JP2019511837A - 調整可能な磁気歪みを有する磁気抵抗素子及び磁気抵抗素子を備える磁気デバイス - Google Patents
調整可能な磁気歪みを有する磁気抵抗素子及び磁気抵抗素子を備える磁気デバイス Download PDFInfo
- Publication number
- JP2019511837A JP2019511837A JP2018546851A JP2018546851A JP2019511837A JP 2019511837 A JP2019511837 A JP 2019511837A JP 2018546851 A JP2018546851 A JP 2018546851A JP 2018546851 A JP2018546851 A JP 2018546851A JP 2019511837 A JP2019511837 A JP 2019511837A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ferromagnetic
- storage
- sense
- magnetoresistive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 37
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 130
- 230000004888 barrier function Effects 0.000 claims abstract description 22
- 230000008878 coupling Effects 0.000 claims description 46
- 238000010168 coupling process Methods 0.000 claims description 46
- 238000005859 coupling reaction Methods 0.000 claims description 46
- 230000007704 transition Effects 0.000 claims description 20
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 230000005290 antiferromagnetic effect Effects 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 8
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910000531 Co alloy Inorganic materials 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 11
- 239000003302 ferromagnetic material Substances 0.000 description 9
- 230000005415 magnetization Effects 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910003321 CoFe Inorganic materials 0.000 description 3
- 229910019236 CoFeB Inorganic materials 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
- H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3295—Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
Abstract
Description
21 記憶層
211 第1の強磁性記憶層
212 第2の強磁性記憶層
213 SAF記憶結合層
22 障壁層
23 センス層
231 第1の強磁性センス層
232 第2の強磁性センス層
233 SAFセンス結合層
24 記憶用反強磁性層
25 補償用強磁性層
26 遷移層
27 強磁性結合層
28 電極
λR1 第1の記憶磁気歪み
λS1 第1のセンス磁気歪み
λ2 第2の磁気歪み
λnet 正味磁気歪み
Claims (16)
- 第1の記憶磁気歪みを有する記憶層(21)と、
第1のセンス磁気歪みを有するセンス層(23)と、
前記記憶層(21)と前記センス層(23)との間で前記記憶層(21)及び前記センス層(23)に接触している障壁層(22)と、
を含む磁気抵抗素子(1)において、
前記磁気抵抗素子(1)は、前記第1の記憶磁気歪み及び/又はセンス磁気歪みとは異なる第2の磁気歪みを有する補償用強磁性層(25)をさらに含み、
前記補償用強磁性層(25)の厚さは、この補償用強磁性層(25)の前記第2の磁気歪みが前記第1の記憶磁気歪み及び/又は前記第1のセンス磁気歪みを補償するような厚さである結果、前記記憶層(21)及び/又はセンス層(23)の正味の磁気歪みが、−10ppm〜+10ppmであるか又は−10ppm未満であり、
前記記憶層(21)及び/又はセンス層(23)は、前記補償用強磁性層(25)と前記障壁層(22)との間にあることを特徴とする磁気抵抗素子。 - 前記補償用強磁性層(25)は、25重量%未満のTa、Ti、Hf、Cr、Sc、Cu、Pt、Pd、Ag、Mo、Zr、W、Al、Si、Mg、若しくはこれらの組合せを含有するNi若しくはCo合金を含み、又は純粋なNi若しくは純粋なCoを含む請求項1に記載の磁気抵抗素子。
- 前記補償用強磁性層(25)は、0.5nm〜10nmの厚さを有する請求項2に記載の磁気抵抗素子。
- 前記補償用強磁性層(25)と前記記憶層(21)及び前記センス層(23)のうちの少なくとも1つの層との間の遷移層(26)をさらに含む請求項1〜3のいずれか1項に記載の磁気抵抗素子。
- 前記遷移層(26)は、Ti、Hf、Ta、Nb、Cr、若しくはこれらの組合せを含み、及び/又は0.1nm〜1nmで構成された厚さを有する請求項4に記載の磁気抵抗素子。
- Fe又はCo系の合金を含み、0.05erg/cm2より大きい交換結合を提供するように適合された強磁性結合層(27)をさらに含む請求項1〜5のいずれか1項に記載の磁気抵抗素子。
- 前記記憶層(21)に交換結合する記憶用反強磁性層(24)をさらに含み、
前記強磁性結合層(27)が、前記記憶用反強磁性層(24)と前記補償用強磁性層(25)との間に含まれている請求項6に記載の磁気抵抗素子。 - 前記補償用強磁性層(25)と前記強磁性結合層(27)との間に別の遷移層(26)を含む請求項6又は7に記載の磁気抵抗素子。
- 前記記憶層(21)は、前記障壁層(22)に接触している第1の強磁性記憶層(211)と、第2の強磁性記憶層(212)と、前記第1の強磁性記憶層(211)と第2の強磁性記憶層(212)との間のSAF記憶結合層(213)とを含むSAF構造を含み、
前記補償用強磁性層(25)が、前記SAF結合層(213)と前記第1の強磁性記憶層(211)との間及び前記SAF結合層(213)と前記第2の強磁性記憶層(212)との間に含まれている請求項1〜8のいずれか1項に記載の磁気抵抗素子。 - 前記センス層(23)は、前記障壁層(22)に接触している第1の強磁性センス層(231)と、第2の強磁性センス層(232)と、前記第1の強磁性センス層(231)と第2の強磁性センス層(232)との間にあるSAF結合層(233)とを含むSAF構造を含み、
前記補償用強磁性層(25)は、前記SAF結合層(233)と前記第1の強磁性センス層(231)との間及び前記SAF結合層(233)と前記第2の強磁性センス層(232)との間に含まれている請求項1〜9のいずれか1項に記載の磁気抵抗素子。 - 前記遷移層(26)は、前記補償用強磁性層(25)と前記第1の強磁性記憶層(211)との間及び/又は前記補償用強磁性層(25)と前記第2の強磁性記憶層(212)との間に含まれている請求項9又は10及び請求項4又は5に記載の磁気抵抗素子。
- 前記遷移層(26)は、前記補償用強磁性層(25)と前記第1の強磁性センス層(231)との間及び/又は前記補償用強磁性層(25)と前記第2の強磁性センス層(232)との間に含まれている請求項10又は11及び請求項4又は5に記載の磁気抵抗素子。
- 前記強磁性結合層(27)は、前記SAF記憶結合層(213)と前記補償用強磁性層(25)との間に含まれている請求項9〜12のいずれか1項及び請求項6に記載の磁気抵抗素子。
- 別の強磁性結合層(27)が、前記SAFセンス結合層(233)と前記補償用強磁性層(25)との間に含まれている請求項10〜13のいずれか1項及び請求項6に記載の磁気抵抗素子。
- 別の遷移層(26)が、前記強磁性結合層(27)と前記補償用強磁性層(25)の間に含まれている請求項13又は14及び請求項4又は5に記載の磁気抵抗素子。
- 請求項1〜15のいずれか1項に記載の磁気抵抗素子(1)を備える磁気デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16290045.0 | 2016-03-10 | ||
EP16290045.0A EP3217446B1 (en) | 2016-03-10 | 2016-03-10 | Magnetoresistive element having an adjustable magnetostriction and magnetic device comprising the magnetoresistive element |
PCT/IB2017/051282 WO2017153883A1 (en) | 2016-03-10 | 2017-03-06 | Magnetoresistive element having an adjustable magnetostriction and magnetic device comprising the magnetoresistive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019511837A true JP2019511837A (ja) | 2019-04-25 |
JP6947745B2 JP6947745B2 (ja) | 2021-10-13 |
Family
ID=55628957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018546851A Active JP6947745B2 (ja) | 2016-03-10 | 2017-03-06 | 調整可能な磁気歪みを有する磁気抵抗素子及び磁気抵抗素子を備える磁気デバイス |
Country Status (5)
Country | Link |
---|---|
US (1) | US10665774B2 (ja) |
EP (1) | EP3217446B1 (ja) |
JP (1) | JP6947745B2 (ja) |
CN (1) | CN108701757A (ja) |
WO (1) | WO2017153883A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021044444A (ja) * | 2019-09-12 | 2021-03-18 | キオクシア株式会社 | 磁気記憶装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6611405B1 (en) * | 1999-09-16 | 2003-08-26 | Kabushiki Kaisha Toshiba | Magnetoresistive element and magnetic memory device |
US6946697B2 (en) * | 2003-12-18 | 2005-09-20 | Freescale Semiconductor, Inc. | Synthetic antiferromagnet structures for use in MTJs in MRAM technology |
US7130167B2 (en) * | 2004-03-03 | 2006-10-31 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetoresistive sensor having improved synthetic free layer |
JP2006128453A (ja) * | 2004-10-29 | 2006-05-18 | Tdk Corp | 磁気抵抗効果素子、該磁気抵抗効果素子を備えた薄膜磁気ヘッド、該薄膜磁気ヘッドを備えたヘッドジンバルアセンブリ及び該ヘッドジンバルアセンブリを備えた磁気ディスク装置 |
US7800868B2 (en) * | 2005-12-16 | 2010-09-21 | Seagate Technology Llc | Magnetic sensing device including a sense enhancing layer |
US7572645B2 (en) * | 2006-11-15 | 2009-08-11 | Everspin Technologies, Inc. | Magnetic tunnel junction structure and method |
JP2008306002A (ja) * | 2007-06-07 | 2008-12-18 | Nec Corp | 磁気抵抗素子及びそれを用いた磁気ランダムアクセスメモリ |
JP4724196B2 (ja) * | 2008-03-25 | 2011-07-13 | 株式会社東芝 | 磁気抵抗効果素子及び磁気ランダムアクセスメモリ |
JP5703641B2 (ja) * | 2010-09-09 | 2015-04-22 | ソニー株式会社 | 記憶素子及びメモリ |
EP2605246B1 (en) * | 2011-12-12 | 2015-02-11 | Crocus Technology S.A. | Self-referenced magnetic random access memory element comprising a synthetic storage layer |
EP2738769B1 (en) * | 2012-11-28 | 2019-09-04 | Crocus Technology S.A. | Magnetoresistive element having enhanced exchange bias and thermal stability for spintronic devices |
US20150129946A1 (en) * | 2013-11-13 | 2015-05-14 | International Business Machines Corporation | Self reference thermally assisted mram with low moment ferromagnet storage layer |
US9177575B1 (en) * | 2014-12-05 | 2015-11-03 | HGST Netherlands B.V. | Tunneling magnetoresistive (TMR) read head with reduced gap thickness |
US9177573B1 (en) * | 2015-04-30 | 2015-11-03 | HGST Netherlands B.V. | Tunneling magnetoresistive (TMR) device with magnesium oxide tunneling barrier layer and free layer having insertion layer |
-
2016
- 2016-03-10 EP EP16290045.0A patent/EP3217446B1/en active Active
-
2017
- 2017-03-06 CN CN201780015916.6A patent/CN108701757A/zh active Pending
- 2017-03-06 WO PCT/IB2017/051282 patent/WO2017153883A1/en active Application Filing
- 2017-03-06 JP JP2018546851A patent/JP6947745B2/ja active Active
- 2017-03-06 US US16/083,163 patent/US10665774B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN108701757A (zh) | 2018-10-23 |
US20190036015A1 (en) | 2019-01-31 |
US10665774B2 (en) | 2020-05-26 |
EP3217446A1 (en) | 2017-09-13 |
JP6947745B2 (ja) | 2021-10-13 |
WO2017153883A1 (en) | 2017-09-14 |
EP3217446B1 (en) | 2022-02-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107923956B (zh) | 磁阻传感器 | |
Wang et al. | 70% TMR at room temperature for SDT sandwich junctions with CoFeB as free and reference layers | |
JP4582488B2 (ja) | 磁性薄膜及びそれを用いた磁気抵抗効果素子並びに磁気デバイス | |
US9177573B1 (en) | Tunneling magnetoresistive (TMR) device with magnesium oxide tunneling barrier layer and free layer having insertion layer | |
US9680088B2 (en) | Ferromagnetic tunnel junction element and method of driving ferromagnetic tunnel junction element | |
US9515253B2 (en) | Magnetic read head with MR enhancements | |
US20090121710A1 (en) | Novel free layer design for TMR/CPP device | |
US10243139B2 (en) | Magnetoresistive effect element | |
JP2013093558A (ja) | 自己参照読み出し操作を使用してmramセルに書き込み及びmramセルを読み出すための磁気ランダムアクセスメモリ(mram)セル及び方法 | |
US9013016B2 (en) | MR device with synthetic free layer structure | |
US10330749B2 (en) | Magnetic logic unit (MLU) cell for sensing magnetic fields with improved programmability and low reading consumption | |
JP6947745B2 (ja) | 調整可能な磁気歪みを有する磁気抵抗素子及び磁気抵抗素子を備える磁気デバイス | |
JP5869405B2 (ja) | 磁気検出素子及びそれを用いた磁気センサ | |
JPH11195824A (ja) | 磁気抵抗効果素子及び磁気抵抗効果型ヘッド | |
JP5057338B2 (ja) | 反平行結合膜構造体、トンネル磁気抵抗素子および磁気デバイス | |
EP4257998A1 (en) | Magnetorestistive sensor sensitive to an out-of-plane magnetic field | |
EP4231031A1 (en) | Magnetoresistive element having thermally robust performances after high-field exposure and sensor comprising the magnetoresistive element | |
JP2002359413A (ja) | 強磁性トンネル磁気抵抗素子 | |
JP2023518156A (ja) | 高磁場での誤差が小さな、2次元磁場を感知する磁気抵抗センサ素子 | |
CN118235055A (zh) | 具有高平面外灵敏度的磁阻元件 | |
JP2003124540A (ja) | 磁気抵抗効果型素子、磁気抵抗効果型ヘッド |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180911 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191209 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20200703 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210114 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210120 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210415 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210825 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210916 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6947745 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |