JP2019158555A - Defect confirmation device, method for confirming defects, and program - Google Patents

Abstract

To increase the accuracy of confirmation in the work of confirming defects.SOLUTION: The defect confirmation device is for confirming the presence or the absence of defects in an inspection target object, and includes an acquisition unit and an output control unit. The acquisition unit acquires defect image data, which has possibly captured a defect, and reference image data as a reference for the same part of the inspection target object. The output control unit causes the output unit to visually output the defect image data and the reference image data at least one time each sequentially to the same display region.SELECTED DRAWING: Figure 8

Description

  The present invention relates to a defect confirmation device, a defect confirmation method, and a program. More specifically, the present invention is directed to a technique for inspecting various patterns formed on a substrate such as various patterns such as a wiring pattern on a printed board or various masks such as a resist for producing the printed board. It has been. In particular, the present invention relates to a technique for visually outputting, for example, an image of an inspection object and a reference image serving as a reference for comparison.

  For example, there has been proposed a defect confirmation apparatus for confirming defects in various patterns on an object in which various patterns such as a wiring pattern are formed on a substrate such as a printed circuit board (for example, the description in Patent Document 1). See).

  In this defect confirmation apparatus, for example, an inspection image obtained by photographing a part of the inspection object and a reference image to be compared are displayed in a state where they are simultaneously arranged. At this time, the user can confirm the presence / absence of a defect in the part captured by the inspection image by comparing the inspection image with the reference image.

Japanese Patent Laying-Open No. 2005-91161

  However, in the technique disclosed in Patent Document 1, for example, when comparing the inspection image with the reference image, the line of sight is moved between the inspection image and the reference image, so that a true defect may be overlooked. Furthermore, there is a possibility that a true defect is likely to be overlooked due to, for example, accumulation of user fatigue due to movement of the line of sight. That is, there is a possibility that the confirmation accuracy in the work of confirming the defect is lowered.

  The present invention has been made in view of the above problems, and an object of the present invention is to improve the confirmation accuracy in the work of confirming defects.

  In order to solve the above-described problem, a defect confirmation device according to a first aspect is a defect confirmation device that confirms the presence or absence of a defect in an inspection object, and includes an acquisition unit and an output control unit. The acquisition unit acquires defect image data that may have detected a defect and reference image data that serves as a reference for the same part of the inspection object having the same size. The output control unit causes the output unit to visually output the defect image data and the reference image data to the same display area at least once in a time sequential manner.

  The defect confirmation apparatus according to the second aspect is the defect confirmation apparatus according to the first aspect, wherein the output control unit may cause a defect to exist along with the defect image data by the output unit. An element that allows a user to visually recognize a certain part is visually output.

  The defect confirmation device according to a third aspect is the defect confirmation device according to the first or second aspect, wherein the output control unit and the defect image data are placed in the same display area by the output unit. The reference image data is alternately and visually output.

  The defect confirmation apparatus according to the fourth aspect is the defect confirmation apparatus according to the third aspect, further comprising an input unit for inputting a signal according to a user's operation, wherein the output control unit is In response to the input of the first signal by the input unit according to one operation, the output unit alternately outputs the defect image data and the reference image data in the same display area in a visible manner. Stop processing.

  The defect confirmation apparatus according to a fifth aspect is the defect confirmation apparatus according to the fourth aspect, wherein the output control unit responds to the stop of the alternate output processing by the output unit and outputs the defect image data. In addition, an element related to the defect image that can be recognized by the user is output, or an element related to the reference image that can be recognized by the user is output together with the reference image data.

  The defect confirmation apparatus according to a sixth aspect is the defect confirmation apparatus according to the fifth aspect, wherein the output control unit stops the alternate output process and then performs the input according to a second operation by a user. In response to the input of the second signal by the unit, the output unit visually outputs the defect image data and the reference image data so as to overlap in the same display area.

  A defect confirmation apparatus according to a seventh aspect is the defect confirmation apparatus according to any one of the first to fifth aspects, wherein the output control unit is configured to output image data in the same display area by the output unit. The defect image data and the reference image data are overlapped from the first output state in which the first image data of the defect image data and the reference image data is visually output. Second image data that is different from the first image data of the defect image data and the reference image data is visually output through the second output state in which the image is visually output. Transition to the third output state.

  A defect confirmation method according to an eighth aspect is a defect confirmation method for confirming the presence or absence of a defect in an inspection object, and includes step (a) and step (b). In the step (a), defect image data that may have detected a defect and reference image data serving as a reference are acquired for the same part of the same size of the inspection object. In the step (b), the output unit causes the defect image data and the reference image data acquired in the step (a) to be output to the same display area in a time sequential manner at least once.

  The defect confirmation method according to the ninth aspect is the defect confirmation method according to the eighth aspect, wherein in the step (b), the output unit may cause a defect together with the defect image data. An element that allows a user to visually recognize a certain portion is visually output.

  A defect confirmation method according to a tenth aspect is the defect confirmation method according to the eighth or ninth aspect, wherein in the step (b), the defect image data is applied to the same display area by the output unit. And the reference image data are alternately output visually.

  A defect confirmation method according to an eleventh aspect is the defect confirmation method according to the tenth aspect, and responds to the input of the first signal by the input unit according to the first operation by the user in the step (b). Then, the output unit stops the alternate output process for alternately and visually outputting the defect image data and the reference image data in the same display area.

  A defect confirmation method according to a twelfth aspect is the defect confirmation method according to the eleventh aspect, wherein in the step (b), the defect image is output by the output unit in response to the stop of the alternate output process. The element related to the defect image that can be recognized by the user is output together with the data, or the element related to the reference image that can be recognized by the user is output together with the reference image data.

  A defect confirmation method according to a thirteenth aspect is the defect confirmation method according to the twelfth aspect, wherein after the alternate output process is stopped in the step (b), the defect response method according to a second operation by a user is performed. In response to the input of the second signal by the input unit, the output unit causes the defect image data and the reference image data to be visually output so as to overlap in the same display area.

  The defect confirmation method according to a fourteenth aspect is the defect confirmation method according to any one of the eighth to twelfth aspects, wherein in the step (b), the image in the same display area is output by the output unit. From the first output state in which the first image data of the defect image data and the reference image data is visibly output, the defect image data and the reference image data are displayed. Second image data that is different from the first image data of the defect image data and the reference image data is visually output through the second output state that is visually output so as to be superimposed. Transition to the third output state.

  The program according to the fifteenth aspect is executed by a processing unit included in the information processing apparatus, thereby causing the information processing apparatus to function as the defect confirmation apparatus according to any one of the first to seventh aspects. Is a program.

  According to any of the defect confirmation device according to the first aspect and the defect confirmation method according to the eighth aspect, for example, the defect image data and the reference image data are time-sequentially in the same display area for the same part of the same size. If it is visibly output, the user can compare the defect image with the reference image without moving the line of sight. Thereby, for example, it becomes difficult for the user to overlook the true defect of the inspection object, and it becomes difficult to get tired. As a result, for example, the confirmation accuracy in the work of confirming the defect of the inspection object can be improved.

  With both the defect confirmation apparatus according to the second aspect and the defect confirmation method according to the ninth aspect, for example, a portion where a defect may exist can be visually recognized together with the defect image data. If such an element is output visually, the user can easily find a true defect in the inspection object. As a result, for example, the user can confirm the presence or absence of a defect with high accuracy for the inspection object.

  In any of the defect confirmation device according to the third aspect and the defect confirmation method according to the tenth aspect, for example, in the same display area, the defect image data and the reference image data are alternately displayed for the same part of the same size. If it is output visually, the user can easily compare the defect image with the reference image without moving the line of sight. Thereby, for example, the user can easily find a true defect in the inspection object. As a result, for example, for the inspection object, the confirmation accuracy in the work of confirming the defect can be further improved.

  In any of the defect confirmation device according to the fourth aspect and the defect confirmation method according to the eleventh aspect, for example, the user stops the process in which the defect image data and the reference image data are alternately output visually. If possible, the presence or absence of a true defect in the inspection object can be calmly confirmed.

  In any of the defect confirmation device according to the fifth aspect and the defect confirmation method according to the twelfth aspect, for example, the user can select any of the defect image data and the reference image data as the image displayed by the display unit. Can be recognized. Thereby, for example, the user can easily find a true defect in the inspection object. As a result, for example, for the inspection object, the confirmation accuracy in the work of confirming the defect can be further improved.

  If any of the defect confirmation apparatus according to the sixth aspect and the defect confirmation method according to the thirteenth aspect is visually output so that, for example, the defect image data and the reference image data are superimposed, the user It is possible to easily recognize a difference between the defect image that is visually output based on the defect image data and the reference image that is output based on the reference image data.

  In any of the defect confirmation device according to the seventh aspect and the defect confirmation method according to the fourteenth aspect, for example, there is a time zone in which the defect image data and the reference image data are visually output so as to overlap. Then, the user can easily recognize the difference between the defect image visually output based on the defect image data and the reference image output based on the reference image data.

  According to the program concerning the 15th mode, the same effect as the defect confirmation device concerning the 1st to 7th mode can be acquired.

It is a figure showing a schematic structure of an example of a defect inspection system concerning a 1st embodiment. It is a figure which shows the functional structure of an example of an inspection apparatus. It is a figure which shows the electrical structure of an example of a defect confirmation apparatus. It is a figure which shows the functional structure of an example of a defect confirmation apparatus. It is a figure which shows an example of a defect selection screen. It is a figure which shows an example of a defect confirmation screen. It is a figure which shows an example of a reference | standard confirmation screen. It is a flowchart which shows an example of the operation | movement flow of the defect confirmation apparatus which concerns on 1st Embodiment. It is a flowchart which shows an example of the operation | movement flow of the defect confirmation apparatus which concerns on 1st Embodiment. It is a flowchart which shows an example of the operation | movement flow of the defect confirmation apparatus which concerns on 1st Embodiment. It is a figure which shows an example of the reference | standard confirmation screen which concerns on 2nd Embodiment. It is a figure which shows an example of the superimposition confirmation screen which concerns on 3rd Embodiment. It is a flowchart which shows an example of the operation | movement flow of the defect confirmation apparatus which concerns on 4th Embodiment. It is a flowchart which shows an example of the operation | movement flow of the defect confirmation apparatus which concerns on 4th Embodiment.

  Hereinafter, each embodiment of the present invention will be described with reference to the drawings. In the drawings, parts having similar configurations and functions are denoted by the same reference numerals, and redundant description is omitted in the following description. The drawings are shown schematically.

<1. First Embodiment>
<1-1. Overview of defect inspection system>
FIG. 1 is a diagram illustrating a schematic configuration of an example of a defect confirmation system 100 including a defect confirmation apparatus 3 according to the first embodiment. The defect confirmation system 100 has a configuration in which the inspection apparatus 1 and the defect confirmation apparatus 3 are communicably connected via a communication line 2. As the communication line 2, various network lines such as a LAN (Local Area Network) or a public line, or a wired line such as a cable is applied. The network line may be any network line as long as data communication is possible between the inspection apparatus 1 and the defect confirmation apparatus 3 using a predetermined communication protocol set in advance. . A plurality of inspection apparatuses 1 may be connected to the communication line 2, and a plurality of defect confirmation apparatuses 3 may be connected.

<1-2. Overview of inspection equipment>
FIG. 2 is a block diagram illustrating a functional configuration of an example of the inspection apparatus 1 according to the first embodiment. The inspection device 1 includes, for example, an operation unit 11, a display unit 12, a control unit 13, a moving mechanism 14, an imaging unit 15, a processing unit 16, a storage device 17, and a communication unit 18.

  For example, the operation unit 11 can input an instruction to the inspection apparatus 1 in response to an operation by an operator. The operation unit 11 can include, for example, various buttons, a keyboard, a mouse, and the like. For example, a trackball, a joystick, a touch panel, or the like may be applied to the operation unit 11.

  The display unit 12 has a function capable of visually outputting various data, for example. The display unit 12 may include various displays such as a liquid crystal display or an organic EL display. The display unit 12 may include, for example, various light emitting units such as a light emitting diode (LED) or a lamp.

  For example, the control unit 13 has a function capable of comprehensively controlling the operation of each unit of the inspection apparatus 1. The control unit 13 includes, for example, an arithmetic processing circuit such as a central processing unit (CPU) and a storage unit such as a RAM (Random Access Memory), and performs arithmetic processing on a program stored in the storage device 17. Various functions can be realized by executing the circuit. The control unit 13 controls the operation of each unit by transmitting a control signal to each unit such as the display unit 12, the moving mechanism 14, the imaging unit 15, the processing unit 16, the storage device 17, and the communication unit 18, for example. Can do. At least some of the functions of the control unit 13 may be configured by hardware such as a dedicated electronic circuit, for example.

  For example, the moving mechanism 14 has a function of holding an inspection target (also referred to as an inspection target) and moving the inspection target relative to the imaging unit 15. As the inspection object, for example, a substrate 90 or the like is employed. For example, the moving mechanism 14 can move the stage holding the substrate 90 based on a control signal from the control unit 13. Further, for example, the moving mechanism 14 can detect the position of the substrate 90 or the stage with a sensor such as an encoder and transmit it to the control unit 13. Here, for example, the moving mechanism 14 may have a configuration for moving the imaging unit 15 relative to the inspection object.

  The imaging unit 15 has a function capable of imaging the surface (also referred to as a surface to be inspected) of the substrate 90 as an inspection object, for example. For the imaging unit 15, for example, a unit having a function equivalent to that of a general CCD camera is applied. For example, the imaging unit 15 acquires image data by imaging for each area (divided area or block) divided into a predetermined size set in advance on the surface to be inspected of the substrate 90, and these image data Can be transmitted to the processing unit 16.

  For example, the processing unit 16 can perform predetermined image recognition processing set in advance on each image data acquired by the imaging unit 15 to determine whether or not a defect exists on the surface to be inspected. It has a function. The predetermined image recognition processing includes, for example, pattern matching for comparison with image data that captures a block in which no defect exists. Here, for example, whether or not there is a defect for each block on the surface to be inspected by performing predetermined image recognition on the image data obtained by imaging for each block divided on the surface to be inspected of the substrate 90. Can be determined.

  Further, for example, the processing unit 16 creates information on defects (also referred to as defect information) based on the determination result relating to the presence / absence of a defect for each block on the surface to be inspected, and transmits the defect information to the control unit 13. It has a function that can. The defect information includes, for example, identification information that identifies image data (also referred to as defect image data) that captures a block that is determined to have a defect, information that indicates the position of the block, and information that indicates the size of the block Information indicating the position of an area (also referred to as a defect area) determined to have a defect in the block and information indicating the size of the defect area may be included. The defect information can be created for each substrate 90 as one inspection object, for example. At this time, for example, a defect information group including one or more pieces of defect information about one or more substrates 90 can be created. The defect information may include, for example, thumbnail image data related to the defect image data.

  Here, the identification information related to the defect image data includes, for example, a data file name. Thereby, for example, a state in which defect image data and defect information are associated with each other is realized. The information indicating the position of the block includes, for example, coordinates of a predetermined position such as the center position of the block. As the coordinates of the predetermined position, for example, coordinates that directly indicate the position on the substrate 90 can be used. The information indicating the block size includes, for example, vertical and horizontal dimensions of the substrate 90. The information indicating the position of the defect area includes, for example, coordinates of a predetermined position such as the center position of the defect area in the block. For example, coordinates indicating the position on the substrate 90 may be used as the information indicating the position of the defect area. The information indicating the size of the defective area may be information indicating the vertical and horizontal dimensions of the defective area, for example, or may be information indicating the number of pixels in the image data. Here, for example, the defect image data may be image data that captures the entire inspection surface of the substrate 90. In this case, the defect information may not include, for example, information indicating the block position and information indicating the block size.

  Further, the processing unit 16, for example, based on a determination result related to the presence / absence of a defect for each block on the surface to be inspected, information (standard data) regarding image data (also referred to as standard image data) that captures a block in which no defect exists. (Also referred to as information), and the standard information is transmitted to the control unit 13. The standard information may include, for example, identification information for identifying standard image data that captures a block determined to have no defect and information indicating the size of the block. The identification information related to the standard image data includes, for example, a data file name. Thereby, for example, a state in which standard image data and standard information are associated with each other is realized. The information indicating the block size includes, for example, vertical and horizontal dimensions of the substrate 90.

  Here, for example, the standard image data may be image data that captures the entire surface to be inspected of the substrate 90. In this case, for example, in the processing unit 16 or the defect confirmation device 3, reference image data to be described later corresponding to the defect image data is extracted from the standard image data based on the defect information associated with the defect image data. Also good. In this case, for example, reference image data corresponding to the defect image data can be extracted from the standard image data based on the information indicating the position of the block and the information indicating the size of the block included in the defect information. .

  The storage device 17 stores, for example, a defect information group including image data obtained by the imaging unit 15 and one or more pieces of defect information obtained by the processing unit 16 based on the control of the control unit 13. it can. The storage device 17 can be composed of a storage medium such as a hard disk or a flash memory. Here, in the image data obtained by the imaging unit 15 stored in the storage device 17, for example, it is determined that standard image data that captures a block in which no defect exists, and that a defect exists. And defect image data that captures the processed blocks. The storage device 17 may store the standard image data and the defect image data in which the corresponding blocks are captured for the different substrates 90 in an associated state. The standard image data can be used, for example, as image data (also referred to as reference image data) serving as a reference for comparison in which a block in which no defect exists is captured in the defect confirmation apparatus 3 described later. Further, the storage device 17 can store, for example, a program and various data for realizing various functions in the control unit 13.

  The communication unit 18 has a function of performing data communication with the defect confirmation device 3 through the communication line 2, for example. For example, in response to a request from the defect confirmation device 3, the communication unit 18 corresponds to the defect image data, defect information related to the defect image data, and the defect image data stored in the storage device 17. Reference image data or the like can be transmitted to the defect confirmation device 3. The defect image data and the reference image data corresponding to the defect image data are image data obtained by capturing the same part of the same size of the inspection surface of the substrate 90 as the inspection object. For example, the communication unit 18 may transmit standard image data and standard information.

  In the above description, the surface to be inspected of the substrate 90 is imaged and inspected for each block. However, the surface to be inspected of the substrate 90 may be imaged and inspected without being divided into blocks. Good. In this case, after the inspection is performed, the surface to be inspected of the substrate is divided into blocks, and a block determined to have a defect can be used as defect image data. In addition, a predetermined area image including a position where it is determined that a defect exists can be used as defect image data without dividing the inspection surface of the substrate 90 into blocks.

<1-3. Configuration of defect confirmation device>
FIG. 3 is a block diagram illustrating an example of an electrical configuration of the defect confirmation apparatus 3. For example, the defect confirmation device 3 uses the defect image data determined by the inspection device 1 as a defect as image data that is a confirmation target (also referred to as a confirmation target) that may have detected a defect. This is a device for confirming whether or not a true defect (also referred to as a true defect) exists. In other words, the defect confirmation device 3 is a device for confirming the presence or absence of defects in the inspection object.

  As shown in FIG. 3, the defect confirmation apparatus 3 is realized by an information processing apparatus 30 such as a computer, for example, and is connected via a bus line Bu1, a communication unit 31, an input unit 32, an output unit 33, and a storage. A unit 34, a control unit 35, and a drive 36 are provided.

  For example, the communication unit 31 has a function of performing data communication with the inspection apparatus 1 via the communication line 2. The communication unit 31 can receive, for example, defect image data, defect information related to the defect image data, reference image data corresponding to the defect image data, and the like transmitted from the communication unit 18 of the inspection apparatus 1. . For example, the communication unit 31 may receive standard image data transmitted from the communication unit 18 of the inspection apparatus 1.

  The input unit 32 has a function capable of inputting a signal corresponding to, for example, an operation of a user who uses the defect checking device 3. The input unit 32 can include, for example, an operation unit, a microphone, and various sensors. The operation unit may include a mouse, a keyboard, and the like that can input a signal corresponding to a user operation. The microphone can input a signal corresponding to the user's voice. Various sensors can input signals corresponding to the movement of the user.

  The output unit 33 has a function of outputting various information such as image data, for example. The output unit 33 can include, for example, a display unit, a projector, a speaker, and the like. For example, the display unit can visually output various types of information in a manner that the user can recognize. For example, a liquid crystal display and an organic EL display can be applied to the display unit. In the display unit, the display panel serves as a region (also referred to as a display region) in which various types of information are visibly output. This display unit may have a form of a touch panel integrated with the input unit 32. For example, the projector can output various information on a projection object such as a screen in a manner that the user can recognize. Here, the projector and the projection object cooperate to serve as a display unit that visually outputs various types of information in a manner that the user can recognize. At this time, for example, a region in which various information is visibly output on the projection object serves as a display region. For example, the speaker can audibly output various types of information in a manner that the user can recognize.

  The storage unit 34 has a function capable of storing various information, for example. The storage unit 34 can be configured by a storage medium such as a hard disk or a flash memory, for example. The storage unit 34 employs, for example, a configuration having one storage medium, a configuration having two or more storage media integrally, and a configuration having two or more storage media divided into two or more parts. May be. In the storage unit 34, for example, a program Pg1 and various data Id1 can be stored. The various data Id1 can include, for example, defect image data received by the communication unit 31 and defect information related to the defect image data. Further, the various data Id1 may include, for example, reference image data or standard image data corresponding to the defect image data received by the communication unit 31.

  The control unit 35 includes, for example, an arithmetic processing unit 35a that functions as a processor and a memory 35b that temporarily stores information. For example, an electric circuit such as a central processing unit (CPU) can be applied to the arithmetic processing unit 35a. In this case, the arithmetic processing unit 35a may have, for example, one or more processors. For example, a random access memory (RAM) or the like can be applied to the memory 35b. In the arithmetic processing unit 35a, for example, the information processing device 30 can function as the defect checking device 3 by reading and executing the program Pg1 stored in the storage unit 34. Various information temporarily obtained by various information processing in the control unit 35 can be appropriately stored in the memory 35b or the like.

  The drive 36 is, for example, a part where a portable storage medium RM1 can be attached and detached. In the drive 36, for example, data can be exchanged between the storage medium RM1 and the control unit 35 in a state where the storage medium RM1 is mounted. Here, for example, the program Pg1 may be read from the storage medium RM1 and stored in the storage unit 34 by mounting the storage medium RM1 storing the program Pg1 in the drive 36. Further, for example, defect image data and defect information related to the defect image data may be read from the storage medium RM1 into the storage unit 34 and stored as at least a part of the various data Id1. Further, for example, reference image data or standard image data corresponding to defect image data may be read from the storage medium RM1 into the storage unit 34 and stored as at least part of the various data Id1.

  FIG. 4 is a block diagram illustrating an example of a functional configuration of the defect checking device 3 realized by processing in the arithmetic processing unit 35a. FIG. 4 illustrates various functions relating to data processing realized by the execution of the program Pg1 in the arithmetic processing unit 35a.

  As illustrated in FIG. 4, the arithmetic processing unit 35 a includes, as the functional configuration realized, for example, a signal reception unit 351, an acquisition unit 352, a storage control unit 353, and an output control unit 354. is doing. For example, the memory 35b is used as a work space in the processing in each of these units 351 to 354. Note that at least a part of the functional configuration realized by the arithmetic processing unit 35a may be configured by hardware such as a dedicated electronic circuit, for example.

  For example, the signal receiving unit 351 has a function of receiving a signal input from the input unit 32.

  For example, the acquisition unit 352 receives defect image data and reference image data corresponding to the defect image data from the communication unit 31, the storage unit 34, the drive 36, and the like for the same portion of the substrate 90 as the inspection target. And, it has a function that can be acquired. The acquisition unit 352 has a function of acquiring defect information related to the defect image data, for example.

  For example, the storage control unit 353 has a function of storing various data obtained by the processing in the arithmetic processing unit 35a in at least one of the storage unit 34 and the memory 35b.

  For example, the output control unit 354 visually displays the defect image data and the reference image data corresponding to the defect image data in the same display area of the display unit at least once in time sequence by the output unit 33. It has a function that can be output. Accordingly, the user can compare the defect image related to the defect image data with the reference image related to the reference image data corresponding to the defect image data without moving the line of sight. For this reason, for example, it becomes difficult for the user to overlook the true defect in the inspection object, and it becomes difficult to get tired. As a result, for example, the confirmation accuracy in the work of confirming the defect of the inspection object can be improved.

  Here, a display example of a screen on which defect image data, reference image data, and the like are visually output will be described.

  FIG. 5 is a diagram schematically illustrating an example of a screen (also referred to as a defect selection screen) Sn0 for selecting defect image data to be visually output by the output unit 33 for one substrate 90. As shown in FIG. 5, the defect selection screen Sn0 includes, for example, a first display area Ar1, a second display area Ar2, and a third display area Ar3. The first display area Ar1 is an area for displaying defect information, for example. The second display area Ar2 is an area for displaying an image. In the example of FIG. 5, a thumbnail image Si1 related to one or more defect image data for one substrate 90 is displayed in the second display area Ar2. The third display area Ar3 is an area indicating the position of the block related to the defect image data in the substrate 90. In the example of FIG. 5, the outer edge of the block related to the defect image data is indicated by a frame Fr1 on the entire image (also referred to as an entire image) Su0 of the substrate 90. On the defect selection screen Sn0, the user can select a desired thumbnail image Si1 among the thumbnail images Si1 related to one or more defect image data displayed in the second display area Ar2 with the mouse pointer M1. Accordingly, desired defect image data can be selected from one or more defect image data as defect image data that is a confirmation target for confirming the presence or absence of a true defect. Here, the operation of the mouse pointer M1 is displayed by the output control unit 354 based on the signal received by the signal receiving unit 351 in response to a signal input according to the user's operation at the input unit 32, for example. obtain. In the example of FIG. 5, by pressing the confirmation start button B0 with the mouse pointer M1, any defect image data is selected from one or more defect image data, and a defect image that is a confirmation target for confirming the presence or absence of a true defect. It is also possible to start an operation of automatically selecting in order as data.

  FIG. 6 is a diagram illustrating an example of a screen (also referred to as a defect confirmation screen) Sn1 for confirming a defect. As shown in FIG. 6, the defect confirmation screen Sn1 includes a first display area Ar1, a second display area Ar2, and a third display area Ar3, for example, as in the defect selection screen Sn0. On the defect confirmation screen Sn1, for example, in the second display area Ar2, an image (also referred to as a defect image) Im1 related to the defect image data to be confirmed selected on the defect selection screen Sn0 or the like is displayed large. In the example of FIG. 6, the defect image Im <b> 1 includes various patterns Pt <b> 1 on the substrate 90. At this time, for example, on the entire image Su0 in the third display area Ar3, the frame Fr1 or the frame so that the block related to the defect image Im1 displayed in the second display area Ar2 can be distinguished from other blocks. The display mode in Fr1 may be changed.

  FIG. 7 is a diagram illustrating an example of a screen (also referred to as a reference confirmation screen) Sn2 on which the reference image data is visually output. As shown in FIG. 7, the reference confirmation screen Sn2 is an image in which the defect image Im1 displayed in the second display area Ar2 in the defect confirmation screen Sn1 is related to the reference image data corresponding to the defect image Im1 (reference This is also a screen that has been changed to Im2. At this time, for example, the defect image Im1 and the reference image Im2 displayed in the second display area Ar2 may be images of the same size with respect to the same part of the same size of the surface to be inspected.

  Here, if the defect confirmation screen Sn1 shown in FIG. 6 and the reference confirmation screen Sn2 shown in FIG. 7 are displayed at least once in time sequence, the user can move the same line of sight without moving the line of sight. It is possible to compare the defect image Im1 and the reference image Im2 displayed in time sequence in the second display area Ar2. Thereby, for example, it becomes difficult for the user to overlook a true defect in the substrate 90 and to become tired. As a result, for example, the confirmation accuracy in the work of confirming the defect of the substrate 90 can be improved. Here, for example, the reference confirmation screen Sn2 may be displayed after the defect confirmation screen Sn1 is displayed, or the defect confirmation screen Sn1 may be displayed after the reference confirmation screen Sn2 is displayed. At this time, the switching between the defect confirmation screen Sn1 and the reference confirmation screen Sn2 may be, for example, an automatic switching based on a preset rule, or input by the input unit 32 in accordance with a user operation. Manual switching in response to a signal may be used.

  Here, for example, the output control unit 354 can visually recognize an element that allows the user to visually recognize a portion where there is a possibility of a defect, along with the defect image data. It may have a function that can be output automatically. In this case, for example, as shown in FIG. 6, in the defect image Im1 on the defect confirmation screen Sn1, a defect area determined to have a defect in the inspection apparatus 1 is indicated by display elements Fm11 and Fm12. May be. For the display elements Fm11 and Fm12, a frame positioned so as to surround the defect area is employed. In the output control unit 354, the position and size of the defect area in the defect image Im1 can be set based on, for example, information related to the position and size of the defect area included in the defect information. If such a configuration is adopted, for example, the user can easily find a true defect in the substrate 90. As a result, for example, the user can confirm the presence / absence of defects in the substrate 90 with high accuracy.

  Here, for example, the output control unit 354 may cause the output unit 33 to alternately and visually output the defect image data and the reference image data in the same display area of the display unit. In this case, for example, the defect confirmation screen Sn1 shown in FIG. 6 and the reference confirmation screen Sn2 shown in FIG. 7 may be displayed alternately. At this time, for example, the defect confirmation screen Sn1 and the reference confirmation screen Sn2 can be switched at a preset timing. As this preset timing, for example, a preset timing interval is employed. If such a configuration is adopted, for example, in the same second display area Ar2, defect image data and reference image data are alternately and visually output for the same part of the same size. For this reason, the user can easily compare the defect image Im1 and the reference image Im2 without moving the line of sight. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, for the substrate 90, the confirmation accuracy in the work of confirming defects can be further improved.

  In addition, here, the output control unit 354, for example, in response to the input of the first signal by the input unit 32 according to the first operation by the user, the output unit 33 causes the defect image in the same second display area Ar2. You may have the function which can stop the process (it is also called an alternate output process) which outputs data and reference | standard image data alternately visually. In this case, for example, when the defect confirmation screen Sn1 shown in FIG. 6 and the reference confirmation screen Sn2 shown in FIG. 7 are alternately displayed, any of the defect confirmation screen Sn1 and the reference confirmation screen Sn2 is displayed. The display switching may be stopped in a state where is displayed. In the example of FIG. 6, if display switching is stopped by pressing the stop button B1 on the defect confirmation screen Sn1 with the mouse pointer M1, the state where the defect confirmation screen Sn1 is displayed is maintained. In the example of FIG. 7, when the switching of the display is stopped by pressing the stop button B1 on the reference confirmation screen Sn2 with the mouse pointer M1, the state where the reference confirmation screen Sn2 is displayed is maintained. If such a configuration is adopted, for example, the user can calmly check whether there is a true defect in the inspection object at his / her own pace.

  In the example of FIGS. 6 and 7, the stop of display switching may be canceled by pressing the stop button B1 again with the mouse pointer M1. That is, the output control unit 354, for example, in response to an input of a predetermined signal by the input unit 32 according to a predetermined operation by the user, the output unit 33 causes the defect image data and the reference in the same second display area Ar2. You may have the function which can cancel | release the state in which the alternate output process which outputs image data alternately visually is stopped, and can restart an alternate output process. Here, for example, the stop button B1 may indicate that the alternate output process is stopped by a color change or a character change in response to a first press by the mouse pointer M1, and the mouse pointer M1. It may be indicated that the alternate output processing is being executed by changing the color or changing the character in response to the second press of the button. For example, so-called inversion processing is applied to the color change. For the character change, for example, a character change between stop (STOP) and restart (RESTART) is applied.

  Here, for example, in response to the stop of the alternate output process, the output control unit 354 causes the output unit 33 to output the defect image data and an element related to the defect image that can be recognized by the user. It may have a function capable of The element related to the defect image may be an element that makes it possible to recognize that the defect image Im1 is displayed by the user, for example. For example, the first mark Mk1 displayed by the output unit 33 near the defect image Im1 or on the defect image Im1 is applied to the element related to the defect image. The first mark Mk1 includes, for example, a specific character element as shown in FIG. 6 (“defect” in the example of FIG. 6), a specific design, a specific monogram, a specific frame surrounding the defect image Im1, or a defect image. A specific background color of Im1 is applied. If such a configuration is adopted, for example, the user can recognize whether the displayed image is the defect image Im1 or the reference image Im2. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, for the substrate 90, the confirmation accuracy in the work of confirming defects can be further improved.

  Here, for example, in response to the stop of the alternate output process, the output control unit 354 causes the output unit 33 to output elements related to the reference image that can be recognized by the user together with the reference image data. It may have a function capable of The element relating to the reference image may be an element that makes it possible to recognize that the reference image Im2 is displayed by the user, for example. For example, the second mark Mk2 displayed near the reference image Im2 or on the reference image Im2 by the output unit 33 is applied to the element related to the reference image. The second mark Mk2 includes, for example, a specific character element as shown in FIG. 7 (“reference” in the example of FIG. 7), a specific design, a specific monogram, a specific frame surrounding the reference image Im2, or a reference image A specific background color of Im2 or the like is applied. If such a configuration is adopted, for example, the user can recognize whether the displayed image is the defect image Im1 or the reference image Im2. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, for the substrate 90, the confirmation accuracy in the work of confirming defects can be further improved.

  In the example of FIGS. 6 and 7, the defect image data as the confirmation target may be moved to the next defect image data by pressing the next button B2 with the mouse pointer M1. That is, the output control unit 354, for example, in response to the input of a predetermined signal by the input unit 32 according to a predetermined operation by the user, the output unit 33 causes the next defect image data and the next defect image data to be input. It is possible to have a function that allows the reference image data corresponding to to be output in a time sequential manner at least once. Further, the defect image data and the reference image data obtained by the inspection may be displayed in order as in the examples of FIGS. 6 and 7 without displaying the defect selection screen of FIG.

<1-4. Operation of defect checker>
FIG. 8 to FIG. 10 are flowcharts showing an example of an operation flow of the defect confirmation device 3 for a defect confirmation method for confirming the presence or absence of defects in the inspection object using the defect confirmation device 3. This operation flow is started in response to, for example, input of a signal through the input unit 32 by the user. Here, for example, by pressing the confirmation start button B0 on the defect selection screen Sn0 with the mouse pointer M1, any defect image data is automatically selected as defect image data to be confirmed from one or more defect image data. An example of the operation flow will be described.

  First, in step S <b> 1 of FIG. 8, the acquisition unit 352 acquires defect information for one substrate 90 as one inspection object among the one or more substrates 90. Here, for example, the acquisition unit 352 may acquire one piece of defect information from the defect information group from the inspection apparatus 1 via the communication line 2 and the communication unit 31, or from the storage unit 34 or the storage medium RM1. One defect information in the defect information group may be acquired.

  Next, in step S2, the acquisition unit 352 acquires one piece of defect image data as a confirmation target. Here, the acquisition unit 352 acquires one piece of defect image data based on, for example, the identification information included in the defect information acquired in step S1. For example, the acquisition unit 352 may acquire one defect image data from the inspection apparatus 1 via the communication line 2 and the communication unit 31, or acquire one defect image data from the storage unit 34 or the storage medium RM1. May be.

  Next, in step S3, the acquisition unit 352 acquires one reference image data corresponding to one defect image data acquired in step S2. Here, for example, the acquisition unit 352 performs inspection via the communication line 2 and the communication unit 31 using, as reference image data, one standard image data that captures the same block as one defect image data acquired in step S2. You may acquire from the apparatus 1 and you may acquire from the memory | storage part 34 or storage medium RM1. Further, the acquisition unit 352 extracts one reference image data by extracting the reference image data corresponding to the defect image data from the standard image data that captures the entire inspection surface of the substrate 90 based on the defect information, for example. May be obtained. In this way, for example, in the processing from step S1 to step S3, the acquisition unit 352 can detect defect image data that may have detected a defect, for example, for the same portion of the same size of the substrate 90 as the inspection object. The reference image data serving as a reference corresponding to the defect image data can be acquired.

  Next, in step S4, the output control unit 354 causes the output unit 33 to visually output the defect image data acquired in step S2 to the display area. At this time, for example, the defect confirmation screen Sn1 as shown in FIG.

  Next, in step S5, the output control unit 354 determines whether or not to stop the alternate output process. Here, for example, if the first signal is not input by the input unit 32 according to the first operation by the user, the output control unit 354 does not determine that the alternate output process is stopped, and proceeds to step S6. . On the other hand, for example, if the first signal is input by the input unit 32 according to the first operation by the user, the output control unit 354 determines that the alternate output process is to be stopped, and proceeds to step S21 in FIG. .

  In step S6, the arithmetic processing unit 35a determines whether or not to move the defect image data as the confirmation target to the next defect image data. Here, for example, if a predetermined signal is not input by the input unit 32 in accordance with an operation by the user, it is not determined that the defect image data to be confirmed is to be transferred to the next defect image data, and the process proceeds to step S7. move on. On the other hand, for example, if a predetermined signal is input by the input unit 32 according to the operation by the user, it is determined that the defect image data to be confirmed is transferred to the next defect image data, and the process proceeds to step S10.

  In step S7, the output control unit 354 visually displays the reference image data acquired in step S3 in the same display region as the display region in which the defect image data is visually output in step S4 by the output unit 33. Output. At this time, for example, the reference confirmation screen Sn2 as shown in FIG. In other words, for example, by the processing in step S4 and step S7, the output control unit 354 causes the output unit 33 to display the defect image data acquired in step S2 in the same display area and the reference acquired in step S3. The image data can be visually output at least once time-sequentially. Thereby, for example, the defect image data and the reference image data are visually output in time sequence for the same part of the same size in the same display area, so that the user can move the defect without moving the line of sight. The image Im1 can be compared with the reference image Im2. For this reason, for example, the user is less likely to overlook the true defect of the substrate 90 and is less likely to get tired. As a result, for example, the confirmation accuracy in the work of confirming the defect of the substrate 90 can be improved.

  Next, in step S8, the output control unit 354 determines whether or not to stop the alternate output process. Here, for example, if the first signal is not input by the input unit 32 according to the first operation by the user, the output control unit 354 does not determine that the alternate output process is stopped, and proceeds to step S9. . On the other hand, for example, if the first signal is input by the input unit 32 according to the first operation by the user, the output control unit 354 determines that the alternate output process is to be stopped, and proceeds to step S31 in FIG. .

  In step S9, the arithmetic processing unit 35a determines whether or not to transfer the defect image data as the confirmation target to the next defect image data. Here, for example, if a predetermined signal is not input by the input unit 32 in accordance with an operation by the user, it is not determined that the defect image data to be confirmed is transferred to the next defect image data, and the process proceeds to step S4. Return. At this time, for example, the process from step S4 to step S9 is repeated until it is determined that the defect image data as the confirmation target is transferred to the next defect image data. In other words, for example, in the processing from step S4 to step S9, the output control unit 354 causes the output unit 33 to alternately display defect image data and reference image data corresponding to the defect image data in the same display area. It is possible to execute an alternate output process for visual output. At this time, for example, the defect confirmation screen Sn1 as shown in FIG. 6 and the reference confirmation screen Sn2 as shown in FIG. Thereby, for example, the defect image data and the reference image data are alternately and visually output for the same part of the same size in the same display region, so that the user can move the defect image without moving the line of sight. Im1 and the reference image Im2 can be easily compared. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, for the substrate 90, the confirmation accuracy in the work of confirming defects can be further improved.

  On the other hand, in step S9, for example, if a predetermined signal is input by the input unit 32 according to the operation by the user, it is determined that the defect image data as the confirmation target is to be transferred to the next defect image data, and step S10. Proceed to At this time, for example, with respect to defect image data confirmed for the presence or absence of a true defect, a mode in which information indicating that the defect has been confirmed or information indicating a confirmation result is attached to the defect information related to the defect image data is considered. It is done.

  In step S10, the arithmetic processing unit 35a determines whether or not all defect image data for one substrate 90 as one inspection object is a confirmation target based on the defect information acquired in step S1. . Here, for example, if it is not determined by the arithmetic processing unit 35a that all the defect image data for one substrate 90 is to be confirmed, the process returns to step S2. At this time, the acquisition unit 352 acquires, for example, one defect image data as the next confirmation target based on the identification information included in the defect information acquired in step S1. On the other hand, in step S10, for example, if it is determined by the arithmetic processing unit 35a that all the defect image data for one substrate 90 is the target of confirmation, the process proceeds to step S11.

  In step S11, it is determined whether the arithmetic processing unit 35a has confirmed whether or not there is a true defect for all the substrates 90 as all inspection objects. Here, for example, the arithmetic processing unit 35a determines whether or not there is a true defect for all the substrates 90 based on the defect information group stored in any of the storage device 17, the storage unit 34, and the storage medium RM1 of the inspection apparatus 1. It can be determined whether or not it has been confirmed. Here, for example, if it is not determined by the arithmetic processing unit 35a that all substrates 90 have been checked for the presence or absence of true defects, the process returns to step S1. At this time, the acquisition unit 352 acquires defect information for the next one substrate 90 as the next one inspection object among the one or more substrates 90, for example. On the other hand, in step S11, if it is determined by the arithmetic processing unit 35a that all substrates 90 have been checked for the presence or absence of true defects, the operation flow ends.

  In step S <b> 21 of FIG. 9, the output control unit 354 causes the output unit 33 to visually output defect image data. Here, for example, when the process proceeds from step S5 in FIG. 8 to step S21, the output control unit 354 outputs in response to the input of the first signal by the input unit 32 according to the first operation by the user. By causing the unit 33 to stop the alternate output process, the defect image data is visibly output. Thereby, for example, the state in which the defect confirmation screen Sn1 as shown in FIG. 6 is displayed by the output unit 33 can be maintained. Thus, for example, if the user can stop the alternate output process in which the defect image data and the reference image data are alternately and visually output, the user can calmly determine whether there is a true defect in the substrate 90 at his / her own pace. Can be confirmed.

  In this step S21, for example, the output control unit 354 causes the output unit 33 to view elements that allow the user to visually recognize a portion where a defect may exist, along with the defect image data. May be output automatically. In this case, for example, as shown in FIG. 6, in the defect image Im1 on the defect confirmation screen Sn1, a defect area determined to have a defect in the inspection apparatus 1 is indicated by display elements Fm11 and Fm12. Can be done. If such a configuration is adopted, for example, the user can easily find a true defect in the substrate 90. As a result, for example, the user can confirm the presence / absence of defects in the substrate 90 with high accuracy.

  Further, for example, when the process proceeds from step S5 of FIG. 8 to step S21, in this step S21, the output control unit 354 responds to the stop of the alternate output process by the output unit 33 together with the defect image data. An element related to the defect image that can be recognized by the user may be output. The element related to the defect image may be an element that makes it possible to recognize that the defect image Im1 is displayed by the user, for example. For example, the first mark Mk1 displayed by the output unit 33 near the defect image Im1 or on the defect image Im1 is applied to the element related to the defect image. For example, a specific character element, a specific design, a specific monogram, a specific frame surrounding the defect image Im1, or a specific background color of the defect image Im1 is applied to the first mark Mk1. The If such a configuration is adopted, for example, the user can recognize whether the displayed image is the defect image Im1 or the reference image Im2. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, for the substrate 90, the confirmation accuracy in the work of confirming defects can be further improved.

  In the next step S22, the output control unit 354 determines whether or not a signal for switching the displayed image is input. Here, for example, if a predetermined signal for switching the image displayed by the input unit 32 in accordance with a predetermined operation by the user is not input, the process proceeds to step S23. On the other hand, in step S22, for example, if a predetermined signal for switching the image displayed by the input unit 32 according to a predetermined operation by the user is input, the process proceeds to step S31 in FIG. Thereby, for example, the user manually performs display switching in which the reference image data corresponding to the defect image data is visually output to the display area where the defect image data is visually output by the output unit 33. be able to. If such a configuration is adopted, for example, the user can change the screen displayed by the output unit 33 at an arbitrary timing from the defect confirmation screen Sn1 as shown in FIG. 6 to the one shown in FIG. Can be switched to a new reference confirmation screen Sn2. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, the user can confirm the presence / absence of defects in the substrate 90 with high accuracy.

  In the next step S23, the output control unit 354 determines whether or not to resume the alternate output process. Here, for example, if a predetermined signal for resuming the alternate output process is not input by the input unit 32 according to a predetermined operation by the user, the output control unit 354 determines that the alternate output process is to be resumed. Without returning, it returns to step S21. Here, while the processing from step S21 to step S23 is repeatedly performed, the output control unit 354 causes the output unit 33 to stop the alternate output processing and to visually output the defect image data. Maintain state. For example, the state where the defect confirmation screen Sn1 as shown in FIG. 6 is displayed by the output unit 33 is maintained. On the other hand, in step S23, for example, if a predetermined signal for restarting the alternate output process is input by the input unit 32 in accordance with a predetermined operation by the user, the output control unit 354 restarts the alternate output process. It returns to step S4 of FIG. Thereby, the stop of the alternate output process is released.

  In step S <b> 31 of FIG. 10, the output control unit 354 causes the output unit 33 to output the reference image data visually. Here, for example, when the process proceeds from step S8 in FIG. 8 to step S31, the output control unit 354 outputs in response to the input of the first signal by the input unit 32 according to the first operation by the user. By stopping the alternate output process by the unit 33, the reference image data is visibly output. Thereby, for example, the state where the reference confirmation screen Sn2 as shown in FIG. 7 is displayed by the output unit 33 can be maintained. Thus, for example, if the user can stop the alternate output process in which the defect image data and the reference image data are alternately and visually output, the user can calmly determine whether there is a true defect in the substrate 90 at his / her own pace. Can be confirmed.

  In step S31, for example, in response to the stop of the alternate output process, the output control unit 354 causes the output unit 33 to output the elements related to the reference image that can be recognized by the user together with the reference image data. Also good. The element relating to the reference image may be an element that makes it possible to recognize that the reference image Im2 is displayed by the user, for example. For example, the second mark Mk2 displayed near the reference image Im2 or on the reference image Im2 by the output unit 33 is applied to the element related to the reference image. For example, a specific character element, a specific design, a specific monogram, a specific frame surrounding the reference image Im2, a specific background color of the reference image Im2, or the like is applied to the second mark Mk2. The If such a configuration is adopted, for example, the user can recognize whether the displayed image is the defect image Im1 or the reference image Im2. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, for the substrate 90, the confirmation accuracy in the work of confirming defects can be further improved.

  In the next step S32, the output control unit 354 determines whether or not a signal for switching the displayed image has been input. Here, for example, if a predetermined signal for switching the image displayed by the input unit 32 according to a predetermined operation by the user is not input, the process proceeds to step S33. On the other hand, in step S32, for example, if a predetermined signal for switching the image displayed by the input unit 32 according to a predetermined operation by the user is input, the process proceeds to step S21 in FIG. Accordingly, for example, the user manually performs display switching in which the defect image data corresponding to the reference image data is visually output to the display area where the reference image data is visually output by the output unit 33. be able to. If such a configuration is adopted, for example, the user can change the screen displayed by the output unit 33 at an arbitrary timing as shown in FIG. 6 from the reference confirmation screen Sn2 as shown in FIG. It is possible to switch to the correct defect confirmation screen Sn1. Thereby, for example, the user can easily find a true defect in the substrate 90. As a result, for example, the user can confirm the presence / absence of defects in the substrate 90 with high accuracy.

  In the next step S33, the output control unit 354 determines whether or not to resume the alternate output process. Here, for example, if a predetermined signal for resuming the alternate output process is not input by the input unit 32 according to a predetermined operation by the user, the output control unit 354 determines that the alternate output process is to be resumed. Without returning, it returns to step S31. Here, while the processing from step S31 to step S33 is repeatedly performed, the output control unit 354 causes the output unit 33 to stop the alternate output processing and to visually output the reference image data. Maintain state. For example, the state where the reference confirmation screen Sn2 as shown in FIG. 7 is displayed by the output unit 33 is maintained. On the other hand, in step S33, for example, when a predetermined signal for restarting the alternate output process is input by the input unit 32 in accordance with a predetermined operation by the user, the output control unit 354 restarts the alternate output process. It returns to step S7 of FIG. Thereby, the stop of the alternate output process is released.

  With the above operation flow, for example, the user can check the presence or absence of a true defect in the substrate 90 by comparing the defect image Im1 and the reference image Im2 without moving the line of sight. In the defect confirmation device 3, for example, in response to a signal input from the input unit 32 according to the user's operation, information indicating a confirmation result about the presence or absence of a true defect by the user can be added to the defect information or the like. May be. Further, for example, the user may classify the substrate 90 into a non-defective product and a defective product according to a confirmation result about the presence or absence of a true defect.

<1-5. Summary of First Embodiment>
As described above, in the defect confirmation apparatus 3 according to the first embodiment, for example, defect image data and reference image data are visually output in time sequence for the same part of the same size in the same display area. . For this reason, for example, the user can compare the defect image Im1 and the reference image Im2 without moving the line of sight. Thereby, for example, it becomes difficult for the user to overlook the true defect of the substrate 90 as the inspection object, and it becomes difficult to get tired. As a result, for example, the confirmation accuracy in the work of confirming the defect of the substrate 90 as the inspection object can be improved.

<2. Other Embodiments>
The present invention is not limited to the first embodiment described above, and various modifications and improvements can be made without departing from the spirit of the present invention.

<2-1. Second Embodiment>
In the first embodiment, for example, the reference image data is not limited to standard image data obtained by the imaging unit 15 in the inspection apparatus 1 or image data extracted from the standard image data. The reference image data may be standard image data obtained by an apparatus other than the inspection apparatus 1 or image data extracted from the standard image data. Furthermore, the reference image data may be, for example, an image related to a design drawing drawn by a computer-aided design (CAD) technique or the like for the substrate 90 as an inspection object. In this case, for example, the reference image data may be image data in which the shape of the surface to be inspected of the substrate 90 is drawn only by a line drawing, or may be image data in which each part is colored. When such a configuration is adopted, instead of the reference confirmation screen Sn2, for example, as shown in FIG. 11, an image displayed in the second display area Ar2 is created by a CAD technique or the like. A reference confirmation screen Sn2A that is a reference image Im2A based on the reference image data may be employed.

<2-2. Third Embodiment>
In each of the above embodiments, for example, even if there is a period in which the first period in which the defect image data is visibly output and the second period in which the reference image data is visibly output exist. Good. In this case, for example, the output control unit 354 causes the output unit 33 to change the visible output state of the image data in the same display area from the first output state to the third output state. You may have the function which can be made to change to. Here, the first output state is a state in which one of the defect image data and the reference image data (also referred to as first image data) is visually output. The second output state is a state in which the defect image data and the reference image data are visually output so as to be superimposed. The third output state is a state in which other image data (also referred to as second image data) different from the first image data among the defect image data and the reference image data is visually output. Here, for example, if the first image data is defective image data, the second image data is reference image data. For example, if the first image data is reference image data, the second image data is Defect image data. Thereby, for example, by the processing of step S4 and step S7 described above, the output control unit 354 is acquired by the output unit 33 in the same display area and the defect image data acquired in step S2 and in step S3. When the reference image data is visually output at least once time-sequentially, the visual output state of the image data in the same display area is changed from the first output state to the second output state, It is possible to transition up to 3 output states.

  In this case, in the second output state, for example, a configuration in which at least one of the first image data and the second image data is visually output in a translucent display mode is conceivable. Here, for example, if the reference image Im2A based on the reference image data is image data in which the shape of the surface to be inspected is drawn only by a line drawing, the first image data and the second image data are simply obtained in the second output state. You may output visually so that it may overlap. FIG. 12 is a diagram illustrating an example of the superimposition confirmation screen Sn3B according to the third embodiment. The overlay confirmation screen Sn3B is visibly output based on the defect confirmation screen Sn1 and the reference confirmation screens Sn2 and Sn2A described above so that the defect image data and the reference image data are superimposed on the same second display area Ar2. This is a screen on which an image (also referred to as a superimposed image) Im12B is displayed. The superimposed image Im12B has a display mode in which, for example, the defect image Im1 and the reference images Im2 and Im2A for the same part of the same size are superimposed.

  Thus, for example, if there is a time zone that is visually output so that the defect image data and the reference image data are superimposed, the user is visually output based on the defect image data. It is possible to easily recognize the difference between the defect image Im1 and the reference images Im2 and Im2A output based on the reference image data.

  Here, the output control unit 354 relates to a superimposed image that can be recognized by the user together with the defect image data and the reference image data when the output unit 33 realizes the second output state, for example. You may have the function which can output an element. The element related to the superimposed image may be an element that makes it possible to recognize that the superimposed image Im12B is displayed by the user, for example. For example, the third mark Mk3 displayed by the output unit 33 near or on the superimposed image Im12B is applied to the element related to the superimposed image. The third mark Mk3 includes, for example, a specific character element as shown in FIG. 12 (“superimposition” in the example of FIG. 12), a specific design, a specific monogram, a specific frame surrounding the superimposed image Im12B, or a superimposed image. A specific background color of Im12B or the like is applied. If such a configuration is adopted, for example, the user can recognize that the displayed image is the superimposed image Im12B.

<2-3. Fourth Embodiment>
In each of the above embodiments, for example, the output control unit 354 stops the alternate output process, and then responds to the input of the second signal by the input unit 32 according to the second operation by the user, and then the output unit 33. Thus, it may have a function that allows the defect image data and the reference image data to be visually output so as to overlap in the same display area. In this case, for example, the output control unit 354 causes the output unit 33 to visually output the defect image data in response to the input of the second signal by the input unit 32 according to the second operation by the user. It is also possible to make a transition from the existing state to the state in which the defect image data and the reference image data are visually output so as to overlap. Further, for example, the output control unit 354 responds to the input of the second signal by the input unit 32 according to the second operation by the user from the state in which the reference image data is visually output by the output unit 33. Alternatively, the defect image data and the reference image data may be transitioned to a state in which the defect image data and the reference image data are visually output.

  For example, in the defect confirmation screen Sn1 shown in FIG. 6, when the overlap execution button B3 is pressed with the mouse pointer M1, the output control unit 354 displays the screen displayed by the output unit 33 as the defect confirmation screen Sn1. From the above, it is possible to change to the superposition confirmation screen Sn3B shown in FIG. Further, for example, in the reference confirmation screen Sn2A shown in FIG. 11, when the superimposition execution button B3 is pressed with the mouse pointer M1, the output control unit 354 displays the screen displayed by the output unit 33 as a reference confirmation. A mode of transition from the screen Sn2A to the overlay confirmation screen Sn3B shown in FIG. 12 is conceivable. At this time, for example, in the superimposition confirmation screen Sn3B, when the superposition cancellation button B4 is pressed with the mouse pointer M1, the output control unit 354 causes the output unit 33 to display the screen displayed from the superimposition confirmation screen Sn3B. You may make a transition to the defect confirmation screen Sn1, or you may make a transition from the superposition confirmation screen Sn3B to the reference confirmation screen Sn2A. Even if such an aspect is adopted, for example, the user can easily recognize the difference between the defect image Im1 related to the defect image data and the reference images Im2 and Im2A related to the reference image data.

  When the above configuration is adopted, for example, instead of the operation flow shown in FIG. 9, the operation flow shown in FIG. 13 is executed, and instead of the operation flow shown in FIG. May be executed. 13 and 14 are flowcharts showing an example of an operation flow of the defect checking apparatus 3 according to the fourth embodiment. The operation flow of FIG. 13 is an operation flow in which step S22A is inserted between step S22 and step S23 of the operation flow shown in FIG. 9, and steps S22B and S22C are further added. The operation flow of FIG. 14 is an operation flow in which step S32A is inserted between step S32 and step S33 of the operation flow shown in FIG. 10, and step S32B and step S32C are further added. Here, steps S22A, S22B, S22C and steps S32A, S32B, S32C, which are different from the operation flows of FIGS. 9 and 10, in the operation flows of FIGS. 13 and 14 will be described.

  In step S22A in FIG. 13, the output control unit 354 determines whether or not to execute processing (also referred to as superimposed display processing) for visually outputting defect image data and reference image data so as to be superimposed. Here, for example, if the second signal is not input by the input unit 32 according to the second operation by the user, the output control unit 354 does not determine that the superimposed display process is to be performed, and proceeds to step S23. On the other hand, for example, if the second signal is input by the input unit 32 according to the second operation by the user, the output control unit 354 determines that the superimposed display process is to be executed, and proceeds to step S22B.

  In step S22B, the output control unit 354 causes the output unit 33 to execute a superimposed display process. Thereby, for example, after the output control unit 354 stops the alternate output process by the output unit 33, the output unit 33 responds to the input of the second signal by the input unit 32 according to the second operation by the user. Thus, the defect image data and the reference image data can be visually output so as to overlap in the same display area. At this time, for example, a mode in which the output control unit 354 causes the screen displayed by the output unit 33 to transition from the defect confirmation screen Sn1 illustrated in FIG. 6 to the superimposition confirmation screen Sn3B illustrated in FIG. If such a configuration is adopted, the user can easily recognize the difference between the defect image Im1 related to the defect image data and the reference images Im2 and Im2A related to the reference image data.

  In step S <b> 22 </ b> C, the output control unit 354 determines whether or not to cancel the state (also referred to as a superimposed display state) in which the defect image data and the reference image data are visually output so as to be superimposed in the same display area. judge. Here, for example, the output control unit 354 does not determine that the superimposed display state is canceled until a predetermined signal is input by the input unit 32 in accordance with a predetermined operation by the user, and determination in step S22C. repeat. On the other hand, for example, if a predetermined signal is input by the input unit 32 in response to a predetermined operation by the user, the output control unit 354 determines that the superimposed display state is to be canceled, and returns to step S21 in FIG. .

  In step S32A of FIG. 14, the output control unit 354 determines whether or not to execute a superimposed display process for visually outputting the defect image data and the reference image data so as to be superimposed. Here, for example, if the second signal is not input by the input unit 32 in response to the second operation by the user, the output control unit 354 does not determine that the superimposed display process is to be executed, and proceeds to step S33. On the other hand, for example, if the second signal is input by the input unit 32 according to the second operation by the user, the output control unit 354 determines that the superimposed display process is to be executed, and proceeds to step S32B.

  In step S32B, the output control unit 354 causes the output unit 33 to execute a superimposed display process. Thereby, for example, after the output control unit 354 stops the alternate output process by the output unit 33, the output unit 33 responds to the input of the second signal by the input unit 32 according to the second operation by the user. Thus, the defect image data and the reference image data can be visually output so as to overlap in the same display area. At this time, for example, the output control unit 354 may transition the screen displayed by the output unit 33 from the reference confirmation screen Sn2A shown in FIG. 11 to the superposition confirmation screen Sn3B shown in FIG. If such a configuration is adopted, the user can easily recognize the difference between the defect image Im1 related to the defect image data and the reference images Im2 and Im2A related to the reference image data.

  In step S32C, the output control unit 354 determines whether or not to cancel the superimposed display state in which the defect image data and the reference image data are visually output so as to be superimposed in the same display area. Here, for example, the output control unit 354 does not determine that the superimposed display state is canceled until a predetermined signal is input by the input unit 32 in accordance with a predetermined operation by the user, and the determination in step S32C. repeat. On the other hand, for example, if a predetermined signal is input by the input unit 32 in accordance with a predetermined operation by the user, the output control unit 354 determines that the superimposed display state is to be canceled, and returns to step S31 in FIG. .

<2-4. Other>
For example, in each of the embodiments described above, the output control unit 354 causes the output unit 33 to sequentially perform the defect image data and the reference image data at least once in the same display area without performing the alternate output process. It may be output visually. At this time, any image data of the defect image data and the reference image data may be output first. Even if such a configuration is adopted, for example, the user can compare the defect image Im1 and the reference image Im2 displayed in time sequence in the same second display area Ar2 without moving the line of sight. Thereby, for example, it becomes difficult for the user to overlook a true defect in the substrate 90 and to become tired. As a result, for example, the confirmation accuracy in the work of confirming the defect of the substrate 90 as the inspection object can be improved.

  For example, in each of the above embodiments, the defect image Im1 related to the defect image data may be enlarged and reduced. In this case, for example, the reference images Im2 and Im2A related to the reference image data may be enlarged and reduced according to the enlargement and reduction of the defect image Im1 related to the defect image data.

  For example, in each of the embodiments described above, the display elements Fm11 and Fm12 may be elements having different display modes that can be distinguished by the user according to the type of part captured in the defect area. Here, as a kind of site | part, the site | part to which the part which plated was given, the soldering resist, etc. are mentioned, for example. In addition, examples of elements having different display modes include frames with different colors. In this case, the defect information may include, for example, information indicating the type of part.

  For example, in each of the above embodiments, when there are a plurality of defect image data as a plurality of confirmation targets for one substrate 90 as one inspection target, the acquisition unit 352 sets in advance. Defect image data for a part having high importance may be acquired preferentially. Thereby, for example, the output control unit 354 can cause the output unit 33 to visually output the defect image data for the part with high importance in priority.

  For example, in each of the embodiments described above, as the display elements Fm11 and Fm12, elements of other modes such as an arrow indicating the defect area may be adopted instead of the frame positioned so as to surround the defect area. .

  For example, in each of the above embodiments, another object such as a product different from the substrate 90 may be employed as the inspection object.

  It goes without saying that all or a part of each of the above-described embodiment and various modifications can be combined as appropriate within a consistent range.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Communication line 3 Defect confirmation apparatus 30 Information processing apparatus 31 Communication part 32 Input part 33 Output part 34 Storage part 35 Control part 35a Operation processing part 35b Memory 90 Substrate 100 Defect confirmation system 351 Signal reception part 352 Acquisition part 353 Storage Control part 354 Output control part Ar1 1st display area Ar2 2nd display area Ar3 3rd display area B1 Stop button B2 Next button B3 Overlay execution button B4 Overlay cancellation button Fm11, Fm12 Display element Im1 Defect image Im12B Overlapping image Im2, Im2A Reference Image Mk1 First mark Mk2 Second mark Mk3 Third mark Pg1 Program RM1 Storage medium Sn1 Defect confirmation screen Sn2, Sn2A Reference confirmation screen Sn3B Overlay confirmation screen

Claims (15)

A defect confirmation device for confirming the presence or absence of defects in an inspection object,
For the same portion of the same size of the inspection object, an acquisition unit that acquires defect image data that may have captured a defect, and reference image data that serves as a reference;
A defect confirmation apparatus, comprising: an output control unit configured to visually output the defect image data and the reference image data at least once in a time sequential manner in the same display area by an output unit. It is a defect confirmation apparatus of Claim 1, Comprising:
The output control unit causes the output unit to visually output, along with the defect image data, an element that allows a user to visually recognize a portion where a defect may exist. Confirmation device. The defect confirmation apparatus according to claim 1 or 2,
The said output control part is a defect confirmation apparatus which makes the said output part output the said defect image data and the said reference image data alternately to the said same display area by the said output part. It is a defect confirmation apparatus of Claim 3, Comprising:
An input unit for inputting a signal according to a user's operation;
The output control unit responds to the input of the first signal by the input unit according to the first operation by the user, and causes the output unit to output the defect image data and the reference image data in the same display area. A defect confirmation device that stops alternate output processing for alternately and visually outputting. It is a defect confirmation apparatus of Claim 4, Comprising:
In response to the stop of the alternate output process, the output control unit causes the output unit to output an element related to a defect image that can be recognized by the user together with the defect image data, or the reference image data A defect confirmation apparatus that outputs an element related to a reference image that can be recognized by a user. The defect confirmation device according to claim 5,
The output control unit, after stopping the alternate output process, in response to the input of the second signal by the input unit according to the second operation by the user, the output unit by the output unit in the same display area A defect confirmation apparatus for visually outputting defect image data and the reference image data so as to overlap each other. The defect confirmation apparatus according to any one of claims 1 to 5,
The output control unit causes the output unit to visually output the first image data of the defect image data and the reference image data, and the visual output state of the image data in the same display area. From the first output state, the second output state in which the defect image data and the reference image data are visibly output so as to overlap each other, and the defect image data and the reference image data out of the first output state. A defect confirmation apparatus that makes a transition to a third output state in which second image data different from the first image data is visually output. A defect confirmation method for confirming the presence or absence of defects in an inspection object,
(a) For the same part of the same size of the inspection object, obtaining defect image data that may have captured a defect, and reference image data serving as a reference; and
(b) The step of causing the output unit to visually output the defect image data and the reference image data acquired in step (a) at least once in a time sequential manner in the same display area. , Defect confirmation method. The defect confirmation method according to claim 8,
In the step (b), the output unit causes the user to visually output an element such that a portion where a defect may exist is visually recognizable together with the defect image data. Defect confirmation method. The defect confirmation method according to claim 8 or 9, wherein
In the step (b), a defect confirmation method in which the defect image data and the reference image data are alternately and visually output to the same display area by the output unit. The defect confirmation method according to claim 10,
In the step (b), in response to the input of the first signal by the input unit according to the first operation by the user, the output unit outputs the defect image data and the reference image data in the same display area. A defect confirmation method that stops the alternate output process for alternately and visually outputting. The defect confirmation method according to claim 11,
In the step (b), in response to the stop of the alternate output process, the output unit outputs the elements related to the defect image that can be recognized by the user together with the defect image data, or the reference A defect confirmation method for outputting an element related to a reference image that can be recognized by a user together with image data. The defect confirmation method according to claim 12,
In the step (b), after stopping the alternate output process, in response to the input of the second signal by the input unit according to the second operation by the user, the output unit causes the same display area to be A defect confirmation method for visually outputting the defect image data and the reference image data so as to overlap each other. A defect confirmation method according to any one of claims 8 to 12,
In the step (b), the output unit causes the visual output state of the image data in the same display area to be output as the first image data of the defect image data and the reference image data. From the first output state, a second output state in which the defect image data and the reference image data are visibly output so as to overlap each other, and the defect image data and the reference image data are The defect confirmation method which makes it change to the 3rd output state which is outputting the 2nd image data different from the said 1st image data visually.   A program which, when executed by a processing unit included in an information processing apparatus, causes the information processing apparatus to function as the defect confirmation apparatus according to any one of claims 1 to 7.

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