JP2017122682A - Visual inspection device, visual inspection method, and computer program executable by controller used in visual inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a visual inspection device, a visual inspection method, and a computer program with which it is possible to improve inspection tact as a whole, even for a complicated processing sequence in which imaging is performed a number of times with a plurality of different imaging parameters.SOLUTION: A controller according to the present invention generates an imaging flow by extracting a plurality of imaging modules included in a processing flow while maintaining their relative order, and a measurement flow for executing measurement processing by a measurement module on the basis of stored image data. An inspection object is imaged by each of the plurality of imaging modules in correlation to a parameter assigned to each of the plurality of imaging modules. Measurement processing is executed by the measurement module on image data, out of the image data imaged by the imaging modules correlated to parameters and stored and matched in the correlated parameter.SELECTED DRAWING: Figure 3

Description

  The present invention provides an appearance inspection apparatus, an appearance inspection method, and a controller used in the appearance inspection apparatus capable of improving the inspection tact as a whole even in a complicated processing sequence in which imaging is performed a plurality of times with a plurality of different imaging parameters. The present invention relates to a computer program that can be executed on the computer.

  When performing an appearance inspection of an inspection object, the surface of the inspection object flowing on the production line is imaged, and the inspection object is inspected for the presence or absence of a displacement, the presence or absence of defects, etc. based on the captured image. And the quality of the inspection object is determined (see Patent Document 1). Depending on the appearance inspection apparatus, it is possible to perform an appearance inspection that meets the needs of the user by customizing the processing procedure (hereinafter, processing flow) of each image processing created by the user.

  In this case, the user creates a desired processing procedure by arranging a plurality of processing units associated with each image processing so as to match a desired processing sequence on software dedicated to customization of the processing flow. Thereafter, a control program capable of executing the created processing procedure in the controller is created and transferred to the controller. The controller executes each image processing in synchronization with a desired processing procedure.

JP 2009-116381 A

  Reducing the time required for the processing sequence for one cycle contributes to further improvement in inspection tact. For example, when the processing sequence includes an imaging unit and a measurement unit one by one in this order, the imaging process in the imaging unit in the next processing sequence is executed before the measurement process in the measurement unit is completed. The time required for the processing sequence for one cycle can be shortened.

  Therefore, during the execution of the measurement process in the measurement unit, the imaging process for the next process sequence is executed, and the acquired image data is temporarily stored in the buffer. However, the temporarily stored image data is image data captured with imaging parameters such as a shutter speed and an illumination method set in the imaging unit of the currently executed processing sequence. Therefore, for example, when the imaging parameters set in the imaging unit in the next processing sequence are different, the temporarily stored image data itself cannot be used in the next processing sequence, and the processing time is shortened as a whole. There was a problem that it was not possible. In particular, when there are a plurality of imaging units in one processing sequence, it is difficult to switch to the correct parameters between the imaging units.

  The present invention has been made in view of the above circumstances, and an appearance inspection apparatus capable of improving inspection tact as a whole even in a complicated processing sequence in which imaging is performed a plurality of times with a plurality of different imaging parameters, It is an object of the present invention to provide an appearance inspection method and a computer program that can be executed by a controller used in the appearance inspection apparatus.

  In order to achieve the above object, an appearance inspection apparatus according to a first aspect of the present invention performs imaging processing based on image data generated by an imaging unit that images an inspection object and generates image data. A visual inspection apparatus that executes a plurality of processing modules to which parameters are assigned in synchronization with a processing flow according to a control program. An imaging module that images at least the inspection object by the imaging means and stores the generated image data; and a measurement module that performs measurement on the stored image data, and the controller has a processing flow An imaging flow by storing a plurality of the imaging modules included in an image while maintaining a relative order; A flow generation unit that generates a measurement flow for executing measurement processing in the measurement module based on the image data that has been recorded, and the parameters assigned to each of the plurality of imaging modules according to the generated imaging flow In association with each other, an imaging flow execution unit that images each of the inspection objects with the plurality of imaging modules, and the imaging module that is associated with the parameter is captured and stored in accordance with the measurement flow generated by the flow generation unit. Based on the execution result of the measurement process in the measurement flow, the measurement flow execution means for executing the measurement process by the measurement module with respect to the image data in which the associated parameters match, A pass / fail judgment means for judging pass / fail of the inspection object. The features.

  Next, in order to achieve the above object, an appearance inspection apparatus according to a second aspect of the present invention includes an imaging unit that images an inspection object and generates image data, and image processing based on the image data generated by the imaging unit A visual inspection apparatus that executes a plurality of processing modules assigned parameters according to a control program in synchronization with a processing flow. The processing module includes at least an imaging module that images an inspection object by the imaging unit and stores the generated image data, and a measurement module that performs measurement on the stored image data, and the controller The plurality of the imaging modules included in the processing flow while maintaining the relative order. Among the stored image data associated with the parameters, imaging execution means for capturing and storing the inspection object by the plurality of imaging modules in association with the parameters allocated to each of the parameters The measurement flow execution means for executing the measurement process by the measurement module on the image data having the matched parameters, and the quality of the inspection object is determined based on the execution result of the measurement process in the measurement flow And a pass / fail judgment means.

  Further, in the first or second invention, the appearance inspection apparatus according to the third invention waits for execution of the processing of the imaging module based on whether or not it depends on the execution result of the preceding processing module. Is preferably determined.

  In the visual inspection apparatus according to the fourth aspect of the present invention, when the preceding processing module is the measurement module in the third aspect, the process of the imaging module waits until the execution of the process of the measurement module is completed. It is preferable.

  Further, in the appearance inspection apparatus according to the fifth invention, in the third invention, when the preceding processing module is the imaging module, the execution of the processing of the preceding imaging module is completed when the preceding imaging module is finished. It is preferable to start execution of the process.

  Next, in order to achieve the above object, an appearance inspection method according to a sixth aspect of the invention includes an imaging unit that images an inspection target and generates image data, and image processing based on the image data generated by the imaging unit. And a controller that determines whether the inspection object is good or not, and the controller executes, in accordance with the control program, a plurality of processing modules assigned with parameters in synchronization with the processing flow. In the visual inspection method, the processing module images at least the inspection object by the imaging unit, stores the generated image data, and performs measurement on the stored image data A measurement module that performs a relative order of the plurality of imaging modules included in the processing flow. Generating an imaging flow and a measurement flow for performing measurement processing in the measurement module based on stored image data, and a plurality of the imaging according to the generated imaging flow In accordance with the parameter assigned to each module, the imaging module associated with the parameter is imaged in accordance with the step of imaging each inspection object by the plurality of imaging modules and the generated measurement flow. Among the stored image data, the step of executing the measurement process by the measurement module on the image data corresponding to the corresponding parameter and the execution result in the measurement flow, And a step of determining pass / fail.

  Next, in order to achieve the above object, an appearance inspection method according to a seventh aspect of the invention includes an imaging unit that images an inspection object and generates image data, and image processing based on the image data generated by the imaging unit. And a controller that determines whether the inspection object is good or not, and the controller executes, in accordance with the control program, a plurality of processing modules assigned with parameters in synchronization with the processing flow. In the visual inspection method, the processing module images at least the inspection object by the imaging unit, stores the generated image data, and performs measurement on the stored image data A measurement module that performs a relative execution order of the plurality of imaging modules included in the processing flow. Maintaining each of the images, and in association with the parameters assigned to each of the plurality of imaging modules, respectively, imaging and storing the inspection object by the plurality of imaging modules, Based on the step of executing measurement processing by the measurement module on the image data in which the associated parameter matches among the stored image data, and the quality of the inspection object based on the execution result in the measurement flow And a step of determining.

  Further, in the sixth or seventh invention, the appearance inspection method according to the eighth invention is to wait for execution of the processing of the imaging module based on whether or not it depends on the execution result of the preceding processing module. Is preferably determined.

  In the visual inspection method according to the ninth invention, in the eighth invention, when the preceding processing module is the measurement module, the process of the imaging module is waited until the execution of the process of the measurement module is completed. It is preferable.

  The visual inspection method according to a tenth aspect of the present invention is the visual inspection method according to the eighth aspect, wherein when the preceding processing module is the imaging module, the execution of the processing of the preceding imaging module is terminated. It is preferable to start execution of the process.

  Next, in order to achieve the above object, a computer program according to an eleventh aspect of the present invention provides an image pickup unit that picks up an image of an inspection object and generates image data, and performs image processing based on the image data generated by the image pickup unit. A controller that executes and determines whether the inspection object is good or not, and the controller executes the plurality of processing modules to which the parameters are assigned according to the control program in synchronization with the processing flow. In the computer program capable of processing, the processing module images at least the inspection object by the imaging unit, stores the generated image data, and performs measurement on the stored image data. A plurality of the imaging modules included in the processing flow. A flow generation unit that generates an imaging flow and a measurement flow for executing a measurement process in the measurement module based on stored image data In accordance with the imaging flow, in association with the parameters assigned to each of the plurality of imaging modules, imaging flow execution means for imaging the inspection object by the plurality of imaging modules, and measurement generated by the flow generation means According to the flow, out of image data captured and stored by the imaging module associated with the parameter, the measurement module executes measurement processing on image data that matches the associated parameter. Based on the measurement flow execution means and the execution result in the measurement flow, Characterized in that to function as quality determining means for determining the quality of 査 object.

  In the first invention, the sixth invention, and the eleventh invention, the controller extracts a plurality of imaging modules included in the processing flow while maintaining a relative order, and based on the imaging flow and stored image data. And a measurement flow for executing a measurement process in the measurement module. According to the generated imaging flow, the inspection object is imaged by each of the plurality of imaging modules in association with the parameter assigned to each of the plurality of imaging modules. In accordance with the generated measurement flow, measurement processing is executed by the measurement module on image data that matches the associated parameter among the image data captured and stored by the imaging module associated with the parameter. . The quality of the inspection object is determined based on the execution result in the measurement flow. As a result, the function of the imaging module is divided into until the image of the inspection object is captured and the image data is stored, and thereafter, and the parameters at the time of imaging (setting parameters of the imaging means) are associated with each image data. Therefore, measurement processing is not executed using image data with incorrect parameters in the measurement flow. In addition, since it is possible to move to the next imaging flow when the image data is stored, it is possible to image the inspection object without waiting for the end of the measurement flow. Therefore, the inspection tact can be reduced as a whole. The process flow means a process flow created by the user for the appearance inspection of the inspection object.

  In the second and seventh aspects of the invention, the controller maintains a relative execution order of the plurality of imaging modules included in the processing flow, and associates a plurality of parameters with each of the parameters assigned to each of the plurality of imaging modules. Each imaging object is imaged and stored by each imaging module. Of the stored image data associated with the parameter, the measurement module performs measurement processing on the image data with which the associated parameter matches. The quality of the inspection object is determined based on the execution result in the measurement flow. Thereby, the function of the imaging module is executed by dividing the function of the imaging module until the imaging of the inspection object and storing the image data, and thereafter, and the parameters at the time of imaging (setting parameters of the imaging means) for each image data. Since they are associated, measurement processing is not executed using image data with incorrect parameters in the measurement flow. In addition, since it is possible to move to the next imaging flow when the image data is stored, it is possible to image the inspection object without waiting for the end of the measurement flow. Therefore, the inspection tact can be reduced as a whole.

  In the third and eighth inventions, whether to wait for the execution of the processing of the imaging module is determined based on whether or not it depends on the execution result of the preceding processing module. Even in such a case, if the process in the imaging flow can be executed in parallel, the process can be executed in parallel with the process in the measurement flow, so that the inspection tact can be reduced as a whole.

  In the fourth and ninth inventions, when the preceding processing module is a measurement module, the process of the imaging module waits until the execution of the process of the measurement module is completed, so that the inspection object is imaged with incorrect parameters. This can be prevented in advance, and the processing in the measurement flow can be executed correctly.

  In the fifth and tenth inventions, when the preceding processing module is an imaging module, the execution of the processing of the next imaging module is started when the execution of the processing of the preceding imaging module is completed. The process of the next imaging module can be executed with the parameters changed, and the inspection tact can be reduced as a whole.

  In the present invention, the function of the imaging module is divided into the period from imaging the inspection object to storing the image data and the subsequent, and associating the parameters at the time of imaging (setting parameters of the imaging means) for each image data Therefore, measurement processing is not performed using image data with incorrect parameters in the measurement flow. In addition, since it is possible to move to the next imaging flow when the image data is stored, it is possible to image the inspection object without waiting for the end of the measurement flow. Therefore, the inspection tact can be reduced as a whole.

It is explanatory drawing of the processing flow of the conventional external appearance inspection apparatus. It is a block diagram which shows the structural example of the hardware of the external appearance inspection apparatus which concerns on Embodiment 1 of this invention. It is a functional block diagram of the appearance inspection apparatus according to Embodiment 1 of the present invention. It is an exploded view of the processing flow of the visual inspection apparatus which concerns on Embodiment 1 of this invention. It is a flowchart which shows the imaging flow of the external appearance inspection apparatus which concerns on Embodiment 1 of this invention. It is a flowchart which shows the measurement flow of the external appearance inspection apparatus which concerns on Embodiment 1 of this invention. It is a flowchart which shows the process sequence of the main control part of the external appearance inspection apparatus which concerns on Embodiment 1 of this invention. It is an exploded view of the processing flow of the visual inspection apparatus which concerns on Embodiment 2 of this invention. It is an illustration figure of the time chart of the imaging flow and measurement flow which concern on Embodiment 2 of this invention. It is another example figure of the processing flow of the external appearance inspection apparatus which concerns on Embodiment 2 of this invention. It is another example figure of the time chart of the imaging flow and measurement flow concerning Embodiment 2 of the present invention. It is a functional block diagram of the external appearance inspection apparatus which concerns on Embodiment 3 of this invention. It is an illustration figure of the processing flow of the external appearance inspection apparatus which concerns on Embodiment 3 of this invention. It is a flowchart which shows the imaging flow of the external appearance inspection apparatus which concerns on Embodiment 3 of this invention. It is a flowchart which shows the measurement flow of the external appearance inspection apparatus which concerns on Embodiment 3 of this invention.

  Hereinafter, an appearance inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. Note that elements having the same or similar configuration or function are denoted by the same or similar reference numerals throughout the drawings referred to in the description of this embodiment, and detailed description thereof is omitted.

  FIG. 1 is an explanatory diagram of a processing flow of a conventional visual inspection apparatus. The processing flow shown in FIG. 1 includes two imaging modules and two measurement modules. After the imaging module A is executed, the measurement module A is executed, and then the imaging module B is executed before the measurement module B is executed. It is a processing flow to be executed. The imaging module A and the imaging module B have different imaging parameters (parameters) to be set in the imaging device.

  As illustrated in FIG. 1, the imaging module A transmits an imaging parameter A setting signal to the imaging device. After receiving the imaging parameter A setting signal, the imaging mechanism transmits a trigger signal acceptance permission signal to the external input / output terminal. The imaging device receives an input of a trigger signal from a PC or PLC connected to an external input / output terminal, and stores captured image data in an image memory (buffer memory).

  The imaging module A acquires image data from the image memory, and the measurement module A is executed based on the acquired image data. That is, the measurement process is executed based on the image data imaged with the imaging parameter A.

  As long as there is room in the image memory, the following processing can be repeated during execution of the measurement module A. That is, after receiving the setting signal for the imaging parameter A, the imaging mechanism transmits a trigger signal acceptance permission signal to the external input / output terminal. The imaging device receives an input of a trigger signal from a PC or PLC connected to an external input / output terminal, and stores captured image data in an image memory (buffer memory).

  Then, the execution of the imaging module B is started when the execution of the measurement module A is completed. The imaging module B transmits a setting signal for the imaging parameter B to the imaging mechanism. However, since the image data is stored in the image memory at this time, the imaging module B acquires the image data from the image memory and executes the measurement module B.

  At this time, the image data stored in the image memory is the image data captured with the imaging parameter A, not the image data for executing the measurement module B. That is, in the measurement module B, the measurement process must be performed based on the image data captured with the imaging parameter B. However, the measurement process is performed based on the image data captured with the imaging parameter A. . Therefore, there is a problem that correct measurement processing cannot be executed.

  Therefore, in the present invention, the function of the imaging module is divided into a function for imaging the inspection object and storing the image data, and a function after that (a function for acquiring the stored image data). By associating parameters at the time of imaging (imaging parameters set in the camera) for each data, it is possible to prevent the execution of measurement processing using image data captured with incorrect parameters in the measurement flow, and Since it is possible to shift to the next imaging flow when the data is stored, it is possible to image the inspection object without waiting for the end of the measurement flow. This will be specifically described below.

(Embodiment 1)
FIG. 2 is a block diagram illustrating a hardware configuration example of the appearance inspection apparatus according to the first embodiment of the present invention. As shown in FIG. 2, the appearance inspection apparatus according to the first embodiment is connected to a camera 30 as an imaging unit and the camera 30, and executes measurement processing based on image data generated by the camera 30. The controller 10 determines whether the inspection object is good or bad. The controller 10 has a main control unit 11 that performs numerical calculation and information processing based on various programs and controls each part of the hardware.

  The main control unit 11 includes, for example, a CPU 11a as a central processing unit, a work memory 11b such as a RAM that functions as a work area when the main control unit 11 executes various programs, a startup program, an initialization program, and the like. And a program memory 11c such as a ROM, a flash ROM, and an EEPROM stored therein.

  The controller 10 of the appearance inspection apparatus according to the first embodiment transmits an imaging signal for imaging the inspection object to the camera (imaging means) 30, and the camera 30 generates image data and returns it to the controller 10. The controller 10 includes an illumination control unit 12 that controls lighting of the illumination 60 so that the brightness of the workpiece (inspection object) can be adjusted, and an ASIC (Application Specific Integrated Circuit) that captures image data obtained by capturing with the camera 30. ) And the like, an operation input unit 14 that receives input of an operation signal from the console 50, and a display control unit that includes a display DSP that displays an image on a monitor 40 such as a liquid crystal panel. 15, a communication unit 16 connected so as to be able to perform data communication with an external PLC 70, PC 80, and the like, and an image processing unit 17 configured by a calculation DSP or the like that performs measurement processing such as edge detection and area calculation have. The image processing unit 17 includes an image memory 17a that stores image data for measurement processing.

  The image input unit 13 may include a frame buffer for buffering image data. Further, the display control unit 15 may include a video memory such as a VRAM that temporarily stores image data when displaying an image. Each piece of hardware is connected to be able to perform data communication via an electrical communication path (wiring) such as a bus.

  In the program memory 11c in the main controller 11, the CPU 11a controls each part of the illumination controller 12, the image input unit 13, the operation input unit 14, the display control unit 15, the communication unit 16, and the image processing unit 17. The control program is stored. Further, a processing order program that defines the order of each processing according to the processing flow described above, that is, a processing order program that is generated in the PC 80 and transferred from the PC 80 is stored in the program memory 11c.

  More specifically, the PC 80 sets a processing flow in which one or a plurality of imaging modules and one or a plurality of measurement modules are arranged in a desired order (series or parallel) based on a user operation, Also set parameters for each module. The imaging parameter associated with the imaging module includes at least a trigger condition. The trigger condition includes an external trigger that performs imaging based on an external signal from an external device such as the PLC 70, and an internal trigger that repeatedly performs imaging at a constant period. Details of the processing operation of the controller 10 when an external trigger is set as the trigger condition will be described later with reference to FIG.

  On the other hand, the measurement parameter associated with the measurement module includes at least a threshold value for determining the quality of the inspection object by the measurement module. A processing order program including an imaging module associated with an imaging parameter and a measurement module associated with a measurement parameter is stored in the program memory 11c. In the present embodiment, the imaging parameter and the measurement parameter are also stored in the program memory 11c. However, the imaging parameter and the measurement parameter may be stored in another memory such as the work memory 11b so as to be easily rewritten.

  The communication unit 16 functions as an interface that receives an input trigger signal as an imaging trigger signal when an input of a trigger signal is received by a sensor (photoelectric sensor or the like) connected to an external PLC 70. It also functions as an interface that receives an image processing program (processing order program) transferred from the PC 80, layout information that defines the display mode of the monitor 40, and the like.

  When the CPU 11 a of the main control unit 11 receives an input of a trigger signal (imaging trigger signal) from an external device (which may be a sensor) such as the PLC 70 via the communication unit 16, the image is input to the image input unit 13. Send a command. At the same time, a command for instructing a measurement process to be executed is transmitted to the image processing unit 17 based on the processing order program. As a device for generating a trigger signal (imaging trigger signal), a trigger signal input sensor such as a photoelectric sensor may be directly connected to the communication unit 16 instead of the PLC 70.

  The operation input unit 14 functions as an interface that receives an operation signal from the console 50 based on a user operation. The monitor 40 displays the user's operation content using the console 50. More specifically, the console 50 is provided with various components such as a cross key, a determination button, and a cancel button for moving the cursor displayed on the monitor 40 up, down, left and right, and operating these components. Thus, on the monitor 40, the user creates a flowchart for defining the processing order of the measurement processing, edits the parameter value of each measurement processing, sets the reference inspection area, and sets the detection conditions for the specific pattern. Make settings. For example, the processing flow created by the user in the PC 80 and the parameter change of each module are edited via the operation input unit 14 and the monitor 40.

  The image input unit 13 takes in image data. Specifically, for example, when an imaging command for the camera 30 is received from the CPU 11 a, an image data capture signal is transmitted to the camera 30. Then, after the image is taken by the camera 30, the image data obtained by taking the image is stored in the image memory 17a.

  In accordance with the stored control program, the CPU 11a executes the imaging module to which the imaging parameter (parameter) is assigned and the measurement module in synchronization with the processing flow. Hereinafter, in the first embodiment, as a processing module, an imaging module that captures an image of an inspection object with the camera 30 and stores the generated image data in the image memory 17a, and image data stored in the image memory 17a. An example configured with a measurement module that acquires and executes measurement processing will be described.

  FIG. 3 is a functional block diagram of the appearance inspection apparatus according to Embodiment 1 of the present invention. As shown in FIG. 3, the appearance inspection apparatus according to the first embodiment is software-driven by the flow generation unit 301, the imaging flow execution unit 302, and the measurement by the various programs stored in the CPU 11 a and the program memory 11 c described above. A flow execution unit 303 and a pass / fail determination unit 304 are realized.

  In FIG. 3, the flow generation unit 301 performs measurement processing by the measurement module based on the imaging flow and the stored image data by extracting a plurality of imaging modules included in the processing flow while maintaining the relative order. Generate a measurement flow to execute

  FIG. 4 is an exploded view of the processing flow of the appearance inspection apparatus according to Embodiment 1 of the present invention. As shown in FIG. 4, the conventional processing flow 401 is divided into a left imaging flow 402 and a right measurement flow 403. That is, in FIG. 4, the imaging flow 402 is configured as an imaging parameter setting module having a function to store image data generated by imaging an inspection target in an image memory among the functions of the imaging module. The remaining functions are included in the measurement flow 403 on the right side as an image acquisition module that acquires image data from the image memory. As described above, in the first embodiment, as described above, the functions of the imaging module are the functions from imaging the inspection object and storing the image data (imaging parameter setting module A and the like), and subsequent functions. It is divided into functions (image acquisition module A).

  Returning to FIG. 3, the imaging flow execution unit 302 associates the imaging object (parameter) assigned to each of the plurality of imaging modules in accordance with the generated imaging flow 402 and uses the plurality of imaging modules to inspect the inspection target. Image each one. The captured image data is stored in the image memory 17a. The imaging flow 402 is repeatedly executed asynchronously with the measurement flow 403.

  In this way, since image data captured with the corresponding imaging parameter can be prepared in advance according to the processing flow, the measurement process in the measurement flow is executed according to the imaging parameter of the stored image data. Therefore, it is possible to avoid the execution of the measurement process in the measurement flow with image data captured with an incorrect imaging parameter.

  The measurement flow execution unit 303, according to the generated acquisition flow, out of the image data captured and stored by the imaging module associated with the imaging parameter, the imaging parameter associated with the generated measurement flow. Measurement processing is executed by the measurement module on the image data that match. Specifically, the image data associated with the imaging parameter that is the target of the measurement process is read from the image data stored in the image memory 17a, and the measurement process is executed. That is, in FIG. 4, when the image acquisition module A is executed, the image data captured by the imaging parameter setting module A is used.

  The pass / fail determination unit 304 determines pass / fail of the inspection object based on the execution result of the measurement process in the measurement flow. Thereby, the quality of the inspection object is not determined based on the execution result of the measurement process in the measurement flow based on the image data with incorrect imaging parameters. Therefore, the quality of the inspection object can be determined with high accuracy. it can.

  As described above, thresholds are associated with the measurement module A and the measurement module B, respectively. In each module, the quality of the inspection object is determined by comparing the measurement processing result with a threshold value.

  Further, based on the pass / fail judgment results of both modules, a comprehensive judgment of the processing flow 401 (measurement flow 403) is performed. Specifically, when the measurement module A is OK and the measurement module B is OK, an OK determination is made as a comprehensive determination. On the other hand, when either the measurement module A or the measurement module B is NG determination, NG determination is made as a comprehensive determination.

  The comprehensive determination result by the pass / fail determination unit 304 is transmitted to an external device such as the PLC 70 via the communication unit 16 as a comprehensive determination signal. Note that the determination result of each module may be transmitted to the outside or may not be transmitted to the outside.

  FIG. 5 is a flowchart showing an imaging flow of the appearance inspection apparatus according to the first embodiment of the present invention. As shown in FIG. 5, the main control unit 11 of the appearance inspection apparatus according to the first embodiment transmits the imaging parameter A to the imaging mechanism (step S501). The transmitted imaging parameter A is set in the imaging device of the camera 30. After setting the imaging parameter A, the imaging mechanism transmits a trigger signal acceptance permission signal to the external input / output terminal.

  In the first embodiment, the imaging mechanism shown in FIG. 5 is realized in software by the function of the CPU 11a. The imaging parameter A transmitted to the imaging mechanism has a data format that can be used by the program. The imaging parameter A transmitted from the imaging mechanism to the camera 30 is suitable for rewriting the settings of the camera 30 (hardware-like). ) Consists of data format. Therefore, the CPU 11a has a function of data conversion of the imaging parameter A from a software data format to a hardware data format. Note that the mechanism shown in FIG. 5 may not be realized by software, but may be realized by hardware, for example, by the image input unit 13. Further, by providing the camera 30 with a data conversion function of the CPU 11a, the imaging parameter A may be transferred to the imaging device without using the imaging mechanism.

  The imaging device receives an input of a trigger signal from the PC 80 and the PLC 70 connected to the external input / output terminal, stores the captured image data in the image memory 17a, and notifies the controller 10 to that effect. The main control unit 11 receives the storage notification (step S502), and starts capturing the next image.

  The main control unit 11 transmits the imaging parameter B (step S503). The transmitted imaging parameter B is set in the imaging device of the camera 30 (parameter setting is rewritten), and the imaging mechanism transmits the trigger signal acceptance permission signal to the external input / output terminal after setting the imaging parameter B.

  The imaging device receives an input of a trigger signal from the PC 80 and the PLC 70 connected to the external input / output terminal, stores the captured image data in the image memory 17a, and notifies the controller 10 to that effect. The main control unit 11 receives the storage notification (step S504) and starts capturing the next image. Hereinafter, according to the processing flow, it is possible to repeatedly store image data by changing imaging parameters.

  In other words, in the current processing flow, image data captured with the imaging parameters related to the imaging module A is stored, image data captured using the imaging parameters related to the imaging module B is stored, and in the next processing flow, the imaging modules are stored. The image data is stored with the imaging parameters according to A, the image data captured with the imaging parameters according to the imaging module B is stored, and the image data is captured in association with the relative positional relationship of the imaging modules in the processing flow. Processing and storage processing can be repeated.

  FIG. 6 is a flowchart showing a measurement flow of the appearance inspection apparatus according to the first embodiment of the present invention. As shown in FIG. 6, the main control unit 11 of the visual inspection apparatus according to the first embodiment transmits a request signal for image data including at least the imaging parameter A to the imaging mechanism of the controller 10 (step S601). The imaging mechanism transmits image data corresponding to the received imaging parameter A to the controller 10 from the image data stored in the image memory 17a. The main control unit 11 receives the image data (step S602), and executes a measurement process based on the received image data (step S603).

  In the first embodiment, a part of the image memory 17a has a FIFO configuration, and the image data stored in the earliest order is sequentially read and transferred to the controller 10. The invention is not particularly limited to this. For example, when image data is stored in the image memory 17a, the image data to be read is recognized by storing the image data in association with an identifier indicating which imaging parameter setting module in which processing flow. Can do. In short, it is only necessary to transmit to the controller 10 image data that matches the parameters associated with the imaging module.

  Next, the main control unit 11 transmits a request signal for image data including at least the imaging parameter B to the imaging mechanism of the controller 10 (step S604). The imaging mechanism transmits image data corresponding to the received imaging parameter B to the controller 10 from the image data stored in the image memory 17a. The main control unit 11 receives the image data (step S605), and executes measurement processing based on the received image data (step S606). Thereafter, the same processing is repeated for the image data stored in the image memory 17a.

  FIG. 7 is a flowchart showing a processing procedure of the main control unit 11 of the appearance inspection apparatus according to the first embodiment of the present invention. As shown in FIG. 7, the main control unit 11 of the visual inspection apparatus according to the first embodiment generates an imaging flow by extracting a plurality of imaging modules included in the processing flow while maintaining a relative order. (Step S701). Further, the main control unit 11 generates a measurement flow for executing measurement processing by the measurement module based on the stored image data (step S702).

  In accordance with the generated imaging flow, the main control unit 11 images the inspection object with the plurality of imaging modules in association with the imaging parameters (parameters) assigned to the plurality of imaging modules (step S703). The captured image data is stored in the image memory 17a (step S704). It should be noted that the timing at which step S701 and step S702 are executed does not matter. At least the imaging flow 402 and the measurement flow 403 shown in FIG. 4 need only be executed before being repeatedly executed.

  The main control unit 11 acquires, from the image data stored in the image memory 17a, the image data captured and stored by the imaging module associated with the imaging parameter in accordance with the generated acquisition flow ( In step S705, according to the generated measurement flow, measurement processing is performed by the measurement module on the image data with which the associated imaging parameters match (step S706). Specifically, from the image data stored in the image memory 17a, the image data associated with the imaging parameter that is the target for executing the measurement process is read, and the measurement process is executed.

  The main control unit 11 determines pass / fail of the inspection object based on the execution result of the measurement process in the measurement flow (step S707).

  As described above, according to the first embodiment, the function of the imaging module is divided into two flows, that is, until the inspection object is imaged and the image data is stored, and thereafter, and the image is captured for each image data. Since the time parameter (setting parameter of the image pickup unit) is associated, the measurement process is not executed using image data whose parameter is not correct in the measurement flow. In addition, since it is possible to move to the next imaging flow when the image data is stored, it is possible to image the inspection object without waiting for the end of the measurement flow. Therefore, the inspection tact can be reduced as a whole.

(Embodiment 2)
Since the hardware configuration of the visual inspection apparatus according to the second embodiment of the present invention is the same as that of the first embodiment, detailed description thereof will be omitted by attaching the same reference numerals. The appearance inspection apparatus according to the second embodiment determines whether to wait for execution of the processing of the imaging module based on whether selection of the plurality of imaging modules depends on the execution result of the preceding processing module. The point of determination is different from that of the first embodiment.

  FIG. 8 is an exploded view of the processing flow of the visual inspection apparatus according to Embodiment 2 of the present invention. The conventional processing flow 801 shown in FIG. 8A is divided into an imaging flow 802 shown in FIG. 8B and a measurement flow 803 shown in FIG. That is, in FIG. 8, the imaging flow 802 is configured as an imaging parameter setting module having a function for imaging an inspection object and storing image data in an image memory among the functions of the imaging module. The function is included in the measurement flow 803 as an image acquisition module that acquires image data from the image memory.

  Specifically, the imaging module A sets the imaging parameter setting module A and the image acquisition module A, the imaging module B after conditional branching sets the imaging parameter setting module B and the image acquisition module B, and the imaging module C sets the imaging parameter. It is divided into a module C and an image acquisition module C. In this case, since the preceding module before the conditional branch is the measurement module A, the execution of the processing of the imaging modules B and C after the conditional branch is erroneous unless it waits until the execution of the processing of the measurement module A is completed. There is a possibility that the inspection object is imaged with the obtained imaging parameters.

  FIG. 9 is an exemplary view of time charts of the imaging flow and the measurement flow according to the second embodiment of the present invention. The imaging parameter setting module A is activated for the imaging flow, and the image acquisition module A is activated for the measurement flow. The imaging parameter setting module A sets the imaging parameter A in the imaging mechanism, and the image acquisition module A requests the imaging mechanism to acquire image data. The imaging mechanism transmits a storage notification indicating that the image data captured with the imaging parameter A has been stored to the imaging parameter setting module A and the image data to the image acquisition module A.

  The measurement module A executes measurement processing based on the acquired image data, and during that time, the imaging flow enters a waiting state at a conditional branch.

  Then, the execution of the measurement process of the measurement module A is completed, and the conditional branch is executed. In short, it is only necessary to transmit a waiting state cancellation signal. In the example of FIG. 9, a case where the imaging parameter setting module B is activated is illustrated.

  The imaging parameter setting module B sets the imaging parameter B in the imaging mechanism, and the image acquisition module B requests the imaging mechanism to acquire image data. The imaging mechanism transmits a storage notification indicating that the image data captured with the imaging parameter B has been stored to the imaging parameter setting module B and the image data to the image acquisition module B. Since the imaging flow ends at this point, the next imaging flow may be started or may be in a waiting state until the entire processing is completed.

  The measurement module B executes a measurement process based on the acquired image data, and the measurement flow ends when the measurement process of the measurement module B ends.

  Further, in the conditional branch, the branch destination can be determined at a higher speed. For example, when the preceding processing module is an imaging module, the execution of the processing of the next imaging module can be started when the execution of the processing of the preceding imaging module is completed. The processing can be continued without waiting for the inspection tact, and the inspection tact can be reduced as a whole.

  For example, when two different types of inspection objects are photographed by the two cameras 30, and different image data are acquired by changing imaging parameters between the first acquired image data and the next acquired image data Applies to In a more specific example, by switching the shutter speed, illumination type, illumination illuminance, etc., (1) the feature amount that indicates the posture of the inspection object is emphasized, and (2) the feature amount that indicates the dimension of the inspection object. (3) Emphasize the unevenness of the surface of the inspection object, and (4) acquire image data in which the texture of the surface of the inspection object is emphasized.

  When (1) and (2) are imaged as measurement modules, pattern matching processing, position correction processing, and edge extraction processing are executed. When (3) and (4) are imaged, a flaw detection process and an OCR process are executed. In this way, by enabling the measurement module to be changed by conditional branching, the imaging module can be activated during the execution of the processing of the measurement module, and the inspection tact can be reduced.

  FIG. 10 is another exemplary view of the processing flow of the appearance inspection apparatus according to the second embodiment of the present invention. As shown in FIG. 10, first, using the imaging module A1 or the imaging module B1, the inspection object is imaged based on the imaging parameter A or B, and the image data is stored in the image memory 17a. In this case, since the preceding module on which the execution result depends is the imaging module A1 or the imaging module B1, the execution of the processing of the imaging modules A2 and B2 after the conditional branching is performed until the conditional branching destination on the measurement flow side is determined. There is no need to wait. That is, the imaging modules A1 and A2 can be activated continuously when imaging is performed based on the imaging parameter A, and the imaging modules B1 and B2 can be continuously activated when imaging is performed based on the imaging parameter B. Measurement processing can be executed using image data corresponding to module B.

  Note that “imaging module A1orB1” in the processing flow shown in FIG. 10 will be supplementarily described. In the property setting of “imaging module A1 or B1”, it is possible to perform imaging settings for a plurality of cameras 30 (for example, two). For example, when two cameras 30 (camera 1 and camera 2) are used, trigger conditions and imaging parameters can be set for each of camera 1 and camera 2.

  In addition, one or a plurality of cameras can be specified as a condition for completing the imaging module (a condition for transitioning to the next module). For example, when the camera 1 and the camera 2 are designated by the AND condition, the processing shifts to the next module when the imaging of both the camera 1 and the camera 2 is completed. Further, when the camera 1 and the camera 2 are designated by the OR condition, the process transitions to the next module when the imaging of either the camera 1 or the camera 2 is completed. In the second embodiment, as indicated by “imaging module A1 or B1”, it is designated by the OR condition.

  FIG. 11 is another exemplary view of time charts of an imaging flow and a measurement flow according to Embodiment 2 of the present invention. In FIG. 11, the case where the imaging modules A1 and A2 are activated and the measurement process is executed by the measurement module A will be described. Specifically, for example, imaging of one of the two cameras 30 is completed, the imaging module A1 is activated, and the imaging module A2 is activated after the conditional branching.

  In FIG. 11, the imaging parameter setting module A1 is activated for the imaging flow, and the image acquisition module A1 is activated for the measurement flow. The imaging parameter setting module A1 sets the imaging parameter A1 in the imaging mechanism, and the image acquisition module A1 requests the imaging mechanism to acquire image data. The imaging mechanism transmits a storage notification indicating that the image data captured with the imaging parameter A1 is stored to the imaging parameter setting module A1, and the image data to the image acquisition module A1. In the measurement flow, measurement processing is executed by the measurement module A based on image data captured with the imaging parameter A1.

  In the meantime, without waiting for the execution of the measurement process by the measurement module A to be completed, the imaging flow continues to execute the process when the imaging module A2 is selected by conditional branching. That is, the imaging parameter setting module A2 is activated to set the imaging parameter A2 in the imaging mechanism. Thereby, different image data can be acquired as an imaging parameter by switching, for example, shutter speed, illumination, and the like, and a measurement process corresponding to the acquired image data can be executed. The imaging mechanism transmits a storage notification to the imaging parameter setting module A2 when the captured image data is stored in the image memory 17a.

  The image acquisition module A2 requests the imaging mechanism to acquire image data after the execution of the measurement process by the measurement module A is completed. The imaging mechanism transmits the image data captured with the imaging parameter A2 to the image acquisition module A2. Since the imaging flow ends at this point, the next imaging flow may be started or may be in a waiting state until the entire processing is completed.

  The measurement module A executes measurement processing based on the acquired image data, and the measurement flow ends when the execution of the measurement module A ends.

  By doing so, the camera 30 used in the imaging flow and the DSP used in the measurement flow are activated at substantially the same timing, and the inspection tact can be reduced as a whole. That is, since the imaging flow and the measurement flow are executed asynchronously, the inspection tact can be reduced.

  As described above, according to the second embodiment, whether to wait for the execution of the process of the imaging module is determined based on whether the next process depends on the execution result of the preceding process module. Therefore, even if the flow branches depending on the conditions, if the processing in the imaging flow can be executed in parallel, it can be executed in parallel with the processing in the measurement flow, so the inspection tact is reduced as a whole. It becomes possible to do.

(Embodiment 3)
Since the hardware configuration of the visual inspection apparatus according to the third embodiment of the present invention is the same as that of the first and second embodiments, detailed description thereof will be omitted by attaching the same reference numerals. The appearance inspection apparatus according to the third embodiment is different from the first embodiment in that the process is performed only by controlling the execution order of the flow without newly generating an imaging flow, an acquisition flow, and a measurement flow. To do.

  FIG. 12 is a functional block diagram of an appearance inspection apparatus according to Embodiment 3 of the present invention. As shown in FIG. 12, the visual inspection apparatus according to the third embodiment has an imaging execution unit 1201, a measurement flow execution unit 1202, and pass / fail in terms of software using various programs stored in the CPU 11 a and the program memory 11 c described above. The determination unit 1203 is realized.

  In FIG. 12, the appearance inspection apparatus according to the third embodiment does not include a flow generation unit. FIG. 13 is an exemplary diagram of a processing flow of the appearance inspection apparatus according to the third embodiment of the present invention.

  As shown in FIG. 13, the processing flow itself is the same as the processing flow of FIG. 8 of the second embodiment. In the second embodiment, the processing flow is divided, whereas in the third embodiment, the main control unit 11 is composed of multi-cores, and the two cores execute processing separately, thereby simultaneously. Two processes are executed in parallel.

  That is, with the processing flow as it is, one core executes a function from the imaging module function until the inspection object is imaged and stored in the image memory 17a, and the other cores execute from the remaining image memory 17a. A function for acquiring image data and a measurement process are executed.

  Returning to FIG. 12, the imaging execution unit 1201 maintains the relative execution order of the plurality of imaging modules included in the processing flow, and associates them with imaging parameters (parameters) allocated to the plurality of imaging modules. Then, each inspection object is imaged by a plurality of imaging modules and stored in the image memory 17a.

  The measurement flow execution unit 1202 is an image in which the associated imaging parameters match among the stored image data associated with the imaging parameters by a core different from the core that executed the imaging execution unit 1201. A measurement process is executed on the data by the measurement module. The quality determination unit 1203 determines the quality of the inspection object based on the execution result of the measurement process.

  In this way, since the image data captured with the corresponding imaging parameter can be prepared according to the processing flow, the measurement process can be executed according to the imaging parameter of the stored image data. It is possible to avoid executing the measurement process with image data captured with no imaging parameters.

  FIG. 14 is a flowchart showing an imaging flow of the appearance inspection apparatus according to the third embodiment of the present invention. In the example of FIG. 14, a case is shown in which processing shifts to the imaging module B due to conditional branching. As shown in FIG. 14, one core of the main controller 11 of the appearance inspection apparatus according to the third embodiment transmits the imaging parameter A to the imaging mechanism (step S1401). The transmitted imaging parameter A is set in the imaging device of the camera 30. After setting the imaging parameter A, the imaging mechanism transmits a trigger signal acceptance permission signal to the external input / output terminal.

  The imaging device receives an input of a trigger signal from the PC 80 and the PLC 70 connected to the external input / output terminal, stores the captured image data in the image memory 17a, and notifies the controller 10 to that effect. One core of the main control unit 11 receives the storage notification (step S1402).

  Here, actually, one core of the main control unit 11 determines whether or not the next process depends on the execution result of the measurement process in the measurement flow. When one core of the main control unit 11 determines that the next process depends on the execution result of the measurement process in the measurement flow, the one core of the main control unit 11 enters a waiting state for completion of the measurement process in the measurement flow. . In the example of FIG. 14, if one core of the main control unit 11 determines that the next process does not depend on the execution result of the measurement process in the measurement flow, the one core of the main control unit 11 sets the imaging parameter B. The image is transmitted to the imaging mechanism (step S1403). The transmitted imaging parameter B is set in the imaging device of the camera 30. After setting the imaging parameter B, the imaging mechanism transmits a trigger signal acceptance permission signal to the external input / output terminal.

  The imaging device receives an input of a trigger signal from the PC 80 and the PLC 70 connected to the external input / output terminal, stores the captured image data in the image memory 17a, and notifies the controller 10 to that effect. One core of the main control unit 11 receives the storage notification (step S1404).

  FIG. 15 is a flowchart showing a measurement flow of the appearance inspection apparatus according to the third embodiment of the present invention. As shown in FIG. 15, the other core of the main control unit 11 of the visual inspection apparatus according to the third embodiment transmits a request signal for image data including at least the imaging parameter A to the imaging mechanism of the controller 10 (step). S1501). The imaging mechanism transmits image data corresponding to the received imaging parameter A to the controller 10 from the image data stored in the image memory 17a. The other core of the main control unit 11 receives the image data (step S1502), and executes measurement processing based on the received image data (step S1503).

  Next, the other core of the main control unit 11 transmits a request signal for image data including at least the imaging parameter B to the imaging mechanism of the controller 10 (step S1504). The imaging mechanism transmits image data corresponding to the received imaging parameter B to the controller 10. The other core of the main control unit 11 receives the image data (step S1505), and executes measurement processing based on the received image data (step S1506). Thereafter, the same processing is repeated for the image data stored in the image memory 17a.

  As described above, according to the third embodiment, the function of the imaging module performs two processes, that is, until the inspection object is imaged and the image data is stored, and thereafter, in another core. Since the parameters at the time of imaging (setting parameters of the imaging means) are associated with each piece of data, measurement processing is not performed using image data with incorrect parameters in the measurement flow. In addition, since it is possible to move to the next imaging flow when the image data is stored, it is possible to image the inspection object without waiting for the end of the measurement flow. Therefore, the inspection tact can be reduced as a whole.

  The present invention is not limited to the above-described embodiments, and various changes and improvements can be made within the scope of the present invention. For example, the CPU 11a that is the main control unit 11 may be a single core or a multi-core. In the case of a single core, a plurality of flows may be executed by time division control, and in the case of a multi-core, an imaging flow and a measurement flow may be executed in units of cores.

10 Controller 11 Main Control Unit 11a CPU
17a Image memory 30 Camera (imaging means)
60 Lighting 70 PLC
80 PC
401 Processing Flow 402 Imaging Flow 403 Measurement Flow

Claims (11)

Imaging means for imaging the inspection object and generating image data;
A controller that executes image processing based on the image data generated by the imaging means and determines whether the inspection object is good,
In the appearance inspection apparatus in which the controller executes a plurality of processing modules assigned parameters according to a control program in synchronization with a processing flow.
The processing module captures an inspection object by at least the imaging means and stores the generated image data;
A measurement module that performs measurement on stored image data,
The controller is
By extracting a plurality of the imaging modules included in the processing flow while maintaining a relative order, an imaging flow and a measurement flow for executing a measurement process in the measurement module based on stored image data are generated. Flow generating means for
In accordance with the generated imaging flow, imaging flow execution means for imaging each inspection object by the plurality of imaging modules in association with the parameters allocated to each of the plurality of imaging modules;
According to the measurement flow generated by the flow generation unit, among the image data captured and stored by the imaging module associated with the parameter, the image data corresponding to the associated parameter is matched. Measurement flow execution means for executing measurement processing by the measurement module;
An appearance inspection apparatus comprising: a quality determination unit that determines quality of an inspection object based on an execution result of a measurement process in a measurement flow. Imaging means for imaging the inspection object and generating image data;
A controller that executes image processing based on the image data generated by the imaging means and determines whether the inspection object is good,
In the appearance inspection apparatus in which the controller executes a plurality of processing modules assigned parameters according to a control program in synchronization with a processing flow.
The processing module captures an inspection object by at least the imaging means and stores the generated image data;
A measurement module that performs measurement on stored image data,
The controller is
While maintaining the relative order of the plurality of imaging modules included in the processing flow, each of the imaging modules is imaged in association with the parameter assigned to each of the plurality of imaging modules. Imaging execution means for storing
A measurement flow execution means for executing measurement processing by the measurement module on image data corresponding to the associated parameter among stored image data associated with the parameter;
An appearance inspection apparatus comprising: a quality determination unit that determines quality of an inspection object based on an execution result of a measurement process in a measurement flow.   The appearance inspection apparatus according to claim 1, wherein whether to wait for execution of the processing of the imaging module is determined based on whether or not the execution result of the preceding processing module depends.   The appearance inspection apparatus according to claim 3, wherein when the preceding processing module is the measurement module, the process waits until the execution of the process of the imaging module is completed.   The execution of the process of the next imaging module is started when the execution of the process of the preceding imaging module is completed when the preceding processing module is the imaging module. Appearance inspection device. Imaging means for imaging the inspection object and generating image data;
A controller that executes image processing based on the image data generated by the imaging means and determines whether the inspection object is good,
In the visual inspection method that can be executed by the visual inspection device that executes the plurality of processing modules to which the parameters are assigned in synchronization with the processing flow according to the control program,
The processing module captures an inspection object by at least the imaging means and stores the generated image data;
A measurement module that performs measurement on stored image data,
The controller is
By extracting a plurality of the imaging modules included in the processing flow while maintaining a relative order, an imaging flow and a measurement flow for executing a measurement process in the measurement module based on stored image data are generated. And steps to
In accordance with the generated imaging flow, in association with the parameters assigned to each of the plurality of imaging modules, respectively, imaging each inspection object with the plurality of imaging modules;
In accordance with the generated measurement flow, measurement data is measured by the measurement module for image data that matches the associated parameter among the image data captured and stored by the imaging module associated with the parameter. Executing the process;
And a step of determining pass / fail of the inspection object based on an execution result in the measurement flow. Imaging means for imaging the inspection object and generating image data;
A controller that executes image processing based on the image data generated by the imaging means and determines whether the inspection object is good,
In the visual inspection method that can be executed by the visual inspection device that executes the plurality of processing modules to which the parameters are assigned in synchronization with the processing flow according to the control program,
The processing module captures an inspection object by at least the imaging means and stores the generated image data;
A measurement module that performs measurement on stored image data,
The controller is
While maintaining the relative execution order of the plurality of imaging modules included in the processing flow, the plurality of imaging modules respectively inspect the inspection target in association with the parameters assigned to the plurality of imaging modules. Imaging and storing, and
Executing measurement processing by the measurement module on image data that matches the associated parameter among the stored image data associated with the parameter;
And a step of determining pass / fail of the inspection object based on an execution result in the measurement flow.   8. The appearance inspection method according to claim 6, wherein whether or not to wait for execution of the processing of the imaging module is determined based on whether or not it depends on an execution result of a preceding processing module.   The visual inspection method according to claim 8, wherein when the preceding processing module is the measurement module, the process waits for the execution of the process of the imaging module until the execution of the process of the measurement module is completed.   The execution of the next process of the imaging module is started when the execution of the process of the preceding imaging module is completed when the preceding processing module is the imaging module. Appearance inspection method. Imaging means for imaging the inspection object and generating image data;
A controller that executes image processing based on the image data generated by the imaging means and determines whether the inspection object is good,
In the computer program that can be executed by the appearance inspection apparatus that the controller executes a plurality of processing modules assigned parameters according to a control program in synchronization with the processing flow,
The processing module captures an inspection object by at least the imaging means and stores the generated image data;
A measurement module that performs measurement on stored image data,
The controller,
By extracting a plurality of the imaging modules included in the processing flow while maintaining a relative order, an imaging flow and a measurement flow for executing a measurement process in the measurement module based on stored image data are generated. Flow generation means
In accordance with the generated imaging flow, imaging flow execution means for imaging the inspection object by the plurality of imaging modules in association with the parameters allocated to the plurality of imaging modules,
According to the measurement flow generated by the flow generation unit, among the image data captured and stored by the imaging module associated with the parameter, the image data corresponding to the associated parameter is matched. A computer program which functions as measurement flow execution means for executing measurement processing by the measurement module, and pass / fail determination means for determining pass / fail of an inspection object based on an execution result in the measurement flow.

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