JPS60168062A - Pattern inspecting pin block of integrated circuit - Google Patents

Pattern inspecting pin block of integrated circuit

Info

Publication number
JPS60168062A
JPS60168062A JP2552484A JP2552484A JPS60168062A JP S60168062 A JPS60168062 A JP S60168062A JP 2552484 A JP2552484 A JP 2552484A JP 2552484 A JP2552484 A JP 2552484A JP S60168062 A JPS60168062 A JP S60168062A
Authority
JP
Japan
Prior art keywords
housing
holder
hole
contact
fit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2552484A
Other languages
Japanese (ja)
Inventor
Ko Nakajima
中島 鋼
Akira Watanabe
昭 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
Original Assignee
Yokowo Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokowo Mfg Co Ltd filed Critical Yokowo Mfg Co Ltd
Priority to JP2552484A priority Critical patent/JPS60168062A/en
Publication of JPS60168062A publication Critical patent/JPS60168062A/en
Pending legal-status Critical Current

Links

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  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE:To inspect a high density IC by forming many grooves on a housing or a holder, and constituting a fit-inserting hole of a contact probe. CONSTITUTION:On the long side outside surface of a plane rectangular housing 1, many grooves 1a are formed in parallel at a prescribed pitch extending over the whole in the thickness direction, the housing 1 is fitted into the fitting holes 2a of a holder 2, the housing 1 and the holder 2 are fixed by supporting flanges 1b provided on both end parts of the housing 1 by stepped parts 2b provided on both end parts of the fitting hole 2a of the holder 2, and clamping them with screws 3, and a fit-inserting hole 4 is formed by the long side outside surface of the housing 1 and a flat long side pripheral surface of the fitting holes 2a of the holder 2 to which said surface contacts by pressing. Also, a contact probe is fit- inserted and fixed into the fit-inserting hole 4.

Description

【発明の詳細な説明】 【産業上の利用分野] 本発明は1拍回路(以+I Cどいつ)のバタン検査用
ピンブ[1ツクに関りるbのである。 【従来技術1 一般に、ベアボード、実装基板などの検査はICに対応
しlこデストポイン]−に二1ンタク1〜プ1」−ブを
接触させて行っているが、従来はピンボードにこれを厚
さ方向に貫通覆る多数の1■挿孔を穿設し、これらの嵌
挿孔に二1ンタクトー1目−ブを嵌挿していIこ。 イ
して、前記ビンボードは8〜201!1m程度の厚さの
合成樹flftで構成されているので、コンタク1−プ
[」−ブの嵌挿孔の加■←よ孔径が11ngl程爪ま(
シか高fI′iJE[に直線状にあGJられず、より小
径の孔加土を行うと嵌挿孔に曲がりなどが生じ−Cしよ
う。一方、ICは近年高密度化が進み、これに対応した
」ンタクトブローブは外径0.411111未満どなり
嵌挿孔のピッチも0.8〜0.32…mが要求されるよ
〕になっている。したがって、前述のような孔加−[で
は必要なりi度の嵌挿孔を形成できないといつ間11f
jが生じるようになっている。 (発明の目的) 本発明は、前)ボした問題をW決して、LSIなどを含
む、t′!I密度化したICの検査ができるように、+
mm’木満の小外径のコンタクドブC1−ブの嵌挿孔が
0.8mm未満のピッチでも高精を良に得られるICの
パターン検り用ビンブUツクを提供することを目的とし
でいる。 【発明の4115成】 この目的を達成するために、本発明によるICのパター
ン検査用ビンブ1」ツクは、ハウジングの外周面とハウ
ジングかに合固定されるホルダの内周面の少くども一方
に多数の渦を形成し、これらのiMと、溝を形成した面
が当接乃る平坦な面とぐ、」ンタク]〜ゾ11−1の1
■挿孔を構成したものである。 【実施例] 以下、本発明の実施例につき図面を参照しl説明づる。 第1図乃至第3図は本発明の一実施例を承り、。 本実施例は、平面長方形のハウジング1の長辺外面に多
数の溝1aを厚さ方向の仝休にわたって所定ピッチで平
行に形成し、前記ハウジング1をホルダ2の嵌合孔2a
に嵌合さけ、ハウジング1の両端部に、1lll iノ
だフランジ11)をボルダ2の嵌合孔2a両端部に設【
ノだ段部2【)に支持してビス3で締(jG)ることに
より、ハウジング1どボルダ2を固定し、ハウジング1
の長辺外面とこれらの面が当接りるボルダ2の1■合孔
2aの平坦な長辺周面どrllX仲孔4が形成されてい
る。また、嵌挿孔4に:コンタクドブ11−ブ5を弓形
に曲げて仲通し、コンタク1〜プ11 ブ5をこれらの
弾性復元ツノ4゛ハウジング1どホルダ2に保持固定し
、これらの上面に]ンタク1〜f ll−75の鍔5a
を当接させてコンタクトプロブ5を’hlt Ti向に
位置決めしたしのCある。さらにJス上のようにして構
成した複数のピンブロックにを既製のピンボード本体7
の複数の嵌合孔にそれCれ嵌合させ、ホルダ2の両端部
に設けたフランジ2(]をピンボー下本体7上に支持さ
せ、フランジ20に段番ノた位置決め孔2dに挿通した
ビス8でビンボ ド本体7に締付tノで固定したちのぐ
ある。 第4図乃至第7図は本発明の他の実施例を示づ。 本実M!1例は、ハウジング9をその上部9aが下部9
1)J、りも幅が狭く長さが長く形成し、ハウジング9
のF部91)長辺外面に多数の溝90を前述した実施例
の崩ど同様に形成し、ハウジング9をピンボード本体を
A1こねたホルダ10の1■合孔10aに嵌合させ、ホ
ルダ10上にハウジング9の上部98両端部を支持(、
・(ヒス19で締イリ(]固定し、ハウジング9の長辺
外面とこれらの而が当接するホルダ1oの嵌合孔1゜a
の甲Illなト二辺周面と(” IIX沖孔11が形成
しくある。 また、1■仲孔11に前述しlこ実施例と同様に二lン
タク1〜ブ1−1−112を1.Ti通しく保持固定し
たしの(゛ある。 第ε3図は本発明のさらに他の実施例を小り。本実施例
は複数のハウジング13.14.15を41し、これら
の外周面の対向辺にそれぞ′れ前述した両実施191ど
同様にR41:La 、 14a 、 1!ja @形
成し、ハウジング13.14.15を所要の組合I!(
・ひいに密接さけてホルダ16の1■白孔16aに1■
合させ、このホルダ16にハウジング13.14. l
bをそれぞれ固定さt!にものである。−でしく、本実
施例では、ハウジング13、1!iの)jへ13a 、
 15aを形成した面とこれらの面が当接りるボルダ1
6の嵌合孔16aの甲111周面とで1+X挿孔17を
形成するとJLに、ハウジング14の満143を形成し
た面とこれらの而が当接Mるハウジング13.1!iの
平坦な面(゛シl■挿几18を形成したもので、前記1
(lTi7t17. iocは前述しl(両実施例のb
のと同様に」ンタクトブ[]−ブ(m8図には図示せず
)を嵌挿固定したしのである。なお、本実施例に+Ij
い(ハウジング13.14.1!iは適宜の形状のMJ
数の1)のを適1°1」1合Uてホルダ16の1つの嵌
合/1.I[iaに1代合してホルダ16に固定cさ、
ホルダ16IJピンボード本体を〕1ξねたもので・も
、別体のピンボード本体に固定づるbのでもよい。 Jス土のJ、うに構成した第8図に承り実施例のもの1
.L、複数のハウジングを組合せて嵌合固定した0月−
゛、検査りるICのパターンに応じ1.::−’lンタ
クトノ゛「1−ブの配列を容易に形成でき、1つのノロ
ツク内に多数の1−81のパターンに応じた」ンタタ1
−プローブの配列を形成できる。 木北門において、」ンタクトプ[1−ブの嵌挿孔4形成
jJるl、二めのf%Sは、第9図(ii) 、 (1
)) J5よび(0) l、:小すクシ!形)門、()
宇形痛おJ、びh角形溝なと、コンタクトグローブの円
形外周面を保持し易い形状であれば適宜の…1而形状に
′Cさる。まlこ、本発明に・1jいて、嵌挿孔を形成
りるための溝をハウジング側に一設りるのが加工上はイ
j利であるが、ホルダの内周面に1%> @設iJ T
もよく、ハウジングどボルダの両方に相り位置をり゛ら
してii4を設LJ ’UもJ、い。 さらに、本発明におい−(,1■挿孔へ嵌111i 1
.た二1ンタクl−ゾ1」−ブの保持は必ずしも実施例
の手段に限られることなく適宜変更更−゛さ、ハウジン
グ、ホルダの月質もアクリル系樹脂、ガラス繊維を入れ
た1ボキシ系樹脂など適宜のbのを用い11する。 【発明の効果1 以」二説明したように、本発明は、ハウジングと、ハウ
ジングが1代合固定されるホルダの少くとし−りに多数
の渦を形成し、これらの猫と、溝を形成した面が当接す
る平坦な面とで構成しt、:W挿孔にニー1ンタクl−
11,11をILI中するJ、−)に1ノ!、ので、小
径の孔をピンボードに穿つのに比べて、ハウジングやホ
ルダにti4加I ’ti: fjうノ“ノが幅a3J
、びピップを高粘度にCさ、直線性もJ、くhるので、
l!X Fn孔径J3よびこれらのピップが小さいもの
、例えば1mm未満の小外径のコンタクドブ1」−ゾの
1■挿孔を0.8mm未満のビッヂのものぐも、容易に
得ることがでさ畠密度化した各種のICパターンに合U
たブ1コック化により、嵌挿孔の加工が容易にでさると
いう効果が14られる。 4.1閃而のO1j中<j説明 41′1図は本発明の一実施例によるビンブ[1ツク4
小す)11而図、第2図(,1第1図の縦断説明図、第
33図は第1図のピンブロックをピンボード本体にl1
ll!rJ iJ /、:斜視図、第4図は本発明の他
の実施例に、1、るハウジングを示づ甲面図、第55図
は第4図の側面図、第6図4.L第4図のハウジングの
取イリ状態6小リ一部をffli面した部分側面図、第
7図は第6図の△−A線部分断面図、第8図は本発明の
ざら(・−他の実施例1Jよるハウジングを示づ部分平
面図、;yl g図(,1) 、 (1)) 、 (す
)(五本発明の互いに異る溝の形状6小り拡大横断面図
である。 1・・・ハウジング、1a・・・tLll)・・・フラ
ンジ、2・・・ホルダ、2a・・・嵌合孔、21)・・
・段部、2に・・・フランジ、2d・・・位置決め孔、
3・・・ビス、4・・・1■挿孔、5・・・コンタクド
ブ1]−ブ、5a・・・鍔、G・・・ピンブロック、7
・・・ピンボード本体、8・・・ビス、9・・・ハウジ
ング、Oa・・・土部、9b・・・土部、9c・・・渦
、10・・・ホルダ、10a・・・嵌合孔、11・・・
1■挿孔、12・・・コンタクトプローブ、+ 3 、
14 、1 ト・・ハウジング、13a 、 14a、
15a・・・溝、1 G−・・ホルダ、16a−16:
合孔、17.18−HX仲几、1τ)・・・ビス。 特3′[出願人 株式会社横尾製作所 代理人 弁III −1−小 橋 悟 浮量 弁 1甲
 に +4 月 進 上トら回 、70 :yr=66つ ナワCD −h ′)Fの (の (に)(C)
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pin test pin for a one-beat circuit (hereinafter referred to as an IC). [Prior art 1] In general, inspection of bare boards, mounted boards, etc. is carried out by contacting the terminals 1 to 1'' to the IC dest points. A large number of holes are drilled in the thickness direction, and the first contact hole is inserted into these holes. Since the bin board is made of synthetic wood flft with a thickness of about 8 to 201!1 m, the hole diameter for the contact hole is about 11 ngl. (
If the hole is not placed in a straight line with the height fI'iJE and the hole is made with a smaller diameter, the insertion hole will be bent. On the other hand, the density of ICs has increased in recent years, and in response to this trend, contact probes are required to have an outer diameter of less than 0.411111 mm and a pitch of insertion holes of 0.8 to 0.32 m. There is. Therefore, if it is not possible to form the insertion hole of degree i, which is necessary for hole drilling as described above,
j is made to occur. (Objective of the Invention) The present invention solves the above-mentioned problem and solves the problem mentioned above. To enable inspection of high-density ICs, +
The object of the present invention is to provide a bib U-tsuku for IC pattern inspection, which can obtain high accuracy even with a pitch of less than 0.8 mm in which the small outer diameter contact dove C1-b is inserted into the hole. . [4115] In order to achieve this object, the IC pattern inspection bin 1'' according to the present invention is provided with at least one of the outer circumferential surface of the housing and the inner circumferential surface of the holder which is fixed to the outer circumferential surface of the housing. A large number of vortices are formed, and these iM and the surface on which the grooves are formed contact a flat surface.
■It has an insertion hole. [Embodiments] Hereinafter, embodiments of the present invention will be explained with reference to the drawings. 1 to 3 show an embodiment of the present invention. In this embodiment, a large number of grooves 1a are formed parallel to each other at a predetermined pitch over a distance in the thickness direction on the outer surface of the longer side of a housing 1 having a rectangular planar shape.
1lllli-shaped flanges 11) are installed at both ends of the housing 1 at both ends of the fitting hole 2a of the boulder 2.
The housing 1 and the boulder 2 are fixed by supporting it on the stepped part 2 [) and tightening it with the screw 3 (jG).
A hole 4 is formed on the outer surface of the long side of the boulder 2 and the flat long side peripheral surface of the mating hole 2a of the boulder 2 where these surfaces come into contact. In addition, the contact holes 11 to 5 are bent into an arched shape and inserted into the insertion hole 4, and the elastic recovery horns 4 of the contacts 1 to 11 are held and fixed to the housing 1 and holder 2, and the upper surfaces of these are held and fixed. ] Ntaku 1-f ll-75 Tsuba 5a
The contact probe 5 is positioned in the 'hlt Ti direction by abutting the contact probe 5. Furthermore, a ready-made pinboard main body 7 is attached to the plurality of pin blocks configured as above.
The flanges 2 () provided at both ends of the holder 2 are supported on the pin bow lower body 7, and the screws inserted into the step numbered positioning holes 2d in the flange 20 are fitted into the plurality of fitting holes. At 8, the housing 9 is fixed to the bottle body 7 by tightening T. Figures 4 to 7 show other embodiments of the present invention. The upper part 9a is the lower part 9
1) J, the width of the rim is narrow and the length is long, and the housing 9
F part 91) A large number of grooves 90 are formed on the outer surface of the long side in the same manner as in the embodiment described above, and the housing 9 is fitted into the 1. Support both ends of the upper part 98 of the housing 9 on the
・(Tighten with the hiss 19 ()), and fit the fitting hole 1°a of the holder 1o where these parts come into contact with the long side outer surface of the housing 9.
The two sides of the outer circumferential surface and the outer hole 11 of IIX are formed. In addition, the two holes 1 to 1-1-112 are attached to the middle hole 11 in the same way as in the above embodiment. 1. Ti is passed through and held and fixed. R41:La, 14a, 1!ja @ are formed on the opposite sides of the housings 13, 14, 15 in the same manner as in both embodiments 191 described above, and the required combination I!(
・Avoid closely and insert 1 in the holder 16 and 1 in the white hole 16a.
and attach the housings 13, 14, to this holder 16. l
Fix b and t! It's something. -In this embodiment, the housing 13,1! 13a to j) of i,
15a and the boulder 1 where these surfaces come into contact
When the 1 + The flat surface of i (on which the insert 18 is formed)
(lTi7t17. ioc is described above (b in both embodiments)
In the same way as above, a contact tab (not shown in Figure M8) was inserted and fixed. In this example, +Ij
(Housing 13.14.1!i is MJ of appropriate shape.
Apply number 1) to 1 degree 1" 1 fitting of holder 16/1. I[ia and fixed to the holder 16,
The holder 16IJ may be attached to the pinboard body by 1ξ, or it may be fixed to a separate pinboard body. Example 1 according to Fig. 8, which is composed of J, sea urchin
.. L, October - when multiple housings are combined and fixed together
1. Depending on the pattern of the IC to be inspected. ::-'1 Contact Knob "A 1-beam arrangement can be easily formed, and a large number of 1-81 patterns can be accommodated within one contact knob."
- Can form arrays of probes. At the Mokubei gate, the insertion hole 4 of the 1-b is formed, the second f%S is shown in Figure 9 (ii), (1
)) J5 and (0) l,: Kosukushi! form) gate, ()
The square groove and the rectangular groove can be any suitable shape as long as it can easily hold the circular outer circumferential surface of the contact glove. According to the present invention, it is advantageous in terms of machining to provide a groove for forming a fitting hole on the housing side, but if the inner peripheral surface of the holder is 1% @setiJT
Also, install ii4 in a different position on both the housing and boulder. Furthermore, in the present invention - (, 1) fitted into the insertion hole 111i 1
.. The holding of the 21 contact l-zor 1'-b is not necessarily limited to the means of the embodiment, but may be modified as appropriate.The material of the housing and holder is also 1 boxy type containing acrylic resin and glass fiber. 11 using an appropriate material such as resin. Advantageous Effects of the Invention 1 As explained below, the present invention forms a large number of vortices at the edges of the housing and the holder to which the housing is jointly fixed, and forms grooves with these vortices. It consists of a flat surface that comes into contact with the flat surface that comes into contact.
1 no to J,-) during ILI of 11,11! , so compared to drilling a small diameter hole in the pin board, it is necessary to add ti4 to the housing or holder.
, the pips become highly viscous, and the linearity also decreases, so
l! X Fn hole diameter J3 and those with small pips, such as small outer diameter contact holes of less than 1 mm, can be easily obtained by inserting contact holes with small outer diameters of less than 0.8 mm. Compatible with various IC patterns
The advantage of having a single cock is that the fitting hole can be easily machined. 4.1 Description of O1j<j of flash
Figure 33 shows the pin block in Figure 1 attached to the pin board body.
ll! rJ iJ /, : perspective view; FIG. 4 is a top view showing a housing according to another embodiment of the present invention; FIG. 55 is a side view of FIG. 4; FIG. 6 is a side view of FIG. L Figure 4 is a partial side view of the housing in the removed state 6. Figure 7 is a partial cross-sectional view taken along line Δ-A in Figure 6. A partial plan view showing a housing according to another embodiment 1J; Yes. 1...Housing, 1a...tLll)...Flange, 2...Holder, 2a...Fitting hole, 21)...
・Stepped part, 2... flange, 2d... positioning hole,
3... Screw, 4... 1■ Hole insertion, 5... Contact dove 1]-bu, 5a... Tsuba, G... Pin block, 7
... Pin board body, 8... Screw, 9... Housing, Oa... Dobe, 9b... Dobe, 9c... Vortex, 10... Holder, 10a... Fitting Matching hole, 11...
1 ■ Hole insertion, 12... Contact probe, + 3,
14, 1 housing, 13a, 14a,
15a... Groove, 1 G-... Holder, 16a-16:
Matching hole, 17.18-HX 中几, 1τ)... screw. Special 3' [Applicant Yokoo Seisakusho Co., Ltd. Agent Bench III -1- Satoru Kobashi Buoyancy Bench 1A + April 2015, 70: yr = 66 Tsunawa CD -h') F's (of (to) (C)

Claims (1)

【特許請求の範囲】[Claims] ハウジングの外周部とハウジングが1■合固定されるホ
ルダの内周面の少くども一方に多数の溝を形成し、これ
らの溝と、溝を形成した面が当接ザる平坦な而どで、二
1ンタク1−プローブの嵌挿孔を構成したことを特徴ど
りる集積回路のパターン検査用ビンブ[1ツク。
A large number of grooves are formed on at least one side of the inner circumferential surface of the holder to which the outer circumferential part of the housing and the housing are fixed together, and these grooves are flat so that the surface on which the grooves are formed come into contact with each other. , 21 Contact 1 - A bin for pattern inspection of integrated circuits, which is characterized by having a hole for inserting a probe.
JP2552484A 1984-02-10 1984-02-10 Pattern inspecting pin block of integrated circuit Pending JPS60168062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2552484A JPS60168062A (en) 1984-02-10 1984-02-10 Pattern inspecting pin block of integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2552484A JPS60168062A (en) 1984-02-10 1984-02-10 Pattern inspecting pin block of integrated circuit

Publications (1)

Publication Number Publication Date
JPS60168062A true JPS60168062A (en) 1985-08-31

Family

ID=12168439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2552484A Pending JPS60168062A (en) 1984-02-10 1984-02-10 Pattern inspecting pin block of integrated circuit

Country Status (1)

Country Link
JP (1) JPS60168062A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085662A (en) * 1994-06-16 1996-01-12 Seiken:Kk Inspection probe
WO2003087853A1 (en) * 2002-04-16 2003-10-23 Nhk Spring Co., Ltd Holder for conductive contact
WO2003087852A1 (en) * 2002-04-16 2003-10-23 Nhk Spring Co., Ltd. Holder for conductive contact
US7832091B2 (en) 2005-10-31 2010-11-16 Nhk Spring Co., Ltd. Method for manufacturing conductive contact holder
JP2020134216A (en) * 2019-02-15 2020-08-31 株式会社サンケイエンジニアリング Inspection jig

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085662A (en) * 1994-06-16 1996-01-12 Seiken:Kk Inspection probe
WO2003087853A1 (en) * 2002-04-16 2003-10-23 Nhk Spring Co., Ltd Holder for conductive contact
WO2003087852A1 (en) * 2002-04-16 2003-10-23 Nhk Spring Co., Ltd. Holder for conductive contact
JPWO2003087852A1 (en) * 2002-04-16 2005-08-18 日本発条株式会社 Conductive contact holder
US7157922B2 (en) 2002-04-16 2007-01-02 Nhk Spring Co., Ltd. Planar electroconductive contact probe holder
US7239158B2 (en) 2002-04-16 2007-07-03 Nhk Spring Co., Ltd. Holder for conductive contact
CN100357744C (en) * 2002-04-16 2007-12-26 日本发条株式会社 Holder for conductive contact
KR100791136B1 (en) 2002-04-16 2008-01-02 닛폰 하츠죠 가부시키가이샤 Holder for conductive contact
CN100387993C (en) * 2002-04-16 2008-05-14 日本发条株式会社 Holder for conductive contact
JP2010237220A (en) * 2002-04-16 2010-10-21 Nhk Spring Co Ltd Holder for conductive contact
JP4578807B2 (en) * 2002-04-16 2010-11-10 日本発條株式会社 Conductive contact holder
US7832091B2 (en) 2005-10-31 2010-11-16 Nhk Spring Co., Ltd. Method for manufacturing conductive contact holder
JP2020134216A (en) * 2019-02-15 2020-08-31 株式会社サンケイエンジニアリング Inspection jig

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