JP2020025458A - 隔離された固定子およびエンコーダを備えるロボット - Google Patents
隔離された固定子およびエンコーダを備えるロボット Download PDFInfo
- Publication number
- JP2020025458A JP2020025458A JP2019189054A JP2019189054A JP2020025458A JP 2020025458 A JP2020025458 A JP 2020025458A JP 2019189054 A JP2019189054 A JP 2019189054A JP 2019189054 A JP2019189054 A JP 2019189054A JP 2020025458 A JP2020025458 A JP 2020025458A
- Authority
- JP
- Japan
- Prior art keywords
- housing
- seal
- stator
- rotor
- encoder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims abstract description 48
- 230000007613 environmental effect Effects 0.000 claims description 36
- 238000007789 sealing Methods 0.000 abstract description 57
- 239000000463 material Substances 0.000 description 15
- 229910052782 aluminium Inorganic materials 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 12
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 239000010935 stainless steel Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- 230000013011 mating Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005538 encapsulation Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000004382 potting Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229920002449 FKM Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
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- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
- H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0075—Means for protecting the manipulator from its environment or vice versa
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/22—Optical devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Motor Or Generator Frames (AREA)
- Manipulator (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
Claims (8)
- ハウジングと、
固定子および回転子を備え、前記固定子は前記ハウジングに接続されるモータと、
エンコーダ読取ヘッドおよびエンコーダディスクを備え、前記エンコーダ読取ヘッドは前記ハウジングに接続される位置エンコーダと、
前記ハウジングに接続される環境隔壁であって、前記固定子と前記回転子との間に延在し、かつ、前記エンコーダ読取ヘッドと前記エンコーダディスクとの間に延在する一体型部材を備える環境隔壁と、
を備える装置。 - 前記一体型部材の第1端は第1シール境界面の一部を形成し、前記一体型部材の反対側の第2端は第2シール境界面の一部を形成する、請求項1に記載の装置。
- 前記一体型スリーブ部材の前記第2端は、弾性的に曲げられて、前記第2シール境界面のシールに前記ハウジングに対するばね荷重を加える、請求項2に記載の装置。
- 前記第1シール境界面は、前記ハウジング内に1つの角を有する凹状の窪みを有し、前記一体型スリーブ部材の前記第1端は、前記第1シール境界面の第1シールを前記角に向かって圧縮する、請求項2に記載の装置。
- 前記一体型スリーブ部材の前記第1端は、第1シールを前記ハウジングに向かって第1の外側方向に押し、前記一体型スリーブ部材の前記第2端は、第2シールを前記ハウジングに向かって第2の内側方向に押す、請求項2に記載の装置。
- 前記一体型部材は、前記一体型部材の両端の間に少なくとも60度の少なくとも1つの曲げ部を有し、前記少なくとも1つの曲げ部は前記両端から離間されている、請求項1に記載の装置。
- 前記少なくとも1つの曲げ部は、約90度の第1曲げ部と、約40度以上の第2曲げ部とを備える、請求項6に記載の装置。
- 環境チャンバと、前記回転子に接続されたシャフトをさらに備える装置であって、前記回転子および前記シャフトは、前記環境チャンバの環境と連通し、前記ハウジングおよび前記環境隔壁は、前記固定子を前記環境チャンバの前記環境から隔離する、請求項1から7のいずれかに記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461981987P | 2014-04-21 | 2014-04-21 | |
US61/981,987 | 2014-04-21 | ||
JP2016563434A JP6626835B2 (ja) | 2014-04-21 | 2015-04-21 | 隔離された固定子およびエンコーダを備えるロボット |
Related Parent Applications (1)
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JP2016563434A Division JP6626835B2 (ja) | 2014-04-21 | 2015-04-21 | 隔離された固定子およびエンコーダを備えるロボット |
Publications (2)
Publication Number | Publication Date |
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JP2020025458A true JP2020025458A (ja) | 2020-02-13 |
JP6890164B2 JP6890164B2 (ja) | 2021-06-18 |
Family
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JP2016563434A Active JP6626835B2 (ja) | 2014-04-21 | 2015-04-21 | 隔離された固定子およびエンコーダを備えるロボット |
JP2019189054A Active JP6890164B2 (ja) | 2014-04-21 | 2019-10-16 | 隔離された固定子およびエンコーダを備えるロボット |
Family Applications Before (1)
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JP2016563434A Active JP6626835B2 (ja) | 2014-04-21 | 2015-04-21 | 隔離された固定子およびエンコーダを備えるロボット |
Country Status (5)
Country | Link |
---|---|
US (2) | US10116184B2 (ja) |
JP (2) | JP6626835B2 (ja) |
KR (3) | KR102475708B1 (ja) |
CN (1) | CN106416006B (ja) |
WO (1) | WO2015164298A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10476354B2 (en) | 2011-09-16 | 2019-11-12 | Persimmon Technologies Corp. | Robot drive with isolated optical encoder |
US20130069450A1 (en) | 2011-09-16 | 2013-03-21 | Persimmon Technologies, Corp. | Robot Drive With Passive Rotor |
CN103192384B (zh) * | 2013-03-11 | 2015-08-19 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
SE542616C2 (en) * | 2018-09-27 | 2020-06-16 | Leine & Linde Ab | Rotary encoder and method for manufacturing a rotary encoder |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11215780A (ja) * | 1998-01-30 | 1999-08-06 | Tamagawa Seiki Co Ltd | 真空モータ |
US5939813A (en) * | 1995-08-24 | 1999-08-17 | Sulzer Electronics Ag | Gap tube motor |
JP2001112223A (ja) * | 1999-10-06 | 2001-04-20 | Tokyo Electron Ltd | 真空モータ及び搬送装置 |
JP2008094225A (ja) * | 2006-10-11 | 2008-04-24 | Kayaba Ind Co Ltd | サスペンション装置 |
US20130069450A1 (en) * | 2011-09-16 | 2013-03-21 | Persimmon Technologies, Corp. | Robot Drive With Passive Rotor |
US20130224048A1 (en) * | 2012-02-28 | 2013-08-29 | Philip Gillingwater | Wet rotor pump motor stator sealing liner |
US20140139061A1 (en) * | 2011-06-25 | 2014-05-22 | Baumueller Nuernberg Gmbh | Electric machine and can for the electric machine |
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JPS5326456B2 (ja) * | 1972-05-22 | 1978-08-02 | ||
US5424887A (en) * | 1980-03-05 | 1995-06-13 | Papst Licensing Gmbh | Disk storage drive |
JP2559891B2 (ja) * | 1990-07-20 | 1996-12-04 | 三菱電機株式会社 | 減速機 |
US7988398B2 (en) | 2002-07-22 | 2011-08-02 | Brooks Automation, Inc. | Linear substrate transport apparatus |
EP1535313B1 (en) | 2002-07-22 | 2018-10-31 | Brooks Automation, Inc. | Substrate processing apparatus |
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JP2008035604A (ja) * | 2006-07-27 | 2008-02-14 | Sumitomo Heavy Ind Ltd | Gm冷凍機、パルス管冷凍機、クライオポンプ、mri装置、超電導磁石装置、nmr装置および半導体冷却用冷凍機 |
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-
2015
- 2015-04-21 WO PCT/US2015/026752 patent/WO2015164298A1/en active Application Filing
- 2015-04-21 JP JP2016563434A patent/JP6626835B2/ja active Active
- 2015-04-21 KR KR1020177037630A patent/KR102475708B1/ko active IP Right Grant
- 2015-04-21 CN CN201580028352.0A patent/CN106416006B/zh active Active
- 2015-04-21 KR KR1020167032308A patent/KR102448616B1/ko active IP Right Grant
- 2015-04-21 KR KR1020227042602A patent/KR102644224B1/ko active IP Right Grant
- 2015-04-21 US US14/691,866 patent/US10116184B2/en active Active
-
2017
- 2017-12-12 US US15/838,819 patent/US10069371B2/en active Active
-
2019
- 2019-10-16 JP JP2019189054A patent/JP6890164B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5939813A (en) * | 1995-08-24 | 1999-08-17 | Sulzer Electronics Ag | Gap tube motor |
JPH11215780A (ja) * | 1998-01-30 | 1999-08-06 | Tamagawa Seiki Co Ltd | 真空モータ |
JP2001112223A (ja) * | 1999-10-06 | 2001-04-20 | Tokyo Electron Ltd | 真空モータ及び搬送装置 |
JP2008094225A (ja) * | 2006-10-11 | 2008-04-24 | Kayaba Ind Co Ltd | サスペンション装置 |
US20140139061A1 (en) * | 2011-06-25 | 2014-05-22 | Baumueller Nuernberg Gmbh | Electric machine and can for the electric machine |
US20130069450A1 (en) * | 2011-09-16 | 2013-03-21 | Persimmon Technologies, Corp. | Robot Drive With Passive Rotor |
US20130224048A1 (en) * | 2012-02-28 | 2013-08-29 | Philip Gillingwater | Wet rotor pump motor stator sealing liner |
CN103296835A (zh) * | 2012-02-28 | 2013-09-11 | 哈米尔顿森德斯特兰德公司 | 湿转子泵马达定子密封衬套 |
Also Published As
Publication number | Publication date |
---|---|
KR102644224B1 (ko) | 2024-03-06 |
WO2015164298A1 (en) | 2015-10-29 |
CN106416006A (zh) | 2017-02-15 |
US20150303764A1 (en) | 2015-10-22 |
KR20160145768A (ko) | 2016-12-20 |
JP6890164B2 (ja) | 2021-06-18 |
KR102448616B1 (ko) | 2022-09-28 |
KR20230003257A (ko) | 2023-01-05 |
JP6626835B2 (ja) | 2019-12-25 |
US10116184B2 (en) | 2018-10-30 |
US20180102684A1 (en) | 2018-04-12 |
CN106416006B (zh) | 2021-07-27 |
US10069371B2 (en) | 2018-09-04 |
JP2017514441A (ja) | 2017-06-01 |
KR102475708B1 (ko) | 2022-12-08 |
KR20180004321A (ko) | 2018-01-10 |
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