JP2020109940A - 共振器及びその製造方法と、共振器を含むストレインセンサー及びセンサーアレイ - Google Patents
共振器及びその製造方法と、共振器を含むストレインセンサー及びセンサーアレイ Download PDFInfo
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 26
- 238000000059 patterning Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 6
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- 238000010586 diagram Methods 0.000 description 13
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Abstract
Description
支持部から長手方向に延設されるものであり、
単結晶材質を含み、
前記単結晶材質の結晶方向のうち、要求されるヤング率(Young’s modulus)及びポアソン比(Poisson’s ratio)のうち、少なくとも1つを満足する結晶方向(crystal orientation)に延設される共振器が提供される。
支持部から長手方向に延設されるものであり、
(100)結晶面(crystal plane)を有する単結晶シリコンを含み、
前記単結晶シリコンの結晶方向のうち、要求されるヤング率及びポアソン比のうち少なくとも1つを満足する結晶方向に延設される共振器が提供される。
単結晶材質を含む基板をパターニングして共振器を製造する方法において、
前記基板の一部が前記単結晶材質の結晶方向のうち、要求されるヤング率及びポアソン比のうち少なくとも1つを満足する結晶方向に延びるように前記基板をパターニングする共振器の製造方法が提供される。
前記基板の一部が前記単結晶シリコンの<100>結晶方向に延びるように前記基板をパターニングしてもよい。
支持部から長手方向に延設される共振器と、
前記共振器のストレインを測定するためのセンシング素子と、を含み、
前記共振器は、単結晶材質を含み、前記単結晶材質の結晶方向のうち、要求されるヤング率及びポアソン比のうち少なくとも1つを満足する結晶方向に延設されるストレインセンサーが提供される。
支持部から長手方向に延設され、互いに異なる共振周波数を有する複数の共振器と、
前記共振器のストレインを測定する複数のセンシング素子と、を含み、
前記共振器それぞれは、単結晶材質を含み、前記単結晶材質の結晶方向のうち、要求されるヤング率及びポアソン比のうち少なくとも1つを満足する結晶方向に延設されるセンサーアレイが提供される。
210、310 支持部
230、330、430、530 センシング素子
290、390、490、590 ストレインセンサー
340 圧電素子
343 圧電層
341、342、351、352 第1及び第2電極
350 圧電抵抗素子
353 圧電抵抗層
360 容量素子
361 第1導体
362 第2導体
370 光学素子
371 光源
372 受光部
Claims (19)
- 支持部から長手方向に延設されるものであり、
単結晶材質を含み、
前記単結晶材質の結晶方向のうち、要求されるヤング率(Young’s modulus)及びポアソン比(Poisson’s ratio)のうち、少なくとも1つを満足する結晶方向(crystal orientation)に延設される共振器。 - 前記共振器は、前記ヤング率の最も小さな結晶方向に延設されることを特徴とする請求項1に記載の共振器。
- 前記共振器は、前記ポアソン比の最も大きな結晶方向に延設されることを特徴とする請求項1に記載の共振器。
- 支持部から長手方向に延設されるものであり、
(100)結晶面(crystal plane)を有する単結晶シリコンを含み、
前記単結晶シリコンの結晶方向のうち、要求されるヤング率及びポアソン比のうち少なくとも1つを満足する結晶方向に延設される共振器。 - 前記共振器は、前記ヤング率が最も小さく、前記ポアソン比の最も大きな結晶方向に延設されることを特徴とする請求項4に記載の共振器。
- 前記共振器は、前記単結晶シリコンの<100>結晶方向に延設されることを特徴とする請求項4または5に記載の共振器。
- 前記共振器は、前記単結晶シリコンの<100>結晶方向と<110>結晶方向との間の結晶方向に延設されることを特徴とする請求項4に記載の共振器。
- 前記共振器は、前記長手方向に延びたビーム状を有することを特徴とする請求項1〜7のいずれか一つに記載の共振器。
- 前記共振器は、一端が前記支持部に固設されることを特徴とする請求項1〜8のいずれか一つに記載の共振器。
- 前記共振器は、両端が前記支持部に固設されることを特徴とする請求項1〜8のいずれか一つに記載の共振器。
- 前記支持部は、単結晶シリコンを含むことを特徴とする請求項1〜10のいずれか一つに記載の共振器。
- 単結晶材質を含む基板をパターニングして共振器を製造する方法において、
前記基板の一部が前記単結晶材質の結晶方向のうち、要求されるヤング率及びポアソン比のうち少なくとも1つを満足する結晶方向に延びるように前記基板をパターニングする共振器の製造方法。 - 前記基板の一部が前記ヤング率が最も小さな結晶方向に延びるように前記基板をパターニングすることを特徴とする請求項12に記載の共振器の製造方法。
- 前記基板の一部が前記ポアソン比の最も大きな結晶方向に延びるように前記基板をパターニングすることを特徴とする請求項12に記載の共振器の製造方法。
- 前記基板は、(100)結晶面を有する単結晶シリコンを含み、
前記基板の一部が前記単結晶シリコンの<100>結晶方向に延びるように前記基板をパターニングすることを特徴とする請求項12〜14のいずれか一つに記載の共振器の製造方法。 - 請求項1〜10のいずれか一つに記載の共振器と、
前記共振器のストレイン(strain)を測定するためのセンシング素子と、を含む、ストレインセンサー。 - 前記センシング素子は、圧電素子(piezoelectric element)、圧電抵抗素子(piezoresistive element)、または容量素子(静電容量 element)を含むことを特徴とする請求項16に記載のストレインセンサー。
- 前記センシング素子は、前記共振器から反射される光の角度変化を測定する光学素子を含むことを特徴とする請求項16に記載のストレインセンサー。
- 複数の、請求項1〜10のいずれか一つに記載の共振器と、
前記共振器のストレインを測定する複数のセンシング素子と、を含む、
センサーアレイ。
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