JP2019135071A - Cylindrical cornice cover - Google Patents

Abstract

To easily attach and detach a cylindrical cornice cover to/from an operation area of a drive mechanism.SOLUTION: A cylindrical cornice cover 2 comprises: a circle ring-shaped upper ring 20; a long circle ring-shaped lower ring 21; a cylindrical cornice fabric 22 for connecting the upper and lower rings 20, 21 vertically arranged; and reinforcement rings 23 arranged in parallel between the upper and lower rings 20, 21 and for reinforcing the cylindrical cornice fabric 22. The cylindrical cornice cover further has a detachment part 28 capable of connecting the upper ring 20, the reinforcement rings 23, and the lower ring 21 in a ring-state, and separating the upper ring 20, the reinforcement rings 23, and the lower ring 21 connected in the ring-state. The cylindrical cornice fabric 22 has a fastener 27 for connecting upper and lower ends, so that, by opening and closing the fastener 27, detachment (attachment and removal) between polishing means 32 and a processing chamber 60 can be facilitated, so that a work time can be shortened.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a cylindrical bellows cover that covers a drive mechanism.

  In polishing a wafer by polishing the wafer with a polishing pad, the polishing pad attached to the tip of a rotating shaft with the axis perpendicular to the upper surface of the wafer held by a holding table is pressed against the wafer and the polishing pad is moved to the wafer. The wafer is polished by moving in a horizontal direction parallel to the upper surface of the wafer. For this reason, a cylindrical bellows cover that surrounds the holding table and the polishing pad is disposed so as not to scatter polishing waste generated during the polishing process of the wafer from the processing chamber (see, for example, Patent Document 1 below). . In the cylindrical bellows cover, a plurality of rings are arranged in parallel in a staircase shape in a cylindrical bellows cloth, the lower end of the bellows cloth is attached to the peripheral edge of the opening of the processing chamber, and the upper end of the bellows cloth is a rotation shaft. Is used by being mounted on a spindle unit that rotatably supports the motor.

Japanese Patent No. 4464113

  However, when polishing the wafer, the cylindrical bellows cover contracts in the vertical direction following the lowering operation of the polishing pad, and a plurality of rings approach, and in this state, the polishing pad is moved in the horizontal direction. The cylindrical bellows cover in the state is also deformed in the horizontal direction. The cylindrical bellows cover is also deformed following the vertical and horizontal movements of the polishing pad in the same manner as described above when dressing the polishing surface of the polishing pad. In particular, when the polishing pad is moved horizontally, a plurality of close rings are inclined, which causes a problem that the bellows cloth is rubbed and broken between the rings. If the bellows cloth is torn, it is replaced with a new cylindrical bellows cover. However, the conventional cylindrical bellows cover and processing chamber have a problem that the replacement operation cannot be easily performed. If a special material is used, rubbing of the bellows cloth can be reduced, but it is difficult to prevent the bellows cloth from being broken, and the use of the special material increases the manufacturing cost of the cylindrical bellows cover.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to make it possible to easily attach and detach the cylindrical bellows cover to the operation region of the drive mechanism.

  The present invention is a cylindrical bellows cover that covers an operation region of a drive mechanism that operates in the vertical and horizontal directions, and includes a circular ring-shaped upper ring, a circular ring-shaped lower ring, and the upper ring disposed above and below And a cylindrical bellows cloth connecting the lower ring and a plurality of reinforcing rings arranged in parallel between the upper ring and the lower ring to reinforce the cylindrical bellows cloth, The reinforcing ring and the lower ring are connected in a ring shape, and the upper ring connected in the ring shape, and the detachable portion that enables the reinforcing ring and the lower ring to be separated from each other. And a fastener for connecting the upper end and the lower end. The lower ring may be formed in an oval ring shape.

  The cylindrical bellows cover according to the present invention includes a circular ring-shaped upper ring, a circular ring-shaped lower ring, a cylindrical bellows cloth that connects the upper ring and the lower ring arranged above and below, an upper ring, and a lower ring. The upper ring, the reinforcing ring, and the lower ring are connected in a ring shape, and the upper ring and the reinforcing ring are connected in a ring shape. The cylindrical bellows cloth has a fastener that connects the upper end and the lower end, so the upper ring, the reinforcing ring, and the lower ring are connected in a ring shape at the attachment / detachment part. By simply closing the fastener, the cylindrical bellows cover can be attached to the operating area of the drive mechanism, and it can be driven simply by opening the fastener while separating the upper ring, the reinforcing ring, and the lower ring connected in a ring shape at the attachment / detachment part. mechanism Can be removed tubular bellows cover from the operating area. Thus, since the cylindrical bellows cover has a simple structure, the cylindrical bellows cover can be easily replaced, and the working time can be shortened.

It is a perspective view which shows the structure of a processing apparatus. It is a disassembled perspective view which shows the state before a cylindrical bellows cover is mounted | worn between a grinding | polishing means and a processing chamber. It is a perspective view which shows the state of opening the fastener of a cylindrical bellows cloth while showing the structure of a cylindrical bellows cover. It is a perspective view which shows the state which closes the fastener of a cylindrical bellows cloth.

1 Processing Device A processing device 1 shown in FIG. 1 is an example of a processing device to which a cylindrical bellows cover 2 according to the present invention is applied. The processing apparatus 1 has an apparatus base 10 that extends in the Y-axis direction, and a rotatable turntable 11 is disposed at the center of the apparatus base 10. On the turntable 11, a plurality of holding tables 12 that hold the wafer W and can rotate are arranged. The upper surface of the holding table 12 is a holding surface 120 that holds the wafer W by suction. The holding table 12 can be revolved as the turntable 11 rotates.

  Stages 13 a and 13 b are attached to the front portion of the apparatus base 10 in the Y-axis direction. A cassette 14a containing a wafer W before processing is placed on the stage 13a, and a cassette 14b containing a wafer W after processing is placed on the stage 13b. At a position facing the cassettes 14a and 14b, a loading / unloading means 15 for loading the wafer W from the cassette 14a and loading the wafer W into the cassette 14b is disposed. In the movable range of the carry-in / out means 15, a temporary placement means 16 for temporarily placing the wafer W and a cleaning means 17 for cleaning processing waste adhering to the processed wafer W are disposed.

  In the vicinity of the temporary placement means 16, a first transfer means 18 a for transferring the unprocessed wafer W temporarily placed on the temporary placement means 16 to the holding table 12 is disposed. Further, in the vicinity of the cleaning unit 17, a second transfer unit 18 b that transfers the processed wafer W held on the holding table 12 to the cleaning unit 17 is disposed.

  On the rear side of the apparatus base 10 in the Y-axis direction, a first grinding unit 30a for roughly grinding the wafer W held by the holding table 12 and a first grinding unit for grinding and feeding the first grinding unit 30a in the Z-axis direction. A feed unit 31a, a second grinding unit 30b for finish grinding the wafer W after rough grinding, and a second grinding feed unit 31b for grinding and feeding the second grinding unit 30b in the Z-axis direction are provided.

  Polishing means 32 for polishing the final ground wafer W held by the holding table 12 between the second grinding means 30b and the cleaning means 17 on the rear side in the X-axis direction of the apparatus base 10, and polishing A moving mechanism for moving the means 32 in the vertical and horizontal directions with respect to the holding surface 120 of the holding table 12, a processing chamber 60 for receiving a polishing pad 38 of the polishing means 32 and the holding table 12, which will be described later, and polishing means And a cylindrical bellows cover 2 according to the present invention that covers the space between the chamber 32 and the processing chamber 60.

  The polishing means 32 is disposed via a moving mechanism in the column 19 erected at the end of the apparatus base 10 in the X-axis direction. The polishing means 32 includes a rotating shaft 33 having an axis in the Z-axis direction, a spindle unit 34 that rotatably supports the rotating shaft 33, a holder 35 that holds the spindle unit 34, and a rotating shaft 33. An attached motor 36, a polishing wheel 37 that is detachably attached to the tip of the rotary shaft 33 via a mount, and a polishing pad 38 that is bonded and fixed to the lower surface of the polishing wheel 37 are provided. Then, when the rotating shaft 33 is rotated by the motor 36, the polishing pad 38 can be rotated at a predetermined rotation speed.

  The moving mechanism includes lifting / lowering means 40 for moving the polishing means 32 in a direction perpendicular to the holding surface 120 of the holding table 12, and horizontal moving means 50 for moving the polishing means 32 in the horizontal direction relative to the holding surface 120. ing. The elevating means 40 includes a ball screw 41 extending in the Z-axis direction, a motor 42 connected to one end of the ball screw 41, a pair of guide rails 43 extending in parallel to the ball screw 41, and a holder 35 on one surface. And a lift plate 44 connected thereto. A pair of guide rails 43 are in sliding contact with the other surface of the lift plate 44, and a ball screw 41 is screwed to a nut formed at the center of the lift plate 44. When the motor 42 drives the ball screw 41, the polishing means 32 can be moved vertically along the pair of guide rails 43 together with the lift plate 44 in the Z-axis direction.

  The horizontal moving means 50 includes a ball screw 51 disposed in front of the column 19 and extending in the Y-axis direction, a motor 52 connected to one end of the ball screw 51, and a pair of guide rails 53 extending in parallel with the ball screw 51. And a moving plate 54 on one surface of which the polishing means 32 is disposed via the lifting / lowering means 40. A pair of guide rails 53 are in sliding contact with the other surface of the moving plate 54, and a ball screw 51 is screwed into a nut formed at the center of the moving plate 54. When the motor 52 drives the ball screw 51, the polishing means 32 can be moved horizontally in the Y-axis direction along with the moving plate 54 along the pair of guide rails 53.

  As shown in FIG. 2, the processing chamber 60 is formed in a rectangular parallelepiped box shape, for example, and has an internal space surrounded by an upper plate 60a, a bottom plate 60b, and side plates 60c and subjected to polishing. The upper plate 60a of the processing chamber 60 is formed with an oval opening 61 that penetrates the rotary shaft 33 and enables the polishing means 32 to move horizontally. The width of the oval opening 61 in the X-axis direction is set to a width that allows at least the polishing pad 38 to pass through. Further, the processing chamber 60 includes an oval ring standing portion 62 that rises from an oval opening 61. The oval ring standing portion 62 is formed in, for example, a substantially L shape, and a concave groove 63 is formed outside thereof. The groove 63 is an attachment groove for mounting the lower end of the cylindrical bellows cover 2 described later. Although not shown, the side plate 60c of the processing chamber 60 is partially formed with an opening through which the holding table 12 can pass so that the holding table 12 does not come into contact with the turntable 11 during rotation.

2 Cylindrical Bellows Cover The cylindrical bellows cover 2 is a cover member that covers the operating area of the drive mechanism that operates in the vertical and horizontal directions. As shown in FIG. 2, the cylindrical bellows cover 2 is mounted between the polishing means 32 and the processing chamber 60, and the vertical movement and horizontal movement of the polishing means 32 by the moving mechanism (elevating means 40 and horizontal moving means 50). It can be deformed following the above. The cylindrical bellows cover 2 includes a circular ring-shaped upper ring 20, a circular ring-shaped lower ring 21, a cylindrical bellows cloth 22 that connects the upper ring 20 and the lower ring 21 arranged above and below, and an upper ring. There are provided a plurality of reinforcing rings 23 that are arranged in parallel between 20 and the lower ring 21 and reinforce the cylindrical bellows cloth 22.

  As shown in FIG. 3, the upper ring 20 is an annular bag that surrounds the first opening 24 formed at the upper end of the cylindrical bellows cloth 22. The first opening 24 is formed in a circular shape in accordance with the outer shape of the spindle unit 34. The upper ring 20 is cut at an arbitrary position and has a pair of string passage openings 20a through which the string 25a is inserted. The string 25a is made of, for example, a rubber string, and is inserted into the upper ring 20 so that the ends of the string 25a protrude from the pair of string passing ports 20a. In the cylindrical bellows cover 2, the upper end of the cylindrical bellows cloth 22 in a state where the string 25 a is inserted into the upper ring 20 functions as an elastic member that expands and contracts the size of the first opening 24.

  The lower ring 21 is an annular bag that surrounds the second opening 26 formed at the lower end of the cylindrical bellows cloth 22. The second opening 26 is formed in an oval shape in accordance with the shape of the oval opening 61 of the processing chamber 60. The lower ring 21 is cut at an arbitrary position and has a pair of string passage openings 21a through which the string 25b is inserted. The string 25b is inserted into the inside of the lower ring 21, and the ends of the string 25b protrude from the pair of string passage openings 21a. In the cylindrical bellows cover 2, the lower end of the cylindrical bellows cloth 22 in a state where the string 25 b is inserted into the lower ring 21 functions as an elastic member that expands and reduces the size of the second opening 26. The lower ring 21 shown in the present embodiment has been shown to be formed in an oval ring shape. However, when the opening of the processing chamber is a circular opening, the lower ring 21 is also formed in a circular shape in accordance with this shape. It is formed.

  A plurality of reinforcing rings 23 are disposed inside the cylindrical bellows cloth 22 at predetermined intervals in the vertical direction, and are bent in a mountain-valley shape. The diameters of the plurality of reinforcing rings 23 are gradually increased from the upper side to the lower side of the cylindrical bellows cloth 22, and the cylindrical bellows cloth 22 also extends from the upper end of the cylinder to the lower end of the cylinder according to the diameter of the reinforcing ring 23. It is spreading. The material of the cylindrical bellows cloth 22 is not particularly limited. Moreover, it does not specifically limit about the material of the reinforcement ring 23, For example, it is comprised by the wire made from a synthetic resin which has flexibility.

  The cylindrical bellows cloth 22 is cut at any position from the upper end of the cylinder to the lower end of the cylinder, and includes a fastener 27 that connects the upper end of the cylinder and the lower end of the cylinder at the cut portion. The fastener 27 includes a pair of service teeth 27a and 27b and a slider 27c that engages the pair of service teeth 27a and 27b with each other and releases the engagement. The fastener 27 shown in the present embodiment is configured by a zipper-type wire fastener, but is not limited to this configuration, and may be configured by a hook-and-loop fastener.

  The cylindrical bellows cover 2 attaches and detaches the upper ring 20, the reinforcing ring 23, and the lower ring 21 connected in a ring shape and enables the upper ring 20, the reinforcing ring 23, and the lower ring 21 connected in a ring shape to be detached. A portion 28 is provided. The attaching / detaching portion 28 shown in the present embodiment is configured by one end portion 28 a of the reinforcing ring 23 and a cylindrical engaging portion 28 b attached to the other end portion (not shown) of the reinforcing ring 23. The inner diameter of the engaging portion 28 b is substantially the same as the outer diameter of the reinforcing ring 23. Thereby, by inserting the one end portion 28a into the engaging portion 28b, the upper ring 20, the reinforcing ring 23, and the lower ring 21 can be connected in a ring shape, and the one end portion 28a is pulled out from the engaging portion 28b. Thus, the upper ring 20, the reinforcing ring 23, and the lower ring 21 formed in a ring shape can be separated. In the illustrated example, a plurality of attachment / detachment portions 28 are provided according to the number of reinforcing rings 23, but the configuration is not limited thereto.

  Here, when the cylindrical bellows cover 2 is mounted between the polishing means 32 and the processing chamber 60, the cylindrical bellows cover 2 is illustrated with the cylindrical upper end and the cylindrical lower end of the cylindrical bellows cover 2 open. It is positioned between the spindle unit 34 of the polishing means 32 shown in FIG. Subsequently, for example, the first ring 24 is expanded at least beyond the diameter of the spindle unit 34 by gripping the upper ring 20 with an operator's hand and expanding it outward, and the spindle unit is placed inside the expanded first opening 24. Position the lower end of 34. By pulling the string 25a on the upper ring 20 side, the upper ring 20 contracts inward, and the first opening 24 is reduced. As a result, the upper ring 20 can be mounted on the outer surface of the spindle unit 34.

  Further, for example, the second ring 26 is expanded to be larger than at least the oval ring standing portion 62 by grasping the lower ring 21 with an operator's hand and widening the outer side, and inside the widened second opening 26. The oval ring standing part 62 is positioned. By pulling the string 25b on the lower ring 21 side, the lower ring 21 contracts inward and the second opening 26 is reduced. As a result, the lower ring 21 can be mounted around the oval ring standing portion 62, that is, in the groove 63.

  Next, as shown in FIG. 4, for example, the operator holds the slider 27c of the fastener 27 and pulls it up. At this time, the upper end of the cylinder and the lower end of the cylinder are connected by pulling up the slider 27c to the upper end of the cylindrical bellows cloth 22 while inserting the one end 28a into the engaging part 28b for each reinforcing ring 23. 20, the reinforcing ring 23 and the lower ring 21 are connected in a ring shape as a whole. By mounting the cylindrical bellows cover 2 between the polishing means 32 and the processing chamber 60 in this way, the periphery of the lower end side of the spindle unit 34 and the oval opening 61 of the processing chamber 60 are covered. The strings 25a and 25b may be tied.

  On the other hand, when removing the cylindrical bellows cover 2 from between the polishing means 32 and the processing chamber 60, for example, the operator holds the slider 27c of the fastener 27 and pulls it down. At this time, while pulling out from the engaging portion 28b to the one end portion 28a for each reinforcing ring 23, the upper end of the tube and the lower end of the tube are separated from each other by pulling down the slider 27c to reach the lower end of the tube of the cylindrical bellows cloth 22. The upper ring 20, the reinforcing ring 23, and the lower ring 21 connected in a ring shape are separated. Thereafter, the string 25a on the upper ring 20 side is loosened, and then the contracted upper ring 20 is grasped by the operator's hand and expanded outward to expand the first opening 24 to at least the diameter of the spindle unit 34. Then, the upper ring 20 is removed from the lower end of the spindle unit 34. Further, after loosening the string 25b on the lower ring 21 side, the contracted lower ring 21 is gripped by the operator's hand and expanded outward, so that the second opening 26 is at least larger than the oval ring standing portion 62. The lower ring 21 is removed from the groove 63 by expanding.

  As described above, the cylindrical bellows cover 2 according to the present invention includes a circular ring-shaped upper ring 20, a circular ring-shaped lower ring 21, and a cylinder that connects the upper ring 20 and the lower ring 21 disposed above and below. A plurality of parallel bellows cloth 22 and a plurality of reinforcing rings 23 that are arranged in parallel between the upper ring 20 and the lower ring 21 to reinforce the cylindrical bellows cloth 22, and the upper ring 20, the reinforcing ring 23, and the lower ring 21. The ring-shaped bellows cloth 22 is connected to the upper and lower ends of the ring-shaped bellows cloth 22. The upper and lower rings 20, 22, and 21 can be separated from each other. Since the fastener 27 is provided, the cylindrical bellows is provided between the polishing means 32 and the processing chamber 60 simply by closing the fastener 27 while connecting the upper ring 20, the reinforcing ring 23, and the lower ring 21 in a ring shape at the attaching / detaching portion 28. cover The cylindrical bellows is formed between the polishing means 32 and the processing chamber 60 by simply opening the fastener 27 while separating the upper ring 20, the reinforcing ring 23, and the lower ring 21 connected in a ring shape by the attaching / detaching portion 28. The cover 2 can be removed. Therefore, since the cylindrical bellows cover 2 has a simple structure and excellent operability, it is possible to easily attach and detach (attach and remove) between the polishing means 32 and the processing chamber 60. The time for exchanging the accordion bellows cover 2 can be shortened.

1: Processing device 10: Device base 11: Turntable 12: Holding table 120: Holding surface 13a, 13b: Stages 14a, 14b: Cassette 15: Loading / unloading means 16: Temporary placing means 17: Cleaning means 18a: First transport Means 18b: Second conveying means 19: Column 2: Cylindrical bellows cover 20: Upper ring 21: Lower ring 22: Cylindrical bellows cloth 23a, 23b: Reinforcement ring 24: First opening 25a, 25b: String 26: Second opening 27: Fasteners 27a, 27b: Teeth 27c: Slider 28: Detachable portion 28a: One end portion 28b: Engaging portion 30a: First grinding means 30b: Second grinding means 31a: First grinding feed Means 31b: Second grinding feed means 32: Polishing means 33: Rotating shaft 34: Spindle unit 35: Holder 36: Motor 37: Polishing wheel 38: Polishing pad 40: Lifting means 41: Ball screw 42: Motor 43: Guide rail 44: Lifting plate 50: Horizontal movement means 51: Ball screw 52: Motor 53: Guide rail 54: Moving plate 60: Processing chamber 61: Oval opening 62: Oval ring standing part 63: Groove

Claims (2)

A cylindrical bellows cover that covers the operating area of the drive mechanism that operates in the vertical and horizontal directions
An upper ring with a circular ring shape,
A circular ring-shaped lower ring,
A cylindrical bellows cloth that connects the upper ring and the lower ring arranged above and below;
A plurality of reinforcement rings arranged in parallel between the upper ring and the lower ring to reinforce the cylindrical bellows cloth,
The upper ring, the reinforcing ring, and the lower ring are connected in a ring shape, and the upper ring, the reinforcing ring, and the lower ring connected in the ring shape are provided with a detachable portion that enables detachment.
The cylindrical bellows cloth is a cylindrical bellows cover provided with a fastener that connects an upper end and a lower end.   The cylindrical bellows cover according to claim 1, wherein the lower ring is formed in an oval ring shape.

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