JP2019531453A - 非均一断熱を有する熱処理デバイス - Google Patents
非均一断熱を有する熱処理デバイス Download PDFInfo
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- JP2019531453A JP2019531453A JP2019506187A JP2019506187A JP2019531453A JP 2019531453 A JP2019531453 A JP 2019531453A JP 2019506187 A JP2019506187 A JP 2019506187A JP 2019506187 A JP2019506187 A JP 2019506187A JP 2019531453 A JP2019531453 A JP 2019531453A
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- Japan
- Prior art keywords
- heat treatment
- thermal insulation
- treatment device
- layer
- insulation material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/0003—Linings or walls
- F27D1/0033—Linings or walls comprising heat shields, e.g. heat shieldsd
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/068—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated by radiant tubes, the tube being heated by a hot medium, e.g. hot gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/32—Casings
- F27B9/34—Arrangements of linings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Furnace Details (AREA)
- Tunnel Furnaces (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
Description
Claims (11)
- 1つ又は複数の製品を熱処理するための熱処理デバイス(10)であって、
両側の遠心端及び少なくとも1つの制御可能な加熱区域を有する熱処理チャンバ、
前記遠心端のそれぞれに配置された少なくとも1つの緩衝区域であって、前記熱処理チャンバの少なくとも1つの加熱区域及び緩衝区域が、内表面及び外表面を有する加熱素子アセンブリを形成する、少なくとも1つの緩衝区域、並びに
前記熱処理チャンバの少なくとも1つの加熱区域及び緩衝区域に沿って配置され、且つ前記加熱素子アセンブリの一部を形成する、断熱材料の少なくとも1つの層であって、前記加熱アセンブリの軸長にわたって非均一に効率が制御される、断熱材料の少なくとも1つの層
を備えている熱処理デバイス(10)。 - 所望の冷却率を達成するために、前記少なくとも1つの緩衝区域に位置する前記断熱材料の少なくとも1つの層の一部が、最大化された効率を有し、前記加熱区域における前記断熱材料の少なくとも1つの層の一部が、より低い効率を有することを特徴とする、請求項1に記載の熱処理デバイス(10)。
- 前記断熱材料の前記効率が、前記断熱材料の層の厚さを変動させることによって制御されることを特徴とする、請求項1又は2に記載の熱処理デバイス(10)。
- 前記断熱材料の前記効率が、種々のグレードの熱伝導率を有する断熱材料を使用することによって制御されることを特徴とする、請求項1から3のいずれか一項に記載の熱処理デバイス(10)。
- 前記断熱材料の前記効率が、前記断熱材料の複数の層の種々の配置を使用することによって制御されることを特徴とする、請求項1から3のいずれか一項に記載の熱処理デバイス(10)。
- 前記複数の層が同一の厚さを有することを特徴とする、請求項1から5のいずれか一項に記載の熱処理デバイス(10)。
- 前記複数の層が種々の厚さを有することを特徴とする、請求項5又は6に記載の熱処理デバイス(10)。
- 前記層のうちの少なくとも1つの厚さが、前記処理チャンバの長さに沿って変動することを特徴とする、請求項5から7のいずれか一項に記載の熱処理デバイス(10)。
- 前記少なくとも1つの加熱区域における少なくとも1つの層が、前記少なくとも1つの緩衝区域における層より少ない厚さを有することを特徴とする、請求項1から8のいずれか一項に記載の熱処理デバイス(10)。
- 前記断熱材料が、少なくとも1つの第1の断熱部分及び第2の断熱部分を有し、前記少なくとも1つの断熱部分における断熱材料が、前記第2の断熱部分における材料と異なることを特徴とする、請求項1から9のいずれか一項に記載の熱処理デバイス(10)。
- 外部シェルが、前記加熱素子アセンブリの前記外表面の周りに配置されていることを特徴とする、請求項1から10のいずれか一項に記載の熱処理デバイス(10)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662371525P | 2016-08-05 | 2016-08-05 | |
US62/371,525 | 2016-08-05 | ||
PCT/US2017/045646 WO2018027208A1 (en) | 2016-08-05 | 2017-08-05 | Thermal process device with non-uniform insulation |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019531453A true JP2019531453A (ja) | 2019-10-31 |
JP7058637B2 JP7058637B2 (ja) | 2022-04-22 |
Family
ID=59677327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019506187A Active JP7058637B2 (ja) | 2016-08-05 | 2017-08-05 | 非均一断熱を有する熱処理デバイス |
Country Status (6)
Country | Link |
---|---|
US (1) | US10837703B2 (ja) |
EP (1) | EP3494351B1 (ja) |
JP (1) | JP7058637B2 (ja) |
KR (1) | KR102403525B1 (ja) |
CN (1) | CN109923363B (ja) |
WO (1) | WO2018027208A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1620676S (ja) * | 2018-02-27 | 2018-12-17 | ||
JP1611565S (ja) * | 2018-02-27 | 2018-08-20 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5099963A (ja) * | 1974-01-09 | 1975-08-08 | ||
JPH01192113A (ja) * | 1988-01-28 | 1989-08-02 | Tokyo Electron Ltd | 加熱炉 |
JPH05504227A (ja) * | 1990-02-06 | 1993-07-01 | サームテック インコーポレイテッド | 電気炉 |
JP2003075070A (ja) * | 2001-09-05 | 2003-03-12 | Natl Inst For Fusion Science | 連続焼成炉及びそれを用いた焼成体の製造方法 |
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US1416726A (en) * | 1921-07-18 | 1922-05-23 | Champion Ignition Co | Burning ceramic wares and apparatus therefor |
US3651240A (en) * | 1969-01-31 | 1972-03-21 | Trw Inc | Heat transfer device |
US4849608A (en) | 1987-02-14 | 1989-07-18 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for heat-treating wafers |
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WO2004111540A2 (en) | 2003-06-11 | 2004-12-23 | Huntington Alloys Corporation | Furnace with multiple heating |
US7413592B2 (en) * | 2004-03-31 | 2008-08-19 | Nu-Iron Technology, Llc | Linear hearth furnace system and methods regarding same |
WO2006013651A1 (ja) * | 2004-08-04 | 2006-02-09 | Ibiden Co., Ltd. | 焼成炉及びこれを用いた多孔質セラミック部材の製造方法 |
US20090183675A1 (en) * | 2006-10-13 | 2009-07-23 | Mustafa Pinarbasi | Reactor to form solar cell absorbers |
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US8199193B2 (en) * | 2008-10-30 | 2012-06-12 | Caskol, Llc | Video camera inspection system for roller hearth heat treating furnaces and the like |
CN201852439U (zh) * | 2010-11-05 | 2011-06-01 | 黄喜锤 | 一种电磁感应熔炼炉 |
US9171746B2 (en) | 2011-09-06 | 2015-10-27 | Arsalan Emami | Heater elements with enhanced cooling |
US10204806B2 (en) | 2011-09-06 | 2019-02-12 | Arsalan Emami | Modular heater |
US8816252B2 (en) * | 2011-11-22 | 2014-08-26 | Corning Incorporated | Methods and apparatus for localized heating and deformation of glass sheets |
CN204757682U (zh) * | 2015-07-01 | 2015-11-11 | 皮洛特·白乐礼·西奥 | 一种窑炉 |
CN105737598A (zh) * | 2016-03-07 | 2016-07-06 | 苏州新凌电炉有限公司 | 一种高效率辊道窑炉 |
-
2017
- 2017-08-05 WO PCT/US2017/045646 patent/WO2018027208A1/en unknown
- 2017-08-05 US US15/669,899 patent/US10837703B2/en active Active
- 2017-08-05 KR KR1020197006434A patent/KR102403525B1/ko active IP Right Grant
- 2017-08-05 EP EP17754897.1A patent/EP3494351B1/en active Active
- 2017-08-05 CN CN201780053146.4A patent/CN109923363B/zh active Active
- 2017-08-05 JP JP2019506187A patent/JP7058637B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5099963A (ja) * | 1974-01-09 | 1975-08-08 | ||
JPH01192113A (ja) * | 1988-01-28 | 1989-08-02 | Tokyo Electron Ltd | 加熱炉 |
JPH05504227A (ja) * | 1990-02-06 | 1993-07-01 | サームテック インコーポレイテッド | 電気炉 |
JP2003075070A (ja) * | 2001-09-05 | 2003-03-12 | Natl Inst For Fusion Science | 連続焼成炉及びそれを用いた焼成体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP3494351B1 (en) | 2021-06-02 |
CN109923363A (zh) | 2019-06-21 |
CN109923363B (zh) | 2021-01-22 |
JP7058637B2 (ja) | 2022-04-22 |
US10837703B2 (en) | 2020-11-17 |
WO2018027208A1 (en) | 2018-02-08 |
US20180038649A1 (en) | 2018-02-08 |
KR102403525B1 (ko) | 2022-05-27 |
EP3494351A1 (en) | 2019-06-12 |
KR20190035857A (ko) | 2019-04-03 |
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