JP2019197791A - キャパシタ内蔵ガラス基板、及びキャパシタ内蔵回路基板 - Google Patents
キャパシタ内蔵ガラス基板、及びキャパシタ内蔵回路基板 Download PDFInfo
- Publication number
- JP2019197791A JP2019197791A JP2018090346A JP2018090346A JP2019197791A JP 2019197791 A JP2019197791 A JP 2019197791A JP 2018090346 A JP2018090346 A JP 2018090346A JP 2018090346 A JP2018090346 A JP 2018090346A JP 2019197791 A JP2019197791 A JP 2019197791A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- capacitor
- glass substrate
- glass
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 108
- 239000000758 substrate Substances 0.000 title claims abstract description 99
- 239000003990 capacitor Substances 0.000 title claims abstract description 73
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 7
- 229910052718 tin Inorganic materials 0.000 claims description 7
- 229910052738 indium Inorganic materials 0.000 claims description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 28
- 239000010409 thin film Substances 0.000 abstract description 28
- 239000010410 layer Substances 0.000 description 226
- 238000000034 method Methods 0.000 description 65
- 229910052751 metal Inorganic materials 0.000 description 51
- 239000002184 metal Substances 0.000 description 51
- 238000007747 plating Methods 0.000 description 44
- 239000010949 copper Substances 0.000 description 42
- 229910052802 copper Inorganic materials 0.000 description 38
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 35
- 239000010408 film Substances 0.000 description 31
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 29
- 239000010936 titanium Substances 0.000 description 22
- 229920002120 photoresistant polymer Polymers 0.000 description 21
- 229910052719 titanium Inorganic materials 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 19
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 18
- 238000009713 electroplating Methods 0.000 description 18
- 239000011347 resin Substances 0.000 description 16
- 229920005989 resin Polymers 0.000 description 16
- 229910052759 nickel Inorganic materials 0.000 description 15
- 238000005530 etching Methods 0.000 description 14
- 238000004544 sputter deposition Methods 0.000 description 14
- 229910000679 solder Inorganic materials 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 238000012545 processing Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 238000007772 electroless plating Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000206 photolithography Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000654 additive Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- 239000011135 tin Substances 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 229910052741 iridium Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- -1 AlSiCu Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 229910016570 AlCu Inorganic materials 0.000 description 3
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910018104 Ni-P Inorganic materials 0.000 description 2
- 229910018536 Ni—P Inorganic materials 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 238000007766 curtain coating Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007607 die coating method Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000009503 electrostatic coating Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000007756 gravure coating Methods 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000011133 lead Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000006089 photosensitive glass Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- ZXNLNZJZSYSNKM-UHFFFAOYSA-M potassium hydrogen peroxide hydroxide Chemical compound [OH-].[K+].OO ZXNLNZJZSYSNKM-UHFFFAOYSA-M 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000003280 down draw process Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 1
- QWARLPGIFZKIQW-UHFFFAOYSA-N hydrogen peroxide;nitric acid Chemical compound OO.O[N+]([O-])=O QWARLPGIFZKIQW-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000002335 preservative effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007372 rollout process Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
貫通孔を備えたガラス基板と、
前記ガラス基板の表裏面と前記貫通孔に形成した下部電極層と、
前記下部電極層上に形成した密着層と、
前記密着層上に形成した誘電体層と、
前記誘電体層上に形成した上部電極層とを、備え、
前記下部電極層および前記密着層と前記誘電体層と前記上部電極層とで、キャパシタを構成し、
前記密着層が導電性酸化物層から成る、ことを特徴とする。
まず図1(a)に示すように、ガラス基板100を準備する。ガラス基板100は、光透過性を有する透明のガラス材料である。ガラスの成分またはガラスに含有される各成分の配合比率、更にガラスの製造方法は特に限定されない。例えば、ガラスとしては、無アルカリガラス、アルカリガラス、ホウ珪酸ガラス、石英ガラス、サファイアガラス、感光性ガラスなどが挙げられるが、ケイ酸塩を主成分とするいずれのガラス材料を用いてもよい。さらに、その他のいわゆるガラス材料を用いても良い。ただし、本実施形態にかかる半導体用途では、無アルカリガラスを用いるのが望ましい。
本実施形態では、電気特性、製造の容易性の観点およびコスト面を考慮して、ガラスと密着が良好なチタン層、続いて銅層を順次スパッタリング法で形成する。ガラス基板上の回路形成用のチタンと銅層の合計の膜厚は、セミアディティブ法による微細な配線形成に有利なことから1μm以下とするのが望ましい。かかる膜厚を1μmより厚くした場合、ピッチ30μm以下の微細配線形成が困難であるからである。
次に、上述したようなキャパシタ内蔵ガラス基板の構成とその製造方法を用いた場合の作用効果について、図2を参照にして説明する。
比較例と実施例とで異なる点は、実施例では密着層110を導電性酸化物のITOで形成したのに対し、比較例ではそれに代わり金属のチタンで形成したことである。
101…貫通孔、
102A、102A’…金属薄膜層、
102B…無電解めっき層、
102…シード金属層、
103…フォトレジストパターン、
104…電解めっき層、
105…下部電極層、
110…密着層、
111…誘電体層、
112…上部電極層、
120…MIMキャパシタ、
130…絶縁樹脂層(ソルダーレジスト層)、
131…通孔、
132…導体回路、
133…外部接続端子、
134…はんだボール、
135…半導体チップ、
136…チップ部品、
Claims (4)
- 貫通孔を備えたガラス基板と、
前記ガラス基板の表裏面と前記貫通孔に形成した下部電極層と、
前記下部電極層上に形成した密着層と、
前記密着層上に形成した誘電体層と、
前記誘電体層上に形成した上部電極層とを、備え、
前記下部電極層および前記密着層と前記誘電体層と前記上部電極層とで、キャパシタを構成し、
前記密着層が導電性酸化物層から成る、
ことを特徴とするキャパシタ内蔵ガラス基板。 - 前記導電性酸化物層がインジウムとスズの酸化物から成る、若しくはインジウムとスズの酸化物にその重量と同量以下の金属酸化物を含む化合物から成る、
ことを特徴とする請求項1に記載のキャパシタ内蔵ガラス基板。 - 請求項1又は2に記載のキャパシタ内蔵ガラス基板を備え、前記下部電極層と、前記密着層と、前記誘電体層と、前記上部電極層をパターニングして成る、
ことを特徴とするキャパシタ内蔵回路基板。 - 抵抗、インダクタ、キャパシタの少なくとも1つを実装して成る、
ことを特徴とする請求項3に記載のキャパシタ内蔵回路基板。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018090346A JP2019197791A (ja) | 2018-05-09 | 2018-05-09 | キャパシタ内蔵ガラス基板、及びキャパシタ内蔵回路基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018090346A JP2019197791A (ja) | 2018-05-09 | 2018-05-09 | キャパシタ内蔵ガラス基板、及びキャパシタ内蔵回路基板 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2019197791A true JP2019197791A (ja) | 2019-11-14 |
Family
ID=68538738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018090346A Pending JP2019197791A (ja) | 2018-05-09 | 2018-05-09 | キャパシタ内蔵ガラス基板、及びキャパシタ内蔵回路基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2019197791A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113347806A (zh) * | 2021-05-31 | 2021-09-03 | 中国科学院长春光学精密机械与物理研究所 | 瓷介电容保护方法 |
CN116344519A (zh) * | 2023-03-01 | 2023-06-27 | 河北杰微科技有限公司 | 衬底集成电容及其制备方法和olt结构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006128622A (ja) * | 2004-09-28 | 2006-05-18 | Nichia Chem Ind Ltd | 半導体装置 |
JP2007329189A (ja) * | 2006-06-06 | 2007-12-20 | Tdk Corp | 薄膜コンデンサ及びその製造方法 |
JP2008034694A (ja) * | 2006-07-31 | 2008-02-14 | Nec Corp | 受動素子 |
JP2009188401A (ja) * | 2008-02-07 | 2009-08-20 | Ibiden Co Ltd | キャパシタ内蔵プリント配線板 |
JP2017228727A (ja) * | 2016-06-24 | 2017-12-28 | 凸版印刷株式会社 | 配線基板及びその製造方法 |
-
2018
- 2018-05-09 JP JP2018090346A patent/JP2019197791A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006128622A (ja) * | 2004-09-28 | 2006-05-18 | Nichia Chem Ind Ltd | 半導体装置 |
JP2007329189A (ja) * | 2006-06-06 | 2007-12-20 | Tdk Corp | 薄膜コンデンサ及びその製造方法 |
JP2008034694A (ja) * | 2006-07-31 | 2008-02-14 | Nec Corp | 受動素子 |
JP2009188401A (ja) * | 2008-02-07 | 2009-08-20 | Ibiden Co Ltd | キャパシタ内蔵プリント配線板 |
JP2017228727A (ja) * | 2016-06-24 | 2017-12-28 | 凸版印刷株式会社 | 配線基板及びその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113347806A (zh) * | 2021-05-31 | 2021-09-03 | 中国科学院长春光学精密机械与物理研究所 | 瓷介电容保护方法 |
CN113347806B (zh) * | 2021-05-31 | 2023-03-24 | 中国科学院长春光学精密机械与物理研究所 | 瓷介电容保护方法 |
CN116344519A (zh) * | 2023-03-01 | 2023-06-27 | 河北杰微科技有限公司 | 衬底集成电容及其制备方法和olt结构 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7083600B2 (ja) | キャパシタ内蔵ガラス回路基板及びその製造方法 | |
JP7080579B2 (ja) | 電子部品製造方法 | |
US10923439B2 (en) | Core substrate, multi-layer wiring substrate, semiconductor package, semiconductor module, copper-clad substrate, and method for manufacturing core substrate | |
US11516911B2 (en) | Glass circuit board and stress relief layer | |
EP3220417B1 (en) | Wiring circuit board, semiconductor device, wiring circuit board manufacturing method, and semiconductor device manufacturing method | |
JP7444210B2 (ja) | キャパシタ内蔵ガラス回路基板 | |
JP7139594B2 (ja) | ガラスコア、多層配線基板、及びガラスコアの製造方法 | |
JP2018107256A (ja) | ガラス配線板、半導体パッケージ基板、半導体装置、及び半導体装置の製造方法 | |
JP2019114723A (ja) | キャパシタ内蔵ガラス回路基板及びキャパシタ内蔵ガラス回路基板の製造方法 | |
JP2019197791A (ja) | キャパシタ内蔵ガラス基板、及びキャパシタ内蔵回路基板 | |
JP7009958B2 (ja) | キャパシタ内蔵ガラス基板の製造方法 | |
JP6946745B2 (ja) | ガラス回路基板及びその製造方法 | |
WO2024004566A1 (ja) | ガラスコア積層構造体およびガラスコア積層構造体の製造方法 | |
WO2023090197A1 (ja) | 配線基板及びその製造方法 | |
KR20240063896A (ko) | 지지체가 부착된 기판 및 반도체 장치 | |
JP6786860B2 (ja) | ガラス配線基板及び半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210421 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220217 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220222 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220809 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221004 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230207 |