KR20190108044A - Defect checking apparatus, defect checking method and computer readable recording medium - Google Patents

Abstract

An accuracy of confirming in an operation of confirming a defect is improved. A defect confirming device for confirming an existence and nonexistence of the defect in an object to be inspected is equipped with an acquisition part and an output control part. The acquisition part acquires the defect image data which is likely to capture the defect and the reference image data which becomes a reference for the same part of the same size of the object to be inspected. The output control part visually outputs the defect image data and the reference image data in a time sequence by at least one time in the same display area by the output part.

Description

DEFECT CHECKING APPARATUS, DEFECT CHECKING METHOD AND COMPUTER READABLE RECORDING MEDIUM}

The present invention relates to a defect identification apparatus, a defect identification method and a computer-readable storage medium. Specifically, the present invention provides a technique for inspecting various patterns formed on substrates such as various patterns such as wiring patterns on printed circuit boards or various masks such as resists for producing printed circuit boards. It is for. In particular, the present invention relates to a technique of visually outputting, for example, a reference image as a reference for comparison with an image of an inspection object.

For example, the defect confirmation apparatus for confirming the defect in various patterns is proposed with respect to the target object in which various patterns, such as a wiring pattern, were formed on base materials, such as a printed board (for example, patent document 1). See description of).

In this defect confirmation apparatus, the inspection image obtained by image | photographing a part of inspection object and the reference image which are a comparison object are displayed in the state lined up simultaneously, for example. At this time, a user can confirm the presence or absence of a defect with respect to the site | part captured by the inspection image by comparing a inspection image and a reference image.

Japanese Patent Publication No. 2005-91161

However, in the technique of the said patent document 1, in order to move a line of sight between a test image and a reference image, for example, when comparing a test image and a reference image, there exists a possibility that a real defect may be overlooked. In addition, for example, there is a possibility that a genuine defect may easily be overlooked due to accumulation of fatigue of the user due to movement of the eye. That is, there exists a possibility that the confirmation precision in the operation | work which identifies a defect may fall.

This invention is made | formed in view of the said subject, and an object of this invention is to improve the confirmation precision in the operation | work which identifies a defect.

In order to solve the said subject, the defect confirmation apparatus which concerns on a 1st aspect is a defect confirmation apparatus which confirms the presence or absence of the defect in a test target, and is provided with an acquisition part and an output control part. The said acquisition part acquires the defect image data which may have caught the defect, and the reference image data which becomes a reference | standard about the same part of the same size of the said test subject. The output control unit visually outputs the defect image data and the reference image data sequentially in the same display area at least once in time.

The defect confirmation apparatus which concerns on a 2nd aspect is a defect confirmation apparatus which concerns on a 1st aspect, The said output control part is the part which a defect might exist in addition to the said defect image data by the said output part to a user. The visually perceptible elements are displayed visually.

The defect confirmation apparatus which concerns on a 3rd aspect is a defect confirmation apparatus which concerns on a 1st or 2nd aspect, The said output control part makes the said defect image data and the said reference image data to the same display area by the said output part. Alternately outputs visually.

The defect confirmation apparatus which concerns on 4th aspect is a defect confirmation apparatus which concerns on 3rd aspect, Comprising: The input part which inputs the signal according to the operation of a user is further provided, The said output control part is the said input part which concerns on the 1st operation by a user. In response to the input of the first signal, the output unit stops the alternate output process of alternately visually outputting the defective image data and the reference image data in the same display area.

The defect confirmation apparatus which concerns on 5th aspect is a defect confirmation apparatus which concerns on 4th aspect, The said output control part is made by the user with the said defect image data by the said output part in response to the stop of the said alternating output process. The element related to the defective image which becomes recognizable is outputted, or the element related to the reference image which can be recognized by a user is output together with the said reference image data.

The defect confirmation apparatus which concerns on 6th aspect is a defect confirmation apparatus which concerns on 5th aspect, Comprising: The said output control part stops the said alternating output process, and after that, the 2nd signal by the said input part according to the 2nd operation by a user is carried out. In response to the input, the output unit visually outputs the defective image data and the reference image data in the same display area so as to overlap.

The defect confirmation apparatus which concerns on 7th aspect is a defect confirmation apparatus which concerns on any one of 1st-5th aspect, The said output control part visually outputs image data in the same display area by the said output part. A second output state in which the state is visually outputted so as to superimpose the defect image data and the reference image data from a first output state in which the first image data among the defect image data and the reference image data is visually outputted; Then, the second image data different from the first image data among the defective image data and the reference image data is shifted to a third output state where the image is visually output.

The defect confirmation method which concerns on 8th aspect is a defect confirmation method which confirms the presence or absence of the defect in a test target, and has a 1st step and a 2nd step. In the first step, the defective image data which may have caught the defect, and the reference image data as the reference, are acquired for the same portion of the same size of the inspection object. In the second step, the output unit visually outputs the defective image data and the reference image data acquired in the first step at least once in a time sequence to the same display area.

The defect confirmation method which concerns on 9th aspect is a defect confirmation method which concerns on 8th aspect, In the said 2nd step, in the said 2nd step, in the said part, in addition to the said defect image data, the part in which there exists a possibility that a defect may exist Visually outputs elements that can be visually recognized by the user.

The defect confirmation method which concerns on a 10th aspect is a defect confirmation method which concerns on 8th or 9th aspect, In the said 2nd step, the said defect image data and the said reference image are made to the said same display area by the said output part. Output data alternately.

The defect confirmation method according to the eleventh aspect is the defect confirmation method according to the tenth aspect, and in the second step, in response to the input of the first signal by the input unit according to the first operation by the user, the output unit This stops the alternate output processing for alternately visually outputting the defective image data and the reference image data in the same display area.

The defect confirmation method according to the twelfth aspect is the defect confirmation method according to the eleventh aspect, in the second step, in response to the stop of the alternate output processing, together with the defect image data by the output unit, The element related to the defective image which can be recognized by the user is outputted, or the element related to the reference image which can be recognized by the user is output together with the reference image data.

A defect confirming method according to a thirteenth aspect is a defect confirming method according to a twelfth aspect, wherein in the second step, after stopping the alternate output processing, a second operation by the input unit according to the second operation by the user is made. In response to the signal input, the output unit visually outputs the defective image data and the reference image data in the same display area so as to overlap.

A defect confirmation method according to a fourteenth aspect is a defect identification method according to any one of eighth to twelfth aspects, wherein in the second step, the output unit visually displays image data in the same display area. The second output which visually outputs the output state so that the said defect image data and the said reference image data may overlap from the 1st output state which visually outputs the 1st image data of the said defect image data and the said reference image data. The state transitions to a third output state in which second image data different from the first image data among the defective image data and the reference image data is visually output.

The computer-readable storage medium in which the program according to the fifteenth aspect is stored is a computer-readable medium which realizes the first step and the second step when the program is executed by the processor of the controller in the information processing apparatus. It is a storage medium. In the first step, the defect image data that may have captured the defect and the reference image data as a reference are acquired for the same portion of the same size of the inspection object. In the second step, the output unit visually outputs the defect image data and the reference image data acquired in the first step at least once in a time sequence to the same display area.

In either of the defect confirming apparatus according to the first aspect and the defect confirming method according to the eighth aspect, for example, the defect image data and the reference image data are sequentially time-sequenced for the same portion of the same size in the same display area. When visually outputted, the user can compare the defect image with the reference image without shifting the line of sight. Thus, for example, it becomes difficult for the user to overlook the real defect of the inspection object and does not get tired easily. As a result, for example, the confirmation accuracy in the work of confirming the defect of the inspection object can be improved.

In either of the defect confirming apparatus according to the second aspect and the defect confirming method according to the ninth aspect, for example, in addition to the defect image data, there is an element that makes it possible to visually recognize a portion where a defect may exist. If it is output visually, a user can easily find out the real defect in an inspection object. As a result, for example, a user can confirm the presence or absence of a defect with respect to an inspection object with high precision.

In either of the defect confirming apparatus according to the third aspect and the defect confirming method according to the tenth aspect, for example, in the same display area, the defect image data and the reference image data alternately with respect to the same portion of the same size. When visually outputted, the user can easily compare the defect image with the reference image without shifting the line of sight. Thereby, for example, a user can easily find out the genuine defect in an inspection object. As a result, for example, the confirmation accuracy in the work of confirming the defect with respect to the inspection object can be further improved.

By any of the defect confirmation apparatus concerning a 4th aspect, and the defect confirmation method concerning an 11th aspect, if a user can stop the process which the defect image data and the reference image data are visually output alternately, for example, The presence or absence of the genuine defect in an inspection object can be confirmed calmly.

In either of the defect confirming apparatus according to the fifth aspect and the defect confirming method according to the twelfth aspect, for example, in the user, the image displayed by the display unit is either the defect image data or the reference image data. We can recognize whether it depends on. Thereby, for example, a user can easily find out the genuine defect in an inspection object. As a result, for example, the confirmation accuracy in the work of confirming the defect with respect to the inspection object can be further improved.

If either of the defect confirmation apparatus according to the sixth aspect and the defect confirmation method according to the thirteenth aspect is visually output such that the defect image data and the reference image data overlap, for example, the user is based on the defect image data. The difference between the visually output defect image and the reference image output based on the reference image data can be easily recognized.

If either of the defect confirming apparatus according to the seventh aspect and the defect confirming method according to the fourteenth aspect exists, for example, when there is a time zone that is visually output such that the defect image data and the reference image data overlap, the user can: The difference between the defect image visually output based on the defect image data and the reference image output based on the reference image data can be easily recognized.

According to the computer-readable storage medium which concerns on 15th aspect, the same effects as the defect confirmation apparatus which concerns on a 1st aspect, and the defect confirmation method which concerns on an 8th aspect can be acquired.

1 is a diagram illustrating a schematic configuration of an example of a defect inspection system according to a first embodiment.
2 is a diagram illustrating a functional configuration of an example of the inspection apparatus.
3 is a diagram illustrating an electrical configuration of an example of a defect checking device.
4 is a diagram illustrating a functional configuration of an example of a defect checking apparatus.
5 is a diagram illustrating an example of a defect selection screen.
6 is a diagram illustrating an example of a defect confirmation screen.
7 is a diagram illustrating an example of a reference confirmation screen.
8 is a flowchart illustrating an example of an operation flow of a defect checking apparatus according to the first embodiment.
9 is a flowchart illustrating an example of an operation flow of a defect checking apparatus according to the first embodiment.
10 is a flowchart illustrating an example of an operation flow of a defect checking apparatus according to the first embodiment.
FIG. 11 is a diagram illustrating an example of a reference confirmation screen according to the second embodiment. FIG.
12 is a diagram illustrating an example of an overlapping confirmation screen according to the third embodiment.
It is a flowchart which shows an example of the operation flow of the defect confirmation apparatus which concerns on 4th Embodiment.
14 is a flowchart showing an example of an operation flow of a defect checking device according to a fourth embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, each embodiment of this invention is described based on drawing. In the drawings, the same reference numerals are given to parts having the same configuration and function, and duplicate descriptions are omitted in the following description. The drawings are schematically shown.

<1. First embodiment>

<1-1. Outline of Defect Inspection System>

FIG. 1: is a figure which shows schematic structure of an example of the defect confirmation system 100 containing the defect confirmation apparatus 3 which concerns on 1st Embodiment. The defect confirmation system 100 has the structure by which the test | inspection apparatus 1 and the defect confirmation apparatus 3 were connected so that communication was possible through the communication line 2. As the communication line 2, various network lines such as a LAN (Local Area Network) or a public line or a wired line such as a cable or the like is applied. The network line may be any network line, for example, as long as it enables data communication between the inspection apparatus 1 and the defect identification apparatus 3 using a predetermined communication protocol or the like set in advance. The plurality of inspection devices 1 may be connected to the communication line 2, or the plurality of defect checking devices 3 may be connected.

<1-2. Summary of inspection device ＞

2 is a block diagram showing a functional configuration of an example of the inspection apparatus 1 according to the first embodiment. The inspection apparatus 1 may be, for example, an operation unit 11, a display unit 12, a control unit 13, a moving mechanism 14, an imaging unit 15, a processing unit 16, a storage unit 17, and a communication unit. (18) is provided.

The operation part 11 can input an instruction | indication to the test | inspection apparatus 1, for example in response to the operation by an operator. The operation unit 11 may include, for example, various buttons, a keyboard and a mouse. For example, a track ball, a joystick, a touch panel, or the like may be applied to the operation unit 11.

The display part 12 has a function which can visually output various data, for example. The display unit 12 may include various displays such as, for example, a liquid crystal display or an organic EL display. The display part 12 may contain various light emitting parts, such as a light emitting diode (LED) or a lamp, for example.

The control part 13 has a function which can collectively control the operation | movement of each part of the test | inspection apparatus 1, for example. The control unit 13 has a calculation processing circuit such as a central processing unit (CPU) and a storage unit such as a random access memory (RAM), for example, to calculate a program stored in the storage device 17. Various functions can be realized by executing in the processing circuit. This control part 13 is a control signal to each part, such as the display part 12, the moving mechanism 14, the imaging part 15, the processing part 16, the memory | storage device 17, and the communication part 18, for example. By transmitting, the operation of each unit can be controlled. At least one function of the function of the control part 13 may be comprised by hardware, such as a dedicated electronic circuit, for example.

The moving mechanism 14 has a function of, for example, holding an object to be inspected (also referred to as an inspection object) and moving the inspection object relative to the imaging unit 15. As the inspection object, for example, a substrate 90 or the like is employed. This movement mechanism 14 can move the stage holding the board | substrate 90 based on the control signal from the control part 13, for example. For example, the movement mechanism 14 can detect the position of the board | substrate 90 or a stage with a sensor, such as an encoder, and can transmit it to the control part 13. Here, for example, the movement mechanism 14 may have the structure which moves the imaging part 15 relatively with respect to the test object.

The imaging part 15 has a function which can image the surface (also called a to-be-tested surface) of the board | substrate 90 as an inspection object, for example. As the imaging unit 15, for example, one having a function equivalent to that of a general CCD camera is applied. The imaging unit 15 acquires image data by imaging for each region (also referred to as a divided region or a block) divided into a predetermined size, which is set in advance, on the inspection surface of the substrate 90, and these images The data may be transferred to the processor 16.

The processing unit 16 has a function of, for example, performing predetermined image recognition processing preset on each image data acquired by the imaging unit 15 to determine whether a defect exists on the inspection surface. . The predetermined image recognition processing includes, for example, pattern matching or the like that compares the image data obtained by capturing a block in which no defect exists. Here, for example, predetermined image recognition is performed on image data obtained by imaging for each block divided for the inspection surface of the substrate 90, so that it is possible to determine whether a defect exists for each block of the inspection surface. .

Moreover, the processing part 16 produces | generates the information (also called defect information) about a defect based on the determination result regarding the presence or absence of a defect for every block of a to-be-tested surface, for example, and controls this defect information to a control part ( 13) has the ability to deliver. In the defect information, for example, identification information specifying image data (also referred to as defect image data) for capturing a block determined to be present, information indicating the position of the block, information indicating the size of the block, and a block. Information indicating the position of a region (also referred to as a defect region) determined to be present in the defect and information indicating the size of the defect region may be included. Defect information can be created for every board | substrate 90 as an inspection object, for example. At this time, for example, a defect information group including one or more defect information for one or more substrates 90 can be created. The defect information may include, for example, data of a thumbnail image related to the defect image data.

Here, the identification information related to the defect image data includes, for example, a data file name. Thus, for example, a state in which the defect image data and the defect information are combined is realized. Information indicating the position of the block includes, for example, coordinates of a predetermined position such as the center position of the block. As a coordinate of a predetermined position, the coordinate which shows the position in the board | substrate 90 directly can be used, for example. The information indicating the size of the block includes, for example, the longitudinal and horizontal dimensions of the substrate 90. Information indicating the position of the defect area includes, for example, coordinates of a predetermined position such as the center position of the defect area in the block. As the information indicating the position of the defect area, for example, coordinates directly indicating the position on the substrate 90 may be used. The information indicating the size of the defective area may be, for example, information indicating the vertical and horizontal dimensions of the defective area or information indicating the number of pixels in the image data. Here, the defect image data may be image data which captured the whole to-be-tested surface of the board | substrate 90, for example. In this case, the defect information may not include, for example, information indicating the position of the block and information indicating the size of the block.

In addition, the processing unit 16 stores image data (also referred to as standard image data) that captures a block in which no defect exists, based on a determination result related to whether or not a defect exists for each block of the inspection surface. It also has a function of creating related information (also referred to as standard information) and transferring the standard information to the control unit 13. The standard information may include, for example, identification information specifying standard image data obtained by capturing a block in which no defect is present and information indicating the size of the block. Identification information related to standard image data includes, for example, a data file name. Thus, for example, a state in which standard image data and standard information are combined is realized. The information indicating the size of the block includes, for example, the longitudinal and horizontal dimensions of the substrate 90.

Here, for example, the standard image data may be image data obtained by capturing the entire inspection surface of the substrate 90. In this case, for example, in the processing unit 16 or the defect checking apparatus 3, reference image data to be described later corresponding to the defect image data from the standard image data based on the defect information coupled to the defect image data. May be extracted. In this case, for example, the reference image data corresponding to the defect image data can be extracted from the standard image data based on the information indicating the position of the block and the information indicating the size of the block included in the defect information. .

The storage device 17 stores, for example, a defect information group including image data obtained by the imaging unit 15 and one or more defect information obtained by the processing unit 16 under the control of the control unit 13. I can remember. This storage device 17 may be constituted by a storage medium such as a hard disk or a flash memory, for example. Here, in the image data obtained by the imaging unit 15 stored in the storage device 17, for example, standard image data that captures a block in which no defect exists, and a block determined to exist. The defect image data which captured this is contained. In the storage device 17, the standard image data obtained by capturing the corresponding block and the defective image data may be stored in the different substrates 90 in association with each other. The standard image data can be used, for example, as image data (also referred to as reference image data) serving as a reference for comparison in which a block having no defect is present in the defect confirmation device 3 described later. Moreover, the memory | storage device 17 can store the program, various data, etc. for implementing the various functions in the control part 13, for example.

The communication part 18 has a function which can perform data communication with the defect confirmation apparatus 3 via the communication line 2, for example. The communication unit 18, for example, in response to a request from the defect confirmation device 3, the defective image data stored in the storage device 17, the defect information related to this defective image data, and this defect. Reference image data or the like corresponding to the image data can be transmitted to the defect identification device 3. The defect image data and the reference image data corresponding to the defect image data are image data obtained by capturing the same portions of the same size of the inspection surface of the substrate 90 as the inspection object. The communication unit 18 may transmit standard image data, standard information, and the like, for example.

In addition, in the above description, the inspection surface of the board | substrate 90 is imaged for every block, and an inspection is performed, You may image and inspect an inspection surface of the board | substrate 90 without dividing into blocks. In this case, after inspection, the inspection surface of a board | substrate can be divided into blocks, and the block judged that a defect exists can be made into defect image data. Moreover, it is also possible to make into predetermined | prescribed area image containing the position where the defect was determined to be defect image data, without dividing the test surface of the board | substrate 90 into a block.

<1-3. Configuration of Defect Checking Device>

3 is a block diagram showing an example of the electrical configuration of the defect checking apparatus 3. The defect confirmation apparatus 3 is image data which is the object of confirmation (also called confirmation object) which may have caught the defect, for example the defect image data judged that the defect exists in the inspection apparatus 1. It is a device to check whether a real defect (also called a defect) exists. In other words, the defect confirmation apparatus 3 is an apparatus for confirming the presence or absence of the defect in an inspection object.

As shown in FIG. 3, the defect confirmation apparatus 3 is realized by the information processing apparatus 30, such as a computer, for example, and is connected with the communication part 31 and the input part (connected via the bus line Bu1). 32, an output unit 33, a storage unit 34, a control unit 35, and a drive 36 are provided.

The communication part 31 has a function which can perform data communication with the test | inspection apparatus 1 via the communication line 2, for example. The communication unit 31, for example, transmits defect image data, defect information related to the defect image data, reference image data corresponding to the defect image data, and the like transmitted from the communication unit 18 of the inspection apparatus 1. Can be received. This communication part 31 may receive the standard image data transmitted from the communication part 18 of the test | inspection apparatus 1, for example.

The input part 32 has a function which can input the signal according to the operation | movement of the user using the defect identification apparatus 3, etc., for example. The input unit 32 may include, for example, an operation unit, a microphone, various sensors, and the like. The operation unit may include a mouse and a keyboard for inputting a signal according to a user's operation. The microphone may input a signal according to the voice of the user. Various sensors may input signals according to the movement of the user.

The output part 33 has a function which can output various information, such as image data, for example. The output unit 33 may include, for example, a display unit, a projector, a speaker, and the like. For example, the display unit may visually output various types of information in a form that the user can recognize. For example, a liquid crystal display, an organic EL display, or the like can be applied to the display unit. In the display unit, the display panel has a role of a region (also called a display region) in which various kinds of information are visually output. This display portion may have the form of a touch panel integrated with the input portion 32. The projector can, for example, output various types of information on a projected object such as a screen in a form that can be recognized by a user. Here, the projector and the projected object cooperate to play a role as a display unit for visually outputting various types of information in a form that can be recognized by a user. At this time, for example, an area in which various kinds of information is visually output in the projected object serves as a display area. For example, the speaker may audibly output various types of information in a form that the user can recognize.

The storage unit 34 has, for example, a function capable of storing various kinds of information. This storage unit 34 may be constituted by a storage medium such as a hard disk or a flash memory, for example. In the storage unit 34, for example, any one of a configuration having one storage medium, a configuration having two or more storage media integrally, and a configuration having two or more storage media divided into two or more portions may be used. It may be employed. In the storage unit 34, for example, a computer program (hereinafter abbreviated as program) Pg1 and various data Id1 can be stored. The various data Id1 may include, for example, defect image data received by the communication unit 31 and defect information related to the defect image data. The various data Id1 may include, for example, reference image data or standard image data corresponding to the defective image data received by the communication unit 31.

The control part 35 includes the arithmetic processing part 35a which acts as a processor, the memory 35b which temporarily stores information, etc., for example. For example, an electric circuit such as a central computing unit (CPU) can be applied to the arithmetic processing unit 35a. In this case, the arithmetic processing part 35a should just have 1 or more processors, for example. For example, a random access memory (RAM) or the like may be applied to the memory 35b. In the arithmetic processing unit 35a, for example, the program Pg1 stored in the storage unit 34 is read and executed, whereby the information processing device 30 can function as the defect confirmation device 3. Various kinds of information temporarily obtained by various kinds of information processing in the control unit 35 can be stored in the appropriate memory 35b or the like.

The drive 36 is a portion in which the removable storage medium RM1 can be attached or detached, for example. In the drive 36, for example, the data transfer between the storage medium RM1 and the control unit 35 can be performed while the storage medium RM1 is mounted. Here, for example, when the storage medium RM1 in which the program Pg1 is stored is mounted in the drive 36, the program Pg1 may be read from the storage medium RM1 into the storage unit 34 and stored therein. In this case, the storage medium RM1 is a computer-readable storage medium that stores the program Pg1. For example, the defect image data, the defect information related to this defect image data, and the like may be read from the storage medium RM1 into the storage unit 34 and stored as at least part of the various data Id1. For example, the reference image data, the standard image data, etc. corresponding to the defective image data may be read from the storage medium RM1 into the storage unit 34, and may be stored as at least part of the various data Id1.

4 is a block diagram showing an example of a functional configuration of the defect checking device 3 realized by the processing in the arithmetic processing unit 35a. In FIG. 4, various functions related to data processing realized by execution of the program Pg1 in the arithmetic processing unit 35a are illustrated.

As shown in FIG. 4, the arithmetic processing unit 35a is a functional configuration realized. For example, the signal processing unit 351, the acquisition unit 352, the storage control unit 353, and the output control unit ( 354). As a work space in the processes in these units 351 to 354, for example, the memory 35b is used. In addition, the function of at least one part of the functional structure implemented by the arithmetic processing part 35a may be comprised by hardware, such as a dedicated electronic circuit, for example.

The signal reception unit 351 has a function of receiving a signal input from the input unit 32, for example.

The acquisition unit 352 is, for example, from the communication unit 31, the storage unit 34, the drive 36, or the like, for the same portion of the same size of the substrate 90 as the inspection object, the defective image data, It has a function which can acquire the reference image data corresponding to this defect image data. Moreover, the acquisition part 352 has the function which can acquire the defect information related to this defect image data, for example.

The storage control unit 353 has, for example, a function capable of storing various data obtained by the processing in the arithmetic processing unit 35a in at least one of the storage unit 34 and the memory 35b.

For example, the output control unit 354 visually visualizes the defect image data and the reference image data corresponding to the defect image data at least once in time in the same display area of the display unit by the output unit 33. It has the function to output. In this way, the user can compare the defect image related to the defect image data with the reference image related to the reference image data corresponding to the defect image data without shifting the line of sight. For this reason, for example, it becomes difficult for a user to overlook the authenticity in a test object, and does not become tired easily. As a result, for example, the confirmation accuracy in the work of confirming the defect of the inspection object can be improved.

Here, a display example of a screen on which defect image data, reference image data, and the like are visually output will be described.

FIG. 5 schematically shows an example of a screen (also called a defect selection screen) Sn0 for selecting defective image data to be visually output by the output unit 33 with respect to one substrate 90. Drawing. As illustrated in FIG. 5, the defect display screen Sn0 includes, for example, a first display area Ar1, a second display area Ar2, and a third display area Ar3. The first display area Ar1 is an area for displaying defect information, for example. The second display area Ar2 is an area for displaying an image. In the example of FIG. 5, the thumbnail image Si1 related to one or more defect image data for one substrate 90 is displayed in the second display region Ar2. The third display area Ar3 is an area indicating the position of a block related to the defective image data in the substrate 90. In the example of FIG. 5, on the whole image (also called whole image) Su0 of the whole board | substrate 90, the outer edge of the block which concerns on defect image data is shown by the edge Fr1. In the defect selection screen Sn0, the user selects a desired thumbnail image Si1 from the thumbnail image Si1 related to one or more defect image data displayed in the second display area Ar2 with the mouse pointer M1. Can be. Thereby, desired defect image data can be selected from the one or more defect image data as the defect image data which is the confirmation object which confirms the presence or absence of authenticity. Here, the operation of the mouse pointer M1 is based on the signal received by the signal receiving unit 351 in response to a signal input by the input unit 32 according to the user's operation, for example, and output controller 354. May be represented by In addition, in the example of FIG. 5, by pressing down the confirmation start button B0 with the mouse pointer M1, the defect image data which is confirmation object which confirms the presence or absence of any defect image data from one or more defect image data. As an alternative, the automatic selection operation can be started.

FIG. 6 is a diagram showing an example of a screen (also referred to as a defect confirmation screen) Sn1 for confirming a defect. As illustrated in FIG. 6, the defect confirmation screen Sn1 has, for example, a first display region Ar1, a second display region Ar2, and a third display region (similar to the defect selection screen Sn0). Ar3) is present. In the defect confirmation screen Sn1, for example, an image (also referred to as a defect image) Im1 related to the defect image data which is the confirmation target selected on the defect selection screen Sn0 or the like in the second display area Ar2 is largely displayed. do. In the example of FIG. 6, the defect image Im1 includes various patterns Pt1 on the substrate 90. At this time, for example, on the whole image Su0 in the third display area Ar3, the block associated with the defective image Im1 displayed in the second display area Ar2 is distinguished from other blocks. In order to become possible, the display mode in the edge Fr1 or the edge Fr1 may be changed.

FIG. 7 is a diagram showing an example of a screen (also referred to as a reference confirmation screen) Sn2 on which reference image data is visually output. As shown in FIG. 7, the reference confirmation screen Sn2 is a reference in which the defect image Im1 displayed in the second display area Ar2 of the defect confirmation screen Sn1 corresponds to this defect image Im1. It is a screen changed into the image (also called a reference image) Im2 related to image data. At this time, for example, the defect image Im1 and the reference image Im2 displayed in the second display area Ar2 may be images of the same size for the same portion of the same size of the inspection surface.

Here, when the defect confirmation screen Sn1 shown in FIG. 6 and the reference confirmation screen Sn2 shown in FIG. 7 are sequentially displayed at least once in time, the user can display the same second display without moving the gaze. The defect image Im1 and the reference image Im2 displayed sequentially in the area Ar2 can be compared. As a result, for example, it is difficult for the user to overlook the integrity of the substrate 90 and does not easily fatigue. As a result, the confirmation accuracy in the operation | work which confirms the defect of the board | substrate 90 can improve, for example. Here, for example, the reference confirmation screen Sn2 may be displayed after the defect confirmation screen Sn1 is displayed, or the defect confirmation screen Sn1 may be displayed after the reference confirmation screen Sn2 is displayed. At this time, the switching between the defect confirmation screen Sn1 and the reference confirmation screen Sn2 may be, for example, automatic switching based on a preset rule, and responds to a signal input from the input unit 32 according to a user's operation. One manual switching may be used.

In addition, the output control part 354 here uses the output part 33, for example with the defect image data, and the element which the part which the defect might exist may be visually recognizable by a user. It may have a function to output visually. In this case, for example, as shown in FIG. 6, the defect area judged that a defect exists in the inspection apparatus 1 is displayed on the defect image Im1 on the defect confirmation screen Sn1. It may be shown by elements Fm11 and Fm12. As the display elements Fm11 and Fm12, edges are positioned so as to surround the defective areas, respectively. In the output control part 354, the position and size of the defect area in the defect image Im1 can be set based on the information regarding the position and size of the defect area contained in defect information, etc., for example. If such a configuration is adopted, for example, the user can easily find out the seriousness of the substrate 90. As a result, for example, a user can confirm the presence or absence of a defect with respect to the board | substrate 90 with high precision.

In addition, the output control part 354 may visually output the defect image data and the reference image data alternately by the output part 33 to the same display area of the display part here, for example. In this case, for example, the defect confirmation screen Sn1 shown in FIG. 6 and the reference confirmation screen Sn2 shown in FIG. 7 may be displayed alternately. At this time, for example, the defect confirmation screen Sn1 and the reference confirmation screen Sn2 may be switched at preset timings. As this preset timing, the timing of a preset time interval is employ | adopted, for example. If such a configuration is adopted, for example, in the same second display area Ar2, defective image data and reference image data are visually outputted alternately with respect to the same portion having the same size. For this reason, the user can easily compare the defect image Im1 and the reference image Im2, without moving a line of sight. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, the confirmation accuracy in the operation | work which confirms a defect with respect to the board | substrate 90 can further improve.

In addition, here, the output control part 354 responds to the input of the 1st signal by the input part 32 according to the 1st operation | movement by a user, for example, by the output part 33 the same 2nd display. You may have a function which can stop the process (also called alternating output process) which visually alternately outputs defect image data and reference image data in area | region Ar2. In this case, for example, when the defect confirmation screen Sn1 shown in FIG. 6 and the reference confirmation screen Sn2 shown in FIG. 7 are displayed alternately, the defect confirmation screen Sn1 and the reference confirmation screen ( Switching of the display may be stopped in the state displayed on either of Sn2). In the example of FIG. 6, when the stop button B1 of the defect confirmation screen Sn1 is pressed down by the mouse pointer M1 and the switching of the display is stopped, the state where the defect confirmation screen Sn1 is displayed is maintained. In the example of FIG. 7, when the stop button B1 of the reference confirmation screen Sn2 is pressed down by the mouse pointer M1 and the switching of the display is stopped, the state where the reference confirmation screen Sn2 is displayed is maintained. If such a configuration is adopted, for example, the user can calmly check the presence or absence of authenticity in the inspection object at his or her own pace.

In addition, in the example of FIGS. 6 and 7, the stop button B1 is pressed down again by the mouse pointer M1, so that the switching of the display can be stopped. That is, the output control unit 354, for example, in response to the input of the predetermined signal by the input unit 32 according to the predetermined operation by the user, by the output unit 33, the same second display area ( Ar2) may have a function of releasing a state in which the alternate output processing for alternately visually outputting the defective image data and the reference image data is stopped, and restarting the alternate output processing. Here, the stop button B1 may indicate that the alternating output processing is stopped due to a change in color or a change in characters in response to the first reduction by the mouse pointer M1, for example. It may show that the alternating output process is performed by the color change or the character change according to the 2nd press by the mouse pointer M1. For example, what is called a reverse process is applied to a change of color. For example, the change of the character between STOP and RESTART is applied to the change of the character.

Here, the output control unit 354, for example, in response to the stop of the alternating output processing, the output unit 33, in addition to the defect image data, an element related to the defect image that can be recognized by the user. It may have a function to output the. The element related to a defect image should just be an element which can recognize that the defect image Im1 is displayed by a user, for example. For example, the output part 33 applies the first mark Mk1 displayed near the defect image Im1 or on the defect image Im1 to the element related to the defect image. In the first mark Mk1, for example, a specific character element ("defect" in the example of FIG. 6) shown in FIG. 6, a specific pattern, a specific monogram, and a specific image surrounding the defective image Im1 are identified. The specific background color of the frame or the defect image Im1, or the like is applied. If such a configuration is adopted, for example, the user can recognize which of the displayed image is either the defective image Im or the reference image Im2. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, the confirmation accuracy in the operation | work which confirms a defect with respect to the board | substrate 90 can further improve.

Here, the output control unit 354, for example, in response to the stop of the alternating output processing, the element related to the reference image that can be recognized by the user along with the reference image data by the output unit 33. It may have a function to output the. The element related to a reference image may be an element which can recognize that the reference image Im2 is displayed by the user, for example. The second mark Mk2 displayed near the reference image Im2 or on the reference image Im2 is applied to the element related to the reference image, for example, by the output unit 33. In the second mark Mk2, for example, a specific character element ("reference" in the example of FIG. 7) shown in FIG. 7, a specific pattern, a specific monogram, and a specific image surrounding the reference image Im2 are included. The specific background color of the frame or the reference image Im2 is applied. If such a configuration is adopted, for example, the user can recognize which of the displayed image is either the defective image Im or the reference image Im2. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, the confirmation accuracy in the operation | work which confirms a defect with respect to the board | substrate 90 can further improve.

In addition, in the example of FIG. 6 and FIG. 7, the next button B2 is pressed down by the mouse pointer M1, and the defect image data as a confirmation object may be moved to the next defect image data. That is, the output control part 354 responds to the input of the predetermined signal by the input part 32 according to the predetermined | prescribed operation | movement by a user, for example, by the output part 33, and the following defective image data The reference image data corresponding to the next defective image data may be visually outputted at least once in a time sequential manner. It is also possible to display the defect image data and the reference image data obtained by the inspection in order as in the examples of FIGS. 6 and 7 without displaying the defect selection screen of FIG. 5.

<1-4. Operation of Defect Checking Device>

8-10 is a flowchart which shows an example of the operation flow of the defect confirmation apparatus 3 with respect to the defect confirmation method for confirming the presence or absence of the defect in the test target object which used the defect confirmation apparatus 3. As shown in FIG. This operation flow is started in response to the input of the signal through the input part 32 by a user, for example. Here, for example, by pressing the confirmation start button B0 of the defect selection screen Sn0 with the mouse pointer M1, any defect image data is automatically determined as defect image data from one or more defect image data. An example of the operation flow selected as follows will be described.

First, in step S1 of FIG. 8, the acquisition part 352 acquires defect information about one board | substrate 90 as an inspection object of one or more board | substrates 90. FIG. Here, the acquisition part 352 may acquire the defect information of one of the defect information groups from the test | inspection apparatus 1 via the communication line 2 and the communication part 31, for example, and the memory | storage part 34 Alternatively, the defect information of one of the defect information groups may be acquired from the storage medium RM1.

Next, in step S2, the acquisition part 352 acquires one defect image data as a confirmation object. Here, the acquisition part 352 acquires one defect image data based on identification information contained in the defect information acquired by step S1, for example. The acquisition part 352 may acquire one defect image data from the test | inspection apparatus 1 via the communication line 2 and the communication part 31, for example, and the storage part 34 or the storage medium RM1 You may acquire one defect image data from the.

Next, in step S3, the acquisition part 352 acquires one reference image data corresponding to one defect image data acquired in step S2. Here, the acquisition part 352 uses the communication line 2 and the communication part 31 as reference image data, for example as one reference image data which captured the same block as the one defective image data acquired by step S2 here. ) May be acquired from the inspection apparatus 1, or may be acquired from the storage unit 34 or the storage medium RM1. In addition, the acquisition part 352 extracts the reference image data corresponding to the defect image data from the standard image data which captured the whole to-be-tested surface of the board | substrate 90 based on defect information, for example, 1 Two reference image data may be acquired. In this way, for example, in the processing from step S1 to step S3, the acquisition part 352 may have caught a defect with respect to the same part of the same size of the board | substrate 90 as an inspection object, for example. There exists defective image data and reference image data serving as a reference corresponding to the defective image data.

Next, in step S4, the output control unit 354 visually outputs the defective image data acquired in step S2 to the display area by the output unit 33. At this time, for example, the defect confirmation screen Sn1 shown in FIG. 6 is displayed by the output unit 33.

Next, in step S5, the output control part 354 determines whether the alternate output process is stopped. Here, for example, if the first signal is not inputted by the input unit 32 according to the first operation by the user, the output control unit 354 does not determine that the alternate output processing stops, and proceeds to step S6. do. On the other hand, for example, when the first signal is input by the input unit 32 according to the first operation by the user, the output control unit 354 determines that the alternate output processing is stopped, and proceeds to step S21 of FIG. 9. do.

In step S6, the arithmetic processing part 35a determines whether to move the defect image data as confirmation object into the next defect image data. Here, if a predetermined signal is not input by the input part 32 according to the operation by a user, for example, it will not determine that the defect image data as confirmation object will be moved to the next defect image data, and will proceed to step S7. do. On the other hand, when a predetermined signal is input by the input part 32 according to an operation by a user, for example, it determines with moving the defect image data as confirmation object into the next defect image data, and progresses to step S10.

In step S7, the output control unit 354 visually displays the reference image data acquired in step S3 in the same display area as the display area in which the defective image data is visually output in step S4 by the output unit 33. Output At this time, for example, the reference confirmation screen Sn2 illustrated in FIG. 7 is displayed by the output unit 33. In other words, for example, by the processing of step S4 and step S7, the output control unit 354 outputs the defective image data acquired in step S2 in the same display area by the output unit 33 in step S3. The acquired reference image data can be visually outputted sequentially at least once in time. As a result, for example, the defect image data and the reference image data are visually outputted sequentially in the same display area with respect to the same portion having the same size, so that the user does not move his or her eyes. And reference image Im2 can be compared. For this reason, for example, it becomes difficult for a user to overlook the authenticity of the board | substrate 90, and does not become tired easily. As a result, the confirmation accuracy in the operation | work which confirms the defect of the board | substrate 90 can improve, for example.

Next, in step S8, the output control part 354 determines whether the alternate output process is stopped. Here, for example, if the first signal is not inputted by the input unit 32 according to the first operation by the user, the output control unit 354 does not determine that the alternate output processing stops, and proceeds to step S9. do. On the other hand, for example, when the first signal is input by the input unit 32 according to the first operation by the user, the output control unit 354 determines that the alternate output processing is stopped, and proceeds to step S31 of FIG. 10. do.

In step S9, the arithmetic processing unit 35a determines whether to move the defective image data as the confirmation target to the next defective image data. Here, if a predetermined signal is not input by the input part 32 according to the operation by a user, for example, it returns to step S4 without determining that the defect image data as a confirmation object is moved to the next defect image data. . At this time, for example, the processing from step S4 to step S9 is repeated until it is determined that the defective image data as the confirmation target is transferred to the next defective image data. In other words, for example, in the processing from step S4 to step S9, the output control unit 354 outputs the defective image data and the reference image corresponding to the defective image data in the same display area by the output unit 33. An alternate output process for alternately visually outputting data can be executed. In this case, for example, the defect confirmation screen Sn1 illustrated in FIG. 6 and the reference confirmation screen Sn2 illustrated in FIG. 7 may be alternately displayed by the output unit 33. Thus, for example, in the same display area, the defective image data and the reference image data are alternately outputted to the same portion of the same size, so that the user does not move his or her eyes, so that the defective image Im1 And reference image Im2 can be compared easily. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, the confirmation accuracy in the operation | work which confirms a defect with respect to the board | substrate 90 can further improve.

On the other hand, in step S9, when a predetermined signal is input by the input part 32 according to the operation by a user, for example, it is determined that the defect image data as confirmation object is moved to the next defect image data, and it moves to step S10. Proceed. At this time, for example, with respect to the defect image data confirmed about the presence or absence of authenticity, the aspect which the information which shows the confirmation or the result of confirmation is attached to the defect information concerning this defect image data is attached. Can be.

In step S10, the arithmetic processing part 35a determines whether all the defect image data with respect to one board | substrate 90 as one inspection object become a confirmation object based on the defect information acquired in step S1. Here, for example, if it is determined by the arithmetic processing part 35a that all the defective image data for one board | substrate 90 became a confirmation object, it will return to step S2. At this time, the acquisition part 352 acquires one defect image data as a next confirmation object based on identification information contained in the defect information acquired by step S1, for example. On the other hand, in step S10, when it determines with the processing part 35a that all the defect image data with respect to one board | substrate 90 became a confirmation object, it progresses to step S11, for example.

In step S11, it is determined whether the arithmetic processing part 35a has confirmed whether the board | substrate existed with respect to all the board | substrates 90 as all the test target objects. Here, for example, the arithmetic processing part 35a is based on the defect information group memorize | stored in any one of the memory | storage device 17 of the test | inspection apparatus 1, the memory | storage part 34, and the storage medium RM1. It is possible to determine whether all substrates 90 have been checked for the presence or absence of solidity. Here, for example, if it is determined by the arithmetic processing unit 35a that all the substrates 90 have been checked for presence or absence of defects, the process returns to step S1. At this time, the acquisition part 352 acquires defect information about the next one board | substrate 90 as the next one test object of the one or more board | substrates 90, for example. On the other hand, in step S11, when it is determined by the arithmetic processing part 35a about all board | substrate 90 about the presence or absence of a defect, this operation flow is complete | finished.

In step S21 of FIG. 9, the output control unit 354 visually outputs the defect image data by the output unit 33. Here, for example, when the process proceeds from step S5 of FIG. 8 to step S21, the output control unit 354 responds to the input of the first signal by the input unit 32 according to the first operation by the user. The output unit 33 stops the alternating output process, whereby the defective image data is visually output. Thus, for example, the state in which the defect confirmation screen Sn1 shown in FIG. 6 is displayed by the output unit 33 can be maintained. Thus, for example, if the user can stop the alternating output process in which the defect image data and the reference image data are alternately visually outputted, the user differentials the presence or absence of the integrity of the substrate 90 at his or her own pace. You can check it.

In this step S21, for example, the output control part 354 makes it possible for the output part 33 to visually recognize by the user the part which may exist in addition to the defect image data. You may output the element visually. In this case, for example, as shown in FIG. 6, the defect area judged that a defect exists in the inspection apparatus 1 is displayed on the defect image Im1 on the defect confirmation screen Sn1. It can be shown as elements Fm11 and Fm12. If such a configuration is adopted, for example, the user can easily find out the seriousness of the substrate 90. As a result, for example, a user can confirm the presence or absence of a defect with respect to the board | substrate 90 with high precision.

For example, when it progresses from step S5 of FIG. 8 to step S21, in this step S21, the output control part 354 makes the output part 33 respond to the stop of an alternating output process, In addition to the defect image data, an element related to a defect image that can be recognized by a user may be output. The element related to a defect image should just be an element which can recognize that the defect image Im1 is displayed by a user, for example. For example, the output part 33 applies the first mark Mk1 displayed near the defect image Im1 or on the defect image Im1 to the element related to the defect image. In the first mark Mk1, for example, a specific character element, a specific pattern, a specific monogram, a specific frame surrounding the defect image Im1, or a specific frame or defect image Im1 shown in FIG. Background color is applied. If such a configuration is adopted, for example, the user can recognize which of the displayed image is either the defective image Im or the reference image Im2. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, the confirmation accuracy in the operation | work which confirms a defect with respect to the board | substrate 90 can further improve.

In following step S22, the output control part 354 determines whether the signal for switching the displayed image was input. Here, for example, if a predetermined signal for switching the image displayed by the input unit 32 in accordance with a predetermined operation by the user is not input, the flow proceeds to step S23. On the other hand, in step S22, when a predetermined signal for switching the image displayed by the input unit 32 is input, for example, according to a predetermined operation by the user, the process proceeds to step S31 of FIG. Thus, for example, the user can visually output the reference image data corresponding to the defective image data to the display area where the defective image data is visually output by the output unit 33, thereby switching the display. You can do it manually. If such a configuration is adopted, the user can, for example, change the screen displayed by the output unit 33 at an arbitrary timing from the defect confirmation screen Sn1 shown in FIG. 6 to the reference confirmation screen shown in FIG. 7. (Sn2) can be switched. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, a user can confirm the presence or absence of a defect with respect to the board | substrate 90 with high precision.

In the next step S23, the output control unit 354 determines whether to resume the alternating output process. Here, for example, if a predetermined signal for resuming the alternating output process is not input by the input unit 32 according to a predetermined operation by the user, the output control unit 354 determines that the alternating output process is resumed. If not, the flow returns to step S21. Here, while the process of step S23 is performed repeatedly from step S21, the output control part 354 stops the alternating output process by the output part 33, and shows the state which visually outputs the defect image data. Keep it. For example, the state in which the defect confirmation screen Sn1 shown in FIG. 6 is displayed by the output unit 33 is maintained. On the other hand, in step S23, when a predetermined signal for resuming the alternating output process is input by the input unit 32 according to a predetermined operation by the user, for example, the output control unit 354 resumes the alternating output process. And the process returns to step S4 of FIG. In this way, the stop of the alternate output processing is released.

In step S31 of FIG. 10, the output control unit 354 visually outputs the reference image data by the output unit 33. Here, for example, when the process proceeds from step S8 of FIG. 8 to step S31, the output control unit 354 responds to the input of the first signal by the input unit 32 according to the first operation by the user. The output unit 33 stops the alternating output processing, whereby the reference image data is visually output. Thus, for example, a state in which the reference confirmation screen Sn2 illustrated in FIG. 7 is displayed by the output unit 33 may be maintained. Thus, for example, if the user can stop the alternating output process in which the defect image data and the reference image data are alternately visually outputted, the user differentials the presence or absence of the integrity of the substrate 90 at his or her own pace. You can check it.

In this step S31, for example, the output control part 354 responds to the stop of the alternating output process, by the output part 33 to the reference image which can be recognized by a user with reference image data. You can also print out the relevant elements. The element related to a reference image may be an element which can recognize that the reference image Im2 is displayed by the user, for example. The second mark Mk2 displayed near the reference image Im2 or on the reference image Im2 is applied to the element related to the reference image, for example, by the output unit 33. In the second mark Mk2, for example, a specific character element, a specific pattern, a specific monogram, a specific frame surrounding the reference image Im2 or a specific image of the reference image Im2 shown in FIG. Background color is applied. If such a configuration is adopted, for example, the user can recognize which of the displayed image is either the defective image Im or the reference image Im2. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, the confirmation accuracy in the operation | work which confirms a defect with respect to the board | substrate 90 can further improve.

In following step S32, the output control part 354 determines whether the signal for switching the displayed image was input. Here, for example, if a predetermined signal for switching the image displayed by the input unit 32 in accordance with a predetermined operation by the user is not input, the flow proceeds to step S33. On the other hand, in step S32, if a predetermined signal for switching the image displayed by the input unit 32 is input, for example, according to a predetermined operation by the user, the process proceeds to step S21 of FIG. Thus, for example, the user can visually output the defect image data corresponding to the reference image data to the display area where the reference image data is visually output by the output unit 33, thereby switching the display. You can do it manually. If such a configuration is adopted, the user can select, for example, the screen displayed by the output unit 33 at an arbitrary timing from the reference confirmation screen Sn2 shown in Fig. 7 to the defect confirmation screen shown in Fig. 6. (Sn1) can be switched. Thereby, for example, a user can easily find out the seriousness in the board | substrate 90. FIG. As a result, for example, a user can confirm the presence or absence of a defect with respect to the board | substrate 90 with high precision.

In the next step S33, the output control unit 354 determines whether to resume the alternate output processing. Here, for example, if a predetermined signal for resuming the alternating output process is not input by the input unit 32 according to a predetermined operation by the user, the output control unit 354 determines that the alternating output process is resumed. If not, the flow returns to step S31. Here, while the process of step S33 is performed repeatedly from step S31, the output control part 354 stops the alternating output process by the output part 33, and shows the state which visually outputs the reference image data. Keep it. For example, the state in which the reference confirmation screen Sn2 shown in FIG. 7 is displayed by the output unit 33 is maintained. On the other hand, in step S33, when a predetermined signal for resuming the alternating output process is input by the input unit 32 according to a predetermined operation by the user, for example, the output control unit 354 resumes the alternating output process. And the process returns to step S7 of FIG. In this way, the stop of the alternate output processing is released.

By the operation flow, a user can confirm the presence or absence of the defect in the board | substrate 90, for example by comparing the defect image Im1 and the reference image Im2, without moving an eye. . In the defect confirmation apparatus 3, for example, in response to a signal input from the input unit 32 in response to a user's operation, information indicating a result of confirming the presence or absence of a defect by the user can be added to the defect information or the like. You may be able. For example, the user may classify the board | substrate 90 into a good or defective product according to the confirmation result of the presence or absence of the authenticity.

<1-5. Summary of the first embodiment>

As described above, in the defect confirmation apparatus 3 according to the first embodiment, for example, the defect image data and the reference image data are visually outputted sequentially in the same display area with respect to the same portion having the same size. . For this reason, a user can compare the defect image Im1 and the reference image Im2, without moving an eye, for example. As a result, for example, it is difficult for the user to overlook the authenticity of the substrate 90 as the inspection object and does not fatigue easily. As a result, the confirmation accuracy in the operation | work which confirms the defect of the board | substrate 90 as an inspection object, for example can be improved.

<2. Other embodiments>

This invention is not limited to the 1st embodiment mentioned above, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention.

<2-1. Second embodiment>

In the first embodiment, for example, the reference image data is not limited to the standard image data obtained by the imaging unit 15 in the inspection apparatus 1 or the image data extracted from the standard image data. The reference image data may be standard image data obtained from apparatuses other than the inspection apparatus 1 or image data extracted from the standard image data. In addition, the reference image data may be, for example, an image related to a design drawing drawn with a technique of computer-aided design (CAD) with respect to the substrate 90 as an inspection object. In this case, for example, the reference image data may be image data in which the shape of the inspection surface of the substrate 90 is drawn only by linearization, or may be image data imparted with color to each part. When such a configuration is adopted, instead of the reference confirmation screen Sn2, for example, as shown in FIG. 11, an image displayed on the second display area Ar2 is created by the technique of CAD or the like. The reference confirmation screen Sn2A which has become the reference image Im2A based on the reference image data can be adopted.

<2-2. Third embodiment>

In each of the above embodiments, for example, a period in which the first period in which the defect image data is visually output and the second period in which the reference image data is visually output may overlap. In this case, for example, the output control unit 354 outputs the visible output state of the image data in the same display area by the output unit 33 from the first output state to the second output state. It may have a function capable of making a transition to the third output state. Here, the first output state is a state in which one image data (also referred to as first image data) of the defective image data and the reference image data is visually output. The second output state is a state in which the defect image data and the reference image data are visually output so as to overlap. The third output state is a state in which different image data (also called second image data) different from the first image data among the defective image data and the reference image data is visually output. Here, for example, if the first image data is defective image data, the second image data is reference image data. For example, if the first image data is reference image data, the second image data is defective. Image data. Thus, for example, by the processing of steps S4 and S7 described above, the output control unit 354 outputs the defective image data acquired in step S2 in the same display area by the output unit 33 and the step. When visually outputting the reference image data acquired in S3 at least once in time, the visible output state of the image data in the same display area is changed from the first output state to the second output state, You can transition to the output state.

In this case, in the second output state, for example, a configuration in which at least one of the first image data and the second image data is visually output in a translucent display mode can be considered. Here, for example, if the reference image Im2A based on the reference image data is image data drawn only by linearization, the first image data and the second image data are simply overlapped in the second output state. You may output it visually. 12 is a diagram showing an example of the overlapping confirmation screen Sn3B according to the third embodiment. The superimposition confirmation screen Sn3B uses the above-described defect confirmation screen Sn1 and reference confirmation screens Sn2 and Sn2A as a base so that the defect image data and the reference image data overlap the same second display area Ar2. This is a screen on which an image (also called a nested image) Im12B that is visually output is displayed. The superimposed image Im12B has a display mode in which the defect image Im1 and the reference images Im2, Im2A for the same portion of the same size are superimposed, for example.

In this way, for example, if there is a time zone in which the defect image data and the reference image data are visually outputted so as to overlap, the user can visually output the defect image Im1 and the reference image based on the defect image data. The difference between the reference images Im2 and Im2A output based on the data can be easily recognized.

In addition, here, the output control part 354, for example, when the output part 33 implement | achieves a 2nd output state, superimposition which can be recognized by a user with defect image data and reference image data is also possible. You may have a function which can output the element related to an image. The element related to a superimposed image should just be an element which can recognize that the superimposed image Im12B is displayed by a user, for example. For example, a third mark Mk3 displayed near the superimposed image Im12B or on the superimposed image Im12B is applied to the element related to the superimposed image by the output unit 33. In the third mark Mk3, for example, a specific character element ("overlapping" in the example of FIG. 12) shown in FIG. 12, a specific pattern, a specific monogram, and a specific image surrounding superimposed image Im12B are included. The specific background color of the frame or the superimposed image Im12B is applied. If such a configuration is adopted, for example, the user can recognize that the displayed image is a superimposed image Im12B.

<2-3. Fourth embodiment>

In each of the above embodiments, for example, the output control unit 354 stops the alternating output processing, and then in response to the input of the second signal by the input unit 32 according to the second operation by the user. The output unit 33 may have a function of visually outputting the defective image data and the reference image data in the same display area so as to overlap each other. In this case, for example, the output control unit 354 outputs the defective image data by the output unit 33 in response to the input of the second signal by the input unit 32 according to the second operation by the user. From the state visually outputting, you may make the transition to the state visually outputting so that defect image data and reference image data may overlap. Further, for example, the output control unit 354 visually displays the reference image data by the output unit 33 in response to the input of the second signal by the input unit 32 according to the second operation by the user. From the outputting state, the output may be performed in a state in which the defective image data and the reference image data are visually output so as to overlap.

For example, in the defect confirmation screen Sn1 shown in FIG. 6, when the superimposition execution button B3 is pressed down by the mouse pointer M1, the output control part 354 displays by the output part 33. The aspect which makes a screen which transitions from the defect confirmation screen Sn1 to the superimposition confirmation screen Sn3B shown in FIG. 12 can be considered. For example, in the reference confirmation screen Sn2A shown in FIG. 11, the superimposition execution button B3 is pressed down by the mouse pointer M1, and the output control part 354 is made by the output part 33. FIG. The aspect which makes the screen which is displayed transition from the reference confirmation screen Sn2A to the superimposition confirmation screen Sn3B shown in FIG. 12 can be considered. At this time, for example, in the overlapping confirmation screen Sn3B, the overlapping release button B4 is pressed down by the mouse pointer M1, whereby the output control unit 354 is displayed by the output unit 33. The screen may be shifted from the overlapping confirmation screen Sn3B to the defect confirmation screen Sn1 or may be shifted from the overlapping confirmation screen Sn3B to the reference confirmation screen Sn2A. Even if this aspect is adopted, for example, the user can easily recognize the difference between the defect image Im1 related to the defect image data and the reference images Im2 and Im2A related to the reference image data.

In the case where the above configuration is adopted, for example, instead of the operation flow shown in FIG. 9, the operation flow shown in FIG. 13 is executed, and instead of the operation flow shown in FIG. 10, the operation flow shown in FIG. The operation flow may be executed. 13 and 14 are flowcharts showing an example of an operation flow of the defect checking apparatus 3 according to the fourth embodiment. The operation flow of FIG. 13 is an operation flow in which step S22A is inserted between step S22 and step S23 of the operation flow shown in FIG. 9, and step S22B and step S22C are added. The operation flow of FIG. 14 is an operation flow in which step S32A is inserted between step S32 and step S33 of the operation flow shown in FIG. 10, and step S32B and step S32C are added. Here, step S22A, S22B, S22C and step S32A, S32B, S32C different from the operation flow of FIG. 9 and FIG. 10 among the operation flow of FIG. 13 and FIG. 14 are demonstrated.

In step S22A of FIG. 13, the output control unit 354 determines whether to execute a process (also referred to as a nested display process) that visually outputs the superimposed image data with the defective image data. Here, if the second signal is not input by the input unit 32 according to the second operation by the user, for example, the output control unit 354 proceeds to step S23 without determining that the superimposed display process is executed. do. On the other hand, if the second signal is input by the input unit 32 according to the second operation by the user, for example, the output control unit 354 determines that the superimposed display processing is executed, and the flow proceeds to step S22B.

In step S22B, the output control unit 354 causes the output unit 33 to execute the overlap display processing. Thus, for example, the output control unit 354 responds to the input of the second signal by the input unit 32 according to the second operation by the user after the output unit 33 stops the alternate output processing. The output unit 33 can visually output the overlapping defective image data and the reference image data in the same display area. At this time, for example, the output control unit 354 transitions the screen displayed by the output unit 33 from the defect confirmation screen Sn1 shown in FIG. 6 to the overlapping confirmation screen Sn3B shown in FIG. 12. The aspect to make it think can be considered. If such a configuration is adopted, the user can easily recognize the difference between the defect image Im1 related to the defect image data and the reference images Im2 and Im2A related to the reference image data.

In step S22C, the output control unit 354 determines whether or not the state (also referred to as the overlapping display state) that is visually outputted so as to superimpose the defective image data and the reference image data in the same display area. Here, the output control part 354 does not determine that the superimposition display state is canceled until the predetermined signal is input by the input part 32 according to a predetermined operation by the user, for example, in step S22C. The determination is repeated. On the other hand, if a predetermined signal is input by the input unit 32 according to a predetermined operation by the user, for example, the output control unit 354 determines that the superimposed display state is canceled, and returns to step S21 in FIG. 13. .

In step S32A of FIG. 14, the output control unit 354 determines whether or not the superimposed display processing for visually outputting the superimposed image data with the defective image data is executed. Here, if the second signal is not input by the input unit 32 according to the second operation by the user, for example, the output control unit 354 proceeds to step S33 without determining that the superimposed display process is executed. do. On the other hand, when the second signal is input by the input unit 32 according to the second operation by the user, for example, the output control unit 354 determines that the superimposed display processing is executed, and the flow proceeds to step S32B.

In step S32B, the output control unit 354 causes the output unit 33 to execute the overlap display processing. Thus, for example, the output control unit 354 responds to the input of the second signal by the input unit 32 according to the second operation by the user after the output unit 33 stops the alternate output processing. The output unit 33 can visually output the overlapping defective image data and the reference image data in the same display area. At this time, for example, the output control unit 354 transitions the screen displayed by the output unit 33 from the reference confirmation screen Sn2A shown in FIG. 11 to the overlapping confirmation screen Sn3B shown in FIG. 12. The aspect to make it think can be considered. If such a configuration is adopted, the user can easily recognize the difference between the defect image Im1 related to the defect image data and the reference images Im2 and Im2A related to the reference image data.

In step S32C, the output control unit 354 determines whether or not the superimposed display state that is visually outputted so as to superimpose the defective image data and the reference image data in the same display area. Here, the output control unit 354 does not determine that the superimposed display state is to be canceled until the predetermined signal is input by the input unit 32 according to, for example, a predetermined operation by the user. The determination is repeated. On the other hand, when a predetermined signal is input by the input unit 32 according to a predetermined operation by the user, for example, the output control unit 354 determines that the superimposed display state is canceled, and returns to step S31 in FIG. 14. .

<2-4. And others ＞

For example, in each of the above embodiments, the output control unit 354 outputs at least one defective image data and reference image data in the same display area without causing the output unit 33 to perform alternate output processing. You may output visually sequentially in time. At this time, any of the image data of the defective image data and the reference image data may be output first. Even if such a configuration is adopted, for example, the user can compare the defect image Im1 and the reference image Im2 displayed sequentially in time in the same second display area Ar2 without shifting the line of sight. As a result, for example, it is difficult for the user to overlook the integrity of the substrate 90 and does not easily fatigue. As a result, the confirmation accuracy in the operation | work which confirms the defect of the board | substrate 90 as an inspection object, for example can be improved.

For example, in each of the above embodiments, enlargement and reduction of the defect image Im1 related to the defect image data may be possible. In this case, for example, the reference images Im2 and Im2A related to the reference image data may be enlarged and reduced in accordance with the enlargement and reduction of the defect image Im1 related to the defect image data.

For example, in each of the above embodiments, the display elements Fm11 and Fm12 may be elements of different display modes that can be distinguished by the user depending on the kind of the site captured by the defective area. Here, as a kind of site | part, the site | part to which plating was performed, the site | part to which the solder resist was apply | coated, etc. are mentioned, for example. Moreover, as an element of a different display aspect, the edge etc. which differ in color are mentioned, for example. In this case, what is necessary is just to include the information which shows the kind of site | part as defect information, for example.

For example, in each said embodiment, when there exists a some defect image data as a some confirmation object with respect to one board | substrate 90 as one inspection object, by the acquisition part 352, Defective image data for a predetermined high importance portion may be preferentially acquired. As a result, for example, the output control unit 354 can preferentially output the defective image data for the region of high importance by the output unit 33.

For example, in each of the above embodiments, as the display elements Fm11 and Fm12, elements of other aspects, such as an arrow pointing to the defective area, may be employed instead of the edges positioned to surround the defective area, respectively.

For example, in each of the above embodiments, another object such as a product different from the substrate 90 may be employed as the inspection object.

It goes without saying that all or part of each of the above-mentioned one embodiment and various modifications can be combined within a range that does not contradict properly.

1: inspection device 2: communication line
3: defect identification device 30: information processing device
31: communication unit 32: input unit
33: output unit 34: storage unit
35: control unit 35a: arithmetic processing unit
35b: memory 90: substrate
100: defect checking system 351: signal receiving unit
352: acquisition unit 353: memory control unit
354: output controller Ar1: first display area
Ar2: second display area Ar3: third display area
B1: Stop button B2: Next button
B3: Superimpose button B4: Superimpose button
Fm11, Fm12: Display Element Im1: Defective Image
Im12B: Superimposed image Im2, Im2A: Reference image
Mk1: first mark Mk2: second mark
Mk3: third mark Pg1: program (computer program)
RM1: Storage medium Sn1: Defect check screen
Sn2, Sn2A: Reference Confirmation Screen Sn3B: Overlay Confirmation Screen

Claims (15)

As a defect confirmation device which confirms the presence or absence of a defect in a test object,
Acquisition unit for acquiring defect image data which may have caught a defect, and reference image data as a reference, for the same part of the same size of the said test subject,
And an output control unit for outputting the defect image data and the reference image data visually and sequentially at least once in the same display area by an output unit. The method according to claim 1,
And the output control unit visually outputs, by the output unit, an element in which a portion in which a defect may exist is visually recognizable by the user together with the defect image data. The method according to claim 1,
And the output control unit causes the output unit to visually alternately output the defect image data and the reference image data to the same display area. The method according to claim 3,
Further comprising an input unit for inputting a signal according to the user's operation,
The output control unit alternates the defective image data and the reference image data in the same display area by the output unit in response to the input of the first signal by the input unit according to the first operation by the user. The defect confirmation apparatus which stops the alternating output process which outputs visually to the camera. The method according to claim 4,
In response to the stop of the alternate output processing, the output control unit outputs, by the output unit, an element related to a defect image that can be recognized by the user together with the defect image data, or is associated with the reference image data. And an element related to a reference image that can be recognized by the user. The method according to claim 5,
The output control section stops the alternate output processing, and in response to the input of the second signal by the input section according to the second operation by the user, the output section causes the defective image in the same display area. And a defect checking apparatus for visually outputting the data and the reference image data so as to overlap each other. The method according to any one of claims 1 to 5,
The said output control part is a 1st output which visually outputs the 1st image data of the said defect image data and the said reference image data in the visual output state of the image data in the same display area by the said output part. From the state, through the second output state visually outputting so that the defect image data and the reference image data overlap, second image data different from the first image data among the defect image data and the reference image data is visually displayed. The defect confirmation apparatus which makes a transition to the 3rd output state which is outputting with As a defect confirmation method for confirming the presence or absence of a defect in a test object,
A first step of acquiring defect image data that may have captured a defect and reference image data serving as a reference for the same portion of the same size of the inspection object;
And a second step of causing an output unit to visually output the defect image data and the reference image data acquired in the first step at least once in time sequentially to the same display area. The method according to claim 8,
In the second step, the defect confirming method causes the output unit to visually output, in addition to the defect image data, an element in which a portion in which a defect may exist is visually recognizable by a user. . The method according to claim 8,
The defect confirmation method according to the second step, wherein the output unit alternately visually outputs the defect image data and the reference image data to the same display area. The method according to claim 10,
In the second step, in response to the input of the first signal by the input unit according to the first operation by the user, the defective image data and the reference image data in the same display area are output by the output unit. The defect confirmation method which stops the alternate output process which outputs visually alternately. The method according to claim 11,
In the second step, in response to the stop of the alternate output processing, the output unit outputs, in addition to the defect image data, an element related to a defect image that can be recognized by the user, or the reference. A defect checking method for outputting an element related to a reference image which can be recognized by a user together with image data. The method according to claim 12,
In the second step, after stopping the alternate output processing, in response to the input of the second signal by the input unit according to the second operation by the user, by the output unit, The defect confirmation method which visually outputs so that defect image data and the said reference image data may overlap. The method according to any one of claims 8 to 12,
In the second step, the output unit is configured to visually output a first output image of the defective image data and the reference image data in a visual output state of the image data in the same display area. 2nd image data different from the said 1st image data among the said defect image data and the said reference image data through the 2nd output state which visually outputs from the 1 output state so that the said defect image data and the said reference image data may overlap. And transition to a third output state that is visually outputting the defect. A computer-readable storage medium storing a program,
The program,
When executed by the processor of the controller in the information processing apparatus,
A first step of acquiring defect image data that may have captured a defect and reference image data serving as a reference for the same portion of the same size of the inspection object;
A computer-readable storage medium that realizes, by an output unit, a second step of visually outputting the defective image data and the reference image data acquired in the first step at least one time sequentially to the same display area. .

Images