JP2019195004A - レーザ発振器 - Google Patents
レーザ発振器 Download PDFInfo
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- JP2019195004A JP2019195004A JP2018085502A JP2018085502A JP2019195004A JP 2019195004 A JP2019195004 A JP 2019195004A JP 2018085502 A JP2018085502 A JP 2018085502A JP 2018085502 A JP2018085502 A JP 2018085502A JP 2019195004 A JP2019195004 A JP 2019195004A
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- unit
- transformer
- power supply
- voltage
- oscillator
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- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02208—Mountings; Housings characterised by the shape of the housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0912—Electronics or drivers for the pump source, i.e. details of drivers or circuitry specific for laser pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02218—Material of the housings; Filling of the housings
- H01S5/0222—Gas-filled housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/02—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc
- H02M5/04—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters
- H02M5/10—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using transformers
- H02M5/12—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases without intermediate conversion into dc by static converters using transformers for conversion of voltage or current amplitude only
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Lasers (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
Abstract
Description
図1A及び図1Bに示されるように、トランス部10が、発振器部40及び入力電源部20に対して上下方向に配置されるため、左右方向に配置される場合と比較して、設置面積が相対的に小さくなる利点がある。これは、レーザ発振器1の出力強度を高めるためにトランスの数が増加する場合においても、トランス部10が収容される領域の上下方向の長さが増加しても、左右方向の長さは増加しない。
Claims (4)
- 電源電圧を調整するトランス部と、
前記トランス部において調整された電圧を発振器部へ入力する、入力電源部と、
前記入力電源部に接続され、前記入力電源部の電圧に応じたレーザ光を出力する発振器部と、を備え、
前記トランス部は、前記発振器部の少なくとも一部の下方に配置される、レーザ発振器。 - 前記トランス部は複数のトランスを有するとともに、
前記入力電源部は複数の入力電源を有し、
前記トランスごとに前記入力電源が設けられる、請求項1に記載のレーザ発振器。 - 前記トランスは、複数の入力端子と、前記複数の入力端子の夫々に対応する複数の出力端子と、を有し、
前記トランスは、前記複数の入力端子の夫々から入力された電圧を所定の電圧に変換して、前記対応する複数の出力端子から出力する、請求項1又は2に記載のレーザ発振器。 - 前記入力電源部の前段に、前記トランス部の力率を改善するための力率制御ユニットをさらに備える、請求項1から3のいずれか一項に記載のレーザ発振器。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018085502A JP6744356B2 (ja) | 2018-04-26 | 2018-04-26 | レーザ発振器 |
CN201910334592.3A CN110416868B (zh) | 2018-04-26 | 2019-04-24 | 激光振荡器 |
US16/394,496 US10707641B2 (en) | 2018-04-26 | 2019-04-25 | Laser oscillator |
DE102019205934.1A DE102019205934A1 (de) | 2018-04-26 | 2019-04-25 | Laseroszillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018085502A JP6744356B2 (ja) | 2018-04-26 | 2018-04-26 | レーザ発振器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019195004A true JP2019195004A (ja) | 2019-11-07 |
JP6744356B2 JP6744356B2 (ja) | 2020-08-19 |
Family
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---|---|---|---|
JP2018085502A Active JP6744356B2 (ja) | 2018-04-26 | 2018-04-26 | レーザ発振器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10707641B2 (ja) |
JP (1) | JP6744356B2 (ja) |
CN (1) | CN110416868B (ja) |
DE (1) | DE102019205934A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7324113B2 (ja) | 2019-10-10 | 2023-08-09 | ファナック株式会社 | レーザ発振器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6423589A (en) * | 1987-07-20 | 1989-01-26 | Mitsubishi Electric Corp | Method and apparatus for controlling power supply for laser |
JP2005236030A (ja) * | 2004-02-19 | 2005-09-02 | Matsushita Electric Ind Co Ltd | レーザ光出射方法とその装置 |
WO2014184905A1 (ja) * | 2013-05-15 | 2014-11-20 | 三菱電機株式会社 | レーザ発振器用電源装置およびレーザ発振器 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6370174B1 (en) * | 1999-10-20 | 2002-04-09 | Cymer, Inc. | Injection seeded F2 lithography laser |
US20060159140A1 (en) * | 2005-01-17 | 2006-07-20 | Fanuc Ltd | Laser oscillator and method of estimating the lifetime of a pump light source |
JP2014149315A (ja) * | 2011-05-31 | 2014-08-21 | Mitsubishi Electric Corp | 高調波レーザ発振器 |
WO2016002001A1 (ja) * | 2014-07-01 | 2016-01-07 | ギガフォトン株式会社 | レーザ装置、euv光生成システム及びレーザ装置の制御方法 |
JP6316792B2 (ja) * | 2015-12-04 | 2018-04-25 | ファナック株式会社 | 複数の発光素子を制御するレーザ電源装置 |
JP6631277B2 (ja) * | 2016-01-28 | 2020-01-15 | 富士電機株式会社 | スイッチング電源装置 |
JP6363661B2 (ja) * | 2016-07-26 | 2018-07-25 | ファナック株式会社 | レーザ制御装置、方法及びプログラム |
-
2018
- 2018-04-26 JP JP2018085502A patent/JP6744356B2/ja active Active
-
2019
- 2019-04-24 CN CN201910334592.3A patent/CN110416868B/zh active Active
- 2019-04-25 DE DE102019205934.1A patent/DE102019205934A1/de not_active Ceased
- 2019-04-25 US US16/394,496 patent/US10707641B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6423589A (en) * | 1987-07-20 | 1989-01-26 | Mitsubishi Electric Corp | Method and apparatus for controlling power supply for laser |
JP2005236030A (ja) * | 2004-02-19 | 2005-09-02 | Matsushita Electric Ind Co Ltd | レーザ光出射方法とその装置 |
WO2014184905A1 (ja) * | 2013-05-15 | 2014-11-20 | 三菱電機株式会社 | レーザ発振器用電源装置およびレーザ発振器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7324113B2 (ja) | 2019-10-10 | 2023-08-09 | ファナック株式会社 | レーザ発振器 |
Also Published As
Publication number | Publication date |
---|---|
JP6744356B2 (ja) | 2020-08-19 |
CN110416868B (zh) | 2021-06-15 |
US20190334310A1 (en) | 2019-10-31 |
US10707641B2 (en) | 2020-07-07 |
CN110416868A (zh) | 2019-11-05 |
DE102019205934A1 (de) | 2019-10-31 |
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