JP7127573B2 - Goods transport equipment - Google Patents

Goods transport equipment Download PDF

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JP7127573B2
JP7127573B2 JP2019028519A JP2019028519A JP7127573B2 JP 7127573 B2 JP7127573 B2 JP 7127573B2 JP 2019028519 A JP2019028519 A JP 2019028519A JP 2019028519 A JP2019028519 A JP 2019028519A JP 7127573 B2 JP7127573 B2 JP 7127573B2
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wall
article
conveying
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air
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JP2020132367A (en
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秀基 福島
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Daifuku Co Ltd
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Daifuku Co Ltd
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Priority to KR1020200017482A priority patent/KR20200101852A/en
Priority to CN202010104805.6A priority patent/CN111591644B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)

Description

本発明は、物品を搬送する搬送装置を備えた物品搬送設備に関する。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an article conveying facility equipped with a conveying device for conveying articles.

このような物品搬送設備として、例えば、特開２０１８－０３９６５８号公報（特許文献１）に記載されたものが知られている。以下、背景技術の説明において、かっこ書きの符号又は名称は、先行技術文献における符号又は名称とする。この特許文献１に記載の物品搬送設備は、搬送装置（スタッカークレーン２）が設置されている領域を囲む壁体（Ｋ）と、壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備えている。壁体は、内部空間と壁体の外部の空間である外部空間とを水平方向に連通する通気部（排気部５２）を備えている。 As such an article transport facility, for example, one described in Japanese Patent Laying-Open No. 2018-039658 (Patent Document 1) is known. In the following description of the background art, the symbols or names in parentheses are the symbols or names in the prior art documents. The article transport equipment described in Patent Document 1 includes a wall (K) surrounding an area in which a transport device (stacker crane 2) is installed, and an air flow directed downward from above in an internal space surrounded by the wall. and an internal airflow generator that generates a The wall has a ventilation part (exhaust part 52) that horizontally communicates the internal space and the external space, which is the space outside the wall.

特許文献１の物品搬送設備では、内部気流生成部によって内部空間の気体を上方から下方に向かって流動させた後、その気体を通気部から外部空間に排気することができる。このように、内部空間に気流を生成することで、搬送装置によって物品が搬送した場合に塵埃が発生したとしても、その塵埃を気体と共に下方に流動させて通気部から外部空間に排出することができ、内部空間において塵埃が飛散しないようになっている。 In the article conveying equipment of Patent Literature 1, the gas in the internal space is made to flow from the top to the bottom by the internal airflow generating section, and then the gas can be exhausted to the external space from the ventilation section. By generating an airflow in the internal space in this way, even if dust is generated when an article is transported by the transport device, the dust can be flowed downward together with the gas and discharged from the vent to the external space. It is possible to prevent dust from scattering in the internal space.

特開２０１８－０３９６５８号公報JP 2018-039658 A

特許文献１の物品搬送設備では、搬送装置によって通気部から離れるように物品を搬送した場合、物品と通気部との間の領域は陰圧となり、この領域に気体が流れる傾向となる。これによって、外部空間の気体が、通気部を通して内部空間に侵入して物品と通気部との間の領域に流れようとするため、外部空間の気体が内部空間に侵入し易いという問題がある。 In the article conveying equipment of Patent Document 1, when an article is conveyed away from the ventilation section by the conveying device, the area between the article and the ventilation section becomes negative pressure, and gas tends to flow in this area. As a result, the gas in the external space intrudes into the internal space through the ventilation part and tries to flow into the area between the article and the ventilation part.

そこで、外部空間の気体が通気部を通して内部空間に侵入し難い物品搬送設備の実現が望まれる。 Therefore, it is desired to realize an article conveying facility in which the gas in the outer space is less likely to enter the inner space through the vent.

上記に鑑みた、物品搬送設備の特徴構成は、物品を搬送する搬送装置を備え、
前記搬送装置が設置されている領域を囲む壁体と、前記壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備え、前記壁体は、水平方向に沿う方向である第１方向に沿って前記内部空間と前記壁体の外部の空間である外部空間とを連通する通気部を備え、前記通気部は、上下方向に並ぶ複数の整風板を備え、前記第１方向における前記外部空間に対して前記内部空間が存在する方向を内部側、その反対側を外部側として、複数の前記整風板の夫々は、前記搬送装置の台車部と上下方向の位置が重複するように配置されていると共に、前記内部側の端部である内端部が前記外部側の端部である外端部より上方側に位置するように傾斜した傾斜姿勢で設置されている点にある。 In view of the above, the characteristic configuration of the article conveying equipment is equipped with a conveying device for conveying the article,
a wall surrounding an area in which the conveying device is installed; and an internal airflow generating section that generates an airflow directed downward in an internal space surrounded by the wall, wherein the wall is horizontal a ventilation part that communicates the internal space with an external space that is a space outside the wall body along a first direction that is the direction along the direction, and the ventilation part includes a plurality of air regulating plates that are arranged in the vertical direction; The direction in which the internal space exists with respect to the external space in the first direction is defined as an internal side, and the opposite side is defined as an external side, and each of the plurality of air regulating plates is vertically aligned with the carriage of the conveying device. are arranged so that the positions of overlap with each other, and are installed in an inclined posture so that the inner end, which is the end on the inner side, is positioned higher than the outer end, which is the end on the outer side in that it is

この特徴構成によれば、内部気流生成部によって生成された気流によって、内部空間の気体を上方から下方に向かって流動させることができ、その流動させた気体の一部又は全部を通気部から外部空間に排気させることができる。そして、このように、内部空間に気流を生成することで、搬送装置によって物品を搬送した場合に塵埃が発生したとしても、その塵埃は気体と共に下方に流動して通気部から外部空間に排出されるため、内部空間において塵埃が飛散することを防止できる。 According to this characteristic configuration, the gas in the internal space can be caused to flow downward from above by the airflow generated by the internal airflow generation section, and part or all of the flowed gas can be discharged from the ventilation section to the outside. It can be vented into space. By generating an air current in the internal space in this way, even if dust is generated when an article is transported by the transport device, the dust flows downward together with the gas and is discharged from the vent to the external space. Therefore, it is possible to prevent dust from scattering in the internal space.

また、通気部に備えられている複数の整風板の夫々は、内端部が外端部より上方側に位置するように傾斜した傾斜姿勢となっている。そのため、上方から下方に向かって流動した内部空間の気体は、傾斜姿勢の整風板の上面によって案内されて斜め下方に向けて流動する。そのため、通気部において、内部空間から外部空間に向けて気流が生じやすくなる。通気部を通して外部空間から内部空間に侵入しようとする気体は、この気流によって妨げられる。よって、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 In addition, each of the plurality of air regulating plates provided in the ventilation section has an inclined posture in which the inner end portion is positioned higher than the outer end portion. Therefore, the gas in the internal space, which has flowed downward from above, flows obliquely downward while being guided by the upper surface of the slanted air regulating plate. Therefore, in the ventilation part, an airflow is likely to occur from the internal space toward the external space. This airflow hinders gas from entering the internal space from the external space through the vent. Therefore, it is possible to make it difficult for the gas in the external space to enter the internal space through the vent.

第１の実施形態における物品搬送設備の平面図FIG. 2 is a plan view of the article transport equipment according to the first embodiment; 第１の実施形態における物品搬送設備の正面図The front view of the goods conveying equipment in 1st Embodiment 第１の実施形態における物品搬送設備の側面図The side view of the goods conveying equipment in 1st Embodiment 第１の実施形態における通気部の斜視図A perspective view of the ventilation part in the first embodiment 第１の実施形態における整風板の側面図The side view of the air regulating plate in the first embodiment. 第１の実施形態における緩傾斜姿勢の整風板を示す側面図FIG. 2 is a side view showing the air regulation plate in a gently inclined posture according to the first embodiment; 第１の実施形態における急傾斜姿勢の整風板を示す側面図The side view showing the air regulating plate in the steeply inclined posture in the first embodiment. 第２の実施形態における物品搬送設備の平面図Plan view of article transport equipment in the second embodiment 第２の実施形態における物品搬送設備の正面図Front view of article transport equipment in the second embodiment 第３の実施形態における物品搬送設備の正面図Front view of article transport equipment in the third embodiment 第４の実施形態における物品搬送設備の平面図Plan view of article transport equipment in the fourth embodiment 第４の実施形態における物品搬送設備の正面図Front view of article transport equipment in the fourth embodiment

１．第１の実施形態
物品搬送設備の第１の実施形態について図面に基づいて説明する。
図１及から図３に示すように、物品搬送設備１００は、自動倉庫１と、自動倉庫１が設置されている領域を囲む壁体２と、自動倉庫１及び壁体２が設置されているクリーンルームＲに上方から下方に向かう気流を生成する気流生成部３（図２及び図３参照）と、を備えている。 1. First Embodiment A first embodiment of article transport equipment will be described with reference to the drawings.
As shown in FIGS. 1 and 3, the article transport equipment 100 includes an automated warehouse 1, a wall 2 surrounding an area in which the automated warehouse 1 is installed, and the automated warehouse 1 and the wall 2. An airflow generation unit 3 (see FIGS. 2 and 3) that generates an airflow directed downward in the clean room R is provided.

自動倉庫１は、物品Ｗを搬送するスタッカークレーン６と、物品Ｗを収納する収納部７を複数備えた収納棚８と、を備えている。スタッカークレーン６は、走行経路Ｌを往復走行することで、規定の搬送方向Ｘに沿って物品Ｗを搬送する。収納棚８は、一部の収納部７を、処理装置Ｅに対して物品Ｗを搬入出するための搬入出部９として用いている。尚、スタッカークレーン６が、物品搬送設備１００に備えられて物品Ｗを搬送する搬送装置Ｍに相当する。 The automated warehouse 1 includes a stacker crane 6 for transporting articles W, and a storage shelf 8 having a plurality of storage units 7 for storing the articles W. The stacker crane 6 transports the articles W along the prescribed transport direction X by reciprocating on the transport path L. As shown in FIG. The storage shelf 8 uses a part of the storage section 7 as a loading/unloading section 9 for loading/unloading the article W to/from the processing apparatus E. As shown in FIG. Note that the stacker crane 6 corresponds to the conveying device M that is provided in the article conveying facility 100 and conveys the articles W. As shown in FIG.

スタッカークレーン６は、物品Ｗを収納部７から搬入出部９に搬送すると共に物品Ｗを搬入出部９から収納部７に搬送する。処理装置Ｅは、物品Ｗを搬送する搬送部（図示せず）を備えている。処理装置Ｅは、搬送部によって物品Ｗを搬入出部９から処理装置Ｅ内に搬送すると共に物品Ｗを処理装置Ｅ内から搬入出部９に搬送する。本実施形態では、複数枚の板状体を収容した容器を物品Ｗとしている。処理装置Ｅは、板状体を使用して処理を行う装置である。例えば、処理装置Ｅは半導体処理装置であり、板状体は当該処理装置Ｅで用いられるフォトマスクである。 The stacker crane 6 conveys the articles W from the storage section 7 to the loading/unloading section 9 and also transports the articles W from the loading/unloading section 9 to the storage section 7 . The processing apparatus E includes a transport section (not shown) that transports the articles W. As shown in FIG. The processing apparatus E transports the article W from the loading/unloading section 9 into the processing apparatus E and transports the article W from the processing apparatus E to the loading/unloading section 9 by the transport section. In this embodiment, the article W is a container containing a plurality of plate-shaped bodies. The processing apparatus E is an apparatus that performs processing using a plate-like body. For example, the processing apparatus E is a semiconductor processing apparatus, and the plate-like body is a photomask used in the processing apparatus E. FIG.

図１に示すように、壁体２は、スタッカークレーン６が設置されている領域を囲んでいる。本実施形態では、壁体２は、スタッカークレーン６が設置されている領域に加えて、収納棚８が設置されている領域を囲んでいる。つまり、壁体２は、自動倉庫１が設置されている領域を囲んでいる。壁体２は、クリーンルームＲを、壁体２によって囲まれている内部空間Ｒ１と、壁体２の外部の空間である外部空間Ｒ２と、に仕切っている。 As shown in FIG. 1, the wall 2 surrounds the area where the stacker crane 6 is installed. In this embodiment, the wall 2 surrounds the area where the storage rack 8 is installed in addition to the area where the stacker crane 6 is installed. In other words, the wall 2 surrounds the area where the automated warehouse 1 is installed. The wall 2 partitions the clean room R into an internal space R1 surrounded by the wall 2 and an external space R2 that is a space outside the wall 2 .

上下方向Ｚに沿う上下方向視で搬送方向Ｘに対して直交する方向を横幅方向Ｙとして、壁体２は、当該壁体２における搬送方向Ｘの端部に、横幅方向Ｙに沿って設置された端壁部１１を備えている。端壁部１１は、スタッカークレーン６を挟んで搬送方向Ｘの両側に設置されている。また、壁体２は、当該壁体２における横幅方向Ｙの端部に、搬送方向Ｘに沿って設置された側壁部１２を備えている。側壁部１２は、スタッカークレーン６を挟んで横幅方向Ｙの両側に設置されている。本実施形態では、端壁部１１は、自動倉庫１（スタッカークレーン６及び収納棚８）を挟んで搬送方向Ｘの両側に設置され、側壁部１２は、自動倉庫１（スタッカークレーン６及び収納棚８）を挟んで横幅方向Ｙの両側に設置されている。 The wall body 2 is installed along the width direction Y at the end of the wall body 2 in the transport direction X, with the direction perpendicular to the transport direction X as viewed in the vertical direction Z being the width direction Y. end wall 11. The end walls 11 are installed on both sides in the transport direction X with the stacker crane 6 interposed therebetween. Further, the wall 2 has a side wall portion 12 installed along the transport direction X at the end portion of the wall 2 in the width direction Y. As shown in FIG. The side wall portions 12 are installed on both sides in the width direction Y with the stacker crane 6 interposed therebetween. In this embodiment, the end walls 11 are installed on both sides of the automated warehouse 1 (the stacker crane 6 and the storage rack 8) in the transport direction X, and the side walls 12 are installed on both sides of the automated warehouse 1 (the stacker crane 6 and the storage rack 8). 8) on both sides in the width direction Y.

図４に示すように、壁体２は、水平方向に沿う第１方向Ａに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する通気部１３を備えている。本実施形態では、通気部１３は、壁体２の下部に設置されている。詳しくは、通気部１３は、壁体２の下端（下床部Ｆ１の上面）から上方側に規定高さまでの範囲に設置されている。本例では、通気部１３は、後述する下床部Ｆ１と上床部Ｆ２との間の床下空間Ｒ３に面する高さ方向の領域の全体に亘って設置されている。また、通気部１３は、端壁部１１における横幅方向Ｙの全域に亘って設置され、側壁部１２における搬送方向Ｘの全域に亘って設置されている。 As shown in FIG. 4, the wall 2 includes a ventilation section 13 that communicates the internal space R1 and the external space R2 along a first horizontal direction A. As shown in FIG. In this embodiment, the ventilation part 13 is installed in the lower part of the wall 2 . Specifically, the ventilation section 13 is installed in a range from the lower end of the wall 2 (upper surface of the lower floor section F1) to a specified height upward. In this example, the ventilation part 13 is installed over the entire area in the height direction facing the underfloor space R3 between the lower floor part F1 and the upper floor part F2, which will be described later. In addition, the ventilation part 13 is installed over the entire width direction Y in the end wall part 11 , and is installed over the entire transport direction X in the side wall part 12 .

図２及び図３に示すように、本実施形態では、端壁部１１と側壁部１２との双方に通気部１３を備えている。端壁部１１に備えられている通気部１３は、第１方向Ａが搬送方向Ｘとなっており、搬送方向Ｘに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する。側壁部１２に備えられている通気部１３は、第１方向Ａが横幅方向Ｙとなっており、横幅方向Ｙに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する。 As shown in FIGS. 2 and 3, in this embodiment, both the end wall portion 11 and the side wall portion 12 are provided with ventilation portions 13 . In the ventilation part 13 provided in the end wall part 11, the first direction A is the transport direction X, and along the transport direction X the internal space R1 and the external space R2 are communicated with each other. The first direction A of the ventilation part 13 provided in the side wall part 12 is the lateral width direction Y, and along the lateral width direction Y, the internal space R1 and the external space R2 are communicated with each other.

スタッカークレーン６、収納棚８、及び壁体２は、クリーンルームＲに設置されている。気流生成部３は、クリーンルームＲの天井部Ｃに設置されている。本実施形態では、気流生成部３は、ファンとフィルター部とを筐体に組込んでユニット化されたファンフィルタユニット（以下、ＦＦＵと略称する）を複数設置して構成されている。図２に示すように、クリーンルームＲの床部は、下床部Ｆ１と、下床部Ｆ１よりも上方に配設された上床部Ｆ２とにより構成されている。上床部Ｆ２は、グレーチング床であり、上下方向Ｚに貫通する通気孔が複数形成されている。この上床部Ｆ２は、外部空間Ｒ２に設置されている。下床部Ｆ１と上床部Ｆ２との間に床下空間Ｒ３が形成されており、この床下空間Ｒ３は、外部空間Ｒ２の一部である。下床部Ｆ１は、通気孔を有さない床であり、本実施形態では、無孔状のコンクリート等の床材によって構成されている。 The stacker crane 6, the storage shelf 8, and the wall 2 are installed in the clean room R. The airflow generator 3 is installed on the ceiling C of the clean room R. As shown in FIG. In the present embodiment, the airflow generating section 3 is configured by installing a plurality of fan filter units (hereinafter abbreviated as FFUs) that are unitized by incorporating a fan and a filter section into a housing. As shown in FIG. 2, the floor of the clean room R is composed of a lower floor portion F1 and an upper floor portion F2 arranged above the lower floor portion F1. The upper floor portion F2 is a grating floor, and is formed with a plurality of ventilation holes penetrating in the vertical direction Z. As shown in FIG. This upper floor portion F2 is installed in the external space R2. An underfloor space R3 is formed between the lower floor portion F1 and the upper floor portion F2, and the underfloor space R3 is part of the external space R2. The lower floor portion F1 is a floor that does not have ventilation holes, and in this embodiment, is made of a floor material such as non-porous concrete.

気流生成部３は、内部空間Ｒ１の上部及び外部空間Ｒ２の上部に設置されているＦＦＵによって構成されている。気流生成部３における内部空間Ｒ１の上部に設置されているＦＦＵによって、内部空間Ｒ１に上方から下方に向けて気流を生成する内部気流生成部１４が構成されている。また、気流生成部３における外部空間Ｒ２の上部に設置されているＦＦＵによって、外部空間Ｒ２に上方から下方に向けて気流を生成する外部気流生成部１５が構成されている。 The airflow generation unit 3 is composed of FFUs installed above the internal space R1 and above the external space R2. The FFU installed in the upper part of the internal space R1 in the airflow generating part 3 constitutes an internal airflow generating part 14 that generates an airflow in the internal space R1 from above to below. Further, the FFU installed in the upper part of the external space R2 in the airflow generating part 3 constitutes an external airflow generating part 15 that generates an airflow in the external space R2 from above to below.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気が、内部空間Ｒ１を上方から下方に流動する。その下方に流動した空気は、通気部１３から床下空間Ｒ３（外部空間Ｒ２の一部）に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気が、外部空間Ｒ２を上方から下方に流動し、上床部Ｆ２を通気して床下空間Ｒ３まで流動する。このように、気流生成部３は、クリーンルームＲに上方から下方に向かう気流を生成する。尚、壁体２は、天井部Ｃから下床部Ｆ１に亘って設置されている。 In the internal space R1, the air supplied to the upper portion of the internal space R1 by the internal airflow generating section 14 flows downward in the internal space R1. The air that has flowed downward is discharged from the ventilation section 13 to the underfloor space R3 (part of the external space R2). Further, in the external space R2, the air supplied to the upper portion of the external space R2 by the external airflow generating unit 15 flows downward in the external space R2, ventilates the upper floor portion F2, and flows to the underfloor space R3. In this manner, the airflow generator 3 generates an airflow in the clean room R from above to below. The wall 2 is installed from the ceiling portion C to the lower floor portion F1.

図４、図６及び図７に示すように、通気部１３は、上下方向Ｚに並ぶ複数の整風板１７を備えている。以下、複数の整風板１７について説明するが、第１方向Ａにおける外部空間Ｒ２に対して内部空間Ｒ１が存在する方向を内部側Ａ１、その反対側を外部側Ａ２として説明する。また、上下方向視で第１方向Ａに対して直交する方向を第２方向Ｂとして説明する。複数の整風板１７の夫々は、第２方向Ｂに沿う揺動軸心Ｐ周りに揺動可能に構成されている。複数の揺動軸心Ｐは、第２方向Ｂに沿う第２方向視で上下方向Ｚに沿って一列に並ぶように配置されている。 As shown in FIGS. 4, 6 and 7, the ventilation section 13 includes a plurality of air regulation plates 17 arranged in the vertical direction Z. As shown in FIGS. Hereinafter, the plurality of air regulating plates 17 will be described, and the direction in which the internal space R1 exists with respect to the external space R2 in the first direction A will be described as the inner side A1, and the opposite side will be described as the outer side A2. Also, a direction orthogonal to the first direction A when viewed from above and below will be described as a second direction B. As shown in FIG. Each of the plurality of air regulation plates 17 is configured to be swingable about a swing axis P along the second direction B. As shown in FIG. The plurality of swing axes P are arranged in a row along the up-down direction Z when viewed from the second direction B along the second direction B. As shown in FIG.

通気部１３は、複数の整風板１７の夫々を揺動軸心Ｐ周りに揺動させることで、通気量を調節可能に構成されている。説明を加えると、複数の整風板１７の夫々は、例えば、図５の実線及び図６に示すように、内部側Ａ１の端部である内端部１７Ａが外部側Ａ２の端部である外端部１７Ｂより上方側に位置するように傾斜した緩傾斜姿勢や、図５の仮想線及び図７に示すように、当該緩傾斜姿勢よりも内端部１７Ａと外端部１７Ｂとの上下方向Ｚの間隔を大きくした急傾斜姿勢等に姿勢を変化可能に構成されている。本実施形態では、緩傾斜姿勢と急傾斜姿勢とは、いずれも、内端部１７Ａが外端部１７Ｂより上方側に位置する傾斜姿勢である。また、複数の整風板１７の夫々は、上記のような緩傾斜姿勢と急傾斜姿勢との間の傾斜角度となる姿勢や、緩傾斜姿勢よりも傾斜角度が緩い姿勢等にも変化可能となっている。 The ventilation part 13 is configured to be able to adjust the amount of ventilation by swinging each of the plurality of air regulating plates 17 around the swing axis P. As shown in FIG. More specifically, each of the plurality of rectifying plates 17 has an inner end portion 17A, which is the end portion of the inner side A1, and an end portion of the outer side A2, as shown by the solid line in FIG. 5 and FIG. As shown in the phantom line of FIG. 5 and FIG. 7, the vertical direction of the inner end portion 17A and the outer end portion 17B from the gently inclined posture. It is configured so that the posture can be changed to a steeply inclined posture or the like with a large Z interval. In the present embodiment, both the gentle inclination posture and the steep inclination posture are inclination postures in which the inner end portion 17A is positioned above the outer end portion 17B. In addition, each of the plurality of air regulating plates 17 can be changed to a posture having a tilt angle between the gentle tilt posture and the steep tilt posture as described above, or to a posture having a gentler tilt angle than the gentle tilt posture. ing.

そして、複数の整風板１７の夫々を緩傾斜姿勢とした場合には、上下方向Ｚに隣接する整風板１７同士の間隔が広くなり、通気部１３の通気量が多くなる。これに対して、複数の整風板１７の夫々を急傾斜姿勢とした場合には、上下方向Ｚに隣接する整風板１７同士の間隔が狭くなり、通気部１３の通気量が少なくなる。 When each of the plurality of air conditioning plates 17 is in a gently inclined posture, the interval between the air conditioning plates 17 adjacent to each other in the vertical direction Z is widened, and the ventilation volume of the ventilation section 13 is increased. On the other hand, when each of the plurality of air conditioning plates 17 is in a steeply inclined posture, the interval between the air conditioning plates 17 adjacent in the vertical direction Z becomes narrower, and the ventilation amount of the ventilation section 13 decreases.

複数の整風板１７を揺動させる構成としては、複数の整風板１７を作業者の手作業で揺動させる構成でもよく、複数の整風板１７を電動モータ等の駆動装置の動作によって揺動させる構成でもよい。また、駆動装置の動作によって揺動させる場合、スタッカークレーン６の動作に連動して揺動させるように、制御装置によって駆動装置を制御するようにしてもよい。例えば、制御装置は、スタッカークレーン６が整風板１７に近づくようスタッカークレーン６を移動させる場合に、整風板１７を緩傾斜姿勢として内部空間Ｒ１の空気が外部空間Ｒ２に排気し易くし、スタッカークレーン６が整風板１７から遠ざかるようにスタッカークレーン６を移動させる場合に、整風板１７を急傾斜姿勢として外部空間Ｒ２の空気が内部空間Ｒ１に侵入し難くするように、駆動装置を制御するようにしてもよい。 As a configuration for swinging the plurality of air conditioning plates 17, the plurality of air conditioning plates 17 may be manually rocked by an operator, or the plurality of air conditioning plates 17 may be rocked by the operation of a driving device such as an electric motor. may be configured. Further, when swinging by the operation of the driving device, the driving device may be controlled by the control device so that the swinging is interlocked with the operation of the stacker crane 6 . For example, when the stacker crane 6 is moved so as to approach the air regulation plate 17, the control device makes the air regulation plate 17 in a slightly inclined posture so that the air in the internal space R1 can be easily discharged to the external space R2. When the stacker crane 6 is moved so that the stacker 6 moves away from the air regulation plate 17, the drive device is controlled so that the air regulation plate 17 is placed in a steeply inclined posture to make it difficult for the air in the external space R2 to enter the internal space R1. may

図５に示すように、複数の整風板１７における斜め上方を向く面は、第２方向視で、斜め上方に膨出する弧状に形成されている。本実施形態では、複数の整風板１７における斜め上方を向く面は、外方側斜め上方を向いており、第２方向視で、外方側斜め上方に膨出する弧状に形成されている。また、図示の例では、複数の整風板１７における斜め下方を向く面は、第２方向視で、斜め上方に凹入する弧状に形成されている。本実施形態では、複数の整風板１７における斜め下方を向く面は、内方側斜め下方を向いており、第２方向視で、外方側斜め上方に凹入する弧状に形成されている。また、本例では、第２方向視で内端部１７Ａと外端部１７Ｂとが並ぶ方向を長手方向として、複数の整風板１７の夫々は、内端部１７Ａから外端部１７Ｂに向かうに従って、第２方向視で長手方向に対して直交する方向の厚みが薄くなる形状に形成されている。 As shown in FIG. 5, the obliquely upward surfaces of the plurality of air regulation plates 17 are formed in an arcuate shape that bulges obliquely upward when viewed in the second direction. In the present embodiment, the obliquely upward surfaces of the plurality of air regulating plates 17 are obliquely outwardly oriented and formed in an arc shape that bulges outward obliquely upwardly when viewed in the second direction. Further, in the illustrated example, the surfaces of the plurality of air regulation plates 17 facing obliquely downward are formed in an arcuate shape that is recessed obliquely upward when viewed in the second direction. In the present embodiment, the obliquely downward surfaces of the plurality of air regulating plates 17 are obliquely downward inward and formed in an arc shape recessed obliquely upward outward when viewed in the second direction. Further, in this example, the direction in which the inner end portion 17A and the outer end portion 17B are aligned as viewed in the second direction is defined as the longitudinal direction, and each of the plurality of air regulating plates 17 extends from the inner end portion 17A toward the outer end portion 17B. , the thickness in the direction perpendicular to the longitudinal direction is reduced when viewed in the second direction.

図６及び図７に示すように、複数の整風板１７の夫々は、緩傾斜姿勢では、壁体２に対して第１方向Ａの両側に突出し、急傾斜姿勢では、壁体２の第１方向Ａの幅内に収まっている。また、本実施形態では、複数の整風板１７を壁体２に対して直接に取り付けているが、複数の整風板１７を枠材に取り付け、その枠材を壁体２に取り付けるようにしてもよい。この場合、複数の整風板１７の夫々を、緩傾斜姿勢では、枠材に対して第１方向Ａの両側に突出し、急傾斜姿勢では、枠材の第１方向Ａの幅内に収まるようにしてもよい。 As shown in FIGS. 6 and 7, each of the plurality of air regulating plates 17 protrudes to both sides of the wall 2 in the first direction A in the gently inclined posture, and protrudes from the first direction A of the wall 2 in the steeply inclined posture. It fits within the width in direction A. Further, in the present embodiment, the plurality of air regulation plates 17 are directly attached to the wall 2, but the plurality of air regulation plates 17 may be attached to a frame member and the frame member may be attached to the wall member 2. good. In this case, each of the plurality of air regulating plates 17 protrudes on both sides of the frame member in the first direction A in the gently inclined posture, and fits within the width of the frame member in the first direction A in the steeply inclined posture. may

２．第２の実施形態
次に、物品搬送設備の第２の実施形態について、図８及び図９を用いて説明する。本実施形態では、搬送装置Ｍを、自動倉庫１の外側において天井近くを走行する搬送台車２１とした点で、上記第１の実施形態とは異なる。以下では、本実施形態に係る物品搬送設備１００について、上記第１の実施形態との相違点を中心として説明する。なお、特に説明しない点については、上記第１の実施形態と同様とする。 2. Second Embodiment Next, a second embodiment of the article conveying facility will be described with reference to FIGS. 8 and 9. FIG. The present embodiment differs from the first embodiment in that the transport device M is a transport cart 21 that travels near the ceiling outside the automated warehouse 1 . The article transport facility 100 according to the present embodiment will be described below, focusing on differences from the first embodiment. Note that points that are not particularly described are the same as those in the first embodiment.

壁体２は、搬送装置Ｍとしての搬送台車２１が設置されている領域を囲んでいる。壁体２は、天井部Ｃに吊り下げられた状態で設置されており、前述したような上床部Ｆ２（図示せず）に対して上方に離間している。壁体２は、端壁部１１と側壁部１２とに加えて、搬送台車２１が設置されている領域の下方側を囲う下壁部２２を備えている。この下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する連通部２３を備えている。連通部２３には、ＦＦＵが備えられている。 The wall 2 surrounds an area in which a carriage 21 as a transport device M is installed. The wall body 2 is installed in a state of being suspended from the ceiling portion C, and is spaced upward from the above-described upper floor portion F2 (not shown). In addition to the end walls 11 and the side walls 12, the wall 2 includes a lower wall 22 that surrounds the lower side of the area where the carriage 21 is installed. The lower wall portion 22 includes a communication portion 23 that communicates the internal space R1 and the external space R2 along the vertical direction Z. As shown in FIG. The communicating portion 23 is provided with an FFU.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気は、内部空間Ｒ１を上方から下方に流動した後、通気部１３から外部空間Ｒ２に向けて側方に排気されると共に連通部２３から外部空間Ｒ２に向けて下方に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気は、外部空間Ｒ２を上方から下方に流動する。 In the internal space R1, the air supplied to the upper portion of the internal space R1 by the internal airflow generating section 14 flows downward in the internal space R1, and then is discharged sideways from the ventilation section 13 toward the external space R2. At the same time, the air is exhausted downward from the communicating portion 23 toward the external space R2. Further, in the external space R2, the air supplied to the upper portion of the external space R2 by the external airflow generating section 15 flows downward in the external space R2.

３．第３の実施形態
次に、物品搬送設備の第３の実施形態について、図１０を用いて説明する。本実施形態では、搬送装置Ｍを、自動倉庫１の外側において床部近くを走行する搬送台車２１とした点で、上記第１の実施形態とは異なる。以下では、本実施形態に係る物品搬送設備１００について、上記第１の実施形態との相違点を中心として説明する。なお、特に説明しない点については、上記第１の実施形態と同様とする。 3. 3rd Embodiment Next, 3rd Embodiment of article|item conveyance equipment is described using FIG. The present embodiment differs from the first embodiment in that the transport device M is a transport cart 21 that travels near the floor outside the automated warehouse 1 . The article transport facility 100 according to the present embodiment will be described below, focusing on differences from the first embodiment. Note that points that are not particularly described are the same as those in the first embodiment.

壁体２は、搬送装置Ｍとしての搬送台車２１が設置されている領域を囲んでいる。壁体２は、下床部Ｆ１上に設置されている。壁体２は、下床部Ｆ１に対して上方に離間していると共に、前述したような天井部Ｃ（図示せず）に対して下方に離間している。壁体２は、端壁部１１と側壁部１２とに加えて、搬送台車２１が設置されている領域の下方側を囲う下壁部２２と、搬送台車２１が設置されている領域の上方側を囲う上壁部２４と、を備えている。下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する連通部２３を備えている。上壁部２４には、複数のＦＦＵが設置されており、この複数のＦＦＵによって内部気流生成部１４が構成されている。尚、図示は省略するが、天井部Ｃに設置されているＦＦＵによって外部気流生成部１５が構成されている。下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する連通部２３を備えている。連通部２３には、ＦＦＵが備えられている。 The wall 2 surrounds an area in which a carriage 21 as a transport device M is installed. The wall body 2 is installed on the lower floor part F1. The wall 2 is spaced upward from the lower floor portion F1 and spaced downward from the above-described ceiling portion C (not shown). In addition to the end wall portion 11 and the side wall portion 12, the wall 2 includes a lower wall portion 22 surrounding the lower side of the area where the carrier 21 is installed, and the upper side of the area where the carrier 21 is installed. and an upper wall portion 24 surrounding the . The lower wall portion 22 includes a communication portion 23 that communicates the internal space R1 and the external space R2 along the vertical direction Z. As shown in FIG. A plurality of FFUs are installed on the upper wall portion 24, and the internal airflow generating portion 14 is configured by the plurality of FFUs. Although illustration is omitted, the FFU installed on the ceiling portion C constitutes the external airflow generating portion 15 . The lower wall portion 22 includes a communication portion 23 that communicates the internal space R1 and the external space R2 along the vertical direction Z. As shown in FIG. The communicating portion 23 is provided with an FFU.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気は、内部空間Ｒ１を上方から下方に流動した後、通気部１３から外部空間Ｒ２に向けて側方に排気されると共に連通部２３から外部空間Ｒ２に向けて下方に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気は、外部空間Ｒ２を上方から下方に流動する。このように、気流生成部３は、クリーンルームＲに上方から下方に向かう気流を生成する。 In the internal space R1, the air supplied to the upper portion of the internal space R1 by the internal airflow generating section 14 flows downward in the internal space R1, and then is discharged sideways from the ventilation section 13 toward the external space R2. At the same time, the air is exhausted downward from the communicating portion 23 toward the external space R2. Further, in the external space R2, the air supplied to the upper portion of the external space R2 by the external airflow generating section 15 flows downward in the external space R2. In this manner, the airflow generator 3 generates an airflow in the clean room R from above to below.

４．第４の実施形態
次に、物品搬送設備の第４の実施形態について、図１１及び図１２を用いて説明する。本実施形態では、搬送装置Ｍを、自動倉庫１の外側において天井近くを一方向に周回走行する搬送台車２１とした点で、上記第１の実施形態とは異なる。以下では、本実施形態に係る物品搬送設備１００について、上記第１の実施形態との相違点を中心として説明する。なお、特に説明しない点については、上記第１の実施形態と同様とする。 4. Fourth Embodiment Next, a fourth embodiment of the article conveying facility will be described with reference to FIGS. 11 and 12. FIG. This embodiment is different from the first embodiment in that the transport device M is a transport carriage 21 that circulates in one direction near the ceiling outside the automated warehouse 1 . The article transport facility 100 according to the present embodiment will be described below, focusing on differences from the first embodiment. Note that points that are not particularly described are the same as those in the first embodiment.

図１１に示すように、搬送装置Ｍとしての搬送台車２１は、走行経路Ｌを一方向に周回走行することで、規定の搬送方向Ｘに沿って物品Ｗを搬送する。壁体２は、搬送装置Ｍとしての搬送台車２１が設置されている領域を囲んでいる。壁体２は、天井部Ｃに吊り下げられた状態で設置されており、前述したような上床部Ｆ２（図示せず）に対して上方に離間している。 As shown in FIG. 11, the transport vehicle 21 as the transport device M transports the article W along the specified transport direction X by traveling around the travel route L in one direction. The wall 2 surrounds an area in which a carriage 21 as a transport device M is installed. The wall body 2 is installed in a state of being suspended from the ceiling portion C, and is spaced upward from the above-described upper floor portion F2 (not shown).

上下方向視で搬送方向Ｘに対して直交する方向を横幅方向Ｙとして、壁体２は、当該壁体２における横幅方向Ｙの端部に搬送方向Ｘに沿って設置された側壁部１２を備えている。側壁部１２は、搬送台車２１に対して横幅方向Ｙの外側に設置されている。 The wall 2 has a side wall portion 12 installed along the transport direction X at the end of the wall 2 in the lateral width direction Y, with the direction orthogonal to the transport direction X as viewed from the top and bottom direction being the width direction Y. ing. The side wall portion 12 is installed outside in the width direction Y with respect to the carriage 21 .

図１２に示すように、壁体２は、側壁部１２に加えて、搬送台車２１が設置されている領域の下方側を囲う下壁部２２を備えている。この下壁部２２は、上下方向Ｚに沿って内部空間Ｒ１と外部空間Ｒ２とを連通する第１連通部２６及び第２連通部２７を備えている。第１連通部２６は、上下方向視で搬送台車２１が走行する走行軌跡と重なる範囲内に形成されている。この第１連通部２６には、ＦＦＵが備えられている。第２連通部２７は、上下方向視で搬送台車２１の走行軌跡に囲まれる領域に形成されている。この第２連通部２７は、パンチングメタル等の多孔状の板状部材によって構成されている。 As shown in FIG. 12 , the wall 2 includes a side wall 12 and a lower wall 22 that surrounds the lower side of the area where the carriage 21 is installed. The lower wall portion 22 includes a first communication portion 26 and a second communication portion 27 that communicate the internal space R1 and the external space R2 along the vertical direction Z. As shown in FIG. The first communication portion 26 is formed within a range that overlaps with the travel locus along which the carriage 21 travels when viewed in the vertical direction. This first communication portion 26 is provided with an FFU. The second communication portion 27 is formed in a region surrounded by the travel locus of the carriage 21 when viewed in the vertical direction. The second communication portion 27 is made of a perforated plate member such as punching metal.

内部空間Ｒ１では、内部気流生成部１４によって内部空間Ｒ１の上部に供給された空気は、内部空間Ｒ１を上方から下方に流動した後、通気部１３から外部空間Ｒ２に向けて側方に排気されると共に第１連通部２６及び第２連通部２７から外部空間Ｒ２に向けて下方に排気される。また、外部空間Ｒ２では、外部気流生成部１５によって外部空間Ｒ２の上部に供給された空気は、外部空間Ｒ２を上方から下方に流動する。 In the internal space R1, the air supplied to the upper portion of the internal space R1 by the internal airflow generating section 14 flows downward in the internal space R1, and then is discharged sideways from the ventilation section 13 toward the external space R2. At the same time, the air is exhausted downward from the first communicating portion 26 and the second communicating portion 27 toward the external space R2. Further, in the external space R2, the air supplied to the upper portion of the external space R2 by the external airflow generating section 15 flows downward in the external space R2.

５．その他の実施形態
次に、物品搬送設備１００のその他の実施形態について説明する。 5. Other Embodiments Next, other embodiments of the article transport facility 100 will be described.

（１）上記の実施形態では、複数の整風板１７の夫々が揺動軸心Ｐ周りに揺動可能とされた構成を例として説明した。しかし、そのような構成に限定されない。例えば、複数の整風板１７の夫々の傾斜角度が固定された構成でもよい。この場合の傾斜角度は、例えば、上述した緩傾斜姿勢（図５の実線及び図６に示す姿勢）に対応する角度で固定されていてもよい。 (1) In the above embodiment, the configuration in which each of the plurality of air regulating plates 17 can swing around the swing axis P has been described as an example. However, it is not limited to such a configuration. For example, a configuration in which the inclination angles of the plurality of air regulation plates 17 are fixed may be employed. The tilt angle in this case may be fixed at an angle corresponding to, for example, the gentle tilt posture described above (the solid line in FIG. 5 and the posture shown in FIG. 6).

（２）上記の実施形態では、複数の揺動軸心Ｐが、第２方向Ｂに沿う第２方向視で上下方向Ｚに沿って一列に並ぶように配置されている構成を例として説明した。しかし、そのような構成に限定されない。例えば、複数の揺動軸心Ｐが、上下方向Ｚに対して傾斜した方向、又は、水平方向に沿って一列に並ぶように配置されていてもよい。或いは、複数の揺動軸心Ｐが、第２方向視で波形状の複数の頂点部にそれぞれ配置されていてもよい。これらの配置は、複数の整風板１７が揺動軸心Ｐを有しない固定構造とされる場合でも同様である。 (2) In the above-described embodiment, a configuration in which a plurality of swing axes P are arranged in a row along the vertical direction Z when viewed from the second direction B along the second direction B has been described as an example. . However, it is not limited to such a configuration. For example, a plurality of swing axes P may be arranged in a row in a direction inclined with respect to the vertical direction Z or in a horizontal direction. Alternatively, a plurality of swing axes P may be arranged at a plurality of vertex portions of the waveform when viewed in the second direction. These arrangements are the same even when the plurality of air regulating plates 17 have a fixed structure that does not have the pivot axis P. As shown in FIG.

（３）上記の第１から第３の実施形態では、端壁部１１と側壁部１２との夫々に通気部１３を備える構成を例として説明した。しかし、そのような構成に限定されない。例えば、端壁部１１と側壁部１２とのうちの何れか一方のみに通気部１３を備える構成としてもよい。 (3) In the first to third embodiments described above, the configuration in which the end wall portion 11 and the side wall portion 12 are each provided with the ventilation portion 13 has been described as an example. However, it is not limited to such a configuration. For example, only one of the end wall portion 11 and the side wall portion 12 may be provided with the ventilation portion 13 .

（４）上記の第１の実施形態では、側壁部１２を、収納棚８に対して横幅方向Ｙの外側に設置した。しかし、収納棚８における最下段の収納部７の下方において、側壁部１２を、収納棚８の横幅方向Ｙの幅内や、横幅方向Ｙにおける搬送装置Ｍと収納棚８との間等に設置する構成でもよい。また、上述のように、側壁部における、収納棚８の横幅方向Ｙの幅内や搬送装置Ｍと収納棚８との間等に設置した部分に、通気部１３を設けてもよい。 (4) In the above-described first embodiment, the side walls 12 are arranged outside in the width direction Y with respect to the storage shelf 8 . However, below the lowermost storage unit 7 in the storage shelf 8, the side wall part 12 is installed within the width in the width direction Y of the storage shelf 8 or between the transport device M and the storage shelf 8 in the width direction Y. It may be configured to Further, as described above, the ventilation part 13 may be provided in the side wall part within the width of the storage shelf 8 in the lateral width direction Y, or in the part installed between the conveying device M and the storage shelf 8 .

（５）上記の実施形態では、搬送装置Ｍを、スタッカークレーン６や搬送台車２１とする構成を例として説明した。しかし、そのような構成に限定されない。例えば、搬送装置Ｍを、案内する軌道が設置されていない床部上を自由に走行可能な搬送車とした構成でもよい。また、搬送装置Ｍを、規定の搬送方向Ｘに沿って設置したベルトコンベヤ等のコンベヤ装置とした構成でもよい。 (5) In the above embodiment, a configuration in which the transport device M is the stacker crane 6 or the transport vehicle 21 has been described as an example. However, it is not limited to such a configuration. For example, the transport device M may be configured as a transport vehicle that can freely travel on a floor on which a guide track is not installed. Further, the transport device M may be configured as a conveyor device such as a belt conveyor installed along the prescribed transport direction X. FIG.

（６）上記の実施形態では、物品搬送設備１００を、外部気流生成部１５を備えたクリーンルームＲに設置する構成を例として説明した。しかし、そのような構成に限定されない。例えば、物品搬送設備１００を、外部気流生成部１５を備えないクリーンルームＲに設置する構成や、清浄化されてない空間に設置する構成でもよい。 (6) In the above-described embodiment, the configuration in which the article transport equipment 100 is installed in the clean room R having the external airflow generating section 15 was described as an example. However, it is not limited to such a configuration. For example, the article transport equipment 100 may be installed in a clean room R that does not have the external airflow generator 15, or may be installed in an uncleaned space.

（７）上記の実施形態では、複数の整風板の夫々における斜め上方を向く面を、第２方向視で、斜め上方側に膨出する形状とする構成を例として説明した。しかし、そのような構成に限定されない。例えば、複数の整風板の夫々における斜め上方を向く面を、第２方向視で、平坦な形状や斜め下方側に凹入する形状とする構成でもよく、 (7) In the above embodiment, an example of a configuration in which the obliquely upward facing surface of each of the plurality of baffle plates bulges obliquely upward when viewed in the second direction has been described. However, it is not limited to such a configuration. For example, the obliquely upward facing surface of each of the plurality of air regulating plates may be configured to have a flat shape or a shape that is recessed obliquely downward when viewed in the second direction.

（８）上記の実施形態では、気体を、空気とする構成を例に説明した。しかし、そのような構成に限定されない。例えば、気体を、窒素の含有率が高い不活性気体等としてもよい。 (8) In the above embodiment, the example of the configuration in which air is used as the gas has been described. However, it is not limited to such a configuration. For example, the gas may be an inert gas with a high nitrogen content.

（９）なお、上述した各実施形態で開示された構成は、矛盾が生じない限り、他の実施形態で開示された構成と組み合わせて適用することも可能である。その他の構成に関しても、本明細書において開示された実施形態は全ての点で単なる例示に過ぎない。従って、本開示の趣旨を逸脱しない範囲内で、適宜、種々の改変を行うことが可能である。 (9) It should be noted that the configurations disclosed in the respective embodiments described above can also be applied in combination with configurations disclosed in other embodiments unless there is a contradiction. Regarding other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications can be made as appropriate without departing from the scope of the present disclosure.

６．上記実施形態の概要
以下、上記において説明した物品搬送設備の概要について説明する。 6. Outline of the above-described embodiment An outline of the article transport equipment described above will be described below.

物品搬送設備は、物品を搬送する搬送装置を備え、
前記搬送装置が設置されている領域を囲む壁体と、前記壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備え、前記壁体は、水平方向に沿う方向である第１方向に沿って前記内部空間と前記壁体の外部の空間である外部空間とを連通する通気部を備え、前記通気部は、上下方向に並ぶ複数の整風板を備え、前記第１方向における前記外部空間に対して前記内部空間が存在する方向を内部側、その反対側を外部側として、複数の前記整風板の夫々は、前記内部側の端部である内端部が前記外部側の端部である外端部より上方側に位置するように傾斜した傾斜姿勢で設置されている。 The article conveying equipment includes a conveying device for conveying articles,
a wall surrounding an area in which the conveying device is installed; and an internal airflow generating section that generates an airflow directed downward in an internal space surrounded by the wall, wherein the wall is horizontal a ventilation part that communicates the internal space with an external space that is a space outside the wall body along a first direction that is the direction along the direction, and the ventilation part includes a plurality of air regulating plates that are arranged in the vertical direction; The direction in which the internal space exists with respect to the external space in the first direction is defined as an internal side, and the opposite side is defined as an external side, and each of the plurality of air regulating plates has an internal end portion on the internal side. It is installed in an inclined posture so that the end portion is positioned above the outer end portion, which is the end portion on the outside side.

本構成によれば、内部気流生成部によって生成された気流によって、内部空間の気体を上方から下方に向かって流動させることができ、その流動させた気体の一部又は全部を通気部から外部空間に排気させることができる。そして、このように、内部空間に気流を生成することで、搬送装置によって物品を搬送した場合に塵埃が発生したとしても、その塵埃は気体と共に下方に流動して通気部から外部空間に排出されるため、内部空間において塵埃が飛散することを防止できる。 According to this configuration, the gas in the internal space can be caused to flow from the top to the bottom by the airflow generated by the internal airflow generation section, and part or all of the flowed gas can be discharged from the ventilation section to the external space. can be exhausted to By generating an air current in the internal space in this way, even if dust is generated when an article is transported by the transport device, the dust flows downward together with the gas and is discharged from the vent to the external space. Therefore, it is possible to prevent dust from scattering in the internal space.

また、通気部に備えられている複数の整風板の夫々は、内端部が外端部より上方側に位置するように傾斜した傾斜姿勢となっている。そのため、上方から下方に向かって流動した内部空間の気体は、傾斜姿勢の整風板の上面によって案内されて斜め下方に向けて流動する。そのため、通気部において、内部空間から外部空間に向けて気流が生じやすくなる。通気部を通して外部空間から内部空間に侵入しようとする気体は、この気流によって妨げられる。よって、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 In addition, each of the plurality of air regulating plates provided in the ventilation section has an inclined posture in which the inner end portion is positioned higher than the outer end portion. Therefore, the gas in the internal space, which has flowed downward from above, flows obliquely downward while being guided by the upper surface of the slanted air regulating plate. Therefore, in the ventilation part, an airflow is likely to occur from the internal space toward the external space. This airflow hinders gas from entering the internal space from the external space through the vent. Therefore, it is possible to make it difficult for the gas in the external space to enter the internal space through the vent.

ここで、上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、複数の前記整風板の夫々は、前記第２方向に沿う揺動軸心周りに揺動可能に構成され、複数の前記揺動軸心が、前記第２方向に沿う第２方向視で上下方向に沿って一列に並ぶように配置されていると好適である。 Here, a direction orthogonal to the first direction in a vertical view along the vertical direction is defined as a second direction, and each of the plurality of air regulating plates swings about a swing axis along the second direction. It is preferable that the plurality of swing axes are arranged in a row along the up-down direction when viewed from the second direction along the second direction.

本構成によれば、複数の整風板の夫々を揺動軸心周りに揺動させることで、複数の整風板同士の隙間の大きさを変更することができ、通気部の通気量を調節することができる。また、揺動軸心が上下方向に沿って一列に並んでいるので、整風板の傾斜角度を変更した場合に、上下方向に隣接する他の整風板と干渉し難い。そのため、複数の整風板のそれぞれの傾斜角度の変更範囲を大きくすることができ、複数の整風板同士の隙間の大きさの調整範囲を広くすることが可能となっている。 According to this configuration, by swinging each of the plurality of air regulating plates around the pivot axis, the size of the gap between the plurality of air regulating plates can be changed, and the air flow rate of the ventilation section can be adjusted. be able to. Further, since the swing axes are arranged in a line in the vertical direction, when the inclination angle of the air regulating plate is changed, it is difficult to interfere with other vertically adjacent air rectifying plates. Therefore, it is possible to widen the change range of the inclination angle of each of the plurality of air regulating plates, and widen the adjustment range of the size of the gap between the plurality of air rectifying plates.

また、前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、前記壁体は、当該壁体における前記搬送方向の端部に前記横幅方向に沿って設置された端壁部を備え、前記端壁部は、前記通気部を備えていると好適である。 In addition, the conveying device is configured to convey an article along a specified conveying direction, and the wall body is configured such that a direction orthogonal to the conveying direction in a vertical view along the vertical direction is defined as a lateral width direction, It is preferable that an end wall portion installed along the lateral width direction is provided at an end portion of the wall body in the conveying direction, and the end wall portion is provided with the ventilation portion.

通常、端壁部から離れる方向に物品を搬送する場合に、物品と壁端部との間が陰圧となる。しかし、本構成によれば、傾斜姿勢の整風板によって通気部において内部空間から外部空間への排気が促進されているため、端壁部に備えられた通気部を通して外部空間から内部空間に気体が侵入し難くすることができる。 Typically, when conveying an article away from the end wall, there is a negative pressure between the article and the wall edge. However, according to this configuration, since the slanted air regulating plate promotes the exhaust from the internal space to the external space in the ventilation section, the gas flows from the external space to the internal space through the ventilation section provided in the end wall. can make it harder to break in.

また、前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、前記壁体は、前記搬送装置を挟んで前記横幅方向の両側に設置された側壁部を備え、前記側壁部は、前記通気部を備えていると好適である。 In addition, the conveying device is configured to convey an article along a specified conveying direction, and the wall body is configured such that a direction orthogonal to the conveying direction in a vertical view along the vertical direction is defined as a lateral width direction, It is preferable that side wall portions are provided on both sides in the width direction with the conveying device interposed therebetween, and the side wall portions include the ventilation portion.

通常、側壁部の所定の位置から離れる方向に走行する場合に、物品と側壁部の所定の位置との間が陰圧となる。本構成によれば、傾斜姿勢の整風板によって通気部において内部空間から外部空間への排気が促進されているため、側壁部に備えられた通気部を通して外部空間から内部空間に気体が侵入し難くすることができる。 Normally, when traveling away from a predetermined position on the side wall, there is a negative pressure between the article and the predetermined position on the side wall. According to this configuration, since exhaust from the internal space to the external space is promoted in the ventilation section by the slanted air regulating plate, it is difficult for gas to enter the internal space from the external space through the ventilation section provided in the side wall. can do.

また、前記搬送装置及び前記壁体部は、前記外部空間に上方から下方に向かう気流を生成する外部気流生成部を備えたクリーンルームに設置されていると好適である。 Further, it is preferable that the conveying device and the wall section are installed in a clean room provided with an external airflow generating section that generates an airflow directed downward in the external space.

外部気流生成部が外部空間に気流を生成している場合、内部空間と外部空間との気圧差が小さくなり、外部空間の気体が通気部を通して内部空間に侵入し易くなる場合がある。しかし、本構成によれば、通気部に備えられている複数の整風板の夫々は、内端部が外端部より上方側に位置するように傾斜した傾斜姿勢となっている。そのため、上方から下方に向かって流動する外部空間の気体が、その流動方向を反転させて、傾斜姿勢の整風板の上面を斜め上方に向けて流動する可能性は低い。よって、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 When the external airflow generating section generates an airflow in the external space, the pressure difference between the internal space and the external space becomes small, and the gas in the external space may easily enter the internal space through the ventilation section. However, according to this configuration, each of the plurality of air regulating plates provided in the ventilation section has an inclined posture in which the inner end portion is positioned higher than the outer end portion. Therefore, it is unlikely that the gas in the external space, which flows downward from above, reverses its flow direction and flows obliquely upward on the upper surface of the rectifying plate in an inclined posture. Therefore, it is possible to make it difficult for the gas in the external space to enter the internal space through the vent.

また、上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、複数の前記整風板の夫々における斜め上方側を向く面は、前記第２方向に沿う第２方向視で、前記斜め上方側に膨出する弧状に形成されていると好適である。 Further, a direction orthogonal to the first direction in a vertical view along the vertical direction is defined as a second direction, and a surface of each of the plurality of air regulating plates facing obliquely upward is a second direction along the second direction. When viewed from the direction, it is preferably formed in an arc shape that bulges obliquely upward.

本構成によれば、整風板の斜め上方側を向く面を弧状に形成したことで、傾斜姿勢の整風板の上面は、内端部では下方への傾斜が緩く、外端部では下方への傾斜が急になっている。そのため、上方から下方に向かって流動した内部空間の気体が、整風板の上面の内端部で受け止められ易く、外端部では下方へ向けて排気され易くなっている。従って、通気部において、内部空間から外部空間に向けて気流を生じさせ易く、外部空間の気体が通気部を通って内部空間に侵入し難くすることができる。 According to this configuration, the surface of the air regulating plate facing obliquely upward is formed in an arc shape, so that the upper surface of the air rectifying plate in an inclined posture has a gentle downward inclination at the inner end and a downward inclination at the outer end. The slope is steep. Therefore, the gas in the internal space that flows downward from the top is easily received by the inner end of the upper surface of the air regulating plate, and is easily exhausted downward by the outer end. Therefore, in the ventilation part, it is easy to generate an air flow from the internal space toward the external space, and it is possible to make it difficult for the gas in the external space to enter the internal space through the ventilation part.

本開示に係る技術は、物品を搬送する搬送装置を備えた物品搬送設備に利用することができる。 The technology according to the present disclosure can be used in an article transport facility that includes a transport device that transports an article.

２：壁体
１１：端壁部
１２：側壁部
１３：通気部
１４：内部気流生成部
１５：外部気流生成部
１７：整風板
１７Ａ：内端部
１７Ｂ：外端部
Ａ：第１方向
Ａ１：内部側
Ａ２：外部側
Ｂ：第２方向
Ｍ：搬送装置
Ｐ：揺動軸心
Ｒ：クリーンルーム
Ｒ１：内部空間
Ｗ：物品
Ｘ：搬送方向
Ｙ：横幅方向
Ｚ：上下方向 2: wall 11: end wall 12: side wall 13: vent 14: internal airflow generator 15: external airflow generator 17: air rectifier 17A: inner end 17B: outer end A: first direction A1: Internal side A2: External side B: Second direction M: Conveyor P: Swing axis R: Clean room R1: Internal space W: Article X: Conveyance direction Y: Width direction Z: Vertical direction

Claims (8)

物品を搬送する搬送装置を備えた物品搬送設備であって、
前記搬送装置が設置されている領域を囲む壁体と、前記壁体によって囲まれている内部空間に上方から下方に向かう気流を生成する内部気流生成部と、を備え、
前記壁体は、水平方向に沿う方向である第１方向に沿って前記内部空間と前記壁体の外部の空間である外部空間とを連通する通気部を備え、
前記通気部は、上下方向に並ぶ複数の整風板を備え、
前記第１方向における前記外部空間に対して前記内部空間が存在する方向を内部側、その反対側を外部側として、
複数の前記整風板の夫々は、前記搬送装置の台車部と上下方向の位置が重複するように配置されていると共に、前記内部側の端部である内端部が前記外部側の端部である外端部より上方側に位置するように傾斜した傾斜姿勢で設置されている、物品搬送設備。 An article conveying facility comprising a conveying device for conveying articles,
a wall surrounding an area in which the conveying device is installed; and an internal airflow generating section that generates an airflow directed downward in the internal space surrounded by the wall,
The wall has a ventilation part that communicates the internal space with an external space that is a space outside the wall along a first direction that is a horizontal direction,
The ventilation section includes a plurality of air regulation plates arranged in the vertical direction,
With the direction in which the internal space exists with respect to the external space in the first direction as the internal side and the opposite side as the external side,
Each of the plurality of air regulating plates is arranged so as to overlap the carriage portion of the conveying device in the vertical direction, and the inner end, which is the end on the inner side, is the end on the outer side. Article conveying equipment installed in an inclined position inclined so as to be positioned above a certain outer end. 上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、
複数の前記整風板の夫々は、前記第２方向に沿う揺動軸心周りに揺動可能に構成され、
複数の前記揺動軸心が、前記第２方向に沿う第２方向視で上下方向に沿って一列に並ぶように配置されている、請求項１に記載の物品搬送設備。 The second direction is a direction orthogonal to the first direction in a vertical view along the vertical direction,
each of the plurality of air regulating plates is configured to be swingable about a swing axis along the second direction;
2. The article conveying equipment according to claim 1, wherein the plurality of swing axes are arranged in a row along the vertical direction when viewed from the second direction along the second direction. 前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、
上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、
前記壁体は、当該壁体における前記搬送方向の端部に前記横幅方向に沿って設置された端壁部を備え、
前記端壁部は、前記通気部を備えている、請求項１又は２に記載の物品搬送設備。 the conveying device is configured to convey an article along a defined conveying direction;
A direction orthogonal to the conveying direction in a vertical view along the vertical direction is defined as a width direction,
The wall includes an end wall portion installed along the lateral width direction at an end of the wall in the transport direction,
3. The article transport facility according to claim 1, wherein said end wall portion includes said ventilation portion. 前記搬送装置は、規定の搬送方向に沿って物品を搬送するように構成され、
上下方向に沿う上下方向視で前記搬送方向に対して直交する方向を横幅方向として、
前記壁体は、前記搬送装置を挟んで前記横幅方向の両側に設置された側壁部を備え、
前記側壁部は、前記通気部を備えている、請求項１から３のいずれか一項に記載の物品搬送設備。 the conveying device is configured to convey an article along a defined conveying direction;
A direction orthogonal to the conveying direction in a vertical view along the vertical direction is defined as a width direction,
The wall body includes side wall portions installed on both sides in the width direction across the conveying device,
4. The article conveying facility according to any one of claims 1 to 3, wherein said side wall portion includes said ventilation portion. 前記搬送装置及び前記壁体は、前記外部空間に上方から下方に向かう気流を生成する外部気流生成部を備えたクリーンルームに設置されている、請求項１から４のいずれか一項に記載の物品搬送設備。 5. The article according to any one of claims 1 to 4, wherein said conveying device and said wall are installed in a clean room provided with an external airflow generating section that generates an airflow directed downward in said external space. Conveyor equipment. 上下方向に沿う上下方向視で前記第１方向に対して直交する方向を第２方向として、
複数の前記整風板の夫々における斜め上方側を向く面は、前記第２方向に沿う第２方向視で、前記斜め上方側に膨出する弧状に形成されている、請求項１から５のいずれか一項に記載の物品搬送設備。 The second direction is a direction orthogonal to the first direction in a vertical view along the vertical direction,
6. The surface facing obliquely upward of each of the plurality of air regulating plates is formed in an arc shape that bulges obliquely upward when viewed in the second direction along the second direction. or article transportation equipment described in paragraph 1. 複数の前記整風板の夫々は、前記内端部が前記外端部より上方側に位置するように傾斜した緩傾斜姿勢と、前記緩傾斜姿勢よりも前記内端部と前記外端部との上下方向の間隔を大きくした急傾斜姿勢とに姿勢変更可能に構成され、 Each of the plurality of air regulating plates has a gently inclined posture in which the inner end portion is positioned higher than the outer end portion, and a position in which the inner end portion and the outer end portion are inclined relative to the gently inclined posture. It is configured so that the posture can be changed between a steeply inclined posture with a large vertical interval,
複数の前記整風板の夫々の姿勢を制御する制御装置を更に備え、 further comprising a control device for controlling the attitude of each of the plurality of air regulating plates;
前記制御装置は、前記台車部が前記整風板に近づく場合に、前記整風板を前記緩傾斜姿勢に姿勢変更し、前記台車部が前記整風板から遠ざかる場合に、前記整風板を前記急傾斜姿勢に姿勢変更する、請求項１から６のいずれか一項に記載の物品搬送設備。 The control device changes the posture of the air straightening plate to the gently inclined posture when the truck approaches the air straightening plate, and shifts the air straightening plate to the steeply inclined posture when the truck moves away from the air straightening plate. 7. The article transport facility according to any one of claims 1 to 6, wherein the attitude is changed to . 前記壁体は、上下方向に沿って前記内部空間と前記外部空間とを連通する連通部を更に備え、 The wall body further includes a communicating portion that communicates the internal space and the external space along the vertical direction,
前記搬送装置は、規定の搬送方向に沿って走行するように構成され、 The conveying device is configured to travel along a prescribed conveying direction,
前記連通部は、前記搬送装置よりも下側であって、上下方向視で前記搬送装置の走行軌跡と重複する位置に配置されている、請求項１から７のいずれか一項に記載の物品搬送設備。 8. The article according to any one of claims 1 to 7, wherein the communication portion is located below the conveying device and overlaps a travel locus of the conveying device when viewed in the vertical direction. Conveyor equipment.
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