JP2010260025A - Carriage-type transporting device and conveying and assembling method of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To miniaturize a device for transportation, and enable accurate positioning in assembling these components by dividing a gantry and rack of a paste coating apparatus. <P>SOLUTION: The paste coating apparatus keeps the gantry 2B removable from the rack 1. A carriage-type transporting device includes two carriages 40a, 40b and they are configured of the same type. The carriage 40a keeps an upside down U-shaped external leg 43a and an H-shaped internal leg 44a rotatably mounted in the vicinity of the center, the upper ends of the external leg 43a and the internal leg 44a movable in contact with a ceiling plate 46a, and these lower ends movable in contact with a bottom plate 45a. This allows the external leg 43a and internal leg 44a to be rotated, thereby moving the ceiling plate 46a up and down in response to the extension movement of a carriage servo motor unit 42a. Additionally, the ends of a horizontal beam 2a in the gantry 2B are loaded and fixed on each ceiling plate 46a, 46b of the carriages 40a, 40b. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a paste application apparatus for applying a paste on a substrate in the process of manufacturing a flat panel, and for dropping a liquid crystal, and in particular, attaching a gantry to which an application nozzle is attached to a gantry, The present invention relates to a carriage type transport device for removal and a transport and assembly method.

  As an example of a conventional paste coating apparatus, a structure in which a gate-type base unit including a gantry frame and a table unit on which a substrate is placed can be separated (see, for example, Patent Document 1).

  When transporting such a paste application device by a truck or the like, once the table unit is detached from the portal base unit and moved to the outside of the portal base unit, a space is provided inside the portal base unit, Next, the gantry frame is rotated and folded. Thereby, it can deform | transform so that an occupation space may become small at the time of the transfer on a truck etc. Regarding the position reproducibility by the folding operation, the position adjustment is facilitated by storing the value using an absolute value encoder.

  As another example, there is known a paste coating apparatus having a gantry structure provided with a coating head, in which the coating head performs a paste coating operation on the glass substrate (see, for example, Patent Document 2). ).

  In such a paste application device, two gantry units are installed on the upper part of the gantry, the application head is driven in the Y-axis direction on the lateral beams of the gantry, and the gantry itself is driven in the X-axis direction by a linear motor. is there.

JP 2008-55554 A Japanese Patent No. 3701882

  In the field of flat panels such as LCDs, the size of glass substrates is rapidly increasing, and along with this, paste coating devices are also increasing in size. In the method of drawing only by moving the nozzle up and down, it is difficult to save space.

  Therefore, in the paste application apparatus described in Patent Documents 1 and 2 described above, when drawing the paste, the glass substrate is moved on the X-axis table, and is installed so as to be movable in the Y-axis direction on the portal frame installed at the top. A method of drawing a paste with a coating nozzle has been proposed. This is a system in which a glass substrate and a coating nozzle apply paste while changing their relative positional relationship, and the apparatus can be miniaturized.

  However, if the size of the glass substrate is further increased, and the paste coating apparatus is enlarged proportionally with this method, the width limit of the transport vehicle is exceeded and transportation becomes difficult.

  Therefore, a gantry having a horizontal beam provided with a coating nozzle and its moving mechanism, and a portion that supports the moving mechanism of the gantry fixedly installed on the gantry are arranged outside or below the table on which the substrate is mounted. There has been proposed a structure that can be divided at positions.

  However, in such a structure, the problem is how to assemble the divided gantry into a gantry with high accuracy. Even if trying to reproduce the high-precision assembly state by newly increasing the number of movable parts and measuring the position, it is extremely difficult to eliminate the slight displacement in the movable part, and the assembly state is reproduced by position measurement in this way Attempting to achieve perfect reproduction is equally difficult. Also, transport by truck or the like is performed exclusively for installing the paste application device at the destination, and once the paste application device is installed, it is rare to transfer it frequently. However, in many cases, reliable positioning during assembly is preferred.

  The object of the present invention is to solve such a problem and to reduce the size of the device by dividing the gantry and the pedestal and to transport the device, and then to support a paste application device that enables precise positioning when assembling them. It is an object of the present invention to provide a light weight and simple cart type conveying device and a conveying and assembling method.

  Another object of the present invention is a small, lightweight, and simple cart that can be reliably removed even during disassembly by a procedure reverse to that during assembly, and that does not interfere with position reproducibility in subsequent reassembly. It is to provide a transfer apparatus and a transfer and assembly method.

  In order to achieve the above object, the present invention provides a gantry in which a coating head for discharging a paste from a nozzle discharge port is movably installed on a gantry and placed on a substrate placement table installed on the gantry. The gantry moves to the substrate and transports the gantry of the paste application device that discharges paste from the nozzle discharge port onto the substrate, and supports each end of the gantry 2 The carriage is characterized by comprising vertical movement means that can change the height of the end of the gantry to be supported.

  Further, the cart type transport device according to the present invention is characterized in that the both ends of the gantry are supported by bolting the both ends of the gantry to the mounting surface of the cart.

  Furthermore, the cart type transfer device according to the present invention is characterized in that the vertical movement means is driven by an electric motor.

  Furthermore, in the cart-type transport device according to the present invention, the vertical movement means of each transport cart driven by the electric motor starts the vertical motion almost simultaneously when the height is changed, and operates in conjunction with substantially the same speed. It is characterized by that.

  In order to achieve the above object, the present invention provides a gantry in which a coating head for discharging a paste from a nozzle discharge port is movably installed on a gantry and placed on a substrate placement table installed on the gantry. In the method of transporting and assembling the gantry by the transport carriage for transporting the gantry of the paste application device that transports the gantry to the substrate and ejects the paste from the nozzle discharge port onto the substrate, the transport carriage is composed of two units. As a set, each end of the gantry is supported by a transporting carriage, and the height of both ends of the supported gantry can be changed by the upper and lower means in each transporting carriage.

  Further, the transport and assembly method according to the present invention is characterized in that the support of both ends of the gantry is based on bolting the both ends of the gantry to the mounting surface of the transport carriage.

  Furthermore, the conveying and assembling method according to the present invention is characterized in that the vertical movement means is driven by an electric motor.

  Further, according to the conveying and assembling method of the present invention, the vertical movement means of each conveyance carriage driven by the electric motor starts the vertical movement almost simultaneously when the height is changed, and operates in conjunction with substantially the same speed. It is characterized by that.

  According to the present invention, firstly, even if the glass substrate to be handled is enlarged and the gantry supporting the coating head is accordingly enlarged, the gantry can be assembled and removed, and the apparatus is made smaller and transported. Secondly, assembly and removal of the gantry can be performed easily and accurately, and thirdly, by using the gantry in a state separated from the gantry as a means for conveying, There is no need to prepare additional means for lowering.

It is a perspective view which shows one Embodiment of the trolley | bogie type conveying apparatus by this invention, and a conveyance and an assembly method. It is a perspective view which shows the assembled state of one specific example of the paste coating device. It is a perspective view which expands and shows the head part in the application | coating head part shown in FIG. It is a block diagram which shows one specific example of the control system of the paste coating apparatus shown in FIG. FIG. 5 is a block diagram illustrating a specific example of a sub control unit in FIG. 4. It is a flowchart which shows a specific example of the whole operation | movement of the paste coating device shown in FIG. It is a perspective view which shows one specific example of the attaching part of the gantry in FIG. 2, and a mount frame. It is a figure which shows the speed control pattern of the conveyance trolley | bogie of embodiment shown in FIG. It is a flowchart which shows a specific example of the procedure of the operation | work which assembles a gantry to a mount frame using the trolley | bogie conveyance apparatus of embodiment shown in FIG. It is a flowchart which shows a specific example of the procedure of the operation | work which removes a gantry from the mount frame 1 using the trolley | bogie conveyance apparatus of embodiment shown in FIG.

  Along with the increase in the size of the equipment, it is becoming difficult to transport the product from the manufacturer to the installation site, etc., with the equipment in an integrated state after assembly and adjustment work due to road width restrictions. .

  Therefore, in the present invention, the transport cart supports the gantry side in a state where the gantry side and the linear motion guide side are separable in the vicinity of the connection portion between the support body of the gantry and the linear motion guide, and remains supported in this way. It can be held for a long time. As a result, at the time of land transportation, the gantry side and the straight body guide side can be divided and transported, and the installation destination can be assembled and connected without degrading the accuracy, so that the apparatus can be operated. At this time, the gantry mounted on the transport carriage has a structure that can move up and down while maintaining a horizontal state.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The embodiment described below relates to a paste coating apparatus that draws a paste pattern (seal material pattern) on a substrate surface with a portal frame structure. Similarly, a liquid crystal is formed on a substrate with a portal frame structure. Needless to say, the present invention can also be applied to a dripping apparatus for dripping water.

  FIG. 1 is a perspective view showing an embodiment of a carriage type conveying apparatus and a conveying and assembling method according to the present invention, wherein 1 is a stand, 2B is a gantry, 2b is a horizontal beam, and 5 is a substrate mounting table (substrate holding mechanism). , 18ab is a motor driver, 40 is a cart type transport device, 40a and 40b are transport carts, 41a and 41b are gantry fixing members, 42a and 42b are servo motor units for the transport cart, 43a and 43b are outer legs, 44a and 44b are Inner legs, 45a and 45b are bottom plates, 46a and 46b are top plates, and 50a and 50b are cart motor drivers. The parts corresponding to those in FIG.

  In the figure, a cart type transport device 40 according to this embodiment comprises two transport carts 40a and 40b and cart motor drivers 50a and 50b for driving them. These carriages 40a and 40b are connected to one or a plurality of application heads (not shown) of the paste application device by means of carriage motor drivers 50a and 50b controlled by a motor controller 17ab of a main controller provided inside the gantry 1. ) To convey the gantry (portion-shaped frame).

  Here, this paste coating apparatus has a configuration in which two gantry units are mounted on a gantry 1 provided with a substrate mounting table 5 on the upper surface side so as to be movable in the X-axis direction. It can be removed from 1 or attached to the gantry 1. When the paste applying apparatus is transported, the transport carts 40 a and 40 b are used to remove the gantry from the gantry 1 and attach the gantry to the gantry 1.

  FIG. 1 shows a state in which one gantry 2B removed from the gantry 1 is placed on a cart-type transport device, that is, two transport carts 40a and 40b.

  In the following, first, a specific example of a paste coating apparatus using the carriage type transport apparatus and the transport method according to the present invention will be described, and the embodiment shown in FIG. 1 will be described later by taking this paste coating apparatus as an example.

  FIG. 2 is a perspective view showing an assembled state of a specific example of the paste coating apparatus, wherein 1 is a gantry, 2A and 2B are gantry, 2a and 2b are horizontal beams, 3 is a Y-axis direction moving mechanism (linear rail), 4a and 4b are rails, 5 is a substrate holding mechanism, 6a and 6b are X-axis direction moving mechanisms, 7a and 7b are transverse beam side support members, 8a and 8b are gantry side support members, and 9 is a Z axis movement table support bracket. Reference numeral 10 denotes a Z-axis moving table, 11 denotes a Z-axis servo motor, and 12 denotes a coating head portion.

  In addition, although the number is abbreviate | omitted, in order to avoid becoming complicated, each part of the some coating head installed facing has the same structure.

  In the figure, two gantry 2A and 2B arranged in the X-axis direction and facing each other are provided on the gantry 1. The gantry 2B is composed of a transverse beam 2b whose length direction is the Y-axis direction and transverse beam-side support members 7a and 7b that are fixed to both ends thereof, and one transverse beam-side support member 7a is attached to the X axis of the gantry 1 The X-axis direction moving mechanism 6a is fastened to the moving frame-side support member 8a along the rail 4a provided on one side along the same side, and the other horizontal beam-side support member 7b is similarly connected to the X of the frame 1 Along with the rail 4b provided on the other side along the axis, the X-axis direction moving mechanism 6b is fastened to the moving base support member 32b. Thereby, the gantry 2b is moved in the X-axis direction by the two X-axis direction moving mechanisms 6a and 6b.

  The gantry 2A is the same, and is composed of a cross beam 2a and a cross beam side support member fixedly provided at both ends of the cross beam 2a. Fastened to a gantry-side support member that moves in the X-axis direction along the rails 4a and 4b. Thereby, the gantry 2a is also moved in the X-axis direction by the X-axis direction moving mechanism.

  Between the rails 4a and 4b, a substrate mounting table 5 for holding a substrate (not shown) is provided, and the gantry 2A and 2B having the above-described configuration is configured to hold the substrate mounting table 5, The horizontal beams 2a and 2b of the gantry 2A and 2B move in the X-axis direction while crossing the substrate mounting table 5 over the entire Y-axis direction.

  A linear motion guide in the Y-axis direction is provided on the surface of the lateral beam 2a of the gantry 2A facing the gantry 2B, along which a plurality of application head units 12 having linear motors extend in the Y-axis direction. Arranged and provided. Each of these coating heads 12 is moved in the Y-axis direction along the surface of the gantry 2A by the Y-axis direction moving mechanism (linear rail) 3.

  In each of the plurality of coating head sections 12, a Z-axis moving table support bracket in which a Y-axis direction moving linear servo motor for supporting these is provided on the back side and a Z-axis servo motor 11 is provided on the front side. 9 is provided. The Z-axis moving table support bracket 9 is provided with a Z-axis moving table 10 for moving the paste application part up and down by the Z-axis servo motor 11.

  The gantry 2B is the same, and a plurality of coating head portions each provided with a linear motor are arranged in the Y-axis direction on the surface of the transverse beam 2b facing the gantry 2A. Each moves in the Y-axis direction along the surface of the gantry 2B by the Y-axis direction moving mechanism (linear rail).

  3 is an enlarged perspective view showing a head portion of the coating head portion 12 of FIG. 2, wherein 13 is a paste storage cylinder (syringe), 14 is a nozzle support, 15 is a nozzle, 16 is a distance meter, 17 is It is a substrate.

  In FIG. 2, a Z-axis moving table 10 (FIG. 2) includes a nozzle support 14 provided with a paste storage cylinder 13 and a nozzle 15, a distance meter 16, and a lens barrel (not shown) having a light source capable of illumination. ), An image recognition camera (not shown) is attached. The paste storage tube 13 to the tip of the nozzle 15 are supported by a nozzle support 14.

  The above-described lens barrel and image recognition camera are used for parallel adjustment and spacing adjustment of the application nozzles of each application head unit 12, and also for alignment of the substrate 17 and shape recognition of the paste pattern. Further, it is provided so as to face the substrate 17.

  The distance meter 16 measures the distance from the tip of the nozzle 15 to the surface (upper surface) of the substrate 17 made of glass by a non-contact type triangulation method. That is, a light emitting element is provided in the casing of the distance meter 16, and the laser light emitted from the light emitting element is reflected at the measurement point S on the substrate 17, and is received by the light receiving element also provided in the casing. The distance between the tip of the nozzle 15 and the substrate 17 is measured according to the position. Further, the measurement point S of the laser beam on the substrate 17 and the position immediately below the nozzle 15 are shifted by a slight distances ΔX and ΔY on the substrate 17. Therefore, there is almost no difference between the measurement result of the distance meter 16 and the distance from the tip of the nozzle 15 to the surface (upper surface) of the substrate 17. Therefore, by controlling the Z-axis movement table 10 (FIG. 2) based on the measurement result of the distance meter 16, the surface of the substrate 17 is moved from the tip of the nozzle 15 to the unevenness (undulation) of the surface of the substrate 17. The distance (interval) to (upper surface) can be kept constant.

  In this way, the distance (interval) from the tip of the nozzle 15 to the surface (upper surface) of the substrate 17 is kept constant, and the amount of paste discharged from the nozzle 15 per unit time is kept constant. Thus, the paste pattern applied and drawn on the substrate 17 has a uniform width and thickness.

  FIG. 4 is a block diagram showing a specific example of the control system of the paste application apparatus shown in FIG. 2, wherein 18a is a main control unit, 18aa is a microcomputer, 18ab is a motor controller, 18ac is a data communication bus, and 18ad is an external unit. Interface, 18ae is an image recognition device, 18af is a Y-axis linear motor driver for moving each coating head, 18ag is an X-axis linear motor driver for adjusting the distance between coating heads, 18ah is a θ-axis table motor driver, 18b is a sub-control unit, 18c is a hard disk, 18d is a USB memory, 18e is a communication cable, 18f is a monitor, 18g is a keyboard, 19 is a regulator, 20 is a valve unit, and 21 is an image recognition camera.

  In the figure, a main controller 18a for controlling a linear motor that drives each mechanism and a servo motor that moves a table is provided inside the gantry 1 (FIG. 2). The main controller 18a is connected to the sub controller 18b via the communication cable 18e. The sub-control unit 18b controls the servo motor 10 (FIG. 2) that drives the Z-axis movement table 10 (FIG. 2). Connected to the main controller 18a are a monitor 18f, a keyboard 18g, a hard disk 18c as an external storage device, and a USB memory 18d. Data or the like input from the keyboard 18g is stored and stored in a storage medium such as a hard disk 18c or a USB memory 18d that is an external storage device.

  As shown in FIG. 1, the carriage motor drivers 50 a and 50 b are drivers for the carriage motors 42 a and 42 b that serve as a drive source for the vertical movement of the carriages 40 a and 40 b of the carriage type transport device. There is a method of manually moving up and down while measuring the heights of the two transport carriages 40a and 40b, but in this embodiment, a motor is employed.

  The main control unit 18a receives a video signal obtained from any of the microcomputer 18aa, the motor controller 18ab, the axis drivers 18af to 18ah such as the X axis, the Y axis, and the θ axis, and the plurality of image recognition cameras 21 for each position. An external interface 18ad for controlling the image processing device 18ae to be processed, the sub-control unit 18b, the regulator 19, and the valve unit 20 is incorporated.

  Although not shown in the drawing, the microcomputer 18aa has a main processing unit, a ROM storing a processing program for performing coating drawing, which will be described later, processing results in the main processing unit, and input data from the external interface 18ad and the motor controller 18ab. And an input / output unit for exchanging data with the external interface 18ad and the motor controller 18ab.

  Each motor has a built-in linear scale that detects the position and an encoder that detects the amount of rotation. The detection results are returned to the respective axis drivers 18f to 17h such as the X axis, Y axis, and table Y axis to control the position. Is doing.

  FIG. 5 is a block diagram showing a specific example of the sub-control unit 18b in FIG. 4, in which 18ba is a microcomputer, 18bb is a motor controller, 18bc is a data communication bus, 18bd is an external interface, and 18bi is a Z-axis motor driver. The parts corresponding to those in the previous drawings are given the same reference numerals.

  In the figure, the sub-control unit 18b has a microcomputer 18ba, a motor controller 18bb, a Z-axis driver 18bi, and an external interface 18bd for inputting height data obtained by the distance meter 16 and transmitting signals to the main control unit 18a. is doing. Although not shown, the microcomputer 18ba includes a ROM that stores a main calculation unit and a processing program for controlling the height of the nozzle 15 at the time of coating drawing, which will be described later, processing results in the main calculation unit, and an external interface 18bd. And an RAM for storing input data from the motor controller 18bb, an input / output unit for exchanging data with the external interface 18bd and the motor controller 18bb, and the like. The Z-axis motor 10 (FIG. 2) incorporates an encoder that detects the amount of rotation, and the detection result is returned to the Z-axis driver 18bi to control the position of the Z-axis motor 10.

  Under the cooperative control of the main control unit 18a and the sub control unit 18b described above, each motor in the paste coating apparatus shown in FIG. 2 is input from the keyboard 18g and stored in the RAM of the microcomputer 18aa. The substrate 17 (FIG. 3) held on the substrate mounting table 5 (FIG. 2) is moved by an arbitrary distance in the X-axis direction and the nozzle portion is moved up and down The supported nozzle 15 (FIG. 3) is moved through the Z-axis moving table 10 (FIG. 2) by the Y-axis direction moving mechanism 3 (FIG. 2) of the application head of the horizontal beams 2a and 2b (FIG. 2). An arbitrary distance is moved in the direction, and during the movement, the air pressure set in the paste storage cylinder 13 (FIG. 3) is continuously applied, and the paste is discharged from the discharge port at the tip of the nozzle 15 to be desired on the substrate 17. Paste pattern It is applied.

  While the nozzle 15 is moving horizontally in the X-axis direction, the distance meter 16 (FIG. 3) measures the distance between the nozzle 15 and the substrate 17, and the nozzle 15 is moved to the Z-axis movement table so as to always maintain a constant distance. Controlled by 10 vertical movements.

  FIG. 6 is a flowchart showing a specific example of the overall operation of the paste application apparatus shown in FIG.

  In the figure, when the power is turned on (step 100), first, the initial setting of the paste coating apparatus is executed (step 101). In this initial setting step, in FIG. 2, by driving the motor for moving each axis and the Z-axis moving table 10, the substrate mounting table 5 is moved in the X direction to be positioned at a predetermined reference position. The nozzle 15 (FIG. 3) is set at a predetermined origin position so that the paste discharge port becomes a position where paste application starts (that is, the paste application start point), and further, paste pattern data and substrate position data. , Paste discharge end position data is set.

  The data is input from the keyboard 18g (FIG. 4), and the input data is stored in the RAM built in the microcomputer 18aa (FIG. 4) as described above.

  When this initial setting step (step 101) is completed, the substrate 17 is then mounted and held on the substrate suction mechanism 5 (FIG. 2) (step 102).

  Subsequently, substrate preliminary positioning processing (step 103) is performed. In this process, the positioning marks on the substrate 17 mounted on the substrate mounting table 5 are photographed using an image recognition camera set from among the plurality of image recognition cameras 21, and the center of gravity position of the positioning marks is imaged. The inclination in the θ direction of the substrate 17 obtained by processing is detected, and the axis drivers 18af to 18ah (FIG. 4) are controlled accordingly to drive the axis servo motors to move the coating head in the Y axis direction. The inclination in the θ direction is corrected. Thus, the substrate preliminary positioning process (step 103) is completed.

  Next, paste pattern drawing processing (step 104) is performed. In this process, first, the ejection port of the nozzle 15 of each coating head unit 12 (FIG. 2) is moved to the coating start position of the substrate 17 to precisely position the nozzle.

  Next, the servo motor of each application head unit 12 and the Z-axis movement table 10 (FIG. 2) are operated to set the height of the nozzle 15 to the paste pattern drawing height.

  The nozzle 15 is lowered by the initial moving distance based on the initial moving distance data of the nozzle. In the subsequent operation, the surface height of the substrate 17 is measured by the distance meter 16 (FIG. 3) of each coating head unit 12, and the tip of the nozzle 15 of each coating head unit 12 is set to a height at which a paste pattern is drawn. If the drawing height cannot be set, the nozzle 15 is lowered by a minute distance, the surface measurement of the substrate 17 and the minute distance descent of the nozzle 15 are repeated, and the tip of the nozzle 15 is moved. Is set to the application drawing height of the paste pattern.

  When the above processing is completed, the gantry 2A, 2B is moved in the X-axis direction based on the paste pattern data stored in the RAM of the microcomputer 18aa (FIG. 4) and the inclination in the θ direction. The coating head unit 12 is driven in the Y-axis direction, and the nozzle 15 and the substrate 17 in accordance with the paste pattern data in a state where the paste discharge port of the nozzle 15 in each head 13 faces the substrate 17. Move in the X- and Y-axis directions, and the air pressure set in the paste storage cylinder 13 (FIG. 3) is applied to start the discharge of the paste from the paste discharge port of the nozzle 15.

  In this way, application of the paste pattern to the substrate 17 is started.

  Along with this, as described above with reference to FIG. 5, the microcomputer 18 ba of the sub-control unit 18 b determines the distance between the paste discharge port of the nozzle 15 and the surface of the substrate 17 from the distance meter 16 in each coating head unit 12. Actual measurement data is input, thereby measuring the undulation of the surface of the substrate 17 and controlling the Z-axis driver 18bi according to the measured value to drive the Z-axis servo motor 11 (FIG. 2). The set height of the nozzle 15 from the surface of the substrate 17 is kept constant. Thereby, a paste pattern can be apply | coated with a desired application amount.

  As described above, drawing of the paste pattern proceeds. If the paste discharge port of the nozzle 15 is the end of the drawing pattern determined by the paste pattern data on the substrate 17, Returning to the measurement process of the surface undulation of the substrate again, the above-described coating drawing is repeated until the paste pattern formation reaches the end of the drawing pattern.

  When the drawing pattern end is reached, the Z-axis servo motor 11 is driven to raise the nozzle 15 and the paste pattern drawing step (step 104) is completed.

  Next, the process proceeds to a substrate discharging process (step 105), the holding of the substrate 17 by the substrate holding mechanism 2 (FIG. 2) is released, and the substrate is discharged out of the apparatus.

  Then, it is determined whether or not all the above processes are to be stopped (step 105). When the paste film is formed with the same pattern on a plurality of substrates (“Yes” in step 106), the substrate mounting process (step 320), when such a series of processing is completed for all the substrates (“No” in step 106), all the operations are completed (step 107).

  FIG. 7 is a perspective view showing a specific example of a mounting portion between the gantry 2 shown in FIG. 2 (generic name of the gantry 2A and 2B) and the gantry 1, and 22 is a fastening bolt. Corresponding portions are denoted by the same reference numerals and redundant description is omitted.

  In this figure, a gantry-side support member 8a is fixed to the front end of the cross beam-side support member 7a of the gantry 2 and is on the upper surface of the X-axis direction moving mechanism 6 that moves on the rail 4a provided on the gantry 1. The gantry-side support member 8a is placed on. In this manner, with the gantry-side support member 8 a placed on the X-axis direction moving mechanism 6, the gantry-side support member 8 a is fastened to the X-axis direction moving mechanism 6 by the fastening bolts 22. Fixed. In this way, each gantry 2 can be moved in the X-axis direction on the gantry 1 with the X-axis direction moving mechanism 6 fixed.

  Further, when the gantry 2 is separated from the gantry 1, the fastening bolt 22 may be removed.

  Next, an embodiment of the cart type transfer device and the transfer and assembly method according to the present invention shown in FIG. 1 will be described. In addition, since the structure of the conveyance trolley 40a and the conveyance trolley 40b is the same, one conveyance trolley 40a is demonstrated.

  In the same figure, two bar-shaped members are connected at the upper part and the outer leg 43a having the shape of a letter "U" with a downward opening and two bar-shaped members are connected at the center to form a letter "H". The inner leg 44a having a shape is attached so as to be rotatable by being connected to the left and right by a rotary hinge near the center. The lower end of the outer leg 43a is fixed to the bottom plate 45a so as to be rotatable in the vertical plane direction, and the upper end of the outer leg 43a is provided with a roller, and the roller abuts so as to roll on the back of the top plate 46a. ing. On the other hand, a roller is attached to the lower end of the inner leg 43a, and this roller is in contact with the bottom plate 45a so as to roll. The upper end of the inner leg 44a is fixed to the back of the top plate 46a so as to be rotatable in the vertical plane direction.

  The carriage motor servomotor unit 42a has a pinion attached to the tip of the shaft, and has a structure that is linear, that is, expands and contracts by engaging with a rack supported by a guide.

  The carriage motor servomotor unit 42a is fixed to the horizontal bar near the center of the inner leg 44a so as to be rotatable in the vertical plane direction. The other end of the carriage motor servomotor unit 42a is fixed to the bottom plate 45a so as to be rotatable in the vertical plane direction. As a result, the outer leg 43a and the inner leg 44a are rotated by the rollers while the outer leg 43a and the inner leg 44a are rotated by the rollers, and are tilted at different angles to move the top plate 46a up and down.

  The servo motor unit 42a for the carriage is controlled and driven from the motor controller 18ab via the carriage motor driver 50a. Here, the two systems of the carriage motor servo motor unit 42a of the carriage 40a and the carriage carriage servo motor unit 42b of the carriage 40b are connected to the carriage motor drivers 50a and 50b, respectively, so that one common motor is used. The controller 18ab controls to start and stop at the same time and to drive at a constant speed.

  As shown in FIG. 8, the operation pattern is trapezoidal driving, and can be started and stopped smoothly by acceleration / deceleration and stopped at the same position.

  When the gantry is loaded on the transport carriages 40a and 40b for a long time, the center of gravity is lowered when the height is set to the lowest position, so that the loaded state is safe. Furthermore, it is better if the servo motors 42a and 42b for the transport carriage are equipped with electromagnetic brakes so that the brakes are applied when the power is turned off.

  Next, the assembly of the gantry 2 to the gantry 1 and the disassembling work from the gantry 1 by the cart type transport device shown in FIG. 1 will be described.

  FIG. 9 is a flowchart showing a specific example of a procedure for assembling the gantry 2 to the gantry 1 using the cart conveyance device of this embodiment. Here, the gantry 2B will be described.

  In the figure, after the main body device, that is, the paste application device is stopped (step 200), the origin is returned by the servo motor for the conveyance carriage attached to the conveyance carriages 40a and 40b, and the two conveyance carriages 40a and 40b are returned. The top plates 46a and 46b of the pedestal are made to have the same height and the same height (step 201), and it is confirmed that they are normally positioned at the stop height position (step 202). The origin return operation step 201 is performed when starting with the gantry 2B not mounted on the transport carriages 40a and 40b, and can be selected and performed. At this time, it is even better if the height of the pedestal is separately measured with a measuring instrument.

  Next, the gantry 2B is lowered onto the top plates 46a and 46b of the pedestals of the transport carriages 40a and 40b by means of a crane or the like, and both ends of the gantry 2B are loaded and fixed on the gantry fixing members 41a and 41b (step 203). ). Although not shown, the gantry fixing members 41a and 41b are fixed to the top plates 46a and 46b of the pedestal by fastening with a dedicated bolt at a position different from the fastening position to the gantry.

  Thereafter, the gantry 2B is moved to the upper part of the fastening portion on the gantry 1 by moving the transport carriages 40a and 40b in a state where both sides of the gantry 2B including the transverse beam 2a are loaded on the transport carriages 40a and 40b, respectively. (Step 204). Next, the gantry 2B is lowered to the contact surface on the gantry 1 side by the up-and-down movement mechanism by expansion and contraction accompanying the rotation of the servo motor units 42a and 42b for the transport carriage (step 205), and the fastening portion (that is, in FIG. 7). It is connected (mounted) to the X-axis direction moving mechanism 6) (step 206), and fastened with the fastening bolt 22 (FIG. 7) as described in FIG. 7 (step 207). Thus, the gantry 2B is fixed to the X-axis direction moving mechanism 6 and attached to the gantry 1.

  After fastening with the fastening bolt 22, the transport carriages 40a, 40b are removed from the gantry 1 (step 208), and the wiring and piping between the gantry 2B side and the gantry 1 side are connected (step 209).

  After that, two or more gantry are originally attached to the gantry 1 and there are other gantry which should be attached to the gantry 1 at this time (for example, “Gantry 2A: Step 210” Yes "), the procedure from step 110 to step 150 is repeated for the gantry. If there is no other gantry to be attached (“No” in step 210), the assembly is finished (step 211).

  FIG. 10 is a flowchart showing a specific example of a procedure for removing the gantry 2 from the gantry 1 using the cart conveyance device of this embodiment. This work procedure is basically the reverse of the assembly work in FIG. Again, the gantry 2B will be described.

  In the figure, after installing the main body device, that is, the paste coating device gantry 1 (step 300), the carriage carriage servo motor units 42a, 42b of the carriage carriages 40a, 40b are returned to their origins to return the two units. The heights of the top plates 46a and 46b of the pedestals of the transport carriages 40a and 40b are set to the same height and the same height (step 301), and it is confirmed that they are normally positioned at the predetermined stop height position (step 301). Step 302). It is better to measure the height of this pedestal with a separate measuring instrument.

  The connection of wiring and piping between the gantry 2B side and the gantry 1 side is removed (step 303), the transport carriages 40a and 40b are brought near the gantry 1 and brought into contact with the fastening portion of the gantry 2B with the gantry 1 (step 304). . Next, the fastening bolt 22 (FIG. 7) that fastens the gantry 2B and the gantry 1 is removed (step 305), the gantry 2B is separated from the gantry 1 and fixed to the transport carts 40a and 40b (step 306), and the transport cart The gantry 2B is lifted from the gantry 1 by using an up-and-down moving mechanism by expansion and contraction due to rotation of the servo motor units 42a and 42b (step 307).

  Thereafter, the both sides of the transverse beam 2b of the gantry 2B are separated from the gantry 1 while being loaded on the trolleys 40a and 40b, respectively, and are conveyed and taken out to a position outside the gantry 1 (step 308). Next, the bolts fixed to the seat surface are removed, and the bolt fastening of the gantry fixing members 41a and 41b which are both ends fixed on the top plates 46a and 46b of the pedestal of the transport carriage by means of a crane or the like is released. The entire gantry 2B is removed (step 309). Here, it is also possible to assemble, remove and transport without additional installation of extra suspension means. In this case, it is also possible to transport and store the gantry 2B attached to the transport carriages 40a and 40b. In that case, step 309 is unnecessary.

  Originally, the gantry 1 has two or more gantry attached to it, and if there is another gantry 2 to be removed at this time (for example, gantry 2A: “Yes” in step 310), from step 301 The procedure up to step 310 is repeated. If there is no other gantry to be removed (“No” in step 310), the assembling operation is terminated (step 312).

  As described above, in the present invention, the horizontal beam side support members 7a and 7b connected to the gantry portion having the horizontal beam moving mechanism side provided with the coating nozzle and the moving mechanism of the gantry 2 fixedly installed on the gantry 1 are supported. The horizontal position of the gantry 2 is adjusted using the carriages 40a and 40b at the positions outside or below the table (substrate mounting table 5) on which the substrate is mounted. Since the structure can be divided and assembled while maintaining it, the maximum size of the apparatus after disassembly can be narrowed without reducing accuracy. Even if the object to be handled is a large mother glass substrate exceeding 2 (m), the maximum size of the device can be limited to a width of about 3 (m) or less, and there is also a problem in transporting the device on a general public road. Can be solved. At the time of assembly, the same state as before disassembly can be easily reproduced. Thereby, it contributes to the quality improvement of a product (liquid crystal panel).

1 Stand 2A, 2B Gantry 2a, 2b Cross beam 3 Y-axis direction moving mechanism (linear rail)
4a, 4b rail 5 substrate mounting table (substrate holding mechanism)
6a, 6b X-axis direction moving mechanism 7a, 7b Cross beam side support member 8a, 8b Base side support member 9 Z axis movement table support bracket 10 Z axis movement table 11 Z axis servo motor 12 Coating head part 13 Paste storage Tube (syringe)
14 Nozzle support 15 Nozzle 16 Distance meter 17 Substrate 18a Main controller 18aa Microcomputer 18ab Motor controller 18ac Data communication bus 18ad External interface 18ae Image recognition device 18af Y-axis linear motor driver 18ag Linear motor driver 18ah Motor driver 18b Deputy Control unit 18ba Microcomputer 18bb Motor controller 18bc Data communication bus 18bd External interface 18bi Z-axis motor driver 18c Hard disk 18d USB memory 18e Communication cable 18f Monitor 18g Keyboard 19 Regulator 20 Valve unit 21 Image recognition camera 22 Fastening bolt 40a, 40b Carriage carriage 41a, 41b Gantry fixing member 42a, 2b conveyance carriage servo motor unit 43a, 43b outer leg 44a, 44b inner leg 45a, 45b bottom plate 46a, 46b top plate 50a, 50b carriage motor driver

Claims (8)

A gantry in which a coating head for discharging paste from a nozzle discharge port is movably provided is installed on a gantry, and the gantry moves with respect to a substrate placed on a substrate placement table installed on the gantry. A carriage type conveying device for conveying the gantry of a paste application device for discharging paste onto the substrate from the nozzle discharge port,
It consists of two transport carts that support each end of the gantry,
The carriage-type conveying apparatus, characterized in that the carriage has a vertically moving means that can change the height of the end of the gantry to be supported. In the trolley | bogie type conveying apparatus of Claim 1,
Supporting the both ends of the gantry is achieved by bolting both ends of the gantry to the mounting surface of the transport cart. In the trolley | bogie type conveying apparatus of Claim 1,
The trolley type transfer device is characterized in that the vertical movement means is driven by an electric motor. In the trolley | bogie type conveying apparatus of Claim 3,
The cart-type transport characterized in that the vertical movement means of each of the transport carts driven by the electric motor starts the vertical motion almost simultaneously when the height is changed, and operates in conjunction with substantially the same speed. apparatus. A gantry in which a coating head for discharging paste from a nozzle discharge port is movably provided is installed on a gantry, and the gantry moves with respect to a substrate placed on a substrate placement table installed on the gantry. In the method of transporting and assembling the gantry by the transport carriage for transporting the gantry of the paste application device that discharges paste onto the substrate from the nozzle discharge port,
The transport carts are a set of two, and support each end of the gantry by the transport cart, and the height of both ends of the supported gantry can be changed by the upper and lower means in each transport cart. A conveyance and assembly method characterized by the above. In the conveyance and assembly method of Claim 5,
Supporting both ends of the gantry is achieved by bolting the both ends of the gantry to the mounting surface of the transport carriage. In the conveyance and assembly method of Claim 5,
The vertical movement means is driven by an electric motor. In the conveyance and assembly method of Claim 7,
The up-and-down movement means of each of the conveyance carriages driven by the electric motor starts up and down almost simultaneously when the height is changed, and operates in conjunction with substantially the same speed. Method.

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