JP2020035889A - Protective cover and method of processing workpiece - Google Patents

Abstract

To provide a protective cover capable of preventing adhesion of debris to a concave or convex structure on the front surface side of a plate-shaped workpiece when the workpiece is processed along a dividing line.SOLUTION: A protective cover is used when a plate-shaped workpiece having a concave or convex structure in a plurality of regions on the surface side defined by a dividing line is processed along the dividing line. The protective cover includes a plate-like member that is disposed on the surface side of the workpiece during use, and has an elongated hole formed in a first area corresponding to the dividing line and the extension of the dividing line, and a flexible elastic member that is provided in a second area of the plate-like member corresponding to the structure of the workpiece, and is deformed in accordance with the structure when the plate-like member is arranged on the surface side of the workpiece.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a protective cover used when processing a plate-shaped workpiece having a concave or convex structure on the surface side, and a method of processing the workpiece using the protective cover.

  In recent years, small light emitting diodes (LEDs) having high luminous efficiency have been widely used as light sources for liquid crystal displays, mobile phones, lighting equipment, and the like. A chip including the LED (hereinafter, an LED chip) is packaged according to requirements such as terminal specifications and light extraction directions, and is incorporated in the above-described device.

  When packaging the LED chip, for example, a substrate having terminals, wiring, and the like in each of a plurality of regions partitioned by the planned dividing lines is used. A plurality of packaged LED chips can be obtained by mounting an LED chip on each region of the substrate, sealing the chip with resin or the like, and dividing the substrate along a division line. Note that an optical structure (optical element) such as a lens may be provided on the light extraction side of each LED chip (for example, see Patent Document 1).

  The above-described division of the substrate is performed using, for example, a processing device called a dicer or the like (for example, see Patent Document 2). In this processing device, the substrate is divided for each sealed LED chip by relatively moving along a division line while cutting the cutting blade rotated at a high speed into the substrate. A cutting fluid (such as pure water) is supplied to a contact portion between the cutting blade and the substrate.

JP 2011-135103 A JP-A-2006-197637

  However, when a substrate is processed using the processing apparatus described above, fine chips (cut chips) generated by the processing may adhere to the substrate or the like and cannot be removed. In particular, in the case where an optical structure such as a lens is provided, if debris adheres to this structure, there is a high possibility that the performance of the LED will not be sufficiently exhibited. Therefore, it has been necessary to appropriately prevent the attachment of debris to such a structure.

  The present invention has been made in view of such a problem, and an object thereof is to process a plate-shaped workpiece having a concave or convex structure on a surface side along a dividing line. It is an object of the present invention to provide a protective cover capable of preventing the attachment of debris to the structure when performing the process, and to provide a method of processing a workpiece using the protective cover.

  According to one aspect of the present invention, a plate-shaped workpiece provided with a concave or convex structure in a plurality of regions on the surface side partitioned by the dividing line is processed along the dividing line. A protective cover which is disposed on the front side of the workpiece during use, and has a slot formed in a first region corresponding to the planned dividing line and an extension of the planned dividing line. And a plate-shaped member, provided in a second region of the plate-shaped member corresponding to the structure of the workpiece, and deformed according to the structure when the plate-shaped member is disposed on the surface side of the workpiece. And a flexible elastic member.

  In one embodiment of the present invention, the workpiece is a package substrate provided with a light-emitting element and a dome-shaped lens in a plurality of areas on the front surface side partitioned by the planned division line, In a state where the plate-shaped member is arranged on the surface side of the workpiece, the blade may be formed so that the cutting edge of a cutting blade can be cut into the workpiece along the dividing line. .

  In one embodiment of the present invention, it is preferable that the plate member is detachably attached to a chuck table that holds the workpiece.

  According to another aspect of the present invention, using the above-described protective cover, a plate-like structure in which the concave or convex structure is provided in a plurality of regions on the front surface side divided by the planned dividing line. A method of processing a workpiece that processes the workpiece, wherein the workpiece is placed on a chuck table of a processing apparatus, and a workpiece holding step of holding a back side of the workpiece with the chuck table. A plate-shaped member which is arranged on the front side of the workpiece during use, and has the slot formed in the first area corresponding to the planned dividing line and an extension of the planned dividing line; The elastic member is provided in a second region of the plate-shaped member corresponding to the structure of the object, and is flexible in accordance with the structure when the plate-shaped member is disposed on the surface side of the workpiece. And the plate-shaped member of the protective cover including the member on the surface side of the workpiece. After the step of arranging the protective cover, the step of holding the workpiece, and the step of arranging the protective cover, the processing unit and the chuck table are relatively moved while processing the workpiece in the processing unit of the processing apparatus. A processing step of processing the workpiece along the planned dividing line by moving the workpiece.

  A protective cover according to one embodiment of the present invention includes a plate-like member having an elongated hole formed in a first region corresponding to an expected dividing line of a workpiece and an extension of the dividing line, and a concave or convex shape of the workpiece. And a flexible elastic member that is provided in the second region of the plate-shaped member corresponding to the structure and is deformed in accordance with the structure.

  Therefore, by arranging the plate-shaped member on the surface side of the workpiece provided with the concave or convex structure, the structure is appropriately covered with the elastic member to prevent the adhesion of the debris, The workpiece can be processed along the line to be divided through the long hole. That is, according to the protective cover of one embodiment of the present invention and the method of processing a workpiece using the protective cover, a plate-shaped workpiece having a concave or convex structure provided on a surface side is divided. When processing along the scheduled line, it is possible to prevent dust from adhering to this structure.

FIG. 1A is a perspective view showing a workpiece, and FIG. 1B is a cross-sectional view showing the workpiece. It is a perspective view which mainly shows the upper surface side of a protective cover. It is a perspective view which mainly shows the lower surface side of a protective cover. It is a perspective view showing a processing device. FIG. 5A is a cross-sectional view illustrating a workpiece holding step, and FIG. 5B is a cross-sectional view illustrating a protective cover disposing step. It is sectional drawing shown about a processing step.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1A is a perspective view illustrating a plate-shaped workpiece 11 that is processed using the protective cover according to the present embodiment, and FIG. 1B is a cross-sectional view illustrating the workpiece 11. is there. Note that FIG. 1B shows a cross section taken along the line AA of FIG. 1A.

  As shown in FIGS. 1A and 1B, the workpiece 11 includes a substrate 13 formed of a material such as a metal or a resin. The substrate 13 has a substantially flat first surface (front surface) 13a and a second surface (back surface) 13b opposite to the first surface 13a, and is provided from the first surface 13a side or the second surface 13b side. It is formed in a rectangular shape when viewed. The distance between the first surface 13a and the second surface 13b, that is, the thickness of the substrate 13 is, for example, 0.1 mm to 1.5 mm, typically 0.38 mm.

  In the present embodiment, the substrate 13 made of a material such as metal or resin is used, but there is no particular limitation on the material, shape, structure, size, and the like of the substrate 13. For example, a substrate 13 made of a material such as a semiconductor or a ceramic can be used. A disc-shaped semiconductor wafer or the like may be used as the substrate 13.

  The substrate 13 has a plurality of first dividing lines 15a parallel to the first surface 13a (or the second surface 13b) and a plurality of first dividing lines 15a parallel to the first surface 13a (or the second surface 13b). A plurality of second scheduled division lines 15b are set. The plurality of first scheduled lines 15a are all parallel to the first direction D1, and the plurality of second scheduled lines 15b are all parallel to the second direction D2 intersecting with the first direction D1. It is. That is, each of the first scheduled division lines 15a and each of the second scheduled division lines 15b cross each other.

  The substrate 13 according to the present embodiment has a plurality of linear first division lines 15a and a plurality of linear second division lines 15b. There is no particular limitation on the number, arrangement, shape, etc. of the lines. For example, the plurality of planned dividing lines set on the substrate 13 do not necessarily have to cross each other. In addition, at least one or more planned dividing lines may be set on the substrate 13.

  Terminals (not shown), wires (not shown), and the like are provided in the plurality of regions 13c of the substrate 13 partitioned by the first planned division line 15a and the second planned division line 15b. A chip (light emitting element) 17 including a light emitting element such as an LED (Light Emitting Diode) is arranged on the first surface 13a side of each region 13c, and terminals of the chip 17 and terminals of the substrate 13 are connected. Have been.

  A dome-shaped lens (structure) 19 that covers the chip 17 is provided on the first surface 13a side of each region 13c. The lens 19 is made of, for example, a transparent resin that transmits light emitted from a light emitting element in the chip 17. The lens 19 defines a light extraction direction and the like. The chip 17 is sealed by a lens 19. As described above, the workpiece 11 is a package substrate in which the chip 17 is sealed by the resin forming the lens 19.

  The distance between the tip (upper end) of the lens 19 and the second surface 13b of the substrate 13, that is, the thickness of the workpiece 11 is, for example, 0.5 mm to 3 mm, typically 1.5 mm. In this embodiment, for convenience, the lens 19 side of the workpiece 11 (the tip side of the lens 19) is referred to as the front side of the workpiece 11, and the substrate 13 side of the workpiece 11 (the The two surfaces 13b are referred to as the back surface of the workpiece 11.

  FIG. 2 is a perspective view mainly showing an upper surface side of the protective cover 1 used when processing the workpiece 11 along the first scheduled division line 15a, and FIG. It is a perspective view which shows a lower surface side. As shown in FIGS. 2 and 3, the protective cover 1 includes a plate-shaped member 3. The plate-shaped member 3 has an upper surface 3a and a lower surface 3b opposite to the upper surface 3a, and is made of, for example, a material such as metal or resin. However, there is no particular limitation on the material of the plate member 3.

  The upper surface 3a and the lower surface 3b of the plate member 3 are larger than the first surface 13a and the second surface 13b of the substrate 13 constituting the workpiece 11, and the thickness of the plate member 3 (the upper surface 3a, the lower surface 3b, Is larger than the thickness of the workpiece 11 (the distance between the tip of the lens 19 and the second surface 13b of the substrate 13). That is, the plate member 3 is formed in a plate shape larger than the workpiece 11. When the thickness of the workpiece 11 is about 1.5 mm, for example, the thickness of the plate member 3 is set to about 2 mm to 4 mm.

  On the lower surface 3b side of the plate-shaped member 3, a concave portion 3c having a shape and a size that can accommodate the workpiece 11 is provided. That is, the distance from the lower surface 3b of the plate member 3 to the bottom 3d of the concave portion 3c is larger than the thickness of the workpiece 11. When the workpiece 11 is processed, the plate-shaped member 3 is arranged above the workpiece 11 (on the surface side of the workpiece 11 and the lens 19 side) so that the workpiece 11 is accommodated in the concave portion 3c. You.

  In the state where the workpiece 11 is accommodated in the concave portion 3c, the first region 3e of the plate-like member 3 located immediately above the first dividing line 15a and the extension thereof (corresponding to the first dividing line 15a and the extension thereof). In the first region 3e) of the plate member 3 to be formed, a long hole 3f long in a direction corresponding to the first planned division line 15a is provided in a manner penetrating the plate member 3 from the upper surface 3a side to the lower surface 3b side. Have been. That is, the plate-shaped member 3 is provided with a number of long holes 3f corresponding to the number of the first planned division lines 15a along the respective first planned division lines 15a.

  The length (length in the longitudinal direction) of each long hole 3f is longer than the length of the corresponding first scheduled division line 15a, and a part of the long hole 3f overlaps the concave portion 3c. That is, a part of the long hole 3f is open to the bottom 3d of the concave portion 3c. In addition, the length of the long hole 3f is determined by the width of the long hole 3f (the length in the direction perpendicular to the longitudinal direction) and the cutting unit (machining) when processing the workpiece 11 along the first scheduled division line 15a. Unit) etc. are set appropriately within a range where they do not interfere with each other.

  The second region 3g of the plate member 3 (the second region 3g of the plate member 3 corresponding to the lens 19) located above the lens 19 with the workpiece 11 accommodated in the recess 3c has flexibility. An elastic member 5 having a shape is provided so as to be able to contact the lens 19. That is, the elastic member 5 having a predetermined thickness is attached to the bottom 3d of the recess 3c corresponding to the second region 3g. The thickness of the elastic member 5 is appropriately set according to the thickness of the workpiece 11 and the substrate 13, the depth of the concave portion 3c, and the like.

  When the plate-shaped member 3 is disposed above the workpiece 11 (surface side), the elastic member 5 comes into contact with each lens 19 and deforms according to the shape of each lens 19 to form each lens 19. cover. In the present embodiment, a rectangular parallelepiped sponge long in a direction parallel to the long hole 3f is used as the elastic member 5. That is, in the present embodiment, the plurality of lenses 19 are collectively covered by each elastic member 5.

  However, there is no particular limitation on the material, shape, structure, size, and the like of the elastic member 5. For example, a plurality of short elastic members corresponding to each lens 19 may be used instead of the rectangular parallelepiped elastic member 5 that is long in a direction parallel to the long hole 3f. Further, as the elastic member 5, besides sponge, flexible synthetic rubber or the like can be used. A concave portion or the like corresponding to the shape of the lens 19 may be formed on the lower surface side of the elastic member 5. In this case, the elastic member 5 can be more easily brought into close contact with the lens 19.

  At a position outside the concave portion 3c of the plate member 3, a hole 3h penetrating the plate member 3 from the upper surface 3a side to the lower surface 3b side is formed. By tightening a screw or the like through the hole 3h, the protective cover 1 is detachably attached to, for example, a chuck table or the like holding the workpiece 11.

  Next, a method of processing the workpiece 11 using the protective cover 1 to process the workpiece 11 will be described. FIG. 4 is a perspective view showing a processing apparatus 2 used in the method for processing a workpiece according to the present embodiment. In the present embodiment, a method of processing the workpiece 11 using a processing device 2 called a dicer or the like will be described.

  As shown in FIG. 4, the processing apparatus 2 includes a base 4 that supports each structure. On the upper surface of the base 4, a rectangular opening 4 a long in the X-axis direction (front-back direction, processing feed direction) is formed. In the opening 4a, an X-axis moving table (not shown), a ball screw type X-axis moving mechanism (not shown) for moving the X-axis moving table in the X-axis direction, and a table cover mainly covering the X-axis moving table 6, a bellows-like cover 8 mainly covering the X-axis moving mechanism is provided.

  Above the X-axis moving table, a chuck table (jig table) 10 for sucking and holding the plate-shaped workpiece 11 is arranged so as to be exposed from the table cover 6. The chuck table 10 includes a jig base 12 having a negative pressure transmission path. A plate-shaped holding jig 14 is mounted on a central area of the upper surface 12a of the jig base 12.

  On the upper surface of the base 4, a portal-shaped support structure 18 for supporting a cutting unit (machining unit) 16 for cutting (machining) the workpiece 11 is arranged so as to straddle the opening 4 a. A cutting unit moving mechanism 20 that moves the cutting unit 16 in the Y-axis direction (lateral direction, indexing feed direction) and the Z-axis direction (vertical direction) is provided on the upper front surface of the support structure 18.

  The cutting unit moving mechanism 20 includes a pair of Y-axis guide rails 22 arranged on the front surface of the support structure 18 and parallel to the Y-axis direction. A Y-axis moving plate 24 constituting the cutting unit moving mechanism 20 is slidably attached to the Y-axis guide rail 22. A nut (not shown) is provided on the back side (rear side) of the Y-axis moving plate 24, and a Y-axis ball screw 26 parallel to the Y-axis guide rail 22 is screwed into the nut. ing.

  A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 26. When the Y-axis ball screw 26 is rotated by the Y-axis pulse motor, the Y-axis moving plate 24 moves in the Y-axis direction along the Y-axis guide rail 22. On the surface (front surface) of the Y-axis moving plate 24, a pair of Z-axis guide rails 28 parallel to the Z-axis direction are provided.

  A Z-axis moving plate 30 is slidably attached to the Z-axis guide rail 28. A nut (not shown) is provided on the back side (rear side) of the Z-axis moving plate 30, and a Z-axis ball screw 32 parallel to the Z-axis guide rail 28 is screwed into the nut. ing. A Z-axis pulse motor 34 is connected to one end of the Z-axis ball screw 32. When the Z-axis ball screw 32 is rotated by the Z-axis pulse motor 34, the Z-axis moving plate 30 moves in the Z-axis direction along the Z-axis guide rail 28.

  The cutting unit 16 is provided below the Z-axis moving plate 30. At a position adjacent to the cutting unit 16, an imaging unit 36 such as a camera for imaging the upper surface of the workpiece 11 is provided. When the Y-axis moving plate 24 is moved in the Y-axis direction by the cutting unit moving mechanism 20, the cutting unit 16 and the imaging unit 36 are indexed and fed, and when the Z-axis moving plate 30 is moved in the Z-axis direction, cutting is performed. The unit 16 and the imaging unit 36 move up and down.

  The cutting unit 16 includes a cylindrical spindle housing 38. The spindle housing 38 accommodates a spindle 40 (see FIG. 6) serving as a rotation axis. One end of the spindle 40 is exposed to the outside from the spindle housing 38, and an annular cutting blade 42 to which abrasive grains are fixed with a binder such as resin is mounted on one end of the spindle 40. .

  A rotary drive source (not shown) such as a motor is connected to the other end of the spindle 40, and the cutting blade 42 is rotated by a force transmitted from the rotary drive source via the spindle 40. At a position adjacent to the cutting blade 42, a cutting liquid supply nozzle 44 that can supply a cutting liquid such as pure water to the workpiece 11 and the cutting blade 42 is disposed.

  When processing the workpiece 11 using the processing apparatus 2 configured as described above, first, a workpiece holding step of holding the workpiece 11 on the chuck table 10 is performed. FIG. 5A is a cross-sectional view illustrating a workpiece holding step. In the workpiece holding step, first, the workpiece 11 is held such that the back surface (the second surface 13b of the substrate 13) of the workpiece 11 is brought into contact with the upper surface 14a of the holding jig 14 constituting the chuck table 10. Place on chuck table 10.

  As shown in FIG. 5A, on the upper surface 14a side of the holding jig 14, a relief groove 14b for the cutting blade 42 corresponding to the first planned division line 15a of the workpiece 11 is formed. The upper end of the escape groove 14b is open on the upper surface 14a of the holding jig 14. The upper surface 14a of the holding jig 14 is partitioned into a plurality of regions by the escape grooves 14b.

  The width of the clearance groove 14b is wider than the width of the cutting blade 42, and the depth of the clearance groove 14b is greater than the cutting depth of the cutting blade 42. Therefore, the holding jig 14 does not interfere with the cutting blade 42 even if the cutting blade 42 is cut deep when cutting the workpiece 11 along the first scheduled division line 15a.

  In each area defined by the escape groove 14b, a suction hole 14c penetrating vertically through the holding jig 14 and opening to the upper surface 14a is formed. With the holding jig 14 placed on the upper surface 12a of the jig base 12, each suction hole 14c is connected to a negative pressure transmission path provided in the jig base 12. The negative pressure transmission path is connected to a suction source (not shown) via, for example, a valve (not shown).

  After the back surface of the workpiece 11 is brought into contact with the upper surface 14a of the holding jig 14, the valve is opened after aligning the position of the first scheduled division line 15a with the position of the relief groove 14b. Thereby, the negative pressure of the suction source acts on the workpiece 11 through the negative pressure transmission path and the suction hole 14c. As a result, the back surface of the workpiece 11 is sucked and held by the chuck table 10.

  After the workpiece holding step, a protective cover arranging step of arranging the above-described protective cover 1 (plate-like member 3) on the surface side of the workpiece 11 is performed. FIG. 5B is a cross-sectional view illustrating a protective cover arrangement step. In this protective cover disposing step, first, the lower surface 3b of the plate member 3 is brought into contact with the upper surface 14a of the holding jig 14 so that the workpiece 11 is accommodated in the concave portion 3c of the plate member 3.

  Then, after adjusting the position of the long hole 3f to the position of the first scheduled division line 15a, a screw or the like is screwed into a screw hole (not shown) of the holding jig 14 (or the jig base 12) through the hole 3h, The protection cover 1 is fixed to the chuck table 10. As described above, the flexible elastic member 5 is provided in the second region 3 g of the plate-shaped member 3 located above the lens 19 so as to be able to contact the lens 19.

  Therefore, when the plate-shaped member 3 is disposed on the surface side of the workpiece 11 as described above, the elastic member 5 contacts each lens 19 and deforms according to the shape of each lens 19 to change each lens 19. cover. Thereby, at the time of the next processing step of processing the workpiece 11 along the first scheduled division line 15a, it is possible to prevent the attachment of chips (cutting chips) to the lens 19 and the like.

  In the protective cover disposing step, the lower surface 3b of the plate member 3 does not necessarily have to contact the upper surface 14a of the holding jig 14. For example, when the concave portion 3c is formed to have a size capable of covering the entire holding jig 14, for example, the plate-like member 3 is formed on the upper surface 12a of the jig base 12 exposed outside the holding jig 14. The protective cover 1 can be fixed to the chuck table 10 by contacting the lower surface 3b of the protective cover 1. In such a case, the height (the position in the Z-axis direction) of the lower surface 3b of the plate-like member 3 may not match the height of the upper surface 14a of the holding jig 14.

  After the protective cover disposing step, a processing step of cutting (processing) the workpiece 11 along the first scheduled division line 15a by the cutting unit 16 is performed. FIG. 6 is a cross-sectional view illustrating a processing step. In this processing step, for example, the chuck table 10 and the cutting unit 16 are relatively moved, and the position of the cutting blade 42 is adjusted to be above the extension of the first planned division line 15a of the workpiece 11.

  Then, while rotating the cutting blade 42, the lower end is moved to a position lower than the back surface of the workpiece 11, and the cutting blade 42 is moved along the target first scheduled division line 15a, for example, The chuck table 10 is moved in the X-axis direction. As described above, by relatively moving the chuck table 10 and the cutting unit 16, the workpiece 11 is cut and cut along the target first scheduled division line 15a.

  At this time, a cutting fluid such as pure water is supplied from the cutting fluid supply nozzle 44 to the workpiece 11 and the cutting blade 42. As a result, chips (cutting chips) generated by cutting the workpiece 11 are discharged to the outside of the workpiece 11. In the present embodiment, as described above, since each lens 19 is appropriately covered with the elastic member 5, the possibility that debris mixed in the cutting fluid adheres to the lens 19 or the like can be sufficiently reduced.

  In addition, as described above, the first region 3 e of the plate-shaped member 3 located immediately above the first scheduled division line 15 a and the extension thereof is provided with the long hole 3 f which does not interfere with the cutting unit 16. . That is, each of the long holes 3f is formed so that the cutting edge of the cutting blade 42 can be appropriately cut into the workpiece 11 along the target first scheduled division line 15a. Therefore, in this processing step, the protective cover 1 and the cutting unit 16 do not come into contact with each other, so that the protective cover 1 and the cutting unit 16 are not damaged.

  After the workpiece 11 has been cut along the target first planned division line 15a in the above-described procedure, the remaining first planned division line 15a is cut and cut in the same procedure. When the workpiece 11 is cut and cut along all the first scheduled division lines 15a, the processing step ends.

  When the elastic member 5 absorbs the cutting fluid or the like, after the processing step is completed, the cutting fluid or the like of the elastic member 5 is absorbed by another member (such as a sponge) having a hygroscopic property. It is desirable to remove cutting fluid and the like. Thereby, the possibility that the workpiece 11 to be processed next is contaminated by the cutting fluid absorbed by the elastic member 5 can be suppressed to be low.

  As described above, in the protective cover 1 according to the present embodiment, the long hole 3f is formed in the first division line 15a of the workpiece 11 and the first region 3e corresponding to the extension of the first division line 15a. A plate-shaped member 3, a flexible elastic member 5 provided in a second region 3 g of the plate-shaped member 3 corresponding to the lens (structure) 19 of the workpiece 11, and deformed in accordance with the lens 19; Contains.

  Therefore, by disposing the plate-shaped member 3 on the surface side of the workpiece 11 on which the lens 19 is provided, the lens 19 is appropriately covered with the elastic member 5 so as to prevent the attachment of debris, The workpiece 11 can be processed along the first scheduled division line 15a through the three long holes 3f. That is, according to the protective cover 1 according to the present embodiment and the method of processing a workpiece using the protective cover 1, the plate-shaped workpiece 11 having the lens 19 provided on the front surface side is to be first divided. When processing along the line 15a, it is possible to prevent dust from adhering to the lens 19.

  The present invention is not limited to the description of the above-described embodiment, and can be implemented with various changes. For example, in the above-described embodiment, the protection cover 1 and the processing method of the workpiece used when processing the workpiece 11 along the first scheduled division line 15a have been described. The workpiece 11 can also be processed along the second scheduled division line 15b by using the processing method of the object.

  However, the protective cover used when processing the workpiece 11 along the second planned dividing line 15b needs to be provided with a long hole corresponding to the second planned dividing line 15b. Of course, when the interval between two adjacent first scheduled division lines 15a is equal to the interval between two adjacent second scheduled division lines 15b, a protective cover that can be used for both processes is used. May be.

  Specifically, for example, by providing a long hole in the protective cover with a number equal to the larger of the number of the first planned division lines 15a and the number of the second planned division lines 15b, the first division planned line 15a is provided. A protective cover that can be used for processing both the line 15a and the second scheduled division line 15b is obtained. In this case, the cost required for the protective cover can be reduced as compared with the case where two types of protective covers are used.

  Further, in the above-described embodiment, the protection cover 1 and the processing method of the workpiece used when cutting the workpiece 11 along the first scheduled division line 15a have been described. Using the object processing method, the object 11 can be processed by irradiating a laser beam along an arbitrary dividing line.

  Further, in the above-described embodiment, a description will be given of the protective cover 1 used when processing the workpiece 11 in which the dome-shaped lens 19 is provided on the first surface 13a side of the substrate 13 and the processing method of the workpiece. However, other plate-shaped workpieces having a concave or convex structure on the surface side can be processed using the same method of processing the protective cover and the workpiece. In this case, on the lower surface side of the elastic member 5, a convex portion or a concave portion corresponding to the shape of the concave or convex structure of the workpiece may be formed.

  Further, in the above-described embodiment, the mode in which the plate-shaped member 3 constituting the protective cover 1 is fixed to the chuck table 10 by a screw or the like is exemplified. However, the plate-shaped member 3 is fixed to the chuck table 10 by the negative pressure of the suction source. 10 may be fixed. This embodiment is suitable for automation of a processing step including a step of disposing the protective cover, since the protective cover 1 is not fixed to the chuck table 10 with a mechanical structure such as a screw.

  In addition, structures, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 1 Protective cover 3 Plate-shaped member 3a Upper surface 3b Lower surface 3c Concave portion 3d Bottom 3e First region 3f Long hole 3g Second region 3h Hole 5 Elastic member 11 Workpiece 13 Substrate 13a First surface (surface)
13b 2nd surface (back surface)
13c Area 15a First scheduled dividing line 15b Second scheduled dividing line 17 Chip (light emitting element)
19 lens (structure)
D1 First direction D2 Second direction 2 Processing device 4 Base 4a Opening 6 Table cover 8 Bellows cover 10 Chuck table (jig table)
12 jig base 12a upper surface 14 holding jig 14a upper surface 14b relief groove 14c suction hole 16 cutting unit (processing unit)
Reference Signs List 18 support structure 20 cutting unit moving mechanism 22 Y-axis guide rail 24 Y-axis moving plate 26 Y-axis ball screw 28 Z-axis guide rail 30 Z-axis moving plate 32 Z-axis ball screw 34 Z-axis pulse motor 36 Imaging unit (imaging means)
38 Spindle housing 40 Spindle 42 Cutting blade 44 Cutting fluid supply nozzle

Claims (4)

A protective cover used when processing a plate-shaped workpiece provided with a concave or convex structure in a plurality of regions on the surface side partitioned by the planned dividing line along the planned dividing line, ,
A plate-shaped member which is disposed on the front side of the workpiece during use, and has an elongated hole formed in a first region corresponding to an extension of the planned dividing line and the planned dividing line,
A flexible member is provided in a second region of the plate member corresponding to the structure of the workpiece, and is deformed in accordance with the structure when the plate member is disposed on the surface side of the workpiece. And a certain elastic member. The workpiece is a package substrate provided with a light-emitting element and a dome-shaped lens in a plurality of areas on the front surface side partitioned by the planned dividing line,
The slot is formed so that the blade of a cutting blade can be cut into the workpiece along the dividing line in a state where the plate-shaped member is arranged on the surface side of the workpiece. The protective cover according to claim 1, wherein the protective cover is formed.   3. The protective cover according to claim 1, wherein the plate member is detachably attached to a chuck table that holds the workpiece. A plate-like structure in which the concave or convex structure is provided in a plurality of regions on the front surface side defined by the dividing line using the protective cover according to any one of claims 1 to 3. A method of processing a workpiece to process the workpiece,
A workpiece holding step of placing the workpiece on a chuck table of a processing apparatus and holding a back side of the workpiece with the chuck table;
A plate-shaped member which is arranged on the front side of the workpiece in use and has the elongated hole formed in the divisional line and a first region corresponding to an extension of the divisional line; A flexible elastic member that is provided in a second region of the plate member corresponding to the structure, and that is deformed in accordance with the structure when the plate member is disposed on the surface side of the workpiece. And a protective cover disposing step of disposing the plate-shaped member of the protective cover on the surface side of the workpiece, including:
After the workpiece holding step and the protective cover arranging step, the workpiece is moved relatively to the chuck unit while the workpiece is being processed by the processing unit of the processing apparatus. And a processing step of processing the object along the planned dividing line.