JP2019516126A5 - - Google Patents
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- Publication number
- JP2019516126A5 JP2019516126A5 JP2018550749A JP2018550749A JP2019516126A5 JP 2019516126 A5 JP2019516126 A5 JP 2019516126A5 JP 2018550749 A JP2018550749 A JP 2018550749A JP 2018550749 A JP2018550749 A JP 2018550749A JP 2019516126 A5 JP2019516126 A5 JP 2019516126A5
- Authority
- JP
- Japan
- Prior art keywords
- tunable
- illumination beam
- spectral filter
- filtering
- dispersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims 134
- 230000003595 spectral effect Effects 0.000 claims 78
- 238000001914 filtration Methods 0.000 claims 67
- 230000003287 optical effect Effects 0.000 claims 46
- 239000006185 dispersion Substances 0.000 claims 39
- 238000001228 spectrum Methods 0.000 claims 38
- 230000001427 coherent effect Effects 0.000 claims 4
- 230000010287 polarization Effects 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 claims 2
- 244000309464 bull Species 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021122952A JP2021167979A (ja) | 2016-03-28 | 2021-07-28 | 広帯域光源のスペクトルチューニングシステム及び方法 |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662314364P | 2016-03-28 | 2016-03-28 | |
| US62/314,364 | 2016-03-28 | ||
| US201662365129P | 2016-07-21 | 2016-07-21 | |
| US62/365,129 | 2016-07-21 | ||
| US15/339,312 | 2016-10-31 | ||
| US15/339,312 US10422508B2 (en) | 2016-03-28 | 2016-10-31 | System and method for spectral tuning of broadband light sources |
| PCT/US2017/024157 WO2017172540A2 (en) | 2016-03-28 | 2017-03-24 | System and method for spectral tuning of broadband light sources |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021122952A Division JP2021167979A (ja) | 2016-03-28 | 2021-07-28 | 広帯域光源のスペクトルチューニングシステム及び方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019516126A JP2019516126A (ja) | 2019-06-13 |
| JP2019516126A5 true JP2019516126A5 (enExample) | 2020-04-30 |
| JP6921852B2 JP6921852B2 (ja) | 2021-08-18 |
Family
ID=59965115
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018550749A Active JP6921852B2 (ja) | 2016-03-28 | 2017-03-24 | 広帯域光源のスペクトルチューニングシステム及び方法 |
| JP2021122952A Pending JP2021167979A (ja) | 2016-03-28 | 2021-07-28 | 広帯域光源のスペクトルチューニングシステム及び方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021122952A Pending JP2021167979A (ja) | 2016-03-28 | 2021-07-28 | 広帯域光源のスペクトルチューニングシステム及び方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10422508B2 (enExample) |
| EP (1) | EP3436802B1 (enExample) |
| JP (2) | JP6921852B2 (enExample) |
| KR (1) | KR102170164B1 (enExample) |
| CN (1) | CN108700509B (enExample) |
| IL (1) | IL261430B (enExample) |
| TW (1) | TWI733785B (enExample) |
| WO (1) | WO2017172540A2 (enExample) |
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| CZ2016661A3 (cs) * | 2016-10-21 | 2018-02-14 | Fyzikální Ústav Av Čr, V. V. I. | Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření |
| US10904514B2 (en) * | 2017-02-09 | 2021-01-26 | Facebook Technologies, Llc | Polarization illumination using acousto-optic structured light in 3D depth sensing |
| US10444161B2 (en) * | 2017-04-05 | 2019-10-15 | Kla-Tencor Corporation | Systems and methods for metrology with layer-specific illumination spectra |
| US10613413B1 (en) * | 2017-05-31 | 2020-04-07 | Facebook Technologies, Llc | Ultra-wide field-of-view scanning devices for depth sensing |
| DE102017209259A1 (de) * | 2017-06-01 | 2018-12-06 | Robert Bosch Gmbh | Lidarsystem |
| US10181200B1 (en) | 2017-06-28 | 2019-01-15 | Facebook Technologies, Llc | Circularly polarized illumination and detection for depth sensing |
| US10388026B1 (en) * | 2017-07-07 | 2019-08-20 | Facebook Technologies, Llc | Fast scanning large field-of-view devices for depth sensing |
| US10401738B2 (en) * | 2017-08-02 | 2019-09-03 | Kla-Tencor Corporation | Overlay metrology using multiple parameter configurations |
| US10574973B2 (en) | 2017-09-06 | 2020-02-25 | Facebook Technologies, Llc | Non-mechanical beam steering for depth sensing |
| US20190101489A1 (en) * | 2017-09-29 | 2019-04-04 | Michael John Darwin | Method and Apparatus for Simultaneously Measuring 3Dimensional Structures and Spectral Content of Said Structures |
| US10840055B2 (en) * | 2018-03-20 | 2020-11-17 | Kla Corporation | System and method for photocathode illumination inspection |
| US10677588B2 (en) * | 2018-04-09 | 2020-06-09 | Kla-Tencor Corporation | Localized telecentricity and focus optimization for overlay metrology |
| US10739196B2 (en) * | 2018-07-03 | 2020-08-11 | Electronics And Telecommunications Research Institute | Spectroscopic apparatus and spectroscopic method using orthogonal code |
| US11118903B2 (en) * | 2018-10-17 | 2021-09-14 | Kla Corporation | Efficient illumination shaping for scatterometry overlay |
| CN114207530B (zh) | 2019-08-09 | 2025-02-28 | Asml荷兰有限公司 | 在对准中用以减小标记大小的相位调制器 |
| JP2022544187A (ja) * | 2019-08-09 | 2022-10-17 | エーエスエムエル ネザーランズ ビー.ブイ. | 計測デバイスおよびそのための位相変調装置 |
| US11374375B2 (en) * | 2019-08-14 | 2022-06-28 | Kla Corporation | Laser closed power loop with an acousto-optic modulator for power modulation |
| US11933717B2 (en) * | 2019-09-27 | 2024-03-19 | Kla Corporation | Sensitive optical metrology in scanning and static modes |
| US11226234B2 (en) * | 2020-01-22 | 2022-01-18 | Applied Materials, Inc. | Spectrum shaping devices and techniques for optical characterization applications |
| US11662562B2 (en) * | 2020-02-09 | 2023-05-30 | Kla Corporation | Broadband illumination tuning |
| WO2021179158A1 (zh) * | 2020-03-10 | 2021-09-16 | 深圳市速腾聚创科技有限公司 | 激光接收装置、激光接收方法和激光雷达 |
| CN115769151A (zh) * | 2020-07-06 | 2023-03-07 | Asml荷兰有限公司 | 照射设备和相关联的量测和光刻设备 |
| US20240402620A1 (en) * | 2021-09-22 | 2024-12-05 | Asml Netherlands B.V. | Source selection module and associated metrology and lithographic apparatuses |
| EP4170429A1 (en) * | 2021-10-19 | 2023-04-26 | ASML Netherlands B.V. | Out-of-band leakage correction method and metrology apparatus |
| ES2956835B2 (es) | 2022-05-23 | 2024-05-10 | Consejo Superior Investigacion | Dispositivo de iluminacion y modulador espectral |
| US12276897B2 (en) * | 2022-09-06 | 2025-04-15 | Orbotech Ltd. | Dynamic correction for an acousto-optic deflector |
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| JPS5826219B2 (ja) * | 1975-05-20 | 1983-06-01 | 松下電器産業株式会社 | ヒカリツウシンソウチ |
| US4752130A (en) | 1986-10-24 | 1988-06-21 | The University Of Rochester | Optical systems utilizing a volume transmission diffraction element to provide wavelength tuning |
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| AU2002245345A1 (en) * | 2001-01-30 | 2002-08-12 | Board Of Trustees Operating Michigan State University | Control system and apparatus for use with laser excitation or ionization |
| JP2002267532A (ja) * | 2001-03-14 | 2002-09-18 | Yokogawa Electric Corp | 分光装置 |
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| JP5024928B2 (ja) * | 2006-09-04 | 2012-09-12 | 株式会社リコー | 光走査装置及び画像形成装置 |
| US7262918B1 (en) * | 2006-09-06 | 2007-08-28 | Wafermasters Incorporated | Light beam conditioner |
| US7570358B2 (en) | 2007-03-30 | 2009-08-04 | Asml Netherlands Bv | Angularly resolved scatterometer, inspection method, lithographic apparatus, lithographic processing cell device manufacturing method and alignment sensor |
| US20080277595A1 (en) * | 2007-05-10 | 2008-11-13 | Pacific Biosciences Of California, Inc. | Highly multiplexed confocal detection systems and methods of using same |
| US20090026236A1 (en) | 2007-07-27 | 2009-01-29 | Krause Wade J | Support for Hoses and Welding Cable |
| ITFI20070260A1 (it) | 2007-11-21 | 2009-05-22 | Light 4 Tech Firenze S R L | Dispositivo per illuminare un oggetto con una sorgente di luce multispettrale e rivelare lo spettro della luce emessa. |
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| CN102230889A (zh) * | 2011-06-22 | 2011-11-02 | 天津大学 | 基于超连续谱光源的气体浓度测量系统及测量方法 |
| US9513460B2 (en) | 2012-08-01 | 2016-12-06 | Nikon Corporation | Apparatus and methods for reducing autofocus error |
| US8861960B2 (en) * | 2012-08-20 | 2014-10-14 | Ciena Corporation | Systems and methods for the compensation of nonlinear cross polarization and cross phase modulation in dual polarization coherent channels |
| US9341769B2 (en) * | 2012-12-17 | 2016-05-17 | Kla-Tencor Corporation | Spectral control system |
| CN202948203U (zh) * | 2012-12-17 | 2013-05-22 | 福州高意通讯有限公司 | 一种带宽可调平顶型光学滤波器 |
| US9391713B2 (en) * | 2013-10-14 | 2016-07-12 | Trumpf Laser Gmbh | High brightness dense wavelength multiplexing laser |
| EP3117191A4 (en) | 2014-03-13 | 2018-03-28 | National University of Singapore | An optical interference device |
| CN104076435B (zh) * | 2014-07-14 | 2016-07-13 | 西北工业大学 | 取样光纤布拉格光栅sfbg的飞秒激光制作装置及方法 |
| US10948714B2 (en) * | 2016-11-18 | 2021-03-16 | Akonia Holographies LLC | Dispersion compensation |
-
2016
- 2016-10-31 US US15/339,312 patent/US10422508B2/en active Active
-
2017
- 2017-03-24 CN CN201780014888.6A patent/CN108700509B/zh active Active
- 2017-03-24 WO PCT/US2017/024157 patent/WO2017172540A2/en not_active Ceased
- 2017-03-24 JP JP2018550749A patent/JP6921852B2/ja active Active
- 2017-03-24 EP EP17776362.0A patent/EP3436802B1/en active Active
- 2017-03-24 KR KR1020187030824A patent/KR102170164B1/ko active Active
- 2017-03-28 TW TW106110226A patent/TWI733785B/zh active
-
2018
- 2018-08-28 IL IL261430A patent/IL261430B/en unknown
-
2021
- 2021-07-28 JP JP2021122952A patent/JP2021167979A/ja active Pending
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