JP2020102493A - Wiring board and mounting structure - Google Patents

Wiring board and mounting structure Download PDF

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JP2020102493A
JP2020102493A JP2018238684A JP2018238684A JP2020102493A JP 2020102493 A JP2020102493 A JP 2020102493A JP 2018238684 A JP2018238684 A JP 2018238684A JP 2018238684 A JP2018238684 A JP 2018238684A JP 2020102493 A JP2020102493 A JP 2020102493A
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insulating resin
layer
cavity
wiring board
resin layer
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JP7066603B2 (en
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仁田尾　智広
Tomohiro Nitao
智広 仁田尾
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Kyocera Corp
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Kyocera Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/83385—Shape, e.g. interlocking features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device

Abstract

To provide a wiring board with which an electronic component can be firmly fixed in a cavity.SOLUTION: A wiring board comprises: a lower layer insulating resin layer 2c; an upper layer insulating resin layer 2b located on a top face of the lower layer insulating resin layer 2c; a support layer 4 located on a top face of the lower layer insulating resin layer 2c, in which at least an outer peripheral part of the top face is formed of a conductor located on an under surface of the upper layer insulating resin layer 2b; and a cavity C located in the upper layer insulating resin layers 2a, 2b on the support layer 4, in which at least part of the support layer 4 is exposed on its bottom face. On the bottom face of the cavity, an insulating resin film 9 in a mesh shape when viewed from the top is located on a top face of the support layer 4.SELECTED DRAWING: Figure 1

Description

本開示は、配線基板および配線基板に電子部品が実装された実装構造に関するものである。 The present disclosure relates to a wiring board and a mounting structure in which electronic components are mounted on the wiring board.

半導体素子等の電子部品を実装する配線基板として、絶縁樹脂層および導体層が互いに上下に密着して交互に位置する多層構造のものが知られている。このような配線基板において、半導体素子等の電子部品を収容するためのキャビティを上面に有するものがある。キャビティは、上面側の絶縁層の一部を例えばレーザー加工で除去することにより形成される。キャビティの底面には、支持層が位置している。支持層はレーザー加工の際にレーザー光がキャビティ底面を越えて下層の絶縁樹脂層や導体層に損傷を与えるのを防止する。 2. Description of the Related Art As a wiring board on which electronic components such as semiconductor elements are mounted, there is known a wiring board having a multi-layer structure in which insulating resin layers and conductor layers are in contact with each other vertically and alternately. Some such wiring boards have a cavity on the upper surface for housing an electronic component such as a semiconductor element. The cavity is formed by removing a part of the insulating layer on the upper surface side by, for example, laser processing. A support layer is located on the bottom surface of the cavity. The support layer prevents the laser light from traversing the bottom surface of the cavity and damaging the insulating resin layer and the conductor layer below when the laser processing is performed.

特開２０１６−３９２１４号公報JP, 2016-39214, A

特許文献１には、キャビティ付きの配線基板およびその製造方法が開示されている。特許文献１の開示では、キャビティをレーザー加工で形成後、支持層としてのプレーン層にデスミア処理を施す。デスミア処理の際には、最も外側に配置される外側導体回路層を保護するための保護層が形成される。しかしながら、キャビティ底面のプレーン層は保護されないので、キャビティの底面の周囲において、プレーン層とその上の絶縁層との間がデスミア処理の薬液で浸食されて隙間が発生する虞がある。 Patent Document 1 discloses a wiring board with a cavity and a method for manufacturing the wiring board. In the disclosure of Patent Document 1, after forming the cavity by laser processing, the plane layer serving as the support layer is subjected to desmear treatment. During the desmear treatment, a protective layer for protecting the outermost conductor circuit layer arranged on the outermost side is formed. However, since the plain layer on the bottom surface of the cavity is not protected, there is a possibility that a clearance may be generated around the bottom surface of the cavity between the plain layer and the insulating layer above it by the desmearing chemical solution.

さらに、特許文献１の開示では、デスミア処理されたプレーン層の表面に粗化層を形成する。このプレーン層上に電子部品が接着層を介して実装される。プレーン層表面の粗化層により、接着層のプレーン層からの剥離が抑制される。しかしながら、キャビティの底面の周囲のプレーン層と絶縁層との間に隙間があると、粗化層を形成するための薬液がこの隙間を介して配線基板の内部に浸入して配線の腐食やマイグレーションを誘発する。 Further, according to the disclosure of Patent Document 1, a roughening layer is formed on the surface of the desmeared plain layer. Electronic components are mounted on this plane layer via an adhesive layer. The roughening layer on the surface of the plane layer suppresses peeling of the adhesive layer from the plane layer. However, if there is a gap between the plane layer around the bottom surface of the cavity and the insulating layer, the chemical liquid for forming the roughening layer penetrates into the inside of the wiring board through this gap, causing corrosion or migration of the wiring. Induce.

特許文献１の開示では、さらにキャビティの底面として露出するプレーン層の外周部に凹部を形成する。この凹部によっても、接着層のプレーン層からの剥離が抑制される。しかしながら、凹部を形成するためにはレーザーを強く照射する必要があり、プレーン層に穴が開いてしまう虞がある。プレーン層に穴が開くと、その下の絶縁層や導体層が損傷を受けてしまう。 In the disclosure of Patent Document 1, a concave portion is further formed on the outer peripheral portion of the plane layer exposed as the bottom surface of the cavity. The recess also suppresses the peeling of the adhesive layer from the plain layer. However, it is necessary to strongly irradiate the laser in order to form the concave portion, which may cause a hole in the plane layer. Holes in the plane layer can damage the underlying insulation and conductor layers.

本開示の配線基板は、下層の絶縁樹脂層と、下層の絶縁樹脂層の上面に位置する上層の絶縁樹脂層と、下層の絶縁樹脂層の上面に位置し、少なくとも上面外周部が上層の絶縁樹脂層の下面に位置する導体から成る支持層と、支持層上の上層の絶縁樹脂層に位置し、底面に支持層の少なくとも一部が露出するキャビティと、を備え、キャビティの底面に、上面視で網目状の絶縁樹脂膜が、支持層の上面に位置していることを特徴とするものである。 The wiring board of the present disclosure includes a lower insulating resin layer, an upper insulating resin layer located on the upper surface of the lower insulating resin layer, and an upper insulating resin layer located on the upper surface of the lower insulating resin layer. A support layer made of a conductor located on the lower surface of the resin layer, and a cavity located in the upper insulating resin layer on the support layer and exposing at least a part of the support layer on the bottom surface are provided. It is characterized in that the mesh-like insulating resin film is located on the upper surface of the support layer when viewed from the outside.

本開示の実装構造は、上記構成の配線基板と、電子部品とを有しており、電子部品の下
面が、該下面と絶縁樹脂膜とに当接する接着樹脂を介してキャビティの底面上に位置していることを特徴とするものである。 The mounting structure of the present disclosure includes the wiring board having the above-described configuration and an electronic component, and the lower surface of the electronic component is located on the bottom surface of the cavity via an adhesive resin that contacts the lower surface and the insulating resin film. It is characterized by doing.

本開示の配線基板によれば、キャビティ内に電子部品を強固に固定することができるとともに、内部に腐食やマイグレーションあるいは損傷等の発生を抑制できる。 According to the wiring board of the present disclosure, it is possible to firmly fix the electronic component in the cavity and suppress the occurrence of corrosion, migration, damage, etc. inside.

本開示の実装構造によれば、上記構成の配線基板を含んでいるため、キャビティ内に電子部品を強固に固定することができるとともに、内部に腐食やマイグレーションあるいは損傷等の発生を抑制できる。 According to the mounting structure of the present disclosure, since the wiring board having the above configuration is included, it is possible to firmly fix the electronic component in the cavity and suppress the occurrence of corrosion, migration, damage, or the like inside.

図１は、本開示に係る配線基板の実施形態の一例を説明するための概略断面図である。FIG. 1 is a schematic cross-sectional view for explaining an example of an embodiment of a wiring board according to the present disclosure. 図２は、本開示に係る配線基板の実施形態の一例を説明するための概略上面図である。FIG. 2 is a schematic top view for explaining an example of the embodiment of the wiring board according to the present disclosure. 図３は、本開示に係る実装構造の実施形態の一例を説明するための概略断面図である。FIG. 3 is a schematic cross-sectional view for describing an example of the embodiment of the mounting structure according to the present disclosure. 図４は、本開示に係る配線基板の実施形態の一例の製造方法を説明するための工程毎の概略断面図である。FIG. 4 is a schematic cross-sectional view of each step for explaining the manufacturing method of the example of the embodiment of the wiring board according to the present disclosure. 図５は、本開示に係る配線基板の実施形態の他の例を説明するための概略平面図である。FIG. 5 is a schematic plan view for explaining another example of the embodiment of the wiring board according to the present disclosure.

図１および図２を基に、本開示における実施形態の一例を説明する。図１は、本開示の配線基板１０の一例であり、図２に示すＡ−Ａ間を通る概略断面図である。図２は、本開示の配線基板の概略平面図を示している。 An example of an embodiment of the present disclosure will be described based on FIGS. 1 and 2. FIG. 1 is an example of a wiring board 10 of the present disclosure, and is a schematic cross-sectional view taken along the line AA shown in FIG. 2. FIG. 2 shows a schematic plan view of the wiring board of the present disclosure.

図１に示すように、配線基板１０は、コア絶縁樹脂層１と、ビルドアップ絶縁樹脂層２と、配線導体３と、支持層４とを備えている。これらは上下に密着して位置している。配線基板１０は、例えば、平面視において四角形状を有している。配線基板１０の上面にはキャビティＣが位置している。配線基板１０の厚さは、例えば０．３〜１．５ｍｍ程度に設定されている。 As shown in FIG. 1, the wiring board 10 includes a core insulating resin layer 1, a build-up insulating resin layer 2, a wiring conductor 3, and a support layer 4. These are located close to each other. The wiring board 10 has, for example, a quadrangular shape in a plan view. The cavity C is located on the upper surface of the wiring board 10. The thickness of the wiring board 10 is set to, for example, about 0.3 to 1.5 mm.

コア絶縁樹脂層１は、例えば、配線基板１０の剛性を確保して配線基板１０の平坦性を保持する等の機能を有している。コア絶縁樹脂層１は、ガラスクロス、およびエポキシ樹脂またはビスマレイミドトリアジン樹脂等の絶縁材料を含んでいる。このようなコア絶縁樹脂層１は、例えばガラスクロスにエポキシ樹脂を含浸した半硬化状態のプリプレグを、加熱しながら平坦にプレス加工することで形成される。 The core insulating resin layer 1 has a function of, for example, ensuring the rigidity of the wiring board 10 and maintaining the flatness of the wiring board 10. The core insulating resin layer 1 contains glass cloth and an insulating material such as an epoxy resin or a bismaleimide triazine resin. Such a core insulating resin layer 1 is formed, for example, by pressing a semi-cured prepreg obtained by impregnating glass cloth with an epoxy resin into a flat shape while heating.

コア絶縁樹脂層１は、コア絶縁樹脂層１の上下面を貫通する複数のスルーホール５を有している。互いに隣接するスルーホール５同士は、所定の隣接間隔をあけて位置している。スルーホール５の直径は、例えば１００〜３００μｍに設定されている。スルーホール５の隣接間隔は、例えば１５０〜３５０μｍに設定されている。スルーホール５は、例えばブラスト加工やドリル加工により形成される。 The core insulating resin layer 1 has a plurality of through holes 5 penetrating the upper and lower surfaces of the core insulating resin layer 1. The through holes 5 that are adjacent to each other are positioned with a predetermined spacing therebetween. The diameter of the through hole 5 is set to, for example, 100 to 300 μm. The adjacent distance between the through holes 5 is set to, for example, 150 to 350 μm. The through hole 5 is formed by, for example, blasting or drilling.

ビルドアップ絶縁樹脂層２は、コア絶縁樹脂層１の上面に密着して３層のビルドアップ絶縁樹脂層２ａ〜２ｃが位置し、コア絶縁樹脂層１の下面に密着して３層のビルドアップ絶縁樹脂層２ｄ〜２ｆが位置している。ビルドアップ絶縁樹脂層２ａ〜２ｃおよびビルドアップ絶縁樹脂層２ｄ〜２ｆも、それぞれ互いに上下に密着して位置している。ビルドア
ップ絶縁樹脂層２は、絶縁粒子、およびエポキシ樹脂やポリイミド樹脂等の絶縁材料を含んでいる。 The build-up insulating resin layer 2 is in close contact with the upper surface of the core insulating resin layer 1, and the three build-up insulating resin layers 2a to 2c are located in the build-up insulating resin layer 1. Insulating resin layers 2d-2f are located. The build-up insulating resin layers 2a to 2c and the build-up insulating resin layers 2d to 2f are also positioned in close contact with each other vertically. The buildup insulating resin layer 2 contains insulating particles and an insulating material such as epoxy resin or polyimide resin.

なお、説明の便宜上、コア絶縁樹脂層１の上側に位置するビルドアップ絶縁樹脂層２について、コア絶縁樹脂層１側から順に第１絶縁樹脂層２ａ、第２絶縁樹脂層２ｂ、第３絶縁樹脂層２ｃと記載する。 For convenience of description, the build-up insulating resin layer 2 located on the upper side of the core insulating resin layer 1 has a first insulating resin layer 2a, a second insulating resin layer 2b, and a third insulating resin in order from the core insulating resin layer 1 side. It is described as a layer 2c.

ビルドアップ絶縁樹脂層２は、複数のビアホール６を有している。ビアホール６の直径は、例えば３０〜１００μｍに設定されている。ビアホール６は、例えばレーザー加工により形成される。 The buildup insulating resin layer 2 has a plurality of via holes 6. The diameter of the via hole 6 is set to, for example, 30 to 100 μm. The via hole 6 is formed by laser processing, for example.

このようなビルドアップ絶縁樹脂層２は、例えばシリカが分散したエポキシ樹脂を含む樹脂フィルムを、真空下でコア絶縁樹脂層１の表面、またはビルドアップ絶縁樹脂層２の表面に貼着して熱硬化することで形成される。 Such a build-up insulating resin layer 2 is formed by attaching a resin film containing, for example, an epoxy resin in which silica is dispersed to the surface of the core insulating resin layer 1 or the surface of the build-up insulating resin layer 2 under vacuum and applying heat. It is formed by curing.

配線導体３は、コア絶縁樹脂層１の上下面、ビルドアップ絶縁樹脂層２の上面または下面、スルーホール５内、およびビアホール６内に位置している。このうち、最上層の第３絶縁樹脂層２ｃの上面に位置する配線導体３は、電子部品Ｅの電極と接続されるボンディングパッド７を含んでいる。また、最下層のビルドアップ絶縁樹脂層２ｆの下面に位置する配線導体３は、外部電気回路基板と接続される外部接続パッド８を含んでいる。ボンディングパッド７と外部接続パッド８とは、配線基板１０内部に位置する配線導体３を介して電気的に接続されている。 The wiring conductors 3 are located on the upper and lower surfaces of the core insulating resin layer 1, the upper surface or the lower surface of the buildup insulating resin layer 2, the through holes 5, and the via holes 6. Among these, the wiring conductor 3 located on the upper surface of the uppermost third insulating resin layer 2c includes the bonding pad 7 connected to the electrode of the electronic component E. The wiring conductor 3 located on the lower surface of the lowermost buildup insulating resin layer 2f includes the external connection pad 8 connected to the external electric circuit board. The bonding pad 7 and the external connection pad 8 are electrically connected via the wiring conductor 3 located inside the wiring board 10.

このような配線導体３は、例えばセミアディティブ法やサブトラクティブ法等の配線形成技術を用いて、銅等の良導電性金属により形成されている。コア絶縁樹脂層１の上下面、ビルドアップ絶縁樹脂層２の上面または下面における配線導体３の厚みは、５〜５０μｍに設定されている。 Such a wiring conductor 3 is formed of a good conductive metal such as copper by using a wiring forming technique such as a semi-additive method or a subtractive method. The thickness of the wiring conductor 3 on the upper and lower surfaces of the core insulating resin layer 1 and the upper surface or lower surface of the buildup insulating resin layer 2 is set to 5 to 50 μm.

キャビティＣは、第２絶縁樹脂層２ｂおよび第３絶縁樹脂層２ｃに位置している。キャビティＣは、後に詳細に説明するように、例えばレーザー加工により形成される。 The cavity C is located in the second insulating resin layer 2b and the third insulating resin layer 2c. The cavity C is formed by laser processing, for example, as described in detail later.

図１に示すように、支持層４は、キャビティＣの下に位置している。支持層４は、上面視でキャビティＣよりも一回り大きい。支持層４は、下面の全面が第１絶縁樹脂層２ａの上面に密着しており、上面の外周部がその上の第２絶縁樹脂層２ｂの下面に密着している。支持層４は、配線導体３と同一材料から成り、配線導体３と同時形成される。支持層４の厚みは、５〜５０μｍに設定されている。支持層４は、後に詳細に説明するように、キャビティＣを例えばレーザー加工により形成する際に、レーザー光がキャビティＣの底面を越えて下層の第１絶縁樹脂層２ａや配線導体３に損傷を与えるのを防止するための機能を有している。 As shown in FIG. 1, the support layer 4 is located below the cavity C. The support layer 4 is slightly larger than the cavity C in a top view. The entire lower surface of the support layer 4 is in close contact with the upper surface of the first insulating resin layer 2a, and the outer peripheral portion of the upper surface is in close contact with the lower surface of the second insulating resin layer 2b. The support layer 4 is made of the same material as the wiring conductor 3, and is formed simultaneously with the wiring conductor 3. The thickness of the support layer 4 is set to 5 to 50 μm. As will be described in detail later, when the cavity C is formed by, for example, laser processing, the support layer 4 causes the laser light to exceed the bottom surface of the cavity C and damage the lower first insulating resin layer 2a and the wiring conductor 3. It has a function to prevent giving.

キャビティＣの下に位置する支持層４上には、第２絶縁樹脂層２ｂの一部から成る絶縁樹脂膜９が支持層４の上面に位置している。絶縁樹脂膜９は、図２に示すように上面視で複数の開口部９ａを有する網目状である。つまり、絶縁樹脂膜９は、互いに間隔をあけて縦横に位置する開口部９ａを有している。 On the support layer 4 located below the cavity C, the insulating resin film 9 formed of a part of the second insulating resin layer 2b is located on the upper surface of the support layer 4. The insulating resin film 9 has a mesh shape having a plurality of openings 9a in a top view as shown in FIG. That is, the insulating resin film 9 has openings 9a that are vertically and laterally spaced from each other.

絶縁樹脂膜９は、電子部品ＥをキャビティＣ底面に強固に固定する機能を有している。絶縁樹脂膜９の厚みは１〜１０μｍに設定されている。開口部９ａの直径は５〜５０μｍに設定されており、開口部９ａの繰り返しピッチは２５〜１００μｍに設定されている。開口部９ａ内には支持層４の一部が露出している。 The insulating resin film 9 has a function of firmly fixing the electronic component E to the bottom surface of the cavity C. The thickness of the insulating resin film 9 is set to 1 to 10 μm. The diameter of the opening 9a is set to 5 to 50 μm, and the repeating pitch of the opening 9a is set to 25 to 100 μm. A part of the support layer 4 is exposed in the opening 9a.

本開示の配線基板１０においては、キャビティＣの底面に、上面視で網目状の絶縁樹脂膜９が支持層４の上面に位置することから、この絶縁樹脂膜９と接着樹脂Ａとが樹脂同士で強固に接着する。加えて、網目状の絶縁樹脂層９と支持層４上面との高低差によるキャビティＣ底面の凹凸でアンカー効果が発揮される。したがって、キャビティＣ内に電子部品Ｅを極めて強固に固定することができる。 In the wiring board 10 of the present disclosure, since the mesh-shaped insulating resin film 9 is located on the upper surface of the support layer 4 in the bottom surface of the cavity C in a top view, the insulating resin film 9 and the adhesive resin A are different from each other. Adhere firmly with. In addition, the anchor effect is exhibited by the unevenness of the bottom surface of the cavity C due to the height difference between the mesh-shaped insulating resin layer 9 and the upper surface of the support layer 4. Therefore, the electronic component E can be extremely firmly fixed in the cavity C.

なお、本開示の配線基板１０では、キャビティＣ内に電子部品Ｅを極めて強固に固定することができるため、支持層４上に粗化層を設ける必要がない。したがって、粗化層を形成するための薬液が配線基板１０の内部に滲入して配線導体３の腐食やマイグレーションを誘発することはない。 In the wiring board 10 of the present disclosure, the electronic component E can be extremely firmly fixed in the cavity C, and thus it is not necessary to provide the roughening layer on the support layer 4. Therefore, the chemical liquid for forming the roughened layer does not infiltrate into the inside of the wiring substrate 10 and induce corrosion or migration of the wiring conductor 3.

次に、図３を基にして、本開示の配線基板１０を有する実装構造３０の実施形態例を説明する。なお、上述の配線基板１０に関しては詳細な説明を省略する。 Next, an embodiment example of the mounting structure 30 having the wiring board 10 of the present disclosure will be described based on FIG. 3. The detailed description of the wiring board 10 is omitted.

実装構造３０は、配線基板１０と、電子部品Ｅとを有している。配線基板１０は、電子部品Ｅを位置決めして固定し、電子部品Ｅと外部基板（マザーボード等）とを電気的に接続する機能を有する。電子部品Ｅは、例えばＡＳＩＣ（Ａｐｌｉｃａｔｉｏｎ Ｓｐｅｃｉｆｉｃ Ｉｎｔｅｇｒａｔｅｄ Ｃｉｒｃｕｉｔ）等の集積回路素子が挙げられ、演算機能を有している。 The mounting structure 30 includes a wiring board 10 and an electronic component E. The wiring board 10 has a function of positioning and fixing the electronic component E and electrically connecting the electronic component E and an external substrate (such as a mother board). The electronic component E is, for example, an integrated circuit element such as an ASIC (Application Specific Integrated Circuit), and has an arithmetic function.

配線基板１０は、第２絶縁樹脂層２ｂおよび第３絶縁樹脂層２ｃにキャビティＣを有している。図３に示すように、キャビティＣ内には電子部品Ｅが、接着樹脂Ａを介して実装されている。キャビティＣ内に実装された電子部品Ｅの電極とボンディングパッド７とは、ボンディングワイヤーＷにより電気的に接続されている。また、外部接続パッド８は、外部基板と、例えば半田を介して電気的に接続される。これにより、電子部品Ｅと外部基板とが配線基板１０を介して電気的に接続される。 The wiring board 10 has a cavity C in the second insulating resin layer 2b and the third insulating resin layer 2c. As shown in FIG. 3, an electronic component E is mounted in the cavity C via an adhesive resin A. The electrodes of the electronic component E mounted in the cavity C and the bonding pads 7 are electrically connected by the bonding wires W. The external connection pad 8 is electrically connected to the external substrate via, for example, solder. As a result, the electronic component E and the external board are electrically connected via the wiring board 10.

キャビティＣの底面には、上面視で網目状の絶縁樹脂膜９が支持層４の上面に位置している。これにより、絶縁樹脂膜９と接着樹脂Ａとが樹脂同士で強固に接着する。加えて、網目状の絶縁樹脂層９と支持層４上面との高低差によるキャビティＣ底面の凹凸でアンカー効果が発揮される。したがって、キャビティＣ内に電子部品Ｅを極めて強固に固定することができる。 On the bottom surface of the cavity C, a mesh-shaped insulating resin film 9 is located on the upper surface of the support layer 4 in a top view. As a result, the insulating resin film 9 and the adhesive resin A are firmly adhered to each other. In addition, the anchor effect is exhibited by the unevenness of the bottom surface of the cavity C due to the height difference between the mesh-shaped insulating resin layer 9 and the upper surface of the support layer 4. Therefore, the electronic component E can be extremely firmly fixed in the cavity C.

なお、本開示の実装構造３０は、キャビティＣ内に電子部品Ｅを極めて強固に固定することができるため、支持層４上に粗化層を設ける必要がない。したがって、粗化層を形成するための薬液が配線基板１０の内部に滲入して配線導体３の腐食やマイグレーションを誘発することはない。 In the mounting structure 30 of the present disclosure, the electronic component E can be extremely firmly fixed in the cavity C, so that it is not necessary to provide the roughening layer on the support layer 4. Therefore, the chemical liquid for forming the roughened layer does not infiltrate into the inside of the wiring substrate 10 and induce corrosion or migration of the wiring conductor 3.

次に本実施形態例の配線基板１０におけるキャビティＣの形成方法を詳細に説明する。 Next, a method of forming the cavity C in the wiring board 10 of the present embodiment will be described in detail.

まず、図４（ａ）に示すように、コア絶縁樹脂層１およびビルドアップ絶縁樹脂層２ならびに配線導体３および支持層４が所定の位置関係で上下に密着して位置する積層体１０Ｐを準備する。 First, as shown in FIG. 4A, a laminated body 10P in which the core insulating resin layer 1, the build-up insulating resin layer 2, the wiring conductor 3 and the supporting layer 4 are vertically and closely adhered to each other is prepared. To do.

次に、図４（ｂ）に示すように、積層体１０Ｐの上面側から支持層４上の第２絶縁樹脂層２ｂおよび第３絶縁樹脂層２ｃにレーザー加工を施して第２絶縁樹脂層２ｂおよび第３絶縁樹脂層２ｃの一部を除去する。レーザー加工には、炭酸ガスレーザーやＹＡＧレーザーを用いる。レーザー光のスポット径は５０〜２００μｍに設定する。レーザー光の照射ピッチは、レーザー光のスポット同士が部分的に重なり合うようにビーム径の１／４〜１／２倍に設定する。レーザー光の１パルス当たりのエネルギーは５〜１５ｍＪに設定する。レーザー光の照射回数は、同一箇所に対し、１〜３パルスに設定する。 Next, as shown in FIG. 4B, laser processing is performed on the second insulating resin layer 2b and the third insulating resin layer 2c on the support layer 4 from the upper surface side of the laminated body 10P to perform the second insulating resin layer 2b. And a part of the third insulating resin layer 2c is removed. A carbon dioxide gas laser or a YAG laser is used for the laser processing. The spot diameter of the laser light is set to 50 to 200 μm. The irradiation pitch of the laser light is set to 1/4 to 1/2 times the beam diameter so that the laser light spots partially overlap each other. The energy per pulse of laser light is set to 5 to 15 mJ. The number of laser light irradiations is set to 1 to 3 pulses for the same location.

なお、このレーザー加工においては、キャビティＣ底面の支持層４上の第２絶縁樹脂層２ｂを完全に除去せずに、レーザー光のスポット同士の重なりが少ない位置に第２絶縁樹脂層２ｂの一部から成る網目状の絶縁樹脂膜９が残る程度の条件に設定する。このように、レーザー光のスポット同士の重なりが少ない位置に絶縁樹脂膜９が残る程度の条件でレーザー加工することで、支持層４に穴が開くことを回避することができる。したがって、支持層４の下の第１絶縁樹脂層２ａや配線導体３が損傷を受けることを防止できる。なお、このとき、キャビティＣ内にレーザー加工により発生する樹脂および金属の変質物や飛散物からなる付着物Ｄが残る。 In this laser processing, the second insulating resin layer 2b on the support layer 4 on the bottom surface of the cavity C is not completely removed, and one spot of the second insulating resin layer 2b is placed at a position where the laser light spots do not overlap each other. The condition is set such that the mesh-shaped insulating resin film 9 including the parts remains. As described above, by performing the laser processing under the condition that the insulating resin film 9 remains at the position where the spots of the laser light are less overlapped with each other, it is possible to avoid making holes in the support layer 4. Therefore, it is possible to prevent the first insulating resin layer 2a and the wiring conductor 3 below the support layer 4 from being damaged. At this time, the deposit D, which is a resin or metal degenerated matter or scattered matter generated by laser processing, remains in the cavity C.

次に、図４（ｃ）に示すように、キャビティＣの上面側からブラスト加工を施して付着物Ｄを除去する。これにより、配線基板１０が完成する。なお、ブラスト加工には、純水を用いたウエットブラストが好適に使用される。このウエットブラストでは、純水が使用されるので、ビルドアップ絶縁樹脂層２や絶縁樹脂膜９と支持層４との間が化学的に浸食されることがない。したがって、これらの間に隙間が形成されることもない。 Next, as shown in FIG. 4C, blasting is performed from the upper surface side of the cavity C to remove the adhering matter D. As a result, the wiring board 10 is completed. For the blast processing, wet blast using pure water is preferably used. Since pure water is used in this wet blasting, the build-up insulating resin layer 2 or the insulating resin film 9 and the support layer 4 are not chemically corroded. Therefore, no gap is formed between them.

以上、説明したように、本開示の配線基板によれば、キャビティ内に電子部品を強固に固定することができるとともに、内部に腐食やマイグレーションあるいは損傷等の発生を抑制できる。 As described above, according to the wiring board of the present disclosure, it is possible to firmly fix the electronic component in the cavity and suppress the occurrence of corrosion, migration, damage, etc. inside.

また、本開示の実装構造によれば、上記構成の配線基板を含んでいるため、キャビティ内に電子部品を強固に固定することができるとともに、内部に腐食やマイグレーションあるいは損傷等の発生を抑制できる。 Further, according to the mounting structure of the present disclosure, since the wiring board having the above-described configuration is included, it is possible to firmly fix the electronic component in the cavity and suppress the occurrence of corrosion, migration or damage inside. ..

なお、本開示は、上述の実施形態の一例に限定されるものではなく、本開示の要旨を逸脱しない範囲であれば種々の変更は可能である。例えば上述の実施形態の一例では、キャビティＣの底面の略全面にわたり網目状の絶縁樹脂膜９が位置していたが、図５に本開示における実施形態の別の例である配線基板２０として示すように、キャビティＣの外周部のみに網目状の絶縁樹脂膜９が位置してもよい。この場合、例えば支持層４を接地用導体としてその中央部と電子部品Ｅとを接続することで、アースとして機能させることが可能になる。キャビティＣの底面外周部と接着樹脂Ａとが強固に接着していれば、接着樹脂Ａの剥離は起きにくい。したがって、この別の実施形態例においてもキャビティＣ内に電子部品Ｅを強固に固定することができる。なお、図５に示す配線基板２０おいては、図１に示した配線基板１０と同様の箇所には同様の符号を付し、それぞれの詳細な説明は省略する。 The present disclosure is not limited to the example of the above-described embodiment, and various modifications can be made without departing from the gist of the present disclosure. For example, in one example of the above-described embodiment, the mesh-shaped insulating resin film 9 is located over substantially the entire bottom surface of the cavity C, but FIG. 5 shows a wiring board 20 which is another example of the embodiment of the present disclosure. Thus, the mesh-shaped insulating resin film 9 may be located only on the outer peripheral portion of the cavity C. In this case, for example, by using the support layer 4 as a grounding conductor and connecting the central portion to the electronic component E, it becomes possible to function as a ground. If the outer peripheral surface of the bottom surface of the cavity C and the adhesive resin A are firmly adhered to each other, the adhesive resin A is unlikely to peel off. Therefore, also in this other embodiment, the electronic component E can be firmly fixed in the cavity C. In the wiring board 20 shown in FIG. 5, the same parts as those of the wiring board 10 shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

なお、キャビティＣの外周部のみに網目状の絶縁樹脂膜９を位置させるには、上述のキャビティＣの形成方法におけるブラスト加工を強めに行えばよい。キャビティＣ底面の外周部では、キャビティＣの側面や中央部に激突した砥粒の反射で、キャビティＣの中央部よりもブラストの勢いが弱まる。したがって、キャビティＣ底面の外周部に絶縁樹脂膜９を残しつつ、キャビティＣ中央部の絶縁樹脂膜９を除去することが可能である。 In order to position the mesh-shaped insulating resin film 9 only on the outer peripheral portion of the cavity C, the blasting process in the above-described method of forming the cavity C may be strengthened. At the outer peripheral portion of the bottom surface of the cavity C, the momentum of the blast is weaker than that at the central portion of the cavity C due to the reflection of the abrasive grains that have crashed into the side surface and the central portion of the cavity C. Therefore, it is possible to remove the insulating resin film 9 in the central portion of the cavity C while leaving the insulating resin film 9 on the outer peripheral portion of the bottom surface of the cavity C.

また、キャビティＣを、ブラスト加工により形成しても構わない。この場合、例えば円形状の開口を有するブラスト用マスクを複数用意する。各ブラスト用マスクに設けられる開口の配置は、ブラスト粒子同士が部分的に重なり合うように開口径の１／４〜１／２倍だけあらかじめずらしておく。そして、ブラスト用マスクを順次取り換えてブラスト加工を行うことで、ブラスト粒子の当たりが少ない位置に絶縁樹脂膜９を形成することができる。 Further, the cavity C may be formed by blasting. In this case, for example, a plurality of blasting masks having circular openings are prepared. The arrangement of the openings provided in each blast mask is shifted in advance by ¼ to ½ times the opening diameter so that the blast particles partially overlap each other. Then, the blasting mask is sequentially replaced and blasting is performed, so that the insulating resin film 9 can be formed at a position where the blast particles are less likely to hit.

１，２ 絶縁樹脂層
４ 支持層
１０，２０ 配線基板
９ 絶縁樹脂膜
Ｃ キャビティ 1, 2 Insulating resin layer 4 Support layers 10, 20 Wiring board 9 Insulating resin film C Cavity

Claims (3)

第１絶縁樹脂層と、
該第１絶縁樹脂層の上面に位置する第２絶縁樹脂層と、
前記第１絶縁樹脂層の上面に位置し、少なくとも上面外周部が前記第２絶縁樹脂層の下面に位置する導体から成る支持層と、
該支持層上の前記第２絶縁樹脂層に位置し、底面に前記支持層の少なくとも一部が露出するキャビティと、を備え、
前記キャビティの底面に、網目状の絶縁樹脂膜が、前記支持層の上面に位置していることを特徴とする配線基板。 A first insulating resin layer,
A second insulating resin layer located on the upper surface of the first insulating resin layer;
A support layer formed of a conductor, which is located on the upper surface of the first insulating resin layer and at least an outer peripheral surface of the upper surface is located on the lower surface of the second insulating resin layer;
A cavity located on the second insulating resin layer on the support layer and exposing at least a part of the support layer on the bottom surface,
A wiring board, wherein a mesh-like insulating resin film is located on the bottom surface of the cavity and on the top surface of the support layer. 前記絶縁樹脂膜が前記キャビティの底面の外周部のみに位置することを特徴とする請求項１記載の配線基板。 The wiring board according to claim 1, wherein the insulating resin film is located only on an outer peripheral portion of a bottom surface of the cavity. 請求項１または２に記載の配線基板と、
電子部品と、を有しており、
前記電子部品の下面が、該下面と前記絶縁樹脂膜とに当接する接着樹脂を介して前記底面上に位置していることを特徴とする実装構造。 The wiring board according to claim 1 or 2,
And electronic parts,
A mounting structure, wherein a lower surface of the electronic component is located on the bottom surface via an adhesive resin that contacts the lower surface and the insulating resin film.
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