CN110324019A - 具有嵌入式边界环的耦合谐振器滤波器 - Google Patents

具有嵌入式边界环的耦合谐振器滤波器 Download PDF

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Publication number
CN110324019A
CN110324019A CN201910217433.5A CN201910217433A CN110324019A CN 110324019 A CN110324019 A CN 110324019A CN 201910217433 A CN201910217433 A CN 201910217433A CN 110324019 A CN110324019 A CN 110324019A
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CN
China
Prior art keywords
resonator
crf
electrode
boundary
piezoelectric layer
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Pending
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CN201910217433.5A
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English (en)
Chinese (zh)
Inventor
苏珊·克罗伊策
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Qorvo US Inc
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Qorvo US Inc
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Publication of CN110324019A publication Critical patent/CN110324019A/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/584—Coupled Resonator Filters [CFR]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0095—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201910217433.5A 2018-03-28 2019-03-21 具有嵌入式边界环的耦合谐振器滤波器 Pending CN110324019A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862649339P 2018-03-28 2018-03-28
US62/649,339 2018-03-28
US16/287,277 US11095267B2 (en) 2018-03-28 2019-02-27 Coupled resonator filter with embedded border ring
US16/287,277 2019-02-27

Publications (1)

Publication Number Publication Date
CN110324019A true CN110324019A (zh) 2019-10-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910217433.5A Pending CN110324019A (zh) 2018-03-28 2019-03-21 具有嵌入式边界环的耦合谐振器滤波器

Country Status (4)

Country Link
US (1) US11095267B2 (enExample)
JP (1) JP7405513B2 (enExample)
KR (1) KR102658389B1 (enExample)
CN (1) CN110324019A (enExample)

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CN114070224A (zh) * 2020-08-06 2022-02-18 诺思(天津)微系统有限责任公司 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备

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US11509287B2 (en) 2018-12-14 2022-11-22 Qorvo Us, Inc. Bi-polar border region in piezoelectric device
US12316304B2 (en) * 2022-12-21 2025-05-27 Rf360 Singapore Pte. Ltd. Vertically coupled SAW resonators
WO2025009408A1 (ja) * 2023-07-03 2025-01-09 株式会社村田製作所 圧電デバイス
US20250219615A1 (en) * 2024-01-03 2025-07-03 Skyworks Global Pte Ltd. Bulk acoustic wave resonator with bragg grating embedded in electrode

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US20120248941A1 (en) * 2011-03-29 2012-10-04 Avago Technologies Wireless Ip (Singapore) Pte. Lt Stacked bulk accoustic resonator and method of fabricating the same
CN102739191A (zh) * 2011-03-29 2012-10-17 安华高科技无线Ip（新加坡）私人有限公司 包括桥部的堆叠式声学谐振器
US20120280767A1 (en) * 2011-05-05 2012-11-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor
US20130314177A1 (en) * 2011-03-29 2013-11-28 Avago Technologies General Ip (Singapore) Pte. Ltd Acoustic resonator comprising collar, frame and perimeter distributed bragg reflector
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US20120218059A1 (en) * 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
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US20140176261A1 (en) * 2011-02-28 2014-06-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator device with at least one air-ring and frame
US20160126930A1 (en) * 2011-02-28 2016-05-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising a ring
US20120248941A1 (en) * 2011-03-29 2012-10-04 Avago Technologies Wireless Ip (Singapore) Pte. Lt Stacked bulk accoustic resonator and method of fabricating the same
CN102739191A (zh) * 2011-03-29 2012-10-17 安华高科技无线Ip（新加坡）私人有限公司 包括桥部的堆叠式声学谐振器
US20130314177A1 (en) * 2011-03-29 2013-11-28 Avago Technologies General Ip (Singapore) Pte. Ltd Acoustic resonator comprising collar, frame and perimeter distributed bragg reflector
US20120280767A1 (en) * 2011-05-05 2012-11-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor
US20150349747A1 (en) * 2014-05-29 2015-12-03 Avago Technologies General Ip ( Singapore) Pte. Ltd. Capacitive coupled resonator device with air-gap separating electrode and piezoelectric layer

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114070224A (zh) * 2020-08-06 2022-02-18 诺思(天津)微系统有限责任公司 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备

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KR102658389B1 (ko) 2024-04-16
KR20190113670A (ko) 2019-10-08
US20190305755A1 (en) 2019-10-03
US11095267B2 (en) 2021-08-17
JP2019198066A (ja) 2019-11-14
JP7405513B2 (ja) 2023-12-26

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