JP2020111822A5 - - Google Patents
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- Publication number
- JP2020111822A5 JP2020111822A5 JP2019189549A JP2019189549A JP2020111822A5 JP 2020111822 A5 JP2020111822 A5 JP 2020111822A5 JP 2019189549 A JP2019189549 A JP 2019189549A JP 2019189549 A JP2019189549 A JP 2019189549A JP 2020111822 A5 JP2020111822 A5 JP 2020111822A5
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- substrate
- forming apparatus
- support unit
- mask support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 25
- 238000005339 levitation Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims 6
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020190004235A KR102257008B1 (ko) | 2019-01-11 | 2019-01-11 | 성막 장치, 성막 방법 및 전자 디바이스 제조방법 |
| KR10-2019-0004235 | 2019-01-11 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020111822A JP2020111822A (ja) | 2020-07-27 |
| JP2020111822A5 true JP2020111822A5 (cg-RX-API-DMAC7.html) | 2022-01-31 |
| JP7271389B2 JP7271389B2 (ja) | 2023-05-11 |
Family
ID=71581089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019189549A Active JP7271389B2 (ja) | 2019-01-11 | 2019-10-16 | 成膜装置、成膜方法、および電子デバイスの製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7271389B2 (cg-RX-API-DMAC7.html) |
| KR (2) | KR102257008B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN111434798B (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7585088B2 (ja) | 2021-02-26 | 2024-11-18 | キヤノントッキ株式会社 | 成膜装置 |
| JP7723531B2 (ja) * | 2021-08-23 | 2025-08-14 | キヤノントッキ株式会社 | 真空装置、電子デバイスの製造装置 |
| KR102889256B1 (ko) | 2021-08-25 | 2025-11-20 | 세메스 주식회사 | 공정 처리 유닛 및 이를 구비하는 기판 처리 장치 |
| JP7771621B2 (ja) * | 2021-10-19 | 2025-11-18 | 東京エレクトロン株式会社 | 基板搬送装置及び基板搬送方法 |
| JP7535990B2 (ja) * | 2021-11-26 | 2024-08-19 | キヤノントッキ株式会社 | 成膜装置、膜厚測定方法及び電子デバイスの製造方法 |
| JP2023103008A (ja) * | 2022-01-13 | 2023-07-26 | キヤノントッキ株式会社 | 成膜装置、成膜方法及び電子デバイスの製造方法 |
| WO2024167232A1 (ko) * | 2023-02-08 | 2024-08-15 | 주식회사 선익시스템 | 기판의 위치 측정의 정밀도를 개선하는 증착 장치 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4609755B2 (ja) * | 2005-02-23 | 2011-01-12 | 三井造船株式会社 | マスク保持機構および成膜装置 |
| JP4609754B2 (ja) * | 2005-02-23 | 2011-01-12 | 三井造船株式会社 | マスククランプの移動機構および成膜装置 |
| JP5783811B2 (ja) * | 2010-07-06 | 2015-09-24 | キヤノン株式会社 | 成膜装置 |
| KR101783457B1 (ko) * | 2012-06-22 | 2017-10-10 | 주식회사 원익아이피에스 | 마스크 홀더장치 및 이를 포함하는 증착장치 |
| KR20140010303A (ko) | 2012-07-16 | 2014-01-24 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR20150071534A (ko) * | 2013-12-18 | 2015-06-26 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치 제조 방법 |
| US20190013229A1 (en) * | 2015-04-01 | 2019-01-10 | Vni Solution Co., Ltd | Aligner structure and alignment method |
| US20180374732A1 (en) | 2015-08-21 | 2018-12-27 | Applied Materials, Inc. | Apparatus for transportation of a substrate, apparatus for vacuum processing of a substrate, and method for maintenance of a magnetic levitation system |
| WO2017198298A1 (en) * | 2016-05-18 | 2017-11-23 | Applied Materials, Inc. | Apparatus and method for transport |
| CN108738365B (zh) * | 2017-02-24 | 2022-03-01 | 应用材料公司 | 用于真空系统中使用的载体、用于真空处理的系统、和用于基板的真空处理的方法 |
-
2019
- 2019-01-11 KR KR1020190004235A patent/KR102257008B1/ko active Active
- 2019-10-16 JP JP2019189549A patent/JP7271389B2/ja active Active
- 2019-11-25 CN CN201911161956.9A patent/CN111434798B/zh active Active
-
2021
- 2021-05-20 KR KR1020210064739A patent/KR102594630B1/ko active Active
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