JP2019065957A - Valve with built-in heater - Google Patents

Valve with built-in heater Download PDF

Info

Publication number
JP2019065957A
JP2019065957A JP2017191770A JP2017191770A JP2019065957A JP 2019065957 A JP2019065957 A JP 2019065957A JP 2017191770 A JP2017191770 A JP 2017191770A JP 2017191770 A JP2017191770 A JP 2017191770A JP 2019065957 A JP2019065957 A JP 2019065957A
Authority
JP
Japan
Prior art keywords
valve
heater
built
lid member
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2017191770A
Other languages
Japanese (ja)
Other versions
JP7054502B2 (en
Inventor
浩司 平松
Koji Hiramatsu
浩司 平松
曽我尾　昌彦
Masahiko Sogao
昌彦 曽我尾
薬師神　忠幸
Tadayuki Yakushijin
忠幸 薬師神
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to JP2017191770A priority Critical patent/JP7054502B2/en
Priority to TW107126286A priority patent/TWI761563B/en
Priority to CN201811139592.XA priority patent/CN109578598A/en
Publication of JP2019065957A publication Critical patent/JP2019065957A/en
Application granted granted Critical
Publication of JP7054502B2 publication Critical patent/JP7054502B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
  • Lift Valve (AREA)

Abstract

To provide a valve with a built-in heater capable of reducing liquefaction/evaporation of gas passing therethrough, compared to a conventional valve with a built-in heater.SOLUTION: A valve 1 with a built-in heater comprises: a valve body 10 having an inlet flow passage 11 and outlet flow passage 12 for gas, and a valve seat 13 formed between theses flow passages; a valve rod 20 having at its lower end part a valve body 21 contacting/separating with/from the valve seat 13; a lid member 31 airtightly fixed to an upper part of the valve body 10, and through which the valve rod 20 penetrates; and a bellows 39 welded and fixed to the valve rod 20 and the lid member 31. The lid member 31 has at least one heater insertion hole 34, and into the heater insertion hole 34, at least one rod-like heater 36 is inserted and arranged.SELECTED DRAWING: Figure 1

Description

この発明は、ヒータ内蔵バルブに関する。   The present invention relates to a heater built-in valve.

半導体製造工程で真空チャンバー内と真空ポンプとを接続する流路の途中に設けられるバルブには、ヒータを内蔵し、２００℃を超えるような高温条件で使用されるものもある。   Some valves provided in the middle of a flow path connecting the inside of a vacuum chamber and a vacuum pump in a semiconductor manufacturing process have a built-in heater and are used under high temperature conditions exceeding 200.degree.

特許文献１に記載のバルブは、高温用のベローズ弁であり、外部からの加熱を行うとともに、弁体にヒータを内蔵している。   The valve described in Patent Document 1 is a high temperature bellows valve, which performs heating from the outside and incorporates a heater in a valve body.

特許第４９２３１０５号公報Patent No. 4923105 gazette

バルブを高温条件下で使用する場合、バルブを流れるガスによっては温度の不均一により、バルブ内部にガスの液化・蒸着が生じる。ヒータ内蔵バルブはこのような課題を解決するために用いられるが、特許文献１のように弁体にヒータを内蔵したバルブにおいても、バルブ内部の温度の不均一性により条件によってはガスの液化・蒸着が生じることがある。このとき、液化・蒸着は主にベローズ上部において生じるため、バルブ上方からの放熱を防ぎバルブ内部全体を均一に加熱することが望まれる。   When the valve is used under high temperature conditions, depending on the gas flowing through the valve, temperature non-uniformity causes liquefaction and deposition of the gas inside the valve. Although a valve with a built-in heater is used to solve such a problem, even in a valve having a heater built in the valve body as in Patent Document 1, liquefaction of gas may be caused depending on the conditions due to the temperature non-uniformity inside the valve. Deposition can occur. At this time, since liquefaction and deposition mainly occur at the upper portion of the bellows, it is desirable to prevent heat radiation from above the valve and uniformly heat the entire inside of the valve.

本発明（１）は、ガスの入口流路、出口流路およびこれらの流路の間に形成された弁座を有するバルブボディと、前記弁座と当接・離間する弁体を下端部に有する弁棒と、前記バルブボディの上部に気密に固定され、前記弁棒が貫通する蓋部材と、前記弁棒および前記蓋部材に溶着固定されるベローズと、を有するヒータ内蔵バルブであって、前記上部蓋部材は、少なくとも１つのヒータ挿入孔を有し、前記ヒータ挿入孔に少なくとも１つの棒状ヒータが挿入配置されるヒータ内蔵バルブである。   According to the present invention (1), a valve body having an inlet flow path for gas, an outlet flow path, and a valve seat formed between these flow paths, and a valve body in contact with and separated from the valve seat at the lower end A heater built-in valve comprising: a valve stem having; a lid member airtightly fixed to an upper portion of the valve body; and a cover member through which the valve stem passes, and a bellows welded and fixed to the valve stem and the lid member, The upper lid member is a heater built-in valve having at least one heater insertion hole, and at least one rod-like heater being inserted into the heater insertion hole.

本発明（１）は、この構造を有しているので、バルブ内部の温度の不均一性が是正され、ベローズ上部でバルブを通過するガスの液化や蒸着を防止することができる。また、蓋部材にヒータ挿入孔が備えられ、このヒータ挿入孔に棒状ヒータを挿入するだけでよいので、ヒータの取り換えが容易となる。   Since the present invention (1) has this structure, temperature non-uniformity within the valve can be corrected, and liquefaction and deposition of gas passing through the valve can be prevented at the upper portion of the bellows. Further, since the lid member is provided with a heater insertion hole, and it is only necessary to insert a rod-like heater into the heater insertion hole, replacement of the heater becomes easy.

本発明（２）は、本発明（１）に記載のヒータ内蔵バルブであって、さらに前記弁棒内部に配置されるヒータを設けたヒータ内蔵バルブである。   The present invention (2) is the heater built-in valve according to the present invention (1), further comprising a heater built-in heater disposed inside the valve rod.

本発明（２）は、本発明（１）の蓋部材内部に備えられた棒状ヒータ以外に、弁棒内部にもヒータが設けられているので、ヒータ内部の温度は、本発明（１）と比べてより均一となり、バルブ内部の温度の不均一性が改善され、バルブを通過するガスの液化や蒸着をさらに防止することができる。   In the invention (2), in addition to the rod-like heater provided inside the lid member of the invention (1), a heater is provided also inside the valve rod, so the temperature inside the heater corresponds to the invention (1) In comparison, the uniformity of the temperature inside the valve is improved, and the liquefaction and deposition of the gas passing through the valve can be further prevented.

本発明（３）は、前記ヒータ挿入孔が、前記蓋部材の側面に設けられている本発明（１）または（２）に記載のヒータ内蔵バルブである。   The present invention (3) is the valve with a built-in heater according to the present invention (1) or (2), wherein the heater insertion hole is provided on the side surface of the lid member.

本発明（３）によれば、ヒータ挿入孔が蓋部材の側面に設けられているので、ヒータの交換や修理等の際にヒータを抜き取り、再挿入をする必要が生じた場合、バルブの分解が必要でなく、その作業が容易となる。   According to the invention (3), since the heater insertion hole is provided on the side surface of the lid member, when it is necessary to remove the heater and reinsert it at the time of replacement or repair of the heater, the valve is disassembled. Is not necessary, and the work becomes easy.

本発明（４）は、前記ヒータ挿入孔は貫通孔である本発明（３）に記載のヒータ内蔵バルブである。   The present invention (4) is the heater built-in valve according to the present invention (3), wherein the heater insertion hole is a through hole.

本発明（４）によれば、ヒータ挿入孔は両端で開口しているので、ヒータはそのどちら側の開口部からでも挿入・抜き取りが可能となり、バルブの設置環境に起因するヒータの出し入れの困難さを少なくすることができる。   According to the invention (4), since the heater insertion hole is opened at both ends, the heater can be inserted / extracted from the opening on either side, and it is difficult to take in / out the heater due to the installation environment of the valve Can be reduced.

本発明（５）は、ヒータ挿入孔が弁棒を挟んで平行に設けられた少なくとも２つの孔である本発明（３）に記載のヒータ内蔵バルブである。   The present invention (5) is the heater built-in valve according to the present invention (3), wherein the heater insertion holes are at least two holes provided in parallel with the valve rod in between.

本発明（５）によれば、ヒータ挿入孔は弁棒を挟んで２つ以上設けられているので、予め予想される数のヒータ挿入孔を穿孔しておけば、液化・蒸着が他の種類のガスに比べて高いようなガスをバルブに流す場合、使用していないヒータ挿入孔にヒータを挿入してヒータ増設を容易に行うことができる。   According to the invention (5), since two or more heater insertion holes are provided with the valve rod in between, if the heater insertion holes of the expected number are drilled in advance, other types of liquefaction / deposition will occur. In the case where a gas that is higher than the gas described above is allowed to flow through the valve, it is possible to easily install a heater by inserting a heater into a heater insertion hole that is not in use.

この発明のベローズを加熱するヒータを有するヒータ内蔵バルブによると、バルブを通過するガスの液化・蒸着が従来のヒータ内蔵バルブと比べてより少なくすることができ、ヒータの交換等も容易に行うことができる。   According to the heater built-in valve having a heater for heating the bellows of the present invention, the liquefaction and deposition of the gas passing through the valve can be reduced compared to the conventional heater built-in valve, and replacement of the heater can be easily performed. Can.

図１は、この発明によるヒータ内蔵バルブの実施例１を示す。FIG. 1 shows a first embodiment of a heater built-in valve according to the present invention. 図２は、実施例１のヒータ内蔵バルブの蓋部材を上面から見た時の平面図を示す。FIG. 2 is a plan view of the cover member of the heater built-in valve according to the first embodiment as viewed from above. 図３は、実施例２のヒータ内蔵バルブのバルブボディ、蓋部材あたりの斜視図を示す。FIG. 3 is a perspective view of a valve body and a lid member of the heater built-in valve of the second embodiment.

以下、図面を参照して、本発明の好適な実施例を例示的に詳しく説明する。但し、この実施例に記載されている構成部品の相対的配置等は特に特定的な記載がない限りは、この発明の範囲をそれに限定する趣旨ではなく、単なる説明例に過ぎない。また、便宜的に図面上での方向によって部材等の方向を上下左右と指称することがあるが、これらは本発明の範囲を限定するものではない。   Hereinafter, preferred embodiments of the present invention will be exemplarily described in detail with reference to the drawings. However, the relative arrangement and the like of the component parts described in this embodiment are not intended to limit the scope of the present invention thereto unless specifically described, and are merely illustrative examples. Further, for convenience, the directions of members and the like may be referred to as upper, lower, left, and right depending on the directions in the drawings, but these do not limit the scope of the present invention.

図１は、この発明によるヒータ内蔵バルブの実施例１を示すものであり、このバルブ1は、ヒータ内蔵真空開閉バルブとも呼ばれるものである。   FIG. 1 shows Embodiment 1 of a heater built-in valve according to the present invention, and this valve 1 is also called a heater built-in vacuum switching valve.

バルブボディ10の内部には、入口流路11と出口流路12が備えられ、その間に弁座13が形成されている。流体は左方向から入り、バルブが開いている状態では下方向に流れていく構成となっている。   An inlet channel 11 and an outlet channel 12 are provided inside the valve body 10, and a valve seat 13 is formed therebetween. The fluid enters from the left and flows downward when the valve is open.

弁の開閉状態は、弁座13と当接する弁体21の移動によって制御され、弁座13と弁体21が密接しているときは流体の流れは遮断され、離間しているときは、流体は左方向からバルブに流入して、バルブの下方向に流れ出るようになっている。   The open / close state of the valve is controlled by the movement of the valve body 21 in contact with the valve seat 13. When the valve seat 13 and the valve body 21 are in close contact, the flow of fluid is shut off. Flows into the valve from the left direction and flows out downward from the valve.

弁体21は、弁棒20の下端部に形成されており、弁棒20の内部にはヒータ収容空間22が形成され、その中に第１カートリッジヒータ35がはめ込まれている。なお、ヒータは弁棒内部をヒーティング可能であれば何でも良く、シースヒータ等も用いることが可能である。   The valve body 21 is formed at the lower end portion of the valve rod 20, and the heater accommodation space 22 is formed inside the valve rod 20, and the first cartridge heater 35 is inserted therein. Any heater may be used as long as it can heat the inside of the valve rod, and a sheath heater or the like can also be used.

バルブボディ10の上部には、弁棒20が貫通する蓋部材31が設けられている。蓋部材31にはベローズ39の一端が溶接され、ベローズ39の他端が弁棒に設けられたベローズフランジ30に溶接されることで、流体の外部へのリークが防止されている。   At the upper part of the valve body 10, a lid member 31 through which the valve rod 20 passes is provided. One end of the bellows 39 is welded to the lid member 31, and the other end of the bellows 39 is welded to the bellows flange 30 provided on the valve rod, so that the leakage of the fluid to the outside is prevented.

蓋部材31には、棒状の第２カートリッジヒータ36C, 36Dが挿入されるヒータ挿入貫通孔34C, 34Dが設けられている。ヒータ挿入貫通孔34は、正面から背面に向かう方向に左右に穿孔された２箇所のヒータ挿入貫通孔34A, 34Bと、左方から右方へ向かう方向に（点線で示す）ヒータ挿入貫通孔34Cと貫通孔34Cの背後側（図１においては紙面の後ろ側）に隠れている34Dである。   The lid member 31 is provided with heater insertion through holes 34C, 34D into which rod-shaped second cartridge heaters 36C, 36D are inserted. The heater insertion through holes 34 are two heater insertion through holes 34A and 34B bored on the left and right in the direction from the front to the back, and the heater insertion through holes 34C in the direction from the left to the right (indicated by dotted lines). And 34D hidden behind the through hole 34C (rear side in the drawing of FIG. 1).

図１は、前側のヒータ挿入貫通孔34Cに右から第２カートリッジヒータ36Cが挿入され、後ろ側のヒータ挿入貫通孔34Dに左から第２カートリッジヒータ36Dが挿入されている状態を示し、左側のヒータ挿入貫通孔34Aおよび右側のヒータ挿入貫通孔34Bには第２カートリッジヒータ36は挿入されていない状態を示している。そして挿入された第２カートリッジヒータ36には動力ライン40aが接続されている。なお、ヒータ挿入貫通孔34に挿入されるヒータはカートリッジヒータに限らず、棒状のものであればよい。   FIG. 1 shows a state in which the second cartridge heater 36C is inserted from the right into the heater insertion through hole 34C on the front side and the second cartridge heater 36D is inserted from the left into the heater insertion through hole 34D on the rear side. The second cartridge heater 36 is not inserted into the heater insertion through hole 34A and the right heater insertion through hole 34B. A power line 40 a is connected to the inserted second cartridge heater 36. The heater inserted into the heater insertion through hole 34 is not limited to the cartridge heater, and may be a rod-like one.

アクチュエータ（符号略）はステー51を介してカバー14に支持されて、ステム50を介して弁棒20を電動力または電磁力で上下方向に動作させる。   An actuator (symbol is omitted) is supported by the cover 14 through the stay 51, and operates the valve rod 20 in the vertical direction by the electric force or the electromagnetic force through the stem 50.

バルブボディ10の外周には、入口流路用バンドヒータ43a、出口流路用バンドヒータ43bおよびバルブボディ用バンドヒータ43cが巻かれている。これらのバンドヒータによっても、バルブボディ10の外部からバルブボディ10の内部を加熱することもできる。   An inlet channel band heater 43a, an outlet channel band heater 43b, and a valve body band heater 43c are wound around the outer periphery of the valve body 10. These band heaters can also heat the inside of the valve body 10 from the outside of the valve body 10.

また、流すガスの種類によって流すガスの液化・蒸着の防止のために追加でヒータを追加したい場合がある。本実施例１の発明では、蓋部材31に追加のヒータ挿入貫通孔34A, 34Bがあるので、新たなヒータ挿入孔を設けるための設計変更や追加工が必要でない。   Also, depending on the type of flowing gas, it may be desirable to add an additional heater to prevent liquefaction and deposition of flowing gas. In the invention of the first embodiment, since the lid member 31 has the additional heater insertion through holes 34A and 34B, there is no need for design change or additional processing for providing a new heater insertion hole.

図２は、Ａ−Ａから見た矢視図である。蓋部材31に、ヒータ挿入貫通孔34（34A, 34B, 34C, 34D）が４本、図面で縦向きに２本34A, 34B、横向きに２本34C, 34Dが穿孔され、縦に穿孔された２本34A, 34Bと、横に穿孔された２本34C, 34Dとは、図１に示すヒータ内蔵バルブ1の上下方向で異なった高さに位置している。蓋部材31は、ボルト44によってバルブボディ10に固定されている。実施例１においては、第２カートリッジヒータ36Aおよび36Bは挿入されていないので、図２においては二点鎖線で記載している。   FIG. 2 is a view from the arrow AA. Four heater insertion through holes 34 (34A, 34B, 34C, 34D), two vertically 34A, 34B, and two horizontally 34C, 34D in the cover member 31 are drilled vertically. The two 34A, 34B and the two holes 34C, 34D perforated in the horizontal direction are located at different heights in the vertical direction of the heater built-in valve 1 shown in FIG. The lid member 31 is fixed to the valve body 10 by a bolt 44. In the first embodiment, since the second cartridge heaters 36A and 36B are not inserted, they are indicated by two-dot chain lines in FIG.

蓋部材31の上面にはカバー14が取り付けられ、蓋部材31とカバー14とは、ボルト42によって固定され、ステー51の下端部がカバー14の上面に固定されている。   The cover 14 is attached to the upper surface of the lid member 31, the lid member 31 and the cover 14 are fixed by bolts 42, and the lower end portion of the stay 51 is fixed to the upper surface of the cover 14.

蓋部材31の右側面には、熱電対45が挿入されており、第２カートリッジヒータ36近傍の温度がモニターされている。   A thermocouple 45 is inserted in the right side surface of the lid member 31 and the temperature in the vicinity of the second cartridge heater 36 is monitored.

図３は、バルブボディ10、蓋部材31近傍の斜視図であり、部分的に断面を示している。図１および図２で説明した個所については省略する。   FIG. 3 is a perspective view of the vicinity of the valve body 10 and the lid member 31 and partially shows a cross section. The parts described in FIGS. 1 and 2 will be omitted.

１ ；ヒータ内蔵バルブ
１０；バルブボディ
１１；入口流路
１２；出口流路
１３；弁座
２０；弁棒
２１；弁体
３１；蓋部材
３４；ヒータ挿入貫通孔
３５；第１カートリッジヒータ
３６；第２カートリッジヒータ
３９；ベローズ 1; heater built-in valve 10; valve body 11; inlet flow passage 12; outlet flow passage 13; valve seat 20; valve rod 21; valve body 31; lid member 34; heater insertion through hole 35; first cartridge heater 36; 2 cartridge heater 39; bellows

Claims (5)

ガスの入口流路、出口流路およびこれらの流路の間に形成された弁座を有するバルブボディと、
前記弁座と当接・離間する弁体を下端部に有する弁棒と、
前記バルブボディの上部に気密に固定され、前記弁棒が貫通する蓋部材と、
前記弁棒および前記蓋部材に溶着固定されるベローズと、を有するヒータ内蔵バルブであって、
前記蓋部材は、少なくとも１つのヒータ挿入孔を有し、
前記ヒータ挿入孔に少なくとも１つの棒状ヒータが挿入配置されるヒータ内蔵バルブ。 A valve body having a gas inlet passage, an outlet passage, and a valve seat formed between the passages;
A valve rod having at its lower end a valve body that contacts and separates from the valve seat;
A lid member airtightly fixed to an upper portion of the valve body and through which the valve rod passes;
A heater built-in valve having a bellows fixed to the valve rod and the lid member by welding.
The lid member has at least one heater insertion hole,
A heater built-in valve in which at least one rod-like heater is inserted into the heater insertion hole. 前記弁棒内部にヒータが設けられている請求項１に記載のヒータ内蔵バルブ。   The heater built-in valve according to claim 1, wherein a heater is provided inside the valve rod. 前記ヒータ挿入孔が前記蓋部材の側面に設けられている請求項１または２に記載のヒータ内蔵バルブ。   The heater built-in valve according to claim 1 or 2, wherein the heater insertion hole is provided on a side surface of the lid member. 前記ヒータ挿入孔が貫通孔である請求項３に記載のヒータ内蔵バルブ。   The heater built-in valve according to claim 3, wherein the heater insertion hole is a through hole. 前記ヒータ挿入孔は前記弁棒を挟んで平行に設けられた少なくとも２つの孔である請求項３に記載のヒータ内蔵バルブ。

The heater incorporated valve according to claim 3, wherein the heater insertion hole is at least two holes provided in parallel with the valve rod in between.

JP2017191770A 2017-09-29 2017-09-29 Valve with built-in heater Active JP7054502B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017191770A JP7054502B2 (en) 2017-09-29 2017-09-29 Valve with built-in heater
TW107126286A TWI761563B (en) 2017-09-29 2018-07-30 Valve with built-in heater
CN201811139592.XA CN109578598A (en) 2017-09-29 2018-09-28 Valve built in heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017191770A JP7054502B2 (en) 2017-09-29 2017-09-29 Valve with built-in heater

Publications (2)

Publication Number Publication Date
JP2019065957A true JP2019065957A (en) 2019-04-25
JP7054502B2 JP7054502B2 (en) 2022-04-14

Family

ID=65919966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017191770A Active JP7054502B2 (en) 2017-09-29 2017-09-29 Valve with built-in heater

Country Status (3)

Country Link
JP (1) JP7054502B2 (en)
CN (1) CN109578598A (en)
TW (1) TWI761563B (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5915410A (en) * 1996-02-01 1999-06-29 Zajac; John Pneumatically operated positive shutoff throttle valve
JP2003161382A (en) * 2001-11-26 2003-06-06 Smc Corp Poppet valve with heater
US20040011404A1 (en) * 2002-07-19 2004-01-22 Ku Vincent W Valve design and configuration for fast delivery system
JP2004156720A (en) * 2002-11-07 2004-06-03 Smc Corp Poppet valve with heater
JP2004270716A (en) * 2003-03-05 2004-09-30 Ckd Corp Fluid control valve
JP2016180495A (en) * 2015-03-25 2016-10-13 Ckd株式会社 Vacuum valve

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4487135B2 (en) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 Fluid control device
JP3778851B2 (en) * 2001-12-25 2006-05-24 Ｓｍｃ株式会社 Poppet valve with heater
JP4596409B2 (en) * 2003-04-21 2010-12-08 株式会社東京技術研究所 Heater unit for valve mounting
JP4923105B2 (en) * 2007-04-02 2012-04-25 株式会社フジキン Built-in heater valve
TW200949112A (en) * 2008-01-23 2009-12-01 Ham Let Motoyama Japan Ltd Highly clean and hot valve
CN203322449U (en) * 2013-07-04 2013-12-04 瑞立集团瑞安汽车零部件有限公司 Antifreezing electric control water drainage valve
CN203770823U (en) * 2014-04-23 2014-08-13 宁波市镇海华力液压机电有限公司 Throttle valve with heating function

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5915410A (en) * 1996-02-01 1999-06-29 Zajac; John Pneumatically operated positive shutoff throttle valve
JP2003161382A (en) * 2001-11-26 2003-06-06 Smc Corp Poppet valve with heater
US20040011404A1 (en) * 2002-07-19 2004-01-22 Ku Vincent W Valve design and configuration for fast delivery system
JP2004156720A (en) * 2002-11-07 2004-06-03 Smc Corp Poppet valve with heater
JP2004270716A (en) * 2003-03-05 2004-09-30 Ckd Corp Fluid control valve
JP2016180495A (en) * 2015-03-25 2016-10-13 Ckd株式会社 Vacuum valve

Also Published As

Publication number Publication date
TWI761563B (en) 2022-04-21
CN109578598A (en) 2019-04-05
JP7054502B2 (en) 2022-04-14
TW201920869A (en) 2019-06-01

Similar Documents

Publication Publication Date Title
JP6195581B2 (en) Turbine engine fuel injector
TWI444554B (en) Slit valve having increased flow uniformity
WO2011002054A1 (en) Heating cooking appliance
US9133960B2 (en) Fluid control valves
KR101444039B1 (en) Substrate processing apparatus and heating equipment
JP2019065957A (en) Valve with built-in heater
EP2628984A1 (en) Improved three-way diverter valve
JP2016534289A (en) Valve for turbomachine
JP2012195077A (en) Slit electrode and charged particle beam generation device equipped with the same
CN107923551A (en) Valve
JP2018138697A (en) High-temperature treatment chamber lid
FI129627B (en) Atomic layer deposition apparatus
KR102470827B1 (en) Evaporator for ice making
KR20090095915A (en) Valve Assembly and Vacuum Processing Apparatus having the Same
KR101197398B1 (en) Bracket for valve
US20170299179A1 (en) Safety Valve device in Gas Burning Apparatus
US9739203B2 (en) Fuel metering valve and method of managing fuel in a metering valve
JP2019108900A (en) Steam valve
KR100739590B1 (en) Apparatus for heating chamber gas
JP2012167796A (en) Pilot type steam trap
KR102243268B1 (en) Heater
KR102204026B1 (en) Ceramic showerhead and chemical vapor deposition device with the same
JP6483866B2 (en) Exhaust heat recovery device
KR20240007597A (en) Substrate processing apparatus, substrate processing method and gas supply assembly
KR200225098Y1 (en) Structure of Solenoid Valve

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200923

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210924

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20211005

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211119

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220118

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220301

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220328

R150 Certificate of patent or registration of utility model

Ref document number: 7054502

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150