JP2019174733A - 光素子 - Google Patents
光素子 Download PDFInfo
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- JP2019174733A JP2019174733A JP2018065082A JP2018065082A JP2019174733A JP 2019174733 A JP2019174733 A JP 2019174733A JP 2018065082 A JP2018065082 A JP 2018065082A JP 2018065082 A JP2018065082 A JP 2018065082A JP 2019174733 A JP2019174733 A JP 2019174733A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/21—Thermal instability, i.e. DC drift, of an optical modulator; Arrangements or methods for the reduction thereof
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
例えば、導波路型LN変調器は、波長チャープが小さく、位相・強度変調が可能であることから、高速・長距離用光通信の送信器に搭載されている。近年、マッハツェンダー(MZ)構造を有する導波路を複数個集積させた多値変調器が主流になっている。
(1) ニオブ酸リチウム結晶で形成された基板と、該基板上に配置した電極とを有する光素子において、該基板と該電極とが直接接触すると共に、該電極側の前記接触する面に配置される接触金属は、酸化した時の1配位結合当りの標準生成エンタルピーが、五酸化ニオブの1配位結合当りの標準生成エンタルピーよりも大きい金属材料が使用されていることを特徴とする。
本発明者は、鋭意研究を行った結果、LN基板に直接電極を形成した場合、接触する金属が基板内の酸素を取り込み、LN基板に酸素欠損を発生させることが、ドリフト現象を発生させることを見出し、本発明を生み出したものである。
Claims (4)
- ニオブ酸リチウム結晶で形成された基板と、該基板上に配置した電極とを有する光素子において、
該基板と該電極とが直接接触すると共に、
該電極側の前記接触する面に配置される接触金属は、酸化した時の1配位結合当りの標準生成エンタルピーが、五酸化ニオブの1配位結合当りの標準生成エンタルピーよりも大きい金属材料が使用されていることを特徴とする光素子。 - 請求項1に記載の光素子において、該接触金属が、Co、Ni、Mo、W、Vの何れかを使用していることを特徴とする光素子。
- ニオブ酸リチウム結晶で形成された基板と、該基板上に配置した電極とを有する光素子において、
該基板と該電極とが直接接触すると共に、
該電極側の前記接触する面に配置される接触金属は、酸化物導体が使用されていることを特徴とする光素子。 - 請求項1乃至3のいずれかに記載の光素子において、該基板の厚みは、20μm以下であることを特徴とする光素子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018065082A JP7052487B2 (ja) | 2018-03-29 | 2018-03-29 | 光素子 |
US17/042,839 US11347086B2 (en) | 2018-03-29 | 2019-02-27 | Optical element |
PCT/JP2019/007615 WO2019187932A1 (ja) | 2018-03-29 | 2019-02-27 | 光素子 |
EP19776059.8A EP3779574B1 (en) | 2018-03-29 | 2019-02-27 | Optical element |
CN201980023012.7A CN111936917A (zh) | 2018-03-29 | 2019-02-27 | 光学元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018065082A JP7052487B2 (ja) | 2018-03-29 | 2018-03-29 | 光素子 |
Publications (2)
Publication Number | Publication Date |
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JP2019174733A true JP2019174733A (ja) | 2019-10-10 |
JP7052487B2 JP7052487B2 (ja) | 2022-04-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018065082A Active JP7052487B2 (ja) | 2018-03-29 | 2018-03-29 | 光素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11347086B2 (ja) |
EP (1) | EP3779574B1 (ja) |
JP (1) | JP7052487B2 (ja) |
CN (1) | CN111936917A (ja) |
WO (1) | WO2019187932A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023145090A1 (ja) * | 2022-01-31 | 2023-08-03 | 住友大阪セメント株式会社 | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 |
Citations (6)
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---|---|---|---|---|
JP2000221458A (ja) * | 1999-02-04 | 2000-08-11 | Nec Corp | 導波路型光デバイス製造方法 |
US20030062551A1 (en) * | 2001-10-02 | 2003-04-03 | Jds Uniphase Corporation | Electrode structure including encapsulated adhesion layer |
JP4375597B2 (ja) * | 2001-11-16 | 2009-12-02 | 日本碍子株式会社 | 光導波路デバイスおよび進行波形光変調器 |
JP2013210568A (ja) * | 2012-03-30 | 2013-10-10 | Sumitomo Osaka Cement Co Ltd | 光変調器 |
US20140219601A1 (en) * | 2013-02-04 | 2014-08-07 | Hon Hai Precision Industry Co., Ltd. | Polarization splitter of high polarization extinction ratio |
US20180074382A1 (en) * | 2016-09-09 | 2018-03-15 | Samsung Electronics Co., Ltd. | Phase modulation active device, method of driving the same, and optical apparatus including the phase modulation active device |
Family Cites Families (15)
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JP2798350B2 (ja) | 1993-11-30 | 1998-09-17 | 住友大阪セメント株式会社 | 直流電圧のドリフトが制御されている導波路型電気光学素子の選別方法 |
JP3954192B2 (ja) | 1998-03-12 | 2007-08-08 | 日本碍子株式会社 | 光導波路素子およびその製造方法 |
JP4401531B2 (ja) | 2000-05-01 | 2010-01-20 | 住友大阪セメント株式会社 | 微細パターン電極の形成方法および光素子 |
EP1258772A1 (en) | 2001-05-14 | 2002-11-20 | Corning O.T.I. S.p.A. | Electro-optic modulator having high bandwith and low drive voltage |
JP4968995B2 (ja) * | 2001-08-22 | 2012-07-04 | 住友大阪セメント株式会社 | 光変調器 |
US6867134B2 (en) | 2002-03-20 | 2005-03-15 | Jds Uniphase Corporation | Adherent all-gold electrode structure for lithium niobate based devices and the method of fabrication |
JP4936838B2 (ja) * | 2005-09-29 | 2012-05-23 | 住友大阪セメント株式会社 | 光制御デバイス |
JP2007272122A (ja) * | 2006-03-31 | 2007-10-18 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
US7844149B2 (en) * | 2007-01-12 | 2010-11-30 | Jds Uniphase Corporation | Humidity tolerant electro-optic device |
ATE527572T1 (de) * | 2007-08-14 | 2011-10-15 | Selex Sistemi Integrati Spa | Digitaler optischer schalter mit niedriger schaltspannung und schneller ansprechzeit |
EP2317562A1 (en) * | 2009-11-03 | 2011-05-04 | Fundacio Privada Institut De Ciencies Fotoniques | Multilayer metallic electrodes for optoelectronics |
US8070368B1 (en) | 2010-07-20 | 2011-12-06 | L-3 Communications Corporation | Hermetically packaged LiNbO3 optical circuit with oxidizing fill gas |
US9020306B2 (en) * | 2013-03-14 | 2015-04-28 | The Aerospace Corporation | Stable lithium niobate waveguide devices, and methods of making and using same |
JP6325811B2 (ja) | 2013-12-25 | 2018-05-16 | 住友大阪セメント株式会社 | 光制御デバイス |
JP2016071250A (ja) * | 2014-09-30 | 2016-05-09 | 住友大阪セメント株式会社 | 電極付き基板 |
-
2018
- 2018-03-29 JP JP2018065082A patent/JP7052487B2/ja active Active
-
2019
- 2019-02-27 US US17/042,839 patent/US11347086B2/en active Active
- 2019-02-27 WO PCT/JP2019/007615 patent/WO2019187932A1/ja active Application Filing
- 2019-02-27 CN CN201980023012.7A patent/CN111936917A/zh active Pending
- 2019-02-27 EP EP19776059.8A patent/EP3779574B1/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000221458A (ja) * | 1999-02-04 | 2000-08-11 | Nec Corp | 導波路型光デバイス製造方法 |
US20030062551A1 (en) * | 2001-10-02 | 2003-04-03 | Jds Uniphase Corporation | Electrode structure including encapsulated adhesion layer |
JP4375597B2 (ja) * | 2001-11-16 | 2009-12-02 | 日本碍子株式会社 | 光導波路デバイスおよび進行波形光変調器 |
JP2013210568A (ja) * | 2012-03-30 | 2013-10-10 | Sumitomo Osaka Cement Co Ltd | 光変調器 |
US20140219601A1 (en) * | 2013-02-04 | 2014-08-07 | Hon Hai Precision Industry Co., Ltd. | Polarization splitter of high polarization extinction ratio |
US20180074382A1 (en) * | 2016-09-09 | 2018-03-15 | Samsung Electronics Co., Ltd. | Phase modulation active device, method of driving the same, and optical apparatus including the phase modulation active device |
Non-Patent Citations (1)
Title |
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HIGUMA ET AL.: "Electrode design to suppress thermal drift in lithium niobate modulators", ELECTRONICS LETTERS, vol. 36, no. 24, JPN6019016872, 23 November 2000 (2000-11-23), pages 2013 - 2014, XP006015939, ISSN: 0004550514, DOI: 10.1049/el:20001260 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023145090A1 (ja) * | 2022-01-31 | 2023-08-03 | 住友大阪セメント株式会社 | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2019187932A1 (ja) | 2019-10-03 |
EP3779574B1 (en) | 2024-01-17 |
CN111936917A (zh) | 2020-11-13 |
EP3779574A1 (en) | 2021-02-17 |
US20210026165A1 (en) | 2021-01-28 |
JP7052487B2 (ja) | 2022-04-12 |
EP3779574A4 (en) | 2021-12-15 |
US11347086B2 (en) | 2022-05-31 |
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