JP2019078545A5 - - Google Patents
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- JP2019078545A5 JP2019078545A5 JP2017203263A JP2017203263A JP2019078545A5 JP 2019078545 A5 JP2019078545 A5 JP 2019078545A5 JP 2017203263 A JP2017203263 A JP 2017203263A JP 2017203263 A JP2017203263 A JP 2017203263A JP 2019078545 A5 JP2019078545 A5 JP 2019078545A5
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- unit
- physical quantity
- quantity sensor
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- 238000001514 detection method Methods 0.000 claims 28
- 239000000758 substrate Substances 0.000 claims 10
- 238000005259 measurement Methods 0.000 claims 3
Claims (12)
前記Ｚ軸に直交し、互いに表裏の関係にある第１面及び第２面を含む基板と、
前記基板の前記第１面に支持されている素子部と、
を含み、
前記素子部は、静電容量の変化に基づいて角速度を検知し、複数の電極指を含む検出部を含み、
前記検出部は、
前記基板に固定されている固定検出電極と、
前記Ｙ軸方向に変位可能な可動検出電極と、
前記基板に固定されている第１固定部と、
前記第１固定部と前記可動検出電極とを連結している第１ばね部と、
を含み、
前記固定検出電極は、
前記Ｘ軸に沿って設けられている複数の固定検出電極指を含み、
前記可動検出電極は、
前記Ｙ軸に沿って設けられている第１幹部と、
前記第１幹部から前記Ｘ軸に沿って設けられ、前記固定検出電極指と前記Ｙ軸方向に間隔を空けて配置されている複数の可動検出電極指と、
前記第１幹部に連結している第１連結部と、
を含み、
前記第１連結部と隣り合う前記電極指と、前記第１連結部と、の前記Ｙ軸方向の間隔は、前記可動検出電極指と前記固定検出電極指との前記Ｙ軸方向の間隔と略等しいことを特徴とする物理量センサー。 When the three axes orthogonal to each other are the X-axis, Y-axis, and Z-axis,
A substrate including a first surface and a second surface orthogonal to the Z axis and having a front and back relationship with each other.
The element portion supported on the first surface of the substrate and
Including
The element unit detects the angular velocity based on the change in capacitance, and includes a detection unit including a plurality of electrode fingers .
The detection unit
The fixed detection electrode fixed to the substrate and
The movable detection electrode that can be displaced in the Y-axis direction and
The first fixing portion fixed to the substrate and
A first spring portion, which connects the movable detection electrode and the first fixed part,
Including
The fixed detection electrode is
Includes a plurality of fixed detection electrode fingers provided along the X-axis .
The movable detection electrode is
The first cadre provided along the Y-axis and
Said first provided from the trunk along the X axis, the is a fixed detection electrode fingers arranged at the intervals in the Y-axis direction Tei there are multiple movable detecting electrode fingers,
The first connecting portion connected to the first executive portion and
Including
The distance between the electrode finger adjacent to the first connecting portion and the first connecting portion in the Y-axis direction is substantially the same as the distance between the movable detection electrode finger and the fixed detection electrode finger in the Y-axis direction. A physical quantity sensor characterized by being equal.
前記第１連結部は、
前記第１幹部に連結している第１支持部と、
前記第１ばね部に連結している第２支持部と、
を含み、
前記第１支持部の前記Ｘ軸に沿った長さは、前記可動検出電極指の前記Ｘ軸に沿った長さと略等しいことを特徴とする物理量センサー。 In claim 1,
The first connecting portion is
The first support unit connected to the first executive unit and
The second support portion connected to the first spring portion and
Including
A physical quantity sensor characterized in that the length of the first support portion along the X-axis is substantially equal to the length of the movable detection electrode finger along the X-axis .
前記Ｚ軸に直交し、互いに表裏の関係にある第１面及び第２面を含む基板と、
前記基板の前記第１面に支持されている素子部と、
を含み、
前記素子部は、静電容量の変化に基づいて角速度を検知し、複数の電極指を含む検出部を含み、
前記検出部は、
前記基板に固定されている固定検出電極と、
前記Ｙ軸方向に変位可能な可動検出電極と、
前記基板に固定されている第１固定部と、
前記第１固定部と前記可動検出電極とを連結している第１ばね部と、
を含み、
前記固定検出電極は、
前記Ｘ軸に沿って設けられている複数の固定検出電極指を含み、
前記可動検出電極は、
前記Ｙ軸に沿って設けられている第１幹部と、
前記第１幹部から前記Ｘ軸に沿って設けられ、前記固定検出電極指と前記Ｙ軸方向に間隔を空けて配置されている複数の可動検出電極指と、
前記第１幹部に連結している第１連結部と、
を含み、
前記第１連結部の前記Ｘ軸に沿った長さは、前記可動検出電極指の前記Ｘ軸に沿った長さと略等しく、
前記第１連結部と前記固定検出電極との前記Ｙ軸方向の間隔は、前記固定検出電極指と前記可動検出電極指との前記Ｙ軸方向の間隔と略等しいことを特徴とする物理量センサー。 When the three axes orthogonal to each other are the X-axis, Y-axis, and Z-axis,
A substrate including a first surface and a second surface orthogonal to the Z axis and having a front and back relationship with each other.
The element portion supported on the first surface of the substrate and
Including
The element unit detects the angular velocity based on the change in capacitance, and includes a detection unit including a plurality of electrode fingers .
The detection unit
The fixed detection electrode fixed to the substrate and
The movable detection electrode that can be displaced in the Y-axis direction and
The first fixing portion fixed to the substrate and
A first spring portion, which connects the movable detection electrode and the first fixed part,
Including
The fixed detection electrode is
Includes a plurality of fixed detection electrode fingers provided along the X-axis .
The movable detection electrode is
The first cadre provided along the Y-axis and
Said first provided from the trunk along the X axis, the is a fixed detection electrode fingers arranged at the intervals in the Y-axis direction Tei there are multiple movable detecting electrode fingers,
The first connecting portion connected to the first executive portion and
Including
The length of the first connecting portion along the X-axis is substantially equal to the length of the movable detection electrode finger along the X-axis .
A physical quantity sensor characterized in that the distance between the first connecting portion and the fixed detection electrode in the Y-axis direction is substantially equal to the distance between the fixed detection electrode finger and the movable detection electrode finger in the Y-axis direction.
前記素子部は、前記検出部を駆動可能な駆動部を含み、
前記駆動部は、
前記基板に固定されている固定駆動電極と、
前記Ｘ軸方向に変位可能な可動駆動電極と、
前記基板に固定されている第２固定部と、
前記第２固定部と前記可動駆動電極とを連結している第２ばね部と、
を含み、
前記固定駆動電極は、
前記Ｘ軸に沿って設けられている複数の固定駆動電極指を含み、
前記可動駆動電極は、
前記Ｙ軸に沿って設けられている第２幹部と、
前記第２幹部から前記Ｘ軸に沿って設けられ、前記固定駆動電極指と前記Ｙ軸方向に間隔を空けて配置されている複数の可動駆動電極指と、
前記第２幹部に連結している第２連結部と、
を含み、
前記第２連結部は、
前記第２幹部に連結している第３支持部と、
前記第２ばね部に連結している第４支持部と、
を含み、
前記第３支持部と前記固定駆動電極との前記Ｙ軸方向の間隔は、前記第４支持部と前記固定駆動電極との前記Ｙ軸方向の間隔より小さいことを特徴とする物理量センサー。 In any one of claims 1 to 4,
The element unit includes a drive unit capable of driving the detection unit.
The drive unit
The fixed drive electrode fixed to the substrate and
The movable drive electrode that can be displaced in the X-axis direction and
The second fixing portion fixed to the substrate and
A second spring portion, which connects the movable driving electrode and the second fixing portion,
Including
The fixed drive electrode is
Includes a plurality of fixed drive electrode fingers provided along the X-axis .
The movable drive electrode is
A second cadre provided along the Y-axis and
Said second provided along the stem to the X axis, the is the stationary driving electrode fingers arranged at the intervals in the Y-axis direction Tei are multiple movable drive electrode fingers,
The second connecting part connected to the second cadre and
Including
The second connecting portion is
With the third support part connected to the second cadre,
The fourth support portion connected to the second spring portion and
Including
A physical quantity sensor characterized in that the distance between the third support portion and the fixed drive electrode in the Y-axis direction is smaller than the distance between the fourth support portion and the fixed drive electrode in the Y-axis direction.
前記第３支持部の前記Ｘ軸に沿った長さは、前記可動駆動電極指の前記Ｘ軸に沿った長さと略等しいことを特徴とする物理量センサー。 In claim 5,
A physical quantity sensor characterized in that the length of the third support portion along the X axis is substantially equal to the length of the movable drive electrode finger along the X axis .
前記第３支持部と前記固定駆動電極との前記Ｙ軸方向の間隔は、前記固定駆動電極指と前記可動駆動電極指との前記Ｙ軸方向の間隔と略等しいことを特徴とする物理量センサー。 In claim 5 or 6,
A physical quantity sensor characterized in that the distance between the third support portion and the fixed drive electrode in the Y-axis direction is substantially equal to the distance between the fixed drive electrode finger and the movable drive electrode finger in the Y-axis direction.
前記物理量センサーの駆動を制御する制御回路と、
を含むことを特徴とする慣性計測装置。 The physical quantity sensor according to any one of claims 1 to 7.
A control circuit that controls the drive of the physical quantity sensor,
An inertial measurement unit characterized by including .
測位用衛星から位置情報が重畳された衛星信号を受信する受信部と、
受信した前記衛星信号に基づいて、前記受信部の位置情報を取得する取得部と、
前記慣性計測装置から出力された慣性データに基づいて、移動体の姿勢を演算する演算部と、
算出された前記姿勢に基づいて前記位置情報を補正することにより、前記移動体の位置を算出する算出部と、
を含むことを特徴とする移動体測位装置。 The inertial measurement unit according to claim 8 and
A receiver that receives satellite signals with position information superimposed from positioning satellites,
An acquisition unit that acquires the position information of the reception unit based on the received satellite signal, and
A calculation unit that calculates the posture of the moving body based on the inertial data output from the inertial measurement unit.
A calculation unit that calculates the position of the moving body by correcting the position information based on the calculated posture.
A mobile positioning device characterized by including .
前記物理量センサーが収容されているケースと、
前記ケースに収容され、前記物理量センサーからの出力データを処理する処理部と、
前記ケースに収容されている表示部と、
前記ケースの開口部を塞いでいる透光性カバーと、
を含むことを特徴とする携帯型電子機器。 The physical quantity sensor according to any one of claims 1 to 7.
The case where the physical quantity sensor is housed and
A processing unit housed in the case and processing output data from the physical quantity sensor,
The display unit housed in the case and
A translucent cover that closes the opening of the case,
A portable electronic device characterized by including .
前記物理量センサーから出力された検出信号に基づいて制御を行う制御部と、
を含むことを特徴とする電子機器。 The physical quantity sensor according to any one of claims 1 to 7.
A control unit that controls based on the detection signal output from the physical quantity sensor,
An electronic device characterized by including .
前記物理量センサーから出力された検出信号に基づいて姿勢の制御を行う姿勢制御部と、
を含むことを特徴とする移動体。 The physical quantity sensor according to any one of claims 1 to 7.
An attitude control unit that controls the attitude based on the detection signal output from the physical quantity sensor.
A mobile body characterized by containing .
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017203263A JP7167425B2 (en) | 2017-10-20 | 2017-10-20 | Physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects |
| JP2022108832A JP7310988B2 (en) | 2017-10-20 | 2022-07-06 | Physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017203263A JP7167425B2 (en) | 2017-10-20 | 2017-10-20 | Physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022108832A Division JP7310988B2 (en) | 2017-10-20 | 2022-07-06 | Physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019078545A JP2019078545A (en) | 2019-05-23 |
| JP2019078545A5 true JP2019078545A5 (en) | 2020-12-03 |
| JP7167425B2 JP7167425B2 (en) | 2022-11-09 |
Family
ID=66628766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017203263A Active JP7167425B2 (en) | 2017-10-20 | 2017-10-20 | Physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7167425B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019148477A (en) | 2018-02-27 | 2019-09-05 | セイコーエプソン株式会社 | Angular velocity sensor, inertia measurement device, moving body positioning device, portable type electronic device, electronic device, and moving body |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2949174B2 (en) * | 1994-05-13 | 1999-09-13 | 九州電力株式会社 | Method and apparatus for automatically measuring the running ability of land vehicles |
| KR100363785B1 (en) | 1999-06-04 | 2002-12-11 | 삼성전기주식회사 | Microgyrocrope |
| JP2002340927A (en) | 2001-05-14 | 2002-11-27 | Aisin Seiki Co Ltd | Acceleration sensor |
| DE102010006584B4 (en) | 2010-02-02 | 2012-09-27 | Northrop Grumman Litef Gmbh | Coriolis gyro with correction units and method for reduction of quadrature bias |
| JP6020793B2 (en) | 2012-04-02 | 2016-11-02 | セイコーエプソン株式会社 | Physical quantity sensor and electronic equipment |
| JP2014115080A (en) | 2012-12-06 | 2014-06-26 | Alps Electric Co Ltd | Physical quantity sensor |
| JP6269992B2 (en) | 2016-08-19 | 2018-01-31 | セイコーエプソン株式会社 | Gyro sensor and electronics |
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2017
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