2019023606A (ja) * | 2017-07-24 | 2019-02-14 | 株式会社デンソー | 物理量計測装置及び物理量計測装置の製造方法 |
| JP6901659B2 (ja) | 2017-10-17 | 2021-07-14 | 株式会社コナミデジタルエンタテインメント | ゲームシステム、ゲーム制御装置、及びプログラム |
| JP6950653B2 (ja) * | 2018-09-06 | 2021-10-13 | 株式会社デンソー | 物理量計測装置及び物理量計測装置の製造方法 |
| JP2020169929A (ja) * | 2019-04-04 | 2020-10-15 | 株式会社デンソー | 物理量計測装置 |
-
2019
- 2019-04-04 JP JP2019072245A patent/JP2020169930A/ja active Pending
-
2020
- 2020-02-20 WO PCT/JP2020/006709 patent/WO2020202872A1/ja not_active Ceased
- 2020-02-20 DE DE112020001703.6T patent/DE112020001703T5/de not_active Withdrawn
-
2021
- 2021-10-01 US US17/449,684 patent/US11703368B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011252796A (ja) * | 2010-06-02 | 2011-12-15 | Denso Corp | 空気流量測定装置 |
| JP2015072239A (ja) * | 2013-10-04 | 2015-04-16 | 株式会社デンソー | 空気流量測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20220026252A1 (en) | 2022-01-27 |
| US11703368B2 (en) | 2023-07-18 |
| WO2020202872A1 (ja) | 2020-10-08 |
| DE112020001703T5 (de) | 2021-12-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2019156041A1 (ja) | 物理量計測装置 | |
| US9217655B2 (en) | Sensor system for determining at least one flow property of a fluid medium flowing in a main flow direction | |
| US10371552B2 (en) | Physical quantity detection device | |
| US8733166B2 (en) | Air flow measuring device | |
| CN106662476A (zh) | 物理量检测装置 | |
| JP2023026686A (ja) | 物理量計測装置及び物理量計測装置の製造方法 | |
| CN108139246A (zh) | 物理量检测装置 | |
| CN104380056B (zh) | 热式流量计 | |
| WO2020202872A1 (ja) | 物理量計測装置 | |
| US9605986B2 (en) | Thermal flow meter including fixation wall and concave recess portion for storing end of supporting body | |
| WO2020202871A1 (ja) | 物理量計測装置 | |
| EP3358316A1 (en) | Physical quantity detection device | |
| WO2019156048A1 (ja) | 物理量計測装置 | |
| JP7122462B2 (ja) | 物理量検出装置 | |
| JP2020106427A (ja) | 物理量計測装置 | |
| US20220170771A1 (en) | Physical quantity measuring device | |
| JP2020106431A (ja) | 物理量計測装置 | |
| JP2020106430A (ja) | 物理量計測装置 | |
| JP2020106429A (ja) | 物理量計測装置 | |
| JP2020106428A (ja) | 物理量計測装置 | |
| JP6775629B2 (ja) | 物理量検出素子 | |
| JP2019207173A (ja) | 回路パッケージおよび流量測定装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210421 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210714 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220830 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230228 |