JP2020128290A - Substrate conveyance device and control method of substrate conveyance device - Google Patents

Substrate conveyance device and control method of substrate conveyance device Download PDF

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JP2020128290A
JP2020128290A JP2019022313A JP2019022313A JP2020128290A JP 2020128290 A JP2020128290 A JP 2020128290A JP 2019022313 A JP2019022313 A JP 2019022313A JP 2019022313 A JP2019022313 A JP 2019022313A JP 2020128290 A JP2020128290 A JP 2020128290A
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mounting
cassette
detected
height
placing
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JP7271211B2 (en
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征二 唐木
Seiji Karaki
征二 唐木
近藤　仁
Hitoshi Kondo
仁 近藤
大希 竹村
Daiki TAKEMURA
大希 竹村
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Nidec Instruments Corp
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Nidec Sankyo Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

To provide a substrate conveyance device which can prevent falling of a glass substrate to be stored in a cassette and the cassette even when deviation occurs between the height of a first placement part and the height of a second placement part in which a cassette capable of storing a plurality of pieces of glass substrate is placed, while simplifying the constitution.SOLUTION: In a substrate conveyance device 1, before a cassette 3 is placed in a first placement part 5 and a second placement part 6, the first placement part 5 detected by a sensor 14 and a second placement part 6 detected by a sensor 17 are lowered by lifting mechanisms 7, 8 together by the same amount until the first placement part 5 is not detected by the sensor 14 and the second placement part 6 is not detected by the sensor 17. After that, the first placement part 5 and the second placement part 6 are lifted by the lifting mechanisms 7, 8, and the deviation between the timing at which the first placement part 5 is detected by the sensor 14 and the timing at which the second placement part 6 is detected by the sensor 17 is confirmed.SELECTED DRAWING: Figure 1

Description

本発明は、複数枚のガラス基板を収容可能なカセットからのガラス基板の搬出や、カセットへのガラス基板の搬入を行うための基板搬送装置に関する。また、本発明は、かかる基板搬送装置の制御方法に関する。 The present invention relates to a substrate transfer device for unloading glass substrates from a cassette that can accommodate a plurality of glass substrates and for loading glass substrates into the cassette. The present invention also relates to a method of controlling such a substrate transfer device.

従来、液晶表示装置用のガラス基板に対して所定の処理を行う処理装置にガラス基板を供給するための基板供給装置が知られている（たとえば、特許文献１参照）。特許文献１に記載の基板供給装置は、第１ユニットと第２ユニットと搬送ユニットとから構成されている。第１ユニットおよび第２ユニットは、ワイヤーカセットの右端部が載置される第１載置部と、ワイヤーカセットの左端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、ワイヤーカセットに収容されるガラス基板を１枚ずつ搬送するローラコンベヤとを備えている。 2. Description of the Related Art Conventionally, a substrate supply device for supplying a glass substrate to a processing device that performs a predetermined process on a glass substrate for a liquid crystal display device is known (for example, refer to Patent Document 1). The substrate supply device described in Patent Document 1 includes a first unit, a second unit, and a transport unit. The first unit and the second unit move up and down the first placement part on which the right end of the wire cassette is placed, the second placement part on which the left end of the wire cassette is placed, and the first placement part. It is provided with a first elevating mechanism for moving, a second elevating mechanism for elevating the second mounting portion, and a roller conveyor for conveying the glass substrates contained in the wire cassette one by one.

特許文献１に記載の基板供給装置では、第１ユニットおよび第２ユニットの調整時に、第１載置部の高さと第２載置部の高さとが一致するように、第１載置部および第２載置部の高さが調整される。また、特許文献１に記載の基板供給装置の使用時には、第１載置部および第２載置部が同じ方向へ同じ速度で同じ量だけ昇降するように第１昇降機構および第２昇降機構が制御される。 In the substrate supply device described in Patent Document 1, when adjusting the first unit and the second unit, the height of the first mounting portion and the height of the second mounting portion are matched so that the first mounting portion and the second mounting portion The height of the second mounting portion is adjusted. Further, when the substrate supply device described in Patent Document 1 is used, the first elevating mechanism and the second elevating mechanism are arranged so that the first placing part and the second placing part are moved up and down in the same direction at the same speed and by the same amount. Controlled.

特開２０１８−８３７００号公報JP, 2018-83700, A

特許文献１に記載の基板搬送装置では、何からの原因によって第１載置部の高さと第２載置部の高さとがずれることがある。第１載置部の高さと第２載置部の高さとがずれた状態で第１ユニットや第２ユニットを使用すると、第１載置部および第２載置部に載置されるワイヤーカセットが傾いて、ワイヤーカセットが落下したり、ワイヤーカセットに収容されるガラス基板が落下したりして、ガラス基板が破損するおそれがある。なお、第１載置部と第２載置部とを機械的に連結することで、第１載置部の高さと第２載置部の高さとのずれの発生を防止することも可能であるが、この場合には、第１ユニットや第２ユニットの構成が複雑になる。 In the substrate transfer device described in Patent Document 1, the height of the first mounting portion and the height of the second mounting portion may deviate from each other due to some cause. When the first unit and the second unit are used in a state where the height of the first placing part and the height of the second placing part are deviated, the wire cassette placed on the first placing part and the second placing part May tilt and the wire cassette may drop, or the glass substrate housed in the wire cassette may drop, damaging the glass substrate. By mechanically connecting the first placing section and the second placing section, it is possible to prevent the height of the first placing section from deviating from the height of the second placing section. However, in this case, the configurations of the first unit and the second unit are complicated.

そこで、本発明の課題は、構成を簡素化しつつ、複数枚のガラス基板を収容可能なカセットが載置される第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能な基板搬送装置を提供することにある。また、本発明の課題は、基板搬送装置の構成を簡素化しつつ、第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能となる基板搬送装置の制御方法を提供することにある。 Therefore, an object of the present invention is to simplify the configuration and to cause a deviation between the height of the first placing portion and the height of the second placing portion on which a cassette capable of accommodating a plurality of glass substrates is placed. Another object of the present invention is to provide a substrate transfer device capable of preventing the glass substrates housed in the cassette and the cassette from falling. Further, an object of the present invention is to simplify the configuration of the substrate transfer device and, even if the height of the first placing portion and the height of the second placing portion are deviated, a glass substrate or a cassette accommodated in the cassette. It is an object of the present invention to provide a method of controlling a substrate transfer device that can prevent the wafer from falling.

上記の課題を解決するため、本発明の基板搬送装置は、複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからのガラス基板の搬出またはカセットへのガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、カセットの第１方向の一端部が載置される第１載置部と、カセットの第１方向の他端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、第１載置部が上下方向の所定の位置にあることを検知するための第１センサと、第１センサによって第１載置部が検知されているときの第１載置部の上下方向の位置と上下方向において同じ位置に第２載置部があることを検知するための第２センサと、基板搬送装置の制御部とを備え、制御部は、第１載置部および第２載置部にカセットが載置される前に、第１センサで検知されている第１載置部および第２センサで検知されている第２載置部を、第１センサで第１載置部が検知されずかつ第２センサで第２載置部が検知されなくなるまで、第１昇降機構および第２昇降機構によって同じ方向に同じ量だけ一緒に下降または上昇させる第１動作と、第１動作で第１載置部および第２載置部を下降させる場合には、その後、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を上昇させて、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを確認し、第１動作で第１載置部および第２載置部を上昇させる場合には、その後、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を下降させて、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを確認する第２動作とを実行することを特徴とする。 In order to solve the above problems, the substrate transfer apparatus of the present invention is for carrying out a glass substrate from a cassette capable of accommodating a plurality of glass substrates in a state in which a plurality of glass substrates are spaced apart in the vertical direction or carrying in a glass substrate to the cassette. In a substrate transfer device for performing, when a predetermined direction orthogonal to the up-down direction is a first direction, a first mounting portion on which one end portion of the cassette in the first direction is mounted and a first direction of the cassette A second mounting part on which the other end of the first mounting part is mounted, a first lifting mechanism for lifting the first mounting part, a second lifting mechanism for lifting the second mounting part, and a first mounting part. The first sensor for detecting that it is located at a predetermined position in the up-down direction, and the same position in the up-down direction as the position in the up-down direction of the first placement part when the first placement part is detected by the first sensor A second sensor for detecting the presence of the second placement section at a position and a control section of the substrate transfer device are provided, and the control section places the cassette on the first placement section and the second placement section. Before the second mounting portion detected by the first sensor and the second mounting portion detected by the second sensor are not detected by the first sensor and the second mounting portion is detected by the second sensor. Until the sensor no longer detects the second placing part, the first raising and lowering mechanism and the second raising and lowering mechanism together lower or raise the same amount in the same direction, and the first placing part and the first placing part in the first action. In the case of lowering the second placing part, the first placing part and the second placing part are then raised by the first elevating mechanism and the second elevating mechanism, and the first placing part is moved by the first sensor. If the deviation between the timing of detection and the timing of detection of the second placement portion by the second sensor is confirmed, and if the first placement portion and the second placement portion are raised in the first operation, then, The first mounting part and the second mounting part are lowered by the first elevating mechanism and the second elevating mechanism, and the timing at which the first mounting part is detected by the first sensor and the second mounting part by the second sensor And a second operation for confirming a deviation from the timing at which is detected.

また、上記の課題を解決するため、本発明の基板搬送装置の制御方法は、複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからのガラス基板の搬出またはカセットへのガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、カセットの第１方向の一端部が載置される第１載置部と、カセットの第１方向の他端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、第１載置部が上下方向の所定の位置にあることを検知するための第１センサと、第１センサによって第１載置部が検知されているときの第１載置部の上下方向の位置と上下方向において同じ位置に第２載置部があることを検知するための第２センサとを備える基板搬送装置の制御方法であって、第１載置部および第２載置部にカセットが載置される前に、第１センサで検知されている第１載置部および第２センサで検知されている第２載置部を、第１センサで第１載置部が検知されずかつ第２センサで第２載置部が検知されなくなるまで、第１昇降機構および第２昇降機構によって同じ方向に同じ量だけ一緒に下降または上昇させる第１動作と、第１動作で第１載置部および第２載置部を下降させる場合には、その後、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を上昇させて、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを確認し、第１動作で第１載置部および第２載置部を上昇させる場合には、その後、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を下降させて、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを確認する第２動作とを実行することを特徴とする。 Further, in order to solve the above problems, the control method of the substrate transfer apparatus of the present invention, the glass substrate unloading from the cassette or a cassette that can accommodate a plurality of glass substrates in a state of being vertically spaced. A substrate transfer device for carrying in a glass substrate, wherein a first direction is a predetermined direction orthogonal to the vertical direction, and a first mounting portion on which one end of the cassette in the first direction is mounted, A second mounting part on which the other end of the cassette in the first direction is mounted; a first elevating mechanism for elevating the first mounting part; a second elevating mechanism for elevating the second mounting part; 1. A first sensor for detecting that the placing section is at a predetermined position in the vertical direction, and a vertical position of the first placing section when the first placing section is detected by the first sensor And a second sensor for detecting that the second mounting portion is located at the same position in the up-down direction, the method comprising: controlling a substrate transfer apparatus, wherein cassettes are provided in the first mounting portion and the second mounting portion. Before being placed, the first placing portion detected by the first sensor and the second placing portion detected by the second sensor are not detected by the first sensor, and Until the second sensor is no longer detected by the second sensor, the first lifting mechanism and the second lifting mechanism lower or raise the same amount in the same direction together by the same amount, and the first placement in the first motion. When lowering the first mounting unit and the second mounting unit, the first mounting unit and the second mounting unit are then raised by the first elevating mechanism and the second elevating mechanism, and the first mounting is performed by the first sensor. When the deviation between the timing at which the first placement section is detected and the timing at which the second placement section is detected by the second sensor is confirmed, and the first placement section and the second placement section are raised in the first operation, After that, the first placing part and the second placing part are lowered by the first elevating mechanism and the second elevating mechanism, and the timing when the first placing part is detected by the first sensor and the second placing part by the second sensor. It is characterized in that a second operation for confirming a deviation from a timing at which the placement portion is detected is executed.

本発明では、第１載置部および第２載置部にカセットが載置される前に、第１センサで検知されている第１載置部および第２センサで検知されている第２載置部を、第１センサで第１載置部が検知されずかつ第２センサで第２載置部が検知されなくなるまで、第１昇降機構および第２昇降機構によって同じ方向に同じ量だけ一緒に下降または上昇させる第１動作と、第１動作で第１載置部および第２載置部を下降させる場合には、その後、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を上昇させて、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを確認し、第１動作で第１載置部および第２載置部を上昇させる場合には、その後、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を下降させて、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを確認する第２動作とを実行している。 In the present invention, before the cassette is placed on the first placing section and the second placing section, the first placing section detected by the first sensor and the second placing section detected by the second sensor. The first and second lifting mechanisms move the same amount in the same direction until the first sensor is not detected by the first sensor and the second sensor is not detected by the second sensor. When the first placing part and the second placing part are lowered by the first action, the first raising and lowering mechanism and the second raising and lowering mechanism then move the first placing part and the second placing part. The second placement unit is raised to check the difference between the timing at which the first placement unit is detected by the first sensor and the timing at which the second placement unit is detected by the second sensor. In the case of raising the first placing part and the second placing part, thereafter, the first placing part and the second placing part are lowered by the first elevating mechanism and the second elevating mechanism, and the first sensor is used. The second operation for confirming the deviation between the timing at which the first placement portion is detected and the timing at which the second placement portion is detected by the second sensor is performed.

そのため、本発明では、第１センサで第１載置部が検知されるタイミングと第２センサで第２載置部が検知されるタイミングとのずれを第２動作において確認することで、第１載置部および第２載置部にカセットが載置される前に、第１載置部の高さと第２載置部の高さとのずれを確認することが可能になる。したがって、本発明では、第１載置部の高さと第２載置部の高さとのずれ量が所定の基準値以上となっている場合に、第１載置部および第２載置部にカセットを載置しないようにすることで、第１載置部と第２載置部とが機械的に連結されていなくても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。したがって、本発明では、基板搬送装置の構成を簡素化しつつ、第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。 Therefore, in the present invention, by confirming the deviation between the timing at which the first placement portion is detected by the first sensor and the timing at which the second placement portion is detected by the second sensor in the second operation, Before the cassette is placed on the placement unit and the second placement unit, it is possible to confirm the deviation between the height of the first placement unit and the height of the second placement unit. Therefore, in the present invention, when the amount of deviation between the height of the first placing portion and the height of the second placing portion is equal to or greater than a predetermined reference value, the first placing portion and the second placing portion are By not mounting the cassette, it is possible to prevent the glass substrate or the cassette housed in the cassette from falling even if the first mounting portion and the second mounting portion are not mechanically connected. It will be possible. Therefore, according to the present invention, while simplifying the configuration of the substrate transfer device, even if the height of the first placing portion and the height of the second placing portion are deviated, the glass substrates or cassettes accommodated in the cassette are dropped. Can be prevented.

また、本発明では、第１載置部の高さと第２載置部の高さとのずれ量が所定の基準値以上となっている場合に、第１載置部および第２載置部の高さを再調整した後に第１載置部および第２載置部にカセットを載置することで、第１載置部と第２載置部とが機械的に連結されていなくても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。したがって、本発明では、基板搬送装置の構成を簡素化しつつ、第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。 Further, in the present invention, when the amount of deviation between the height of the first placing portion and the height of the second placing portion is equal to or greater than a predetermined reference value, the first placing portion and the second placing portion are By mounting the cassette on the first mounting portion and the second mounting portion after readjusting the height, even if the first mounting portion and the second mounting portion are not mechanically connected, It is possible to prevent the glass substrate or the cassette contained in the cassette from falling. Therefore, according to the present invention, while simplifying the configuration of the substrate transfer device, even if the height of the first placing portion and the height of the second placing portion are deviated, the glass substrates or cassettes accommodated in the cassette are dropped. Can be prevented.

また、上記の課題を解決するため、本発明の基板搬送装置は、複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからのガラス基板の搬出またはカセットへのガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、カセットの第１方向の一端部が載置される第１載置部と、カセットの第１方向の他端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、第１載置部の高さを検知するための第１検知機構と、第２載置部の高さを検知するための第２検知機構と、基板搬送装置の制御部とを備え、制御部は、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を昇降させているときに、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとの差が所定の基準値以上になると、所定の異常処理を実行することを特徴とする。 Further, in order to solve the above problems, the substrate transfer apparatus of the present invention is a glass substrate unloading from a cassette or a glass substrate to a cassette capable of accommodating a plurality of glass substrates in a state of being vertically spaced. In a substrate transfer device for carrying in, when a predetermined direction orthogonal to the vertical direction is defined as a first direction, a first mounting portion on which one end portion of the cassette in the first direction is mounted and a first mounting portion of the cassette are mounted. A second mounting part on which the other end in one direction is mounted, a first elevating mechanism for elevating the first mounting part, a second elevating mechanism for elevating the second mounting part, and a first mounting part. A first detection mechanism for detecting the height of the section, a second detection mechanism for detecting the height of the second placement section, and a control section of the substrate transfer apparatus are provided. While the first placing part and the second placing part are being raised and lowered by the elevating mechanism and the second elevating mechanism, the height of the first placing part detected by the first detecting mechanism and the height detected by the second detecting mechanism are detected. When the difference between the height of the second mounting portion and the height of the second mounting portion exceeds a predetermined reference value, a predetermined abnormality process is executed.

また、上記の課題を解決するため、本発明の基板搬送装置の制御方法は、複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからのガラス基板の搬出またはカセットへのガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、カセットの第１方向の一端部が載置される第１載置部と、カセットの第１方向の他端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、第１載置部の高さを検知するための第１検知機構と、第２載置部の高さを検知するための第２検知機構とを備える基板搬送装置の制御方法であって、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を昇降させているときに、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとの差が所定の基準値以上になると、所定の異常処理を実行することを特徴とする。 Further, in order to solve the above problems, the control method of the substrate transfer apparatus of the present invention, the glass substrate unloading from the cassette or a cassette that can accommodate a plurality of glass substrates in a state with a vertical gap. A substrate transfer device for carrying in a glass substrate, wherein a first direction is a predetermined direction orthogonal to the vertical direction, and a first mounting portion on which one end of the cassette in the first direction is mounted, A second mounting part on which the other end of the cassette in the first direction is mounted; a first elevating mechanism for elevating the first mounting part; a second elevating mechanism for elevating the second mounting part; 1. A method for controlling a substrate transfer apparatus, comprising: a first detection mechanism for detecting the height of a mounting portion; and a second detection mechanism for detecting the height of a second mounting portion. While the first placing part and the second placing part are being raised and lowered by the elevating mechanism and the second elevating mechanism, the height of the first placing part detected by the first detecting mechanism and the height detected by the second detecting mechanism are detected. When the difference between the height of the second mounting portion and the height of the second mounting portion exceeds a predetermined reference value, a predetermined abnormality process is executed.

本発明では、第１昇降機構および第２昇降機構によって第１載置部および第２載置部を昇降させているときに、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとの差が所定の基準値以上になると、所定の異常処理を実行している。そのため、本発明では、たとえば、異常処理として第１昇降機構および第２昇降機構を非常停止させることで、第１載置部の高さと第２載置部の高さとにずれが生じても、また、第１載置部と第２載置部とが機械的に連結されていなくても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。したがって、本発明では、基板搬送装置の構成を簡素化しつつ、第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。 According to the present invention, the height of the first placement part detected by the first detection mechanism and the first placement part and the second placement part are raised and lowered by the first lifting mechanism and the second lifting mechanism. When the difference between the height of the second mounting portion and the height of the second mounting portion detected by the two-detection mechanism is equal to or greater than a predetermined reference value, predetermined abnormality processing is executed. Therefore, in the present invention, for example, by performing an emergency stop of the first elevating mechanism and the second elevating mechanism as an abnormal process, even if the height of the first placing part and the height of the second placing part are deviated, Further, even if the first placing section and the second placing section are not mechanically connected, it is possible to prevent the glass substrate or the cassette accommodated in the cassette from falling. Therefore, according to the present invention, while simplifying the configuration of the substrate transfer device, even if the height of the first placing portion and the height of the second placing portion are deviated, the glass substrates or cassettes accommodated in the cassette are dropped. Can be prevented.

さらに、上記の課題を解決するため、本発明の基板搬送装置は、複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからのガラス基板の搬出またはカセットへのガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、カセットの第１方向の一端部が載置される第１載置部と、カセットの第１方向の他端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、第１載置部の高さを検知するための第１検知機構と、第２載置部の高さを検知するための第２検知機構と、基板搬送装置の制御部とを備え、制御部は、第１載置部および第２載置部にカセットが載置されるカセット載置位置に第１昇降機構および第２昇降機構によって第１載置部および第２載置部を移動させたときに、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとが所定の基準値以上にずれていれば、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとのずれ量が所定の範囲内に収まるまで、第２昇降機構によって第２載置部を昇降させることを特徴とする。 Furthermore, in order to solve the above-mentioned problems, the substrate transfer apparatus of the present invention is a glass substrate unloading from a cassette or a glass substrate to a cassette that can accommodate a plurality of glass substrates in a state of being vertically spaced. In a substrate transfer device for carrying in, when a predetermined direction orthogonal to the vertical direction is defined as a first direction, a first mounting portion on which one end portion of the cassette in the first direction is mounted and a first mounting portion of the cassette are mounted. A second mounting part on which the other end in one direction is mounted, a first elevating mechanism for elevating the first mounting part, a second elevating mechanism for elevating the second mounting part, and a first mounting part. A first detection mechanism for detecting the height of the section, a second detection mechanism for detecting the height of the second placement section, and a control section of the substrate transfer apparatus are provided. When the first placing part and the second placing part are moved by the first elevating mechanism and the second elevating mechanism to the cassette placing position where the cassette is placed on the placing part and the second placing part, If the height of the first mounting portion detected by the first detection mechanism and the height of the second mounting portion detected by the second detection mechanism are deviated by a predetermined reference value or more, the first detection mechanism detects the height. The second elevating mechanism raises and lowers the second placing portion until the amount of deviation between the height of the first placing portion and the height of the second placing portion detected by the second detection mechanism falls within a predetermined range. It is characterized by

また、上記の課題を解決するため、本発明の基板搬送装置の制御方法は、複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからのガラス基板の搬出またはカセットへのガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、カセットの第１方向の一端部が載置される第１載置部と、カセットの第１方向の他端部が載置される第２載置部と、第１載置部を昇降させる第１昇降機構と、第２載置部を昇降させる第２昇降機構と、第１載置部の高さを検知するための第１検知機構と、第２載置部の高さを検知するための第２検知機構とを備える基板搬送装置の制御方法であって、第１載置部および第２載置部にカセットが載置されるカセット載置位置に第１昇降機構および第２昇降機構によって第１載置部および第２載置部を移動させたときに、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとが所定の基準値以上にずれていれば、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとのずれ量が所定の範囲内に収まるまで、第２昇降機構によって第２載置部を昇降させることを特徴とする。 Further, in order to solve the above problems, the control method of the substrate transfer apparatus of the present invention, the glass substrate unloading from the cassette or a cassette that can accommodate a plurality of glass substrates in a state with a vertical gap. A substrate transfer device for carrying in a glass substrate, wherein a first direction is a predetermined direction orthogonal to the vertical direction, and a first mounting portion on which one end of the cassette in the first direction is mounted, A second mounting part on which the other end of the cassette in the first direction is mounted; a first elevating mechanism for elevating the first mounting part; a second elevating mechanism for elevating the second mounting part; 1. A method for controlling a substrate transfer apparatus, comprising: a first detection mechanism for detecting the height of a mounting portion; and a second detection mechanism for detecting the height of a second mounting portion. When the first placing part and the second placing part are moved by the first elevating mechanism and the second elevating mechanism to the cassette placing position where the cassette is placed on the placing part and the second placing part, If the height of the first mounting portion detected by the first detection mechanism and the height of the second mounting portion detected by the second detection mechanism are deviated by a predetermined reference value or more, the first detection mechanism detects the height. The second elevating mechanism raises and lowers the second placing portion until the amount of deviation between the height of the first placing portion and the height of the second placing portion detected by the second detection mechanism falls within a predetermined range. It is characterized by

本発明では、第１載置部および第２載置部にカセットが載置されるカセット載置位置に第１昇降機構および第２昇降機構によって第１載置部および第２載置部を移動させたときに、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとが所定の基準値以上にずれていれば、第１検知機構で検知される第１載置部の高さと第２検知機構で検知される第２載置部の高さとのずれ量が所定の範囲内に収まるまで、第２昇降機構によって第２載置部を昇降させている。 According to the present invention, the first mounting unit and the second mounting unit are moved to the cassette mounting position where the cassette is mounted on the first mounting unit and the second mounting unit by the first lifting mechanism and the second lifting mechanism. When the heights of the first placement part detected by the first detection mechanism and the height of the second placement part detected by the second detection mechanism are deviated from each other by a predetermined reference value or more, The second lifting mechanism moves the second lifting mechanism until the amount of deviation between the height of the first placement part detected by the first detection mechanism and the height of the second placement part detected by the second detection mechanism falls within a predetermined range. The mounting part is being raised and lowered.

そのため、本発明では、第１載置部の高さと第２載置部の高さとにずれが生じても、第１載置部および第２載置部にカセットが載置される前に、第１載置部の高さと第２載置部の高さとのずれ量を所定の範囲内に収めることが可能になる。したがって、本発明では、第１載置部の高さと第２載置部の高さとにずれが生じても、また、第１載置部と第２載置部とが機械的に連結されていなくても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。その結果、本発明では、基板搬送装置の構成を簡素化しつつ、第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。 Therefore, in the present invention, even if the height of the first placing portion and the height of the second placing portion are deviated, before the cassette is placed on the first placing portion and the second placing portion, It is possible to keep the amount of deviation between the height of the first placing portion and the height of the second placing portion within a predetermined range. Therefore, in the present invention, even if the height of the first mounting portion and the height of the second mounting portion are deviated, the first mounting portion and the second mounting portion are mechanically connected. Even without it, it is possible to prevent the glass substrate or the cassette housed in the cassette from falling. As a result, in the present invention, while simplifying the configuration of the substrate transfer device, even if the height of the first mounting portion and the height of the second mounting portion are deviated, the glass substrates or cassettes accommodated in the cassette It becomes possible to prevent falling.

以上のように、本発明では、基板搬送装置の構成を簡素化しつつ、複数枚のガラス基板を収容可能なカセットが載置される第１載置部の高さと第２載置部の高さとにずれが生じても、カセットに収容されるガラス基板やカセットの落下を防止することが可能になる。 As described above, according to the present invention, the height of the first placing portion and the height of the second placing portion on which the cassette capable of accommodating a plurality of glass substrates is placed are simplified while simplifying the configuration of the substrate carrying device. Even if there is a deviation in the position, it is possible to prevent the glass substrate or cassette housed in the cassette from falling.

本発明の実施の形態にかかる基板搬送装置の正面図である。It is a front view of the board|substrate conveyance apparatus concerning embodiment of this invention. 図１に示す基板搬送装置の概略平面図である。It is a schematic plan view of the board|substrate conveyance apparatus shown in FIG. 図１に示す基板搬送装置の概略側面図である。It is a schematic side view of the board|substrate conveyance apparatus shown in FIG. 図１のＥ部の拡大図である。It is an enlarged view of the E section of FIG. 図１に示す基板搬送装置の構成を説明するためのブロック図である。FIG. 3 is a block diagram for explaining the configuration of the substrate transfer device shown in FIG. 1.

以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

（基板搬送装置の構成）
図１は、本発明の実施の形態にかかる基板搬送装置１の正面図である。図２は、図１に示す基板搬送装置１の概略平面図である。図３は、図１に示す基板搬送装置１の概略側面図である。図４は、図１のＥ部の拡大図である。図５は、図１に示す基板搬送装置１の構成を説明するためのブロック図である。 (Structure of substrate transfer device)
FIG. 1 is a front view of a substrate transfer device 1 according to an embodiment of the present invention. FIG. 2 is a schematic plan view of the substrate transfer device 1 shown in FIG. FIG. 3 is a schematic side view of the substrate transfer device 1 shown in FIG. FIG. 4 is an enlarged view of portion E in FIG. FIG. 5 is a block diagram for explaining the configuration of the substrate transfer device 1 shown in FIG.

本形態の基板搬送装置１は、複数枚のガラス基板２を収容可能なカセット３からガラス基板２を搬出するための装置である。ガラス基板２は、たとえば、液晶表示装置用のガラス基板である。ガラス基板２は、長方形の平板状に形成されている。基板搬送装置１には、たとえば、複数枚のガラス基板２が収容されたカセット３を基板搬送装置１に引き渡すストッカー（図示省略）が隣接配置されている。 The substrate transfer device 1 of the present embodiment is a device for carrying out the glass substrate 2 from the cassette 3 that can accommodate a plurality of glass substrates 2. The glass substrate 2 is, for example, a glass substrate for a liquid crystal display device. The glass substrate 2 is formed in a rectangular flat plate shape. For example, a stocker (not shown) for delivering a cassette 3 accommodating a plurality of glass substrates 2 to the substrate transport device 1 is arranged adjacent to the substrate transport device 1.

基板搬送装置１は、カセット３が載置される載置部５、６と、載置部５を昇降させる昇降機構７と、載置部６を昇降させる昇降機構８と、ガラス基板２を水平方向へ直線的に搬送する搬送コンベヤ９とを備えている。以下の説明では、搬送コンベヤ９によるガラス基板２の搬送方向（図２等のＸ方向）を「前後方向」とし、上下方向と前後方向とに直交する図２等のＹ方向を「左右方向」とする。また、前後方向の一方側である図２等のＸ１方向側を「前」側とし、その反対側である図２等のＸ２方向側を「後ろ」側とする。本形態では、カセット３から前側に向かってガラス基板２が搬出される。本形態の左右方向は、上下方向に直交する所定の第１方向である。 The substrate transfer apparatus 1 includes placing sections 5 and 6 on which the cassette 3 is placed, an elevating mechanism 7 that elevates and lowers the placing section 5, an elevating mechanism 8 that elevates and lowers the placing section 6, and a glass substrate 2 horizontally. And a conveyor 9 for linearly conveying the direction. In the following description, the transport direction of the glass substrate 2 by the transport conveyor 9 (X direction in FIG. 2 and the like) is referred to as “front-back direction”, and the Y direction in FIG. And The X1 direction side in FIG. 2 or the like, which is one side in the front-rear direction, is the “front” side, and the X2 direction side in FIG. 2 or the like, which is the opposite side, is the “rear” side. In this embodiment, the glass substrate 2 is unloaded from the cassette 3 toward the front side. The left-right direction of this embodiment is a predetermined first direction orthogonal to the up-down direction.

カセット３は、ワイヤーカセットである。カセット３は、カセットフレーム１１と、カセットフレーム１１の内部に配置される複数本のワイヤー１２とから構成されている。カセットフレーム１１の外形は、直方体状となっている。ワイヤー１２は、左右方向に張った状態でカセットフレーム１１に固定されている。また、複数本のワイヤー１２は、上下方向および前後方向において一定の間隔をあけた状態でカセットフレーム１１に固定されている。カセット３に収容されるガラス基板２は、ワイヤー１２に載置されており、カセット３は、複数枚のガラス基板２を上下方向に一定の間隔をあけた状態で収容可能となっている。 The cassette 3 is a wire cassette. The cassette 3 is composed of a cassette frame 11 and a plurality of wires 12 arranged inside the cassette frame 11. The outer shape of the cassette frame 11 is a rectangular parallelepiped. The wire 12 is fixed to the cassette frame 11 while being stretched in the left-right direction. In addition, the plurality of wires 12 are fixed to the cassette frame 11 with a certain space in the vertical direction and the front-back direction. The glass substrate 2 accommodated in the cassette 3 is placed on the wire 12, and the cassette 3 is capable of accommodating a plurality of glass substrates 2 with a certain space in the vertical direction.

載置部５には、カセット３の左右方向の一端部が載置され、載置部６には、カセット３の左右方向の他端部が載置されている。すなわち、載置部５は、カセット３の下面の、左右方向の一端側を支持し、載置部６は、カセット３の下面の、左右方向の他端側を支持している。また、載置部５、６は、たとえば、カセット３の下面の前後方向の両端側、および、カセット３の下面の前後方向の中心位置の３箇所を支持している。本形態の載置部５は、第１載置部であり、載置部６は、第２載置部である。 One end of the cassette 3 in the left-right direction is placed on the placement part 5, and the other end of the cassette 3 in the left-right direction is placed on the placement part 6. That is, the mounting portion 5 supports one side of the lower surface of the cassette 3 in the left-right direction, and the mounting portion 6 supports the other side of the lower surface of the cassette 3 in the left-right direction. Further, the mounting portions 5 and 6 support, for example, three positions at both end sides of the lower surface of the cassette 3 in the front-rear direction and a center position of the lower surface of the cassette 3 in the front-rear direction. The placement unit 5 of this embodiment is a first placement unit, and the placement unit 6 is a second placement unit.

また、基板搬送装置１は、載置部５が上下方向の所定の位置にあることを検知するためのセンサ１４〜１６と、載置部６が上下方向の所定の位置にあることを検知するためのセンサ１７〜１９と、載置部５の高さを検知するための第１検知機構としてのエンコーダ２０と、載置部６の高さを検知するための第２検知機構としてのエンコーダ２１と、基板搬送装置１を制御する基板搬送装置１の制御部２２とを備えている。 The substrate transfer apparatus 1 also detects the sensors 14 to 16 for detecting that the mounting portion 5 is at a predetermined vertical position, and detects that the mounting portion 6 is at a predetermined vertical position. Sensors 17 to 19, an encoder 20 as a first detection mechanism for detecting the height of the mounting portion 5, and an encoder 21 as a second detection mechanism for detecting the height of the mounting portion 6. And a control unit 22 of the substrate transfer apparatus 1 for controlling the substrate transfer apparatus 1.

載置部５と載置部６とは、同形状に形成されている。また、載置部５と載置部６とは、左右対称に配置されている。載置部５は、センサ１４〜１６によって検知される検知板２４（図４参照）を備えている。載置部６は、センサ１７〜１９によって検知される検知板（図示省略）を備えている。載置部６が備える検知板は、検知板２４と同形状に形成されている。載置部５は、柱状に形成される柱状部材２５に昇降可能に保持されている。載置部６は、柱状部材２５と同形状に形成される柱状部材２６に昇降可能に保持されている。載置部５、６は、左右方向において柱状部材２５と柱状部材２６との間に配置されている。また、カセット３は、左右方向において柱状部材２５と柱状部材２６との間に配置されている。 The placing portion 5 and the placing portion 6 are formed in the same shape. Moreover, the mounting part 5 and the mounting part 6 are arranged symmetrically. The mounting unit 5 includes a detection plate 24 (see FIG. 4) detected by the sensors 14 to 16. The mounting portion 6 includes a detection plate (not shown) that is detected by the sensors 17 to 19. The detection plate included in the mounting portion 6 is formed in the same shape as the detection plate 24. The mounting portion 5 is held by a columnar member 25 formed in a columnar shape so as to be able to move up and down. The mounting portion 6 is held by a columnar member 26 formed in the same shape as the columnar member 25 so as to be able to move up and down. The mounting portions 5 and 6 are arranged between the columnar member 25 and the columnar member 26 in the left-right direction. The cassette 3 is arranged between the columnar members 25 and 26 in the left-right direction.

昇降機構７は、モータ２８と、モータ２８の動力を載置部５に伝達する動力伝達機構とを備えている。動力伝達機構は、たとえば、モータ２８の動力で回転するネジ軸と、ネジ軸に係合するナット部材とを有するボールねじを備えている。ネジ軸は、ネジ軸の軸方向と上下方向とが一致するように配置されている。ナット部材は、載置部５に取り付けられている。本形態の昇降機構７は、第１載置部である載置部５を昇降させる第１昇降機構となっている。 The lifting mechanism 7 includes a motor 28 and a power transmission mechanism that transmits the power of the motor 28 to the mounting portion 5. The power transmission mechanism includes, for example, a ball screw having a screw shaft that rotates by the power of the motor 28 and a nut member that engages with the screw shaft. The screw shaft is arranged so that the axial direction of the screw shaft and the vertical direction coincide with each other. The nut member is attached to the mounting portion 5. The elevating mechanism 7 of this embodiment is a first elevating mechanism that elevates and lowers the placing section 5, which is the first placing section.

昇降機構８は、昇降機構７と同様に構成されており、モータ２９と、モータ２９の動力を載置部６に伝達する動力伝達機構とを備えている。動力伝達機構は、たとえば、モータ２９の動力で回転するネジ軸と、ネジ軸に係合するナット部材とを有するボールねじを備えている。ネジ軸は、ネジ軸の軸方向と上下方向とが一致するように配置されている。ナット部材は、載置部６に取り付けられている。本形態の昇降機構８は、第２載置部である載置部６を昇降させる第２昇降機構となっている。 The lifting mechanism 8 is configured similarly to the lifting mechanism 7, and includes a motor 29 and a power transmission mechanism that transmits the power of the motor 29 to the mounting portion 6. The power transmission mechanism includes, for example, a ball screw having a screw shaft that is rotated by the power of the motor 29 and a nut member that engages with the screw shaft. The screw shaft is arranged so that the axial direction of the screw shaft and the vertical direction coincide with each other. The nut member is attached to the mounting portion 6. The elevating mechanism 8 of the present embodiment is a second elevating mechanism that elevates and lowers the placing section 6, which is the second placing section.

昇降機構７、８は、制御部２２に電気的に接続されている。具体的には、モータ２８、２９が制御部２２に電気的に接続されている。制御部２２は、昇降機構７と昇降機構８とを同期制御する。すなわち、制御部２２は、載置部５と載置部６とが同じ方向へ同じ速度で同じ量だけ一緒に昇降するようにモータ２８とモータ２９とを同期制御する。本形態では、昇降機構７が主軸となっており、昇降機構８が従軸となっている。すなわち、モータ２８が主軸となっており、モータ２９が従軸となっている The lifting mechanisms 7 and 8 are electrically connected to the control unit 22. Specifically, the motors 28 and 29 are electrically connected to the control unit 22. The control unit 22 synchronously controls the lifting mechanism 7 and the lifting mechanism 8. That is, the control unit 22 synchronously controls the motor 28 and the motor 29 so that the placing unit 5 and the placing unit 6 move up and down together in the same direction at the same speed and by the same amount. In this embodiment, the lifting mechanism 7 serves as the main shaft, and the lifting mechanism 8 serves as the slave shaft. That is, the motor 28 serves as the main shaft and the motor 29 serves as the slave shaft.

搬送コンベヤ９は、ローラコンベヤである。搬送コンベヤ９は、ガラス基板２の下面に接触してガラス基板２を前後方向に搬送する複数の搬送ローラ３０と、複数の搬送ローラ３０を駆動するローラ駆動機構とを備えている。複数の搬送ローラ３０は、フレーム３１に回転可能に支持されている。また、複数の搬送ローラ３０は、カセット３に収容されるガラス基板２を搬送可能な位置に配置されている。 The transport conveyor 9 is a roller conveyor. The transport conveyor 9 includes a plurality of transport rollers 30 that contact the lower surface of the glass substrate 2 to transport the glass substrate 2 in the front-rear direction, and a roller drive mechanism that drives the plurality of transport rollers 30. The plurality of transport rollers 30 are rotatably supported by the frame 31. Further, the plurality of transport rollers 30 are arranged at positions where the glass substrates 2 accommodated in the cassette 3 can be transported.

載置部５、６は、カセット３の下端が搬送ローラ３０の上端よりも上側に配置される位置と、カセット３の最も上側に配置されるワイヤー１２が搬送ローラ３０の上端よりも下側に配置される位置との間で昇降可能となっている。カセット３に収容されるガラス基板２が搬出されるときには、カセット３の中で最も下側に配置されるガラス基板２の下面に搬送ローラ３０が接触する位置まで載置部５、６が下降して、カセット３の中で最も下側に配置されるガラス基板２が搬送コンベヤ９によって搬出される。すなわち、カセット３の最下段に収容されているガラス基板２からカセット３の最上段に収容されているガラス基板２に向かって順番にガラス基板２がカセット３から１枚ずつ搬出される。 In the placement sections 5 and 6, the lower end of the cassette 3 is located above the upper end of the transport roller 30, and the wire 12 located at the uppermost position of the cassette 3 is below the upper end of the transport roller 30. It can be moved up and down from the position where it is placed. When the glass substrate 2 accommodated in the cassette 3 is carried out, the mounting portions 5 and 6 are lowered to a position where the lower surface of the glass substrate 2 in the cassette 3 is brought into contact with the transport roller 30. Then, the lowermost glass substrate 2 in the cassette 3 is unloaded by the transport conveyor 9. That is, the glass substrates 2 are unloaded one by one from the cassette 3 in order from the glass substrate 2 accommodated in the lowermost stage of the cassette 3 to the glass substrate 2 accommodated in the uppermost stage of the cassette 3.

また、カセット３に収容されるガラス基板２が搬出されるときには、一部の搬送ローラ３０を除いた複数の搬送ローラ３０がカセット３の内部に入り込んでいる。複数の搬送ローラ３０は、カセット３に収容されるガラス基板２を前側に向かって搬送する。フレーム３１は、カセット３の内部に入り込んだ搬送ローラ３０とワイヤー１２とが干渉しないように、櫛歯状に配置されており、複数の搬送ローラ３０は、前後方向においてワイヤー１２を避けた位置に配置されている。 Further, when the glass substrate 2 accommodated in the cassette 3 is unloaded, a plurality of transport rollers 30 excluding some of the transport rollers 30 enter the inside of the cassette 3. The plurality of transport rollers 30 transport the glass substrate 2 housed in the cassette 3 toward the front side. The frame 31 is arranged in a comb-teeth shape so that the transport roller 30 that has entered the inside of the cassette 3 and the wire 12 do not interfere with each other, and the plurality of transport rollers 30 are located at positions avoiding the wire 12 in the front-rear direction. It is arranged.

センサ１４〜１９は、たとえば、発光素子と受光素子とを有する透過型の光学式センサである。センサ１４〜１９は、制御部２２に電気的に接続されている。センサ１４〜１６は、柱状部材２５に固定されている。柱状部材２５に対するセンサ１４〜１６の固定位置は、少なくとも上下方向において調整可能となっている。センサ１７〜１９は、柱状部材２６に固定されている。柱状部材２６に対するセンサ１７〜１９の固定位置は、少なくとも上下方向において調整可能となっている。 The sensors 14 to 19 are, for example, transmissive optical sensors having a light emitting element and a light receiving element. The sensors 14 to 19 are electrically connected to the control unit 22. The sensors 14 to 16 are fixed to the columnar member 25. The fixed positions of the sensors 14 to 16 with respect to the columnar member 25 can be adjusted at least in the vertical direction. The sensors 17 to 19 are fixed to the columnar member 26. The fixed positions of the sensors 17 to 19 with respect to the columnar member 26 can be adjusted at least in the vertical direction.

センサ１４は、載置部５が上下方向における原点位置にあることを検知し、センサ１７は、載置部６が上下方向における原点位置にあることを検知する。センサ１５は、載置部５が上限位置にあることを検知し、センサ１８は、載置部６が上限位置にあることを検知する。センサ１６は、載置部５が下限位置にあることを検知し、センサ１９は、載置部６が下限位置にあることを検知する。本形態では、上下方向における載置部５、６の可動範囲の上限側に載置部５、６の原点位置が設定されており、センサ１４は、センサ１５の下側に配置され、センサ１７は、センサ１８の下側に配置されている。 The sensor 14 detects that the mounting portion 5 is at the origin position in the vertical direction, and the sensor 17 detects that the mounting portion 6 is at the origin position in the vertical direction. The sensor 15 detects that the mounting portion 5 is at the upper limit position, and the sensor 18 detects that the mounting portion 6 is at the upper limit position. The sensor 16 detects that the mounting portion 5 is at the lower limit position, and the sensor 19 detects that the mounting portion 6 is at the lower limit position. In the present embodiment, the origin position of the mounting portions 5 and 6 is set on the upper limit side of the movable range of the mounting portions 5 and 6 in the vertical direction, and the sensor 14 is arranged below the sensor 15 and the sensor 17 Are arranged below the sensor 18.

センサ１４によって載置部５が検知されているときの載置部５の上下方向の位置と、センサ１７によって載置部６が検知されているときの載置部６の上下方向の位置とは同じになっている。すなわち、センサ１４によって載置部５が検知されているときの載置部５の高さと、センサ１７によって載置部６が検知されているときの載置部６の高さとが同じになるように、センサ１４、１７が取り付けられている。本形態のセンサ１４は、第１センサである。また、センサ１７は、センサ１４によって載置部５が検知されているときの載置部５の上下方向の位置と上下方向において同じ位置に載置部６があることを検知するための第２センサである。 The vertical position of the placing section 5 when the placing section 5 is detected by the sensor 14 and the vertical position of the placing section 6 when the placing section 6 is detected by the sensor 17 are It's the same. That is, the height of the placing section 5 when the placing section 5 is detected by the sensor 14 is equal to the height of the placing section 6 when the placing section 6 is detected by the sensor 17. Sensors 14 and 17 are attached to the. The sensor 14 of the present embodiment is the first sensor. In addition, the sensor 17 has a second position for detecting that the placement unit 6 is located at the same position in the vertical direction as the position of the placement unit 5 in the vertical direction when the placement unit 5 is detected by the sensor 14. It is a sensor.

また、センサ１５によって載置部５が検知されているときの載置部５の上下方向の位置と、センサ１８によって載置部６が検知されているときの載置部６の上下方向の位置とは同じになっており、センサ１６によって載置部５が検知されているときの載置部５の上下方向の位置と、センサ１９によって載置部６が検知されているときの載置部６の上下方向の位置とは同じになっている。 Further, the vertical position of the placing part 5 when the placing part 5 is detected by the sensor 15, and the vertical position of the placing part 6 when the placing part 6 is detected by the sensor 18. The same applies to the vertical position of the placing section 5 when the placing section 5 is detected by the sensor 16 and the placing section 6 when the placing section 6 is detected by the sensor 19. The vertical position of 6 is the same.

上述のように、載置部５は、検知板２４を備えている。検知板２４がセンサ１４の受光素子と発光素子との間を遮っているときに、載置部５が原点位置にあることが検知される。また、検知板２４がセンサ１５の受光素子と発光素子との間を遮っているときに、載置部５が上限位置にあることが検知され、検知板２４がセンサ１６の受光素子と発光素子との間を遮っているときに、載置部５が下限位置にあることが検知される。なお、検知板２４は、上下方向の幅を有するため、上下方向の一定の範囲において、載置部５が原点位置にあること、載置部５が上限位置にあること、および、載置部５が下限位置にあることが検知される。 As described above, the mounting portion 5 includes the detection plate 24. When the detection plate 24 blocks between the light receiving element and the light emitting element of the sensor 14, it is detected that the mounting portion 5 is at the origin position. Further, when the detection plate 24 blocks the light receiving element and the light emitting element of the sensor 15, it is detected that the mounting portion 5 is at the upper limit position, and the detection plate 24 detects the light receiving element and the light emitting element of the sensor 16. It is detected that the mounting portion 5 is at the lower limit position when the space between and is blocked. Since the detection plate 24 has a width in the vertical direction, the mounting portion 5 is at the origin position, the mounting portion 5 is at the upper limit position, and the mounting portion is within a certain range in the vertical direction. It is detected that 5 is at the lower limit position.

同様に、載置部６が備える検知板がセンサ１７の受光素子と発光素子との間を遮っているときに、載置部６が原点位置にあることが検知される。また、この検知板がセンサ１８の受光素子と発光素子との間を遮っているときに、載置部６が上限位置にあることが検知され、この検知板がセンサ１９の受光素子と発光素子との間を遮っているときに、載置部６が下限位置にあることが検知される。載置部６が備える検知板は、上下方向の幅を有するため、上下方向の一定の範囲において、載置部６が原点位置にあること、載置部６が上限位置にあること、および、載置部６が下限位置にあることが検知される。 Similarly, when the detection plate included in the mounting portion 6 blocks between the light receiving element and the light emitting element of the sensor 17, it is detected that the mounting portion 6 is at the origin position. Further, when the detection plate blocks the light receiving element and the light emitting element of the sensor 18, it is detected that the mounting portion 6 is at the upper limit position, and the detection plate detects the light receiving element and the light emitting element of the sensor 19. It is detected that the mounting portion 6 is at the lower limit position when the space between and is blocked. Since the detection plate included in the mounting portion 6 has a width in the vertical direction, the mounting portion 6 is at the origin position, the mounting portion 6 is at the upper limit position in a certain range in the vertical direction, and It is detected that the placing portion 6 is at the lower limit position.

エンコーダ２０は、たとえば、昇降機構７の動力伝達機構の一部を構成するネジ軸またはモータ２８の回転軸に固定されるスリット板と、スリット板を検知する光学式のセンサとを備えている。センサは、たとえば、スリット板を挟んで配置される発光素子と受光素子とを備える透過型の光学式センサである。エンコーダ２０は、制御部２２に電気的に接続されている。具体的には、エンコーダ２０のセンサが制御部２２に電気的に接続されている。 The encoder 20 includes, for example, a slit plate that is fixed to a screw shaft that forms a part of the power transmission mechanism of the lifting mechanism 7 or a rotation shaft of the motor 28, and an optical sensor that detects the slit plate. The sensor is, for example, a transmissive optical sensor including a light emitting element and a light receiving element that are arranged with a slit plate interposed therebetween. The encoder 20 is electrically connected to the control unit 22. Specifically, the sensor of the encoder 20 is electrically connected to the control unit 22.

エンコーダ２１は、エンコーダ２０と同様に、たとえば、昇降機構８の動力伝達機構の一部を構成するネジ軸またはモータ２９の回転軸に固定されるスリット板と、スリット板を検知する光学式のセンサとを備えている。センサは、たとえば、スリット板を挟んで配置される発光素子と受光素子とを備える透過型の光学式センサである。エンコーダ２１は、制御部２２に電気的に接続されている。具体的には、エンコーダ２１のセンサが制御部２２に電気的に接続されている。 Similar to the encoder 20, the encoder 21 includes, for example, a slit plate fixed to a screw shaft that forms a part of the power transmission mechanism of the lifting mechanism 8 or a rotation shaft of the motor 29, and an optical sensor that detects the slit plate. It has and. The sensor is, for example, a transmissive optical sensor including a light emitting element and a light receiving element that are arranged with a slit plate interposed therebetween. The encoder 21 is electrically connected to the control unit 22. Specifically, the sensor of the encoder 21 is electrically connected to the control unit 22.

エンコーダ２０は、スリット板の回転量に基づいて上下方向における所定の基準位置に対する載置部５の移動量を検知する。また、エンコーダ２０は、上下方向における所定の基準位置に対する載置部５の移動量を検知することで、間接的に載置部５の高さを検知する。同様に、エンコーダ２１は、スリット板の回転量に基づいて上下方向における所定の基準位置に対する載置部６の移動量を検知する。また、エンコーダ２１は、上下方向における所定の基準位置に対する載置部６の移動量を検知することで、間接的に載置部６の高さを検知する。 The encoder 20 detects the amount of movement of the mounting portion 5 with respect to a predetermined reference position in the vertical direction based on the amount of rotation of the slit plate. Further, the encoder 20 indirectly detects the height of the mounting portion 5 by detecting the amount of movement of the mounting portion 5 with respect to a predetermined reference position in the vertical direction. Similarly, the encoder 21 detects the amount of movement of the mounting portion 6 with respect to a predetermined reference position in the vertical direction based on the amount of rotation of the slit plate. Further, the encoder 21 indirectly detects the height of the mounting portion 6 by detecting the amount of movement of the mounting portion 6 with respect to a predetermined reference position in the vertical direction.

基板搬送装置１の初期の立上げ時には、センサ１４によって載置部５が検知されているときの載置部５の高さと、センサ１７によって載置部６が検知されているときの載置部６の高さとが同じになるように、センサ１４およびセンサ１７の取付位置が調整される。具体的には、トランシット（セオドライト）またはレーザ水準器等の器具を使用して、載置部５の高さと載置部６の高さを合わせた後、載置部５を検知する位置でセンサ１４を固定するとともに、載置部６を検知する位置でセンサ１７を固定する。 At the initial start-up of the substrate transfer apparatus 1, the height of the placing portion 5 when the placing portion 5 is detected by the sensor 14 and the placing portion when the placing portion 6 is detected by the sensor 17. The mounting positions of the sensor 14 and the sensor 17 are adjusted so that the height of 6 is the same. Specifically, a device such as a transit (theodolite) or a laser level is used to match the height of the placing portion 5 with the height of the placing portion 6, and then the sensor is placed at a position where the placing portion 5 is detected. 14 is fixed, and the sensor 17 is fixed at a position where the mounting portion 6 is detected.

また、制御部２２は、調整後に固定されたセンサ１４によって載置部５が検知されているときのエンコーダ２０の座標値（上下方向の基準位置に対する載置部５の移動量）をリセットするとともに、調整後に固定されたセンサ１７によって載置部６が検知されているときのエンコーダ２１の座標値（上下方向の基準位置に対する載置部６の移動量）をリセットして、エンコーダ２０の座標値とエンコーダ２１の座標値とを合わせる。 Further, the control unit 22 resets the coordinate value of the encoder 20 (the movement amount of the mounting unit 5 with respect to the vertical reference position) when the mounting unit 5 is detected by the sensor 14 fixed after the adjustment. The coordinate value of the encoder 21 when the mounting unit 6 is detected by the sensor 17 fixed after the adjustment (the moving amount of the mounting unit 6 with respect to the reference position in the vertical direction) is reset, and the coordinate value of the encoder 20 is reset. And the coordinate value of the encoder 21 are matched.

（基板搬送装置の制御方法）
基板搬送装置１では、制御部２２は、複数枚のガラス基板２が収容されたカセット３が載置部５、６に載置される前に、センサ１４で検知されている載置部５およびセンサ１７で検知されている載置部６を、センサ１４で載置部５が検知されずかつセンサ１７で載置部６が検知されなくなるまで（すなわち、センサ１４の発光素子と受光素子との間から検知板２４が外れるとともに、載置部６が有する検知板がセンサ１７の発光素子と受光素子との間から外れるまで）、昇降機構７、８によって同じ量だけ一緒に下降させる第１動作を実行する（図４の二点鎖線参照）。 (Control method of substrate transfer device)
In the substrate transfer apparatus 1, the control unit 22 controls the mounting unit 5 and the mounting unit 5 detected by the sensor 14 before the cassette 3 accommodating the plurality of glass substrates 2 is mounted on the mounting units 5 and 6. The mounting portion 6 detected by the sensor 17 is not detected by the sensor 14 and the mounting portion 6 is not detected by the sensor 17 (that is, the light emitting element and the light receiving element of the sensor 14 are separated from each other). (While the detection plate 24 is disengaged from the gap and the detection plate of the mounting portion 6 is disengaged from between the light emitting element and the light receiving element of the sensor 17), the first movement is performed by the lifting mechanisms 7 and 8 together by the same amount. (See the chain double-dashed line in FIG. 4).

また、制御部２２は、その後、昇降機構７、８によって載置部５、６を上昇させて、センサ１４で載置部５が検知されるタイミングとセンサ１７で載置部６が検知されるタイミングとのずれを確認する第２動作を実行する。すなわち、制御部２２は、第２動作において、載置部５の高さと載置部６の高さとのずれを確認する。たとえば、制御部２２は、第１動作において、センサ１４で検知されている載置部５およびセンサ１７で検知されている載置部６を３（ｍｍ）下降させ、第２動作において、載置部５、６を３（ｍｍ）上昇させる。 The control unit 22 then raises the placing units 5 and 6 by the elevating mechanisms 7 and 8 so that the sensor 14 detects the placing unit 5 and the sensor 17 detects the placing unit 6. The second operation for confirming the deviation from the timing is executed. That is, the control unit 22 confirms the deviation between the height of the placing unit 5 and the height of the placing unit 6 in the second operation. For example, the control unit 22 lowers the placement unit 5 detected by the sensor 14 and the placement unit 6 detected by the sensor 17 by 3 (mm) in the first operation, and sets the placement unit 5 in the second operation. The parts 5 and 6 are raised by 3 (mm).

なお、第２動作で確認された載置部５の高さと載置部６の高さとのずれ量が所定の基準値以上となっている場合には、制御部２２は、所定のモニターにエラー表示を行ったり、警告音を発生させたりする等の所定の異常処理を実行する。また、この場合には、基板搬送装置１のオペレータが載置部５、６の高さを再調整する。 If the amount of deviation between the height of the placing portion 5 and the height of the placing portion 6 confirmed in the second operation is equal to or greater than a predetermined reference value, the control unit 22 causes an error in a predetermined monitor. Predetermined abnormal processing such as displaying or generating a warning sound is executed. Further, in this case, the operator of the substrate transfer apparatus 1 readjusts the heights of the mounting portions 5 and 6.

また、載置部５、６にカセット３が載置されるときの載置部５、６の位置をカセット載置位置とすると、基板搬送装置１では、制御部２２は、原点位置からカセット載置位置に昇降機構７、８によって載置部５、６を移動させたときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとが所定の基準値以上にずれていれば、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとのずれ量が所定の範囲内に収まるまで、昇降機構８によって載置部６を昇降させる。 Further, when the positions of the mounting portions 5 and 6 when the cassette 3 is mounted on the mounting portions 5 and 6 are set to the cassette mounting position, in the substrate transfer apparatus 1, the control unit 22 controls the cassette mounting position from the origin position. When the placement units 5 and 6 are moved to the placement position by the lifting mechanisms 7 and 8, the height of the placement unit 5 detected by the encoder 20 and the height of the placement unit 6 detected by the encoder 21 are predetermined. If the amount of deviation of the height of the placing portion 5 detected by the encoder 20 and the height of the placing portion 6 detected by the encoder 21 falls within a predetermined range, the lifting mechanism moves. The mounting portion 6 is moved up and down by 8.

たとえば、カセット載置位置に載置部５、６を移動させたときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとが所定の基準値以上にずれていれば、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとが同じ高さになるまで、昇降機構８によって載置部６を昇降させて、載置部５の高さと載置部６の高さとを合わせる。 For example, when the placement sections 5 and 6 are moved to the cassette placement position, the height of the placement section 5 detected by the encoder 20 and the height of the placement section 6 detected by the encoder 21 are set to predetermined criteria. If the height is greater than the value, the height of the placing portion 5 detected by the encoder 20 and the height of the placing portion 6 detected by the encoder 21 become equal to each other by the elevating mechanism 8 until the placing portion 6 is lifted. Is moved up and down to match the height of the placing portion 5 with the height of the placing portion 6.

さらに、基板搬送装置１では、制御部２２は、昇降機構７、８によって載置部５、６を昇降させているときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとの差が所定の基準値以上になると、所定の異常処理を実行する。たとえば、制御部２２は、昇降機構７、８によって載置部５、６を昇降させているときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとの差が３（ｍｍ）以上になると、所定のモニターにエラー表示を行ったり、警告音を発生させたりするとともに、昇降機構７、８（具体的には、モータ２８、２９）を非常停止させる。 Furthermore, in the substrate transfer apparatus 1, the control unit 22 detects the height of the mounting unit 5 detected by the encoder 20 and the height of the mounting unit 5 detected by the encoder 21 while the mounting units 5 and 6 are being moved up and down by the elevating mechanisms 7 and 8. When the difference between the height of the mounting portion 6 and the height of the mounting portion 6 exceeds a predetermined reference value, a predetermined abnormality process is executed. For example, the control unit 22 controls the height of the placing unit 5 detected by the encoder 20 and the placing unit 6 detected by the encoder 21 when the placing units 5 and 6 are moved up and down by the elevating mechanisms 7 and 8. When the difference between the height and the height is 3 (mm) or more, an error is displayed on a predetermined monitor, a warning sound is generated, and the lifting mechanisms 7 and 8 (specifically, the motors 28 and 29) are operated. Emergency stop.

（本形態の主な効果）
以上説明したように、本形態では、制御部２２は、複数枚のガラス基板２が収容されたカセット３が載置部５、６に載置される前に、第１動作と第２動作とを実行して、載置部５の高さと載置部６の高さとのずれを確認している。また、本形態では、第２動作で確認された載置部５の高さと載置部６の高さとのずれ量が所定の基準値以上となっている場合に、制御部２２は、所定のモニターにエラー表示を行ったり、警告音を発生させたりする等の所定の異常処理を実行している。 (Main effects of this embodiment)
As described above, in the present embodiment, the control unit 22 performs the first operation and the second operation before the cassette 3 accommodating the plurality of glass substrates 2 is placed on the placing units 5 and 6. Is performed to confirm the deviation between the height of the placing portion 5 and the height of the placing portion 6. Further, in the present embodiment, when the amount of deviation between the height of the placing portion 5 and the height of the placing portion 6 confirmed in the second operation is equal to or greater than the predetermined reference value, the control unit 22 causes the predetermined amount. Predetermined abnormal processing such as displaying an error on the monitor or generating a warning sound is being performed.

そのため、本形態では、第２動作で確認された載置部５の高さと載置部６の高さとのずれ量が所定の基準値以上となっている場合に、基板搬送装置１のオペレータに、載置部５、６にカセット３を載置しないように注意を喚起して、載置部５、６にカセット３が載置されないようにすることが可能になる。また、本形態では、基板搬送装置１のオペレータに、載置部５、６の高さを再調整するように注意を喚起することが可能になるため、高さを再調整した後の載置部５、６にカセット３を載置することが可能になる。 Therefore, in the present embodiment, when the amount of deviation between the height of the placing portion 5 and the height of the placing portion 6 confirmed in the second operation is equal to or greater than a predetermined reference value, the operator of the substrate transfer apparatus 1 is informed. It is possible to call attention not to mount the cassette 3 on the mounting portions 5 and 6 and prevent the cassette 3 from being mounted on the mounting portions 5 and 6. Further, in the present embodiment, it is possible to call the operator of the substrate transfer apparatus 1 attention so as to readjust the heights of the mounting portions 5 and 6, so that the placement after the heights are readjusted. The cassette 3 can be placed on the parts 5 and 6.

したがって、本形態では、載置部５の高さと載置部６の高さとにずれが生じても、また、載置部５と載置部６とが機械的に連結されていなくても、カセット３に収容されるガラス基板２やカセット３の落下を防止することが可能になる。その結果、本形態では、基板搬送装置１の構成を簡素化しつつ、載置部５の高さと載置部６の高さとにずれが生じても、カセット３に収容されるガラス基板２やカセット３の落下を防止することが可能になる。 Therefore, in the present embodiment, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, or even if the placing portion 5 and the placing portion 6 are not mechanically connected, It is possible to prevent the glass substrate 2 and the cassette 3 housed in the cassette 3 from falling. As a result, in the present embodiment, while simplifying the configuration of the substrate transfer device 1, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, the glass substrate 2 or the cassette accommodated in the cassette 3 3 can be prevented from falling.

また、本形態では、制御部２２は、カセット載置位置に載置部５、６を移動させたときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとが所定の基準値以上にずれていれば、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとのずれ量が所定の範囲内に収まるまで、昇降機構８によって載置部６を昇降させている。 Further, in the present embodiment, the control unit 22 controls the height of the mounting unit 5 detected by the encoder 20 and the mounting position detected by the encoder 21 when the mounting units 5 and 6 are moved to the cassette mounting positions. If the height of the section 6 deviates by a predetermined reference value or more, the amount of deviation between the height of the placing section 5 detected by the encoder 20 and the height of the placing section 6 detected by the encoder 21 falls within a predetermined range. The mounting unit 6 is moved up and down by the elevating mechanism 8 until it fits inside.

そのため、本形態では、載置部５の高さと載置部６の高さとにずれが生じても、載置部５、６にカセット３が載置される前に、載置部５の高さと載置部６の高さとのずれ量を所定の範囲内に収めることが可能になる。したがって、本形態では、載置部５の高さと載置部６の高さとにずれが生じても、また、載置部５と載置部６とが機械的に連結されていなくても、カセット３に収容されるガラス基板２やカセット３の落下を防止することが可能になる。その結果、本形態では、基板搬送装置１の構成を簡素化しつつ、載置部５の高さと載置部６の高さとにずれが生じても、カセット３に収容されるガラス基板２やカセット３の落下を防止することが可能になる。 Therefore, in this embodiment, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, the height of the placing portion 5 is increased before the cassette 3 is placed on the placing portions 5 and 6. The amount of deviation between the height and the height of the mounting portion 6 can be kept within a predetermined range. Therefore, in the present embodiment, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, or even if the placing portion 5 and the placing portion 6 are not mechanically connected, It is possible to prevent the glass substrate 2 and the cassette 3 housed in the cassette 3 from falling. As a result, in the present embodiment, while simplifying the configuration of the substrate transfer device 1, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, the glass substrate 2 or the cassette accommodated in the cassette 3 3 can be prevented from falling.

さらに、本形態では、制御部２２は、昇降機構７、８によって載置部５、６を昇降させているときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとの差が所定の基準値以上になると、たとえば、昇降機構７、８を非常停止させている。そのため、本形態では、載置部５の高さと載置部６の高さとにずれが生じても、また、載置部５と載置部６とが機械的に連結されていなくても、カセット３に収容されるガラス基板２やカセット３の落下を防止することが可能になる。したがって、本形態では、基板搬送装置１の構成を簡素化しつつ、載置部５の高さと載置部６の高さとにずれが生じても、カセット３に収容されるガラス基板２やカセット３の落下を防止することが可能になる。 Further, in the present embodiment, the control unit 22 detects the height of the mounting unit 5 detected by the encoder 20 and the encoder 21 when the mounting units 5 and 6 are lifted and lowered by the lifting mechanisms 7 and 8. When the difference from the height of the mounting portion 6 becomes a predetermined reference value or more, for example, the elevating mechanisms 7 and 8 are brought to an emergency stop. Therefore, in the present embodiment, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, or even if the placing portion 5 and the placing portion 6 are not mechanically connected, It is possible to prevent the glass substrate 2 and the cassette 3 housed in the cassette 3 from falling. Therefore, in the present embodiment, while simplifying the configuration of the substrate transfer device 1, even if the height of the placing portion 5 and the height of the placing portion 6 are deviated, the glass substrates 2 and the cassettes 3 accommodated in the cassette 3 are provided. It is possible to prevent the falling of.

（他の実施の形態）
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the scope of the present invention.

上述した形態では、制御部２２は、第１動作において、載置部５、６を下降させているが、制御部２２は、第１動作において、センサ１４で検知されている載置部５およびセンサ１７で検知されている載置部６を、センサ１４で載置部５が検知されずかつセンサ１７で載置部６が検知されなくなるまで同じ量だけ一緒に上昇させても良い。この場合には、制御部２２は、第２動作において、昇降機構７、８によって載置部５、６を下降させて、センサ１４で載置部５が検知されるタイミングとセンサ１７で載置部６が検知されるタイミングとのずれを確認する。 In the above-described embodiment, the control unit 22 lowers the placement units 5 and 6 in the first operation, but the control unit 22 determines that the placement unit 5 and the placement unit 5 detected by the sensor 14 in the first operation. The mounting portion 6 detected by the sensor 17 may be lifted together by the same amount until the mounting portion 5 is not detected by the sensor 14 and the mounting portion 6 is no longer detected by the sensor 17. In this case, the control unit 22 lowers the placement units 5 and 6 by the elevating mechanisms 7 and 8 in the second operation so that the timing at which the placement unit 5 is detected by the sensor 14 and the placement process by the sensor 17 are performed. Check the deviation from the timing at which the section 6 is detected.

上述した形態において、制御部２２は、第１動作と第２動作とを実行するのであれば、カセット載置位置に載置部５、６を移動させたときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとが所定の基準値以上にずれている場合に、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとのずれ量が所定の範囲内に収まるまで、昇降機構８によって載置部６を昇降させる処理（以下、この処理を「第１処理」とする。）を実行しなくても良い。 In the above-described embodiment, if the control unit 22 executes the first operation and the second operation, when the mounting units 5 and 6 are moved to the cassette mounting position, the mounting unit detected by the encoder 20. When the height of the placing portion 5 and the height of the placing portion 6 detected by the encoder 21 are deviated by a predetermined reference value or more, the height of the placing portion 5 detected by the encoder 20 and the height detected by the encoder 21 are detected. The process of raising and lowering the placing unit 6 by the elevating mechanism 8 is executed until the amount of deviation from the height of the placing unit 6 falls within a predetermined range (hereinafter, this process is referred to as “first process”). You don't have to.

また、制御部２２は、第１動作と第２動作とを実行するのであれば、載置部５、６を昇降させているときに、エンコーダ２０で検知される載置部５の高さとエンコーダ２１で検知される載置部６の高さとの差が所定の基準値以上になった場合に、所定の異常処理を実行させる処理（以下、この処理を「第２処理」とする。）を実行しなくても良い。また、制御部２２は、第１処理を実行するのであれば、第１動作および第２動作を実行しなくても良いし、第２処理を実行しなくても良い。さらに、制御部２２は、第２処理を実行するのであれば、第１動作および第２動作を実行しなくても良いし、第１処理を実行しなくても良い。 Further, if the control unit 22 executes the first operation and the second operation, the height of the placement unit 5 detected by the encoder 20 and the encoder when the placement units 5 and 6 are raised and lowered. When the difference from the height of the mounting portion 6 detected at 21 becomes equal to or more than a predetermined reference value, a process of executing a predetermined abnormality process (hereinafter, this process is referred to as “second process”). It doesn't have to be executed. Further, the control unit 22 does not have to execute the first operation and the second operation, and does not have to execute the second processing, as long as it executes the first processing. Further, the control unit 22 does not have to execute the first operation and the second operation as long as it executes the second processing, and does not have to execute the first processing.

上述した形態において、基板搬送装置１は、カセット３にガラス基板２を搬入するための装置であっても良い。この場合には、ガラス基板２が収容されていない空のカセット３が載置部５、６に載置される。また、この場合には、カセット３に向かって後ろ側にガラス基板２が搬入される。また、上述した形態において、載置部５に、カセット３の前後方向の一端部が載置され、載置部６に、カセット３の前後方向の他端部が載置されても良い。 In the above-described embodiment, the substrate transfer device 1 may be a device for loading the glass substrate 2 into the cassette 3. In this case, the empty cassette 3 in which the glass substrate 2 is not housed is placed on the placing sections 5 and 6. Further, in this case, the glass substrate 2 is carried to the rear side toward the cassette 3. Further, in the above-described embodiment, one end of the cassette 3 in the front-rear direction may be mounted on the mounting portion 5, and the other end of the cassette 3 in the front-rear direction may be mounted on the mounting portion 6.

上述した形態において、カセット３は、ワイヤーカセット以外のカセットであっても良い。また、上述した形態において、ガラス基板２は、液晶表示装置以外の用途で使用されるガラス基板であっても良い。なお、リフトコンベヤ等の大型のガラス基板を搬送する基板搬送装置であって昇降機構を備える基板搬送装置に本発明の構成を適用することも可能である。 In the above-mentioned form, the cassette 3 may be a cassette other than the wire cassette. Further, in the above-described embodiment, the glass substrate 2 may be a glass substrate used for purposes other than the liquid crystal display device. It should be noted that the configuration of the present invention can be applied to a substrate transfer device such as a lift conveyor that transfers a large glass substrate and is provided with a lifting mechanism.

１ 基板搬送装置
２ ガラス基板
３ カセット
５ 載置部（第１載置部）
６ 載置部（第２載置部）
７ 昇降機構（第１昇降機構）
８ 昇降機構（第２昇降機構）
１４ センサ（第１センサ）
１７ センサ（第２センサ）
２０ エンコーダ（第１検知機構）
２１ エンコーダ（第２検知機構）
２２ 制御部
Ｙ 第１方向 1 Substrate Transfer Device 2 Glass Substrate 3 Cassette 5 Mounting Part (First Mounting Part)
6 Placement part (second placement part)
7 Lifting mechanism (first lifting mechanism)
8 Lifting mechanism (second lifting mechanism)
14 sensors (first sensor)
17 sensors (second sensor)
20 Encoder (first detection mechanism)
21 Encoder (second detection mechanism)
22 Control unit Y First direction

Claims (6)

複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからの前記ガラス基板の搬出または前記カセットへの前記ガラス基板の搬入を行うための基板搬送装置であって、
上下方向に直交する所定の方向を第１方向とすると、
前記カセットの第１方向の一端部が載置される第１載置部と、前記カセットの第１方向の他端部が載置される第２載置部と、前記第１載置部を昇降させる第１昇降機構と、前記第２載置部を昇降させる第２昇降機構と、前記第１載置部が上下方向の所定の位置にあることを検知するための第１センサと、前記第１センサによって前記第１載置部が検知されているときの前記第１載置部の上下方向の位置と上下方向において同じ位置に前記第２載置部があることを検知するための第２センサと、前記基板搬送装置の制御部とを備え、
前記制御部は、前記第１載置部および前記第２載置部に前記カセットが載置される前に、前記第１センサで検知されている前記第１載置部および前記第２センサで検知されている前記第２載置部を、前記第１センサで前記第１載置部が検知されずかつ前記第２センサで前記第２載置部が検知されなくなるまで、前記第１昇降機構および前記第２昇降機構によって同じ方向に同じ量だけ一緒に下降または上昇させる第１動作と、前記第１動作で前記第１載置部および前記第２載置部を下降させる場合には、その後、前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を上昇させて、前記第１センサで前記第１載置部が検知されるタイミングと前記第２センサで前記第２載置部が検知されるタイミングとのずれを確認し、前記第１動作で前記第１載置部および前記第２載置部を上昇させる場合には、その後、前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を下降させて、前記第１センサで前記第１載置部が検知されるタイミングと前記第２センサで前記第２載置部が検知されるタイミングとのずれを確認する第２動作とを実行することを特徴とする基板搬送装置。 A substrate transfer device for carrying out the glass substrates from a cassette capable of accommodating a plurality of glass substrates with a space in the vertical direction or carrying the glass substrates into the cassette,
If a predetermined direction orthogonal to the vertical direction is the first direction,
A first mounting part on which one end of the cassette in the first direction is mounted; a second mounting part on which the other end of the cassette in the first direction is mounted; and the first mounting part. A first elevating mechanism for elevating and lowering; a second elevating mechanism for elevating and lowering the second placing part; a first sensor for detecting that the first placing part is at a predetermined vertical position; A first sensor for detecting that the second mounting portion is located at the same position in the vertical direction as the position of the first mounting portion in the vertical direction when the first mounting portion is detected by the first sensor. 2 sensors and a control unit of the substrate transfer device,
The control unit controls the first placement unit and the second sensor detected by the first sensor before the cassette is placed on the first placement unit and the second placement unit. The first lifting mechanism moves the detected second mounting portion until the first mounting portion is not detected by the first sensor and the second mounting portion is not detected by the second sensor. And a first operation of lowering or raising the same amount in the same direction by the second elevating mechanism together, and if lowering the first placing part and the second placing part in the first action, then A timing at which the first mounting part and the second mounting part are raised by the first elevating mechanism and the second elevating mechanism so that the first mounting part is detected by the first sensor; If a deviation from the timing at which the second mounting portion is detected by the two sensors is confirmed and the first mounting portion and the second mounting portion are raised by the first operation, then the The timing at which the first mounting portion and the second mounting portion are lowered by the first lifting mechanism and the second lifting mechanism so that the first sensor detects the first mounting portion and the second sensor. A substrate transfer apparatus, which executes a second operation for confirming a deviation from a timing at which the second mounting portion is detected. 複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからの前記ガラス基板の搬出または前記カセットへの前記ガラス基板の搬入を行うための基板搬送装置であって、
上下方向に直交する所定の方向を第１方向とすると、
前記カセットの第１方向の一端部が載置される第１載置部と、前記カセットの第１方向の他端部が載置される第２載置部と、前記第１載置部を昇降させる第１昇降機構と、前記第２載置部を昇降させる第２昇降機構と、前記第１載置部の高さを検知するための第１検知機構と、前記第２載置部の高さを検知するための第２検知機構と、前記基板搬送装置の制御部とを備え、
前記制御部は、前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を昇降させているときに、前記第１検知機構で検知される前記第１載置部の高さと前記第２検知機構で検知される前記第２載置部の高さとの差が所定の基準値以上になると、所定の異常処理を実行することを特徴とする基板搬送装置。 A substrate transfer device for carrying out the glass substrates from a cassette capable of accommodating a plurality of glass substrates with a space in the vertical direction or carrying the glass substrates into the cassette,
If a predetermined direction orthogonal to the vertical direction is the first direction,
A first mounting part on which one end of the cassette in the first direction is mounted; a second mounting part on which the other end of the cassette in the first direction is mounted; and the first mounting part. A first elevating mechanism for elevating and lowering, a second elevating mechanism for elevating and lowering the second placing part, a first detecting mechanism for detecting the height of the first placing part, and a second placing part of the second placing part. A second detection mechanism for detecting height, and a control unit of the substrate transfer device,
The control unit detects the first detection mechanism while the first mounting mechanism and the second mounting mechanism raise and lower the first mounting unit and the second mounting unit. A substrate transfer apparatus, which executes a predetermined abnormality process when a difference between the height of the mounting portion and the height of the second mounting portion detected by the second detection mechanism is equal to or larger than a predetermined reference value. .. 複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからの前記ガラス基板の搬出または前記カセットへの前記ガラス基板の搬入を行うための基板搬送装置であって、
上下方向に直交する所定の方向を第１方向とすると、
前記カセットの第１方向の一端部が載置される第１載置部と、前記カセットの第１方向の他端部が載置される第２載置部と、前記第１載置部を昇降させる第１昇降機構と、前記第２載置部を昇降させる第２昇降機構と、前記第１載置部の高さを検知するための第１検知機構と、前記第２載置部の高さを検知するための第２検知機構と、前記基板搬送装置の制御部とを備え、
前記制御部は、前記第１載置部および前記第２載置部に前記カセットが載置されるカセット載置位置に前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を移動させたときに、前記第１検知機構で検知される前記第１載置部の高さと前記第２検知機構で検知される前記第２載置部の高さとが所定の基準値以上にずれていれば、前記第１検知機構で検知される前記第１載置部の高さと前記第２検知機構で検知される前記第２載置部の高さとのずれ量が所定の範囲内に収まるまで、前記第２昇降機構によって前記第２載置部を昇降させることを特徴とする基板搬送装置。 A substrate transfer device for carrying out the glass substrates from a cassette capable of accommodating a plurality of glass substrates with a space in the vertical direction or carrying the glass substrates into the cassette,
If a predetermined direction orthogonal to the vertical direction is the first direction,
A first mounting part on which one end of the cassette in the first direction is mounted; a second mounting part on which the other end of the cassette in the first direction is mounted; and the first mounting part. A first elevating mechanism for elevating and lowering, a second elevating mechanism for elevating and lowering the second placing part, a first detecting mechanism for detecting the height of the first placing part, and a second placing part of the second placing part. A second detection mechanism for detecting height, and a control unit of the substrate transfer device,
The control unit controls the first mounting unit and the second mounting unit to move to the cassette mounting position where the cassette is mounted on the first mounting unit and the second mounting unit. When the second placement unit is moved, the height of the first placement unit detected by the first detection mechanism and the height of the second placement unit detected by the second detection mechanism are If it is deviated by a predetermined reference value or more, the amount of deviation between the height of the first placement portion detected by the first detection mechanism and the height of the second placement portion detected by the second detection mechanism. The substrate transfer apparatus, wherein the second mounting part is moved up and down by the second elevating mechanism until is within a predetermined range. 複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからの前記ガラス基板の搬出または前記カセットへの前記ガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、前記カセットの第１方向の一端部が載置される第１載置部と、前記カセットの第１方向の他端部が載置される第２載置部と、前記第１載置部を昇降させる第１昇降機構と、前記第２載置部を昇降させる第２昇降機構と、前記第１載置部が上下方向の所定の位置にあることを検知するための第１センサと、前記第１センサによって前記第１載置部が検知されているときの前記第１載置部の上下方向の位置と上下方向において同じ位置に前記第２載置部があることを検知するための第２センサとを備える基板搬送装置の制御方法であって、
前記第１載置部および前記第２載置部に前記カセットが載置される前に、前記第１センサで検知されている前記第１載置部および前記第２センサで検知されている前記第２載置部を、前記第１センサで前記第１載置部が検知されずかつ前記第２センサで前記第２載置部が検知されなくなるまで、前記第１昇降機構および前記第２昇降機構によって同じ方向に同じ量だけ一緒に下降または上昇させる第１動作と、前記第１動作で前記第１載置部および前記第２載置部を下降させる場合には、その後、前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を上昇させて、前記第１センサで前記第１載置部が検知されるタイミングと前記第２センサで前記第２載置部が検知されるタイミングとのずれを確認し、前記第１動作で前記第１載置部および前記第２載置部を上昇させる場合には、その後、前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を下降させて、前記第１センサで前記第１載置部が検知されるタイミングと前記第２センサで前記第２載置部が検知されるタイミングとのずれを確認する第２動作とを実行することを特徴とする基板搬送装置の制御方法。 A substrate transfer device for carrying out the glass substrate from a cassette capable of accommodating a plurality of glass substrates with a space in the vertical direction or loading the glass substrate into the cassette, wherein When a predetermined direction orthogonal to each other is defined as a first direction, a first mounting portion on which one end portion of the cassette in the first direction is mounted and a second mounting portion on which the other end portion of the cassette in the first direction is mounted. The placing part, the first elevating mechanism for raising and lowering the first placing part, the second elevating mechanism for raising and lowering the second placing part, and the first placing part are at predetermined positions in the vertical direction. And a second sensor at the same position in the vertical direction as the position in the vertical direction of the first mounting part when the first mounting part is detected by the first sensor. A method of controlling a substrate transfer device, comprising: a second sensor for detecting the presence of a mounting portion,
Before the cassette is placed on the first placing portion and the second placing portion, the first placing portion and the second sensor detected by the first sensor are detected. The second mounting part is moved to the first elevating mechanism and the second elevating mechanism until the first mounting part is not detected by the first sensor and the second mounting part is not detected by the second sensor. A first operation of lowering or raising the same amount in the same direction together by a mechanism and, in the case of lowering the first placing portion and the second placing portion in the first operation, then the first raising/lowering operation is performed. Mechanism and the second elevating mechanism raises the first placing part and the second placing part so that the first sensor detects the first placing part and the second sensor causes the first placing part to detect the first placing part. 2 When confirming a deviation from the timing at which the placement section is detected and raising the first placement section and the second placement section in the first operation, then the first lifting mechanism and the The second lifting mechanism lowers the first placement part and the second placement part, and the timing when the first placement part is detected by the first sensor and the second placement part by the second sensor A method of controlling a substrate transfer apparatus, comprising: performing a second operation for confirming a deviation from a timing at which a unit is detected. 複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからの前記ガラス基板の搬出または前記カセットへの前記ガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、前記カセットの第１方向の一端部が載置される第１載置部と、前記カセットの第１方向の他端部が載置される第２載置部と、前記第１載置部を昇降させる第１昇降機構と、前記第２載置部を昇降させる第２昇降機構と、前記第１載置部の高さを検知するための第１検知機構と、前記第２載置部の高さを検知するための第２検知機構とを備える基板搬送装置の制御方法であって、
前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を昇降させているときに、前記第１検知機構で検知される前記第１載置部の高さと前記第２検知機構で検知される前記第２載置部の高さとの差が所定の基準値以上になると、所定の異常処理を実行することを特徴とする基板搬送装置の制御方法。 A substrate transfer device for carrying out the glass substrate from a cassette capable of accommodating a plurality of glass substrates with a space in the vertical direction or loading the glass substrate into the cassette, wherein When a predetermined direction orthogonal to each other is defined as a first direction, a first mounting portion on which one end portion of the cassette in the first direction is mounted and a second mounting portion on which the other end portion of the cassette in the first direction is mounted. A mounting unit, a first elevating mechanism that elevates and lowers the first mounting unit, a second elevating mechanism that elevates and lowers the second mounting unit, and a first for detecting the height of the first mounting unit. 1. A method of controlling a substrate transfer apparatus, comprising: a first detection mechanism; and a second detection mechanism for detecting the height of the second mounting portion,
The height of the first placement part detected by the first detection mechanism when the first placement part and the second placement part are raised and lowered by the first lifting mechanism and the second lifting mechanism. And a height of the second mounting portion detected by the second detection mechanism exceeds a predetermined reference value, a predetermined abnormality process is executed. 複数枚のガラス基板を上下方向に間隔をあけた状態で収容可能なカセットからの前記ガラス基板の搬出または前記カセットへの前記ガラス基板の搬入を行うための基板搬送装置であって、上下方向に直交する所定の方向を第１方向とすると、前記カセットの第１方向の一端部が載置される第１載置部と、前記カセットの第１方向の他端部が載置される第２載置部と、前記第１載置部を昇降させる第１昇降機構と、前記第２載置部を昇降させる第２昇降機構と、前記第１載置部の高さを検知するための第１検知機構と、前記第２載置部の高さを検知するための第２検知機構とを備える基板搬送装置の制御方法であって、
前記第１載置部および前記第２載置部に前記カセットが載置されるカセット載置位置に前記第１昇降機構および前記第２昇降機構によって前記第１載置部および前記第２載置部を移動させたときに、前記第１検知機構で検知される前記第１載置部の高さと前記第２検知機構で検知される前記第２載置部の高さとが所定の基準値以上にずれていれば、前記第１検知機構で検知される前記第１載置部の高さと前記第２検知機構で検知される前記第２載置部の高さとのずれ量が所定の範囲内に収まるまで、前記第２昇降機構によって前記第２載置部を昇降させることを特徴とする基板搬送装置の制御方法。 A substrate transfer device for carrying out the glass substrate from a cassette capable of accommodating a plurality of glass substrates with a space in the vertical direction or loading the glass substrate into the cassette, wherein When a predetermined direction orthogonal to each other is defined as a first direction, a first mounting portion on which one end portion of the cassette in the first direction is mounted and a second mounting portion on which the other end portion of the cassette in the first direction is mounted. A mounting unit, a first elevating mechanism that elevates and lowers the first mounting unit, a second elevating mechanism that elevates and lowers the second mounting unit, and a first for detecting the height of the first mounting unit. 1. A method of controlling a substrate transfer apparatus, comprising: a first detection mechanism; and a second detection mechanism for detecting the height of the second mounting portion,
The first mounting part and the second mounting part are placed at the cassette mounting position where the cassette is mounted on the first mounting part and the second mounting part by the first elevating mechanism and the second elevating mechanism. When the section is moved, the height of the first placement section detected by the first detection mechanism and the height of the second placement section detected by the second detection mechanism are equal to or greater than a predetermined reference value. If there is a deviation between the heights of the first placing portion detected by the first detecting mechanism and the height of the second placing portion detected by the second detecting mechanism, the amount of deviation is within a predetermined range. The method for controlling a substrate transfer apparatus, comprising: raising and lowering the second mounting portion by the second elevating mechanism until the second mounting portion is accommodated.
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