JP2019516126A5 - - Google Patents

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Publication number
JP2019516126A5
JP2019516126A5 JP2018550749A JP2018550749A JP2019516126A5 JP 2019516126 A5 JP2019516126 A5 JP 2019516126A5 JP 2018550749 A JP2018550749 A JP 2018550749A JP 2018550749 A JP2018550749 A JP 2018550749A JP 2019516126 A5 JP2019516126 A5 JP 2019516126A5
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JP
Japan
Prior art keywords
tunable
illumination beam
spectral filter
filtering
dispersion
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JP2018550749A
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English (en)
Japanese (ja)
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JP6921852B2 (ja
JP2019516126A (ja
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Priority claimed from US15/339,312 external-priority patent/US10422508B2/en
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Publication of JP2019516126A5 publication Critical patent/JP2019516126A5/ja
Priority to JP2021122952A priority Critical patent/JP2021167979A/ja
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JP2018550749A 2016-03-28 2017-03-24 広帯域光源のスペクトルチューニングシステム及び方法 Active JP6921852B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021122952A JP2021167979A (ja) 2016-03-28 2021-07-28 広帯域光源のスペクトルチューニングシステム及び方法

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201662314364P 2016-03-28 2016-03-28
US62/314,364 2016-03-28
US201662365129P 2016-07-21 2016-07-21
US62/365,129 2016-07-21
US15/339,312 2016-10-31
US15/339,312 US10422508B2 (en) 2016-03-28 2016-10-31 System and method for spectral tuning of broadband light sources
PCT/US2017/024157 WO2017172540A2 (en) 2016-03-28 2017-03-24 System and method for spectral tuning of broadband light sources

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Publications (3)

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JP2019516126A JP2019516126A (ja) 2019-06-13
JP2019516126A5 true JP2019516126A5 (enExample) 2020-04-30
JP6921852B2 JP6921852B2 (ja) 2021-08-18

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JP2021122952A Pending JP2021167979A (ja) 2016-03-28 2021-07-28 広帯域光源のスペクトルチューニングシステム及び方法

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Country Link
US (1) US10422508B2 (enExample)
EP (1) EP3436802B1 (enExample)
JP (2) JP6921852B2 (enExample)
KR (1) KR102170164B1 (enExample)
CN (1) CN108700509B (enExample)
IL (1) IL261430B (enExample)
TW (1) TWI733785B (enExample)
WO (1) WO2017172540A2 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ2016661A3 (cs) * 2016-10-21 2018-02-14 Fyzikální Ústav Av Čr, V. V. I. Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření
US10904514B2 (en) * 2017-02-09 2021-01-26 Facebook Technologies, Llc Polarization illumination using acousto-optic structured light in 3D depth sensing
US10444161B2 (en) * 2017-04-05 2019-10-15 Kla-Tencor Corporation Systems and methods for metrology with layer-specific illumination spectra
US10613413B1 (en) * 2017-05-31 2020-04-07 Facebook Technologies, Llc Ultra-wide field-of-view scanning devices for depth sensing
DE102017209259A1 (de) * 2017-06-01 2018-12-06 Robert Bosch Gmbh Lidarsystem
US10181200B1 (en) 2017-06-28 2019-01-15 Facebook Technologies, Llc Circularly polarized illumination and detection for depth sensing
US10388026B1 (en) * 2017-07-07 2019-08-20 Facebook Technologies, Llc Fast scanning large field-of-view devices for depth sensing
US10401738B2 (en) * 2017-08-02 2019-09-03 Kla-Tencor Corporation Overlay metrology using multiple parameter configurations
US10574973B2 (en) 2017-09-06 2020-02-25 Facebook Technologies, Llc Non-mechanical beam steering for depth sensing
US20190101489A1 (en) * 2017-09-29 2019-04-04 Michael John Darwin Method and Apparatus for Simultaneously Measuring 3Dimensional Structures and Spectral Content of Said Structures
US10840055B2 (en) * 2018-03-20 2020-11-17 Kla Corporation System and method for photocathode illumination inspection
US10677588B2 (en) * 2018-04-09 2020-06-09 Kla-Tencor Corporation Localized telecentricity and focus optimization for overlay metrology
US10739196B2 (en) * 2018-07-03 2020-08-11 Electronics And Telecommunications Research Institute Spectroscopic apparatus and spectroscopic method using orthogonal code
US11118903B2 (en) * 2018-10-17 2021-09-14 Kla Corporation Efficient illumination shaping for scatterometry overlay
CN114207530B (zh) 2019-08-09 2025-02-28 Asml荷兰有限公司 在对准中用以减小标记大小的相位调制器
JP2022544187A (ja) * 2019-08-09 2022-10-17 エーエスエムエル ネザーランズ ビー.ブイ. 計測デバイスおよびそのための位相変調装置
US11374375B2 (en) * 2019-08-14 2022-06-28 Kla Corporation Laser closed power loop with an acousto-optic modulator for power modulation
US11933717B2 (en) * 2019-09-27 2024-03-19 Kla Corporation Sensitive optical metrology in scanning and static modes
US11226234B2 (en) * 2020-01-22 2022-01-18 Applied Materials, Inc. Spectrum shaping devices and techniques for optical characterization applications
US11662562B2 (en) * 2020-02-09 2023-05-30 Kla Corporation Broadband illumination tuning
WO2021179158A1 (zh) * 2020-03-10 2021-09-16 深圳市速腾聚创科技有限公司 激光接收装置、激光接收方法和激光雷达
CN115769151A (zh) * 2020-07-06 2023-03-07 Asml荷兰有限公司 照射设备和相关联的量测和光刻设备
US20240402620A1 (en) * 2021-09-22 2024-12-05 Asml Netherlands B.V. Source selection module and associated metrology and lithographic apparatuses
EP4170429A1 (en) * 2021-10-19 2023-04-26 ASML Netherlands B.V. Out-of-band leakage correction method and metrology apparatus
ES2956835B2 (es) 2022-05-23 2024-05-10 Consejo Superior Investigacion Dispositivo de iluminacion y modulador espectral
US12276897B2 (en) * 2022-09-06 2025-04-15 Orbotech Ltd. Dynamic correction for an acousto-optic deflector

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826219B2 (ja) * 1975-05-20 1983-06-01 松下電器産業株式会社 ヒカリツウシンソウチ
US4752130A (en) 1986-10-24 1988-06-21 The University Of Rochester Optical systems utilizing a volume transmission diffraction element to provide wavelength tuning
US4991934A (en) * 1989-08-10 1991-02-12 Hettrick Michael C Varied space diffraction grating and in-focus monochromator
US5285254A (en) * 1991-03-25 1994-02-08 Richard J De Sa Rapid-scanning monochromator with moving intermediate slit
JPH05224158A (ja) * 1992-02-14 1993-09-03 Matsushita Electric Ind Co Ltd 光フィルター及びその光フィルターを用いた光増幅装置
JP3597912B2 (ja) * 1995-05-18 2004-12-08 富士通株式会社 光フィルタ
US7123413B2 (en) * 1995-12-18 2006-10-17 Metrologic Instruments, Inc. DOE-based systems and devices for producing laser beams having modified beam characteristics
US5748308A (en) 1996-02-02 1998-05-05 Abbott Laboratories Programmable standard for use in an apparatus and process for the noninvasive measurement of optically absorbing compounds
JP3883601B2 (ja) * 1996-03-27 2007-02-21 富士通株式会社 光イコライザ
JP3419993B2 (ja) * 1996-05-28 2003-06-23 Kddi株式会社 光周波数シフタおよび本シフタを用いた光ソリトン伝送システム
US6067106A (en) * 1997-04-16 2000-05-23 Canon Kabushiki Kaisha Scanning optical apparatus
JPH11101944A (ja) * 1997-09-26 1999-04-13 Satoru Toyooka 光源装置
US6606197B2 (en) * 2000-03-28 2003-08-12 Corning Incorporated Dual grating filtering system
JP2001344803A (ja) * 2000-06-01 2001-12-14 Matsushita Electric Ind Co Ltd 光ヘッドおよびそれを用いた光情報記録再生装置
AU2002245345A1 (en) * 2001-01-30 2002-08-12 Board Of Trustees Operating Michigan State University Control system and apparatus for use with laser excitation or ionization
JP2002267532A (ja) * 2001-03-14 2002-09-18 Yokogawa Electric Corp 分光装置
JP3999480B2 (ja) * 2001-07-11 2007-10-31 株式会社ミツトヨ レーザ装置
FI114946B (fi) * 2002-12-16 2005-01-31 Nokia Corp Diffraktiivinen hilaelementti diffraktiohyötysuhteen tasapainottamiseksi
US6891676B2 (en) * 2003-01-10 2005-05-10 Bookham Technology Plc Tunable spectral filter
CN2650160Y (zh) * 2003-04-15 2004-10-20 南开大学 可调谐光纤光栅分插复用器
JP5024928B2 (ja) * 2006-09-04 2012-09-12 株式会社リコー 光走査装置及び画像形成装置
US7262918B1 (en) * 2006-09-06 2007-08-28 Wafermasters Incorporated Light beam conditioner
US7570358B2 (en) 2007-03-30 2009-08-04 Asml Netherlands Bv Angularly resolved scatterometer, inspection method, lithographic apparatus, lithographic processing cell device manufacturing method and alignment sensor
US20080277595A1 (en) * 2007-05-10 2008-11-13 Pacific Biosciences Of California, Inc. Highly multiplexed confocal detection systems and methods of using same
US20090026236A1 (en) 2007-07-27 2009-01-29 Krause Wade J Support for Hoses and Welding Cable
ITFI20070260A1 (it) 2007-11-21 2009-05-22 Light 4 Tech Firenze S R L Dispositivo per illuminare un oggetto con una sorgente di luce multispettrale e rivelare lo spettro della luce emessa.
US7817272B2 (en) 2008-06-09 2010-10-19 Aegis Lightwave, Inc. High-resolution spectrally adjustable filter
JP2010014538A (ja) * 2008-07-03 2010-01-21 Nikon Corp 回折性能測定装置
JP2012003815A (ja) * 2010-06-18 2012-01-05 Panasonic Corp レーザ露光装置および方法
CN102230889A (zh) * 2011-06-22 2011-11-02 天津大学 基于超连续谱光源的气体浓度测量系统及测量方法
US9513460B2 (en) 2012-08-01 2016-12-06 Nikon Corporation Apparatus and methods for reducing autofocus error
US8861960B2 (en) * 2012-08-20 2014-10-14 Ciena Corporation Systems and methods for the compensation of nonlinear cross polarization and cross phase modulation in dual polarization coherent channels
US9341769B2 (en) * 2012-12-17 2016-05-17 Kla-Tencor Corporation Spectral control system
CN202948203U (zh) * 2012-12-17 2013-05-22 福州高意通讯有限公司 一种带宽可调平顶型光学滤波器
US9391713B2 (en) * 2013-10-14 2016-07-12 Trumpf Laser Gmbh High brightness dense wavelength multiplexing laser
EP3117191A4 (en) 2014-03-13 2018-03-28 National University of Singapore An optical interference device
CN104076435B (zh) * 2014-07-14 2016-07-13 西北工业大学 取样光纤布拉格光栅sfbg的飞秒激光制作装置及方法
US10948714B2 (en) * 2016-11-18 2021-03-16 Akonia Holographies LLC Dispersion compensation

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