JP2019515511A - 3d集積デバイスにおける相互接続のためのバリア層 - Google Patents
3d集積デバイスにおける相互接続のためのバリア層 Download PDFInfo
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- JP2019515511A JP2019515511A JP2018559962A JP2018559962A JP2019515511A JP 2019515511 A JP2019515511 A JP 2019515511A JP 2018559962 A JP2018559962 A JP 2018559962A JP 2018559962 A JP2018559962 A JP 2018559962A JP 2019515511 A JP2019515511 A JP 2019515511A
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Abstract
Description
温度処理により、上記1つ以上の第1のインターコネクトを上記1つ以上の第2のインターコネクトに接合し、それにより、上記1つ以上の第1のインターコネクトと上記1つ以上の第2のインターコネクトとの間で拡散が起こることとを含み得る。
本発明の実施形態は、以下の更なる特徴のうちの1つ以上を別個に又は組み合わせて含み得る。
Claims (20)
- 電子デバイスの集積方法であって、
第1の基板を有する第1の電子デバイスを用意することであり、
前記第1の基板の少なくとも一部上に横たわる第1の導電トレースを形成し、
前記第1の導電トレースの少なくとも一部上に横たわる第1のバリア層を形成し、
前記第1のバリア層と接触する1つ以上の第1の導電インターコネクトを形成し、そして
前記第1の導電トレースの少なくとも一部上に横たわり、且つ前記1つ以上の第1のインターコネクトを少なくとも部分的に取り囲む第1の接合層を形成する
ことを含む、第1の電子デバイスを用意することと、
第2の基板、1つ以上の第2の導電インターコネクト、及び第2の接合層を有する第2の電子デバイスを用意することと、
前記1つ以上の第1のインターコネクトを前記1つ以上の第2のインターコネクトと接触させることと、
前記第1の接合層を前記第2の接合層と接触させることと、
を有する集積方法。 - 前記第1の接合層を前記第2の接合層に接合することと、
温度処理により、前記1つ以上の第1のインターコネクトを前記1つ以上の第2のインターコネクトに接合し、それにより、前記1つ以上の第1のインターコネクトと前記1つ以上の第2のインターコネクトとの間で拡散が起こることと、
を更に有する請求項1に記載の集積方法。 - 前記第2の基板の少なくとも一部上に第2の導電トレースを形成することと、
前記第2の導電トレースの少なくとも一部上に第2のバリア層を形成することと、
前記第2のバリア層と接触させて前記1つ以上の第2の導電インターコネクトを形成することと、
前記第2のトレースの少なくとも一部上に、前記1つ以上の第2のインターコネクトを少なくとも部分的に取り囲んで、前記第2の接合層を形成することと、
を更に有する請求項1又は2に記載の集積方法。 - 前記第2の電子デバイスの反対側を用意することであり、
前記第2の導電トレースとは反対側で、前記第2の基板の少なくとも一部上に横たわる第3の導電トレースを形成し、
前記第3の導電トレースの少なくとも一部上に横たわる第3のバリア層を形成し、
前記第3のバリア層と接触する1つ以上の第3の導電インターコネクトを形成し、そして
前記第3の導電トレースの少なくとも一部上に横たわり、且つ前記1つ以上の第3のインターコネクトを少なくとも部分的に取り囲む第3の接合層を形成する
ことを含む、前記第2の電子デバイスの反対側を用意することと、
第3の基板、1つ以上の第4の導電インターコネクト、及び第4の接合層を有する第3の電子デバイスを用意することと、
直接接触により、前記第3の接合層を前記第4の接合層に接合することと、
温度処理により、前記1つ以上の第3のインターコネクトを前記1つ以上の第4のインターコネクトに接合し、それにより、前記1つ以上の第3のインターコネクトと前記1つ以上の第4のインターコネクトとの間で拡散が起こることと、
を有する請求項3に記載の集積方法。 - 前記1つ以上の第1のインターコネクトの前記1つ以上の第2のインターコネクトへの温度処理による前記接合は、第1の集積スタッキングシーケンスの完了をもたらし、
前記1つ以上の第3のインターコネクトの前記1つ以上の第4のインターコネクトへの温度処理による前記接合は、第2の集積スタッキングシーケンスの完了をもたらし、
当該集積方法は更に、N回のスタッキングシーケンスを繰り返して、上下に集積された積層電子デバイスアセンブリを画成することを有する、
請求項4に記載の集積方法。 - 前記上下に集積された積層電子デバイスアセンブリが、温度処理により接合すること各々の後に試験される、請求項5に記載の集積方法。
- 前記第1及び第2の接合層の一部を除去して、それぞれ、前記1つ以上の第1のインターコネクト及び前記1つ以上の第2のインターコネクトの外向きのアドレス可能な面を露出させることと、
前記1つ以上の第1のインターコネクトの前記面を、前記1つ以上の第2のインターコネクトのそれぞれの前記面に接触させることと、
を更に有する請求項1乃至6のいずれかに記載の集積方法。 - 当該集積方法は更に、
前記第1のバリア層の少なくとも一部上に横たわる第1のフォトレジスト層を形成することと、
前記第1のフォトレジスト層をパターニングして、前記第1のフォトレジスト層内に1つ以上のチャネルを形成することと
を有し、
前記1つ以上の第1のインターコネクトは、前記第1のフォトレジスト層の前記1つ以上のチャネルの中に形成される、
請求項1乃至7のいずれかに記載の集積方法。 - 前記第1のフォトレジスト層をパターニングした後、且つ前記1つ以上の第1のインターコネクトを形成した後に、前記1つ以上の第1のインターコネクトが残るように前記第1のフォトレジスト層の少なくとも一部を除去すること、
を更に有する請求項8に記載の集積方法。 - 当該集積方法は更に、
前記第1のバリア層の少なくとも一部上に横たわる第1のシード層を形成することであり、前記第1のバリア層はその上での該第1のシード層の形成を受け入れるように構成されている、第1のシード層を形成すること、
を有し、
前記第1のシード層は、前記第1のシード層のうち少なくとも、前記1つ以上の第1のインターコネクトと接触する部分が、前記1つ以上の第1のインターコネクトの一体部分となるように、前記1つ以上の第1のインターコネクトの形成を受け入れるように構成される、
請求項1乃至9のいずれかに記載の集積方法。 - 当該集積方法は更に、
前記1つ以上の第1の導電インターコネクトを形成した後、且つ前記第1の接合層を形成する前に、前記第1の導電トレースをパターニングすること、
を有し、
該パターニングは、前記第1の導電トレースの少なくとも一部と前記第1のバリア層の少なくとも一部とを除去する、
請求項1乃至10のいずれかに記載の集積方法。 - 当該集積方法は更に、
前記第1の基板の少なくとも一部上に横たわる第1の接着層を形成すること、
を有し、
前記第1の接着層は、前記第1の基板と前記第1の導電トレースとの間に介在される、
請求項1乃至10のいずれかに記載の集積方法。 - 前記第2の導電トレースを前記第3の導電トレースと電気的に接続するために、前記第2の基板を貫く1つ以上の導電ビアを形成すること、
を有する請求項4に記載の集積方法。 - 前記第1の導電トレースは第1の金属材料で製造され、
前記1つ以上の第1の導電インターコネクトは、前記第1の金属材料とは異なる第2の金属材料で製造され、且つ
前記第1のバリア層は、前記第1の導電トレースと前記1つ以上の第1の導電インターコネクトとの間に介在され、前記第1のバリア層は、前記第1のトレースとの前記1つ以上の第1のインターコネクトの相互拡散を防止するように構成される、
請求項1乃至13のいずれかに記載の集積方法。 - 前記第1の導電インターコネクトは遷移金属からなり、且つ
前記第1の接合層は非金属酸化物からなる、
請求項14に記載の集積方法。 - 前記第1の導電トレースは、物理気相堆積、化学気相成長、気相堆積、又はスパッタリングによって形成され、
前記バリア層は、物理気相堆積、化学気相成長、気相堆積、又はスパッタリングによって形成され、
前記1つ以上の第1のインターコネクトは、物理気相堆積、化学気相成長、スパッタリング、又は電気めっきによって形成され、且つ
前記第1の接合層は、化学気相成長、スパッタリング、スピンオンガラスプロセス、又はプラズマCVDにより形成される、
請求項1乃至15のいずれかに記載の集積方法。 - 第1の電子デバイスを有する集積3D電子デバイスであって、
前記第1の電子デバイスは、
第1の基板と、
前記第1の基板の少なくとも一部上に配置された第1の複数の導電トレースと、
前記第1の複数の導電トレースと接触して配置された第1の複数の導電インターコネクトと、
それぞれ前記第1の複数の導電トレースと前記第1の複数の導電インターコネクトとの間に介在された第1の複数のバリア層と、
前記第1の基板を少なくとも部分的に覆い且つ前記第1の複数のインターコネクトを少なくとも部分的に取り囲む第1の接合層と
を有し、
前記第1の複数のバリア層は、それぞれ前記第1の複数の導電トレースと前記第1の複数の導電インターコネクトとの間の相互拡散を防止するように構成されている、
集積3D電子デバイス。 - 当該集積3D電子デバイスは更に第2の電子デバイスを有し、
前記第2の電子デバイスは、
第2の基板と、
前記第2の基板の少なくとも一部上に配置された第2の複数の導電トレースと、
前記第2の複数の導電トレースと接触して配置された第2の複数の導電インターコネクトと、
それぞれ前記第2の複数の導電トレースと前記第2の複数の導電インターコネクトとの間に介在された第2の複数のバリア層と、
前記第2の基板を少なくとも部分的に覆う第2の接合層と
を有し、
前記第2の複数のバリア層は、それぞれ前記第2の複数の導電トレースと前記第2の複数の導電インターコネクトとの間の相互拡散を防止するように構成されており、
前記第1の接合層は前記第2の接合層に接合されており、且つ
前記第1の複数のインターコネクトのうちの少なくとも1つが、前記第2の複数のインターコネクトのうちの少なくとも1つに拡散接合されている、
請求項17に記載の集積3D電子デバイス。 - 前記第1の複数のバリア層は、その上でのそれぞれの第1のシード層の形成を受け入れるように構成されており、前記第1のシード層は、前記第1のシード層が前記第1の複数の導電インターコネクトのそれぞれの一体部分を形成するよう、前記第1の複数の導電インターコネクトと適合している、請求項17又は18に記載の集積3D電子デバイス。
- 前記第1の複数の導電トレース及び前記第2の複数の導電トレースのうちの少なくとも一方は、アルミニウム又はアルミニウム合金からなり、
前記第1の複数の導電インターコネクト及び前記第2の複数の導電インターコネクトのうちの少なくとも一方は、ニッケル又はニッケル合金からなり、
前記第1の複数のバリア層及び前記第2の複数のバリア層のうちの少なくとも一方は、窒化チタン、チタンタングステン、タンタル、及び窒化タンタルからなる群から選択されており、且つ
前記第1の接合層及び前記第2の接合層のうちの少なくとも一方は酸化物からなる、
請求項18又は19に記載の集積3D電子デバイス。
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SG11201808969XA (en) | 2018-11-29 |
KR102215288B1 (ko) | 2021-02-15 |
US10354975B2 (en) | 2019-07-16 |
CA3022525A1 (en) | 2017-11-23 |
TWI674636B (zh) | 2019-10-11 |
CN109196638A (zh) | 2019-01-11 |
IL262669B (en) | 2022-08-01 |
JP6719593B2 (ja) | 2020-07-08 |
TW201806050A (zh) | 2018-02-16 |
WO2017200632A1 (en) | 2017-11-23 |
KR20180136994A (ko) | 2018-12-26 |
US20190267353A1 (en) | 2019-08-29 |
EP3459112A1 (en) | 2019-03-27 |
US20170330859A1 (en) | 2017-11-16 |
CN109196638B (zh) | 2022-06-10 |
IL262669A (en) | 2018-12-31 |
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