JP2019528373A - 動的なマグネトロン制御による物理的気相堆積(pvd)のプラズマエネルギーの制御 - Google Patents
動的なマグネトロン制御による物理的気相堆積(pvd)のプラズマエネルギーの制御 Download PDFInfo
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- 238000005240 physical vapour deposition Methods 0.000 title claims description 21
- 239000000758 substrate Substances 0.000 claims abstract description 215
- 238000000034 method Methods 0.000 claims abstract description 172
- 230000008569 process Effects 0.000 claims abstract description 147
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- 238000000151 deposition Methods 0.000 claims description 125
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- 238000004544 sputter deposition Methods 0.000 description 26
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- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
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- 239000002184 metal Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
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- 238000004876 x-ray fluorescence Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 208000000659 Autoimmune lymphoproliferative syndrome Diseases 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
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- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
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- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
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- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229940082150 encore Drugs 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
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- 230000007704 transition Effects 0.000 description 1
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- H01J37/3476—Testing and control
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
Description
一部の実施形態では、本装置は、プロセスチャンバ内に含まれる2軸ドライバーからマグネトロンの位置情報を受け取る。
本原理による他のおよびさらなる実施形態が以下に記載される。
Claims (15)
- プロセスチャンバ内部で基板の処理を制御する方法であって、
前記基板の表面上の基準位置に対する前記プロセスチャンバ内のマグネトロンの位置を決定するステップと、
前記マグネトロンの前記決定された位置に基づいて基板処理に影響を与える少なくとも1つの電源の電力パラメータを変調するステップと、
を含む、方法。 - 前記電力パラメータが、直流(DC)ソース電力、高周波(RF)バイアス電力、DCシールドバイアス電圧、または電磁コイル電流のうちの少なくとも1つの電力設定点を含む、請求項1に記載の方法。
- 前記直流(DC)ソース電力、前記高周波(RF)バイアス電力、前記DCシールドバイアス電圧、または前記電磁コイル電流のうちの少なくとも1つの電力設定点が、前記マグネトロンの前記決定された位置に対応する前記基板の前記表面上の位置において材料の堆積を増加させるように変調される、請求項2に記載の方法。
- 前記直流(DC)ソース電力、前記高周波(RF)バイアス電力、前記DCシールドバイアス電圧、または前記電磁コイル電流のうちの少なくとも1つの電力設定点が、前記マグネトロンの前記決定された位置に対応する前記基板の前記表面上の位置において材料の堆積を減少させるように変調される、請求項2に記載の方法。
- 前記少なくとも1つの電源の電力パラメータが関数曲線に従って変調される、請求項1に記載の方法。
- 前記関数曲線上の点が、前記基板の前記表面上のそれぞれの基準位置における堆積速度またはエッチング速度に行われる変更の量に基づいて決定される、請求項5に記載の方法。
- 前記プロセスチャンバが物理的気相堆積(PVD)チャンバを備え、前記変調が前記マグネトロンの前記決定された位置に対応する前記基板の前記表面上の位置における材料堆積の速度を制御する、請求項1に記載の方法。
- 前記基板の前記表面上のそれぞれの位置において堆積速度を測定して、前記変調を介して材料堆積の速度を調整すべき前記基板の前記表面上の少なくとも1つの位置を識別するステップを含む、請求項7に記載の方法。
- 前記プロセスチャンバがエッチングチャンバを備え、前記変調が前記マグネトロンの前記決定された位置に対応する前記基板の前記表面上の位置における材料エッチングの速度を制御する、請求項1に記載の方法。
- 前記基板の前記表面上のそれぞれの位置においてエッチング速度を測定して、前記変調を介して材料エッチングの速度を調整すべき前記基板の前記表面上の少なくとも1つの位置を識別するステップを含む、請求項9に記載の方法。
- 可動マグネトロンおよび少なくとも1つの電源を含むプロセスチャンバ内部で基板の処理を制御するための装置であって、
プロセッサと、
前記プロセッサに結合されたメモリであって、
前記基板の表面上の基準位置に対する前記可動マグネトロンの位置を決定し、
前記可動マグネトロンの前記決定された位置に基づいて前記少なくとも1つの電源の電力パラメータを変調する
ように前記装置を構成するための、前記プロセッサによって実行可能な命令を内部に記憶している、メモリと、
を備える、装置。 - 前記電力パラメータが、直流(DC)ソース電力、高周波(RF)バイアス電力、DCシールドバイアス電圧、または電磁コイル電流のうちの少なくとも1つの電力設定点を含む、請求項11に記載の装置。
- プロセスチャンバであって、
内部容積、
基板を支持するために前記内部容積内部に配置された基板支持体、
前記内部容積に露出した前面を有するターゲット、
前記前面と反対側の前記ターゲットの裏面に近接して配置され、前記基板支持体の中心軸の周りで回転可能な可動マグネトロン、および
前記プロセスチャンバに電力を供給する少なくとも1つの電源、
を備える、プロセスチャンバと、
プロセッサおよび前記プロセッサに結合されたメモリを備えるコントローラであって、前記メモリが、
前記基板支持体上に取り付けられた基板の表面上の基準位置に対する前記可動マグネトロンの位置を決定し、
前記可動マグネトロンの前記決定された位置に基づいて前記少なくとも1つの電源の電力パラメータを変調する
ように前記コントローラを構成するための、前記プロセッサによって実行可能な命令を内部に記憶している、コントローラと、
を備える、基板処理システム。 - 前記可動マグネトロンの移動を制御し、前記コントローラに前記可動マグネトロンの位置情報を伝達するための2軸ドライバーを備える、請求項13に記載の基板処理システム。
- 前記電力パラメータが、直流(DC)ソース電力、高周波(RF)バイアス電力、DCシールドバイアス電圧、または電磁コイル電流のうちの少なくとも1つの電力設定点を含む、請求項13に記載の基板処理システム。
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US201662364822P | 2016-07-20 | 2016-07-20 | |
US62/364,822 | 2016-07-20 | ||
US15/290,150 US10312065B2 (en) | 2016-07-20 | 2016-10-11 | Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control |
US15/290,150 | 2016-10-11 | ||
PCT/US2017/038679 WO2018017267A1 (en) | 2016-07-20 | 2017-06-22 | Physical vapor deposition (pvd) plasma energy control per dynamic magnetron control |
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JP (1) | JP2019528373A (ja) |
KR (2) | KR20190019225A (ja) |
CN (1) | CN109477208A (ja) |
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CN109477208A (zh) | 2019-03-15 |
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