JP2019198066A5 - - Google Patents

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Publication number
JP2019198066A5
JP2019198066A5 JP2019062612A JP2019062612A JP2019198066A5 JP 2019198066 A5 JP2019198066 A5 JP 2019198066A5 JP 2019062612 A JP2019062612 A JP 2019062612A JP 2019062612 A JP2019062612 A JP 2019062612A JP 2019198066 A5 JP2019198066 A5 JP 2019198066A5
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JP
Japan
Prior art keywords
crf
resonator
electrode
piezoelectric layer
boundary ring
Prior art date
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Application number
JP2019062612A
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English (en)
Japanese (ja)
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JP2019198066A (ja
JP7405513B2 (ja
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Publication date
Priority claimed from US16/287,277 external-priority patent/US11095267B2/en
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Publication of JP2019198066A publication Critical patent/JP2019198066A/ja
Publication of JP2019198066A5 publication Critical patent/JP2019198066A5/ja
Application granted granted Critical
Publication of JP7405513B2 publication Critical patent/JP7405513B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2019062612A 2018-03-28 2019-03-28 埋め込み型境界リングを備えた結合共振器フィルタ Active JP7405513B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862649339P 2018-03-28 2018-03-28
US62/649,339 2018-03-28
US16/287,277 US11095267B2 (en) 2018-03-28 2019-02-27 Coupled resonator filter with embedded border ring
US16/287,277 2019-02-27

Publications (3)

Publication Number Publication Date
JP2019198066A JP2019198066A (ja) 2019-11-14
JP2019198066A5 true JP2019198066A5 (enExample) 2022-03-31
JP7405513B2 JP7405513B2 (ja) 2023-12-26

Family

ID=68055614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019062612A Active JP7405513B2 (ja) 2018-03-28 2019-03-28 埋め込み型境界リングを備えた結合共振器フィルタ

Country Status (4)

Country Link
US (1) US11095267B2 (enExample)
JP (1) JP7405513B2 (enExample)
KR (1) KR102658389B1 (enExample)
CN (1) CN110324019A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11509287B2 (en) 2018-12-14 2022-11-22 Qorvo Us, Inc. Bi-polar border region in piezoelectric device
CN114070224A (zh) * 2020-08-06 2022-02-18 诺思(天津)微系统有限责任公司 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备
US12316304B2 (en) * 2022-12-21 2025-05-27 Rf360 Singapore Pte. Ltd. Vertically coupled SAW resonators
WO2025009408A1 (ja) * 2023-07-03 2025-01-09 株式会社村田製作所 圧電デバイス
US20250219615A1 (en) * 2024-01-03 2025-07-03 Skyworks Global Pte Ltd. Bulk acoustic wave resonator with bragg grating embedded in electrode

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8018303B2 (en) * 2007-10-12 2011-09-13 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device
JP5563739B2 (ja) * 2008-02-20 2014-07-30 太陽誘電株式会社 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置
US7966722B2 (en) * 2008-07-11 2011-06-28 Triquint Semiconductor, Inc. Planarization method in the fabrication of a circuit
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8456257B1 (en) 2009-11-12 2013-06-04 Triquint Semiconductor, Inc. Bulk acoustic wave devices and method for spurious mode suppression
KR101708893B1 (ko) 2010-09-01 2017-03-08 삼성전자주식회사 체적 음향 공진기 구조 및 제조 방법
US9148117B2 (en) * 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9154112B2 (en) * 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9991871B2 (en) * 2011-02-28 2018-06-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising a ring
US9083302B2 (en) * 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9048812B2 (en) * 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9571064B2 (en) 2011-02-28 2017-02-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator device with at least one air-ring and frame
US9246473B2 (en) * 2011-03-29 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar, frame and perimeter distributed bragg reflector
US8575820B2 (en) * 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
DE102012205033B4 (de) * 2011-03-29 2020-01-30 Avago Technologies International Sales Pte. Limited Gestapelter akustischer Resonator, welcher eine Brücke aufweist
US8872604B2 (en) * 2011-05-05 2014-10-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor
US8330325B1 (en) * 2011-06-16 2012-12-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer
US9853626B2 (en) 2014-03-31 2017-12-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising acoustic redistribution layers and lateral features
US9401691B2 (en) 2014-04-30 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator device with air-ring and temperature compensating layer
US9608594B2 (en) * 2014-05-29 2017-03-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitive coupled resonator device with air-gap separating electrode and piezoelectric layer
US9634642B2 (en) 2014-05-30 2017-04-25 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising vertically extended acoustic cavity
US20170054430A1 (en) 2015-08-21 2017-02-23 Rf Micro Devices, Inc. Baw resonator having multi-layer electrode and bo ring close to piezoelectric layer
US10547283B2 (en) 2016-03-10 2020-01-28 Qorvo Us, Inc. Bulk acoustic wave resonator with a border ring and an inner ring

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