JP2020132367A - Article conveyance facility - Google Patents

Article conveyance facility Download PDF

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JP2020132367A
JP2020132367A JP2019028519A JP2019028519A JP2020132367A JP 2020132367 A JP2020132367 A JP 2020132367A JP 2019028519 A JP2019028519 A JP 2019028519A JP 2019028519 A JP2019028519 A JP 2019028519A JP 2020132367 A JP2020132367 A JP 2020132367A
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transport
wall body
along
article
space
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JP7127573B2 (en
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秀基 福島
Hideki Fukushima
秀基 福島
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Daifuku Co Ltd
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Daifuku Co Ltd
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Priority to JP2019028519A priority Critical patent/JP7127573B2/en
Priority to TW109102286A priority patent/TWI833883B/en
Priority to KR1020200017482A priority patent/KR20200101852A/en
Priority to CN202010104805.6A priority patent/CN111591644B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)

Abstract

To provide an article conveyance facility which prevents gas in an external space from entering into an internal space through a ventilation part.SOLUTION: An article conveyance facility includes a conveyance device M that conveys an article W, a wall body 2 surrounding a region where the conveyance device M is installed, and an internal air flow generation part 14 which generates air flow from above to below of the internal space R1 surrounded by the wall body 2, in which the wall part 2 includes a ventilation part 13 that communicates the internal space R1 and the external space R2, the ventilation part 13 includes a plurality of air-straightening plates 17 aligned in the vertical direction Z, and each of the plurality of air-straightening plates 17 is installed in an inclination posture where they are inclined with the inner end positioned on the upper side of the outer end.SELECTED DRAWING: Figure 2

Description

本発明は、物品を搬送する搬送装置を備えた物品搬送設備に関する。 The present invention relates to an article transport facility provided with a transport device for transporting articles.

このような物品搬送設備として、例えば、特開２０１８−０３９６５８号公報（特許文献１）に記載されたものが知られている。以下、背景技術の説明において、かっこ書きの符号又は名称は、先行技術文献における符号又は名称とする。この特許文献１に記載の物品搬送設備は、搬送装置（スタッカークレーン２）が設置されている領域を囲む壁体（Ｋ）と、壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備えている。壁体は、内部空間と壁体の外部の空間である外部空間とを水平方向に連通する通気部（排気部５２）を備えている。 As such an article transporting facility, for example, those described in JP-A-2018-039658 (Patent Document 1) are known. Hereinafter, in the description of the background art, the reference numerals or names in parentheses shall be the reference numerals or names in the prior art documents. In the article transport facility described in Patent Document 1, the wall body (K) surrounding the area where the transport device (stacker crane 2) is installed and the air flow from above to downward in the internal space surrounded by the wall body. It is equipped with an internal airflow generator that generates the above. The wall body includes a ventilation unit (exhaust unit 52) that horizontally communicates the internal space and the external space, which is the space outside the wall body.

特許文献１の物品搬送設備では、内部気流生成部によって内部空間の気体を上方から下方に向かって流動させた後、その気体を通気部から外部空間に排気することができる。このように、内部空間に気流を生成することで、搬送装置によって物品が搬送した場合に塵埃が発生したとしても、その塵埃を気体と共に下方に流動させて通気部から外部空間に排出することができ、内部空間において塵埃が飛散しないようになっている。 In the article transport facility of Patent Document 1, after the gas in the internal space is made to flow from the upper side to the lower side by the internal air flow generation part, the gas can be exhausted from the ventilation part to the external space. By generating an air flow in the internal space in this way, even if dust is generated when the article is transported by the transport device, the dust can be flowed downward together with the gas and discharged from the ventilation part to the external space. It is possible to prevent dust from scattering in the internal space.

特開２０１８−０３９６５８号公報JP-A-2018-039658

特許文献１の物品搬送設備では、搬送装置によって通気部から離れるように物品を搬送した場合、物品と通気部との間の領域は陰圧となり、この領域に気体が流れる傾向となる。これによって、外部空間の気体が、通気部を通して内部空間に侵入して物品と通気部との間の領域に流れようとするため、外部空間の気体が内部空間に侵入し易いという問題がある。 In the article transport facility of Patent Document 1, when the article is transported away from the ventilation portion by the transport device, the region between the article and the ventilation portion becomes negative pressure, and the gas tends to flow in this region. As a result, the gas in the external space invades the internal space through the ventilation portion and tries to flow into the region between the article and the ventilation portion, so that there is a problem that the gas in the external space easily invades the internal space.

そこで、外部空間の気体が通気部を通して内部空間に侵入し難い物品搬送設備の実現が望まれる。 Therefore, it is desired to realize an article transporting facility in which the gas in the external space does not easily enter the internal space through the ventilation portion.

上記に鑑みた、物品搬送設備の特徴構成は、物品を搬送する搬送装置を備え、
前記搬送装置が設置されている領域を囲む壁体と、前記壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備え、前記壁体は、水平方向に沿う方向である第１方向に沿って前記内部空間と前記壁体の外部の空間である外部空間とを連通する通気部を備え、前記通気部は、上下方向に並ぶ複数の整風板を備え、前記第１方向における前記外部空間に対して前記内部空間が存在する方向を内部側、その反対側を外部側として、複数の前記整風板の夫々は、前記内部側の端部である内端部が前記外部側の端部である外端部より上方側に位置するように傾斜した傾斜姿勢で設置されている点にある。 In view of the above, the characteristic configuration of the article transport facility includes a transport device for transporting articles.
The wall body includes a wall body surrounding the area where the transport device is installed, and an internal air flow generating unit that generates an air flow from above to downward in the internal space surrounded by the wall body, and the wall body is horizontal. The ventilation portion includes a ventilation portion that communicates the internal space and the external space, which is the space outside the wall body, along the first direction, which is a direction along the direction, and the ventilation portion includes a plurality of air conditioning plates arranged in the vertical direction. The direction in which the internal space exists with respect to the external space in the first direction is the internal side, and the opposite side is the external side, and each of the plurality of air conditioning plates is an end portion of the internal side. The point is that the end portion is installed in an inclined posture so as to be located above the outer end portion, which is the end portion on the outer side.

この特徴構成によれば、内部気流生成部によって生成された気流によって、内部空間の気体を上方から下方に向かって流動させることができ、その流動させた気体の一部又は全部を通気部から外部空間に排気させることができる。そして、このように、内部空間に気流を生成することで、搬送装置によって物品を搬送した場合に塵埃が発生したとしても、その塵埃は気体と共に下方に流動して通気部から外部空間に排出されるため、内部空間において塵埃が飛散することを防止できる。 According to this characteristic configuration, the airflow generated by the internal airflow generator allows the gas in the internal space to flow from above to downward, and a part or all of the flowed gas is discharged from the ventilation part to the outside. It can be exhausted to the space. Then, by generating an air flow in the internal space in this way, even if dust is generated when the article is transported by the transport device, the dust flows downward together with the gas and is discharged from the ventilation portion to the external space. Therefore, it is possible to prevent dust from scattering in the internal space.

また、通気部に備えられている複数の整風板の夫々は、内端部が外端部より上方側に位置するように傾斜した傾斜姿勢となっている。そのため、上方から下方に向かって流動した内部空間の気体は、傾斜姿勢の整風板の上面によって案内されて斜め下方に向けて流動する。そのため、通気部において、内部空間から外部空間に向けて気流が生じやすくなる。通気部を通して外部空間から内部空間に侵入しようとする気体は、この気流によって妨げられる。よって、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 In addition, each of the plurality of air conditioning plates provided in the ventilation portion is in an inclined posture in which the inner end portion is located above the outer end portion. Therefore, the gas in the internal space that has flowed from the upper side to the lower side is guided by the upper surface of the air conditioning plate in the inclined posture and flows diagonally downward. Therefore, in the ventilation portion, an air flow is likely to be generated from the internal space to the external space. The gas that tries to enter the internal space from the external space through the ventilation part is blocked by this air flow. Therefore, it is possible to prevent the gas in the external space from entering the internal space through the ventilation portion.

第１の実施形態における物品搬送設備の平面図Top view of the article transport facility according to the first embodiment 第１の実施形態における物品搬送設備の正面図Front view of the article transport facility according to the first embodiment 第１の実施形態における物品搬送設備の側面図Side view of the article transport facility according to the first embodiment 第１の実施形態における通気部の斜視図Perspective view of the ventilation portion in the first embodiment 第１の実施形態における整風板の側面図Side view of the air conditioning plate in the first embodiment 第１の実施形態における緩傾斜姿勢の整風板を示す側面図Side view showing the air conditioning plate of the gentle inclination posture in 1st Embodiment 第１の実施形態における急傾斜姿勢の整風板を示す側面図A side view showing a steeply inclined air conditioning plate according to the first embodiment. 第２の実施形態における物品搬送設備の平面図Top view of the article transport facility according to the second embodiment 第２の実施形態における物品搬送設備の正面図Front view of the article transport facility in the second embodiment 第３の実施形態における物品搬送設備の正面図Front view of the article transport facility according to the third embodiment 第４の実施形態における物品搬送設備の平面図Top view of the article transport facility according to the fourth embodiment 第４の実施形態における物品搬送設備の正面図Front view of the article transport facility according to the fourth embodiment

１．第１の実施形態
物品搬送設備の第１の実施形態について図面に基づいて説明する。
図１及から図３に示すように、物品搬送設備１００は、自動倉庫１と、自動倉庫１が設置されている領域を囲む壁体２と、自動倉庫１及び壁体２が設置されているクリーンルームＲに上方から下方に向かう気流を生成する気流生成部３（図２及び図３参照）と、を備えている。 1. 1. First Embodiment The first embodiment of the article transport facility will be described with reference to the drawings.
As shown in FIGS. 1 to 3, the article transport facility 100 is provided with the automated warehouse 1, the wall body 2 surrounding the area where the automated warehouse 1 is installed, and the automated warehouse 1 and the wall body 2. The clean room R is provided with an airflow generating unit 3 (see FIGS. 2 and 3) that generates an airflow from above to below.

自動倉庫１は、物品Ｗを搬送するスタッカークレーン６と、物品Ｗを収納する収納部７を複数備えた収納棚８と、を備えている。スタッカークレーン６は、走行経路Ｌを往復走行することで、規定の搬送方向Ｘに沿って物品Ｗを搬送する。収納棚８は、一部の収納部７を、処理装置Ｅに対して物品Ｗを搬入出するための搬入出部９として用いている。尚、スタッカークレーン６が、物品搬送設備１００に備えられて物品Ｗを搬送する搬送装置Ｍに相当する。 The automated warehouse 1 includes a stacker crane 6 for transporting the article W and a storage shelf 8 having a plurality of storage units 7 for storing the article W. The stacker crane 6 transports the article W along the specified transport direction X by reciprocating on the travel path L. The storage shelf 8 uses a part of the storage unit 7 as a loading / unloading section 9 for loading / unloading the article W to / from the processing device E. The stacker crane 6 corresponds to a transport device M provided in the article transport facility 100 to transport the article W.

スタッカークレーン６は、物品Ｗを収納部７から搬入出部９に搬送すると共に物品Ｗを搬入出部９から収納部７に搬送する。処理装置Ｅは、物品Ｗを搬送する搬送部（図示せず）を備えている。処理装置Ｅは、搬送部によって物品Ｗを搬入出部９から処理装置Ｅ内に搬送すると共に物品Ｗを処理装置Ｅ内から搬入出部９に搬送する。本実施形態では、複数枚の板状体を収容した容器を物品Ｗとしている。処理装置Ｅは、板状体を使用して処理を行う装置である。例えば、処理装置Ｅは半導体処理装置であり、板状体は当該処理装置Ｅで用いられるフォトマスクである。 The stacker crane 6 conveys the article W from the storage section 7 to the loading / unloading section 9, and also transports the article W from the loading / unloading section 9 to the storage section 7. The processing device E includes a transport unit (not shown) for transporting the article W. The processing device E transports the article W from the loading / unloading section 9 into the processing device E by the transport section, and also transports the article W from the processing device E to the loading / unloading section 9. In the present embodiment, the container containing a plurality of plate-shaped bodies is referred to as the article W. The processing device E is a device that performs processing using a plate-shaped body. For example, the processing device E is a semiconductor processing device, and the plate-shaped body is a photomask used in the processing device E.

図１に示すように、壁体２は、スタッカークレーン６が設置されている領域を囲んでいる。本実施形態では、壁体２は、スタッカークレーン６が設置されている領域に加えて、収納棚８が設置されている領域を囲んでいる。つまり、壁体２は、自動倉庫１が設置されている領域を囲んでいる。壁体２は、クリーンルームＲを、壁体２によって囲まれている内部空間Ｒ１と、壁体２の外部の空間である外部空間Ｒ２と、に仕切っている。 As shown in FIG. 1, the wall body 2 surrounds the area where the stacker crane 6 is installed. In the present embodiment, the wall body 2 surrounds the area where the storage rack 8 is installed in addition to the area where the stacker crane 6 is installed. That is, the wall body 2 surrounds the area where the automated warehouse 1 is installed. The wall body 2 divides the clean room R into an internal space R1 surrounded by the wall body 2 and an external space R2 which is a space outside the wall body 2.

上下方向Ｚに沿う上下方向視で搬送方向Ｘに対して直交する方向を横幅方向Ｙとして、壁体２は、当該壁体２における搬送方向Ｘの端部に、横幅方向Ｙに沿って設置された端壁部１１を備えている。端壁部１１は、スタッカークレーン６を挟んで搬送方向Ｘの両側に設置されている。また、壁体２は、当該壁体２における横幅方向Ｙの端部に、搬送方向Ｘに沿って設置された側壁部１２を備えている。側壁部１２は、スタッカークレーン６を挟んで横幅方向Ｙの両側に設置されている。本実施形態では、端壁部１１は、自動倉庫１（スタッカークレーン６及び収納棚８）を挟んで搬送方向Ｘの両側に設置され、側壁部１２は、自動倉庫１（スタッカークレーン６及び収納棚８）を挟んで横幅方向Ｙの両側に設置されている。 The wall body 2 is installed along the horizontal width direction Y at the end of the transport direction X in the wall body 2, with the direction orthogonal to the transport direction X in the vertical direction along the vertical direction Z as the horizontal width direction Y. The end wall portion 11 is provided. The end wall portions 11 are installed on both sides in the transport direction X with the stacker crane 6 interposed therebetween. Further, the wall body 2 includes a side wall portion 12 installed along the transport direction X at an end portion of the wall body 2 in the lateral width direction Y. The side wall portions 12 are installed on both sides in the lateral width direction Y with the stacker crane 6 interposed therebetween. In the present embodiment, the end wall portions 11 are installed on both sides of the automated warehouse 1 (stacker crane 6 and storage shelves 8) in the transport direction X, and the side wall portions 12 are the automated warehouse 1 (stacker crane 6 and storage shelves 8). It is installed on both sides in the width direction Y with 8) in between.

図４に示すように、壁体２は、水平方向に沿う第１方向Ａに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する通気部１３を備えている。本実施形態では、通気部１３は、壁体２の下部に設置されている。詳しくは、通気部１３は、壁体２の下端（下床部Ｆ１の上面）から上方側に規定高さまでの範囲に設置されている。本例では、通気部１３は、後述する下床部Ｆ１と上床部Ｆ２との間の床下空間Ｒ３に面する高さ方向の領域の全体に亘って設置されている。また、通気部１３は、端壁部１１における横幅方向Ｙの全域に亘って設置され、側壁部１２における搬送方向Ｘの全域に亘って設置されている。 As shown in FIG. 4, the wall body 2 includes a ventilation portion 13 that connects the internal space R1 and the external space R2 along the first direction A along the horizontal direction. In the present embodiment, the ventilation portion 13 is installed at the lower part of the wall body 2. Specifically, the ventilation portion 13 is installed in a range from the lower end of the wall body 2 (upper surface of the lower floor portion F1) to the upper side up to a specified height. In this example, the ventilation portion 13 is installed over the entire area in the height direction facing the underfloor space R3 between the lower floor portion F1 and the upper floor portion F2, which will be described later. Further, the ventilation portion 13 is installed over the entire area of the end wall portion 11 in the lateral width direction Y, and is installed over the entire area of the side wall portion 12 in the transport direction X.

図２及び図３に示すように、本実施形態では、端壁部１１と側壁部１２との双方に通気部１３を備えている。端壁部１１に備えられている通気部１３は、第１方向Ａが搬送方向Ｘとなっており、搬送方向Ｘに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する。側壁部１２に備えられている通気部１３は、第１方向Ａが横幅方向Ｙとなっており、横幅方向Ｙに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する。 As shown in FIGS. 2 and 3, in the present embodiment, the ventilation portion 13 is provided on both the end wall portion 11 and the side wall portion 12. In the ventilation portion 13 provided in the end wall portion 11, the first direction A is the transport direction X, and the internal space R1 and the external space R2 are communicated with each other along the transport direction X. The ventilation portion 13 provided in the side wall portion 12 has a first direction A in the lateral width direction Y, and communicates the internal space R1 and the external space R2 along the lateral width direction Y.

スタッカークレーン６、収納棚８、及び壁体２は、クリーンルームＲに設置されている。気流生成部３は、クリーンルームＲの天井部Ｃに設置されている。本実施形態では、気流生成部３は、ファンとフィルター部とを筐体に組込んでユニット化されたファンフィルタユニット（以下、ＦＦＵと略称する）を複数設置して構成されている。図２に示すように、クリーンルームＲの床部は、下床部Ｆ１と、下床部Ｆ１よりも上方に配設された上床部Ｆ２とにより構成されている。上床部Ｆ２は、グレーチング床であり、上下方向Ｚに貫通する通気孔が複数形成されている。この上床部Ｆ２は、外部空間Ｒ２に設置されている。下床部Ｆ１と上床部Ｆ２との間に床下空間Ｒ３が形成されており、この床下空間Ｒ３は、外部空間Ｒ２の一部である。下床部Ｆ１は、通気孔を有さない床であり、本実施形態では、無孔状のコンクリート等の床材によって構成されている。 The stacker crane 6, the storage shelf 8, and the wall body 2 are installed in the clean room R. The airflow generation unit 3 is installed on the ceiling portion C of the clean room R. In the present embodiment, the airflow generation unit 3 is configured by installing a plurality of fan filter units (hereinafter, abbreviated as FFU) which are unitized by incorporating a fan and a filter unit into a housing. As shown in FIG. 2, the floor portion of the clean room R is composed of a lower floor portion F1 and an upper floor portion F2 arranged above the lower floor portion F1. The upper floor portion F2 is a grating floor, and a plurality of ventilation holes penetrating in the vertical direction Z are formed. The upper floor portion F2 is installed in the external space R2. An underfloor space R3 is formed between the lower floor portion F1 and the upper floor portion F2, and this underfloor space R3 is a part of the external space R2. The lower floor portion F1 is a floor having no ventilation holes, and in the present embodiment, it is made of a floor material such as non-perforated concrete.

気流生成部３は、内部空間Ｒ１の上部及び外部空間Ｒ２の上部に設置されているＦＦＵによって構成されている。気流生成部３における内部空間Ｒ１の上部に設置されているＦＦＵによって、内部空間Ｒ１に上方から下方に向けて気流を生成する内部気流生成部１４が構成されている。また、気流生成部３における外部空間Ｒ２の上部に設置されているＦＦＵによって、外部空間Ｒ２に上方から下方に向けて気流を生成する外部気流生成部１５が構成されている。 The airflow generation unit 3 is composed of FFUs installed above the internal space R1 and above the external space R2. The FFU installed above the internal space R1 in the airflow generation unit 3 constitutes an internal airflow generation unit 14 that generates an airflow from above to below in the internal space R1. Further, the FFU installed above the external space R2 in the airflow generation unit 3 constitutes an external airflow generation unit 15 that generates an airflow from above to below in the external space R2.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気が、内部空間Ｒ１を上方から下方に流動する。その下方に流動した空気は、通気部１３から床下空間Ｒ３（外部空間Ｒ２の一部）に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気が、外部空間Ｒ２を上方から下方に流動し、上床部Ｆ２を通気して床下空間Ｒ３まで流動する。このように、気流生成部３は、クリーンルームＲに上方から下方に向かう気流を生成する。尚、壁体２は、天井部Ｃから下床部Ｆ１に亘って設置されている。 In the internal space R1, the air supplied to the upper part of the internal space R1 by the internal airflow generating unit 14 flows through the internal space R1 from above to below. The air flowing below the air is exhausted from the ventilation portion 13 to the underfloor space R3 (a part of the external space R2). Further, in the external space R2, the air supplied to the upper part of the external space R2 by the external airflow generating unit 15 flows from above to downward in the external space R2, ventilates the upper floor portion F2, and flows to the underfloor space R3. In this way, the airflow generation unit 3 generates an airflow from above to downward in the clean room R. The wall body 2 is installed from the ceiling portion C to the lower floor portion F1.

図４、図６及び図７に示すように、通気部１３は、上下方向Ｚに並ぶ複数の整風板１７を備えている。以下、複数の整風板１７について説明するが、第１方向Ａにおける外部空間Ｒ２に対して内部空間Ｒ１が存在する方向を内部側Ａ１、その反対側を外部側Ａ２として説明する。また、上下方向視で第１方向Ａに対して直交する方向を第２方向Ｂとして説明する。複数の整風板１７の夫々は、第２方向Ｂに沿う揺動軸心Ｐ周りに揺動可能に構成されている。複数の揺動軸心Ｐは、第２方向Ｂに沿う第２方向視で上下方向Ｚに沿って一列に並ぶように配置されている。 As shown in FIGS. 4, 6 and 7, the ventilation portion 13 includes a plurality of air conditioning plates 17 arranged in the vertical direction Z. Hereinafter, a plurality of air conditioning plates 17 will be described, but the direction in which the internal space R1 exists with respect to the external space R2 in the first direction A will be described as the internal side A1 and the opposite side will be described as the external side A2. Further, the direction orthogonal to the first direction A in the vertical view will be described as the second direction B. Each of the plurality of air conditioning plates 17 is configured to be swingable around a swing axis P along the second direction B. The plurality of swing axis Ps are arranged so as to be arranged in a row along the vertical direction Z in the second direction view along the second direction B.

通気部１３は、複数の整風板１７の夫々を揺動軸心Ｐ周りに揺動させることで、通気量を調節可能に構成されている。説明を加えると、複数の整風板１７の夫々は、例えば、図５の実線及び図６に示すように、内部側Ａ１の端部である内端部１７Ａが外部側Ａ２の端部である外端部１７Ｂより上方側に位置するように傾斜した緩傾斜姿勢や、図５の仮想線及び図７に示すように、当該緩傾斜姿勢よりも内端部１７Ａと外端部１７Ｂとの上下方向Ｚの間隔を大きくした急傾斜姿勢等に姿勢を変化可能に構成されている。本実施形態では、緩傾斜姿勢と急傾斜姿勢とは、いずれも、内端部１７Ａが外端部１７Ｂより上方側に位置する傾斜姿勢である。また、複数の整風板１７の夫々は、上記のような緩傾斜姿勢と急傾斜姿勢との間の傾斜角度となる姿勢や、緩傾斜姿勢よりも傾斜角度が緩い姿勢等にも変化可能となっている。 The ventilation portion 13 is configured so that the amount of ventilation can be adjusted by swinging each of the plurality of air conditioning plates 17 around the swing axis P. To add an explanation, in each of the plurality of air conditioning plates 17, for example, as shown by the solid line in FIG. 5 and FIG. 6, the inner end portion 17A, which is the end portion of the inner side A1, is the outer end portion of the outer side A2. A gently tilted posture tilted so as to be located above the end portion 17B, and as shown in the virtual line of FIG. 5 and FIG. 7, the vertical direction of the inner end portion 17A and the outer end portion 17B from the gently tilted posture. It is configured so that the posture can be changed to a steeply inclined posture with a large Z interval. In the present embodiment, both the gentle tilted posture and the steeply tilted posture are tilted postures in which the inner end portion 17A is located above the outer end portion 17B. Further, each of the plurality of air conditioning plates 17 can be changed to a posture in which the inclination angle is between the gentle inclination posture and the steep inclination posture as described above, or a posture in which the inclination angle is looser than the gentle inclination posture. ing.

そして、複数の整風板１７の夫々を緩傾斜姿勢とした場合には、上下方向Ｚに隣接する整風板１７同士の間隔が広くなり、通気部１３の通気量が多くなる。これに対して、複数の整風板１７の夫々を急傾斜姿勢とした場合には、上下方向Ｚに隣接する整風板１７同士の間隔が狭くなり、通気部１３の通気量が少なくなる。 When each of the plurality of air conditioning plates 17 is in a gently inclined posture, the distance between the air conditioning plates 17 adjacent to each other in the vertical direction Z becomes wide, and the air volume of the ventilation portion 13 increases. On the other hand, when each of the plurality of air conditioning plates 17 is in a steeply inclined posture, the distance between the air conditioning plates 17 adjacent to each other in the vertical direction Z becomes narrow, and the ventilation amount of the ventilation portion 13 decreases.

複数の整風板１７を揺動させる構成としては、複数の整風板１７を作業者の手作業で揺動させる構成でもよく、複数の整風板１７を電動モータ等の駆動装置の動作によって揺動させる構成でもよい。また、駆動装置の動作によって揺動させる場合、スタッカークレーン６の動作に連動して揺動させるように、制御装置によって駆動装置を制御するようにしてもよい。例えば、制御装置は、スタッカークレーン６が整風板１７に近づくようスタッカークレーン６を移動させる場合に、整風板１７を緩傾斜姿勢として内部空間Ｒ１の空気が外部空間Ｒ２に排気し易くし、スタッカークレーン６が整風板１７から遠ざかるようにスタッカークレーン６を移動させる場合に、整風板１７を急傾斜姿勢として外部空間Ｒ２の空気が内部空間Ｒ１に侵入し難くするように、駆動装置を制御するようにしてもよい。 The configuration for swinging the plurality of air conditioning plates 17 may be such that the plurality of air conditioning plates 17 are manually swung by the operator, and the plurality of air conditioning plates 17 are swung by the operation of a drive device such as an electric motor. It may be configured. Further, when swinging by the operation of the drive device, the drive device may be controlled by the control device so as to swing in conjunction with the operation of the stacker crane 6. For example, when the stacker crane 6 is moved so that the stacker crane 6 approaches the air conditioning plate 17, the control device takes the air conditioning plate 17 in a gently inclined posture to facilitate exhaustion of air in the internal space R1 to the external space R2, and the stacker crane. When the stacker crane 6 is moved so that the air conditioning plate 17 is moved away from the air conditioning plate 17, the drive device is controlled so that the air conditioning plate 17 is in a steeply inclined posture so that the air in the external space R2 does not easily enter the internal space R1. You may.

図５に示すように、複数の整風板１７における斜め上方を向く面は、第２方向視で、斜め上方に膨出する弧状に形成されている。本実施形態では、複数の整風板１７における斜め上方を向く面は、外方側斜め上方を向いており、第２方向視で、外方側斜め上方に膨出する弧状に形成されている。また、図示の例では、複数の整風板１７における斜め下方を向く面は、第２方向視で、斜め上方に凹入する弧状に形成されている。本実施形態では、複数の整風板１７における斜め下方を向く面は、内方側斜め下方を向いており、第２方向視で、外方側斜め上方に凹入する弧状に形成されている。また、本例では、第２方向視で内端部１７Ａと外端部１７Ｂとが並ぶ方向を長手方向として、複数の整風板１７の夫々は、内端部１７Ａから外端部１７Ｂに向かうに従って、第２方向視で長手方向に対して直交する方向の厚みが薄くなる形状に形成されている。 As shown in FIG. 5, the surfaces of the plurality of air conditioning plates 17 facing diagonally upward are formed in an arc shape that bulges diagonally upward in the second direction. In the present embodiment, the surfaces of the plurality of air conditioning plates 17 that face diagonally upward are oriented diagonally upward on the outward side, and are formed in an arc shape that bulges diagonally upward on the outward side in the second directional view. Further, in the illustrated example, the surfaces of the plurality of air conditioning plates 17 facing diagonally downward are formed in an arc shape that is recessed diagonally upward in the second direction. In the present embodiment, the surfaces of the plurality of air conditioning plates 17 that face diagonally downward are directed diagonally downward on the inward side, and are formed in an arc shape that is recessed diagonally upward on the outward side in the second directional view. Further, in this example, the direction in which the inner end portion 17A and the outer end portion 17B are lined up in the second direction is the longitudinal direction, and each of the plurality of air conditioning plates 17 gradually moves from the inner end portion 17A toward the outer end portion 17B. , It is formed in a shape in which the thickness in the direction orthogonal to the longitudinal direction becomes thinner in the second direction view.

図６及び図７に示すように、複数の整風板１７の夫々は、緩傾斜姿勢では、壁体２に対して第１方向Ａの両側に突出し、急傾斜姿勢では、壁体２の第１方向Ａの幅内に収まっている。また、本実施形態では、複数の整風板１７を壁体２に対して直接に取り付けているが、複数の整風板１７を枠材に取り付け、その枠材を壁体２に取り付けるようにしてもよい。この場合、複数の整風板１７の夫々を、緩傾斜姿勢では、枠材に対して第１方向Ａの両側に突出し、急傾斜姿勢では、枠材の第１方向Ａの幅内に収まるようにしてもよい。 As shown in FIGS. 6 and 7, each of the plurality of air conditioning plates 17 projects to both sides of the first direction A with respect to the wall body 2 in the gently inclined posture, and in the steeply inclined posture, the first of the wall body 2 It fits within the width of direction A. Further, in the present embodiment, the plurality of air conditioning plates 17 are directly attached to the wall body 2, but the plurality of air conditioning plates 17 may be attached to the frame material and the frame material may be attached to the wall body 2. Good. In this case, each of the plurality of air conditioning plates 17 protrudes from both sides of the first direction A with respect to the frame material in the gently inclined posture, and fits within the width of the first direction A of the frame material in the steeply inclined posture. You may.

２．第２の実施形態
次に、物品搬送設備の第２の実施形態について、図８及び図９を用いて説明する。本実施形態では、搬送装置Ｍを、自動倉庫１の外側において天井近くを走行する搬送台車２１とした点で、上記第１の実施形態とは異なる。以下では、本実施形態に係る物品搬送設備１００について、上記第１の実施形態との相違点を中心として説明する。なお、特に説明しない点については、上記第１の実施形態と同様とする。 2. 2. Second Embodiment Next, a second embodiment of the article transport facility will be described with reference to FIGS. 8 and 9. The present embodiment is different from the first embodiment in that the transport device M is a transport trolley 21 that travels near the ceiling outside the automated warehouse 1. Hereinafter, the article transport facility 100 according to the present embodiment will be described focusing on the differences from the first embodiment. The points not particularly described are the same as those in the first embodiment.

壁体２は、搬送装置Ｍとしての搬送台車２１が設置されている領域を囲んでいる。壁体２は、天井部Ｃに吊り下げられた状態で設置されており、前述したような上床部Ｆ２（図示せず）に対して上方に離間している。壁体２は、端壁部１１と側壁部１２とに加えて、搬送台車２１が設置されている領域の下方側を囲う下壁部２２を備えている。この下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する連通部２３を備えている。連通部２３には、ＦＦＵが備えられている。 The wall body 2 surrounds an area in which the transport carriage 21 as the transport device M is installed. The wall body 2 is installed in a state of being suspended from the ceiling portion C, and is separated upward from the upper floor portion F2 (not shown) as described above. The wall body 2 includes, in addition to the end wall portion 11 and the side wall portion 12, a lower wall portion 22 that surrounds the lower side of the area where the transport carriage 21 is installed. The lower wall portion 22 includes a communicating portion 23 that communicates the internal space R1 and the external space R2 along the vertical direction Z. The communication unit 23 is provided with an FFU.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気は、内部空間Ｒ１を上方から下方に流動した後、通気部１３から外部空間Ｒ２に向けて側方に排気されると共に連通部２３から外部空間Ｒ２に向けて下方に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気は、外部空間Ｒ２を上方から下方に流動する。 In the internal space R1, the air supplied to the upper part of the internal space R1 by the internal airflow generation unit 14 flows from the upper side to the lower side in the internal space R1 and then is exhausted laterally from the ventilation unit 13 toward the external space R2. At the same time, it is exhausted downward from the communication portion 23 toward the external space R2. Further, in the external space R2, the air supplied to the upper part of the external space R2 by the external airflow generation unit 15 flows in the external space R2 from above to below.

３．第３の実施形態
次に、物品搬送設備の第３の実施形態について、図１０を用いて説明する。本実施形態では、搬送装置Ｍを、自動倉庫１の外側において床部近くを走行する搬送台車２１とした点で、上記第１の実施形態とは異なる。以下では、本実施形態に係る物品搬送設備１００について、上記第１の実施形態との相違点を中心として説明する。なお、特に説明しない点については、上記第１の実施形態と同様とする。 3. 3. Third Embodiment Next, a third embodiment of the article transport facility will be described with reference to FIG. The present embodiment is different from the first embodiment in that the transport device M is a transport trolley 21 that travels near the floor outside the automated warehouse 1. Hereinafter, the article transport facility 100 according to the present embodiment will be described focusing on the differences from the first embodiment. The points not particularly described are the same as those in the first embodiment.

壁体２は、搬送装置Ｍとしての搬送台車２１が設置されている領域を囲んでいる。壁体２は、下床部Ｆ１上に設置されている。壁体２は、下床部Ｆ１に対して上方に離間していると共に、前述したような天井部Ｃ（図示せず）に対して下方に離間している。壁体２は、端壁部１１と側壁部１２とに加えて、搬送台車２１が設置されている領域の下方側を囲う下壁部２２と、搬送台車２１が設置されている領域の上方側を囲う上壁部２４と、を備えている。下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する連通部２３を備えている。上壁部２４には、複数のＦＦＵが設置されており、この複数のＦＦＵによって内部気流生成部１４が構成されている。尚、図示は省略するが、天井部Ｃに設置されているＦＦＵによって外部気流生成部１５が構成されている。下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する連通部２３を備えている。連通部２３には、ＦＦＵが備えられている。 The wall body 2 surrounds an area in which the transport carriage 21 as the transport device M is installed. The wall body 2 is installed on the lower floor portion F1. The wall body 2 is separated upward from the lower floor portion F1 and downwardly separated from the ceiling portion C (not shown) as described above. In addition to the end wall portion 11 and the side wall portion 12, the wall body 2 has a lower wall portion 22 that surrounds the lower side of the area where the transport carriage 21 is installed, and an upper side of the region where the transport carriage 21 is installed. It is provided with an upper wall portion 24 that surrounds the vehicle. The lower wall portion 22 includes a communicating portion 23 that communicates the internal space R1 and the external space R2 along the vertical direction Z. A plurality of FFUs are installed on the upper wall portion 24, and the internal airflow generating portion 14 is composed of the plurality of FFUs. Although not shown, the external airflow generation unit 15 is configured by the FFU installed on the ceiling unit C. The lower wall portion 22 includes a communicating portion 23 that communicates the internal space R1 and the external space R2 along the vertical direction Z. The communication unit 23 is provided with an FFU.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気は、内部空間Ｒ１を上方から下方に流動した後、通気部１３から外部空間Ｒ２に向けて側方に排気されると共に連通部２３から外部空間Ｒ２に向けて下方に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気は、外部空間Ｒ２を上方から下方に流動する。このように、気流生成部３は、クリーンルームＲに上方から下方に向かう気流を生成する。 In the internal space R1, the air supplied to the upper part of the internal space R1 by the internal airflow generation unit 14 flows from the upper side to the lower side in the internal space R1 and then is exhausted laterally from the ventilation unit 13 toward the external space R2. At the same time, it is exhausted downward from the communication portion 23 toward the external space R2. Further, in the external space R2, the air supplied to the upper part of the external space R2 by the external airflow generation unit 15 flows in the external space R2 from above to below. In this way, the airflow generation unit 3 generates an airflow from above to downward in the clean room R.

４．第４の実施形態
次に、物品搬送設備の第４の実施形態について、図１１及び図１２を用いて説明する。本実施形態では、搬送装置Ｍを、自動倉庫１の外側において天井近くを一方向に周回走行する搬送台車２１とした点で、上記第１の実施形態とは異なる。以下では、本実施形態に係る物品搬送設備１００について、上記第１の実施形態との相違点を中心として説明する。なお、特に説明しない点については、上記第１の実施形態と同様とする。 4. Fourth Embodiment Next, a fourth embodiment of the article transport facility will be described with reference to FIGS. 11 and 12. The present embodiment is different from the first embodiment in that the transport device M is a transport trolley 21 that orbits near the ceiling in one direction outside the automated warehouse 1. Hereinafter, the article transport facility 100 according to the present embodiment will be described focusing on the differences from the first embodiment. The points not particularly described are the same as those in the first embodiment.

図１１に示すように、搬送装置Ｍとしての搬送台車２１は、走行経路Ｌを一方向に周回走行することで、規定の搬送方向Ｘに沿って物品Ｗを搬送する。壁体２は、搬送装置Ｍとしての搬送台車２１が設置されている領域を囲んでいる。壁体２は、天井部Ｃに吊り下げられた状態で設置されており、前述したような上床部Ｆ２（図示せず）に対して上方に離間している。 As shown in FIG. 11, the transport carriage 21 as the transport device M transports the article W along the predetermined transport direction X by traveling around the travel path L in one direction. The wall body 2 surrounds an area in which the transport carriage 21 as the transport device M is installed. The wall body 2 is installed in a state of being suspended from the ceiling portion C, and is separated upward from the upper floor portion F2 (not shown) as described above.

上下方向視で搬送方向Ｘに対して直交する方向を横幅方向Ｙとして、壁体２は、当該壁体２における横幅方向Ｙの端部に搬送方向Ｘに沿って設置された側壁部１２を備えている。側壁部１２は、搬送台車２１に対して横幅方向Ｙの外側に設置されている。 The width direction Y is defined as a direction orthogonal to the transport direction X in the vertical direction, and the wall body 2 includes a side wall portion 12 installed along the transport direction X at the end of the wall body 2 in the width direction Y. ing. The side wall portion 12 is installed outside the transport carriage 21 in the lateral width direction Y.

図１２に示すように、壁体２は、側壁部１２に加えて、搬送台車２１が設置されている領域の下方側を囲う下壁部２２を備えている。この下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する第１連通部２６及び第２連通部２７を備えている。第１連通部２６は、上下方向視で搬送台車２１が走行する走行軌跡と重なる範囲内に形成されている。この第１連通部２６には、ＦＦＵが備えられている。第２連通部２７は、上下方向視で搬送台車２１の走行軌跡に囲まれる領域に形成されている。この第２連通部２７は、パンチングメタル等の多孔状の板状部材によって構成されている。 As shown in FIG. 12, the wall body 2 includes, in addition to the side wall portion 12, a lower wall portion 22 that surrounds the lower side of the area where the transport carriage 21 is installed. The lower wall portion 22 includes a first communicating portion 26 and a second communicating portion 27 that communicate the internal space R1 and the external space R2 along the vertical direction Z. The first communication portion 26 is formed within a range that overlaps with the traveling locus on which the transport carriage 21 travels in the vertical direction. The first communication portion 26 is provided with an FFU. The second communication portion 27 is formed in a region surrounded by the traveling locus of the transport carriage 21 in the vertical direction. The second communication portion 27 is made of a porous plate-like member such as a punching metal.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気は、内部空間Ｒ１を上方から下方に流動した後、通気部１３から外部空間Ｒ２に向けて側方に排気されると共に第１連通部２６及び第２連通部２７から外部空間Ｒ２に向けて下方に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気は、外部空間Ｒ２を上方から下方に流動する。 In the internal space R1, the air supplied to the upper part of the internal space R1 by the internal airflow generation unit 14 flows from the upper side to the lower side in the internal space R1 and then is exhausted laterally from the ventilation unit 13 toward the external space R2. At the same time, it is exhausted downward from the first communication portion 26 and the second communication portion 27 toward the external space R2. Further, in the external space R2, the air supplied to the upper part of the external space R2 by the external airflow generation unit 15 flows in the external space R2 from above to below.

５．その他の実施形態
次に、物品搬送設備１００のその他の実施形態について説明する。 5. Other Embodiments Next, other embodiments of the article transport facility 100 will be described.

（１）上記の実施形態では、複数の整風板１７の夫々が揺動軸心Ｐ周りに揺動可能とされた構成を例として説明した。しかし、そのような構成に限定されない。例えば、複数の整風板１７の夫々の傾斜角度が固定された構成でもよい。この場合の傾斜角度は、例えば、上述した緩傾斜姿勢（図５の実線及び図６に示す姿勢）に対応する角度で固定されていてもよい。 (1) In the above embodiment, a configuration in which each of the plurality of air conditioning plates 17 can swing around the swing axis P has been described as an example. However, it is not limited to such a configuration. For example, the tilt angle of each of the plurality of air conditioning plates 17 may be fixed. The inclination angle in this case may be fixed at an angle corresponding to the above-mentioned gentle inclination posture (the solid line in FIG. 5 and the posture shown in FIG. 6).

（２）上記の実施形態では、複数の揺動軸心Ｐが、第２方向Ｂに沿う第２方向視で上下方向Ｚに沿って一列に並ぶように配置されている構成を例として説明した。しかし、そのような構成に限定されない。例えば、複数の揺動軸心Ｐが、上下方向Ｚに対して傾斜した方向、又は、水平方向に沿って一列に並ぶように配置されていてもよい。或いは、複数の揺動軸心Ｐが、第２方向視で波形状の複数の頂点部にそれぞれ配置されていてもよい。これらの配置は、複数の整風板１７が揺動軸心Ｐを有しない固定構造とされる場合でも同様である。 (2) In the above embodiment, a configuration in which a plurality of swing axis Ps are arranged in a line along the vertical direction Z in a second direction view along the second direction B has been described as an example. .. However, it is not limited to such a configuration. For example, a plurality of swing axis Ps may be arranged so as to be arranged in a line in a direction inclined with respect to the vertical direction Z or in a horizontal direction. Alternatively, a plurality of swing axis Ps may be arranged at a plurality of wave-shaped vertices in the second direction. These arrangements are the same even when the plurality of air conditioning plates 17 have a fixed structure having no swing axis P.

（３）上記の第１から第３の実施形態では、端壁部１１と側壁部１２との夫々に通気部１３を備える構成を例として説明した。しかし、そのような構成に限定されない。例えば、端壁部１１と側壁部１２とのうちの何れか一方のみに通気部１３を備える構成としてもよい。 (3) In the first to third embodiments described above, a configuration in which the end wall portion 11 and the side wall portion 12 are each provided with a ventilation portion 13 has been described as an example. However, it is not limited to such a configuration. For example, the ventilation portion 13 may be provided in only one of the end wall portion 11 and the side wall portion 12.

（４）上記の第１の実施形態では、側壁部１２を、収納棚８に対して横幅方向Ｙの外側に設置した。しかし、収納棚８における最下段の収納部７の下方において、側壁部１２を、収納棚８の横幅方向Ｙの幅内や、横幅方向Ｙにおける搬送装置Ｍと収納棚８との間等に設置する構成でもよい。また、上述のように、側壁部における、収納棚８の横幅方向Ｙの幅内や搬送装置Ｍと収納棚８との間等に設置した部分に、通気部１３を設けてもよい。 (4) In the first embodiment described above, the side wall portion 12 is installed outside the storage shelf 8 in the width direction Y. However, below the lowermost storage portion 7 in the storage shelf 8, the side wall portion 12 is installed within the width of the storage shelf 8 in the width direction Y, between the transport device M and the storage shelf 8 in the width direction Y, and the like. It may be configured to be. Further, as described above, the ventilation portion 13 may be provided in the side wall portion within the width of the storage shelf 8 in the lateral width direction Y or between the transport device M and the storage shelf 8.

（５）上記の実施形態では、搬送装置Ｍを、スタッカークレーン６や搬送台車２１とする構成を例として説明した。しかし、そのような構成に限定されない。例えば、搬送装置Ｍを、案内する軌道が設置されていない床部上を自由に走行可能な搬送車とした構成でもよい。また、搬送装置Ｍを、規定の搬送方向Ｘに沿って設置したベルトコンベヤ等のコンベヤ装置とした構成でもよい。 (5) In the above embodiment, a configuration in which the transport device M is a stacker crane 6 or a transport carriage 21 has been described as an example. However, it is not limited to such a configuration. For example, the transport device M may be configured as a transport vehicle capable of freely traveling on a floor portion on which a guide track is not installed. Further, the transport device M may be configured as a conveyor device such as a belt conveyor installed along the specified transport direction X.

（６）上記の実施形態では、物品搬送設備１００を、外部気流生成部１５を備えたクリーンルームＲに設置する構成を例として説明した。しかし、そのような構成に限定されない。例えば、物品搬送設備１００を、外部気流生成部１５を備えないクリーンルームＲに設置する構成や、清浄化されてない空間に設置する構成でもよい。 (6) In the above embodiment, the configuration in which the article transport facility 100 is installed in the clean room R provided with the external airflow generation unit 15 has been described as an example. However, it is not limited to such a configuration. For example, the article transport facility 100 may be installed in a clean room R not provided with an external airflow generating unit 15, or may be installed in an uncleaned space.

（７）上記の実施形態では、複数の整風板の夫々における斜め上方を向く面を、第２方向視で、斜め上方側に膨出する形状とする構成を例として説明した。しかし、そのような構成に限定されない。例えば、複数の整風板の夫々における斜め上方を向く面を、第２方向視で、平坦な形状や斜め下方側に凹入する形状とする構成でもよく、 (7) In the above-described embodiment, the configuration in which the surface of each of the plurality of air conditioning plates facing diagonally upward is formed to bulge diagonally upward in the second direction as an example. However, it is not limited to such a configuration. For example, the surface of each of the plurality of air conditioning plates facing diagonally upward may be formed to have a flat shape or a shape recessed diagonally downward in the second direction.

（８）上記の実施形態では、気体を、空気とする構成を例に説明した。しかし、そのような構成に限定されない。例えば、気体を、窒素の含有率が高い不活性気体等としてもよい。 (8) In the above embodiment, the configuration in which the gas is air has been described as an example. However, it is not limited to such a configuration. For example, the gas may be an inert gas having a high nitrogen content.

（９）なお、上述した各実施形態で開示された構成は、矛盾が生じない限り、他の実施形態で開示された構成と組み合わせて適用することも可能である。その他の構成に関しても、本明細書において開示された実施形態は全ての点で単なる例示に過ぎない。従って、本開示の趣旨を逸脱しない範囲内で、適宜、種々の改変を行うことが可能である。 (9) The configurations disclosed in each of the above-described embodiments can be applied in combination with the configurations disclosed in other embodiments as long as there is no contradiction. With respect to other configurations, the embodiments disclosed herein are merely exemplary in all respects. Therefore, various modifications can be made as appropriate without departing from the gist of the present disclosure.

６．上記実施形態の概要
以下、上記において説明した物品搬送設備の概要について説明する。 6. Outline of the above-described embodiment The outline of the article transport facility described above will be described below.

物品搬送設備は、物品を搬送する搬送装置を備え、
前記搬送装置が設置されている領域を囲む壁体と、前記壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備え、前記壁体は、水平方向に沿う方向である第１方向に沿って前記内部空間と前記壁体の外部の空間である外部空間とを連通する通気部を備え、前記通気部は、上下方向に並ぶ複数の整風板を備え、前記第１方向における前記外部空間に対して前記内部空間が存在する方向を内部側、その反対側を外部側として、複数の前記整風板の夫々は、前記内部側の端部である内端部が前記外部側の端部である外端部より上方側に位置するように傾斜した傾斜姿勢で設置されている。 The article transport facility is equipped with a transport device for transporting articles.
The wall body includes a wall body surrounding the area where the transport device is installed, and an internal air flow generating unit that generates an air flow from above to downward in the internal space surrounded by the wall body, and the wall body is horizontal. The ventilation portion includes a ventilation portion that communicates the internal space and the external space, which is the space outside the wall body, along the first direction, which is a direction along the direction, and the ventilation portion includes a plurality of air conditioning plates arranged in the vertical direction. The direction in which the internal space exists with respect to the external space in the first direction is the internal side, and the opposite side is the external side, and each of the plurality of air conditioning plates is an end portion of the internal side. It is installed in an inclined posture so that the end portion is located above the outer end portion, which is the end portion on the outer side.

本構成によれば、内部気流生成部によって生成された気流によって、内部空間の気体を上方から下方に向かって流動させることができ、その流動させた気体の一部又は全部を通気部から外部空間に排気させることができる。そして、このように、内部空間に気流を生成することで、搬送装置によって物品を搬送した場合に塵埃が発生したとしても、その塵埃は気体と共に下方に流動して通気部から外部空間に排出されるため、内部空間において塵埃が飛散することを防止できる。 According to this configuration, the airflow generated by the internal airflow generator allows the gas in the internal space to flow from above to downward, and part or all of the flowed gas is moved from the ventilation part to the external space. Can be exhausted. Then, by generating an air flow in the internal space in this way, even if dust is generated when the article is transported by the transport device, the dust flows downward together with the gas and is discharged from the ventilation portion to the external space. Therefore, it is possible to prevent dust from scattering in the internal space.

また、通気部に備えられている複数の整風板の夫々は、内端部が外端部より上方側に位置するように傾斜した傾斜姿勢となっている。そのため、上方から下方に向かって流動した内部空間の気体は、傾斜姿勢の整風板の上面によって案内されて斜め下方に向けて流動する。そのため、通気部において、内部空間から外部空間に向けて気流が生じやすくなる。通気部を通して外部空間から内部空間に侵入しようとする気体は、この気流によって妨げられる。よって、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 In addition, each of the plurality of air conditioning plates provided in the ventilation portion is in an inclined posture in which the inner end portion is located above the outer end portion. Therefore, the gas in the internal space that has flowed from the upper side to the lower side is guided by the upper surface of the air conditioning plate in the inclined posture and flows diagonally downward. Therefore, in the ventilation portion, an air flow is likely to be generated from the internal space to the external space. The gas that tries to enter the internal space from the external space through the ventilation part is blocked by this air flow. Therefore, it is possible to prevent the gas in the external space from entering the internal space through the ventilation portion.

ここで、上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、複数の前記整風板の夫々は、前記第２方向に沿う揺動軸心周りに揺動可能に構成され、複数の前記揺動軸心が、前記第２方向に沿う第２方向視で上下方向に沿って一列に並ぶように配置されていると好適である。 Here, with the direction orthogonal to the first direction as the second direction in the vertical direction along the vertical direction, each of the plurality of air conditioning plates swings around the swing axis along the second direction. It is preferable that the plurality of swing axes are arranged so as to be arranged in a row along the vertical direction in a second direction view along the second direction.

本構成によれば、複数の整風板の夫々を揺動軸心周りに揺動させることで、複数の整風板同士の隙間の大きさを変更することができ、通気部の通気量を調節することができる。また、揺動軸心が上下方向に沿って一列に並んでいるので、整風板の傾斜角度を変更した場合に、上下方向に隣接する他の整風板と干渉し難い。そのため、複数の整風板のそれぞれの傾斜角度の変更範囲を大きくすることができ、複数の整風板同士の隙間の大きさの調整範囲を広くすることが可能となっている。 According to this configuration, by swinging each of the plurality of air conditioning plates around the swing axis, the size of the gap between the plurality of air conditioning plates can be changed, and the ventilation amount of the ventilation portion can be adjusted. be able to. Further, since the swing axes are lined up in a row along the vertical direction, it is difficult to interfere with other air conditioning plates adjacent in the vertical direction when the inclination angle of the air conditioning plate is changed. Therefore, it is possible to increase the range of change of the inclination angle of each of the plurality of air conditioning plates, and it is possible to widen the adjustment range of the size of the gap between the plurality of air conditioning plates.

また、前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、前記壁体は、当該壁体における前記搬送方向の端部に前記横幅方向に沿って設置された端壁部を備え、前記端壁部は、前記通気部を備えていると好適である。 Further, the transport device is configured to transport the article along a predetermined transport direction, and the wall body has a width direction in a direction orthogonal to the transport direction in a vertical direction along the vertical direction. It is preferable that the end wall portion of the wall body in the transport direction is provided with an end wall portion installed along the width direction, and the end wall portion is provided with the ventilation portion.

通常、端壁部から離れる方向に物品を搬送する場合に、物品と壁端部との間が陰圧となる。しかし、本構成によれば、傾斜姿勢の整風板によって通気部において内部空間から外部空間への排気が促進されているため、端壁部に備えられた通気部を通して外部空間から内部空間に気体が侵入し難くすることができる。 Normally, when the article is transported in a direction away from the end wall portion, a negative pressure is applied between the article and the wall end portion. However, according to this configuration, since the exhaust from the internal space to the external space is promoted in the ventilation portion by the air conditioning plate in the inclined posture, gas is discharged from the external space to the internal space through the ventilation portion provided in the end wall portion. It can be difficult to invade.

また、前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、前記壁体は、前記搬送装置を挟んで前記横幅方向の両側に設置された側壁部を備え、前記側壁部は、前記通気部を備えていると好適である。 Further, the transport device is configured to transport the article along a specified transport direction, and the wall body has a width direction in which a direction orthogonal to the transport direction is defined as a vertical direction along the vertical direction. It is preferable that the side wall portions are provided on both sides of the transport device in the lateral width direction, and the side wall portions are provided with the ventilation portion.

通常、側壁部の所定の位置から離れる方向に走行する場合に、物品と側壁部の所定の位置との間が陰圧となる。本構成によれば、傾斜姿勢の整風板によって通気部において内部空間から外部空間への排気が促進されているため、側壁部に備えられた通気部を通して外部空間から内部空間に気体が侵入し難くすることができる。 Normally, when traveling in a direction away from a predetermined position on the side wall, a negative pressure is generated between the article and the predetermined position on the side wall. According to this configuration, since the exhaust from the internal space to the external space is promoted in the ventilation portion by the air conditioning plate in the inclined posture, it is difficult for gas to enter the internal space from the external space through the ventilation portion provided in the side wall portion. can do.

また、前記搬送装置及び前記壁体部は、前記外部空間に上方から下方に向かう気流を生成する外部気流生成部を備えたクリーンルームに設置されていると好適である。 Further, it is preferable that the transport device and the wall body portion are installed in a clean room provided with an external airflow generating portion that generates an airflow from above to downward in the external space.

外部気流生成部が外部空間に気流を生成している場合、内部空間と外部空間との気圧差が小さくなり、外部空間の気体が通気部を通して内部空間に侵入し易くなる場合がある。しかし、本構成によれば、通気部に備えられている複数の整風板の夫々は、内端部が外端部より上方側に位置するように傾斜した傾斜姿勢となっている。そのため、上方から下方に向かって流動する外部空間の気体が、その流動方向を反転させて、傾斜姿勢の整風板の上面を斜め上方に向けて流動する可能性は低い。よって、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 When the external airflow generating unit generates an airflow in the external space, the pressure difference between the internal space and the external space becomes small, and the gas in the external space may easily enter the internal space through the ventilation unit. However, according to this configuration, each of the plurality of air conditioning plates provided in the ventilation portion is in an inclined posture in which the inner end portion is located above the outer end portion. Therefore, it is unlikely that the gas in the external space that flows from the upper side to the lower side reverses the flow direction and flows diagonally upward with the upper surface of the air conditioning plate in the inclined posture. Therefore, it is possible to prevent the gas in the external space from entering the internal space through the ventilation portion.

また、上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、複数の前記整風板の夫々における斜め上方側を向く面は、前記第２方向に沿う第２方向視で、前記斜め上方側に膨出する弧状に形成されていると好適である。 Further, in the vertical direction along the vertical direction, the direction orthogonal to the first direction is set as the second direction, and the surface of each of the plurality of wind control plates facing diagonally upward is the second along the second direction. In a directional view, it is preferable that the shape is formed in an arc shape that bulges diagonally upward.

本構成によれば、整風板の斜め上方側を向く面を弧状に形成したことで、傾斜姿勢の整風板の上面は、内端部では下方への傾斜が緩く、外端部では下方への傾斜が急になっている。そのため、上方から下方に向かって流動した内部空間の気体が、整風板の上面の内端部で受け止められ易く、外端部では下方へ向けて排気され易くなっている。従って、通気部において、内部空間から外部空間に向けて気流を生じさせ易く、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 According to this configuration, the surface of the air conditioning plate facing diagonally upward is formed in an arc shape, so that the upper surface of the air conditioning plate in an inclined posture has a gentle downward inclination at the inner end and a downward inclination at the outer end. The slope is steep. Therefore, the gas in the internal space that has flowed from the upper side to the lower side is easily received by the inner end portion of the upper surface of the air conditioning plate, and is easily exhausted downward at the outer end portion. Therefore, in the ventilation portion, it is easy to generate an air flow from the internal space to the external space, and it is possible to prevent the gas in the external space from entering the internal space through the ventilation portion.

本開示に係る技術は、物品を搬送する搬送装置を備えた物品搬送設備に利用することができる。 The technology according to the present disclosure can be used for an article transport facility provided with a transport device for transporting articles.

２：壁体
１１：端壁部
１２：側壁部
１３：通気部
１４：内部気流生成部
１５：外部気流生成部
１７：整風板
１７Ａ：内端部
１７Ｂ：外端部
Ａ：第１方向
Ａ１：内部側
Ａ２：外部側
Ｂ：第２方向
Ｍ：搬送装置
Ｐ：揺動軸心
Ｒ：クリーンルーム
Ｒ１：内部空間
Ｗ：物品
Ｘ：搬送方向
Ｙ：横幅方向
Ｚ：上下方向 2: Wall body 11: End wall part 12: Side wall part 13: Ventilation part 14: Internal airflow generation part 15: External airflow generation part 17: Air conditioning plate 17A: Inner end part 17B: Outer end part A: First direction A1: Internal side A2: External side B: Second direction M: Conveying device P: Swing axis R: Clean room R1: Internal space W: Article X: Conveying direction Y: Width direction Z: Vertical direction

Claims (6)

物品を搬送する搬送装置を備えた物品搬送設備であって、
前記搬送装置が設置されている領域を囲む壁体と、前記壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備え、
前記壁体は、水平方向に沿う方向である第１方向に沿って前記内部空間と前記壁体の外部の空間である外部空間とを連通する通気部を備え、
前記通気部は、上下方向に並ぶ複数の整風板を備え、
前記第１方向における前記外部空間に対して前記内部空間が存在する方向を内部側、その反対側を外部側として、
複数の前記整風板の夫々は、前記内部側の端部である内端部が前記外部側の端部である外端部より上方側に位置するように傾斜した傾斜姿勢で設置されている、物品搬送設備。 An article transport facility equipped with a transport device for transporting articles.
It is provided with a wall body surrounding the area where the transport device is installed, and an internal air flow generating unit that generates an air flow from above to downward in the internal space surrounded by the wall body.
The wall body includes a ventilation portion that connects the internal space and the external space, which is the space outside the wall body, along a first direction, which is a direction along the horizontal direction.
The ventilation section includes a plurality of air conditioning plates arranged in the vertical direction.
The direction in which the internal space exists with respect to the external space in the first direction is the internal side, and the opposite side is the external side.
Each of the plurality of baffle plates is installed in an inclined posture so that the inner end portion, which is the end portion on the inner side, is located above the outer end portion, which is the end portion on the outer side. Goods transport equipment. 上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、
複数の前記整風板の夫々は、前記第２方向に沿う揺動軸心周りに揺動可能に構成され、
複数の前記揺動軸心が、前記第２方向に沿う第２方向視で上下方向に沿って一列に並ぶように配置されている、請求項１に記載の物品搬送設備。 The direction orthogonal to the first direction in the vertical view along the vertical direction is set as the second direction.
Each of the plurality of baffle plates is configured to be swingable around a swing axis along the second direction.
The article transporting facility according to claim 1, wherein the plurality of swinging axes are arranged so as to be arranged in a row along the vertical direction in a second direction view along the second direction. 前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、
上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、
前記壁体は、当該壁体における前記搬送方向の端部に前記横幅方向に沿って設置された端壁部を備え、
前記端壁部は、前記通気部を備えている、請求項１又は２に記載の物品搬送設備。 The transport device is configured to transport articles along a specified transport direction.
The width direction is the direction orthogonal to the transport direction in the vertical direction along the vertical direction.
The wall body includes an end wall portion installed along the lateral width direction at an end portion of the wall body in the transport direction.
The article transport facility according to claim 1 or 2, wherein the end wall portion includes the ventilation portion. 前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、
上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、
前記壁体は、前記搬送装置を挟んで前記横幅方向の両側に設置された側壁部を備え、
前記側壁部は、前記通気部を備えている、請求項１から３のいずれか一項に記載の物品搬送設備。 The transport device is configured to transport articles along a specified transport direction.
The width direction is the direction orthogonal to the transport direction in the vertical direction along the vertical direction.
The wall body includes side wall portions installed on both sides in the lateral width direction with the transport device interposed therebetween.
The article transport facility according to any one of claims 1 to 3, wherein the side wall portion includes the ventilation portion. 前記搬送装置及び前記壁体は、前記外部空間に上方から下方に向かう気流を生成する外部気流生成部を備えたクリーンルームに設置されている、請求項１から３のいずれか一項に記載の物品搬送設備。 The article according to any one of claims 1 to 3, wherein the transport device and the wall body are installed in a clean room provided with an external airflow generating unit that generates an airflow from above to downward in the external space. Transport equipment. 上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、
複数の前記整風板の夫々における斜め上方側を向く面は、前記第２方向に沿う第２方向視で、前記斜め上方側に膨出する弧状に形成されている、請求項１から５のいずれか一項に記載の物品搬送設備。 The direction orthogonal to the first direction in the vertical view along the vertical direction is set as the second direction.
Any of claims 1 to 5, wherein the surface of each of the plurality of baffle plates facing diagonally upward is formed in an arc shape that bulges diagonally upward in the second direction along the second direction. The article transport equipment described in item 1.
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