JP2020134216A - Inspection jig - Google Patents

Inspection jig Download PDF

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JP2020134216A
JP2020134216A JP2019025164A JP2019025164A JP2020134216A JP 2020134216 A JP2020134216 A JP 2020134216A JP 2019025164 A JP2019025164 A JP 2019025164A JP 2019025164 A JP2019025164 A JP 2019025164A JP 2020134216 A JP2020134216 A JP 2020134216A
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housing
contact
contact probe
accommodating
inspection jig
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久芳 笠原
Hisayoshi Kasahara
久芳 笠原
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SANKEI ENG KK
SANKEI ENGINEERING KK
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SANKEI ENG KK
SANKEI ENGINEERING KK
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Abstract

To provide an inspection jig capable of arranging a plurality of contact probes at a narrow pitch while securing insulation.SOLUTION: An inspection jig includes a housing H which houses a contact probe P, and a positioning member 1 which is arranged inside the housing H and positions a position of the contact probe P. The positioning member 1 has a plurality of storage sections 12 for storing the contact probes P, a partition D for insulating contact probes P from each other is provided between the plurality of storage sections 12.SELECTED DRAWING: Figure 1

Description

本発明は、コンタクトプローブを用いた検査を円滑に行うための検査治具に係るものである。 The present invention relates to an inspection jig for smoothly performing an inspection using a contact probe.

コンタクトプローブとは、主に、集積回路等の半導体部品や、プリント配線板等の電子基盤の電気的特性、その他電子機器・電子部品の検査に用いられる電子部品であり、バネ性や接触信頼性を確保するためのバネ構造体と、検査対象物と接触するプランジャと、を備えている。また、プランジャは、バネ構造体の両端部に設けられている。 A contact probe is an electronic component mainly used for inspecting semiconductor parts such as integrated circuits, electrical characteristics of electronic boards such as printed wiring boards, and other electronic devices and electronic parts, and has springiness and contact reliability. It is equipped with a spring structure to secure the equipment and a plunger that comes into contact with the inspection object. Further, plungers are provided at both ends of the spring structure.

このようなコンタクトプローブの発明として、例えば、特許文献1には、導電性およびバネ性を有する薄板によって一体成型されており、一端部を構成するとともに所定の第1被接触物に接触する第1接触部(プランジャ)と、他端部を構成するとともに所定の第2被接触物に接触する第2接触部(プランジャ)と、第1接触部と第2接触部とを繋ぐとともにコンタクトプローブの長手方向へコンタクトプローブを変形させるための変形部(バネ構造体)とを備えたコンタクトプローブが記載されている。変形部は、第1接触部に繋がる第1変形部と、第2接触部に繋がる第2変形部と、第1変形部と第2変形部との間に配置される第3変形部とを備え、第3変形部のバネ定数は、第1変形部のバネ定数および第2変形部のバネ定数よりも小さくなっている。
このような構成により、所定の接触圧で被接触物に接触させることが可能で、かつ、撓み量を所定量以上とすることが可能となる。
As an invention of such a contact probe, for example, in Patent Document 1, a first, which is integrally molded by a thin plate having conductivity and springiness, constitutes one end portion, and comes into contact with a predetermined first contact object. The length of the contact probe while connecting the contact portion (plunger), the second contact portion (plunger) that constitutes the other end portion and contacts a predetermined second contact object, the first contact portion and the second contact portion A contact probe provided with a deformed portion (spring structure) for deforming the contact probe in the direction is described. The deformed portion includes a first deformed portion connected to the first contact portion, a second deformed portion connected to the second contact portion, and a third deformed portion arranged between the first deformed portion and the second deformed portion. The spring constant of the third deformed portion is smaller than the spring constant of the first deformed portion and the spring constant of the second deformed portion.
With such a configuration, it is possible to bring the object into contact with a predetermined contact pressure, and the amount of deflection can be set to a predetermined amount or more.

特許第5103566号公報Japanese Patent No. 5103566

ところで、特許文献1には、薄板によって一体成型されたコンタクトプローブを複数配置し、検査に用いるための配置部材が記載されている。 By the way, Patent Document 1 describes an arrangement member for arranging a plurality of contact probes integrally molded by a thin plate and using them for inspection.

この配置部材に設けられている複数の配置孔は、端部に形成され、プランジャが収容される小径孔と、小径孔より大きい内径で形成され、バネ構造体が収容される大径孔と、から構成されている。 The plurality of arrangement holes provided in the arrangement member include a small diameter hole formed at the end and accommodating the plunger, a large diameter hole formed with an inner diameter larger than the small diameter hole and accommodating the spring structure, and the like. It is composed of.

ここで、配置孔をこのような構成とすると、例えばケルビン測定等狭いピッチでコンタクトプローブを配置して行う測定が困難となる。
即ち、大径孔が、バネ構造体の幅方向の長さよりも大きい直径を有する略丸孔状であるから、コンタクトプローブを、その厚さ方向に近接して配置することが困難となる。
Here, if the arrangement hole has such a configuration, it becomes difficult to perform measurement by arranging the contact probes at a narrow pitch such as Kelvin measurement.
That is, since the large-diameter hole has a substantially round hole shape having a diameter larger than the length in the width direction of the spring structure, it is difficult to arrange the contact probe close to the thickness direction thereof.

本発明は上記のような実状に鑑みてなされたものであり、絶縁性を確保しつつ、狭いピッチで複数のコンタクトプローブを配置することが可能な検査治具を提供することを課題とする。 The present invention has been made in view of the above-mentioned actual conditions, and an object of the present invention is to provide an inspection jig capable of arranging a plurality of contact probes at a narrow pitch while ensuring insulation.

上記課題を解決するために、本発明は、コンタクトプローブを収容する筺体と、前記筺体内部に配置されコンタクトプローブの位置を決定する位置決め部材と、を備え、
前記位置決め部材は、前記コンタクトプローブを収容する複数の収容部を有し、
前記複数の収容部の間には、前記コンタクトプローブ同士を絶縁する仕切が設けられていることを特徴とする。
In order to solve the above problems, the present invention includes a housing for accommodating the contact probe and a positioning member arranged inside the housing for determining the position of the contact probe.
The positioning member has a plurality of accommodating portions for accommodating the contact probe.
A partition for insulating the contact probes from each other is provided between the plurality of accommodating portions.

本発明によれば、位置決め部材にコンタクトプローブ同士を絶縁する仕切が設けられていることで、コンタクトプローブ間の絶縁性を確保しつつ、コンタクトプローブの位置決めを行うことが可能となる。 According to the present invention, since the positioning member is provided with a partition that insulates the contact probes from each other, it is possible to position the contact probes while ensuring the insulation between the contact probes.

本発明の好ましい形態では、前記複数の収容部は、直線状の溝であることを特徴とする。 In a preferred embodiment of the present invention, the plurality of accommodating portions are characterized by being linear grooves.

このような構成とすることで、位置決め部材に、より多くの収容部を形成することが可能となる。 With such a configuration, it is possible to form more accommodating portions in the positioning member.

本発明の好ましい形態では、前記複数の収容部は、異なる溝深さを有していることを特徴とする。 In a preferred embodiment of the present invention, the plurality of accommodating portions have different groove depths.

このような構成とすることで、検査対象に応じて、複数のコンタクトプローブの間隔を、収容部の深さ方向で調節することができ、検査時の汎用性が向上する。 With such a configuration, the distance between the plurality of contact probes can be adjusted in the depth direction of the accommodating portion according to the inspection target, and the versatility at the time of inspection is improved.

本発明の好ましい形態では、前記コンタクトプローブは、略平板状であることを特徴とする。 In a preferred embodiment of the present invention, the contact probe has a substantially flat plate shape.

このような構成とすることで、複数の収容部の幅を極力狭くすることができ、位置決め部材に、より多くの収容部を形成することが可能となる。 With such a configuration, the width of the plurality of accommodating portions can be narrowed as much as possible, and more accommodating portions can be formed in the positioning member.

本発明の好ましい形態では、前記仕切の厚さは、前記コンタクトプローブの幅よりも小さいことを特徴とする。 In a preferred embodiment of the present invention, the thickness of the partition is smaller than the width of the contact probe.

このような構成とすることで、複数のコンタクトプローブを、仕切の厚さ方向に極力近接して配置することが可能となる。 With such a configuration, it is possible to arrange a plurality of contact probes as close as possible in the thickness direction of the partition.

本発明の好ましい形態では、前記筺体は、前記コンタクトプローブの端部が挿通される位置決め孔を有していることを特徴とする。 In a preferred embodiment of the present invention, the housing is characterized by having a positioning hole through which an end portion of the contact probe is inserted.

このような構成とすることで、コンタクトプローブの破壊を抑制しつつ、コンタクトプローブの位置決めを正確に行うことができ、精度の高い検査を行うことが可能となる。 With such a configuration, it is possible to accurately position the contact probe while suppressing the destruction of the contact probe, and it is possible to perform highly accurate inspection.

本発明によれば、絶縁性を確保しつつ、狭いピッチでコンタクトプローブを配置することが可能な検査治具を提供することができる。 According to the present invention, it is possible to provide an inspection jig capable of arranging contact probes at a narrow pitch while ensuring insulation.

本発明の実施形態に係る位置決め部材を示す図であって、(ア)概略斜視図、(イ)上面図である。It is a figure which shows the positioning member which concerns on embodiment of this invention, is (a) schematic perspective view, (b) top view. 本発明の実施形態に係る筺体を示す図であって、(ア)概略斜視図、(イ)側面図である。It is a figure which shows the housing which concerns on embodiment of this invention, is (a) schematic perspective view, (b) side view. 本発明の実施形態に係る筺体の構成部品を示す図であって、(ア)第一筺体の上面図、(イ)第一筺体のXX´線断面図、(ウ)第二筺体の上面図、(エ)第二筺体のYY´線断面図である。It is a figure which shows the component part of the housing which concerns on embodiment of this invention, (a) top view of the first housing, (b) XX'line sectional view of the first housing, (c) top view of the second housing. , (D) YY'line sectional view of the second housing. 本発明の実施形態に係る検査治具の組み立て手順を説明する図である。It is a figure explaining the assembly procedure of the inspection jig which concerns on embodiment of this invention. 本発明の実施形態に係る検査治具を示す図であって、(ア)コンタクトプローブを組み込んだ際の概略斜視図、(イ)コンタクトプローブを組み込んだ際の側面図It is a figure which shows the inspection jig which concerns on embodiment of this invention, (a) the schematic perspective view when the contact probe is incorporated, (b) the side view when the contact probe is incorporated. 本発明の実施形態に係る位置決め部材を示す図であって、(ア)コンタクトプローブを組み込んだ際の上面図、(イ)(ア)部分拡大図である。It is a figure which shows the positioning member which concerns on embodiment of this invention, is (a) top view when the contact probe is incorporated, (b) (a) partially enlarged view.

以下、図面を用いて、本発明の実施形態に係る検査治具について説明する。
なお、以下に示す実施形態は本発明の一例であり、本発明を以下の実施形態に限定するものではない。また、これらの図において、符号1は、本実施形態に係る位置決め部材を示し、符号2は、本実施形態に係る検査治具を示す。
Hereinafter, the inspection jig according to the embodiment of the present invention will be described with reference to the drawings.
The embodiments shown below are examples of the present invention, and the present invention is not limited to the following embodiments. Further, in these figures, reference numeral 1 indicates a positioning member according to the present embodiment, and reference numeral 2 indicates an inspection jig according to the present embodiment.

図1に示すように、位置決め部材1は、絶縁材料により形成された略四角柱状の本体部11と、コンタクトプローブを収容する収容部12と、を備えている。位置決め部材1の材料としては、例えば樹脂が好適に用いられる。 As shown in FIG. 1, the positioning member 1 includes a substantially square columnar main body portion 11 formed of an insulating material, and a housing portion 12 for accommodating a contact probe. As the material of the positioning member 1, for example, resin is preferably used.

収容部12は、本体部11の一の長辺側側面に形成される直線状の溝であり、第一収容部12aと第二収容部12bとにより構成されている。
さらに詳述すれば、第一収容部12a及び第二収容部12bは、本体部11の一の長辺側側面の長辺方向と略平行となるよう、かつ長辺の全長に亘って形成されている。即ち、図1(イ)に示すように、第一収容部12a及び第二収容部12bは、本体部11の上面から底面に向かって貫通するように形成されている。また、第二収容部12bの溝深さは、第一収容部12aの溝深さよりも深く形成されている。そして、第一収容部12a及び第二収容部12bをこのように形成することで、第一収容部12aと第二収容部12bとの間に、薄板状の仕切Dが形成されている。
なお、収容部12の数は、本実施形態に示す2つに限られず、幾つであっても良いし、使用するコンタクトプローブに合わせて、溝深さや幅等任意に変更可能である。また、複数の収容部12を、本体部11の異なる側面から形成しても良い。
The accommodating portion 12 is a linear groove formed on one long side side surface of the main body portion 11, and is composed of a first accommodating portion 12a and a second accommodating portion 12b.
More specifically, the first accommodating portion 12a and the second accommodating portion 12b are formed so as to be substantially parallel to the long side direction of one long side side surface of the main body portion 11 and over the entire length of the long side. ing. That is, as shown in FIG. 1 (a), the first accommodating portion 12a and the second accommodating portion 12b are formed so as to penetrate from the upper surface to the bottom surface of the main body portion 11. Further, the groove depth of the second accommodating portion 12b is formed deeper than the groove depth of the first accommodating portion 12a. By forming the first accommodating portion 12a and the second accommodating portion 12b in this way, a thin plate-shaped partition D is formed between the first accommodating portion 12a and the second accommodating portion 12b.
The number of accommodating portions 12 is not limited to the two shown in the present embodiment, and may be any number, and the groove depth, width, and the like can be arbitrarily changed according to the contact probe to be used. Further, the plurality of accommodating portions 12 may be formed from different side surfaces of the main body portion 11.

図2に示すように、筺体Hは、略長方形板状の第一筺体H1と、略直方体状の第二筺体H2と、を有しており、第一筺体H1の端部に第二筺体H2が連結されることで、図2(イ)に示すように、全体として側面視で略L字状を成している。
なお、筺体Hの内部に収容される位置決め部材1は、点線で示している。
As shown in FIG. 2, the housing H has a substantially rectangular plate-shaped first housing H1 and a substantially rectangular parallelepiped second housing H2, and the second housing H2 is located at an end of the first housing H1. As shown in FIG. 2 (a), they form a substantially L-shape as a whole in a side view.
The positioning member 1 housed inside the housing H is shown by a dotted line.

図3(ア)及び(イ)に示すように、第一筺体H1には、厚さ方向に貫通する、2つの略丸孔状の位置決め孔r1が設けられている。
また、厚さ方向に貫通し、第二筺体H2と連結する連結具B(図4参照)を挿通するための一対の連結孔c1が、短辺方向に間隔を置いて設けられている。
さらに、厚さ方向に貫通し、検査対象(図示せず)に取付ける取付具(図示せず)を挿通するための略小判型の取付孔aが、長辺方向に間隔を置いて2つ設けられている。
As shown in FIGS. 3A and 3B, the first housing H1 is provided with two substantially round hole-shaped positioning holes r1 penetrating in the thickness direction.
Further, a pair of connecting holes c1 for inserting a connecting tool B (see FIG. 4) that penetrates in the thickness direction and connects to the second housing H2 are provided at intervals in the short side direction.
Further, two substantially oval-shaped mounting holes a for inserting a mounting tool (not shown) that penetrates in the thickness direction and is mounted on the inspection target (not shown) are provided at intervals in the long side direction. Has been done.

図3(ウ)及び(エ)に示すように、第二筺体H2には、その内部に位置決め部材1を載置する、略H字状にくり抜かれた載置部hが設けられ、載置部hの底面から第二筺体H2の底面に向かって貫通する、2つの略丸孔状の位置決め孔r2が設けられている。
また、高さ方向に貫通し、第一筺体H1と連結する連結具B(図4参照)を挿通するための一対の連結孔c2が、長辺方向に間隔を置いて設けられている
なお、載置部hの幅方向の長さは、位置決め部材1の幅方向の長さと略同一に形成されている。
As shown in FIGS. 3 (c) and 3 (d), the second housing H2 is provided with a mounting portion h hollowed out in a substantially H shape on which the positioning member 1 is mounted. Two substantially round hole-shaped positioning holes r2 are provided so as to penetrate from the bottom surface of the portion h toward the bottom surface of the second housing H2.
Further, a pair of connecting holes c2 for inserting a connecting tool B (see FIG. 4) that penetrates in the height direction and connects to the first housing H1 are provided at intervals in the long side direction. The length of the mounting portion h in the width direction is formed to be substantially the same as the length of the positioning member 1 in the width direction.

検査治具2を構成する位置決め部材1及び筺体Hは、図2に示す状態とすることで、各部材が有する連結孔c1及びc2のそれぞれの中心軸が一致し、また、位置決め孔r1及びr2のそれぞれの中心軸と収容部12のそれぞれの深さ方向端部とが一致するように構成されている。 When the positioning member 1 and the housing H constituting the inspection jig 2 are in the state shown in FIG. 2, the central axes of the connecting holes c1 and c2 of each member are aligned, and the positioning holes r1 and r2 are aligned. The central axis of each of the housing portions 12 and the end portions of the accommodating portions 12 in the depth direction are configured to coincide with each other.

検査治具2を用いて検査を実施する際、使用者は、まず、2つの略平板状のコンタクトプローブPを第一収容部12a及び第二収容部12bに個別に収容し、第一収容部12a及び第二収容部12bの深さ方向端部まで位置させる。(図4の矢印p1)。 When performing an inspection using the inspection jig 2, the user first individually accommodates the two substantially flat contact probes P in the first accommodating portion 12a and the second accommodating portion 12b, and then accommodates the first accommodating portion 12a. It is positioned up to the depth direction end of 12a and the second accommodating portion 12b. (Arrow p1 in FIG. 4).

次に、使用者は、コンタクトプローブPが収容された位置決め部材1を、位置決め部材1の幅方向と載置部hの幅方向とが略平行となるように、載置部hに載置する(図4の矢印p2)。こうすることで、コンタクトプローブPの一端が、位置決め孔r2に挿通される。 Next, the user places the positioning member 1 in which the contact probe P is housed on the mounting portion h so that the width direction of the positioning member 1 and the width direction of the mounting portion h are substantially parallel to each other. (Arrow p2 in FIG. 4). By doing so, one end of the contact probe P is inserted into the positioning hole r2.

次に、使用者は、第一筺体H1を、その短辺側端面が第二筺体H2の長辺側側面と一致するように、第二筺体H2の上方から被せる(図4の矢印p3)。こうすることで、コンタクトプローブPの他端が、位置決め孔r1に挿通される。 Next, the user covers the first housing H1 from above the second housing H2 so that the short side end surface thereof coincides with the long side side surface of the second housing H2 (arrow p3 in FIG. 4). By doing so, the other end of the contact probe P is inserted into the positioning hole r1.

最後に、使用者は、連結孔c1及びc2に、適宜ボルト等の連結具Bを挿通させ、第一筺体H1及び第二筺体H2を連結させる(図4の矢印p4)。 Finally, the user inserts a connecting tool B such as a bolt into the connecting holes c1 and c2 as appropriate to connect the first housing H1 and the second housing H2 (arrow p4 in FIG. 4).

こうすることで、図5に示すように、各コンタクトプローブPが検査治具2の内部に組み込まれる。また、各コンタクトプローブPの両端が、位置決め孔r1及びr2から突出した状態となる。 By doing so, as shown in FIG. 5, each contact probe P is incorporated inside the inspection jig 2. Further, both ends of each contact probe P are in a state of protruding from the positioning holes r1 and r2.

そして、使用者は、各コンタクトプローブPの一端を、抵抗値の解析等を行う電子機器に接続される、導電可能な素材で形成された基台(図示せず)等に接触させ、他端を検査対象に接触させることで、測定を行う。 Then, the user brings one end of each contact probe P into contact with a base (not shown) or the like made of a conductive material connected to an electronic device for analyzing the resistance value or the like, and the other end. Is brought into contact with the inspection target to perform measurement.

図6に示すように、各コンタクトプローブPは、その幅方向が、第一収容部12a及び第二収容部12bの深さ方向と略平行となるように、第一収容部12a及び第二収容部12bに収容されている。 As shown in FIG. 6, each contact probe P has a first accommodating portion 12a and a second accommodating portion 12a so that the width direction thereof is substantially parallel to the depth direction of the first accommodating portion 12a and the second accommodating portion 12b. It is housed in part 12b.

また、図6(イ)に示すように、仕切Dの厚さtは、各コンタクトプローブPの幅wよりも小さく形成されている。 Further, as shown in FIG. 6A, the thickness t of the partition D is formed to be smaller than the width w of each contact probe P.

なお、本実施形態において、第一収容部12aの溝深さは1.85mm、第二収容部12bの溝深さは2.65mm、第一収容部12a及び第二収容部12bの幅は0.3mm、に設計されている。 In the present embodiment, the groove depth of the first accommodating portion 12a is 1.85 mm, the groove depth of the second accommodating portion 12b is 2.65 mm, and the widths of the first accommodating portion 12a and the second accommodating portion 12b are 0. It is designed to be .3 mm.

本実施形態によれば、位置決め部材1が有する第一収容部12aと第二収容部12bとの間に、コンタクトプローブP同士を絶縁する仕切Dが設けられていることで、コンタクトプローブP間の絶縁性を確保しつつ、コンタクトプローブPの位置決めを行うことが可能となる。 According to the present embodiment, a partition D for insulating the contact probes P from each other is provided between the first accommodating portion 12a and the second accommodating portion 12b of the positioning member 1, so that the contact probes P are separated from each other. It is possible to position the contact probe P while ensuring the insulating property.

また、第一収容部12a及び第二収容部12bが直線状の溝であることで、位置決め部材1に、第三収容部等より多くの収容部を、さらに形成することが可能となる。 Further, since the first accommodating portion 12a and the second accommodating portion 12b are linear grooves, it is possible to further form more accommodating portions in the positioning member 1 than the third accommodating portion and the like.

また、第一収容部12a及び第二収容部12bが異なる溝深さを有していることで、検査対象に応じて、コンタクトプローブPの間隔を、収容部12の深さ方向で調節することができ、検査時の汎用性が向上する。 Further, since the first accommodating portion 12a and the second accommodating portion 12b have different groove depths, the distance between the contact probes P can be adjusted in the depth direction of the accommodating portion 12 according to the inspection target. This improves versatility during inspection.

また、コンタクトプローブPが略平板状であることで、第一収容部12a及び第二収容部12bの幅を極力狭くすることができ、位置決め部材1に、より多くの収容部を形成することが可能となる。 Further, since the contact probe P has a substantially flat plate shape, the widths of the first accommodating portion 12a and the second accommodating portion 12b can be narrowed as much as possible, and more accommodating portions can be formed in the positioning member 1. It will be possible.

また、仕切Dの厚さtがコンタクトプローブPの幅wよりも小さいことで、複数のコンタクトプローブPを、仕切Dの厚さt方向に極力近接して配置することが可能となる。 Further, since the thickness t of the partition D is smaller than the width w of the contact probe P, it is possible to arrange the plurality of contact probes P as close as possible in the thickness t direction of the partition D.

また、筺体HがコンタクトプローブPの端部が挿通される位置決め孔r1、r2を有していることで、コンタクトプローブPの破壊を抑制しつつ、コンタクトプローブPの位置決めを正確に行うことができ、精度の高い検査を行うことが可能となる。 Further, since the housing H has the positioning holes r1 and r2 through which the end portion of the contact probe P is inserted, the contact probe P can be accurately positioned while suppressing the destruction of the contact probe P. , It is possible to perform highly accurate inspection.

なお、前記実施形態において示した各構成部材の諸形状や寸法等は一例であって、設計要求等に基づき種々変更可能である。 The various shapes, dimensions, and the like of each component shown in the above embodiment are examples, and can be variously changed based on design requirements and the like.

1 位置決め部材
11 本体部
12 収容部
12a 第一収容部
12b 第二収容部
D 仕切
2 検査治具
H 筺体
H1 第一筺体
a 取付孔
H2 第二筺体
h 載置部
r1、r2 位置決め孔
c1、c2 連結孔
B 連結具
1 Positioning member 11 Main body 12 Accommodating portion 12a First accommodating portion 12b Second accommodating portion D Partition 2 Inspection jig H housing H1 First housing a Mounting hole H2 Second housing h Mounting parts r1, r2 Positioning holes c1, c2 Connecting hole B Connecting tool

Claims (6)

コンタクトプローブを収容する筺体と、前記筺体内部に配置されるコンタクトプローブの位置を決定する位置決め部材と、を備え、
前記位置決め部材は、前記コンタクトプローブを収容する複数の収容部を有し、
前記複数の収容部の間には、前記コンタクトプローブ同士を絶縁する仕切が設けられていることを特徴とする検査治具。
A housing for accommodating the contact probe and a positioning member for determining the position of the contact probe arranged inside the housing are provided.
The positioning member has a plurality of accommodating portions for accommodating the contact probe.
An inspection jig characterized in that a partition for insulating the contact probes from each other is provided between the plurality of accommodating portions.
前記複数の収容部は、直線状の溝であることを特徴とする、請求項1に記載の検査治具。 The inspection jig according to claim 1, wherein the plurality of accommodating portions are linear grooves. 前記複数の収容部は、異なる溝深さを有していることを特徴とする、請求項2に記載の検査治具。 The inspection jig according to claim 2, wherein the plurality of accommodating portions have different groove depths. 前記コンタクトプローブは、略平板状であることを特徴とする、請求項1〜3の何れかに記載の検査治具。 The inspection jig according to any one of claims 1 to 3, wherein the contact probe has a substantially flat plate shape. 前記仕切の厚さは、前記コンタクトプローブの幅よりも小さいことを特徴とする、請求項4に記載の検査治具。 The inspection jig according to claim 4, wherein the thickness of the partition is smaller than the width of the contact probe. 前記筺体は、前記コンタクトプローブの端部が挿通される位置決め孔を有していることを特徴とする、請求項5に記載の検査治具。
The inspection jig according to claim 5, wherein the housing has a positioning hole through which an end portion of the contact probe is inserted.
JP2019025164A 2019-02-15 2019-02-15 Inspection jig Pending JP2020134216A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115737127A (en) * 2022-11-30 2023-03-07 北京铸正机器人有限公司 Detection device and detection method for positioning accuracy of tail end of surgical robot

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168062A (en) * 1984-02-10 1985-08-31 Yokowo Mfg Co Ltd Pattern inspecting pin block of integrated circuit
JPH085662A (en) * 1994-06-16 1996-01-12 Seiken:Kk Inspection probe
JPH09304435A (en) * 1996-05-10 1997-11-28 Nippon Denshi Zairyo Kk Vertical type probe card
JP2001324515A (en) * 2000-05-17 2001-11-22 Suncall Corp Contact probe device for inspecting electronic part
JP2003035722A (en) * 2001-07-18 2003-02-07 Nhk Spring Co Ltd Holder structure of conductive contact
JP2004085261A (en) * 2002-08-23 2004-03-18 Tokyo Electron Ltd Probe pin and contactor
KR200396613Y1 (en) * 2005-06-30 2005-09-27 송광석 Probe card and probe pin socket assembly probe card
WO2006003722A1 (en) * 2004-07-05 2006-01-12 Kabushiki Kaisha Nihon Micronics Contact block and electrical connection device
KR20060100695A (en) * 2005-03-17 2006-09-21 송광석 Probe card for multi-chip test
KR100696416B1 (en) * 2006-11-20 2007-03-19 주식회사 리뷰텍 Probe assembly for testing flat display panel
KR20080005592U (en) * 2007-05-18 2008-11-21 주식회사 아이엠 Probe Unit
US20110031991A1 (en) * 2007-08-21 2011-02-10 Gigalane Co. Ltd. Probe block
JP2011191187A (en) * 2010-03-15 2011-09-29 Nhk Spring Co Ltd Contact probe and probe unit
JP2013130400A (en) * 2011-12-20 2013-07-04 Micronics Japan Co Ltd Probe assembly, probe card including the same and manufacturing method thereof
KR20160142644A (en) * 2015-06-03 2016-12-13 (주)에이피텍 Test pin and test apparatus having the same
JP2018529951A (en) * 2015-09-10 2018-10-11 リーノ インダストリアル インコーポレイテッド Probe socket

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60168062A (en) * 1984-02-10 1985-08-31 Yokowo Mfg Co Ltd Pattern inspecting pin block of integrated circuit
JPH085662A (en) * 1994-06-16 1996-01-12 Seiken:Kk Inspection probe
JPH09304435A (en) * 1996-05-10 1997-11-28 Nippon Denshi Zairyo Kk Vertical type probe card
JP2001324515A (en) * 2000-05-17 2001-11-22 Suncall Corp Contact probe device for inspecting electronic part
JP2003035722A (en) * 2001-07-18 2003-02-07 Nhk Spring Co Ltd Holder structure of conductive contact
JP2004085261A (en) * 2002-08-23 2004-03-18 Tokyo Electron Ltd Probe pin and contactor
WO2006003722A1 (en) * 2004-07-05 2006-01-12 Kabushiki Kaisha Nihon Micronics Contact block and electrical connection device
KR20060100695A (en) * 2005-03-17 2006-09-21 송광석 Probe card for multi-chip test
KR200396613Y1 (en) * 2005-06-30 2005-09-27 송광석 Probe card and probe pin socket assembly probe card
KR100696416B1 (en) * 2006-11-20 2007-03-19 주식회사 리뷰텍 Probe assembly for testing flat display panel
KR20080005592U (en) * 2007-05-18 2008-11-21 주식회사 아이엠 Probe Unit
US20110031991A1 (en) * 2007-08-21 2011-02-10 Gigalane Co. Ltd. Probe block
JP2011191187A (en) * 2010-03-15 2011-09-29 Nhk Spring Co Ltd Contact probe and probe unit
JP2013130400A (en) * 2011-12-20 2013-07-04 Micronics Japan Co Ltd Probe assembly, probe card including the same and manufacturing method thereof
KR20160142644A (en) * 2015-06-03 2016-12-13 (주)에이피텍 Test pin and test apparatus having the same
JP2018529951A (en) * 2015-09-10 2018-10-11 リーノ インダストリアル インコーポレイテッド Probe socket

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115737127A (en) * 2022-11-30 2023-03-07 北京铸正机器人有限公司 Detection device and detection method for positioning accuracy of tail end of surgical robot

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