JP2019107858A - Metal mask for screen printing with plate frame and manufacturing method therefor - Google Patents

Metal mask for screen printing with plate frame and manufacturing method therefor Download PDF

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JP2019107858A
JP2019107858A JP2017243966A JP2017243966A JP2019107858A JP 2019107858 A JP2019107858 A JP 2019107858A JP 2017243966 A JP2017243966 A JP 2017243966A JP 2017243966 A JP2017243966 A JP 2017243966A JP 2019107858 A JP2019107858 A JP 2019107858A
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metal mask
area
frame
pattern opening
screen printing
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信平 伊與
Nobuhei Iyo
信平 伊與
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Bon Mark Co Ltd
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Abstract

To provide a metal mask for screen printing with a plate frame capable of shortening delivery time from receiving an order to product shipment, and to provide a manufacturing method therefor.SOLUTION: A plate frame 1, a gauze 2 gauze stretched in the plate frame, and a metal mask 3 of which an outer peripheral edge is attached to the gauze by an adhesive, and of which a pattern opening 6 is pore opening processed by a laser process in a center pattern area are equipped, the metal mask has an electrolytic polishing possible area 10 in which burr of edge of the pattern opening is removed by impregnating only the pattern opening which is pore opening processed by the laser process and neighboring thereof in an electrolytic polishing liquid 7, and an electrolytic polishing impossible area 11 in which an outer periphery part region of the metal mask positioned at an outer periphery part of the electrolytic polishing possible area is not impregnated into the electrolytic polishing liquid, and sheet thickness of the electrolytic polishing impossible area is thicker than sheet thickness of the electrolytic polishing possible area.SELECTED DRAWING: Figure 1

Description

この発明は、注文を受けてから製品出荷までの納期期間を短縮できる版枠付きスクリーン印刷用メタルマスク及びその製造方法に関するものである。   The present invention relates to a metal mask for screen printing with a frame that can shorten the delivery period from receiving an order to shipping the product and a method of manufacturing the same.

従来、版枠付きスクリーン印刷用メタルマスクは、例えば、図12に示すような製造方法により作製されている。客先から注文を受けると(ステップS11)、SUS材からなるメタルマスクのみの状態でレーザー加工により、パターン開口部を孔開け加工する(レーザー加工工程:ステップS12)。参考例では、レーザー加工データの作成時間、加工セット時間、パターン加工時間、メタルカット時間、パターン検査時間等に合計約44分を要している。次にレーザー加工により得られたメタルマスクに電解研磨処理を行うことにより、パターン開口部のエッジのバリを除去する(電解研磨工程:ステップS13)。参考例では、電解研磨セット時間、処理時間、洗浄時間等に合計約12分を要している。最後に版枠に紗を張り付け、この紗に電解研磨処理が終了したメタルマスクの外周縁部を、接着剤を用いて貼り付けた後、接着部以外の内側の紗を切り取る(紗張り工程:ステップS14)。参考例では、測長時間、仕上げ時間等に約50分を要している。そして、完成した版枠付きスクリーン印刷用メタルマスクを客先に出荷する(ステップS15)。出荷検査、梱包時間等に約6分を要している。すなわち、参考例では、客先から注文を受けてから製品出荷まで、例えば一版につき約2時間程度の総作製時間が掛かっている。
また、従来の先行技術としては、先ずメッシュ状のスクリーン紗に張力を与えながら、スクリーン枠に紗張りしたものに、薄い正方形のステンレス板(SUS304板)等の金属板をエポキシ系接着剤等で接着し、接着剤を硬化させた後、金属板に重なる不要な部分のスクリーン紗を切除する(紗張り工程)。次にスクリーン印刷用マスクを、レーザー加工機にセットし、レーザー光を金属板に照射し、金属板の所定の位置に多数の細孔を穿孔し、所要のパターン画像を形成する(レーザー加工工程)。最後に細孔によるパターン画像が形成された金属板のレーザー光出射側の面を、#1500程度の研磨材にて平面研磨し、細孔の開口部周囲にあるドロスを除去する(バフ研磨工程)を経て得られるスクリーン印刷用メタスマスクとその製造方法が知られている(例えば、特許文献1参照)。
Conventionally, a plate-frame-attached metal mask for screen printing is manufactured, for example, by a manufacturing method as shown in FIG. When an order is received from a customer (step S11), the pattern opening is drilled by laser processing in a state of only a metal mask made of SUS material (laser processing step: step S12). In the reference example, it takes about 44 minutes in total for laser processing data creation time, processing set time, pattern processing time, metal cutting time, pattern inspection time and the like. Next, the metal mask obtained by laser processing is subjected to an electrolytic polishing process to remove burrs on the edge of the pattern opening (electrolytic polishing step: step S13). In the reference example, it takes about 12 minutes in total for the electropolishing set time, the processing time, the cleaning time and the like. Finally, a wedge is attached to the plate frame, and the outer peripheral edge of the metal mask that has been subjected to the electrolytic polishing treatment is attached to this wedge using an adhesive, and then the inner wedge other than the bonded part is cut off (flapping step: Step S14). In the reference example, about 50 minutes are required for the measurement time, the finishing time, and the like. Then, the completed metal mask for screen printing with a frame is shipped to the customer (step S15). It takes about six minutes for shipping inspection, packing time, etc. That is, in the reference example, it takes about 2 hours in total production time per version, for example, from receipt of an order from a customer to product shipment.
Also, as the prior art in the prior art, a metal plate such as a thin square stainless steel plate (SUS 304 plate) is epoxy-based adhesive or the like on a screen frame which is tensioned while applying tension to the mesh screen first. After bonding and curing the adhesive, the screen creases of unnecessary portions overlapping the metal plate are cut off (coating step). Next, a mask for screen printing is set in a laser processing machine, laser light is irradiated to the metal plate, a large number of pores are perforated at a predetermined position of the metal plate, and a required pattern image is formed (laser processing step ). Finally, the surface on the laser light emission side of the metal plate on which the pattern image of the pores is formed is planarly polished with an abrasive of about # 1500 to remove the dross around the aperture of the pore (buffing process) Patent Document 1 discloses a screen printing metas mask which can be obtained through the above) and a method for producing the same.

特開平9−248976号公報(段落0014−0016)Unexamined-Japanese-Patent No. 9-248976 (Paragraph 0014-0016)

従来の版枠付きスクリーン印刷用メタルマスクの製造方法では、客先からの注文を受けて作製が開始され(ステップS11)、客先仕様に基づき、レーザー加工工程(ステップS12)、電解研磨工程(ステップS13)、紗張り工程(ステップS14)の三つの作業工程を経て、客先に製品が出荷されることになる(ステップS15)。したがって、注文を受けてから製品出荷に至るまでの納期期間を短縮することには限界があった。
また、先行技術文献に記載の従来技術では、最後に行われるバフ研磨工程において、金属板のレーザー光出射側の面を、#1500程度の研磨材にて平面研磨し、細孔の開口部周囲にあるドロスを除去するだけであるので、金属板のレーザー光入射側の面及び細孔の内壁面は研磨されないままであり、満足なものではなかった。
In the conventional method for manufacturing a metal mask for screen printing with a plate frame, preparation is started upon receipt of an order from a customer (step S11), and a laser processing step (step S12) and an electropolishing step (step S12). The product is shipped to the customer (step S15) through the three operation steps of step S13) and the tensioning step (step S14). Therefore, there has been a limit to shortening the delivery period from receiving an order to product shipment.
In the prior art described in the prior art document, in the final buffing step, the surface on the laser light emitting side of the metal plate is planarly polished with an abrasive of about # 1500, and the periphery of the pore opening is The surface on the laser beam incident side of the metal plate and the inner wall surface of the pores remained unpolished because they only removed the dross present in the above.

この発明は、上述のような課題を解決するためになされたもので、注文を受けてから製品出荷までの納期期間を短縮できる版枠付きスクリーン印刷用メタルマスク及びその製造方法を提供するものである。   The present invention has been made to solve the problems as described above, and provides a metal mask for screen printing with a frame that can shorten the delivery period from receiving an order to shipping the product and a method of manufacturing the same. is there.

この発明に係る版枠付きスクリーン印刷用メタルマスクにおいては、版枠と、版枠に紗張りされた紗と、紗に外周縁部を接着剤により張り付けられ、中央のパターンエリア内にレーザー加工によりパターン開口部を穴開け加工されたメタルマスクと、を備え、メタルマスクは、レーザー加工により穴開け加工されたパターン開口部及びその周辺近傍のみを電解研磨液に浸漬されてパターン開口部のエッジのバリを除去する電解研磨可能エリアとし、電解研磨可能エリアの外周部に位置するメタルマスクの外周縁部領域は、電解研磨液に浸漬されない電解研磨非可能エリアとし、電解研磨非可能エリアの板厚を電解研磨可能エリアの板厚よりも厚くしたものである。   In the metal mask for screen printing with a screen frame according to the present invention, the outer peripheral edge portion is attached to the plate frame, the ridge lined to the plate frame and the ridge by an adhesive, and the laser processing is performed in the central pattern area. The metal mask is formed by drilling the pattern opening, and the metal mask is immersed in the electropolishing liquid only in the pattern opening drilled by laser processing and in the vicinity of the periphery of the pattern opening. The outer peripheral area of the metal mask located on the outer peripheral portion of the electropolable area, which is an electropolable area for removing burrs, is an electropolished non-permanent area not immersed in the electropolishing liquid, Is made thicker than the plate thickness of the electro-polishable area.

また、メタルマスクの電解研磨液に浸漬される電解研磨可能エリアを矩形状とし、かつ電解研磨液に浸漬されない電解研磨非可能エリアを矩形枠状としたものである。   In addition, the electrolytically polishable area to be immersed in the electrolytic polishing solution of the metal mask is made rectangular, and the electrolytic non-polishable area not to be immersed in the electrolytic polishing solution is made rectangular frame.

また、前記メタルマスクは、レーザー加工により穴開け加工されたパターン開口部及びその周辺近傍のみを化学研磨液に浸漬され化学反応により化学研磨されてパターン開口部のエッジのバリを除去する化学研磨可能エリアとし、化学研磨可能エリアの外周部に位置するメタルマスクの外周縁部領域は、化学研磨液の化学反応により化学研磨されない化学研磨非可能エリアとし、化学研磨非可能エリアの板厚を化学研磨可能エリアの板厚よりも厚くしたものである。   In addition, the metal mask can be chemically polished by removing burrs at the edge of the pattern opening by immersing only the pattern opening drilled by laser processing and the vicinity thereof in a chemical polishing solution and chemically polishing it by a chemical reaction. The outer peripheral area of the metal mask, which is an area and located on the periphery of the chemical polishable area, is a non-chemical polishable area that is not chemically polished by the chemical reaction of the chemical polishing solution, and the plate thickness of the chemical polish non-possible area is chemical polished It is thicker than the thickness of the possible area.

また、メタルマスクの化学研磨液に浸漬される化学研磨可能エリアを矩形状とし、かつ化学研磨液の化学反応により化学研磨されない化学研磨非可能エリアを矩形枠状としたものである。   Further, the chemical polishing area to be immersed in the chemical polishing liquid of the metal mask is rectangular, and the chemical polishing non-permissible area which is not chemically polished by the chemical reaction of the chemical polishing liquid is rectangular frame.

また、この発明に係る版枠付きスクリーン印刷用メタルマスクの製造方法においては、注文を受ける前に、版枠に紗を張り付け、未加工のメタルマスクの外周縁部を接着剤により張り付けた版枠付きスクリーン印刷用メタルマスクの原版を予め用意しておく事前の紗張り工程と、注文を受けてから、版枠に紗張りされた状態で未加工のメタルマスクの中央のパターンエリア内にレーザー加工により、パターン開口部を穴開け加工するレーザー加工工程と、電解研磨液の入った電解槽内において、レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍のみが浸漬されるような状態とし、パターン開口部及びその周辺近傍のみを電解研磨する電解研磨工程とを備えたものである。   Further, in the method of manufacturing a metal mask for screen printing with a frame according to the present invention, before receiving an order, a crease is attached to the plate, and the outer periphery of the unprocessed metal mask is attached with an adhesive. A preliminary step of preparing an original plate for a metal mask for screen printing and a laser processing within the central pattern area of the unprocessed metal mask in a state where it is tacked to a plate frame after receiving an order In the laser processing step of drilling the pattern opening, and in the electrolytic bath containing the electrolytic polishing solution, only the pattern opening of the metal mask on which the laser processing has been completed and the vicinity thereof are immersed. And an electropolishing step of electropolishing only the pattern opening and the vicinity thereof.

また、電解研磨工程に用いられる電解槽は、通常は分離した二分割構造であり、電解研磨工程になると、レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍のみを二分割構造の電解槽により両側面から挟み込み、電解槽内に電解液を循環させるものである。   In addition, the electrolytic cell used in the electrolytic polishing step is normally divided into two divided structures, and in the case of the electrolytic polishing step, only the pattern opening of the metal mask on which the laser processing has been completed and the vicinity thereof is divided into two parts. The electrolytic solution is circulated in the electrolytic cell by being sandwiched from both sides by the tank.

また、二分割構造の電解槽は、メタルマスクのパターン開口部の周辺近傍に接する開口部周縁部に環状の液漏れ防止用シールを備えるものである。   In addition, the electrolytic cell of the two-divided structure is provided with an annular seal for liquid leakage prevention at the peripheral portion of the opening that is in contact with the vicinity of the periphery of the pattern opening of the metal mask.

また、化学研磨液の入った化学薬品槽内に、レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍のみが浸漬され化学反応により化学研磨されるような状態とし、パターン開口部及びその周辺近傍のみを化学研磨する化学研磨工程と、を備えたものである。   Further, only the pattern opening of the metal mask after laser processing and the vicinity thereof are immersed in a chemical bath containing a chemical polishing solution, and chemical polishing is performed by a chemical reaction. And D. a chemical polishing step of chemically polishing only the vicinity of the periphery.

この発明によれば、客先から注文を受けてから製品出荷までの納期期間を短縮できる版枠付きスクリーン印刷用メタルマスクを得ることができるという効果がある。また、電解研磨液に浸漬されていないパターン開口部の周辺近傍の更に外側に位置するメタルマスクの外周縁部は、電解研磨されないので、外周縁部の厚さは薄くなるようなことがない。しかも外周縁部は額縁状の周辺部となるので、強度を強く保つことができる効果もある。   According to the present invention, there is an effect that it is possible to obtain a metal mask for screen printing with a frame which can shorten the delivery period from receipt of an order from a customer to product shipment. Further, since the outer peripheral edge portion of the metal mask located on the outer side in the vicinity of the periphery of the pattern opening which is not immersed in the electrolytic polishing liquid is not electropolished, the thickness of the outer peripheral edge portion does not become thin. Moreover, since the outer peripheral portion is a frame-like peripheral portion, there is also an effect that the strength can be kept strong.

この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法を工程順に示すフローチャートである。It is a flowchart which shows the manufacturing method of the metal mask for screen printing with a version frame in Example 1 of this invention to process order. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の紗張り工程を示す断面図である。It is sectional drawing which shows the covering process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法のレーザー加工工程を示す断面図である。It is sectional drawing which shows the laser processing process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の紗張り工程終了後、レーザー加工されるスクリーン版の一例を示す平面図である。It is a top view which shows an example of the screen version by which laser processing is carried out after the completion of the covering process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の紗張り工程終了後、レーザー加工されるスクリーン版の他例を示す平面図である。It is a top view which shows the other example of the screen plate laser-processed after completion | finish of the covering process of the manufacturing method of the metal mask for screen printing with a frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程の概略構造を示す断面図である。It is sectional drawing which shows the general | schematic structure of the electropolishing process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程を示す分解斜視図である。It is a disassembled perspective view which shows the electropolishing process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程終了後のメタルマスクの板厚測定箇所を示す平面図である。It is a top view which shows the plate | board thickness measurement location of the metal mask after the completion of the electropolishing process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程終了後のメタルマスクの板厚測定箇所の測定結果を示す表である。It is a table | surface which shows the measurement result of the plate thickness measurement location of the metal mask after the completion of the electropolishing process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程終了後のメタルマスクの板厚測定箇所の測定結果から板厚変動値を示す表である。It is a table | surface which shows plate thickness fluctuation value from the measurement result of the plate thickness measurement location of the metal mask after the completion of the electropolishing process of the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention. この発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法と従来の版枠付きスクリーン印刷用メタルマスクの製造方法の開口座標のズレを比較して示す説明図である。It is explanatory drawing which compares and shows the shift | offset | difference of the opening coordinate in the manufacturing method of the metal mask for screen printing with a plate frame in Example 1 of this invention, and the manufacturing method of the conventional metal mask for screen printing with a frame. 従来の版枠付きスクリーン印刷用メタルマスクの製造方法を工程順に示すフローチャートである。It is a flowchart which shows the manufacturing method of the conventional metal mask for screen printing with a frame in order of a process.

実施例1.
図1はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法を工程順に示すフローチャートである。
先ず、客先から注文を受ける前に、版枠に紗を張り付け、切り出した未加工のメタルマスクの外周縁部を、接着剤を用いて張り付けた後、接着部以外の内側の紗を切り取った版枠付きスクリーン印刷用メタルマスクを予め用意しておく(事前の紗張り工程:ステップS1)。この実施例では、例えば、メタル切り出し時間、仕上げ時間等の約48分が注文を受ける前に用意されている訳である。次に客先から注文を受けてから(ステップS2)、版枠に紗張りされた状態でメタルマスクにレーザー加工により、パターン開口部を穴開け加工する(レーザー加工工程:ステップS3)。この実施例では、例えば、レーザー加工データの作成時間、加工セット時間、パターン加工時間、パターン検査時間等に合計約42分を要している。最後に電解研磨液の入った電解槽内において、レーザー加工が終了したメタルマスクの一部、すなわちパターン開口部及びその周辺近傍のみが電解研磨液に浸漬されるような状態とし、パターン開口部及びその周辺近傍のみを電解研磨する。これにより、パターン開口部のエッジのバリを除去し、パターン開口部の周辺近傍のみが電解研磨される(電解研磨工程:ステップS4)。この実施例では、例えば、電解研磨セット時間、処理時間、洗浄時間等に合計約11分を要している。そして、完成した版枠付きスクリーン印刷用メタルマスクを客先に出荷する(ステップS5)。測長時間、出荷検査、梱包時間等に約11分を要している。事前準備の時間を含めると、従来と同等の一版につき約2時間程度の総作製時間が掛かっている。しかしながら、この実施例では、客先から注文を受ける前にメタル切り出し時間、仕上げ時間等の約48分が既に準備済であるので、客先から注文を受けてから製品出荷までの納期期間を短縮することができる。なお、通常の納期期間は、全数が揃ってから出荷されるので、客先からの注文数が数十版から数百版、数千版と数が増えれば増える程、大きな期間短縮となるものである。
以上のように、この発明は、客先から注文を受ける前に、未加工のメタルマスクを版枠に紗張りした版枠付きスクリーン印刷用メタルマスクの原版を予め用意しておくという事前の紗張り工程に第一の特徴がある。また、客先の注文を受けてから、客先仕様に基づき、ステップS3のレーザー加工工程と、ステップS4の電解研磨工程の二つの作業工程を順番に行う訳であるが、ここでは、ステップS4の電解研磨工程に第二の特徴がある。それは、電解研磨液の入った電解槽内において、メタルマスクの一部、すなわちパターン開口部及びその周辺近傍のみが電解研磨液に浸漬されるような状態とし、パターン開口部及びその周辺近傍のみを電解研磨するということである。これにより、パターン開口部のエッジのバリを除去し、パターン開口部の周辺近傍のみが電解研磨されることである。
Example 1
FIG. 1 is a flowchart showing a method of manufacturing a metal mask for screen printing with a screen frame in the embodiment 1 of the present invention in the order of steps.
First, before receiving an order from a customer, a weir was attached to the plate frame, and the outer peripheral edge of the cut raw metal mask was attached using an adhesive, and then the internal weir except the bonded part was cut off A screen framed metal mask for screen printing is prepared in advance (pre-stretching step: step S1). In this embodiment, for example, about 48 minutes such as metal cutting out time and finishing time are prepared before receiving an order. Next, after receiving an order from a customer (step S2), the pattern opening is drilled by laser processing on a metal mask in a state where it is covered with a plate frame (laser processing step: step S3). In this embodiment, for example, it takes about 42 minutes in total for preparation time of laser processing data, processing set time, pattern processing time, pattern inspection time and the like. Finally, in the electrolytic bath containing the electrolytic polishing solution, only a part of the metal mask for which the laser processing has been completed, that is, only the pattern opening and the vicinity thereof is immersed in the electrolytic polishing solution. Electrolytic polishing is performed only in the vicinity of the periphery. Thereby, the burrs at the edge of the pattern opening are removed, and only the vicinity of the periphery of the pattern opening is electropolished (electropolishing step: step S4). In this embodiment, for example, it takes about 11 minutes in total for the electropolishing set time, the processing time, the cleaning time, and the like. Then, the completed metal mask for screen printing with a frame is shipped to the customer (step S5). It takes about 11 minutes for measuring time, shipping inspection, packing time, etc. Including the preparation time, it takes about 2 hours of total production time per equivalent edition. However, in this embodiment, about 48 minutes such as metal cutting time and finishing time are already prepared before receiving an order from a customer, so the delivery time from receiving an order from the customer to shipping the product is shortened. can do. In addition, since the normal delivery period is shipped after all the items are assembled, the larger the number of orders from the customer increases, the more the number increases from several tens of editions to hundreds of editions, thousands of editions, etc. It is.
As described above, according to the present invention, prior to receiving an order from a customer, an original plate of a screen printing metal mask for screen printing with a blank frame is prepared in advance, in which a raw metal mask is tacked on the printing frame. The tensioning process has the first feature. Also, after receiving the customer's order, the two working processes of the laser processing step of step S3 and the electropolishing step of step S4 are sequentially performed based on the customer specification, but here, step S4 Has the second feature. In the electrolytic bath containing the electropolishing liquid, only part of the metal mask, that is, the pattern opening and the vicinity thereof, is immersed in the electropolishing liquid, and only the pattern opening and the vicinity thereof It means electropolishing. Thereby, the burrs at the edge of the pattern opening are removed, and only the vicinity of the periphery of the pattern opening is electropolished.

図2はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の紗張り工程を示す断面図である。
図2において、客先から注文を受ける前に、版枠1に紗2を張り付け、未加工のステンレス板(SUS304板)等から成るメタルマスク3の外周縁部を、接着剤を用いて張り付けた後、接着部以外の内側の紗を切り取った版枠付きスクリーン印刷用メタルマスクの原版4を予め用意しておく(事前の紗張り工程:ステップS1)。
FIG. 2 is a cross-sectional view showing a plating step of the method for producing a metal mask for screen printing with a frame in accordance with the first embodiment of the present invention.
In FIG. 2, before receiving an order from a customer, a plate 2 is attached to a plate frame 1, and the outer peripheral edge of a metal mask 3 made of a non-processed stainless steel plate (SUS304 plate) is attached using an adhesive. After that, an original plate 4 of a metal mask for screen printing with a screen frame is prepared in advance, from which an internal crease other than the bonded portion is cut off (pre-bleaching step: step S1).

図3はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法のレーザー加工工程を示す断面図である。
図3において、客先の注文を受け、ここから版枠付きスクリーン印刷用メタルマスクの作製が開始される訳であるが、事前に紗張り工程が終了した版枠付きスクリーン印刷用メタルマスクの原版4が予め用意されているので、これを活用することになる。メタルマスク3にレーザー加工機のレーザー光5により、パターン開口部6を穴開け加工する。
FIG. 3 is a cross-sectional view showing a laser processing step of the method for manufacturing a metal mask for screen printing with a screen frame in Embodiment 1 of the present invention.
In FIG. 3, the customer is ordered and the preparation of the metal mask for screen printing with a frame is started from here, but the original plate of the metal mask for a screen printing with a frame which has already been finished the tacking process Since 4 is prepared beforehand, this will be utilized. The pattern opening 6 is drilled in the metal mask 3 by the laser beam 5 of the laser beam machine.

図4はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の紗張り工程終了後、レーザー加工されるスクリーン版の一例を示す平面図、図5は同じくレーザー加工されるスクリーン版の他例を示す平面図である。
図4に示すスクリーン版の一例は、例えば版枠1の枠寸法が650mm×550mm又は600mm×550mm、メタルマスク3の寸法が500mm×450mm、メタルマスク3の電解研磨可能エリア10の寸法が360mm×310mm、メタル板厚が0.08〜0.15mmである。また、図5に示すスクリーン版の他例は、例えば版枠1の枠寸法が750mm×650mm又は736mm×736mm、メタルマスク3の寸法が620mm×520mm、メタルマスク3の電解研磨可能エリア10が480mm×380mm、メタル板厚が0.08〜0.15mmである。
FIG. 4 is a plan view showing an example of a screen plate to be laser-processed after completion of a plating step of a method for producing a metal mask for a screen frame with a screen frame in Embodiment 1 of the present invention. It is a top view which shows the other example of a version.
An example of the screen plate shown in FIG. 4 is, for example, the frame size of the plate frame 1 is 650 mm × 550 mm or 600 mm × 550 mm, the dimension of the metal mask 3 is 500 mm × 450 mm, and the dimension of the electropolable area 10 of the metal mask 3 is 360 mm × 310 mm, metal plate thickness is 0.08 to 0.15 mm. Further, another example of the screen plate shown in FIG. 5 is, for example, that the frame size of the plate frame 1 is 750 mm × 650 mm or 736 mm × 736 mm, the size of the metal mask 3 is 620 mm × 520 mm, and the electropolatable area 10 of the metal mask 3 is 480 mm. X 380 mm, metal plate thickness is 0.08 to 0.15 mm.

図6はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程の概略構造を示す断面図、図7は同じく電解研磨工程を示す分解斜視図である。
図6、図7において、電解研磨液7の入った電解槽8内において、レーザー加工工程が終了したメタルマスク3の一部、すなわちパターン開口部6及びその周辺近傍のみが電解研磨液7に浸漬されるような状態となるように、電解槽8を8A、8Bの二分割構造とし、各電解槽8A、8Bの開口部周縁部には水密性のある環状の液漏れ防止用シール材9が設けられている。そして、二分割構造の電解槽8A、8Bは、通常は分離している。そして、電解研磨工程になると、レーザー加工工程が終了したメタルマスク3の一部、すなわちパターン開口部6及びその周辺近傍のみを二分割構造の電解槽8A、8Bにより両面側から挟み込む。このとき、各電解槽8A、8Bの開口部周縁部には水密性のある環状の液漏れ防止用シール材9が設けられているので、環状の液漏れ防止用シール材9がメタルマスク3のパターン開口部6の周辺近傍に密着するので、電解研磨液7が漏れるようなことは無い。ここで、メタルマスク3の一部、すなわちパターン開口部6及びその周辺近傍のみが電解研磨液7に浸漬される状態になるということは、図4、図5において、メタルマスク3の矩形状の電解研磨可能エリア10のみが電解研磨液7に浸漬されるということである。なお、図4、図5において、矩形状の電解研磨可能エリア10の外周部に位置するメタルマスク3の矩形枠状の外周縁部領域は、電解研磨されない電解研磨非可能エリア11である。これにより、パターン開口部6のエッジのバリを除去し、パターン開口部6の周辺近傍のみが電解研磨される。
FIG. 6 is a cross-sectional view showing a schematic structure of an electropolishing step of a method of manufacturing a metal mask for screen printing with a frame in Example 1 of the present invention, and FIG. 7 is an exploded perspective view showing the electropolishing step.
6 and 7, in the electrolytic bath 8 containing the electrolytic polishing liquid 7, only a part of the metal mask 3 after the laser processing step is completed, that is, only the pattern opening 6 and the vicinity thereof are immersed in the electrolytic polishing liquid 7. The electrolytic cell 8 has a two-part structure of 8A and 8B so that a sealed state of the liquid sealing material 9 for preventing liquid leakage is provided around the opening of each of the electrolytic cells 8A and 8B. It is provided. The electrolytic cells 8A and 8B of the two-divided structure are usually separated. Then, in the electrolytic polishing step, only a part of the metal mask 3 after the laser processing step, that is, the pattern opening 6 and the vicinity thereof is sandwiched from both sides by the electrolytic cells 8A and 8B of the two division structure. At this time, since the annular seal member 9 for liquid leakage prevention is provided at the periphery of the opening of each of the electrolytic cells 8A and 8B, the annular seal member 9 for liquid leakage prevention is the metal mask 3. Since it closely adheres to the vicinity of the periphery of the pattern opening 6, there is no possibility that the electrolytic polishing liquid 7 leaks. Here, the fact that only part of the metal mask 3, that is, the pattern opening 6 and the vicinity thereof is to be immersed in the electrolytic polishing liquid 7 means that the rectangular shape of the metal mask 3 in FIGS. This means that only the electropolishable area 10 is immersed in the electropolishing liquid 7. In FIG. 4 and FIG. 5, the outer peripheral area of the rectangular frame shape of the metal mask 3 located at the outer peripheral part of the rectangular electro-polatable area 10 is the non-electro-polable non-electrolytic area 11. Thereby, burrs on the edge of the pattern opening 6 are removed, and only the vicinity of the periphery of the pattern opening 6 is electropolished.

図8はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法の電解研磨工程終了後のメタルマスクの板厚測定箇所を示す平面図、図9は電解研磨工程終了後のメタルマスクの板厚測定箇所の測定結果を示す表、図10は電解研磨工程終了後のメタルマスクの板厚測定箇所の測定結果から板厚変動値を示す表である。
図8において、測定箇所1〜測定箇所13は、メタルマスク3の矩形状の電解研磨可能エリア10内にあり、測定箇所14〜測定箇所21は、矩形状の電解研磨可能エリア10の外周部に位置するメタルマスク3の矩形枠状の外周縁部領域、すなわち電解研磨されない電解研磨非可能エリア11にある。図9から明らかなように、測定箇所1〜測定箇所13における電解研磨処理時間が240秒後の板厚は、0.148〜0.149mmであり、測定箇所14〜測定箇所21における電解研磨処理時間が240秒後の板厚は、0.152〜0.153mmであった。そして、図10に示すように、電解研磨処理による板厚の差異比較した板厚変動値は、0.003〜0.004mmであった。
これにより、矩形状の電解研磨可能エリア10の外周部に位置するメタルマスク3の矩形枠状の外周縁部領域、すなわち電解研磨されない電解研磨非可能エリア11の板厚は、電解研磨可能エリア10の板厚よりも0.003〜0.004mm程度厚いため、矩形枠状という形状と相俟ってメタルマスク3の強度を向上させることができる。
FIG. 8 is a plan view showing the plate thickness measurement points of the metal mask after the end of the electropolishing step in the method of manufacturing a metal mask for a screen frame with screen frame in Example 1 of the present invention. FIG. 10 is a table showing measurement results of plate thickness measurement points of a mask, and FIG. 10 is a table showing plate thickness fluctuation values from measurement results of plate thickness measurement points of a metal mask after the end of the electropolishing process.
In FIG. 8, measurement points 1 to 13 are in the rectangular electro-abrasable area 10 of the metal mask 3, and measurement points 14 to 21 are on the outer peripheral portion of the rectangular electro-polishable area 10. It is located in the rectangular frame-like outer peripheral edge region of the metal mask 3 located, that is, in the non-electrolytic-polishing-not-possible area 11 which is not electropolished. As is clear from FIG. 9, the plate thickness after the electropolishing time of 240 seconds at the measurement points 1 to 13 is 0.148 to 0.149 mm, and the electropolishing process at the measurement points 14 to 21 is The plate thickness after 240 seconds was 0.152 to 0.153 mm. And as shown in FIG. 10, the plate thickness fluctuation value which the difference of the plate thickness by electrolytic polishing process compared was 0.003-0.004 mm.
Thus, the rectangular frame-shaped outer peripheral edge region of the metal mask 3 located on the outer peripheral portion of the rectangular electropolable area 10, that is, the plate thickness of the nonelectrolytic nonpolable area 11 is the electropolable area 10 The thickness of the metal mask 3 is about 0.003 to 0.004 mm thicker than the thickness of the metal mask 3. Therefore, the strength of the metal mask 3 can be improved in combination with the rectangular frame shape.

図11はこの発明の実施例1における版枠付きスクリーン印刷用メタルマスクの製造方法と従来の版枠付きスクリーン印刷用メタルマスクの製造方法の開口座標のズレを比較して示す説明図である。
図11において、△で表したものが設計値の座標を示し、○で表したものがこの発明の加工による座標を示し、×で表したものが従来の標準加工による座標を示したものである。なお、メタルマスク3の仕様は、400mm×300mm、開口径:0.5mm、間隔:50mm、板厚:0.15mm、張力:25N/cmである。
この開口座標ズレ比較によれば、従来の標準加工による場合と設計値との差異が最大で+20μmあったのが、この発明の加工による場合では、設計値との差異が最大で−5μmに抑えることができた。
FIG. 11 is an explanatory view comparing the deviation of the aperture coordinates in the method of manufacturing a screen framed metal mask for a screen frame and the conventional method of manufacturing a screen framed metal mask for a screen frame in Example 1 of the present invention.
In FIG. 11, the triangle indicates the coordinates of the design value, the circle indicates the coordinates of the process of the present invention, and the x indicates the coordinates of the conventional standard process. . The specification of the metal mask 3 is 400 mm × 300 mm, opening diameter: 0.5 mm, interval: 50 mm, plate thickness: 0.15 mm, tension: 25 N / cm.
According to the aperture coordinate deviation comparison, the difference between the conventional standard processing and the design value was +20 μm at the maximum, but according to the processing of the present invention, the difference with the design value is suppressed to -5 μm at maximum I was able to.

実施例2.
上記実施例1では、ステップS3のレーザー加工工程の後、ステップS4の電解研磨工程を行うことにより、この発明の版枠付きスクリーン印刷用メタルマスクを完成させているが、この実施例2においては、ステップS3のレーザー加工工程の後、ステップS4の電解研磨工程に代えて、化学研磨液の入った化学薬品槽内に、レーザー加工が終了したメタルマスクの一部、すなわちパターン開口部及びその周辺近傍のみが化学研磨液に浸漬され化学反応により化学研磨されるような状態とし、パターン開口部及びその周辺近傍のみを化学研磨する。これにより、パターン開口部のエッジのバリを除去し、パターン開口部の周辺近傍のみが化学研磨される(化学研磨工程)。この化学研磨工程では、図4及び図5のメタルマスク3の電解研磨可能エリア10が化学研磨可能エリアとなり、電解研磨非可能エリア11が化学研磨非可能エリアとなる。そして、化学研磨液の化学反応により化学研磨されないように、化学研磨非可能エリアの表面に、例えば保護シート、保護テープ等を被覆しておき、化学研磨工程終了後に保護シート、保護テープ等を剥離すれば良い。
Example 2
In the first embodiment, the plate-framed screen printing metal mask of the present invention is completed by performing the electropolishing step of step S4 after the laser processing step of step S3. After the laser processing step of step S3, instead of the electropolishing step of step S4, a portion of the metal mask for which laser processing has been completed, ie, the pattern opening and the periphery thereof, in a chemical bath containing a chemical polishing solution. Only the vicinity is immersed in the chemical polishing solution and chemically polished by a chemical reaction, and only the pattern opening and the vicinity thereof are chemically polished. Thereby, burrs at the edge of the pattern opening are removed, and only the vicinity of the periphery of the pattern opening is chemically polished (chemical polishing process). In this chemical polishing process, the electropolishable area 10 of the metal mask 3 in FIGS. 4 and 5 is a chemically polishable area, and the nonelectrolytic polishing area 11 is a nonchemically polishable area. Then, for example, a protective sheet, a protective tape, or the like is coated on the surface of the non-chemically polishing possible area so as not to be chemically polished by the chemical reaction of the chemical polishing solution, and the protective sheet, protective tape, etc. is peeled off after the chemical polishing process is completed. Just do it.

この実施例2の場合であっても、客先から注文を受けてから製品出荷までの納期期間を短縮できる版枠付きスクリーン印刷用メタルマスクを得ることができるという効果がある。また、化学研磨液に浸漬されていないパターン開口部の周辺近傍の更に外側に位置するメタルマスクの外周縁部は、化学研磨されないので、外周縁部の厚さは薄くなるようなことがない。しかも外周縁部は額縁状の周辺部となるので、強度を強く保つことができる効果もある。   Even in the case of the second embodiment, there is an effect that it is possible to obtain a metal mask for screen printing with a frame which can shorten the delivery period from the receipt of an order from a customer to the product shipment. In addition, since the outer peripheral edge of the metal mask located further outside in the vicinity of the periphery of the pattern opening which is not immersed in the chemical polishing liquid is not chemically polished, the thickness of the outer peripheral edge does not become thin. Moreover, since the outer peripheral portion is a frame-like peripheral portion, there is also an effect that the strength can be kept strong.

1 版枠
2 紗
3 メタルマスク
4 版枠付きスクリーン印刷用メタルマスクの原版
5 レーザー光
6 パターン開口部
7 電解研磨液
8、8A、8B 電解槽
9 液漏れ防止用シール材
10 電解研磨可能エリア
11 電解研磨非可能エリア
DESCRIPTION OF SYMBOLS 1 plate frame 2 原 3 metal mask 4 plate mask original plate for metal mask for screen printing 5 laser light 6 pattern opening 7 electrolytic polishing solution 8, 8 A, 8 B electrolytic bath 9 sealing material for liquid leakage prevention 10 electrolytically polishable area 11 Electrolytic polishing impossible area

Claims (9)

版枠と、
前記版枠に紗張りされた紗と、
前記紗に外周縁部を接着剤により張り付けられ、中央のパターンエリア内にレーザー加工によりパターン開口部を穴開け加工されたメタルマスクと、を備え、
前記メタルマスクは、レーザー加工により穴開け加工されたパターン開口部及びその周辺近傍のみを電解研磨液に浸漬されてパターン開口部のエッジのバリを除去する電解研磨可能エリアとし、
前記電解研磨可能エリアの外周部に位置する前記メタルマスクの外周縁部領域は、電解研磨液に浸漬されない電解研磨非可能エリアとし、
前記電解研磨非可能エリアの板厚を前記電解研磨可能エリアの板厚よりも厚くしたことを特徴とする版枠付きスクリーン印刷用メタルマスク。
Print frame,
The fence that is lined with the plate frame,
And a metal mask having an outer peripheral edge attached to the crucible with an adhesive, and a pattern opening formed by laser processing in a central pattern area.
The metal mask is an electrolytically polishable area in which only the pattern opening which has been drilled by laser processing and the vicinity thereof are immersed in the electrolytic polishing solution to remove burrs at the edge of the pattern opening,
An outer peripheral area of the metal mask located on an outer peripheral portion of the electro-polable area is an electro-polable non-permanent area which is not immersed in the electro-polishing liquid,
A plate-frame-attached metal mask for screen printing characterized in that a plate thickness of the non-electrolytic-polish area is made thicker than a plate thickness of the electro-polishable area.
メタルマスクの電解研磨液に浸漬される電解研磨可能エリアを矩形状とし、かつ電解研磨液に浸漬されない電解研磨非可能エリアを矩形枠状としたことを特徴とする請求項1記載の版枠付きスクリーン印刷用メタルマスク。   The plate frame according to claim 1, characterized in that the electropolable area immersed in the electropolishing liquid of the metal mask is rectangular, and the electropolished non-immersed area not immersed in the electropolishing liquid is rectangular frame-shaped. Screen printing metal mask. 版枠と、
前記版枠に紗張りされた紗と、
前記紗に外周縁部を接着剤により張り付けられ、中央のパターンエリア内にレーザー加工によりパターン開口部を穴開け加工されたメタルマスクと、を備え、
前記メタルマスクは、レーザー加工により穴開け加工されたパターン開口部及びその周辺近傍のみを化学研磨液に浸漬され化学反応により化学研磨されてパターン開口部のエッジのバリを除去する化学研磨可能エリアとし、
前記化学研磨可能エリアの外周部に位置する前記メタルマスクの外周縁部領域は、化学研磨液の化学反応により化学研磨されない化学研磨非可能エリアとし、
前記化学研磨非可能エリアの板厚を前記化学研磨可能エリアの板厚よりも厚くしたことを特徴とする版枠付きスクリーン印刷用メタルマスク。
Print frame,
The fence that is lined with the plate frame,
And a metal mask having an outer peripheral edge attached to the crucible with an adhesive, and a pattern opening formed by laser processing in a central pattern area.
The metal mask is a chemical polishing area in which only the pattern opening drilled by laser processing and the vicinity thereof are immersed in a chemical polishing solution and chemically polished by a chemical reaction to remove burrs on the edge of the pattern opening. ,
An outer peripheral area of the metal mask located at an outer peripheral portion of the chemical polishing area is a non-chemical polishing area which is not chemically polished by a chemical reaction of a chemical polishing solution,
A metal mask for screen printing with a frame, characterized in that the thickness of the non-chemically-polished area is larger than the thickness of the chemically-polished area.
メタルマスクの化学研磨液に浸漬される化学研磨可能エリアを矩形状とし、かつ化学研磨液の化学反応により化学研磨されない化学研磨非可能エリアを矩形枠状としたことを特徴とする請求項3記載の版枠付きスクリーン印刷用メタルマスク。   4. The method according to claim 3, wherein the chemical polishing area to be immersed in the chemical polishing solution of the metal mask is rectangular, and the chemical polishing non-permissible area not to be chemically polished by the chemical reaction of the chemical polishing solution is rectangular frame. Plate mask with screen printing metal mask. 注文を受ける前に、版枠に紗を張り付け、未加工のメタルマスクの外周縁部を接着剤により張り付けた版枠付きスクリーン印刷用メタルマスクの原版を予め用意しておく事前の紗張り工程と、
注文を受けてから、前記版枠に紗張りされた状態で前記未加工のメタルマスクの中央のパターンエリア内にレーザー加工により、パターン開口部を穴開け加工するレーザー加工工程と、
電解研磨液の入った電解槽内において、レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍のみが浸漬されるような状態とし、パターン開口部及びその周辺近傍のみを電解研磨する電解研磨工程と、
を備えたことを特徴とする版枠付きスクリーン印刷用メタルマスクの製造方法。
Prior to receiving an order, a tacking step is performed by preparing in advance an original plate for a screen mask with a screen frame having a frame attached to the plate frame and an outer peripheral edge of an unprocessed metal mask attached by an adhesive. ,
A laser processing step of drilling a pattern opening by laser processing in a central pattern area of the unprocessed metal mask in a state of being tucked to the plate frame after receiving an order;
In the electrolytic bath containing the electrolytic polishing solution, only the pattern opening of the metal mask after laser processing and the vicinity thereof are immersed, and electrolytic polishing is performed to electrolyze only the pattern opening and the vicinity thereof Process,
A method of manufacturing a metal mask for screen printing with a plate frame, comprising:
電解研磨工程に用いられる電解槽は、通常は分離した二分割構造であり、電解研磨工程になると、レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍のみを二分割構造の電解槽により両側面から挟み込み、前記電解槽内に電解液を循環させることを特徴とする請求項5記載の版枠付きスクリーン印刷用メタルマスクの製造方法。   The electrolytic cell used in the electrolytic polishing step is usually a two-divided structure separated, and in the case of the electrolytic polishing step, only the pattern opening of the metal mask for which the laser processing has been completed and the vicinity thereof are 6. A method of manufacturing a metal mask for screen printing with a plate frame according to claim 5, wherein the electrolytic solution is circulated by being sandwiched from both sides and the electrolytic solution is circulated. 二分割構造の電解槽は、メタルマスクのパターン開口部の周辺近傍に接する開口部周縁部に環状の液漏れ防止用シールを備えることを特徴とする請求項6記載の版枠付きスクリーン印刷用メタルマスクの製造方法。   7. The screen printing metal with a plate frame according to claim 6, wherein the electrolytic cell of the two-parted structure is provided with an annular liquid leakage prevention seal at an opening peripheral portion in contact with the vicinity of the periphery of the pattern opening of the metal mask. How to make a mask. 注文を受ける前に、版枠に紗を張り付け、未加工のメタルマスクの外周縁部を接着剤により張り付けた版枠付きスクリーン印刷用メタルマスクの原版を予め用意しておく事前の紗張り工程と、
注文を受けてから、前記版枠に紗張りされた状態で前記未加工のメタルマスクの中央のパターンエリア内にレーザー加工により、パターン開口部を穴開け加工するレーザー加工工程と、
化学研磨液の入った化学薬品槽内に、レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍のみが浸漬され化学反応により化学研磨されるような状態とし、パターン開口部及びその周辺近傍のみを化学研磨する化学研磨工程と、
を備えたことを特徴とする版枠付きスクリーン印刷用メタルマスクの製造方法。
Prior to receiving an order, a tacking step is performed by preparing in advance an original plate for a screen mask with a screen frame having a frame attached to the plate frame and an outer peripheral edge of an unprocessed metal mask attached by an adhesive. ,
A laser processing step of drilling a pattern opening by laser processing in a central pattern area of the unprocessed metal mask in a state of being tucked to the plate frame after receiving an order;
In the chemical bath containing the chemical polishing liquid, only the pattern opening of the metal mask after laser processing and the vicinity of the periphery are immersed and chemically polished by the chemical reaction. Chemical polishing process to chemically polish only
A method of manufacturing a metal mask for screen printing with a plate frame, comprising:
レーザー加工が終了したメタルマスクのパターン開口部及びその周辺近傍の外側の外周縁部領域は、化学研磨液の化学反応により化学研磨されない化学研磨非可能エリアとして、保護層で被覆することを特徴とする請求項8記載の版枠付きスクリーン印刷用メタルマスクの製造方法。   The pattern opening of the metal mask after the laser processing and the outer peripheral region in the vicinity of the periphery are covered with a protective layer as a non-chemically polishable area which is not chemically polished by the chemical reaction of the chemical polishing solution. A method of manufacturing a metal mask for screen printing with a frame according to claim 8.
JP2017243966A 2017-12-20 2017-12-20 Metal mask for screen printing with plate frame and manufacturing method therefor Pending JP2019107858A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021059029A (en) * 2019-10-03 2021-04-15 株式会社プロセス・ラボ・ミクロン Metal mask and manufacturing method thereof
CN114855257A (en) * 2022-04-20 2022-08-05 湖南华翔医疗科技有限公司 Edge polishing method of metal film material, metal film material and application

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0655724A (en) * 1992-08-11 1994-03-01 Matsushita Electric Ind Co Ltd Method for surface treatment for metal mask
JP2004276435A (en) * 2003-03-17 2004-10-07 Taiyo Kagaku Kogyo Kk Metal mask and its manufacturing method by laser working method
JP2005305725A (en) * 2004-04-19 2005-11-04 Process Lab Micron:Kk Metal mask and manufacturing method thereof
JP2006281523A (en) * 2005-03-31 2006-10-19 Taiyo Kagaku Kogyo Kk Surface treating method and surface treating device of metal mask
US20080302258A1 (en) * 2007-06-08 2008-12-11 Fukui Precision Component (Shenzhen) Co., Ltd. Screen printing stencil and method for manufacturing the same
JP2011148253A (en) * 2010-01-25 2011-08-04 Bonmaaku:Kk Metal mask by laser processing, and method for chemical-polishing the same
JP2014133375A (en) * 2013-01-11 2014-07-24 Sonocom Co Ltd Screen printing member using electropolishing and method for manufacturing screen printing member

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0655724A (en) * 1992-08-11 1994-03-01 Matsushita Electric Ind Co Ltd Method for surface treatment for metal mask
JP2004276435A (en) * 2003-03-17 2004-10-07 Taiyo Kagaku Kogyo Kk Metal mask and its manufacturing method by laser working method
JP2005305725A (en) * 2004-04-19 2005-11-04 Process Lab Micron:Kk Metal mask and manufacturing method thereof
JP2006281523A (en) * 2005-03-31 2006-10-19 Taiyo Kagaku Kogyo Kk Surface treating method and surface treating device of metal mask
US20080302258A1 (en) * 2007-06-08 2008-12-11 Fukui Precision Component (Shenzhen) Co., Ltd. Screen printing stencil and method for manufacturing the same
JP2011148253A (en) * 2010-01-25 2011-08-04 Bonmaaku:Kk Metal mask by laser processing, and method for chemical-polishing the same
JP2014133375A (en) * 2013-01-11 2014-07-24 Sonocom Co Ltd Screen printing member using electropolishing and method for manufacturing screen printing member

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021059029A (en) * 2019-10-03 2021-04-15 株式会社プロセス・ラボ・ミクロン Metal mask and manufacturing method thereof
CN114855257A (en) * 2022-04-20 2022-08-05 湖南华翔医疗科技有限公司 Edge polishing method of metal film material, metal film material and application

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