JP2020129572A - 窒化物圧電体およびそれを用いたmemsデバイス - Google Patents
窒化物圧電体およびそれを用いたmemsデバイス Download PDFInfo
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- JP2020129572A JP2020129572A JP2019020273A JP2019020273A JP2020129572A JP 2020129572 A JP2020129572 A JP 2020129572A JP 2019020273 A JP2019020273 A JP 2019020273A JP 2019020273 A JP2019020273 A JP 2019020273A JP 2020129572 A JP2020129572 A JP 2020129572A
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- piezoelectric
- piezoelectric body
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- aluminum nitride
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Micromachines (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
(実施形態1)
Claims (7)
- 化学式Al1-XZrXNで表され、Xは0より大きく0.4より小さい範囲にあることを特徴とする圧電体。
- Xは0より大きく0.375以下の範囲にあることを特徴とする請求項1に記載の圧電体。
- Xは0より大きく0.3より小さい範囲にあることを特徴とする請求項1に記載の圧電体。
- 格子定数比c/aが1.25以上で1.60以下の範囲にあることを特徴とする請求項1に記載の圧電体。
- 格子定数比c/aが1.29以上で1.60以下の範囲にあることを特徴とする請求項2に記載の圧電体。
- 格子定数比c/aが1.42以上で1.60以下の範囲にあることを特徴とする請求項3に記載の圧電体。
- 請求項1〜6の何れか1項に記載の圧電体を用いたMEMSデバイス。
Priority Applications (2)
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JP2019020273A JP7097074B2 (ja) | 2019-02-07 | 2019-02-07 | 窒化物圧電体およびそれを用いたmemsデバイス |
PCT/JP2019/046057 WO2020161997A1 (ja) | 2019-02-07 | 2019-11-26 | 窒化物圧電体およびそれを用いたmemsデバイス |
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JP2019020273A JP7097074B2 (ja) | 2019-02-07 | 2019-02-07 | 窒化物圧電体およびそれを用いたmemsデバイス |
Publications (3)
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JP2020129572A true JP2020129572A (ja) | 2020-08-27 |
JP2020129572A5 JP2020129572A5 (ja) | 2021-09-30 |
JP7097074B2 JP7097074B2 (ja) | 2022-07-07 |
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JP (1) | JP7097074B2 (ja) |
WO (1) | WO2020161997A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013046111A (ja) * | 2011-08-22 | 2013-03-04 | Taiyo Yuden Co Ltd | 弾性波デバイス |
JP2013219743A (ja) * | 2012-03-15 | 2013-10-24 | Taiyo Yuden Co Ltd | 弾性波デバイス |
WO2016104004A1 (ja) * | 2014-12-26 | 2016-06-30 | 株式会社村田製作所 | 共振子の製造方法 |
JP2017147719A (ja) * | 2016-02-17 | 2017-08-24 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 音響共振器及びその製造方法 |
US20180278230A1 (en) * | 2017-03-23 | 2018-09-27 | Samsung Electro-Mechanics Co., Ltd. | Acoustic wave resonator |
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2019
- 2019-02-07 JP JP2019020273A patent/JP7097074B2/ja active Active
- 2019-11-26 WO PCT/JP2019/046057 patent/WO2020161997A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013046111A (ja) * | 2011-08-22 | 2013-03-04 | Taiyo Yuden Co Ltd | 弾性波デバイス |
JP2013219743A (ja) * | 2012-03-15 | 2013-10-24 | Taiyo Yuden Co Ltd | 弾性波デバイス |
WO2016104004A1 (ja) * | 2014-12-26 | 2016-06-30 | 株式会社村田製作所 | 共振子の製造方法 |
JP2017147719A (ja) * | 2016-02-17 | 2017-08-24 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 音響共振器及びその製造方法 |
US20180278230A1 (en) * | 2017-03-23 | 2018-09-27 | Samsung Electro-Mechanics Co., Ltd. | Acoustic wave resonator |
Also Published As
Publication number | Publication date |
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WO2020161997A1 (ja) | 2020-08-13 |
JP7097074B2 (ja) | 2022-07-07 |
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