JP6269992B2 - Gyro sensor and electronics - Google Patents

Description

  The present invention relates to a gyro sensor and an electronic device.

In recent years, for example, silicon MEMS (Micro Electro Mechanical)
An angular velocity sensor (gyro sensor) for detecting an angular velocity using a (System) technology has been developed.

  For example, Patent Literature 1 discloses a gyro sensor including a vibrating body, a drive electrode that vibrates the vibrating body, and a detection electrode that detects a signal that changes according to the angular velocity of the vibrating body. The drive electrode and the detection electrode are connected to the drive wiring and the detection wiring, respectively.

JP 7-218268 A

  However, in the gyro sensor as described above, an AC voltage is applied to the drive electrode via the drive wiring. Therefore, if there is a portion where the drive electrode and the detection wiring intersect, there is a gap between the drive wiring and the detection wiring. In some cases, a current flows through the detection wiring through the parasitic capacitance generated in FIG. Such a current cannot be separated from a signal that changes according to the angular velocity of the vibrating body, and the detection accuracy of the gyro sensor may be reduced.

  One of the objects according to some aspects of the present invention is to provide a gyro sensor capable of suppressing a current from flowing through a detection wiring via a parasitic capacitance generated between the drive wiring and the detection wiring. . Another object of some aspects of the present invention is to provide an electronic apparatus having the above gyro sensor.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
The gyro sensor according to this application example is
A vibrating body,
A first fixed drive electrode that is provided on a first direction side that intersects the drive vibration direction of the vibrating body in a plan view and vibrates the vibrating body;
A second fixed drive electrode that is provided on the opposite side of the first direction in plan view and vibrates the vibrating body;
A fixed detection electrode for detecting a signal that changes according to the angular velocity of the vibrating body;
A first drive wiring connected to the first fixed drive electrode and extending to one side of the drive vibration direction;
A second drive wiring connected to the second fixed drive electrode and extending to the one side in the drive vibration direction;
A detection wiring connected to the fixed detection electrode and extending to the opposite side of the one side;
including.

  According to such a gyro sensor, it is possible to suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring.

[Application Example 2]
In the gyro sensor according to this application example,
The first drive wiring may have a portion extending on the one side of the vibrating body to the opposite side to the first direction.

  According to such a gyro sensor, it is possible to more reliably suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring.

[Application Example 3]
In the gyro sensor according to this application example,
In claim 1 or 2,
The first drive wiring and the second drive wiring may be connected.

  According to such a gyro sensor, wirings can be shared and the number of wirings can be reduced.

[Application Example 4]
In the gyro sensor according to this application example,
The drive wiring and the detection wiring do not need to intersect each other.

  According to such a gyro sensor, it is possible to more reliably suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring.

[Application Example 5]
In the gyro sensor according to this application example,
A movable drive electrode extending from the vibrator,
The first fixed drive electrode and the second fixed drive electrode may be provided to face the movable drive electrode.

  According to such a gyro sensor, it is possible to suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring.

[Application Example 6]
In the gyro sensor according to this application example,
A displacement portion connected to the vibrating body via a spring portion;
A movable detection electrode extending from the displacement portion;
Including
The fixed detection electrode may be provided to face the movable detection electrode.

  According to such a gyro sensor, it is possible to suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring.

[Application Example 7]
In the gyro sensor according to this application example,
The shape of the vibrating body is a frame shape,
The fixed detection electrode may be provided inside the vibrating body.

  According to such a gyro sensor, it is possible to suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring.

[Application Example 8]
The electronic device according to this application example is
The gyro sensor according to this application example is included.

According to such an electronic device, it is possible to have a gyro sensor that can suppress a current from flowing through the detection wiring via the parasitic capacitance generated between the first drive wiring and the second drive wiring and the detection wiring. .
The gyro sensor according to this application example is
A vibrating body, a first fixed driving electrode provided on a first direction side that intersects a driving vibration direction of the vibrating body, and provided on a side opposite to the first direction side, and the vibration A second fixed drive electrode for vibrating the body, a fixed detection electrode for detecting a signal that changes in accordance with an angular velocity of the vibrating body, and the first fixed drive electrode, and extending to one side of the drive vibration direction A first drive wiring that is connected to the second fixed drive electrode and extends to the one side in the drive vibration direction, and is connected to the fixed detection electrode; A detection wiring extending to the opposite side, a first movable drive electrode extending from the vibrating body to the first direction side and facing the first fixed drive electrode, and the first direction from the vibrating body Extending to the opposite side of the side, facing the second fixed drive electrode A second movable drive electrode, wherein the first fixed drive electrode is provided on the one side of the first movable drive electrode and on the opposite side of the one side of the first movable drive electrode, The second fixed drive electrode is provided on the one side of the second movable drive electrode and on the side opposite to the one side of the second movable drive electrode, and the two first drive wires are provided, One of the first drive lines is connected to the first fixed drive electrode provided on the one side of the first movable drive electrode, and the other first drive line is connected to the first movable drive electrode. Connected to the first fixed drive electrode provided on the side opposite to the one side, the two first drive wirings include a first extension portion provided on the first direction side of the vibrating body, The second extending to the opposite side to the first direction side on the one side of the vibrating body Two second drive wirings, and one of the second drive wirings and the second fixed drive electrode provided on the one side of the second movable drive electrode. The other second drive wiring connected is connected to the second fixed drive electrode provided on the side opposite to the one side of the second movable drive electrode, and the vibrator, the first movable drive electrode The second movable drive electrode, the first fixed drive electrode, the second fixed drive electrode, and the fixed detection electrode constitute a first structure and a second structure that are connected to each other along the drive vibration direction. And one of the two first drive lines and one of the two second drive lines are connected, and the other of the two first drive lines and the other of the two second drive lines are connected, The first extending portion of one of the first drive wirings includes a first portion and a second portion. The first extension portion of the other first drive wiring has a third portion and a fourth portion, and is a plan view including the drive vibration direction and the first direction. The first portion is located between the vibrating body of the first structure and the third portion, and in the plan view, the fourth portion is the vibrating body of the second structure. And the second portion.
In the gyro sensor according to this application example,
A fixed portion supporting the vibrating body, and a fixed potential wiring connected to the fixed portion, and the material of the fixed potential wiring and the vibrating body is silicon provided with conductivity,
The fixed potential wiring is provided on the side opposite to the first direction side of the vibrating body in the plan view and extends along the driving vibration direction, and the length of the driving vibration direction is A first portion that is longer than a vibrating body; a second portion that extends from one end of the first portion of the fixed potential wiring in the driving vibration direction toward the first direction; and the first portion of the fixed potential wiring. A third portion extending toward the first direction from the other end of the driving vibration direction of the portion, and the second portion of the fixed potential wiring and the third portion of the fixed potential wiring The vibrating body may be positioned between them.
In the gyro sensor according to this application example,
The first drive wiring and the detection wiring do not cross each other, and the second drive wiring and the detection wiring do not need to cross each other.
In the gyro sensor according to this application example,
A displacement portion connected to the vibrating body via a spring portion; and a movable detection electrode extending from the displacement portion, wherein the fixed detection electrode is provided to face the movable detection electrode. May be.
In the gyro sensor according to this application example,
The shape of the vibrating body may be a frame shape, and the fixed detection electrode may be provided inside the vibrating body.
The electronic device according to this application example is
The gyro sensor according to this application example is included.
The gyro sensor according to this application example is
A vibrating body, a first fixed driving electrode provided on a first direction side that intersects a driving vibration direction of the vibrating body, and provided on a side opposite to the first direction side, and the vibration A second fixed drive electrode for vibrating the body, a fixed detection electrode for detecting a signal that changes in accordance with an angular velocity of the vibrating body, and the first fixed drive electrode, and extending to one side of the drive vibration direction A first drive wiring that is connected to the second fixed drive electrode and extends to the one side in the drive vibration direction, and is connected to the fixed detection electrode; A detection wiring extending to the opposite side, a first movable drive electrode extending from the vibrating body to the first direction side and facing the first fixed drive electrode, and the first direction from the vibrating body Extending to the opposite side of the side, facing the second fixed drive electrode A second movable drive electrode, wherein the first fixed drive electrode is provided on the one side of the first movable drive electrode and on the opposite side of the one side of the first movable drive electrode, The second fixed drive electrode is provided on the one side of the second movable drive electrode and on the opposite side of the one side of the second movable drive electrode, and the vibrator, the first movable drive electrode, A second movable drive electrode, the first fixed drive electrode, the second fixed drive electrode, and the fixed detection electrode constitute a first structure and a second structure connected to each other along the drive vibration direction; Two first drive wirings are provided, and one of the first drive wirings includes the first fixed drive electrode provided on the one side of the first movable drive electrode of the first structure, and The one side of the first movable drive electrode of the second structure; The first fixed drive electrode provided on the opposite side is connected to the first fixed drive electrode, and the other first drive wiring is provided on the opposite side to the one side of the first movable drive electrode of the first structure. The first fixed drive electrode and the first fixed drive electrode provided on the one side of the first movable drive electrode of the second structure are connected to each other, and the two first drive wires are connected to the vibrating body. A first extending portion provided on the first direction side, and a second extending portion extending on the one side of the vibrating body on the opposite side to the first direction side, Two of the second drive wirings are provided, one of the second drive wirings is the second fixed drive electrode provided on the one side of the second movable drive electrode of the first structure, and The second fixed driving power provided on the side opposite to the one side of the second movable driving electrode of the second structure. The second fixed drive electrode provided on the opposite side of the first movable body to the one side of the second movable drive electrode, and the second structure. Connected to the second fixed drive electrode provided on the one side of the second movable drive electrode of the body, and connected to one of the two first drive wires and one of the two second drive wires, The other of the two first drive wirings and the other of the two second drive wirings are connected, and the first extension of one of the first drive wirings includes a first part, a second part, The first extension portion of the other first drive wiring has a third portion and a fourth portion, and in plan view including the drive vibration direction and the first direction, The first portion is located between the vibrating body of the first structure and the third portion, and in the plan view, 4 parts, and the vibrator of the second structure, the second part
Located between the minutes.

The top view which shows typically the gyro sensor which concerns on this embodiment. FIG. 3 is a cross-sectional view schematically showing the gyro sensor according to the embodiment. FIG. 3 is a cross-sectional view schematically showing the gyro sensor according to the embodiment. The top view which shows typically the functional element of the gyro sensor which concerns on this embodiment. The figure for demonstrating operation | movement of the gyro sensor which concerns on this embodiment. The figure for demonstrating operation | movement of the gyro sensor which concerns on this embodiment. The figure for demonstrating operation | movement of the gyro sensor which concerns on this embodiment. The figure for demonstrating operation | movement of the gyro sensor which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the gyro sensor which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the gyro sensor which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the gyro sensor which concerns on this embodiment. The perspective view which shows typically the electronic device which concerns on this embodiment. The perspective view which shows typically the electronic device which concerns on this embodiment. The perspective view which shows typically the electronic device which concerns on this embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. First, a gyro sensor according to this embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing a gyro sensor 100 according to the present embodiment. FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1 schematically showing the gyro sensor 100 according to the present embodiment. 3 is a cross-sectional view taken along the line III-III in FIG. 1 schematically showing the gyro sensor 100 according to the present embodiment. 1 to 3 illustrate the X axis, the Y axis, and the Z axis as three axes orthogonal to each other.

  As shown in FIGS. 1 to 3, the gyro sensor 100 includes a substrate 10, a functional element 102, first drive wires 20 and 21, second drive wires 22 and 23, and detection wires 30 and 31. Can be included. The gyro sensor 100 can further include first connection wirings 24 and 25, second connection wirings 32 and 33, a fixed potential wiring 40, and a lid body 50. For convenience, the lid 50 is omitted in FIGS. 1 and 3.

  The material of the substrate 10 is, for example, glass or silicon. As shown in FIG. 2, the substrate 10 has a first surface 11 and a second surface 12 opposite to the first surface 11. In the illustrated example, the first surface 11 and the second surface 12 are surfaces parallel to the XY plane.

  A recess 14 is provided in the first surface 11 of the substrate 10. A vibrating body 112 of the functional element 102 is provided above the concave portion 14 via a gap. By the recess 14, the vibrating body 112 can be moved in a desired direction without being obstructed by the substrate 10. Although the planar shape of the recessed part 14 is not specifically limited, For example, it is a rectangle. As shown in FIGS. 2 and 3, grooves 16 and 18 may be further provided on the first surface 11 of the substrate 10. For the sake of convenience, the recess 14 and the grooves 16 and 18 are not shown in FIG.

  The functional element 102 is provided on the substrate 10 (on the first surface 11 of the substrate 10). Hereinafter, an example in which the functional element 102 is a gyro sensor element (capacitive MEMS gyro sensor element) that detects an angular velocity around the Z axis will be described. FIG. 4 is a plan view schematically showing the functional element 102. In FIG. 4, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other.

  As shown in FIGS. 2 and 4, the functional element 102 includes a first structure body 106 and a second structure body 108. The first structure 106 and the second structure 108 are connected to each other along the X axis. The first structure 106 is located on the −X direction side of the second structure 108. As shown in FIG. 4, the structures 106 and 108 have, for example, a shape that is symmetric with respect to a boundary line B (a straight line along the Y axis) between the structures. Although not illustrated, the functional element 102 may not include the second structure 108 but may be configured by the first structure 106.

  As shown in FIG. 4, the structures 106 and 108 include a vibrating body 112, a first spring portion 114, a movable drive electrode 116, a displacement portion 122, a second spring portion 124, a movable detection electrode 126, The first fixed drive electrodes 130 and 132, the second fixed drive electrodes 134 and 136, the fixed detection electrodes 140 and 142, and the fixed part 150 may be included.

  The vibrating body 112, the spring portions 114 and 124, the movable drive electrode 116, the displacement portion 122, the movable detection electrode 126, and the fixed portion 150 are formed by processing a silicon substrate (not shown) bonded to the substrate 10, for example. , Are integrally formed. As a result, it is possible to apply a fine processing technique used for manufacturing a silicon semiconductor device, and the functional element 102 can be downsized. The material of the functional element 102 is, for example, silicon imparted with conductivity by doping impurities such as phosphorus and boron.

  The vibrating body 112 has, for example, a frame shape (frame shape). Inside the vibrating body 112, a displacement portion 122, a movable detection electrode 126, and fixed detection electrodes 140 and 142 are provided.

  The first spring portion 114 has one end connected to the vibrating body 112 and the other end connected to the fixed portion 150. The fixing unit 150 is fixed on the substrate 10 (on the first surface 11 of the substrate 10). That is, the concave portion 14 is not provided below the fixed portion 150. The vibrating body 112 is supported by the fixed portion 150 via the first spring portion 114. In the illustrated example, four first spring portions 114 are provided in each of the first structure body 106 and the second structure body 108. Note that the fixing part 150 on the boundary line B between the first structure 106 and the second structure 108 may not be provided.

The first spring portion 114 is configured to be able to displace the vibrating body 112 in the X-axis direction. That is, the driving vibration direction of the vibrating body 112 is the X-axis direction. More specifically, the first spring portion 114 has a shape extending in the X axis direction (along the X axis) while reciprocating in the Y axis direction (along the Y axis). Note that the number of the first spring portions 114 is not particularly limited as long as the vibrating body 112 can vibrate along the X axis.

  The movable drive electrode 116 is connected to the vibrating body 112. The movable drive electrode 116 extends from the vibrating body 112 in the + Y direction and the −Y direction. In the example shown in FIG. 4, a plurality of movable drive electrodes 116 are provided, and the plurality of movable drive electrodes 116 are arranged in the X-axis direction. The movable drive electrode 116 can vibrate along the X axis with the vibration of the vibrating body 112.

  The first fixed drive electrodes 130 and 132 are fixed on the substrate 10 (on the first surface 11 of the substrate 10). The first fixed drive electrodes 130 and 132 are provided on the + Y direction side (the first direction side intersecting the drive vibration direction of the vibration body 112) of the vibration body 112 in plan view.

  The first fixed drive electrodes 130 and 132 are opposed to the movable drive electrode (first movable drive electrode) 116 extending from the vibrating body 112 in the + Y direction, and are provided with the first movable drive electrode 116 interposed therebetween. More specifically, in the first fixed drive electrodes 130 and 132 sandwiching the first movable drive electrode 116, the first fixed drive electrode 130 is located on the −X direction side of the first movable drive electrode 116 in the first structure 106. The first fixed drive electrode 132 is provided on the + X direction side of the first movable drive electrode 116. In the second structure 108, the first fixed drive electrode 130 is provided on the + X direction side of the first movable drive electrode 116, and the first fixed drive electrode 132 is provided on the −X direction side of the first movable drive electrode 116. Yes. As shown in FIG. 1, the first fixed drive electrode 130 is connected to the first drive wiring 20, and the first fixed drive electrode 132 is connected to the first drive wiring 21.

  A plurality of first fixed drive electrodes 130 and 132 are provided in accordance with the number of first movable drive electrodes 116, and are arranged in the X-axis direction. In the example shown in FIG. 4, the first fixed drive electrodes 130 and 132 have a comb-like shape, and the first movable drive electrode 116 is between the comb teeth of the first fixed drive electrodes 130 and 132. It has an insertable shape.

  The second fixed drive electrodes 134 and 136 are fixed on the substrate 10 (on the first surface 11 of the substrate 10). The second fixed drive electrodes 134 and 136 are provided on the −Y direction side (the opposite side to the first direction side) of the vibrating body 112 in plan view.

  The second fixed drive electrodes 134 and 136 are opposed to the movable drive electrode (second movable drive electrode) 116 extending from the vibrating body 112 in the −Y direction, and are provided with the second movable drive electrode 116 interposed therebetween. . More specifically, in the second fixed drive electrodes 134 and 136 sandwiching the second movable drive electrode 116, in the first structure 106, the second fixed drive electrode 134 is located on the −X direction side of the second movable drive electrode 116. The second fixed drive electrode 136 is provided on the + X direction side of the second movable drive electrode 116. In the second structure 108, the second fixed drive electrode 134 is provided on the + X direction side of the second movable drive electrode 116, and the second fixed drive electrode 136 is provided on the −X direction side of the second movable drive electrode 116. Yes. As shown in FIG. 1, the second fixed drive electrode 134 is connected to the second drive wiring 22, and the second fixed drive electrode 136 is connected to the second drive wiring 23.

  A plurality of second fixed drive electrodes 134 and 136 are provided according to the number of second movable drive electrodes 116, and are arranged in the X-axis direction. In the example shown in FIG. 4, the second fixed drive electrodes 134 and 136 have a comb-like shape, and the second movable drive electrode 116 is between the comb teeth of the second fixed drive electrodes 134 and 136. It has an insertable shape.

  The fixed drive electrodes 130, 132, 134, 136 and the movable drive electrode 116 are electrodes for vibrating the vibrating body 112.

  The displacement part 122 is connected to the vibrating body 112 via the second spring part 124. In the illustrated example, the planar shape of the displacement portion 122 is a rectangle having a long side along the Y axis. Although not shown, the displacement part 122 may be provided outside the vibrating body 112.

  The second spring portion 124 is configured to be able to displace the displacement portion 122 in the Y-axis direction. More specifically, the second spring portion 124 has a shape that extends in the Y-axis direction while reciprocating in the X-axis direction. The number of the second spring portions 124 is not particularly limited as long as the displacement portions 122 can be displaced along the Y axis.

  The movable detection electrode 126 is connected to the displacement part 122. For example, a plurality of movable detection electrodes 126 are provided. The movable detection electrode 126 extends from the displacement portion 122 in the + X direction and the −X direction.

  The fixed detection electrodes 140 and 142 are fixed on the substrate 10 (on the first surface 11 of the substrate 10). More specifically, the fixed detection electrodes 140 and 142 have one end fixed on the substrate 10 and the other end extending to the displacement part 122 side as a free end.

  The fixed detection electrodes 140 and 142 face the movable detection electrode 126 and are provided with the movable detection electrode 126 interposed therebetween. More specifically, in the fixed detection electrodes 140 and 142 sandwiching the movable detection electrode 118, in the first structure 106, the fixed detection electrode 140 is provided on the −Y direction side of the movable detection electrode 126. A fixed detection electrode 142 is provided on the + Y direction side. In the second structure 108, the fixed detection electrode 140 is provided on the + Y direction side of the movable detection electrode 126, and the fixed detection electrode 142 is provided on the −Y direction side of the movable detection electrode 126. As shown in FIG. 1, the fixed detection electrode 140 is connected to the detection wiring 30, and the fixed detection electrode 142 is connected to the detection wiring 31.

  In the example shown in FIG. 4, a plurality of fixed detection electrodes 140 and 142 are provided and are alternately arranged along the Y axis. The fixed detection electrodes 140 and 142 and the movable detection electrode 126 are electrodes for detecting a signal (capacitance) that changes according to the angular velocity of the vibrating body 112.

  The first drive wires 20 and 21 are provided on the substrate 10 as shown in FIGS. As shown in FIG. 1, the first drive wiring 20 is connected to the first fixed drive electrode 130 in plan view. The first drive wiring 20 is a wiring for applying an AC voltage to the first fixed drive electrode 130. The first drive wiring 20 is provided on the + Y direction side (of the functional element 102) of the vibrating body 112 and on the −X direction side of the vibrating body 112 (of the functional element 102). 2nd extension part 20b.

  The first extending portion 20a extends to the −X direction side (one side in the driving vibration direction of the vibrating body 112). More specifically, the first extension portion 20a is located on the most −X direction side of the first structure 106 from the first fixed drive electrode 130 located on the most + X direction side of the second structure 108. The first fixed drive electrode 130 extends to the first fixed drive electrode 130 located on the most −X direction side of the first structural body 106 to the second extended portion 20b in the −X direction. It extends to.

  The second extending portion 20 b extends toward the −Y direction side on the −X direction side of the vibrating body 112. More specifically, the second extension portion 20b extends in the −Y direction from the first extension portion 20a to the second drive wiring 22.

As shown in FIG. 1, the first drive wiring 21 is connected to the first fixed drive electrode 132 in a plan view. The first drive wiring 21 is a wiring for applying an AC voltage to the first fixed drive electrode 132. The first drive wiring 21 is provided on the first extending portion 21 a provided on the + Y direction side (of the functional element 102) of the vibrating body 112 and on the −X direction side of the vibrating body 112 (of the functional element 102). 2nd extension part 21b.

  The first extension portion 21a extends to the −X direction side. More specifically, the first extension portion 21a is located on the most −X direction side of the first structure 106 from the first fixed drive electrode 132 located on the most + X direction side of the second structure 108. The first fixed drive electrode 132 extending from the first fixed drive electrode 132 located on the most −X direction side of the first structure 106 of the first structure 106. It extends in the -X direction up to 21b.

  The second extending portion 21 b extends toward the −Y direction side on the −X direction side of the vibrating body 112. More specifically, the second extension portion 21 b extends in the −Y direction from the first extension portion 21 a to the second drive wiring 23.

  As shown in FIG. 3, the first drive wiring 20 can have a first portion 20 c provided in the groove 16 and a second portion 20 d provided in the first surface 11. The second portion 20d straddles the groove 18 where the drive wiring 21 is provided. The material of the first portion 20c is, for example, metal, and the material of the second portion 20d is, for example, silicon provided with conductivity. The first portion 20c and the second portion 20d are connected to each other. With such a configuration, it is possible to prevent the drive wiring 20 and the drive wiring 21 from contacting each other at a portion where the drive wirings 20 and 21 intersect in plan view. Furthermore, since the drive wiring 20 has the first portion 20c, it is possible to prevent the drive wiring 20 and the fixed potential wiring 40 from coming into contact with each other.

  Similarly, the drive wiring 21 may have a first portion 21 c provided in the groove 18 and a second portion (not shown) provided on the first surface 11. Thereby, it is possible to prevent the drive wiring 21 and the fixed potential wiring 40 from contacting each other.

  The second drive wirings 22 and 23 are provided on the substrate 10 as shown in FIGS. As shown in FIG. 1, the second drive wiring 22 is connected to the second fixed drive electrode 134 in a plan view. The second drive wiring 22 is a wiring for applying an AC voltage to the second fixed drive electrode 134. The second drive wiring 22 is provided on the −Y direction side (of the functional element 102) of the vibrating body 112.

  The second drive wiring 22 extends to the −X direction side. More specifically, the second drive wiring 22 is positioned closest to the −X direction of the first structure 106 from the second fixed drive electrode 134 positioned closest to the + X direction of the second structure 108. The second fixed drive electrode 134 extends to the second fixed drive electrode 134, and further from the second fixed drive electrode 134 located on the most −X direction side of the first structure 106, the second extended portion 20b of the first drive wiring 20 Until extending in the -X direction. That is, the first drive wiring 20 and the second drive wiring 22 are connected.

  As shown in FIG. 1, the second drive wiring 23 is connected to the second fixed drive electrode 136 in a plan view. The second drive wiring 23 is a wiring for applying an AC voltage to the second fixed drive electrode 136. The second drive wiring 23 is provided on the −Y direction side (of the functional element 102) of the vibrating body 112.

The second drive wiring 23 extends to the −X direction side. More specifically, the second drive wiring 23 is located on the most −X direction side of the first structure 106 from the second fixed drive electrode 136 located on the most + X direction side of the second structure 108. Extending to the second fixed drive electrode 136, and further from the second fixed drive electrode 136 located closest to the −X direction side to the second extending portion 21b of the first drive wiring 21 in the −X direction. It is extended. That is, the first drive wiring 21 and the second drive wiring 23 are connected.

  The second drive wirings 22 and 23, like the first drive wirings 20 and 21, have a first portion provided in a groove (not shown) formed in the first surface 11 of the substrate 10, and the first surface. 11 may be provided. Thereby, it is possible to prevent the drive wiring 22 and the drive wiring 23 from coming into contact with each other at a portion where the drive wirings 22 and 23 intersect in plan view.

  As shown in FIG. 1, the drive wirings 20 and 22 connect the first fixed drive electrode 130 and the second fixed drive electrode 134 so as to surround the −X direction side of the vibrating body 112 in a plan view. The drive wirings 21 and 23 connect the first fixed drive electrode 132 and the second fixed drive electrode 136 so as to surround the −X direction side of the vibrating body 112. The drive wirings 20, 21, 22, and 23 are not provided on the + X direction side (of the functional element 102) of the vibrating body 112.

  The first connection wires 24 and 25 are provided on the substrate 10. The first connection wiring 24 is connected to a crossing portion (connection portion) of the drive wirings 20 and 22, and in the example shown in FIG. 1, extends from the crossing portion in the −Y direction. The first connection wiring 25 is connected to a crossing portion (connection portion) of the drive wirings 21 and 23, and in the example shown in FIG. 1, extends from the crossing portion in the −Y direction. The first connection wirings 24 and 25 may be connected to pads (not shown) provided on the substrate 10, respectively. The first connection wires 24 and 25 may be provided in grooves (not shown) formed in the first surface 11 of the substrate 10 like the drive wires 20 and 21.

  The detection wiring 30 is provided on the substrate 10. The detection wiring 30 is connected to the fixed detection electrode 140 and extends from the fixed detection electrode 140 to the + X direction side of the vibrating body 112 (on the side opposite to one side of the driving vibration direction of the vibrating body 112). More specifically, the detection wiring 30 extends from the fixed detection electrode 140 of the first structure 106 to the + X direction side of the vibrating body 112 of the first structure 106, and further the fixed detection of the second structure 108. It is connected to the electrode 140 and extends to the + X direction side of the vibrating body 112 of the second structure 108.

  The detection wiring 31 is provided on the substrate 10. The detection wiring 31 is connected to the fixed detection electrode 142 and extends from the fixed detection electrode 142 to the + X direction side of the vibrating body 112. More specifically, the detection wiring 31 extends from the fixed detection electrode 142 of the first structure 106 to the + X direction side of the vibrating body 112 of the first structure 106, and further the fixed detection of the second structure 108. It is connected to the electrode 142 and extends to the + X direction side of the vibrating body 112 of the second structure 108.

  As shown in FIG. 2, the detection wirings 30 and 31 may have a portion provided in the recess 14. Thereby, it can prevent that the detection wiring 30 and 31 and the vibrating body 112 contact. Further, the detection wirings 30 and 31 may be provided in grooves (not shown) formed in the first surface 11 of the substrate 10 like the driving wirings 20 and 21.

  The detection wiring 30 does not intersect with the driving wirings 20, 21, 22, and 23 in plan view. Similarly, the detection wiring 31 does not intersect with the driving wirings 20, 21, 22, and 23 in plan view. The detection wirings 30 and 31 are wirings for detecting a change in electrostatic capacitance between the movable detection electrode 126 and the fixed detection electrodes 140 and 142.

The second connection wirings 32 and 33 are provided on the substrate 10. The second connection wiring 32 is connected to the detection wiring 30 and extends in the −Y direction from the detection wiring 30 in the example illustrated in FIG. 1. The second connection wiring 33 is connected to the detection wiring 31 and extends from the detection wiring 31 in the −Y direction in the example illustrated in FIG. 1. The second connection wirings 32 and 33 may be connected to pads (not shown) provided on the substrate 10, respectively. The second connection wires 32 and 33 are the drive wires 2.
Like 0 and 21, it may be provided in a groove (not shown) formed in the first surface 11 of the substrate 10.

  The second connection wiring 32 is provided so as not to intersect the first connection wirings 24 and 25 in plan view. Similarly, the second connection wiring 33 is provided so as not to intersect the first connection wirings 24 and 25 in plan view.

  For example, ITO (Indium Tin Oxide), aluminum, gold, platinum, titanium, tungsten, chromium, and conductivity are given as materials for the wirings 20, 21, 22, 23, 24, 25, 30, 31, 32, and 33. Silicon. The materials of the wirings 20, 21, 22, 23, 24, 25, 30, 31, 32, and 33 include, for example, a portion made of the metal described above and a portion made of silicon to which conductivity is imparted. You may do it.

  The fixed potential wiring 40 is provided on the substrate 10. The fixed potential wiring 40 is connected to the fixed portion 150 of the functional element 102. In the example shown in FIG. 2, the material of the fixed potential wiring 40 is silicon provided with conductivity, and is formed integrally with the fixing portion 150. The fixed potential wiring 40 may extend from the fixed portion 150 to a pad (not shown). The fixed potential wiring 40 is electrically connected to the vibrating body 112, the movable drive electrode 116, the displacement portion 122, and the movable detection electrode 126 via the fixed portion 150. The fixed potential wiring 40 may have the same potential as that of the vibrating body 112 or the like. The material of the fixed potential wiring 40 is not limited to silicon provided with conductivity, and may be, for example, ITO, aluminum, gold, platinum, titanium, tungsten, or chromium.

  The lid 50 is provided on the substrate 10 as shown in FIG. The substrate 10 and the lid 50 can constitute a package. The substrate 10 and the lid 50 can form a cavity 52, and the functional element 102 can be accommodated in the cavity 52. The cavity 52 is sealed with a vacuum, for example. The material of the lid 50 is, for example, silicon or glass.

  Next, the operation of the gyro sensor 100 will be described. 5-8 is a figure for demonstrating operation | movement of the gyro sensor 100. FIG. 5 to 8, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other. For convenience, the members other than the functional element 102 are not shown in FIGS. 5 to 8, and the movable drive electrode 116, the movable detection electrode 126, the fixed drive electrodes 130, 132, 134, 136, and the fixed detection electrode are omitted. Illustrations of 140 and 142 are omitted, and the functional element 102 is shown in a simplified manner.

  Movable drive extending between the movable drive electrode (first movable drive electrode) 116 and the first fixed drive electrodes 130 and 132 extending in the + Y direction from the vibrating body 112 and from the vibrating body 112 in the −Y direction. When a voltage is applied between the electrode (second movable drive electrode) 116 and the second fixed drive electrodes 134 and 136 by a power source (not shown), the movable drive electrode 116 and the fixed drive electrodes 130 and 132, and the first An electrostatic force can be generated between the two movable drive electrodes 116 and the second fixed drive electrodes 134 and 136 (see FIGS. 1 and 4). Accordingly, as shown in FIGS. 5 and 6, the first spring portion 114 can be expanded and contracted along the X axis, and the vibrating body 112 can be vibrated along the X axis.

  More specifically, a constant potential Vr is applied to the movable drive electrode 116 via the fixed potential wiring 40. Further, a first AC voltage is applied to the fixed drive electrodes 130 and 134 via the first connection wiring 24 and the drive wirings 20 and 22 with reference to Vr. In addition, a second AC voltage whose phase is shifted by 180 degrees with respect to the potential Vr is applied to the fixed drive electrodes 132 and 136 via the first connection wiring 25 and the drive wirings 21 and 23.

  Here, in the first fixed drive electrodes 130 and 132 sandwiching the first movable drive electrode 116, the first fixed drive electrode 130 is provided on the −X direction side of the first movable drive electrode 116 in the first structure 106. A first fixed drive electrode 132 is provided on the + X direction side of the first movable drive electrode 116 (see FIGS. 1 and 4). In the second structure 108, the first fixed drive electrode 130 is provided on the + X direction side of the first movable drive electrode 116, and the first fixed drive electrode 132 is provided on the −X direction side of the first movable drive electrode 116. (See FIGS. 1 and 4). Further, in the second fixed drive electrodes 134 and 136 sandwiching the second movable drive electrode 116, the first structure 106 is provided with the second fixed drive electrode 134 on the −X direction side of the second movable drive electrode 116. 2 A first fixed drive electrode 136 is provided on the + X direction side of the movable drive electrode 116 (see FIGS. 1 and 4). In the second structure 108, the second fixed drive electrode 134 is provided on the + X direction side of the second movable drive electrode 116, and the second fixed drive electrode 136 is provided on the −X direction side of the second movable drive electrode 116. (See FIGS. 1 and 4). Therefore, the first AC voltage and the second AC voltage cause the vibrating body 112a of the first structure body 106 and the vibrating body 112b of the second structure body 108 to have opposite phases and a predetermined frequency along the X axis. Can be vibrated. In the example shown in FIG. 5, the vibrating body 112a is displaced in the α1 direction, and the vibrating body 112b is displaced in the α2 direction opposite to the α1 direction. In the example shown in FIG. 6, the vibrating body 112a is displaced in the α2 direction, and the vibrating body 112b is displaced in the α1 direction.

  The displacement part 122 is displaced along the X axis with the vibration of the vibrating body 112. Similarly, the movable detection electrode 126 (see FIGS. 1 and 4) is displaced along the X axis with the vibration of the vibrating body 112.

  As shown in FIGS. 7 and 8, when an angular velocity ω around the Z-axis is applied to the functional element 102 in a state where the vibrating bodies 112a and 112b vibrate along the X-axis, Coriolis force acts and the displacement The part 122 is displaced along the Y axis. In other words, the displacement portion 122a connected to the vibrating body 112a and the displacement portion 122b connected to the vibrating body 112b are displaced in opposite directions along the Y axis. In the example shown in FIG. 7, the displacement part 122a is displaced in the β1 direction, and the displacement part 122b is displaced in the β2 direction opposite to the β1 direction. In the example shown in FIG. 8, the displacement part 122a is displaced in the β2 direction, and the second displacement part 122b is displaced in the β1 direction.

  As the displacement portions 122a and 122b are displaced along the Y axis, the distance between the movable detection electrode 126 and the fixed drive electrode 140 changes (see FIGS. 1 and 4). Similarly, the distance between the movable detection electrode 126 and the fixed drive electrode 142 changes (see FIGS. 1 and 4). Therefore, the electrostatic capacitance between the movable detection electrode 126 and the fixed drive electrode 140 changes. Similarly, the capacitance between the movable detection electrode 126 and the fixed drive electrode 142 changes.

  In the gyro sensor 100, by applying a voltage between the movable detection electrode 126 and the fixed detection electrode 140 via the detection wiring 30 and the fixed potential wiring 40, the gap between the movable detection electrode 126 and the fixed detection electrode 140 is applied. The amount of change in capacitance can be detected (see FIG. 1). Further, by applying a voltage between the movable detection electrode 126 and the fixed detection electrode 142 via the detection wiring 31 and the fixed potential wiring 40, the electrostatic capacitance between the movable detection electrode 126 and the fixed detection electrode 142. Can be detected (see FIG. 1). In this way, the gyro sensor 100 can obtain the angular velocity ω around the Z axis based on the amount of change in capacitance between the movable detection electrode 126 and the fixed detection electrodes 140 and 142.

  The gyro sensor 100 according to the present embodiment has, for example, the following characteristics.

According to the gyro sensor 100, the first drive wires 20 and 21 are connected to the first fixed drive electrodes 130 and 132 and extend to the −X direction side, and the second drive wires 22 and 23 are the second fixed drive electrodes. The detection wirings 30 and 31 are connected to the fixed detection electrodes 140 and 142 and extend to the + X direction side. Therefore, according to the gyro sensor 100, the detection wiring 30 does not intersect with the driving wirings 20, 21, 22, and 23, and the detection wiring 31 does not intersect with the driving wirings 20, 21, 22, and 23. Thereby, it is possible to suppress a current from flowing through the detection wiring 30 through the parasitic capacitance generated between the drive wirings 20, 21, 22 and 23 and the detection wiring 30. Similarly, it is possible to suppress a current from flowing through the detection wiring 31 through the parasitic capacitance generated between the drive wirings 20, 21, 22, and 23 and the detection wiring 31. As a result, the gyro sensor 100 can have high detection accuracy, for example.

  According to the gyro sensor 100, the first drive wires 20 and 21 extend in the −Y direction from the first extending portions 20 a and 21 a to the second drive wires 22 and 23 in the −X direction of the vibrating body 112. The detection wirings 30 and 31 extend from the fixed detection electrodes 140 and 142 to the + X direction side of the vibrating body 112. Therefore, it is possible to more reliably suppress the current from flowing through the detection wirings 30 and 31 via the parasitic capacitance generated between the drive wirings 20, 21, 22 and 23 and the detection wirings 30 and 31.

  According to the gyro sensor 100, the first drive wirings 20, 21 and the second drive wirings 22, 23 are connected. As a result, wiring can be shared and the number of wirings can be reduced.

2. Next, a method for manufacturing a gyro sensor according to this embodiment will be described with reference to the drawings. 9 to 11 are cross-sectional views schematically showing the manufacturing process of the physical quantity sensor 100 according to this embodiment, and correspond to FIG.

  As shown in FIG. 9, the recess 14 and the grooves 16 and 18 are formed in the first surface 11 of the substrate 10. The concave portion 14 and the groove portions 16 and 18 are formed by, for example, a photolithography technique and an etching technique. Thereby, the board | substrate 10 with which the recessed part 14 and the groove parts 16 and 18 are provided in the 1st surface 11 can be prepared.

  As shown in FIG. 10, the detection wirings 30 and 31 are formed on the substrate 10 including the inside of the recess 14, and the first portions 20a and 21a of the first drive wirings 20 and 21 are formed in the grooves 16 and 18, respectively. Further, a first portion (not shown) provided in the groove portion of the second drive wirings 22 and 23 is formed. At the same time, the connection wires 24, 25, 32, 33 can be formed on the substrate 10. The first portions 20a and 21a of the first drive wires 20 and 21, the first portions of the second drive wires 22 and 23, and the wires 24, 25, 30, 31, 32, and 33 are formed by, for example, sputtering or CVD (Chemical). A film is formed by a vapor deposition method or the like and then patterned by a photolithography technique and an etching technique.

  As shown in FIG. 11, the functional element 102 is formed on the substrate 10. More specifically, the functional element 102 is formed by placing (bonding) a silicon substrate (not shown) on the first surface 11 of the substrate 10, reducing the thickness of the silicon substrate, and then patterning. . The patterning is performed by a photolithography technique and an etching technique. The bonding between the silicon substrate and the substrate 10 is performed by, for example, anodic bonding.

  In the step of forming the functional element 102, a portion (second portion) provided on the first surface 11 of the drive wirings 20, 21, 22, 23 is formed to form the drive wirings 20, 21, 22, 23, Further, the fixed potential wiring 40 can be formed.

  As illustrated in FIG. 2, the functional element 102 is accommodated in a cavity 52 surrounded by the substrate 10 and the lid 50 by joining the substrate 10 and the lid 50. The bonding between the substrate 10 and the lid 50 is performed by, for example, anodic bonding.

  Through the above steps, the gyro sensor 100 can be manufactured.

  According to the manufacturing method of the gyro sensor 100, as described above, a current flows through the detection wirings 30 and 31 through the parasitic capacitance generated between the drive wirings 20, 21, 22, and 23 and the detection wirings 30 and 31. It is possible to form the gyro sensor 100 that can suppress this.

3. Next, an electronic device according to the present embodiment will be described with reference to the drawings. The electronic device according to the present embodiment includes the gyro sensor according to the present invention. Hereinafter, an electronic device including the gyro sensor 100 will be described as the gyro sensor according to the present invention.

  FIG. 12 is a perspective view schematically showing a mobile (or notebook) personal computer 1100 as the electronic apparatus according to the present embodiment.

  As shown in FIG. 12, the personal computer 1100 includes a main body portion 1104 having a keyboard 1102 and a display unit 1106 having a display portion 1108. The display unit 1106 has a hinge structure portion with respect to the main body portion 1104. It is supported so that rotation is possible.

  Such a personal computer 1100 has a built-in gyro sensor 100.

  FIG. 13 is a perspective view schematically showing a mobile phone (including PHS) 1200 as the electronic apparatus according to the present embodiment.

  As shown in FIG. 13, the cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. .

  Such a cellular phone 1200 incorporates the gyro sensor 100.

  FIG. 14 is a perspective view schematically showing a digital still camera 1300 as the electronic apparatus according to the present embodiment. Note that FIG. 14 also shows a simple connection with an external device.

  Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an image sensor such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to display based on an imaging signal from the CCD. The display unit 1310 displays an object as an electronic image. Functions as a viewfinder.

An optical lens (imaging optical system) or CC is provided on the front side (back side in the figure) of the case 1302.
A light receiving unit 1304 including D and the like is provided.

  When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. A television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication, if necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  Such a digital still camera 1300 incorporates the gyro sensor 100.

  The electronic devices 1100, 1200, and 1300 as described above can include the gyro sensor 100 that can suppress a current from flowing through the detection wiring via a parasitic capacitance generated between the drive wiring and the detection wiring.

  The electronic device provided with the gyro sensor 100 includes, for example, an ink jet type discharge in addition to the personal computer (mobile personal computer) shown in FIG. 12, the mobile phone shown in FIG. 13, and the digital still camera shown in FIG. Devices (for example, inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, head mounted displays, various navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices , Word processor, workstation, video phone, security TV monitor, electronic binoculars, POS terminal, medical equipment (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish school Knowledge, various measuring instruments, gages (e.g., vehicles, aircraft, rockets, instruments and a ship), attitude control such as a robot or a human body, can be applied to a flight simulator.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the invention includes a configuration that achieves the same effect as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 10 ... Board | substrate, 11 ... 1st surface, 12 ... 2nd surface, 14 ... Recessed part, 16, 18 ... Groove part, 20 ... 1st drive wiring, 20a ... 1st extension part, 20b ... 2nd extension part, 20c ... 1st part, 20d ... 2nd part, 21 ... 1st drive wiring, 21a ... 1st extension part, 21b ... 2nd extension part, 21c ... 1st part, 22, 23 ... 2nd drive wiring, 24 , 25 ... first connection wiring, 30, 31 ... detection wiring, 32, 33 ... second connection wiring, 40 ... fixed potential wiring, 50 ... lid, 52 ... cavity, 100 ... gyro sensor, 102 ... functional element, DESCRIPTION OF SYMBOLS 106 ... 1st structure, 108 ... 2nd structure, 112 ... Vibrating body, 112a ... Vibrating body, 112b ... Vibrating body, 114 ... 1st spring part, 116 ... Movable drive electrode, 122 ... Displacement part, 122a ... Displacement Part, 122b ... displacement part, 124 ... second spring part, 126 ... movable detection electrode 130, 132: first fixed drive electrode, 134, 136: second fixed drive electrode, 140, 142: fixed detection electrode, 150: fixed part, 1100 ... personal computer, 1102 ... keyboard, 1104 ... main body part, 1106 ... display Unit: 1108: Display unit, 1200: Mobile phone, 1202 ... Operation button, 1204 ... Earpiece, 1206 ... Mouthpiece, 1208 ... Display unit, 1300 ... Digital still camera, 1302 ... Case, 1304 ... Unit, 1306 ... Shutter Button, 1308 ... Memory, 1310 ... Display, 1312 ... Video signal output terminal, 1314 ... Input / output terminal, 1430 ... TV monitor, 1440 ... Personal computer

Claims (6)

A vibrating body,
A first fixed drive electrode provided on a first direction side that intersects the drive vibration direction of the vibrator, and vibrates the vibrator;
A second fixed drive electrode provided on a side opposite to the first direction side and configured to vibrate the vibrating body;
A fixed detection electrode for detecting a signal that changes according to the angular velocity of the vibrating body;
A first drive wiring connected to the first fixed drive electrode and extending to one side of the drive vibration direction;
A second drive wiring connected to the second fixed drive electrode and extending to the one side in the drive vibration direction;
A detection wiring connected to the fixed detection electrode and extending to the opposite side of the one side;
A first movable drive electrode extending from the vibrating body toward the first direction and facing the first fixed drive electrode;
A second movable drive electrode extending from the vibrating body to a side opposite to the first direction side and facing the second fixed drive electrode;
Including
The first fixed drive electrode is provided on the one side of the first movable drive electrode and on the opposite side to the one side of the first movable drive electrode,
The second fixed drive electrode is provided on the one side of the second movable drive electrode and on the opposite side of the one side of the second movable drive electrode,
The vibrator, the first movable drive electrode, the second movable drive electrode, the first fixed drive electrode, the second fixed drive electrode, and the fixed detection electrode are connected to each other along the drive vibration direction. Constituting one structure and a second structure;
Two of the first drive wirings are provided,
One of the first driving wiring of the said first movable driving electrodes of the first structure whereas the provided side first stationary driving electrode, and the second the first movable driving electrode structures Connected to the first fixed drive electrode provided on the side opposite to the one side ;
The other of the first drive lines is the first fixed drive electrode provided on the opposite side of the first movable drive electrode of the first structure body and the first of the second structure body. Movable drive power
Connected to the first fixed drive electrode provided on the one side of the pole ;
The two first drive wires are
A first extending portion provided on the first direction side of the vibrating body;
A second extending portion extending on the one side of the vibrating body to the side opposite to the first direction side,
Two of the second drive wirings are provided,
One of the second drive wirings includes the second fixed drive electrode provided on the one side of the second movable drive electrode of the first structure, and the second movable drive electrode of the second structure. Connected to the second fixed drive electrode provided on the side opposite to the one side ;
The other second drive wiring includes the second fixed drive electrode provided on the side opposite to the one side of the second movable drive electrode of the first structure , and the second of the second structure. Connected to the second fixed drive electrode provided on the one side of the movable drive electrode ;
One of the two of the first driving wire and the one of the two second drive wiring is connected,
The other of the two first drive lines and the other of the two second drive lines are connected,
The first extension part of one of the first drive wirings has a first part and a second part,
The first extension portion of the other first drive wiring has a third portion and a fourth portion,
In a plan view including the drive vibration direction and the first direction, the first portion is located between the vibration body of the first structure and the third portion,
The gyro sensor, wherein the fourth portion is located between the vibrating body of the second structure and the second portion in the plan view. In claim 1,
A fixing part supporting the vibrating body;
A fixed potential wiring connected to the fixed portion;
Including
The material of the fixed potential wiring and the vibrating body is silicon provided with conductivity,
The fixed potential wiring is in the plan view,
A first portion provided on a side opposite to the first direction side of the vibrating body, extending along the driving vibration direction, and a length of the driving vibration direction being longer than that of the vibrating body;
A second portion extending from one end of the first portion of the fixed potential wiring in the driving vibration direction toward the first direction;
A third portion extending from the other end in the driving vibration direction of the first portion of the fixed potential wiring to the first direction side;
Have
A gyro sensor in which the vibrating body is located between the second portion of the fixed potential wiring and the third portion of the fixed potential wiring. In claim 1 or 2,
The first drive wiring and the detection wiring do not intersect,
The gyro sensor in which the second drive wiring and the detection wiring do not intersect. In any one of Claims 1 thru | or 3,
A displacement portion connected to the vibrating body via a spring portion;
A movable detection electrode extending from the displacement portion;
Including
The gyro sensor, wherein the fixed detection electrode is provided to face the movable detection electrode. In any one of Claims 1 thru | or 4,
The shape of the vibrating body is a frame shape,
The fixed detection electrode is a gyro sensor provided inside the vibrating body.   An electronic device comprising the gyro sensor according to claim 1.