JP2019522449A - 微細加工超音波トランスデューサのための電気接点配置 - Google Patents
微細加工超音波トランスデューサのための電気接点配置 Download PDFInfo
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
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- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10954—Other details of electrical connections
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
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Abstract
Description
[0001] 本願は、米国特許法119条(e)項に従って、代理人整理番号B1348.70031US00のもとで2016年7月20日に出願された、「ELECTRICAL CONTACT ARRANGEMENT FOR MICROFABRICATED ULTRASONIC TRANSDUCER」という名称の米国仮特許出願第62/352,394号に基づく優先権を主張し、参照によりその全体が本明細書に組み込まれる。
Claims (15)
- 超音波トランスデューサ基板の第1の側に隣接して配置された複数のトランスデューサセルを有する超音波トランスデューサ基板を含む超音波オンチップデバイスと、
少なくとも1つのトランスデューサセルのために、前記超音波トランスデューサ基板の第2の側と電気基板との間に配置された1つまたは複数の導電性ボンディング接続部と
を含む装置。 - 前記1つまたは複数の導電性ボンディング接続部が、前記複数のトランスデューサセルのうちのトランスデューサセルの領域に対して実質的に均一に分散された、請求項1に記載の装置。
- 前記1つまたは複数の導電性ボンディング接続部が、熱圧着接続部と、共晶接続部と、シリサイド接続部とのうちの1つまたは複数を含む、請求項1に記載の装置。
- 前記1つまたは複数の導電性ボンディング接続部が、その第1の端部において前記超音波トランスデューサ基板のシリコン層の導電部と接触し、その第2の端部において前記電気基板の金属層と接触する、請求項1に記載の装置。
- 前記超音波トランスデューサ基板の複数の音響的不活性領域の少なくとも1つの音響的不活性領域に接続された単一の導電性ボンディング接続部をさらに含み、それぞれの単一の導電性ボンディング接続が前記超音波トランスデューサ基板と前記電気基板との間に配置された、請求項1に記載の装置。
- 前記超音波トランスデューサ基板の前記複数の音響的不活性領域が、前記複数のトランスデューサセルのうちのトランスデューサセルの隣接する対の間に配置された、請求項5に記載の装置。
- 前記複数のトランスデューサセルが、前記超音波トランスデューサ基板のシリコン層の導電部上で、前記シリコン層に形成された分離トレンチによって互いに電気的に分離されている、請求項6に記載の装置。
- 前記分離トレンチが、前記複数のトランスデューサセルの個別トランスデューサセルに対応する八角形領域を形成する、請求項7に記載の装置。
- 前記音響的不活性領域が、4つの隣接する八角形領域間の境界によって画定される、請求項8に記載の装置。
- 前記1つまたは複数のボンディング接続部のそれぞれが、約100ミクロン(μm)以下の距離によって最も近い隣接ボンディング接続部から離隔されている、請求項1に記載の装置。
- それぞれの空洞が超音波トランスデューサセルに対応する、複数の空洞を間に画定するように互いにボンディングされた第1の基板と第2の基板とを含む複合基板と、
各トランスデューサセルが前記超音波トランスデューサ基板と前記電気基板との間に配置された複数の導電性ボンディング接続部を有する、複数の導電性ボンディング点によって前記複合基板にボンディングされた電気基板と
を含む、超音波デバイス。 - 前記複数の導電性ボンディング接続部が、各トランスデューサセルのための前記1つまたは複数の導電性ボンディング接続部に加えて、
前記複合基板の複数の音響的不活性領域のそれぞれに接続された単一の導電性ボンディング接続部と、
前記複数の超音波トランスデューサセルによって画定された超音波トランスデューサアレイを囲む1つまたは複数の封止リングと、をさらに含む、
請求項11に記載の超音波デバイス。 - 前記1つまたは複数の導電性ボンディング接続部が、熱圧着接続部と、共晶接続部と、はんだ接続部と、シリサイド接続部とのうちの1つまたは複数を含む、請求項12に記載の超音波デバイス。
- 前記複合基板の前記第1の基板が前記トランスデューサアレイの薄膜に対応し、
前記複合基板の前記第2の基板が前記複数の導電性ボンディング接続部によって前記電気基板にボンディングされ、
前記封止リングが、前記第1の基板と前記電気基板との間に、前記第2の基板の、前記トランスデューサアレイの下部電極接点から電気的に分離された一部を介して電気的接続をもたらす、
請求項12に記載の超音波デバイス。 - トランスデューサセルが、前記第2の基板のシリコン層の導電部上で、前記シリコン層に形成された分離トレンチによって互いに電気的に分離されている、請求項14に記載の超音波デバイス。
Applications Claiming Priority (3)
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US201662352394P | 2016-06-20 | 2016-06-20 | |
US62/352,394 | 2016-06-20 | ||
PCT/US2017/038105 WO2017222969A1 (en) | 2016-06-20 | 2017-06-19 | Electrical contact arrangement for microfabricated ultrasonic transducer |
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JP2019522449A true JP2019522449A (ja) | 2019-08-08 |
JP2019522449A5 JP2019522449A5 (ja) | 2020-07-27 |
JP7026111B2 JP7026111B2 (ja) | 2022-02-25 |
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US (3) | US10497856B2 (ja) |
EP (1) | EP3471897B1 (ja) |
JP (1) | JP7026111B2 (ja) |
KR (1) | KR20190022644A (ja) |
CN (2) | CN109414727B (ja) |
AU (1) | AU2017281280B2 (ja) |
CA (1) | CA3026157A1 (ja) |
TW (1) | TWI721183B (ja) |
WO (1) | WO2017222969A1 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017222969A1 (en) | 2016-06-20 | 2017-12-28 | Butterfly Network, Inc. | Electrical contact arrangement for microfabricated ultrasonic transducer |
US10676349B1 (en) | 2016-08-12 | 2020-06-09 | Sitime Corporation | MEMS resonator |
US11515465B2 (en) * | 2018-02-26 | 2022-11-29 | Invensense, Inc. | EMI reduction in piezoelectric micromachined ultrasound transducer array |
KR20240025700A (ko) * | 2018-05-14 | 2024-02-27 | 엑소 이미징, 인크. | 열압착 본딩, 공융 본딩, 및 솔더 본딩을 사용하는 마이크로머신 pMUT 어레이들 및 전자기기들을 위한 통합 기법들 |
TW202011897A (zh) | 2018-07-06 | 2020-04-01 | 美商蝴蝶網路公司 | 用於封裝超音波晶片的方法和設備 |
US11087582B2 (en) * | 2018-10-19 | 2021-08-10 | Igt | Electronic gaming machine providing enhanced physical player interaction |
US11498096B2 (en) | 2018-11-06 | 2022-11-15 | Siemens Medical Solutions Usa, Inc. | Chip-on-array with interposer for a multidimensional transducer array |
US11354926B2 (en) | 2018-12-07 | 2022-06-07 | Bfly Operations, Inc. | Ultrasound fingerprint detection and related apparatus and methods |
TW202045099A (zh) | 2019-02-07 | 2020-12-16 | 美商蝴蝶網路公司 | 用於微加工超音波傳感器裝置的雙層金屬電極 |
WO2020251915A1 (en) | 2019-06-10 | 2020-12-17 | Butterfly Network, Inc. | Curved micromachined ultrasonic transducer membranes |
US11292715B2 (en) * | 2019-06-27 | 2022-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conductive bond structure to increase membrane sensitivity in MEMS device |
US11684951B2 (en) * | 2019-08-08 | 2023-06-27 | Bfly Operations, Inc. | Micromachined ultrasonic transducer devices having truncated circle shaped cavities |
US11145547B2 (en) * | 2019-10-01 | 2021-10-12 | Qorvo Us, Inc. | Semiconductor chip suitable for 2.5D and 3D packaging integration and methods of forming the same |
US20210138506A1 (en) * | 2019-11-12 | 2021-05-13 | Siemens Medical Solutions Usa, Inc. | Interposer for an Ultrasound Transducer Array |
US11440051B2 (en) | 2020-02-26 | 2022-09-13 | General Electric Company | Capacitive micromachined ultrasonic transducer (CMUT) devices and methods of manufacturing |
IT202000004777A1 (it) * | 2020-03-06 | 2021-09-06 | St Microelectronics Srl | Trasduttore ultrasonico microlavorato piezoelettrico |
EP3909691A1 (en) * | 2020-05-14 | 2021-11-17 | Koninklijke Philips N.V. | An ultrasound transducer and a tiled array of ultrasound transducers |
EP3909692A1 (en) * | 2020-05-14 | 2021-11-17 | Koninklijke Philips N.V. | An ultrasound transducer and a tiled array of ultrasound transducers |
CN111884647B (zh) * | 2020-08-13 | 2023-09-29 | 中国工程物理研究院电子工程研究所 | 一种压电微机械声波换能器阵列耦合隔离方法 |
TWI835661B (zh) * | 2023-05-29 | 2024-03-11 | 友達光電股份有限公司 | 換能器及其製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012100069A (ja) * | 2010-11-02 | 2012-05-24 | Canon Inc | 静電容量型電気機械変換装置 |
JP2012118060A (ja) * | 2010-11-30 | 2012-06-21 | General Electric Co <Ge> | タイリング可能なセンサアレイ |
US20150137285A1 (en) * | 2013-11-20 | 2015-05-21 | Samsung Electronics Co., Ltd. | Capacitive micromachined ultrasonic transducer and method of fabricating the same |
WO2016011000A1 (en) * | 2014-07-14 | 2016-01-21 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6262946B1 (en) | 1999-09-29 | 2001-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling |
US6430109B1 (en) | 1999-09-30 | 2002-08-06 | The Board Of Trustees Of The Leland Stanford Junior University | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections |
US6551248B2 (en) * | 2001-07-31 | 2003-04-22 | Koninklijke Philips Electronics N.V. | System for attaching an acoustic element to an integrated circuit |
US6958255B2 (en) | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
US7321181B2 (en) | 2004-04-07 | 2008-01-22 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive membrane ultrasonic transducers with reduced bulk wave generation and method |
TW200704283A (en) * | 2005-05-27 | 2007-01-16 | Lamina Ceramics Inc | Solid state LED bridge rectifier light engine |
US7615834B2 (en) | 2006-02-28 | 2009-11-10 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane |
US7910385B2 (en) | 2006-05-12 | 2011-03-22 | Micron Technology, Inc. | Method of fabricating microelectronic devices |
US20080315331A1 (en) * | 2007-06-25 | 2008-12-25 | Robert Gideon Wodnicki | Ultrasound system with through via interconnect structure |
JP5511260B2 (ja) * | 2009-08-19 | 2014-06-04 | キヤノン株式会社 | 容量型電気機械変換装置、及びその感度調整方法 |
KR101593994B1 (ko) * | 2009-09-04 | 2016-02-16 | 삼성전자주식회사 | 고출력 초음파 트랜스듀서 |
US8345508B2 (en) | 2009-09-20 | 2013-01-01 | General Electric Company | Large area modular sensor array assembly and method for making the same |
JP5404335B2 (ja) * | 2009-11-17 | 2014-01-29 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
US8922021B2 (en) * | 2011-12-30 | 2014-12-30 | Deca Technologies Inc. | Die up fully molded fan-out wafer level packaging |
RU2589272C2 (ru) | 2011-03-22 | 2016-07-10 | Конинклейке Филипс Н.В. | Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой |
WO2013001448A1 (en) * | 2011-06-27 | 2013-01-03 | Koninklijke Philips Electronics N.V. | Ultrasound transducer assembly and method of manufacturing the same |
KR101894393B1 (ko) | 2011-12-28 | 2018-09-04 | 삼성전자주식회사 | 초음파 변환기 구조물, 초음파 변환기 및 초음파 변환기의 제조 방법 |
KR101851568B1 (ko) * | 2012-08-29 | 2018-04-24 | 삼성전자주식회사 | 초음파 변환기 및 그 제조방법 |
KR20140033992A (ko) * | 2012-09-11 | 2014-03-19 | 삼성전자주식회사 | 초음파 변환기 |
US9368438B2 (en) | 2012-12-28 | 2016-06-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package on package (PoP) bonding structures |
US9499392B2 (en) | 2013-02-05 | 2016-11-22 | Butterfly Network, Inc. | CMOS ultrasonic transducers and related apparatus and methods |
AU2014234071B2 (en) | 2013-03-15 | 2018-05-17 | Butterfly Network, Inc. | Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same |
KR20150065067A (ko) * | 2013-12-04 | 2015-06-12 | 삼성전자주식회사 | 정전용량 미세가공 초음파 변환기 및 그 제조방법 |
US9630832B2 (en) | 2013-12-19 | 2017-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacturing |
EP3132470B1 (en) * | 2014-04-18 | 2019-02-06 | Butterfly Network Inc. | Ultrasonic transducers in complementary metal oxide semiconductor (cmos) wafers and related apparatus and methods |
US20160009544A1 (en) * | 2015-03-02 | 2016-01-14 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
EP3334539B1 (en) | 2015-08-11 | 2023-06-14 | Koninklijke Philips N.V. | Capacitive micromachined ultrasonic transducers with increased patient safety |
WO2017222969A1 (en) | 2016-06-20 | 2017-12-28 | Butterfly Network, Inc. | Electrical contact arrangement for microfabricated ultrasonic transducer |
US20180180724A1 (en) * | 2016-12-26 | 2018-06-28 | Nxp Usa, Inc. | Ultrasonic transducer integrated with supporting electronics |
US10242967B2 (en) * | 2017-05-16 | 2019-03-26 | Raytheon Company | Die encapsulation in oxide bonded wafer stack |
US10512936B2 (en) * | 2017-06-21 | 2019-12-24 | Butterfly Network, Inc. | Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections |
US11354926B2 (en) * | 2018-12-07 | 2022-06-07 | Bfly Operations, Inc. | Ultrasound fingerprint detection and related apparatus and methods |
-
2017
- 2017-06-19 WO PCT/US2017/038105 patent/WO2017222969A1/en unknown
- 2017-06-19 CN CN201780037888.8A patent/CN109414727B/zh active Active
- 2017-06-19 US US15/626,330 patent/US10497856B2/en active Active
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- 2017-06-19 CA CA3026157A patent/CA3026157A1/en not_active Abandoned
- 2017-06-19 AU AU2017281280A patent/AU2017281280B2/en not_active Ceased
- 2017-06-19 EP EP17815997.6A patent/EP3471897B1/en active Active
- 2017-06-19 CN CN202111049509.1A patent/CN113857023B/zh active Active
-
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- 2019-10-28 US US16/666,238 patent/US11672179B2/en active Active
-
2023
- 2023-06-06 US US18/329,703 patent/US20240122073A1/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012100069A (ja) * | 2010-11-02 | 2012-05-24 | Canon Inc | 静電容量型電気機械変換装置 |
JP2012118060A (ja) * | 2010-11-30 | 2012-06-21 | General Electric Co <Ge> | タイリング可能なセンサアレイ |
US20150137285A1 (en) * | 2013-11-20 | 2015-05-21 | Samsung Electronics Co., Ltd. | Capacitive micromachined ultrasonic transducer and method of fabricating the same |
WO2016011000A1 (en) * | 2014-07-14 | 2016-01-21 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
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CN113857023B (zh) | 2022-08-02 |
TWI721183B (zh) | 2021-03-11 |
CN109414727B (zh) | 2021-09-28 |
AU2017281280A1 (en) | 2018-12-06 |
US20240122073A1 (en) | 2024-04-11 |
TW201808786A (zh) | 2018-03-16 |
CN113857023A (zh) | 2021-12-31 |
US20170365774A1 (en) | 2017-12-21 |
CA3026157A1 (en) | 2017-12-28 |
AU2017281280B2 (en) | 2022-01-06 |
EP3471897B1 (en) | 2023-08-02 |
KR20190022644A (ko) | 2019-03-06 |
US11672179B2 (en) | 2023-06-06 |
EP3471897C0 (en) | 2023-08-02 |
EP3471897A1 (en) | 2019-04-24 |
US10497856B2 (en) | 2019-12-03 |
EP3471897A4 (en) | 2020-01-15 |
WO2017222969A1 (en) | 2017-12-28 |
US20200066966A1 (en) | 2020-02-27 |
JP7026111B2 (ja) | 2022-02-25 |
CN109414727A (zh) | 2019-03-01 |
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